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EP4506537B1 - Pompe à vide à spirales - Google Patents

Pompe à vide à spirales

Info

Publication number
EP4506537B1
EP4506537B1 EP24197627.3A EP24197627A EP4506537B1 EP 4506537 B1 EP4506537 B1 EP 4506537B1 EP 24197627 A EP24197627 A EP 24197627A EP 4506537 B1 EP4506537 B1 EP 4506537B1
Authority
EP
European Patent Office
Prior art keywords
spiral
drive shaft
scroll vacuum
component
balancing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP24197627.3A
Other languages
German (de)
English (en)
Other versions
EP4506537C0 (fr
EP4506537A1 (fr
Inventor
Gernot Bernhardt
Maik Schäfer
Heiko Schäfer
Jörn TÖNNISSEN
Jan Hofmann
Sebastian Latta
Jonas Becker
Wolfgang Söhngen
Jannik GERMANN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24197627.3A priority Critical patent/EP4506537B1/fr
Publication of EP4506537A1 publication Critical patent/EP4506537A1/fr
Application granted granted Critical
Publication of EP4506537B1 publication Critical patent/EP4506537B1/fr
Publication of EP4506537C0 publication Critical patent/EP4506537C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0253—Details concerning the base
    • F04C18/0261—Details of the ports, e.g. location, number, geometry
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
    • F04C18/0269—Details concerning the involute wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/807—Balance weight, counterweight
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the present disclosure relates to the improvement of scroll vacuum pumps and scroll vacuum pump systems with multiple scroll vacuum pumps of different designs.
  • the scroll vacuum pumps each comprise a pumping system comprising a fixed spiral component and a movable spiral component that cooperates with the latter to pump effectively, a drive shaft that rotates about an axis of rotation during operation and has an eccentric section for driving the movable spiral component, and an electric drive motor for the drive shaft.
  • the invention relates to a scroll vacuum pump according to the preamble of claim 1 and a scroll vacuum pump according to the preamble of claim 3.
  • Such scroll vacuum pumps are generally known, e.g. from US 2005/084403 A1 , EP 3 153 708 A2 , EP 3 617 511 A2 and EP 3 647 599 A2 .
  • Scroll vacuum pumps are also known as spiral vacuum pumps or spiral conveying devices.
  • the pumping principle underlying a scroll vacuum pump is generally known from the state of the art and will therefore only be briefly explained below.
  • the pumping system of a scroll vacuum pump comprises two nested or interlocked, for example Archimedean, spiral cylinders, which are also referred to simply as spirals.
  • Each spiral cylinder comprises at least one equidistant spiral wall with a support, in particular a plate-shaped support, provided on one end face of the spiral wall.
  • the outer turns of the spiral cylinder for example the two or three outermost turns of the spiral cylinder, can be formed by wall sections that are each at a constant distance from the center of the spirals in the circumferential direction. Even though these wall sections do not strictly speaking form spiral sections but circular sections, in the context of the present disclosure they are attributed to the spiral and referred to as turns of the spiral.
  • the spiral cylinders are inserted into each other in such a way that the two spiral cylinders enclose crescent-shaped or sickle-shaped volumes in sections.
  • One of the two spirals is immobile or fixed in the pump housing, whereas the other spiral, together with its carrier, can be moved along a circular path via the eccentric section of the drive shaft, which is why this spiral, together with its carrier, is also referred to as an orbiter.
  • This movable spiral component thus performs a so-called centrally symmetric oscillation, which is also referred to as "orbiting" or "wobbling.”
  • a crescent-shaped volume enclosed between the spiral cylinders migrates increasingly inward within the spirals as the movable spiral component orbits. This moving volume causes the process gas to be pumped to flow from a radially outer gas inlet. of the pump system is conveyed radially inwards to a gas outlet of the pump system, particularly located in the center of the spiral.
  • the ratio of groove depth to groove width is in a range from 3.7 to 4.2, in particular from 3.8 to 4.1, particularly preferably from 3.85 to 4.0 (claim 1), and/or that the ratio of groove depth to groove width is greater than 3.8, in particular greater than 3.85, or less than 4.0 (claim 3).
  • the pump system can achieve a comparatively high suction capacity.
  • the ratio of groove depth to groove width is constant over the entire spiral arrangement.
  • the groove depth can be 50 mm, for example.
  • the groove depth can be 52 mm. This results in even higher groove depth-to-width ratios, for example, in the range of 4.0 to 4.2, with the same groove width.
  • the eccentric section is connected to the front end of the drive shaft and the drive motor is located on the rear end of the drive shaft.
  • the electric drive motor of the scroll vacuum pump may be an asynchronous motor.
  • a central screw can be provided, the shaft of which coincides with the axis of rotation.
  • the positioning of the balancing weight in the circumferential direction relative to the drive shaft is predetermined by a positioning aid.
  • the positioning aid can comprise a positioning element arranged at a radial distance from the rotational axis, as well as a positioning receptacle for a portion of the positioning element, wherein the positioning element is arranged on the drive shaft and the positioning receptacle is formed on the balancing weight, or vice versa.
  • the positioning element can, for example, be pin-shaped and extend parallel to the rotational axis.
  • the drive motor comprises a radially inner motor rotor and a radially outer motor stator, wherein the motor rotor is clamped between an abutment and the balancing weight placed on the rear end of the drive shaft.
  • the drive motor comprises a radially inner motor rotor, which is connected directly or by means of a radially inner sleeve element that is connected to the motor rotor in a rotationally fixed manner to the Drive shaft is pushed on, in particular with a clearance fit, wherein a form-fitting connection effective in the circumferential direction is provided between the motor rotor and the sleeve element on the one hand and the drive shaft on the other hand.
  • the positive connection can be formed by a positioning element of a positioning aid, which determines the circumferential positioning of the balancing weight relative to the drive shaft.
  • the positioning element and/or the positioning aid can be the positioning element or the positioning aid described above.
  • the inner diameter of the motor rotor can be adapted to the outer diameter of the relevant section of the drive shaft. This can be used, for example, in a system with multiple scroll vacuum pumps. It can be advantageous to use different designs that differ in the inner diameter of the motor rotor. In particular, this makes it possible to use one drive shaft for different motor rotors.
  • the sleeve element can be made of one or more parts.
  • the motor rotor and the sleeve element can be pressed together.
  • the sleeve element can be provided with a circumferential shoulder against which the motor rotor rests. This shoulder can form a support for the motor rotor, which can be clamped between this support and a clamping element.
  • the clamping element can, for example, be mounted on the front side of the rear end of the drive shaft.
  • the clamping element can be a balancing weight, in particular the balancing weight described above.
  • the drive shaft can be provided with a circumferential shoulder against which the sleeve element rests.
  • the shoulder of the drive shaft can form a support for the sleeve element when it is clamped during assembly.
  • the sleeve element can be clamped between this support and a clamping element placed on the front side of the rear end of the drive shaft.
  • the clamping element can be, for example, a balancing weight, in particular the balancing weight described above.
  • the drive shafts of the different scroll vacuum pumps are of identical construction.
  • the scroll vacuum pumps can differ from one another with regard to the inner diameter of a radially inner motor rotor of the drive motor, whereby sleeve elements with different wall thicknesses are provided to adapt the drive shafts to the different inner diameters, each of which is arranged between the drive shaft and the motor rotor.
  • the motor rotors are each connected to the sleeve element in a rotationally fixed manner and are pushed onto the drive shaft with the sleeve element, in particular with a clearance fit.
  • the drive shaft is provided with a front balance weight and a rear balance weight, wherein the front balance weight and the rear balance weight differ from each other with regard to the material from which they are made.
  • the concept of using different materials for the balancing weights creates an additional parameter that can be varied to adapt the balancing weights to the respective conditions.
  • Advantageous further developments can therefore provide for the material of one balancing weight to have a higher density than the material of the other balancing weight.
  • the front balancing weight has the higher density. This allows pump systems of different sizes to be compensated for by balancing weights of different densities while maintaining the same dimensions of the remaining rotating system.
  • the front balancing weight is made of brass and the rear balancing weight is made of steel.
  • the scroll vacuum pumps differ in terms of the pumping system, wherein the drive shaft is provided with a front balancing weight and with a rear balancing weight, and wherein The scroll vacuum pumps differ from each other with regard to the front balancing weight and/or the rear balancing weight.
  • the available installation space can be optimally utilized.
  • the opening widths of the balancing sections increase in the direction of the pump system.
  • a balancing section is arranged relative to the axis of rotation of the drive shaft at the level of the eccentric section of the drive shaft.
  • each balancing section can be defined in a plane perpendicular to the longitudinal axis by a pitch circle with a radius constant along the longitudinal axis be defined, whereby the openings of the balancing sections differ from each other with regard to the size of the radii.
  • the partial circles are not arranged concentrically.
  • the balancing weight can be made in one piece. This makes it possible to machine the balancing weight from a single workpiece.
  • the centers of all partial circles of at least two point sections, in particular of all point sections lie in a plane in which the bisectors of the angles encompassed by the partial circles also lie.
  • the longitudinal axis may coincide with the rotational axis.
  • the balancing section may be provided with a V-shaped expansion, thus defining an opening angle in the range of 10° to 30°, particularly in the range of 15° to 25°.
  • the contour of the balancing section can be defined by two V-shaped straight lines diverging radially outward, a radially inner circular section, and a radially outer circular section.
  • the radially inner circular section can have a smaller radius than the radially outer circular section.
  • An imaginary circle on which the radially inner circular section lies and whose center preferably lies on the longitudinal axis can lie entirely within the contour of the balancing section.
  • an imaginary circle on which the radially outer circular section lies can completely contain the contour of the balancing section.
  • Such designs of the balancing section can further increase the material yield.
  • the balancing weight may comprise a plurality of successive balancing sections along a longitudinal axis, which, when installed, runs parallel to the rotational axis of the drive shaft.
  • the outline of the entire balancing weight is formed by the outline of the balancing section that widens conically radially outward. This ensures that the additional balancing section(s) do not impair the material yield.
  • At least one additional balancing section can be provided, which is shortened in the radial direction compared to the balancing section that widens conically outward and is otherwise congruent with the latter and aligned so as to overlap. This can further simplify the production of the balancing weight.
  • the balancing weight can be placed with the circular cylinder section on the front side of the rear end of the drive shaft.
  • the balancing weight may have its greatest thickness measured along the longitudinal axis in the extension of the drive shaft.
  • the balancing weight may be constructed in one piece. This one-piece design further simplifies the production of the balancing weight.
  • each vacuum pump comprises a pump housing and an electronics housing, wherein the pump system, the drive shaft and the drive motor are accommodated in the pump housing and the electronics housing is a component separate from the pump housing and is connected to the pump housing, in particular detachably, wherein the electronics housing comprises a housing part and electronics equipment, wherein the scroll vacuum pumps differ from one another with regard to the electronics equipment, and wherein the housing parts of the different scroll vacuum pumps are structurally identical.
  • Different electronics configurations can, for example, result from the scroll vacuum pumps being equipped with different drive motors.
  • Different drive motors may require different electronic, electrical, and/or electromechanical components and/or a different number of such components.
  • the housing parts can each be designed as a cast part.
  • the housing parts of the various scroll vacuum pumps are identical in construction does not preclude the possibility that, according to advantageous developments, the housing parts of the various scroll vacuum pumps may differ from one another with regard to post-processing to adapt to the respective electronic equipment.
  • This post-processing may, for example, involve adapting one or more openings to the geometry of connectors or cables of the electronic equipment. that are to be accommodated on the housing part or passed through a wall of the housing part.
  • Post-processing can also consist, for example, of completely or partially removing existing walls within the housing part by milling in order to adapt the available installation space to the specific space requirements of the electronic equipment.
  • the drive motor comprises a radially inner motor rotor and a radially outer motor stator, wherein the motor rotor has a front end face and a rear end face, and wherein only one of the two end faces is provided with cooling projections projecting in the axial direction.
  • cooling projections are provided only on one end face, which advantageously saves axial installation space. It has been surprisingly found that cooling projections provided only on one side can provide a sufficient cooling effect.
  • At least some of the cooling projections may be designed and arranged such that they each act as a balancing weight.
  • These balancing weights can collectively form an effective balancing mass with respect to the rotational axis. It has surprisingly been found that, with only one-sided arrangement of these projections, both a sufficient cooling effect and a sufficient balancing effect can be achieved.
  • the front end of the motor rotor which is not provided with such projections, can thus be arranged further inward than in a motor rotor that is provided with such projections on its front end.
  • the cooling projections can be rib-shaped or plate-shaped.
  • the cooling projections can be provided with at least two different sides that differ from one another in terms of their width, with the cooling projections being arranged such that the wider side points at least substantially in the circumferential direction and the narrower side at least substantially in the radial direction.
  • the cooling projections can generate comparatively strong air movements in the manner of blades, i.e., provide a comparatively strong "whirling or stirring effect," which promotes heat dissipation and thus the cooling effect.
  • the cooling projections can be curved such that they point with a concave side at least substantially in the circumferential direction, specifically in the direction of rotation of the motor rotor. This can further increase the blade effect of the cooling projections.
  • the fixed spiral component comprises a spiral arrangement with spiral walls and spiral base and a carrier for the spiral arrangement, wherein an outlet channel leading from an inlet opening formed in the spiral base to an outlet of the carrier is formed in the carrier, and wherein in addition to the outlet channel, at least two bypass channels are formed in the carrier, each leading from a bypass opening formed in the spiral base to an outlet of the carrier and in each of which at least one pressure relief valve is arranged.
  • bypass channels may each lead to the outlet channel. In this case, one or more additional outlets for the bypass channels are not required.
  • bypass channels are provided. It has been found that even two bypass channels are sufficient to achieve a particularly favorable ratio of power consumption to suction capacity.
  • each pressure relief valve is arranged in each bypass channel. It has been found that one pressure relief valve per bypass channel is sufficient to achieve a particularly favorable ratio of power consumption to pumping capacity.
  • the fixed spiral component is formed in one piece, wherein the side of the carrier facing the movable spiral component forms the spiral base of the spiral arrangement.
  • the inlet opening of the outlet channel is arranged radially further inward than both bypass openings with respect to a central axis of the stationary spiral component running parallel to the axis of rotation of the drive shaft.
  • the inlet opening of the outlet channel can be arranged at least substantially on the central axis.
  • the fixed scroll component comprises a scroll arrangement having scroll walls and scroll base, and a support for the scroll arrangement, wherein an outlet channel is formed in the support leading from an inlet opening formed in the scroll base to an outlet of the support, and wherein in addition to the outlet channel, at least two bypass channels are formed in the support, each leading from a bypass opening formed in the scroll base to the outlet channel.
  • bypass channels lead to the outlet channel it is not necessary to provide one or more additional outlets for the bypass channels in the carrier.
  • the outlet of the carrier comprises a radial outlet opening and the outlet channel comprises a radially extending channel section leading to the radial outlet opening.
  • both bypass channels lead to the radial channel section.
  • one bypass channel leads to the radial channel section and the other bypass channel leads to a further channel section of the outlet channel, which leads from the inlet opening to the radial channel section.
  • the further channel section of the outlet channel runs parallel to a central axis of the fixed spiral component running parallel to the axis of rotation of the drive shaft and in particular lies on the central axis.
  • the fixed scroll component comprises a scroll arrangement having scroll walls and scroll base, and a support for the scroll arrangement, wherein an outlet channel is formed in the support leading from an inlet opening formed in the scroll base to an outlet of the support, and wherein the outlet of the support comprises an axial outlet opening.
  • the axial outlet opening is particularly advantageous if the outlet is to be used for another function that requires additional installation space.
  • a device such as a leak detector
  • this additional function would require additional radial space, which is often unavailable.
  • An axial installation space can often be implemented without any disadvantages. Consequently, an additional device, such as a leak detector, can be connected to the carrier's axial outlet opening without requiring additional radial space. This allows the scroll vacuum pump to be designed more slenderly.
  • a vacuum device is connectable or connected to the axial outlet opening, wherein the vacuum device may in particular be a leak detection device.
  • the outlet channel may comprise a radially extending channel section and at least one further channel section leading from the radially extending channel section to the axial outlet opening.
  • the further channel section can run parallel to a central axis of the fixed spiral component that runs parallel to the axis of rotation.
  • the outlet of the carrier comprises a radial outlet opening in addition to the axial outlet opening, wherein the two outlet openings can be selectively closed so that the carrier can be operated with only a single outlet opening.
  • the outlet opening not required at any given time can be closed, for example, by means of a plug.
  • an opening can be formed in surrounding components, for example a hood, through which the respective outlet opening or a plug that is currently closing it is accessible.
  • the outlet channel can comprise a radially extending channel section leading to the radial outlet opening, with a further channel section leading to the axial outlet opening from a branch point of the radial channel section located between the inlet opening and the radial outlet opening. It can be provided that a channel section, which originates from a bypass opening formed in the spiral base, leads to a junction point, in particular located between the inlet opening and the branch point leading to the axial outlet opening.
  • the axial outlet opening can be formed in a radially outer region of the carrier.
  • the radial position Ra of the axial outlet opening can be Ra > 0.5 * r, in particular Ra > 0.7 * r, in particular Ra > 0.8 * r, if r is the radius of the carrier.
  • the movable scroll component comprises a scroll arrangement with scroll walls, spiral grooves delimited by them and a scroll base forming the bottom thereof, as well as a support for the scroll arrangement that cooperates with the eccentric section of the drive shaft
  • the fixed scroll component comprises a scroll arrangement with scroll walls and a scroll base, as well as a support for the scroll arrangement, wherein in the movable scroll component and/or in the fixed scroll component, one or more radially outer scroll walls have a thickness that is greater than the thickness of radially further inner scroll walls.
  • the greater thickness allows the radially outer spiral wall(s) to be given greater stability.
  • the carrier is provided with a gas inlet in a radially outer region, in the region of which the spiral wall or the spiral walls are interrupted in the circumferential direction, wherein at least one, preferably each, of the spiral walls interrupted in the circumferential direction is provided with the greater thickness.
  • the gas inlet can comprise a recess starting from the outer edge of the carrier, preferably extending radially inwards in a V-shape, or can be formed by such a recess.
  • the or each spiral wall of greater thickness lies on a circle.
  • the sealing element has a length of more than 150 cm, in particular of approximately 160 cm.
  • the sealing element may consist of a thermoplastic material, in particular PTFE (polytetrafluoroethylene), or comprise such a material.
  • PTFE polytetrafluoroethylene
  • the sealing element is received in a groove of the respective spiral wall.
  • the gas inlet of the pumping system may comprise a recess formed on the support of the movable spiral component.
  • the recess starts from the outer edge of the carrier and preferably extends radially inwards in a V-shape.
  • the scroll vacuum pumps according to the invention shown belong to a scroll vacuum pump system with several scroll vacuum pumps of different designs.
  • the scroll vacuum pumps This system differs from each other in several respects, but has the same basic structure, which is described below.
  • Each scroll vacuum pump comprises a pumping system with a stationary scroll component 11 and a movable scroll component 13, which cooperate to pump during operation. Furthermore, each scroll vacuum pump comprises a drive shaft 16 that rotates about a rotational axis 15 during operation and has an eccentric section 19 for driving the movable scroll component 13. Furthermore, each scroll vacuum pump is provided with an electric drive motor 21, 23, which serves to rotate the drive shaft 17 about the rotational axis 15.
  • the electric drive motor comprises a radially inner motor rotor 21 and a radially outer motor stator 23.
  • the drive shaft 17 is rotatably mounted on the pump housing 41 at two axially spaced bearing points 25, 27.
  • the front roller bearing 25 is designed as a fixed bearing, while the rear roller bearing 27 is designed as a floating bearing.
  • a special feature of all scroll vacuum pumps in the system is the use of an arrangement known as the cantilever concept, whereby the two bearing points 25, 27 are located on the side of the drive motor 21, 23 facing the eccentric section 19 of the drive shaft 17. All bearing points 25, 27 are thus located within the pump housing 41 in front of the drive motor 21, 23.
  • the eccentric section 19 is integrally connected to the front end of the drive shaft 17, and the drive motor 21, 23 is mounted on the rear end of the drive shaft 17.
  • the drive motor 21, 23 can be pushed onto the rear end of the drive shaft 17, which simplifies the assembly and replacement of the drive motor or parts of the drive motor.
  • the balancing concept for balancing the rotating system comprising, among other things, the drive shaft 17 and the movable spiral component 13 comprises, in each scroll vacuum pump disclosed here, a front balancing weight 29 fastened to the drive shaft 17 by means of a screw 38 and a rear balancing weight 31.
  • the front balancing weight 29 is arranged in the area of the front end of the drive shaft 17 and the eccentric section 19.
  • the rear balancing weight 31 is located in front of the rear bearing 27 and thus in front of the drive motor.
  • Fig. 2a and 2b as well as Fig.
  • the pressure elements 87 and 31 are each connected to the drive shaft 17 by a central screw 83.
  • the motor rotor 21 is clamped between the rotationally symmetrical pressure element 87 and the pressure element 31, which simultaneously serves as a balancing weight, on the one hand, and an abutment, said abutment being formed by a shoulder 17a formed on the drive shaft 17.
  • the drive shafts 17 of the different scroll vacuum pumps are identical. Despite different motor sizes within the Consequently, only one drive shaft 17 is required for the system.
  • the drive motors of scroll vacuum pumps of different designs differ, among other things, in the inner diameter of the radially inner motor rotor 21. This is shown, for example, by the comparison of Fig. 2b and Fig. 3b .
  • sleeve elements 33 with different wall thicknesses are provided, which are each arranged between the drive shaft 17 and the motor rotor 21.
  • a wave spring is arranged between the sleeve element 33 and the loose bearing 27.
  • a pin-shaped positioning element 85 serves as a positioning aid for the respective pressure element 87 or 31, as an anti-twist device when tightening the central screw 83, and as a circumferentially effective positive connection between the motor rotor 21 or the sleeve element 33 on the one hand and the drive shaft 17 on the other.
  • This positioning pin 85 extends parallel to the rotational axis 15 of the drive shaft 17 and is arranged at a radial distance from the rotational axis 15.
  • the positioning pin 85 can be inserted in the axial direction into a recess which is jointly formed by the drive shaft 17 on the one hand and the motor rotor 21 or the sleeve element which is connected in a rotationally fixed manner to the motor rotor 21 33 is formed.
  • the positioning pin 85 projects axially rearward and is received with its rear end in a positioning receptacle which is formed as a blind hole on the side of the pressure element 87 or 31 facing the rear end of the drive shaft 17.
  • the mentioned clamping of the motor rotor 21 by means of the pressure element 87 or 31 is effected by the pressure element 87 or 31 being brought into contact with the axially rear end of the sleeve element 33 (cf. Fig. 1a and 1b as well as Fig. 2a and 2b ) or with the motor rotor 21 (cf. Fig. 3a and 3b ) interacts.
  • a radial recess 101 is provided at the front end of the motor rotor 21 in the assembled state, which serves as a marking for the assembler and thus indicates the installation orientation of the motor rotor 21.
  • the drive motor is arranged completely within the pump housing 41, ie the drive motor is surrounded by the pump housing 41 in the circumferential direction over its entire axial length. At its rear end, the pump housing 41 is closed by a separate motor cover 103.
  • a special feature of the scroll vacuum pumps according to Fig. 2a and 2b as well as Fig. 3a and 3b is that the motor covers 103 are identical despite different motor sizes.
  • the drive motor is smaller than in the scroll vacuum pump according to Fig. 2a and 2b
  • the pump housing 41 accordingly has a greater radial wall thickness in this area.
  • the identical motor cover 103 can be screwed onto the rear end of the motor housing 41.
  • engine cover 103 is laser-engraved (not shown). This facilitates variable design compared to printing.
  • the drive motor is not completely arranged within the pump housing 41.
  • the motor cover 103 has a receiving space that has an axial depth dimensioned such that the rear end of the drive motor, which protrudes axially rearward from the pump housing 41, is accommodated in this receiving space.
  • This scroll vacuum pump also provides that the motor rotor 21 is provided with cooling projections 47 projecting in the axial direction on its rear end face.
  • these cooling projections 47 are arranged only on this rear end face of the motor rotor 21, and the front end face of the motor rotor 21 does not have such cooling projections. This advantageously saves axial installation space.
  • the cooling projections 47 are designed such that they each act as a balancing weight.
  • the fixed spiral component 11 also referred to as the spiral housing, is screwed onto the front end of the pump housing 41 and is surrounded by a hood 105, which is also attached to the pump housing 41 and in which a fan 95 is also housed.
  • a special feature of the scroll vacuum pump system is that it features a set of 95 fans with different performance levels, yet they have the same dimensions. Fans 95 are available not only with a 24V supply voltage, but also with a supply voltage of, for example, 48V or 230V. This increases the system's variability.
  • the movable spiral component 13 is connected to the eccentric section 19 via a flange bearing 91 designed as a rolling bearing.
  • a thrust washer 93 is located axially between the movable spiral component 13 and the eccentric section 19.
  • a shim 94 is located between a circumferential shoulder of the drive shaft 17 at the transition to the eccentric section 19 and the flange bearing 91. The correct alignment in the circumferential direction between the stationary spiral component 11 and the pump housing 41 is ensured by a positioning pin 97.
  • the pump housing 41 is supported on a base formed by an electronics housing 43.
  • the electronics housing 43 comprises a housing part 43a, which is provided on its underside with rubber feet 107, which are received in recesses formed on the underside and are thus arranged countersunk.
  • the electronics housings 43 of the various scroll vacuum pumps differ, among other things, in the housing cover 43b that forms the lower cover of the housing part 43a. This will be discussed in more detail elsewhere.
  • the electronics housings 43 each house an electronics unit 45 comprising electronic, electrical and electromechanical components which, among other things, are used to supply power and to control the respective Scroll vacuum pumps also differ from one another with regard to their electronic equipment 45.
  • a special feature of the scroll vacuum pump system according to the invention is that the housing parts 43a of the different scroll vacuum pumps are structurally identical.
  • the housing parts 43a are each formed as a cast part. Despite different electronic equipment 45 for the individual scroll vacuum pumps, only one housing part 43a is required.
  • the housing parts 43a differ slightly in terms of post-processing to adapt them to the respective electronic equipment 45.
  • Such post-processing serves, for example, to adapt openings to the geometry of connectors or cables of the electronic equipment 45, which must be accommodated on the housing part or routed through a wall of the housing part.
  • post-processing can consist of partially or completely removing the inner walls of a respective housing part 43a by milling, in order to adapt the installation space available in the housing part 43a to the respective space requirements of the electronic equipment 45.
  • the pump housing 41 is screwed to the electronics housing 43.
  • the section BB at the bottom center shows the area of the scroll vacuum pump where a gas ballast valve is located.
  • the gas ballast valves 79 are designed differently for the individual scroll vacuum pumps.
  • the gas ballast valve 79 is provided with a cover 81.
  • the gas ballast valve 79 each has a rotary knob 82 for making adjustments.
  • the gas to be pumped enters the pumping system comprising the two spiral components 11, 13 via the inlet flange 77 and is expelled via the outlet flange 78.
  • the pump system also has a diameter that is larger than the pump system of the scroll vacuum pump according to Fig. 1a and 1b
  • the scroll vacuum pump system according to the invention is not limited to these electric drive motors.
  • a synchronous reluctance motor can also be provided as the rotary drive for the drive shaft 17.
  • the modular principle provided according to the present disclosure is particularly advantageous with regard to this variability desired in practice due to its diverse adaptability.
  • the balancing system for balancing the rotating system comprising in particular the drive shaft 17 and the movable spiral component 13 of the pumping system comprises a front balancing weight 29 and a rear balancing weight 31.
  • the rear balancing weight 31 is located in front of the rear bearing point 27.
  • the pressure element 87 for clamping the motor rotor 21 is designed to be rotationally symmetrical.
  • the front balancing weight 29 is made of a material that has a higher density than the material of the rear balancing weight 31. According to one aspect of the present disclosure, it is accordingly provided that the front balancing weight 29 is made of brass and the rear balancing weight 31 is made of steel. In the scroll vacuum pump according to Fig. 1a and 1b In contrast, the two balancing weights 29, 31 are made of the same material, namely steel.
  • the eccentric drive formed by the drive shaft 17 with the eccentric section 19 is located within the pump housing 41 and is surrounded by a deformable sleeve in the form of a bellows 89.
  • the bellows 89 serves, on the one hand, to seal the eccentric drive from the suction area of the scroll vacuum pump and, on the other hand, to prevent rotation of the movable spiral component 13.
  • the bellows 89 is attached to the side of the movable spiral component 13 facing the drive.
  • the rear end of the bellows 89 is attached to a housing base within the pump housing 41 by means of screws.
  • Fig. 3c shows in sections perpendicular to the rotation axis 15 of the scroll vacuum pump Fig. 3a and 3b in the left illustration (section BB in Fig. 3b ) a view of the rear balancing weight 31 and in the right illustration (section AA in Fig. 3b ) the arrangement of a balancing section of the front balancing weight 39 in relation to the bellows 89, the flange bearing 91 and the eccentric section 19 of the drive shaft 17.
  • FIG. 3c shows that the rear balancing weight, which is screwed to the drive shaft 17 by means of the central screw 83 and clamps the motor rotor 21 in the manner explained above, widens conically radially outward. While maintaining the basic geometry of this rear balancing weight 31, it can be optimally adapted to different drive motors relatively easily during its manufacture.
  • the balancing section of the front balancing weight 29, shown in section is partially annular in shape such that the inner radius is adapted to the outer radius of the flange bearing 91. This allows for optimal use of the available installation space.
  • the left illustration below shows a side view of the rear balancing weight 31. Among other things, the holes 39a for the central screw 83 and the blind hole 39b for receiving the positioning pin 85 are shown.
  • Fig. 3d shows in the two illustrations on the left the structure of the front balancing weight 39, which is formed in one piece and - as mentioned above - can be made of different materials, in particular of materials of different densities such as brass on the one hand and steel on the other.
  • FIG. 3d shows an enlarged section of the Fig. 3b the arrangement of the front balancing weight 29 in the area of the eccentric section 19 of the drive shaft 17 and the flange bearing 91.
  • the balancing weight 29 comprises three balancing sections 35, which, when installed, follow one another along the rotational axis 15 of the drive shaft 17.
  • Each Balancing section 35 each has a partial ring shape, wherein in the installed state each balancing section points with its opening 37 towards the drive shaft 17 and encloses it.
  • balancing sections 35 differ from each other in terms of the width of their openings 37. This is evident from the perspective view at the top left in Fig. 3d as well as the top view at the bottom left in Fig. 3d can be found.
  • a further special feature of this front balancing weight 29 is that the opening 37 of each balancing section 35 is defined in a plane E perpendicular to the axis of rotation 15 (in the installed state) by a pitch circle with a radius constant along the central axis.
  • a balancing section 35 with a radius R1 in the installed state, comprises a section 17b of the drive shaft 17, which lies immediately behind the eccentric section 19.
  • the adjacent balancing section 35 with the radius R2 comprises the flange bearing 91.
  • the third balancing section 35 is located in an axial region where the heads of fastening screws for attaching the flange bearing 91 to the movable spiral component 13 are arranged.
  • the radius of this balancing section 35 is therefore significantly larger than the radii R1, R2 of the other two balancing sections.
  • a special feature is that the two radii R1, R2 are not the same size and the two partial circles are not arranged concentrically, as can be seen in particular in the illustration below left in Fig. 3d can be removed.
  • the center of the rear balancing section 35 in the installed state lies on the rotation axis 15, since this balancing section forms the central Section 17b of the drive shaft 17.
  • the other center point of the pitch circle with the larger radius R2 lies accordingly outside the openings 37 of the balancing sections 35.
  • This design of the balancing weight 29 has the advantage that, without increasing the outer diameter, the center of mass of the central balancing section 35 encompassing the flange bearing 91 can be placed further radially outward than would be the case if the two centers coincided. In other words, a higher eccentric mass can be realized for this central balancing section 35 without increasing the outer dimensions of the balancing weight 29.
  • Fig. 3e The left shows three views of the rear balancing weight 31, illustrating its construction.
  • the balancing weight 31 is constructed in one piece.
  • the balancing weight 31 comprises two balancing sections 39 that flare conically outward.
  • the balancing sections 39 each flare in a V-shape, defining an opening angle of approximately 20°.
  • the balancing weight 31 comprises a circular cylinder section 40, the central axis of which, when installed, coincides with the rotational axis 15 of the drive shaft 17.
  • the thickness of this circular cylinder section 40, measured along the rotational axis 15, is substantially smaller than the thickness of each balancing section 39.
  • Fig. 3b can be removed, the balancing weight 31 with its circular cylinder section 40 is facing the rear end of the drive shaft 17 when installed.
  • the example of the scroll vacuum pump after Fig. 2a and 2b It can be seen that the balancing weight 31 with its circular cylinder section 40 is inserted into the sleeve element 33.
  • the balancing section 39 located between the circular cylinder section 40 and the outer balancing section 39 is shortened in the radial direction compared to the outer balancing section 39, but is otherwise congruent with it and aligned so as to overlap.
  • Both balancing sections 39 thus widen in a V-shape, i.e., in a projection along the rotation axis 15, the outlines of the two balancing sections 39 are delimited by two straight lines that diverge radially outward in a V-shape.
  • the two outlines of the balancing sections 39 are delimited by a radially inner circular section that has a smaller radius than a respective radially outer circular section, which forms the radially outer boundary of the respective outline.
  • the rear balancing weight 31 allows for simple and cost-effective production as well as easy adaptation to the respective drive motor. However, adaptation is not absolutely necessary in every case.
  • the rear balancing weight 31 can be designed in such a way that it can be used with the asynchronous motor of a scroll vacuum pump according to Fig. 2a and 2b , in particular with the sleeve element 33, as well as with the IPM motor of a scroll vacuum pump according to Fig. 3a and 3b can work together.
  • a housing cover 43b made of aluminum, for example, without its own seal, is sufficient as a cover.
  • a recessed arrangement is provided for the housing cover 43b in the housing part 43a, with surfaces set back inward relative to the underside of a surrounding outer wall serving as a support for the housing cover 43b and each provided with a sealing material. Due to its recessed arrangement, the housing cover 43b is not visible from the side.
  • the electronics housings 43 also differ in the respective electronic equipment 45.
  • the Electronics housing 43 according to Fig. 5a provided with a connection for a cold appliance plug 44, to which a power supply unit for supplying power to the scroll vacuum pump can be connected.
  • the electronics housing 43 is Fig. 5b provided with a different mains plug 44, for example a mains plug of type Harting.
  • Fig. 6a shows an overview of various views of a fixed spiral component 11, also referred to as a spiral casing, of a scroll vacuum pump according to the invention.
  • the three upper views in Fig. 6a are enlarged in Fig. 6b shown, whereas the three lower representations of the Fig. 6a enlarged in Fig. 6c are shown.
  • FIG. 7a an overview with various representations of a movable spiral component 13, also referred to as orbiter, for the spiral casing 11 according to the Fig. 6a , 6b and 6c .
  • the stationary spiral component 11 comprises a spiral arrangement with spiral walls 49 and spiral base 51 as well as a support 53 for the spiral arrangement.
  • the two radially outer spiral walls 49 lie on concentric circles and are circumferentially This creates a parallel pumping structure consisting of parallel pumping channels formed by the respective spiral grooves 50, which merge into a helical pumping channel formed by a helical spiral groove 50 and delimited by a helical spiral wall 49.
  • the gas pumped along the spiral grooves 50 from radially outside to radially inside can exit the spiral grooves 50 via a central inlet opening 55 and two bypass openings 61a, 63a into a channel system of the fixed spiral component 11, described in more detail below.
  • These openings 55, 61a, 63a are each formed in the spiral base 51.
  • the two bypass openings 61a, 63a are arranged offset from one another in the circumferential direction and are located on the same radius with respect to a central axis of the spiral casing 11.
  • an axial outlet opening 65 is formed radially further outwards, which can optionally either be closed or form an axial gas outlet of the spiral housing 11 and thus of the pumping system of the scroll vacuum pump.
  • the central inlet opening 55 leads to an outlet channel 59 designed as a straight bore, which opens at the radial outlet 57 of the spiral casing 11.
  • One bypass opening 63a leads directly to this outlet channel 59.
  • the channel section leading from there to the radial outlet 57 is thus not only a section of the outlet channel 59, but also forms a bypass channel 63 for gas originating from the bypass opening 63a.
  • bypass channel 61 leads from the further bypass opening 61c to the outlet channel 59.
  • This bypass channel 61 is part of a straight bore 64 which is introduced to produce the bypass channel 61.
  • This bore 64 and the outlet channel 69 extend at an angle to one another which corresponds to the angular offset of the two bypass openings 61c, 63c in the circumferential direction.
  • a further special feature of the pump system according to the invention which is evident in both the spiral casing 11 and the orbiter 13, is that the groove depth NT is comparatively large.
  • the groove depth is 50 mm.
  • the ratios are 3.93 and 3.87, respectively.
  • a groove depth of 52 mm can be provided as an alternative. This then results in even larger ratios of groove depth to groove width.
  • the movable spiral component 13 also includes a spiral arrangement with spiral walls 69 and spiral base 71, as well as a plate-shaped support 73 for the spiral arrangement.
  • the two radially outer spiral walls 69 extend on concentric circles and are interrupted circumferentially in the region of a gas inlet 67.
  • a radially inner spiral wall 69 extends spirally.
  • the spiral walls 69 are in turn provided with a sealing element 75 (tip seal) at their end facing away from the spiral base 71.
  • the radially outer spiral groove 70 between the two part-circular spiral walls 69 has a groove width NB2, while the spiral-shaped spiral groove 70 delimited by the spiral spiral wall 69 has a groove width NB1.
  • NB2 12.92 mm
  • NB1 12.58 mm.
  • NT 50 mm
  • a groove depth of 52 mm can be provided as an alternative. This results in even larger groove depth to groove width ratios.
  • Fig. 8a shows an overview of different views of the spiral casing of Fig. 6a , 6b and 6c and the orbiter of Fig. 7a and 7b comprehensive pumping system of the scroll vacuum pump Fig. 3a and 3b
  • the pumping system of the scroll vacuum pumps according to Fig. 1a and 1b as well as Fig. 2a and 2b is trained accordingly.
  • Fig. 8b shows an enlarged view of the top left (section AA) of Fig. 8a .
  • Fig. 8c shows an enlarged view of the top right (section BB) of Fig. 8a .
  • Fig. 8d shows an enlarged view of the bottom right (section CC) of Fig. 8a .
  • Fig. 8b The interaction of the interlocking spiral walls 49, 69 can be seen, which partially enclose crescent-shaped or sickle-shaped volumes.
  • gas enters the chamber via the gas inlet 67, which is Fig. 8b only hinted at its position (see, for example, Fig. 7b ), inflowing gas to the center of the pumping system and via the inlet opening 55 into the outlet channel 59 when the outlet valve 56 (cf. e.g. Fig. 8d ) opens at sufficiently high pressure.
  • the pumped gas passes through the outlet channel 59 to the radial outlet 57 and thus to the outlet flange 78, if - as in Fig. 8d shown - the axial outlet opening 65 is closed by means of a plug 66.
  • the radial outlet 57 can be closed and the plug 66 removed to create an axial outlet from the pumping system.
  • Fig. 9 shows a concept referred to as a conical gap design, which can be provided in the inventive scroll vacuum pumps according to the present disclosure, in the area where the spiral spiral wall 49 of the fixed scroll member interacts with the spiral spiral wall 69 of the movable scroll member.
  • the numerical values indicate the radial distance (in mm) between the facing wall surfaces, i.e. the size of the radial gap between the wall surfaces.
  • the special feature described here is that in this initial state the movable spiral wall 69 is arranged in such a way that the gap between movable spiral wall 69 and fixed spiral walls 49 each have a conical shape in the pumping direction P.
  • the path of the movable spiral wall 69 is selected such that, when the scroll vacuum pump is running, i.e., during operation, according to state II, the deformation of the movable spiral wall 69 reduces the conicity of the gap, as can be seen from the distance values. In state II, the movable spiral wall 69 thus runs almost parallel to the two fixed spiral walls 49. The deformation of the movable spiral wall 69 results from the higher temperatures and the movement of the orbiter.
  • Fig. 10 shows various external views of a scroll vacuum pump according to Fig. 3a and 3b .
  • the pump housing 41 sits on the electronics housing 43 and is closed on the motor side by the motor cover 103 and on the opposite side by the hood 105. Also shown are the outlet flange 78 and the inlet flange 77.
  • this pump housing 41 The special feature of this pump housing 41 is that the inlet flange 77, also referred to as the intake flange, is set back from the highest point of the pump housing 41 at this axial position. This saves installation height. This is particularly advantageous when an alternative flange (not shown) is used, which is formed by an angle flange.

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  • Mechanical Engineering (AREA)
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  • Rotary Pumps (AREA)

Claims (5)

  1. Pompe à vide à spirales, comprenant :
    - un système de pompage (11, 13) comprenant un composant spiralé fixe (11) et un composant spiralé (13) coopérant avec ce dernier pour le pompage,
    - un arbre d'entraînement (17) tournant autour d'un axe de rotation (15) pendant le fonctionnement, doté d'une portion excentrique (19) pour entraîner le composant spiralé mobile (13), et
    - un moteur électrique d'entraînement (21, 23) pour l'arbre d'entraînement (17),
    dans laquelle
    le composant spiralé mobile (13) comprend un agencement en spirale avec des parois spiralées (69), des rainures spiralées (70) délimitées par celles-ci et une base spiralée (71) formant leur fond, ainsi qu'un support (73) pour l'agencement en spirale, qui coopère avec la portion excentrique (19) de l'arbre d'entraînement (17),
    le composant spiralé fixe (11) comprend un agencement en spirale avec des parois spiralées (49), des rainures spiralées (50) délimitées par celles-ci et une base spiralée (51) formant leur fond, ainsi qu'un support (53) pour l'agencement en spirale,
    caractérisée en ce que
    les rainures spiralées (70, 50) présentent une profondeur de rainure (NT), mesurée depuis le sommet des parois spiralées (69, 49) jusqu'à la base spiralée (71, 51) le long d'un axe central du composant spiralé (13, 11) parallèle à l'axe de rotation (15) de l'arbre d'entraînement (17), et une largeur de rainure (NB), mesurée perpendiculairement à l'axe central, et en ce que, dans le composant spiralé mobile (13) et/ou dans le composant spiralé fixe (11), le rapport de la profondeur de rainure (NT) sur la largeur de rainure (NB) est dans une plage de 3,7 à 4,2, en particulier de 3,8 à 4,1, et de préférence de 3,85 à 4,0.
  2. Pompe à vide à spirales selon la revendication 1,
    dans laquelle le rapport de la profondeur de rainure (NT) sur la largeur de rainure (NB) est supérieur à 3,8, en particulier supérieur à 3,85, ou inférieur à 4,0.
  3. Pompe à vide à spirales, comprenant
    - un système de pompage (11, 13) comprenant un composant spiralé fixe (11) et un composant spiralé (13) coopérant avec ce dernier pour le pompage,
    - un arbre d'entraînement (17) tournant autour d'un axe de rotation (15) pendant le fonctionnement, doté d'une portion excentrique (19) pour entraîner le composant spiralé mobile (13), et
    - un moteur électrique d'entraînement (21, 23) pour l'arbre d'entraînement (17),
    dans laquelle
    le composant spiralé mobile (13) comprend un agencement en spirale avec des parois spiralées (69), des rainures spiralées (70) délimitées par celles-ci et une base spiralée (71) formant leur fond, ainsi qu'un support (73) pour l'agencement en spirale, qui coopère avec la portion excentrique (19) de l'arbre d'entraînement (17),
    le composant spiralé fixe (11) comprend un agencement en spirale avec des parois spiralées (49), des rainures spiralées (50) délimitées par celles-ci et une base spiralée (51) formant leur fond, ainsi qu'un support (53) pour l'agencement en spirale,
    caractérisée en ce que
    les rainures spiralées (70, 50) présentent une profondeur de rainure (NT), mesurée depuis le sommet des parois spiralées (69, 49) jusqu'à la base spiralée (71, 51) le long d'un axe central du composant spiralé (13, 11) parallèle à l'axe de rotation (15) de l'arbre d'entraînement (17), et une largeur de rainure (NB), mesurée perpendiculairement à l'axe central, et en ce que le rapport de la profondeur de rainure (NT) sur la largeur de rainure (NB) est supérieur à 3,8, en particulier supérieur à 3,85, ou inférieur à 4,0.
  4. Pompe à vide à spirales selon l'une des revendications 1 à 3,
    dans laquelle le rapport de la profondeur de rainure (NT) sur la largeur de rainure (NB) est constant sur l'ensemble de l'agencement en spirale.
  5. Pompe à vide à spirales selon l'une des revendications 1 à 4,
    dans laquelle la profondeur de rainure (NT) est de 50 mm ou 52 mm.
EP24197627.3A 2023-08-08 2023-08-08 Pompe à vide à spirales Active EP4506537B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP24197627.3A EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP24197627.3A EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP23190388.1A EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP23190388.1A Division EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP23190388.1A Division-Into EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

Publications (3)

Publication Number Publication Date
EP4506537A1 EP4506537A1 (fr) 2025-02-12
EP4506537B1 true EP4506537B1 (fr) 2025-10-08
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EP24197612.5A Active EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP23190388.1A Active EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP24197627.3A Active EP4506537B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales
EP25156928.1A Pending EP4530470A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP25156934.9A Pending EP4530471A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

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EP24197612.5A Active EP4506536B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP23190388.1A Active EP4253720B1 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

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EP25156928.1A Pending EP4530470A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales
EP25156934.9A Pending EP4530471A3 (fr) 2023-08-08 2023-08-08 Pompe à vide à spirales et système de pompe à vide à spirales

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EP (5) EP4506536B1 (fr)
CN (1) CN120693445A (fr)
WO (1) WO2025032188A1 (fr)

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* Cited by examiner, † Cited by third party
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EP4407183A1 (fr) 2024-05-31 2024-07-31 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et son procédé de mise en oeuvre
EP4467810A3 (fr) 2024-07-15 2025-02-26 Pfeiffer Vacuum Technology AG Pompe à vide à spirales et procédé de fabrication d'une pompe à vide à spirales
EP4538532A3 (fr) * 2025-02-25 2025-08-27 Pfeiffer Vacuum Technology AG Pompe à vide à spirales
EP4621238A3 (fr) * 2025-07-16 2025-11-12 Pfeiffer Vacuum Technology AG Procédé de montage d'une pompe à vide à spirales
EP4636251A2 (fr) 2025-09-09 2025-10-22 Pfeiffer Vacuum Technology AG Pompe à vide à spirales

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Also Published As

Publication number Publication date
EP4530471A2 (fr) 2025-04-02
EP4253720C0 (fr) 2025-10-01
EP4506536B1 (fr) 2025-12-17
EP4530470A2 (fr) 2025-04-02
EP4506537C0 (fr) 2025-10-08
EP4530470A3 (fr) 2025-07-02
EP4253720A2 (fr) 2023-10-04
WO2025032188A1 (fr) 2025-02-13
EP4253720B1 (fr) 2025-10-01
EP4530471A3 (fr) 2025-07-02
EP4253720A3 (fr) 2024-06-19
EP4506537A1 (fr) 2025-02-12
EP4506536A1 (fr) 2025-02-12
CN120693445A (zh) 2025-09-23

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