[go: up one dir, main page]

ES481010A1 - Un metodo mejorado para la formacion de un deposito de una materia vitrea sobre una superficie solida. - Google Patents

Un metodo mejorado para la formacion de un deposito de una materia vitrea sobre una superficie solida.

Info

Publication number
ES481010A1
ES481010A1 ES481010A ES481010A ES481010A1 ES 481010 A1 ES481010 A1 ES 481010A1 ES 481010 A ES481010 A ES 481010A ES 481010 A ES481010 A ES 481010A ES 481010 A1 ES481010 A1 ES 481010A1
Authority
ES
Spain
Prior art keywords
optical fibre
glass
preform
silica optical
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES481010A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia Spain SA
Original Assignee
Alcatel Espana SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10207778&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES481010(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel Espana SA filed Critical Alcatel Espana SA
Publication of ES481010A1 publication Critical patent/ES481010A1/es
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Un método mejorado para la formación de un depósito de una materia vítrea sobre una superficie sólida o, más concretamente, de un metal o de la materia original del mismo por medio de una reacción de vapor químico inducida por radiofrecuencia, haciendo uso de una plasma mantenido inductivamente el cual es introducido con gas a una presión comprendida en la gama de 0,1 a 50 torrs, con el que la descarga del plasma es tal que su dimensión mayor es notablemente más pequeña que la longitud de onda en espacio libre correspondiente a la radiofrecuencia empleada para mantener el plasma, siendo tales la presión y la densidad de energía del plasma que el depósito formado es no poroso.
ES481010A 1978-05-30 1979-05-29 Un metodo mejorado para la formacion de un deposito de una materia vitrea sobre una superficie solida. Expired ES481010A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB24187/78A GB1603949A (en) 1978-05-30 1978-05-30 Plasma deposit

Publications (1)

Publication Number Publication Date
ES481010A1 true ES481010A1 (es) 1980-02-01

Family

ID=10207778

Family Applications (1)

Application Number Title Priority Date Filing Date
ES481010A Expired ES481010A1 (es) 1978-05-30 1979-05-29 Un metodo mejorado para la formacion de un deposito de una materia vitrea sobre una superficie solida.

Country Status (10)

Country Link
US (1) US4349373A (es)
EP (1) EP0005963B1 (es)
JP (1) JPS54156828A (es)
AR (1) AR222334A1 (es)
AU (1) AU526306B2 (es)
BE (1) BE876629A (es)
DE (1) DE2965131D1 (es)
ES (1) ES481010A1 (es)
FR (1) FR2427310B1 (es)
GB (1) GB1603949A (es)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3010314C2 (de) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen
US4280829A (en) * 1980-05-12 1981-07-28 Corning Glass Works Apparatus for controlling internal pressure of a bait tube
NL8102149A (nl) * 1981-05-01 1982-12-01 Philips Nv Werkwijze en inrichting voor de inwendige bedekking van een buis door reactieve afscheiding uit een gasmengsel onder invloed van een plasma.
DE3204846A1 (de) * 1982-02-11 1983-08-18 Schott Glaswerke, 6500 Mainz Plasmaverfahren zur innenbeschichtung von glasrohren
DE3206175A1 (de) * 1982-02-20 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung einer vorform, aus der optische fasern ziehbar sind
DE3206177A1 (de) * 1982-02-20 1983-08-25 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung einer vorform, aus der optische fasern ziehbar sind
IT1155119B (it) * 1982-03-05 1987-01-21 Cselt Centro Studi Lab Telecom Procedimento e dispositivo per la produzione di preforme per fibre ottiche
US4440556A (en) * 1982-06-23 1984-04-03 International Telephone And Telegraph Corporation Optical fiber drawing using plasma torch
NL8302127A (nl) * 1983-06-15 1985-01-02 Philips Nv Werkwijze en inrichting voor de vervaardiging van optische vezels.
DE3330910A1 (de) * 1983-08-27 1985-03-07 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zum herstellen eines reaktionsgefaesses fuer kristallzuchtzwecke
US4718929A (en) * 1983-10-21 1988-01-12 Corning Glass Works Vapor phase method for making metal halide glasses
US4557742A (en) * 1984-07-02 1985-12-10 Polaroid Corporation Polarized optical fiber and method of forming same
GB2162168B (en) * 1984-07-25 1988-06-29 Stc Plc Optical fibre manufacture
US4597787A (en) * 1984-11-13 1986-07-01 Ispra Fibroptics Industries Herzlia Ltd. Manufacture of optical fibre preforms
FR2584101B1 (fr) * 1985-06-26 1987-08-07 Comp Generale Electricite Dispositif pour fabriquer un composant optique a gradient d'indice de refraction
US5188648A (en) * 1985-07-20 1993-02-23 U.S. Philips Corp. Method of manufacturing optical fibres
JPH01183432A (ja) * 1988-01-18 1989-07-21 Sumitomo Electric Ind Ltd 石英ガラス管の加熱方法
DE3830089A1 (de) * 1988-09-03 1990-03-15 Schott Glaswerke Verfahren zur herstellung von planaren, mit dielektrischen schichtsystemen versehenen glassubstraten
DE3830364C1 (es) * 1988-09-07 1990-01-18 Schott Glaswerke, 6500 Mainz, De
DE19959845B4 (de) * 1998-12-10 2012-11-29 Stefan Laure Plasmagenerator
WO2002084345A1 (en) * 2001-04-12 2002-10-24 Omniguide Communications High index-contrast fiber waveguides and applications
ATE254192T1 (de) * 2001-04-27 2003-11-15 Europ Economic Community Verfahren und vorrichtung zur sequentiellen plasmabehandlung
US20040137168A1 (en) * 2002-11-22 2004-07-15 Vladimir Fuflyigin Dielectric waveguide and method of making the same
US7793612B2 (en) 2003-08-01 2010-09-14 Silica Tech, Llc Ring plasma jet method and apparatus for making an optical fiber preform
US20050022561A1 (en) * 2003-08-01 2005-02-03 Guskov Michael I. Ring plasma jet method and apparatus for making an optical fiber preform
KR20060098740A (ko) * 2005-03-07 2006-09-19 삼성전자주식회사 플라즈마 장치와 그를 이용한 광섬유 모재 제작 장치
US8252387B2 (en) * 2007-12-10 2012-08-28 Ofs Fitel, Llc Method of fabricating optical fiber using an isothermal, low pressure plasma deposition technique
US9002162B2 (en) * 2013-03-15 2015-04-07 Ofs Fitel, Llc Large core multimode optical fibers
NL2011077C2 (en) * 2013-07-01 2015-01-05 Draka Comteq Bv A method for manufacturing a precursor for a primary preform for optical fibres by means of an internal plasma chemical vapour deposition (pcvd) process.
US11554978B2 (en) * 2013-11-27 2023-01-17 Corning Incorporated Method for reducing processing time for optical fiber preforms
US20160023939A1 (en) * 2014-07-24 2016-01-28 Ofs Fitel, Llc Isothermal plasma cvd system for reduced taper in optical fiber preforms
WO2016100255A1 (en) 2014-12-16 2016-06-23 Corning Incorporated Method of making an optical fiber preform and handle for use in making of optical fiber preform

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1104935A (en) * 1964-05-08 1968-03-06 Standard Telephones Cables Ltd Improvements in or relating to a method of forming a layer of an inorganic compound
US3655438A (en) * 1969-10-20 1972-04-11 Int Standard Electric Corp Method of forming silicon oxide coatings in an electric discharge
GB1427327A (en) * 1972-06-08 1976-03-10 Standard Telephones Cables Ltd Glass optical fibres
US4145456A (en) * 1974-09-14 1979-03-20 Dieter Kuppers Method of producing internally coated glass tubes for the drawing of fibre optic light conductors
DE2444100C3 (de) * 1974-09-14 1979-04-12 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern
GB1578826A (en) * 1976-03-25 1980-11-12 Western Electric Co Methods for fabricating optical fibre preforms
FR2351064A1 (fr) 1976-05-12 1977-12-09 France Etat Procede et equipement d'elaboration de preformes pour fibres optiques
DE2642949C3 (de) * 1976-09-24 1980-11-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern
US4125389A (en) * 1977-02-10 1978-11-14 Northern Telecom Limited Method for manufacturing an optical fibre with plasma activated deposition in a tube
CA1080562A (en) * 1977-02-10 1980-07-01 Frederick D. King Method of and apparatus for manufacturing an optical fibre with plasma activated deposition in a tube
US4262035A (en) * 1980-03-07 1981-04-14 Bell Telephone Laboratories, Incorporated Modified chemical vapor deposition of an optical fiber using an rf plasma

Also Published As

Publication number Publication date
BE876629A (fr) 1979-11-30
AR222334A1 (es) 1981-05-15
AU4732079A (en) 1979-12-06
JPS54156828A (en) 1979-12-11
FR2427310B1 (fr) 1985-06-28
US4349373A (en) 1982-09-14
EP0005963A1 (en) 1979-12-12
DE2965131D1 (en) 1983-05-11
EP0005963B1 (en) 1983-04-06
GB1603949A (en) 1981-12-02
FR2427310A1 (fr) 1979-12-28
AU526306B2 (en) 1983-01-06

Similar Documents

Publication Publication Date Title
ES481010A1 (es) Un metodo mejorado para la formacion de un deposito de una materia vitrea sobre una superficie solida.
AU530122B2 (en) Method of producing optical fibres
CA1080562A (en) Method of and apparatus for manufacturing an optical fibre with plasma activated deposition in a tube
US4125389A (en) Method for manufacturing an optical fibre with plasma activated deposition in a tube
EP1000909A3 (de) Verfahren zur Herstellung einer Vorform für eine optische Faser und für die Durchführung des Verfahrens geeignetes Substratrohr
ATE234947T1 (de) Pcvd-vorrichtung und verfahren zur herstellung einer optischen faser, eines vorform-stabes und eines mantelrohres und die damit hergestellte optische faser
JPS5747740A (en) Manufacture of high purity glass article
EP0154026A3 (en) A monomode optical fibre and a method of manufacture
AU550914B2 (en) Optical fibre preform manufacture
CA1319904C (en) Process for producing preforms for optical fibres and mandrel usable for performing this process, application to the production of monomode optical fibres
ES459377A1 (es) Un metodo mejorado para la fabricacion de una fibra optica.
GB2016445A (en) Manufacturing an optical transmission fibre
ES469930A1 (es) Un metodo mejorado para la fabricacion continua de fibras opticas
DE3160533D1 (en) Process for making a glass coating on the internal surface of a hollow object
JPS55100233A (en) Production of optical fiber base material
JPS54131043A (en) Production of preform for optical fiber
JPS649831A (en) Production of preform for optical fiber
JPS5510468A (en) Production of glass fiber for light communication
JPS54151623A (en) Production of material for optical fiber
JPS5614430A (en) Manufacture of optical fiber base material
JPS55158144A (en) Manufacture of optical fiber base material
JPS5767042A (en) Manufacture of optical fiber
FR2447890A1 (fr) Procede de fabrication de preformes de fibres optiques a gradient d'indice, et dispositif de mise en oeuvre de ce procede
JPS57140327A (en) Manufacture of preform for optical fiber
ES8703818A1 (es) Un proceso de deposicion de fase de vapor mejorado