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ES2034288T3 - Dispositivo para la evaporacion bajo vacio de un metal en continuo. - Google Patents

Dispositivo para la evaporacion bajo vacio de un metal en continuo.

Info

Publication number
ES2034288T3
ES2034288T3 ES198888400522T ES88400522T ES2034288T3 ES 2034288 T3 ES2034288 T3 ES 2034288T3 ES 198888400522 T ES198888400522 T ES 198888400522T ES 88400522 T ES88400522 T ES 88400522T ES 2034288 T3 ES2034288 T3 ES 2034288T3
Authority
ES
Spain
Prior art keywords
plate
valve
crucible
deposition material
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198888400522T
Other languages
English (en)
Inventor
Olivier Remondiere
Patrick Bourquin
Rene Pailler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National dEtudes Spatiales CNES
Original Assignee
Centre National dEtudes Spatiales CNES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National dEtudes Spatiales CNES filed Critical Centre National dEtudes Spatiales CNES
Application granted granted Critical
Publication of ES2034288T3 publication Critical patent/ES2034288T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

EL SUSTRATO A REVESTIR (12) DESFILA EN EL INTERIOR DE UN RECINTO A VACIO (10). EL MATERIAL A DEPOSITAR (52) ESTA ALMACENADO EN UN TANQUE (50) CERRADO EN SU PARTE INFERIOR POR UNA PLACA (54). UN CABLE (42) UNE AQUELLA A UNA VALVULA (40) QUE CIERRA EL ORIFICIO DE ALIMENTACION DE UN CRISOL (18) CALENTADO A UNA TEMPERATURA QUE PERMITE LA EVAPORACION DEL MATERIAL (52). UN DISPOSITIVO DE MANDO (62) CON ELECTROIMANES PERMITE HACER BASCULAR LA PLACA (54) Y BAJAR LA VALVULA (40); UNA CIERTA CANTIDAD DE POLVO CAE EN EL CRISOL Y DESPUES LA PLACA (54) Y LA VALVULA (40) SE LLEVAN A LA POSICION DE CIERRE. UNA REJILLA (32) CUYAS MALLAS TIENEN DIMENSIONES INFERIORES A AQUELLAS DE LOS GRANOS DE POLVO PRESENTES EN EL CRISOL PERMITE EL PASO DEL VAPOR Y EL DEPOSITO SOBRE EL SUSTRATO (12). APLICACION A LA REALIZACION DE FIBRAS DE CARBONO RECUBIERTAS DE MAGNESIO.
ES198888400522T 1987-03-06 1988-03-04 Dispositivo para la evaporacion bajo vacio de un metal en continuo. Expired - Lifetime ES2034288T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8703092A FR2611746B1 (fr) 1987-03-06 1987-03-06 Dispositif d'evaporation sous vide d'un metal en continu

Publications (1)

Publication Number Publication Date
ES2034288T3 true ES2034288T3 (es) 1993-04-01

Family

ID=9348693

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198888400522T Expired - Lifetime ES2034288T3 (es) 1987-03-06 1988-03-04 Dispositivo para la evaporacion bajo vacio de un metal en continuo.

Country Status (6)

Country Link
US (1) US4880960A (es)
EP (1) EP0283374B1 (es)
AT (1) ATE79417T1 (es)
DE (1) DE3873568T2 (es)
ES (1) ES2034288T3 (es)
FR (1) FR2611746B1 (es)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10256038A1 (de) * 2002-11-30 2004-06-17 Applied Films Gmbh & Co. Kg Bedampfungsvorrichtung
DE102004041854B4 (de) * 2004-04-27 2008-11-13 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur thermischen Vakuumbeschichtung
US20080128094A1 (en) * 2004-10-21 2008-06-05 Tatsuo Fukuda Evaporation Source Device
DE502005001749D1 (de) * 2005-07-28 2007-11-29 Applied Materials Gmbh & Co Kg Bedampfervorrichtung
EP1752555A1 (de) 2005-07-28 2007-02-14 Applied Materials GmbH & Co. KG Verdampfervorrichtung
ITMI20060444A1 (it) * 2006-03-13 2007-09-14 Getters Spa Uso di composizioni magnesio-rame per l'evaporazione di magnesio e dispensatori di magnesio
US20090020070A1 (en) * 2007-07-19 2009-01-22 Michael Schafer Vacuum evaporation apparatus for solid materials
TWI564427B (zh) * 2009-12-18 2017-01-01 財團法人工業技術研究院 聚對二甲苯薄膜的形成方法
EP2369033A1 (de) 2010-03-26 2011-09-28 Saint-Gobain Glass France Verfahren zum Nachfüllen einer Verdampferkammer
EP2371991B1 (de) 2010-03-26 2013-01-30 Saint-Gobain Glass France Verfahren zum diskontinuierlichen Nachfüllen einer Selenverdampferkammer
EP2369034B1 (de) 2010-03-26 2013-01-30 Saint-Gobain Glass France Verfahren zum Nachfüllen einer Selenverdampferkammer
US10184168B2 (en) * 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
KR102098455B1 (ko) * 2017-12-26 2020-04-07 주식회사 포스코 연속 증착 장치 및 연속 증착 방법
WO2020114580A1 (en) * 2018-12-04 2020-06-11 Applied Materials, Inc. Evaporation apparatus for evaporating a material and method for evaporating a material with an evaporation apparatus
WO2020194631A1 (ja) * 2019-03-27 2020-10-01 シャープ株式会社 蒸着装置
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen
DE102020118015A1 (de) * 2020-07-08 2022-01-13 Thyssenkrupp Steel Europe Ag Beschichtungsvorrichtung zum Ablagern eines Beschichtungsmaterials auf einem Substrat
DE102021100060A1 (de) 2021-01-05 2022-07-07 Thyssenkrupp Steel Europe Ag Beschichtungsanordnung
WO2024000569A1 (en) * 2022-07-01 2024-01-04 China Triumph International Engineering Co., Ltd. Device for evaporating of a coating material and use of it

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL78611C (es) * 1951-11-10
US2793609A (en) * 1953-01-26 1957-05-28 British Dielectric Res Ltd Means for the deposition of materials by evaporation in a vacuum
GB900205A (en) * 1957-07-15 1962-07-04 Richard John Fletcher Improvements in and relating to sources for the evaporation of metals and other materials under vacuum
GB1052595A (es) * 1964-06-30
US3563202A (en) * 1969-06-25 1971-02-16 Pennwalt Corp Mobile vbaporative firing source
US4395179A (en) * 1976-03-10 1983-07-26 Davy Inc. Apparatus and method for charging material into a receptacle
DE2916080C2 (de) * 1979-04-20 1984-12-06 Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens

Also Published As

Publication number Publication date
EP0283374B1 (fr) 1992-08-12
DE3873568D1 (de) 1992-09-17
US4880960A (en) 1989-11-14
DE3873568T2 (de) 1993-03-11
FR2611746A1 (fr) 1988-09-09
ATE79417T1 (de) 1992-08-15
EP0283374A1 (fr) 1988-09-21
FR2611746B1 (fr) 1989-06-30

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