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EP4325061B1 - Pompe à vide turbomoléculaire - Google Patents

Pompe à vide turbomoléculaire

Info

Publication number
EP4325061B1
EP4325061B1 EP23218595.9A EP23218595A EP4325061B1 EP 4325061 B1 EP4325061 B1 EP 4325061B1 EP 23218595 A EP23218595 A EP 23218595A EP 4325061 B1 EP4325061 B1 EP 4325061B1
Authority
EP
European Patent Office
Prior art keywords
stator
section
pump
disks
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP23218595.9A
Other languages
German (de)
English (en)
Other versions
EP4325061A1 (fr
EP4325061C0 (fr
Inventor
Florian Bader
Maximilian Birkenfeld
Jan Hofmann
Matthias Mädler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23218595.9A priority Critical patent/EP4325061B1/fr
Publication of EP4325061A1 publication Critical patent/EP4325061A1/fr
Priority to JP2024039716A priority patent/JP7772850B2/ja
Application granted granted Critical
Publication of EP4325061B1 publication Critical patent/EP4325061B1/fr
Publication of EP4325061C0 publication Critical patent/EP4325061C0/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomolecular vacuum pump.
  • the printed matter EP 0 967 395 A2 disclosed a vacuum pump according to the preamble of claim 1.
  • the printed documents EP 3 734 078 A2 and EP 1918588 A2 related vacuum pumps are disclosed. These known vacuum pumps each comprise at least one stator disk attached to a stator, which interacts with a rotor to generate the pumping action, and a plurality of circumferentially distributed stator blades that define a blade plane.
  • the blade plane is a plane perpendicular to the axis of rotation in which the stator blades lie. This means the blade plane can be defined by any section of the stator blades, as long as it intersects or touches them. For example, the blade plane can run centrally through the stator blades in the axial direction parallel to the axis of rotation, or it can be defined by the upper or lower blade edges.
  • Turbomolecular vacuum pumps are designed, among other things, to have the highest possible pumping speed.
  • the design of the suction area is of particular importance; that is, the area near the pump inlet that defines an inlet plane.
  • optimal utilization of the installation space available in the pump housing for accommodating pump-active components, especially the rotor-stator assembly closest to the pump inlet, is crucial.
  • a rotor-stator assembly is understood to be a package of rotor disks and stator disks arranged alternately one above the other in the axial direction.
  • Stator disks are typically attached to the stator by clamping their radially outer regions. This clamping or clamping is achieved using spacer rings inserted into the pump housing in a plane axially aligned with the plane of the blades.
  • the spacer rings and the pump housing are components of the vacuum pump's stator; that is, within the scope of this disclosure, the pump housing is considered a component of the stator.
  • a stator disk is clamped between two axially consecutive spacer rings. For example, in the case of laminated stator disks, a radially outer circumferential flange of the stator disk is axially clamped by spacer rings.
  • the blades can be axially clamped with their radially outer blade tips, i.e., their free end sections.
  • the axial clamping of the stator disks to the stator requires radial installation space within the pump housing.
  • the aim is to achieve the highest possible pumping speed by positioning the rotor-stator assembly axially as close as possible to the pump inlet.
  • the first stator disk on the intake side should be located axially as close as possible to the pump inlet to minimize flow losses.
  • the rotor-stator assembly, and therefore also the first stator disk should have the largest possible outer diameter relative to the inner diameter of the respective pump housing.
  • the installation space in the pump inlet area is limited by the pump flange and the means used to connect the pump flange to the flange of a receiver. These means can include screws, and sufficient space must be available in the flange area for handling the screws and for a tool to operate them. It must be positioned. Furthermore, the pump flange must meet certain specifications, particularly regarding its diameter, such as ISO standards.
  • the aforementioned boundary conditions limit the installation space available for the rotor and stator disks in the area of the pump inlet, so that the rotor-stator package cannot be positioned arbitrarily close to the pump inlet if, at the same time, the outer diameter of the first stator disk is to be as large as possible.
  • turbomolecular vacuum pump which has an improved pumping speed with regard to the respective conditions in the area of the pump inlet.
  • the end section is the section of the mounting section which interacts directly with the stator (e.g. with a spacer ring and a shoulder section of the pump housing or with two spacer rings) to attach the stator disk to the stator.
  • stator e.g. with a spacer ring and a shoulder section of the pump housing or with two spacer rings
  • the mounting plane is a plane in which at least one section of the end section lies which is axially further away from the blade plane than other areas of the mounting section.
  • the blade plane can be positioned closer to the pump inlet while maintaining the same axial position of the mounting on the stator. This reduces flow losses in the inlet area and improves pumping speed.
  • Calculations based on parameters of existing Turbomolecular vacuum pumps have demonstrated that pumping speed improvements of more than 3% can be achieved for a practically relevant gas, namely nitrogen.
  • a pump according to the invention therefore continues to meet the relevant requirements, such as ISO standards.
  • the blade plane is axially closer to a pump inlet than the mounting plane. This allows existing structural features of turbomolecular vacuum pumps, in particular a shoulder section of the pump housing located in or near the inlet area, to continue to be used for mounting a stator disk, especially the first stator disk.
  • the stator disk is formed in one piece.
  • the stator disk can be a stamped and/or bent sheet metal part, i.e., a so-called laminated stator disk, or it can be manufactured by machining a starting part.
  • These methods for manufacturing stator disks are generally known and compatible with the invention insofar as they also allow the production of stator disks designed according to the invention with axially spaced blade and mounting planes.
  • Laminated stator disks typically consist of two semicircular or semicircular annular halves to facilitate or even enable assembly.
  • the stator disk refers to both halves together. Therefore, when the present disclosure refers to a one-piece or single-part design in connection with such laminated stator disks, it means that the two halves of the stator disk are each formed in one piece.
  • the mounting section can be formed by a radially outer flange of the stator disk, which has an end section radially outside and is connected to the stator blades radially inside.
  • known laminated stator disks are disk-shaped over their entire diameter, i.e., including the radially outer flange, a laminated stator disk according to the invention is thus provided radially outside with a mounting section that leads from the blade plane to the mounting plane defined by its end section.
  • a radially inner flange of the stator disk in principle, it is also possible, depending on the specific design of the turbomolecular vacuum pump, for a radially inner flange of the stator disk to be designed as a fastening section, so that the stator disk can be clamped radially inside to the stator.
  • the fastening section can have a radially outer or radially inner flange section that lies in the plane of the blades and is connected to the stator blades.
  • the mounting section is formed by free end sections of the stator blades.
  • sawn or milled stator disks can be designed in this way.
  • At least some, preferably all, stator blades then have a radial, in particular radially outer, end section that leads from the blade plane to the mounting plane, these end sections together forming the mounting section of the stator disk.
  • the mounting section comprises a transition section that extends from the blade plane to the end section of the mounting section.
  • the dimensions and/or shape of the transition section can, in principle, be chosen arbitrarily, particularly to adjust the axial distance between the blade plane and the mounting plane.
  • the transition section is not directly attached to the stator; rather, the stator disk is attached to the stator, e.g., by clamping, via the end section.
  • the transition section has at least a cylindrical or conical shape in some sections, with the axis of rotation as the central axis.
  • the mounting section comprises or has an L-shape in a cross-sectional plane containing the axis of rotation.
  • the stator disk can be pot-shaped or hat-shaped.
  • the L-shape is formed by a transition section and the end section of the mounting section.
  • the transition section runs parallel to the axis of rotation, while the end section extends perpendicular to the axis of rotation and thus into the mounting plane; that is, the end section defining the mounting plane lies entirely within the mounting plane.
  • the stator disk is part of a turbomolecular pumping stage comprising a plurality of stator disks and a plurality of rotor disks, each containing several rotor blades, wherein the stator disks and the rotor disks interact to generate the pumping action.
  • the turbomolecular pumping stage can comprise one or more rotor-stator assemblies.
  • the stator disk is part of the first rotor-stator assembly, i.e., the one closest to the pump inlet.
  • the first stator disk of the rotor-stator assembly i.e., the one closest to the pump inlet, is designed according to the invention.
  • the stator disk is the one axially closest to the pump inlet among a plurality of axially spaced stator disks of the stator.
  • one or more structurally identical stator disks can be provided, in which the blade plane is axially closer to a pump inlet than the mounting plane.
  • the axial distance between the blade plane and the mounting plane can be either the same or vary for all stator disks designed according to the invention, e.g., increasing or decreasing in the direction of the pump inlet.
  • Structurally identical stator disks are those in which the blade plane and the mounting plane are axially spaced from each other, i.e., along the axis of rotation. Structurally identical stator disks in this sense can be identical. However, this is not mandatory, and the stator disks can differ from each other in other respects. For example, identical stator disks can have different diameters.
  • the axial distance between the blade plane and the mounting plane can also differ between identical stator disks.
  • stator disk is axially clamped to the stator by the end section of the mounting bracket.
  • This method of attaching stator disks to the stator is generally known and therefore compatible with the invention; that is, the invention does not necessarily require new fastening methods.
  • the stator in particular a pump housing forming part of the stator, comprises, in the region of a pump inlet, a flange section for establishing a mechanical connection with a receiver, and a shoulder section axially spaced from the pump inlet. Together with the flange section, the shoulder section defines a mounting area for at least one connecting element, in particular at least one screw, to be attached to the flange section.
  • Exactly one stator disk is clamped between a spacer ring designed as a separate component and the shoulder section, or two or more stator disks are clamped between the spacer ring and the shoulder section.
  • only one, several, or all of the two or more stator disks can be designed according to the invention, i.e., have a distance between the blade plane and the mounting plane.
  • the turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a receiver (not shown) can be connected in a manner known per se.
  • the gas from the receiver can be drawn out of the receiver via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms a Fig. 1
  • the housing 119 comprises a lower part 121, to which an electronics housing 123 is attached laterally.
  • the electronics housing 123 contains electrical and/or electronic components of the vacuum pump 111, e.g., for operating an electric motor 125 located in the vacuum pump (see also Fig. 3
  • the electronics housing 123 has several connections 127 for accessories.
  • a data interface 129 e.g. according to the RS485 standard, and a power supply connection 131 are located on the electronics housing 123.
  • turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.
  • the housing 119 of the turbomolecular pump 111 has a flood inlet 133, in particular in the form of a flood valve, through which the vacuum pump 111 can be flooded.
  • a purge gas connection 135, also referred to as a purge gas connection is also arranged, through which purge gas can be supplied to protect the electric motor 125 (see e.g. Fig. 3
  • the gas pumped by the pump can be introduced into the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111.
  • Two coolant connections 139 are also arranged in the lower part 121, one of which serves as an inlet and the other as an outlet for coolant that can be directed into the vacuum pump for cooling purposes.
  • Other existing turbomolecular vacuum pumps (not shown) are operated exclusively with air cooling.
  • the lower side 141 of the vacuum pump can serve as a base, allowing the vacuum pump 111 to be operated standing upright on its underside 141.
  • the vacuum pump 111 can be attached to a receiver via the inlet flange 113 and thus operated in a suspended position.
  • the vacuum pump 111 can be designed to operate even when oriented differently than described. Fig. 1 As shown. It is also possible to implement embodiments of the vacuum pump in which the underside 141 can be arranged facing sideways or upwards instead of downwards. In principle, any angle is possible.
  • Mounting holes 147 are also arranged on the underside 141, via which the pump 111 can be attached to a support surface, for example. This is not possible with other existing turbomolecular vacuum pumps (not shown), which are particularly larger than the pump shown here.
  • a coolant line 148 is shown, in which the coolant introduced and removed via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119, which has a rotor shaft 153 rotatable about a rotation axis 151.
  • the turbomolecular pump 111 comprises several turbomolecular pump stages connected in series to provide effective pumping action, with several radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular pump stage.
  • the stator disks 157 are held at a desired axial distance from each other by spacer rings 159.
  • the vacuum pump also includes Holweck pump stages arranged radially within one another and connected in series to effectively pump the pump.
  • Other turbomolecular vacuum pumps exist (not shown) that do not have Holweck pump stages.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical Holweck rotor sleeves 163, 165 attached to and supported by the rotor hub 161, which are oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction. Furthermore, two cylindrical Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction.
  • the pump-active surfaces of the Holweck pump stages are formed by the outer surfaces, i.e., the radial inner and/or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 faces the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171, and together they form the first Holweck pump stage following the turbomolecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169, forming a radial Holweck gap 173, and together they form a second Holweck pump stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175, and together they form the third Holweck pumping stage.
  • a radially extending channel can be provided, through which the radially outer Holweck slot 171 is connected to the central Holweck slot 173. Furthermore, a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, through which the central Holweck slot 173 is connected to the radially inner Holweck slot 175. This connects the nested Holweck pump stages in series.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have several Holweck grooves spiraling around the axis of rotation 151 in the axial direction, while the opposite outer surfaces of the Holweck rotor sleeves 163, 165 are smooth and drive the gas forward in the Holweck grooves for the operation of the vacuum pump 111.
  • a rolling bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 is provided in the area of the pump inlet 115.
  • the operating fluid reservoir comprises several stacked absorbent discs 187, which are impregnated with an operating fluid for the rolling bearing 181, e.g. with a lubricant.
  • the operating fluid is transferred by capillary action from the fluid reservoir via the wiper to the rotating injection nut 185 and, as a result of centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 towards the rolling bearing 181, where it performs, for example, a lubricating function.
  • the rolling bearing 181 and the fluid reservoir are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each containing a ring stack of several axially stacked permanent magnet rings 195, 197.
  • the ring magnets 195, 197 face each other, forming a radial bearing gap 199, with the rotor-side ring magnets 195 arranged radially outside and the stator-side ring magnets 197 radially inside.
  • the magnetic field present in the bearing gap 199 induces magnetic repulsion forces between the ring magnets 195, 197, which result in the radial support of the rotor shaft 153.
  • the rotor-side ring magnets 195 are supported by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.
  • the stator-side ring magnets 197 are supported by a stator-side support section 203, which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a cover element 207 coupled to the support section 201.
  • an emergency or catch bearing 215 is provided, which runs freely without contact during normal operation of the vacuum pump 111 and only engages when there is excessive radial deflection of the rotor 149 relative to the stator, in order to form a radial stop for the rotor 149 and thus prevent a collision between the rotor-side and stator-side structures.
  • the catch bearing 215 is designed as an unlubricated rolling bearing and forms a radial gap with the rotor 149 and/or the stator, which causes the catch bearing 215 to be disengaged during normal pump operation.
  • the radial deflection at which the catch bearing 215 engages is dimensioned to be large enough so that the catch bearing 215 does not engage during normal operation of the vacuum pump, and simultaneously small enough to prevent a collision between the rotor-side and stator-side structures under all circumstances.
  • the vacuum pump 111 comprises the electric motor 125 for rotating the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, whose rotor shaft 153 extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded in the section of the rotor shaft 153 extending through the motor stator 217.
  • a space 219 is arranged between the motor stator 217 and the section of the rotor 149 extending through the motor stator 217. This space comprises a radial motor gap through which the motor stator 217 and the permanent magnet arrangement can magnetically influence each other to transmit the drive torque.
  • the motor stator 217 is fixed within the housing inside the motor compartment 137 provided for the electric motor 125.
  • a purge gas also known as a sealing gas, which can be, for example, air or nitrogen, can enter the motor compartment 137 via the purge gas connection 135. This purge gas protects the electric motor 125 from process gas, e.g., from corrosive components of the process gas.
  • the motor compartment 137 can also be evacuated via the pump outlet 117, meaning that the vacuum pressure in the motor compartment 137 is at least approximately equal to that produced by the backing pump connected to the pump outlet 117.
  • a so-called labyrinth seal 223, which is known per se, can also be provided, in particular to achieve a better seal of the engine compartment 217 against the radially outside Holweck pump stages.
  • a turbomolecular vacuum pump according to the invention as explained below with reference to Figs. 7ff, can be designed with respect to the features not shown in Figs. 7ff as described above with reference to the Figs. 1 to 5 has been described.
  • FIG. 6A and 6B Figure 20 illustrates, in a highly simplified side view, laminated stator disks according to the state of the art, as used in a conventional intake area of a turbomolecular vacuum pump.
  • stator disks 20 produced by punching and bending and thus formed in one piece, each comprise a radially outer flange 24 – hereinafter also referred to as outer flange – and a (not shown) radially inner flange – hereinafter also referred to as inner flange – as well as several stator blades 22 located between them, which are oriented relative to a blade plane 26 defined by the flanges. are tilted by bending. According to Fig. 6A The stator blades 22 protrude on both sides of the blade plane 26, according to Fig. 6B only on one side.
  • the outer flange 24 serves to attach the stator disk 20 to a stator (not shown) by clamping the outer flange 24, for example, between two spacer rings.
  • the outer flange 24 thus also defines a mounting plane 32, i.e., in the known stator disks 20, the blade plane 26 and the mounting plane 32 coincide.
  • the laminated stator disk 20 shown in the invention comprises, according to a known laminated stator disk (such as in, for example, in Fig. 6B (shown) between an inner flange (not shown) and a radially outer flange section 24a – hereinafter referred to as outer flange 24a – stator blades 22 angled to one side.
  • a known laminated stator disk such as in, for example, in Fig. 6B (shown) between an inner flange (not shown) and a radially outer flange section 24a – hereinafter referred to as outer flange 24a – stator blades 22 angled to one side.
  • the outer flange 24a lying in the blade plane 26, is part of a specially designed mounting section 28, which, in addition to the outer flange 24a, comprises an end section 30, which defines a mounting plane 32 extending at an axial distance 52 from the blade plane 26, and an axially extending (i.e., parallel to the axial direction Z) transition section 34 leading from the outer flange 24a – i.e., from the blade plane 26 – to the mounting plane 32.
  • This laminated stator disk 20 can also be manufactured by punching and bending, similar to a known laminated stator disk.
  • the distance 52 between the blade plane 26 and the mounting plane 32 is, for example, 10 mm.
  • the end section 30 serves to attach the stator disk 20 to a stator of a turbomolecular vacuum pump. This is followed by... Fig. 9A discussed in more detail.
  • Fig. 8 It can be seen that the halves of a two-part laminated stator disk 20 according to the invention, of which in Fig. 8 only one half is shown and each accordingly Fig. 7 and Fig. 9A
  • the two inner flanges 24a and the radially inner flange section 24b (hereinafter referred to as the inner flange 24b) are each annular in shape, i.e., both the outer flange 24a and the radially inner flange section 24b are semicircular.
  • the inclined stator blades 22 are located between the inner flange 24b and the outer flange 24a.
  • the two inner flanges 24b of the two halves of the stator disk 20 define a circular opening through which the rotor (not shown) of the turbomolecular pump extends, its axis of rotation then coinciding with the central axis of the stator disk 20 formed by the two halves.
  • the transition section 34 extending in the axial direction Z and the end section 30 extending perpendicular to it and projecting radially outwards from the transition section 34.
  • the end section 30 of the mounting section 28 of the stator disk 20 closest to the pump inlet 36 is clamped between a spacer ring 50 and a shoulder section 40 of the pump housing 38.
  • the blade plane 26 is therefore closer to the inlet plane 54 defined by the flange section 42 and the pump inlet 36 than the mounting plane 32. This allows the distance 56 between the inlet plane 54 and the blade plane 26 to be reduced compared to known pumps, which has a positive effect on the performance of the turbomolecular vacuum pump 10, as flow losses are reduced.
  • a mounting area 44 Between the shoulder section 40 and the flange section 42 there is a mounting area 44, through which the heads 48 of circumferentially distributed fastening screws 46 are accessible, with which the flange section 42 can be screwed to a receiver not shown.
  • the blade plane 26 is located at the level of the mounting area 44, which until now has remained unused for the arrangement of stator disks due to the reduced inner diameter of the pump housing 12.
  • the stator disk 20 shown is the first, i.e., the one closest to the pump inlet 36, and forms part of a turbomolecular pump stage comprising a plurality of stator disks 20 and a plurality of rotor disks 58 of the rotor 14, each equipped with rotor blades 16. Only the first rotor disk 58 is in Fig. 9A
  • the further stator disks, not shown, are each clamped between two spacer rings 50 and can be designed as a continuous disk shape as in the prior art or also in a manner according to the invention with a mounting plane axially spaced from the blade plane.
  • the transition section 34 has a cylindrical shape, wherein the outer collar 24a and the transition section 34 as well as the transition section 34 and the end section 30 each enclose an angle of at least substantially 90°, so that the fastening section 28 has an L-shape in a section plane containing the axis of rotation 18 and the stator disk 20 as a whole has a hat or pot shape.
  • the Fig. 9B and 9C The figures show that two or more stator disks 20 can also be clamped between a spacer ring 50 and the shoulder section 40. Between the stator disk 20 closest to the pump inlet 36 and the next or subsequent stator disk 20, a further rotor disk 58 with rotor blades 16 is provided.
  • the further stator disk 20, clamped between the spacer ring 50 and the shoulder section 40 can be designed according to the invention with a mounting plane 32 axially spaced from the blade plane 26 (see Figure 1).
  • Fig. 9B The other stator disk 20 However, it can also be designed in a continuous disc shape as in the prior art (see Fig. 9C ).
  • stator disk 20 can also be clamped between two spacer rings 50 of the stator 12 with the end section 30 of its mounting section 28.
  • Figs. 10B to 10E differ from that of the Fig. 9A by the shape of the fastening section 28 including the end section 30 and by the shape of the clamping surfaces of the spacer rings 50.
  • These exemplary embodiments illustrate that the design of a stator disk 20 according to the invention is not limited to the hat or pot shape according to Fig. 9A is limited, but the fastening section 28 can basically have any shape.
  • the spacer rings 50 can each be adapted to the shape of the end section 30 with their clamping surfaces, as shown in the Figs. 10B to 10E can also be removed.
  • the clamping surfaces of the spacer rings 50 do not need to be exactly adapted to the shape of the respective end section 30. In a specific case, it may be acceptable or even desirable for the end section 30 of the stator disk 20 to deform when clamped and thus adapt itself to the interacting clamping surfaces of the spacer rings 50.
  • the transition section 34 is conical and transitions into the end section 30, which is also conical and has the same cone angle, and whose free end defines the fastening plane 32.
  • Fig. 10C is unlike that of the Fig. 10B no outer flange lying in the plane of the blade 26 is provided, i.e. the Transition section 34 leads directly from the radially outer ends of the blades 22 to the end section 30.
  • Both the transition section 34 and the end section 30 are curved.
  • the curvature can, in principle, be chosen arbitrarily.
  • the fastening plane 32 is defined here by the apex of the end section 30.
  • the exemplary embodiment of the Fig. 10E corresponds to that of the Fig. 10B , however, there is no transition section, but the end section 30 clamped between the spacer rings 50 connects directly to the outer collar 24a.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (11)

  1. Pompe à vide turbomoléculaire (10) comprenant :
    un stator (12) ;
    au moins un rotor (14) muni d'une pluralité d'aubes de rotor (16) réparties en direction circonférentielle, qui peut être entraîné en rotation autour d'un axe de rotation (18) afin de produire un effet de pompage ; et
    au moins un disque de stator (20) fixé au stator (12), qui coopère avec le rotor (14) pour produire l'effet de pompage et qui comprend une pluralité d'aubes de stator (22) réparties en direction circonférentielle, qui définissent un plan d'aubes (26),
    dans laquelle
    le disque de stator (20) comprend, pour la fixation au stator (12), une partie de fixation (28) ayant une portion d'extrémité (30) par laquelle le disque de stator (20) est fixé au stator (12) et qui définit un plan de fixation (32), et
    le plan d'aubes (26) et le plan de fixation (32) s'étendent perpendiculairement à l'axe de rotation (18) et sont espacés l'un de l'autre le long de l'axe de rotation (18),
    le stator (12) comprend, dans la zone d'une entrée de pompe (36), une partie de bride (42) destinée à établir une liaison mécanique avec un récipient,
    le stator (12) comprend en outre une partie d'épaulement (40) espacée axialement de l'entrée de pompe (36), qui définit, conjointement avec la partie de bride (42), une zone de montage (44) pour au moins un élément de liaison à rapporter sur la partie de bride (42),
    caractérisée en ce qu'exactement un disque de stator (20) est serré entre une bague d'écartement (50), conçue comme un composant séparé, et la partie d'épaulement (40), ou deux ou plusieurs disques de stator (20) sont serrés entre une bague d'écartement (50), conçue comme un composant séparé, et la partie d'épaulement (40),
    sachant que ledit exactement un disque de stator (20) ou l'un desdits deux ou plusieurs disques de stator (20) est le disque de stator (20) le plus proche axialement de l'entrée de pompe (36), dont le plan de fixation (32) est situé dans la zone de la partie d'épaulement (40) et dont le plan d'aubes (26) est situé entre l'entrée de pompe (36) et la partie d'épaulement (40).
  2. Pompe à vide (10) selon la revendication 1,
    dans laquelle ledit exactement un disque de stator (20) ou l'un desdits deux ou plusieurs disques de stator (20) est formé d'un seul tenant, et/ou ledit exactement un disque de stator (20) ou l'un desdits deux ou plusieurs disques de stator (20) est une pièce estampée et/ou pliée en tôle ou est fabriqué par usinage par enlèvement de matière d'une pièce de départ, en particulier par sciage et/ou fraisage de la pièce de départ.
  3. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle la partie de fixation (28) est formée par une collerette (24) dudit exactement un disque de stator (20) ou de l'un desdits deux ou plusieurs disques de stator (20), qui présente radialement à l'extérieur la portion d'extrémité (30) et qui est reliée radialement à l'intérieur aux aubes de stator (22), ou inversement, et/ou
    la partie de fixation (28) comprend une portion de collerette radialement extérieure ou radialement intérieure (24a, 24b) qui est située dans le plan d'aubes (26) et est reliée aux aubes de stator (22).
  4. Pompe à vide (10) selon l'une au moins des revendications 1 ou 2, dans laquelle la partie de fixation (28) est formée par des portions d'extrémité libres des aubes de stator (22).
  5. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle la partie de fixation (28) comprend une portion de transition (34) qui mène du plan d'aubes (26) à la portion d'extrémité (30) de la partie de fixation (28),
    en particulier, la portion de transition (34) présente au moins localement une forme cylindrique ou conique avec l'axe de rotation (18) comme axe central.
  6. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle la portion d'extrémité (30) de la partie de fixation (28) présente une forme d'anneau circulaire ou une forme conique avec l'axe de rotation (18) comme axe central ou présente un tracé courbe dans un plan de coupe contenant l'axe de rotation (18).
  7. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle la partie de fixation (28) possède ou présente une forme en L dans un plan de coupe contenant l'axe de rotation (18),
    en particulier, la forme en L est formée par une portion de transition (34), menant du plan d'aubes (26) à la portion d'extrémité (30) de la partie de fixation (28), et par la portion d'extrémité (30) de la partie de fixation (28).
  8. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle ledit exactement un disque de stator (20) ou l'un desdits deux ou plusieurs disques de stator (20) est une partie d'un étage de pompe turbomoléculaire qui comprend une pluralité de disques de stator (20) et une pluralité de disques de rotor (58) du rotor (14) comprenant chacun plusieurs aubes de rotor (16),
    les disques de stator (20) et les disques de rotor (58) coopèrent pour produire l'effet de pompage.
  9. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle ledit exactement un disque de stator (20) ou l'un desdits deux ou plusieurs disques de stator (20) est le disque de stator (20) le plus proche axialement de l'entrée de pompe (36) parmi une pluralité de disques de stator (20) du stator (12) espacés axialement les uns des autres, et/ou en plus dudit exactement un disque de stator (20) ou de l'un desdits deux ou plusieurs disques de stator (20), il est prévu un ou plusieurs disques de stator (20) de construction identique audit disque, dans lesquels le plan d'aubes (26) respectif est axialement plus proche d'une entrée de pompe (36) que le plan de fixation (32).
  10. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle ledit exactement un disque de stator (20) ou l'un desdits deux ou plusieurs disques de stator (20) est serré axialement sur le stator (12) par la portion d'extrémité (30) de la partie de fixation (28).
  11. Pompe à vide (10) selon l'une au moins des revendications précédentes, dans laquelle un carter de pompe (38) formant une partie du stator (12) comprend la partie de bride (42), destinée à établir une liaison mécanique avec un récipient, ainsi que la partie d'épaulement (40) espacée axialement de l'entrée de pompe (36),
    en particulier, l'élément de liaison est au moins une vis (46).
EP23218595.9A 2023-12-20 2023-12-20 Pompe à vide turbomoléculaire Active EP4325061B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP23218595.9A EP4325061B1 (fr) 2023-12-20 2023-12-20 Pompe à vide turbomoléculaire
JP2024039716A JP7772850B2 (ja) 2023-12-20 2024-03-14 ターボ分子真空ポンプ

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Application Number Priority Date Filing Date Title
EP23218595.9A EP4325061B1 (fr) 2023-12-20 2023-12-20 Pompe à vide turbomoléculaire

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Publication number Priority date Publication date Assignee Title
JP2025136809A (ja) * 2024-03-08 2025-09-19 株式会社島津製作所 真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230323890A1 (en) * 2020-08-21 2023-10-12 Edwards Japan Limited Vacuum pump, stator blade, and spacer

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Publication number Priority date Publication date Assignee Title
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang
JP4527966B2 (ja) * 2003-05-01 2010-08-18 株式会社大阪真空機器製作所 分子ポンプ
DE102006050565A1 (de) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Statorscheibe für eine Turbomolekularpumpe
JP2011220148A (ja) * 2010-04-06 2011-11-04 Shimadzu Corp ターボ分子ポンプ
EP3734078B1 (fr) * 2020-03-05 2022-01-12 Pfeiffer Vacuum Technology AG Pompe turbomoléculaire et procédé de fabrication d'un disque de stator pour une telle pompe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230323890A1 (en) * 2020-08-21 2023-10-12 Edwards Japan Limited Vacuum pump, stator blade, and spacer

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EP4325061A1 (fr) 2024-02-21
JP2025098914A (ja) 2025-07-02
JP7772850B2 (ja) 2025-11-18
EP4325061C0 (fr) 2025-11-12

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