EP4406380A4 - 3D semiconductor device and structure with heat distributor - Google Patents
3D semiconductor device and structure with heat distributorInfo
- Publication number
- EP4406380A4 EP4406380A4 EP22873497.6A EP22873497A EP4406380A4 EP 4406380 A4 EP4406380 A4 EP 4406380A4 EP 22873497 A EP22873497 A EP 22873497A EP 4406380 A4 EP4406380 A4 EP 4406380A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- semiconductor device
- heat distributor
- distributor
- heat
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3732—Diamonds
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/06—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
- G06N3/063—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using electronic means
- G06N3/065—Analogue means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Layout of the interconnection structure
- H01L23/5286—Arrangements of power or ground buses
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/50—EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L27/00—Modulated-carrier systems
- H04L27/26—Systems using multi-frequency codes
- H04L27/2601—Multicarrier modulation systems
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D88/00—Three-dimensional [3D] integrated devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biomedical Technology (AREA)
- Biophysics (AREA)
- Chemical & Material Sciences (AREA)
- Neurology (AREA)
- Data Mining & Analysis (AREA)
- Evolutionary Computation (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Computing Systems (AREA)
- General Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Software Systems (AREA)
- Computational Linguistics (AREA)
- Artificial Intelligence (AREA)
- Geometry (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163246658P | 2021-09-21 | 2021-09-21 | |
| US202163255009P | 2021-10-13 | 2021-10-13 | |
| US202163273932P | 2021-10-30 | 2021-10-30 | |
| US202263299011P | 2022-01-13 | 2022-01-13 | |
| US202263300556P | 2022-01-18 | 2022-01-18 | |
| US202263308053P | 2022-02-08 | 2022-02-08 | |
| US202263321109P | 2022-03-18 | 2022-03-18 | |
| US202263327750P | 2022-04-05 | 2022-04-05 | |
| US202263335063P | 2022-04-26 | 2022-04-26 | |
| PCT/US2022/044165 WO2023049132A1 (en) | 2021-09-21 | 2022-09-21 | A 3d semiconductor device and structure with heat spreader |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP4406380A1 EP4406380A1 (en) | 2024-07-31 |
| EP4406380A4 true EP4406380A4 (en) | 2025-11-19 |
Family
ID=85721116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP22873497.6A Pending EP4406380A4 (en) | 2021-09-21 | 2022-09-21 | 3D semiconductor device and structure with heat distributor |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP4406380A4 (en) |
| WO (1) | WO2023049132A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240332170A1 (en) * | 2023-03-31 | 2024-10-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Inductor embedded in a substrate of a semiconductor device |
| TWI858637B (en) | 2023-03-31 | 2024-10-11 | 力晶積成電子製造股份有限公司 | Semiconductor structure and manufacturing method thereof |
| KR20250170701A (en) * | 2023-04-19 | 2025-12-05 | 라이트매터, 인크. | Optical communication substrate using glass interposer |
| US20250132254A1 (en) * | 2023-10-23 | 2025-04-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structures and methods with reduced plasma induced damage |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012015550A2 (en) * | 2010-07-30 | 2012-02-02 | Monolithic 3D, Inc. | Semiconductor device and structure |
| US9871034B1 (en) * | 2012-12-29 | 2018-01-16 | Monolithic 3D Inc. | Semiconductor device and structure |
| US20190057959A1 (en) * | 2015-06-06 | 2019-02-21 | Monolithic 3D Inc. | Semiconductor device and structure with thermal isolation |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8068370B2 (en) * | 2008-04-18 | 2011-11-29 | Macronix International Co., Ltd. | Floating gate memory device with interpoly charge trapping structure |
| US20210125852A1 (en) * | 2010-11-18 | 2021-04-29 | Monolithic 3D Inc. | 3d semiconductor device and structure |
| TWI637396B (en) * | 2012-02-13 | 2018-10-01 | 中村維男 | A marching memory, a bidirectional marching memory, a complex marching memory and a computer system, without the memory bottleneck |
| US9954080B2 (en) * | 2012-04-09 | 2018-04-24 | Monolithic 3D Inc. | 3D integrated circuit device |
-
2022
- 2022-09-21 WO PCT/US2022/044165 patent/WO2023049132A1/en not_active Ceased
- 2022-09-21 EP EP22873497.6A patent/EP4406380A4/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012015550A2 (en) * | 2010-07-30 | 2012-02-02 | Monolithic 3D, Inc. | Semiconductor device and structure |
| US9871034B1 (en) * | 2012-12-29 | 2018-01-16 | Monolithic 3D Inc. | Semiconductor device and structure |
| US20190057959A1 (en) * | 2015-06-06 | 2019-02-21 | Monolithic 3D Inc. | Semiconductor device and structure with thermal isolation |
Non-Patent Citations (2)
| Title |
|---|
| DEEPAK SEKAR ET AL: "A 3D-IC Technology with Integrated Microchannel Cooling", INTERCONNECT TECHNOLOGY CONFERENCE, 2008. IITC 2008. INTERNATIONAL, IEEE, PISCATAWAY, NJ, USA, 1 June 2008 (2008-06-01) - 1 June 2008 (2008-06-01), pages 13 - 15, XP031274483, ISBN: 978-1-4244-1911-1 * |
| See also references of WO2023049132A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP4406380A1 (en) | 2024-07-31 |
| WO2023049132A1 (en) | 2023-03-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
| 17P | Request for examination filed |
Effective date: 20240206 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
| DAV | Request for validation of the european patent (deleted) | ||
| DAX | Request for extension of the european patent (deleted) | ||
| RIC1 | Information provided on ipc code assigned before grant |
Ipc: H10B 43/30 20230101AFI20250724BHEP Ipc: H10B 43/40 20230101ALI20250724BHEP Ipc: H10B 43/50 20230101ALI20250724BHEP Ipc: H01L 23/528 20060101ALI20250724BHEP Ipc: H01L 23/367 20060101ALI20250724BHEP Ipc: H04L 25/02 20060101ALI20250724BHEP Ipc: H04L 27/26 20060101ALI20250724BHEP Ipc: G06N 3/08 20230101ALI20250724BHEP Ipc: G06N 3/065 20230101ALI20250724BHEP Ipc: H01L 23/373 20060101ALI20250724BHEP Ipc: H01L 23/36 20060101ALI20250724BHEP Ipc: H01L 23/473 20060101ALI20250724BHEP Ipc: H01L 23/48 20060101ALI20250724BHEP Ipc: H10D 84/03 20250101ALI20250724BHEP Ipc: H10D 88/00 20250101ALI20250724BHEP |
|
| A4 | Supplementary search report drawn up and despatched |
Effective date: 20251021 |
|
| RIC1 | Information provided on ipc code assigned before grant |
Ipc: H10B 43/30 20230101AFI20251015BHEP Ipc: H10B 43/40 20230101ALI20251015BHEP Ipc: H10B 43/50 20230101ALI20251015BHEP Ipc: H01L 23/528 20060101ALI20251015BHEP Ipc: H01L 23/367 20060101ALI20251015BHEP Ipc: H04L 25/02 20060101ALI20251015BHEP Ipc: H04L 27/26 20060101ALI20251015BHEP Ipc: G06N 3/08 20230101ALI20251015BHEP Ipc: G06N 3/065 20230101ALI20251015BHEP Ipc: H01L 23/373 20060101ALI20251015BHEP Ipc: H01L 23/36 20060101ALI20251015BHEP Ipc: H01L 23/473 20060101ALI20251015BHEP Ipc: H01L 23/48 20060101ALI20251015BHEP Ipc: H10D 84/03 20250101ALI20251015BHEP Ipc: H10D 88/00 20250101ALI20251015BHEP |