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EP4406380A4 - 3D semiconductor device and structure with heat distributor - Google Patents

3D semiconductor device and structure with heat distributor

Info

Publication number
EP4406380A4
EP4406380A4 EP22873497.6A EP22873497A EP4406380A4 EP 4406380 A4 EP4406380 A4 EP 4406380A4 EP 22873497 A EP22873497 A EP 22873497A EP 4406380 A4 EP4406380 A4 EP 4406380A4
Authority
EP
European Patent Office
Prior art keywords
semiconductor device
heat distributor
distributor
heat
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22873497.6A
Other languages
German (de)
French (fr)
Other versions
EP4406380A1 (en
Inventor
Zvi Or-Bach
Jin-Woo Han
Brian Cronquist
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monolithic 3D Inc
Original Assignee
Monolithic 3D Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monolithic 3D Inc filed Critical Monolithic 3D Inc
Publication of EP4406380A1 publication Critical patent/EP4406380A1/en
Publication of EP4406380A4 publication Critical patent/EP4406380A4/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3732Diamonds
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/06Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
    • G06N3/063Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using electronic means
    • G06N3/065Analogue means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/481Internal lead connections, e.g. via connections, feedthrough structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528Layout of the interconnection structure
    • H01L23/5286Arrangements of power or ground buses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/30EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/40EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/50EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04LTRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
    • H04L27/00Modulated-carrier systems
    • H04L27/26Systems using multi-frequency codes
    • H04L27/2601Multicarrier modulation systems
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00Three-dimensional [3D] integrated devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • Biophysics (AREA)
  • Chemical & Material Sciences (AREA)
  • Neurology (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Computational Linguistics (AREA)
  • Artificial Intelligence (AREA)
  • Geometry (AREA)
  • Semiconductor Integrated Circuits (AREA)
EP22873497.6A 2021-09-21 2022-09-21 3D semiconductor device and structure with heat distributor Pending EP4406380A4 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US202163246658P 2021-09-21 2021-09-21
US202163255009P 2021-10-13 2021-10-13
US202163273932P 2021-10-30 2021-10-30
US202263299011P 2022-01-13 2022-01-13
US202263300556P 2022-01-18 2022-01-18
US202263308053P 2022-02-08 2022-02-08
US202263321109P 2022-03-18 2022-03-18
US202263327750P 2022-04-05 2022-04-05
US202263335063P 2022-04-26 2022-04-26
PCT/US2022/044165 WO2023049132A1 (en) 2021-09-21 2022-09-21 A 3d semiconductor device and structure with heat spreader

Publications (2)

Publication Number Publication Date
EP4406380A1 EP4406380A1 (en) 2024-07-31
EP4406380A4 true EP4406380A4 (en) 2025-11-19

Family

ID=85721116

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22873497.6A Pending EP4406380A4 (en) 2021-09-21 2022-09-21 3D semiconductor device and structure with heat distributor

Country Status (2)

Country Link
EP (1) EP4406380A4 (en)
WO (1) WO2023049132A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240332170A1 (en) * 2023-03-31 2024-10-03 Taiwan Semiconductor Manufacturing Company, Ltd. Inductor embedded in a substrate of a semiconductor device
TWI858637B (en) 2023-03-31 2024-10-11 力晶積成電子製造股份有限公司 Semiconductor structure and manufacturing method thereof
KR20250170701A (en) * 2023-04-19 2025-12-05 라이트매터, 인크. Optical communication substrate using glass interposer
US20250132254A1 (en) * 2023-10-23 2025-04-24 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor structures and methods with reduced plasma induced damage

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012015550A2 (en) * 2010-07-30 2012-02-02 Monolithic 3D, Inc. Semiconductor device and structure
US9871034B1 (en) * 2012-12-29 2018-01-16 Monolithic 3D Inc. Semiconductor device and structure
US20190057959A1 (en) * 2015-06-06 2019-02-21 Monolithic 3D Inc. Semiconductor device and structure with thermal isolation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8068370B2 (en) * 2008-04-18 2011-11-29 Macronix International Co., Ltd. Floating gate memory device with interpoly charge trapping structure
US20210125852A1 (en) * 2010-11-18 2021-04-29 Monolithic 3D Inc. 3d semiconductor device and structure
TWI637396B (en) * 2012-02-13 2018-10-01 中村維男 A marching memory, a bidirectional marching memory, a complex marching memory and a computer system, without the memory bottleneck
US9954080B2 (en) * 2012-04-09 2018-04-24 Monolithic 3D Inc. 3D integrated circuit device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012015550A2 (en) * 2010-07-30 2012-02-02 Monolithic 3D, Inc. Semiconductor device and structure
US9871034B1 (en) * 2012-12-29 2018-01-16 Monolithic 3D Inc. Semiconductor device and structure
US20190057959A1 (en) * 2015-06-06 2019-02-21 Monolithic 3D Inc. Semiconductor device and structure with thermal isolation

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DEEPAK SEKAR ET AL: "A 3D-IC Technology with Integrated Microchannel Cooling", INTERCONNECT TECHNOLOGY CONFERENCE, 2008. IITC 2008. INTERNATIONAL, IEEE, PISCATAWAY, NJ, USA, 1 June 2008 (2008-06-01) - 1 June 2008 (2008-06-01), pages 13 - 15, XP031274483, ISBN: 978-1-4244-1911-1 *
See also references of WO2023049132A1 *

Also Published As

Publication number Publication date
EP4406380A1 (en) 2024-07-31
WO2023049132A1 (en) 2023-03-30

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