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EP4194586A2 - Appareil de traitement de surface - Google Patents

Appareil de traitement de surface Download PDF

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Publication number
EP4194586A2
EP4194586A2 EP22210630.4A EP22210630A EP4194586A2 EP 4194586 A2 EP4194586 A2 EP 4194586A2 EP 22210630 A EP22210630 A EP 22210630A EP 4194586 A2 EP4194586 A2 EP 4194586A2
Authority
EP
European Patent Office
Prior art keywords
treatment
surface treatment
chamber
target
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22210630.4A
Other languages
German (de)
English (en)
Other versions
EP4194586A3 (fr
Inventor
Kazuyoshi Nishimoto
Masahito Tanigawa
Tomoji Okuda
Yutaka Nishinaka
Masayuki Utsumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Uemera Kogyo Co Ltd
C Uyemura and Co Ltd
Original Assignee
Uemera Kogyo Co Ltd
C Uyemura and Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uemera Kogyo Co Ltd, C Uyemura and Co Ltd filed Critical Uemera Kogyo Co Ltd
Publication of EP4194586A2 publication Critical patent/EP4194586A2/fr
Publication of EP4194586A3 publication Critical patent/EP4194586A3/fr
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1619—Apparatus for electroless plating
    • C23C18/1628—Specific elements or parts of the apparatus
    • C23C18/163—Supporting devices for articles to be coated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/003—Apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/20—Perforated pipes or troughs, e.g. spray booms; Outlet elements therefor
    • B05B1/205—Perforated pipes or troughs, e.g. spray booms; Outlet elements therefor characterised by the longitudinal shape of the elongated body
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0264—Overhead conveying means, i.e. the object or other work being suspended from the conveying means; Details thereof, e.g. hanging hooks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0405—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads
    • B05B13/041—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
    • B05B9/0423—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material for supplying liquid or other fluent material to several spraying apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1619—Apparatus for electroless plating
    • C23C18/1632—Features specific for the apparatus, e.g. layout of cells and of its equipment, multiple cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/10—Agitating of electrolytes; Moving of racks
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34—Pretreatment of metallic surfaces to be electroplated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48—After-treatment of electroplated surfaces

Definitions

  • the present invention relates to a surface treatment apparatus to perform surface treatments such as plating, pretreatment, post-treatment, cleansing, water washing, pickling, etching, desmear, and drying.
  • an apparatus in which the substrate is immersed in a treatment bath filled with a treatment solution (immersion system).
  • a treatment solution immersion system
  • the substrate is pulled out and moved to a treatment bath for the next treatment to be immersed therein. Repeating this makes it possible to perform surface treatments necessary for the substrate.
  • Japanese Patent No. 6403739 in Patent Gazette discloses an apparatus in which a treatment solution is discharged onto a substrate held at an upper part and the treatment solution dropped from the substrate is recovered and discharged again.
  • FIG. 30 shows a surface treatment apparatus described in Japanese Patent No. 6403739 in Patent Gazette.
  • An upper end part of a substrate 206 is pinched and held by a clip 204 of a hanger 202 in a surface treatment chamber 200.
  • pipes 208 for discharging the treatment solution are provided on both sides of the substrate 206 held by the hanger 202.
  • Each of the pipes 208 has a hole 210 to discharge the treatment solution obliquely upward.
  • the discharged treatment solution flows down the surface of the substrate 206 and reaches the bottom, and is circulated and discharged from the pipes 208 again by a pump 212.
  • the hanger 202 is moved inside the surface treatment chamber 200 in a direction perpendicular to the surface of a paper plane by a drive mechanism 214.
  • the surface treatment chambers 200 to perform various treatments are provided continuously, and the substrate 206 held by the hanger 202 is moved through the treatment chambers in sequence by the drive mechanism 214.
  • the apparatus based on the system described in Japanese Patent No. 6403739 in Patent Gazette does not require the surface treatment chamber to be filled with treatment solution, which has the advantage of reducing the initial amount of treatment solution required (the amount of solution in the treatment bath) and of being more efficient because the necessary treatment is performed simply by moving the treatment target in a horizontal direction.
  • the surface treatment order is not flexible since the treatment target is moved through in an arrangement order of a plurality of surface treatment chambers, and that the length of the apparatus becomes long since the surface treatment chambers are arranged continuously in a longitudinal direction.
  • the present invention is aimed for solving the above problems and providing a compact and efficient surface treatment apparatus.
  • FIG. 1 shows an entire configuration of a surface treatment apparatus according to one embodiment of the present invention.
  • Surface treatment chambers P1, P2, ...and Pn are arranged in a row. Each of these surface treatment chambers performs a plating treatment, pretreatment, post-treatment, cleansing, water washing, pickling, etching, desmear, drying, peeling treatment of plating adhered to a hanger, or the like.
  • a plurality of surface treatment chambers performing the same treatment may be provided.
  • the workpiece 4 is transferred as follows. First, the workpiece 4 is attached to a hanger 6 as a holding member in a workpiece attachment/detachment area 2 indicated by a dashed line.
  • the hanger 6 is held by a hanger holding chuck (not shown) fixed to a slider 12 of an electric actuator 8.
  • the electric actuator 8 After attaching the workpiece 4 to the hanger 6, the electric actuator 8 is driven to move the workpiece 4 in a direction of an arrow B, and the workpiece 4 is located at a loading/unloading position 14. At the loading/unloading position 14, the hanger 6 holding the workpiece 4 is released and left as is.
  • a housing box body 30 is provided opposite to the surface treatment chambers P1, P2, ...and Pn arranged in a row. Rollers (not shown) are provided at the bottom of the housing box body 30 and are movable in directions of arrows A and B by a drive mechanism (not shown). An electric actuator 18 is provided on the top of the housing box body 30.
  • the housing box body 30 and the electric actuator 18 are moved in the direction of the arrow A to be located on the loading/unloading position 14 where the hanger 6 holding the workpiece 4 is left.
  • a hanger holding chuck 26 fixed to a slider 22 of the electric actuator 18 is moved in an arrow C direction to pinch and hold the hanger 6.
  • the hanger holding chuck 26 is rotated through an angle of 90 degrees to face a direction to accommodate the workpiece 4 in the housing box body 30.
  • the workpiece 4 held by the hanger 6 is moved in an arrow D direction by the electric actuator 18 to be accommodated inside through an inlet/outlet 76 of the housing box body 30.
  • the housing box body 30 and the electric actuator 18 are collectively moved to in the direction of arrow A or arrow B to oppose the surface treatment chamber P1, P2, ...or Pn which performs the first treatment.
  • the housing box body 30 and the electric actuator 18 are moved to the position of the surface treatment chamber P6.
  • the hanger 6 is moved in the arrow D direction to introduce the workpiece 4 to the surface treatment chamber P6 through an inlet/outlet 16 of the surface treatment chamber P6.
  • the hanger 6 is moved in the arrow C direction to return the workpiece 4 to the housing box body 30.
  • the housing box body 30 and the electric actuator 18 are collectively moved to in the direction of arrow A or arrow B to oppose the surface treatment chamber P1, P2, ...or Pn which performs the next treatment.
  • the housing box body 30 and the electric actuator 18 are moved to the position of the surface treatment chamber P7.
  • the hanger 6 is moved in the arrow D direction to introduce the workpiece 4 to the surface treatment chamber P7 through the inlet/outlet 16 of the surface treatment chamber P7.
  • the hanger 6 is moved in the arrow C direction to return the workpiece 4 to the housing box body 30.
  • the surface treatment in the surface treatment chamber Pn which is an end of process is completed.
  • the hanger 6 is moved in the arrow C direction to the edge of the electric actuator 18.
  • the hanger holding chuck 26 is rotated to turn the workpiece 4 to the direction where the workpiece 4 can be introduced to the surface treatment chamber Pm that performs a drying treatment.
  • the housing box body 30 and the electric actuator 18 are returned in the arrow B direction to locate the hanger 6 at an intermediate loading/unloading position 24.
  • the hanger 6 is stopped being held by pinching by the hanger holding chuck 26 and left as it is. Accordingly, the hanger 6 holding the workpiece 4 is placed at a starting end of the surface treatment chamber Pm that performs the drying treatment.
  • the hanger 6 is pinched and held by a hanger holding chuck (not shown) fixed to a slider 11 of an electric actuator 9. Next, the hanger 6 is moved in the arrow B direction to move the workpiece 4 in the surface treatment chamber Pm. In the surface treatment chamber Pm, the hanger is slowly moved in the arrow B. Meanwhile, the workpiece 4 is dried by a heater (not shown).
  • the hanger holding chuck releases the hanger 6 and leave it as is.
  • the hanger holding chuck fixed to the slider 12 of the electric actuator 8 is moved in the arrow A direction to pinch the left hanger 6.
  • the electric actuator 8 moves the hanger 6 in the arrow B direction to locate it in the workpiece attachment/detachment area 2.
  • the treated workpiece 4 is detached from the hanger 6 in the workpiece attachment/detachment area 2.
  • the surface treatment apparatus is efficient since the workpiece 4 can be moved in and out from the side face of the surface treatment chamber P.
  • the order of the treatments in the respective surface treatment chambers P1 to Pn can be changed, which is highly flexible.
  • the surface treatment chambers P1 to Pn are arranged in their short-length direction, which makes the apparatus compact in length.
  • each part can be performed by a control circuit having a CPU.
  • the configuration and operation of each part is described in detail below.
  • FIG. 2 shows details of the workpiece attachment/detachment area 2.
  • a top plate 40 of the hanger 6 is placed on a placing stand 5. In this state, the workpiece 4 is pinched and held by the hanger 6.
  • FIG. 3 shows a perspective view of the hanger 6.
  • a hanging plate 42 extends downward from the top plate 40.
  • a clip holding member 44 is laterally fixed to the hanging plate 42.
  • the clips 50 are provided at the both ends and center of the clip holding member 44.
  • FIG. 4 shows details of the clip 50.
  • the clip 50 is biased by a spring 52 in such a direction that the tips of the clip 50 are closed.
  • FIG. 4 shows a state where the tips have been opened by pressing the spring 52 against it.
  • treatment solution receiving members 45 extending along the entire width of the hanger 6 is provided across the tips of the clips 50.
  • each treatment solution receiving member 45 has a flat plate 46 forming a proximal portion thereof, and a projected section 48 raised outward in a semicircular shape to form a distal portion thereof. Gripping projections 49 for pinching and grasping the workpiece 4 are provided along an inner lower end of each projected section 48.
  • FIG. 2 shows a state where the workpiece 4 has already been pinched in the hanger 6.
  • the process of attaching the workpiece 4 to the hanger 6 is as follows.
  • FIG. 5 shows attachment of the workpiece 4 to the hanger 6.
  • a contact member 60 is brought into contact with the clip holding member 44 in a state where the hanger 6 is placed on the placing stand (not shown in FIG. 5 ).
  • a cylinder 62 presses the clip 50 in this state to make the tips in open state as shown in FIG. 4 .
  • the plate-like workpiece 4 is held and carried by a distal chuck 66 of a robot arm 64.
  • the robot arm 64 inserts the upper end part of the workpiece 4 into the open tips of each of the clips 50.
  • the cylinder 62 is retrieved in this state to close the clips 50 of the hanger 6. Accordingly, as shown in FIG. 2 , the workpiece 4 is held by the hanger 6.
  • the electric actuator 8 is provided in which the slider 12 is moved by a motor 3.
  • a hanger holding chuck 10 is fixed to the slider 12.
  • the hanger holding chuck 10 is configured to be movable in the vertical direction. The tips of the hanger holding chuck 10 can be opened and closed so that the top plate 40 of the hanger 6 can be pinched and held.
  • FIG.2 shows a state where the hanger holding chuck 10 is opened. From this state, the hanger holding chuck 10 is moved down and the tips thereof are closed to pinch and hold the top plate 40 of the hanger 6. Next, the slider 12 of the electric actuator 8 is moved in the arrow B direction. Then the hanger holding chuck 10 is moved down and the tips thereof is opened to place the hanger 6 on a placing stand 7 on the outgoing deliver position.
  • the electric actuator 18 which is the loading/unloading mechanism shown in FIG.6 is collectively moved in the arrow A direction. Then the placed hanger 6 holding the workpiece 4 is held by the hanger holding chuck 26 of the electric actuator 18.
  • the electric actuator 18 is fixed on the top of the housing box body 30 by arms 70.
  • Driving rollers 72 as the inter-treatment-chamber movement mechanism are provided on the bottom of the housing box body 30, so it is configured that the housing box body 30 is movable on rails 74. Therefore, the housing box body 30 and the electric actuator 18 can be moved in the direction of arrow A or arrow B by controlling the rotation of the driving rollers 72.
  • FIG. 13 shows details of the housing box body 30 and the electric actuator 18.
  • the arms 70 are provided on the top of the housing box body 30, and the electric actuator 18 is fixed to the arms 70.
  • the hanger holding chuck 26 is fixed to a slider 22 which is driven by the electric actuator 18.
  • the hanger holding chuck 26 includes an upper holder 26a fixed to the slider 22 and a lower holder 26b supported to the upper holder 26a by a rotating shaft 26d.
  • the lower holder 26a can be rotated around the rotating shaft 26d by a control mechanism which has a motor and a gear accommodated in the upper holder 26a.
  • a magnetic sensor or optical sensor (not shown) is provided in the upper holder 26a and lower holder 26b so as to oppose them, so it is configured that the rotation to a predetermined angle can be detected. Note that sensors are not required when a stepping motor is used as the motor.
  • the lower holder 26b an be moved in the vertical direction. Movement in the vertical direction can be implemented by a mechanism to move the motor and the gear collectively in the vertical direction. Since the movement in the vertical direction dose not recquire very high precision, control by a sensor is not necessary. Of course, a sensor may be provided to control positions by a control circuit.
  • a chuck 26c is provided on the lower holder 26b. Right and left components of the chuck 26c is movable in an arrow Z direction by a control mechanism accommodated in the lower holder 26b, which makes it possible to pinch or release the top plate 40 of the hanger 6.
  • the housing box body 30 and the electric actuator 18 are moved in the arrow A direction.
  • the hanger holding chuck 26 fixed to the slider 22 of the electric actuator 18 arrives at a central position of the placed hanger 6
  • the housing box body 30 and the electric actuator 18 are stopped at the position.
  • a sensor which detects a marker arranged on (or arranged in proximity to) the rail 74 magnetically, electrically, or optically is provided on the central position of the placed hanger 6 to determine by the output of the sensor whether the housing box body 30 and the electric actuator 18 have arrived at a desired position (in the above case, whether the hanger holding chuck 26 has arrived at the central position of the placed hanger 6).
  • the hanger holding chuck 26 is moved down with its tips in opened state, and then the tips are closed to pinch and hold the top plate 40 of the hanger 6.
  • the electric actuator 18 is collectively moved in the arrow B direction.
  • the hanger holding chuck 26 is fixed to the slider 22 of the electric actuator 18 and is movable in the directions of arrows C and D.
  • the hanger holding chuck 26 can not only open/close and vertically move its tips but also rotate as shown by an arrow K.
  • FIG. 7 shows a state where the hanger holding the workpiece 4 is rotated. It is rotated until the workpiece 4 becomes horizontal to an extending direction of the electric actuator 18. Thereafter, the slider 22 is moved in the arrow D direction to introduce the workpiece 4 into the housing box body 30 through the inlet/outlet 76 on the side face of the housing box body 30 (also provided on the opposite side face). A gap 78 is provided on the top of the housing box body 30 to prevent interference of the hanging plate 42 of the hanger 6.
  • hanger 6 shown in FIG. 7 is in a different form (the length of the top plate is short) from the hanger 6 shown in FIG. 3 . Either of the hangers 6 can be used. Hereafter, description is made assuming the hanger 6 shown in FIG.7 is used.
  • the hanger holding chuck 26 is continuously moved in the arrow D direction as shown in FIG. 8 to move the workpiece 4 inside the surface treatment chamber P6 through an inlet/outlet 80 provided on the side face of the surface treatment chamber P6. Note that a gap 82 is provided on the top of the surface treatment chamber P6 to prevent interference of the hanging plate 42 of the hanger 6.
  • the electric actuator 18 stops moving in the arrow D direction when the hanger 6 reaches the top of the placing stand 84.
  • the placing stand 84 is formed by placing L-shaped members back-to-back with a gap between them. The hanger holding chuck 26 is pushed down to install the top plate 40 of the hanger 6 onto the placing stand 84.
  • FIG. 9 shows a cross-sectional view of the surface treatment chamber P9.
  • the placing stand 84 is provided in the upper part, and the top plate 40 of the hanger 6 is mounted thereon.
  • the hanging plate 42 of the hanger 6 is introduced into the room through the gap 82, and the workpiece 4 held by the hanger 6 is held inside the room.
  • the placing stand 84 is not fixed to the ceiling of the surface treatment chamber P6, but is fixed to a swing mechanism 86 fixed to the ceiling as shown in FIG.8 .
  • FIG. 10A shows a structure of the shutter 89.
  • the top of the shutter 89 is fixed to the slider of the actuator 88 (drive mechanism).
  • a roller (not shown) is provided below the shutter 89 and is movable on a rail (not shown) provided on the bottom surface of the treatment chamber.
  • the actuator 88 can open and close the shutter 89.
  • the open state of the shutter 89 is shown in FIG. 10A
  • the closed state is shown in FIG. 10B . From the state of FIG. 10A , the actuator 88 allows the shutter 89 to slide in the arrow G direction and close as shown in FIG. 10B . While the treatment solution is discharged, the treatment solution is prevented from leaking out from the inlet/outlet 80 by closing the shutter 89.
  • the pipes 92 which are hollow members for discharging the treatment solution.
  • the pipes 92 are supplied with the treatment solution by a pump 94.
  • a filter 95 is provided in a supply path between the pump 94 and the pipes 92. Accordingly, clean treatment solution is always discharged toward the workpiece 4, and the quality of the surface treatment can be improved. Co-deposition of foreign substances especially on the plating film in the plating treatment can be prevented.
  • the treatment solution differs depending on the surface treatment chamber. In this embodiment, cleaning solution, desmear solution, pretreatment solution, plating solution, or the like are used.
  • a hole 90 (treatment solution discharge port) of the pipe 92 is provided facing upward at a predetermined angle (e.g., 45 degrees).
  • a predetermined angle e.g. 45 degrees.
  • the treatment solution is discharged obliquely upward from the pipe 92 and reaches the hanger 6.
  • the hole 90 is preferably oriented in the range of 5 to 85 degrees to the horizontal direction.
  • the hole 90 of the pipe 92 is provided at predetermined intervals (e.g., 10 cm) and perpendicular to a paper plane.
  • the treatment solution ejected from the hole 90 of the pipe 92 contacts the flat plate 46 (see FIG. 3 ) of the treatment solution receiving member 45 and flows downward.
  • a semicircular projected section 48 is provided in the downward direction, and the treatment solution flowing along the surface flows in at a near-perpendicular angle to the workpiece 4. Accordingly, it is possible to prevent the treatment solution adhering to the surface of the workpiece 4 from being washed off more than necessary.
  • the treatment solution then, flows along the surface of the workpiece 4, and the surface treatment is performed.
  • the fallen treatment solution is collected in a tank 96 provided at the bottom of the surface treatment chamber P6.
  • the pump 94 sends the collected treatment solution again to the pipe 92 for use.
  • the swing mechanism 86 (which can be composed of an electric actuator or the like) shown in FIG. 8 swings the placing stand 84 in the direction of arrows C and D. Accordingly, the hanger 6 and the workpiece 4 are similarly swung.
  • swing mechanism 86 swings the workpiece 4 to prevent the unevenness due to uneven flow of the treatment solution. Note that the movement by the swing mechanism is preferably greater than the intervals between the holes 90 of the pipe 92.
  • the electric actuator 18 and the housing box body 30 can be moved in the direction of arrows A and B (see FIG. 8 ) to move other workpieces 4. Accordingly, the treatment efficiency can be improved.
  • the shutter 89 is opened to open the inlet/outlet 80, as shown in FIG. 10A .
  • the actuator 18 and the housing box body 30 are moved in the direction of arrows A and B shown in FIG. 8 to a position where the workpiece 4 can be removed from the surface treatment chamber P6 (the gap 78 of the housing box body 30 and the gap 82 of the surface treatment chamber P6 are aligned). That is, they are moved to a position as shown in FIG. 8 .
  • the electric actuator 18 moves the hanger holding chuck 26 in the arrow D direction to pinch the hanger 6 holding the workpiece 4 and move it again in the arrow C direction to return the workpiece 4 to the housing box body 30.
  • the housing box body 30 is provided, so the treatment solution can be collected at its bottom.
  • the electric actuator 18 and the housing box body 30 are moved in the arrow A direction to the position of the next surface treatment chamber P7.
  • the workpiece 4 is also introduced into the surface treatment chamber P7 by the electric actuator 18 in the same manner as described above.
  • the placing stand 84 is not provided in the surface treatment chamber P7.
  • the treatment is performed by applying the treatment solution.
  • the electric actuator 18 and the housing box body 30 must remain in their positions until the treatment is completed. Therefore, it is suitable for the surface treatment that is completed in a relatively short time. For example, washing with water.
  • the same treatment is repeated for the different surface treatment chambers, and when treatment in the surface treatment chamber Pn is completed, the workpiece 4 is carried to the last surface treatment chamber Pm for treatment.
  • FIG. 11 shows a state in which the workpiece 4 that has been treated in the surface treatment chamber Pn is moved in the arrow C direction and positioned at the end of the electric actuator 18. In this position, the hanger holding chuck 26 is rotated in the arrow L direction.
  • FIG. 11 shows a state in which the rotation has been completed. Due to the rotation, the workpiece 4 is oriented such that it can be introduced into the surface treatment chamber Pm.
  • the housing box body 30 and the electric actuator 18 as a whole are moved in the arrow B direction to move the workpiece 4 to the intermediate deliver position 24.
  • the hanger holding chuck 26 is lowered and the hanger 6 holding the workpiece 4 is left on the placing stand 15.
  • the electric actuator 9 moves the hanger holding chuck 13 fixed to the slider 11 in the arrow A direction.
  • the hanger holding chuck 13 reaches the top of the placing stand 15, the hanger holding chuck 13 is lowered, the hanger 6 is pinched and held, and the hanger holding chuck 13 is raised.
  • the electric actuator 9 moves the hanger 6 holding the workpiece 4 in the arrow B direction.
  • the gap 81 is provided in the upper part of the surface treatment chamber Pm to avoid interference with the hanger 6 during its movement.
  • FIG. 12 shows a cross-sectional view of the surface treatment chamber Pm that performs the drying treatment.
  • the hanger 6, held by the hanger holding chuck 13 with the top plate 40 pinched therebetween, is introduced into the surface treatment chamber Pm through the gap 81, and the workpiece 4 is held in the hanger 6.
  • Heaters 112 are provided on both side walls of the surface treatment chamber Pm to dry the workpiece 4.
  • the surface treatment chamber Pm is configured longer than the other surface treatment chambers P1 to Pn, as shown in FIG. 11 .
  • the surface treatment chamber Pm is arranged perpendicular to the other surface treatment chambers P1 to Pn. This allows an arrangement without wasting space.
  • the workpiece 4 can be slowly moved in the arrow B direction in the surface treatment chamber Pm by the electric actuator 9.
  • the hanger 6 reaches the placing stand 17, the hanger holding chuck 13 is lowered and opened, and the hanger 6 is left on the placing stand 17.
  • the hanger holding chuck 10 is moved to the top of the placing stand 17, lowered to pinch and hold the left hanger 6, and raised.
  • the hanger 6 holding the workpiece 4 is moved in the arrow B direction and left on the placing stand 5 at the workpiece attachment/detachment area 2.
  • the workpiece 4 held by the hanger 6 placed on the placing stand 5 is removed by the robot arm 64 in the reverse order of the attachment.
  • the surface treatment can be performed on the workpiece 4.
  • the hanger 6 is also treated (e.g., plated) and unwanted materials accumulate on the surface.
  • a cleaning treatment is to remove this with chemicals or the like.
  • the surface treatment chambers P1 to P5 in FIG. 1 are for the cleaning treatment.
  • the hanger 6, which does not hold the workpiece 4 is moved in and out of the surface treatment chambers P1 to P5 by the electric actuator 18.
  • the surface treatment chambers P1 to P5 for the hanger cleaning treatment can have the same size and structure as the other surface treatment chambers P6 to Pn or the like, to achieve commonality.
  • a treatment solution recovery pan 33 as a collection part may be provided in the inter-treatment-chamber movement mechanism (driving roller 72).
  • the electric actuator 18 (loading/unloading mechanism) is fixed on the housing box body 30.
  • the electric actuator 18 and arm 70 may not be provided on the housing box body 30, but instead the placing stand 84 may be provided on the housing box body 30, and the electric actuator 18 and arm 70 may be provided on the surface treatment chambers P1, P2 ... Pn.
  • the electric actuator 18 can perform both the operation of moving the treatment target in and out of the surface treatment chamber and the operation of swinging the treatment target within the surface treatment chamber, thereby improving efficiency.
  • the shutters 89 are provided at the inlet/outlet 80 of surface treatment chambers P1 to Pn. This has the effect of preventing scattering of the treatment solution and maintaining the temperature inside the surface treatment chamber.
  • the shutter 89 may not be provided if scattering of the treatment solution to the outside is not a problem, if the surface treatment chamber is deep enough to prevent the treatment solution from scattering outside, or if the treatment solution is not used in the surface treatment chamber.
  • the housing box body 30 is not provided with the shutter 89.
  • the housing box body 30 may also be provided with the shutter 89.
  • the electric actuator 18 is used as the loading/unloading mechanism. The electric actuator 18 generates less dust when driven, and can reduce surface treatment defects of the workpiece 4 due to dust.
  • the drive mechanism such as rack and pinions or gears may be used.
  • the swing mechanism 86 swings the hanger 6 holding the workpiece 4 (hanger holding chuck 26).
  • the pipe 92 may be swung by an electric actuator or the like.
  • FIG. 15 shows the pipe 92 appearing as a vertical section (longitudinal cross section) of the surface treatment chamber.
  • the pipe 92 is provided with long holes H0 to Hn for discharging the treatment solution. These long holes H0 to Hn are provided at the predetermined intervals P.
  • the pipe 92 is swung in the arrow Y direction by a swing mechanism (not shown). Note that the treatment solution is supplied to the pipe 92 through a flexible pipe.
  • a swing range is indicated by V.
  • the swing range V is made larger than the predetermined interval P of the long hole H. Accordingly, the treatment solution can be evenly discharged onto the stationary workpiece 4.
  • FIG. 16A shows a configuration example of the treatment chambers P5 to P9 in the case of an immersion system (the same configuration is used for the other treatment chambers).
  • FIG. 16B shows a view in which the upper part of the treatment chamber is cut off to reveal the inside.
  • the treatment chamber P is provided with a front chamber 110 and an accumulation chamber 113.
  • the front chamber 110 is a room for immersing the workpiece 4 into the treatment solution.
  • the accumulation chamber 113 accumulates the treatment solution and is a room for supplying the treatment solution to the front chamber 110 when necessary.
  • a partition wall 119 is provided between the accumulation chamber 113 and the front chamber 110.
  • the partition wall 119 is provided with an open/close valve (not shown) at its lower part, and the front chamber 110 can be filled with the treatment solution from the accumulation chamber 113 by opening this open/close valve with a control circuit. In this way, the front chamber 110 can be filled with the treatment solution more quickly than when the treatment solution is directly supplied to the front chamber 110 by a pump or the like.
  • Projected sections 118 and 120 are provided at the inlet/outlet 16 of the front chamber 110, and a workpiece passage 116 is formed therebetween.
  • the workpiece passage 116 is provided with a shutter 114 that can be opened and closed under the control of the control circuit. After the workpiece 4 is introduced into the front chamber 110, the shutter 114 is moved by a drive mechanism (not shown) in the projected section 120 (controlled by a control circuit) from the gap of the projected section 120 to the gap of the projected section 118 to close the workpiece passage 116. Accordingly, even if the front chamber 110 is filled with the treatment solution, the inlet/outlet 16 is kept watertight. By filling the front chamber 110 with the treatment solution, the surface treatment is performed to the workpiece 4.
  • control circuit opens a discharge valve (not shown) provided at the bottom of the front chamber 110 to discharge the treatment solution into a storage tank (not shown). Accordingly, after the treatment solution in the front chamber 110 is removed, the shutter 114 is opened under the control of the control circuit to take out the workpiece 4.
  • the treatment solution accumulated in the storage tank is returned to the accumulation chamber 113 by a pump or the like.
  • FIG. 17 shows the Q-Q cross section of FIG. 16B .
  • a cylinder 122 is provided in the projected section 120 and connected to the shutter 114.
  • the shutter 114 can be moved in the arrow R direction to open and close the workpiece passage 116.
  • FIG. 18A and 18B show views of the shutter 114 viewed from above.
  • FIG. 18A is a state in which the shutter 114 is open.
  • a hard resin 130 and a soft resin 132 are provided on both sides of the gap in the projected section 120. Accordingly, the shutter 114 can adhere to both of these resins to maintain a watertight state.
  • FIG. 18B shows a state in which the shutter 114 is moved in the arrow S direction and is closed.
  • the gap of the projected section 118 is provided with a soft resin film 134.
  • FIG. 19 shows the vicinity of the shutter 114 in the S-S cross section of FIG. 16B .
  • the floor of the surface treatment chamber P is provided with a sliding groove 144 for sliding the shutter 114.
  • One wall of the sliding groove 144 is provided with a hard resin 140 and the other wall with a soft resin 142.
  • the hard resin 140 improves the slidability of the shutter 114, and the soft resin 142 can improve watertightness.
  • the front chamber 110 is closed watertight. Therefore, the treatment solution can be introduced into the front chamber 110 from the accumulation chamber 113 to raise the liquid level enough to immerse the workpiece 4.
  • the hanger 6 (holding the workpiece 4) held by the hanger holding chuck 26 is moved in the arrow D direction by the electric actuator 18 and introduced into the front chamber 110, as shown in FIG. 16A .
  • the shutter 114 is closed.
  • the open/close valve of the partition wall 119 is opened to introduce the treatment solution into the front chamber 110, and when the liquid level rises to the point where the workpiece 4 is sufficiently immersed, the open/close valve is closed.
  • the surface treatment of the workpiece 4 is performed.
  • the release valve of the front chamber 110 is opened and the treatment solution is discharged from the front chamber 110.
  • the release valve is closed.
  • the open/close valve of the partition wall 119 and the release valve of the front chamber 110 constitute a liquid level change processing part.
  • the shutter 114 is opened, the hanger 6 is moved by the electric actuator 18, and the workpiece 4 is taken out from the front chamber 110 and returned to the housing box body 30.
  • the surface treatment in the surface treatment chamber P is performed.
  • Each of the above control treatments is performed by a control circuit having a CPU (provided in the housing box body 30 but not shown).
  • the housing box body 30 and the electric actuator 18 are then moved in the direction of arrows A and B to send the workpiece 4 into the next surface treatment chamber, as described above.
  • the workpiece 4 is moved horizontally and led to the treatment chamber in the same manner as in the flow-down system.
  • the ceiling of the front chamber 110 may be removed and a mechanism to vertically move the hanger holding chuck 26 may be provided to introduce the workpiece 4 from the top.
  • a placing stand 154 may be provided at the top of the surface treatment chamber P.
  • the workpiece 4 held by the hanger 6 is introduced from the housing box body 30 into the front chamber 110 of the surface treatment chamber P8 by the electric actuator 18.
  • the hanger 6 is placed on the placing stand 154 provided on the ceiling of the surface treatment chamber P8. Accordingly, the electric actuator 18 and the housing box body 30 can move to another location to perform other treatment.
  • this placing stand 154 may be fixed to the swing mechanism 86 as shown in FIG. 8 to be swung during treatment.
  • the treatment solution is collected by the hanger holding chuck 26, which is moved by the electric actuator 18.
  • the efficiency can be improved by providing the placing stand 154 on the side of the surface treatment chamber P.
  • Each of the above control treatments of the liquid level or the like, is performed by a control circuit having a CPU (provided in the surface treatment chamber P but not shown).
  • the accumulation chamber 113 in which the treatment solution is accumulated is provided.
  • the treatment solution may be supplied to the front chamber 110 by a pump or the like.
  • the treatment solution may be discharged from the front chamber 110 by the pump or the like.
  • Such a pump constitutes the liquid level change processing part.
  • the surface treatment chamber of the immersion system and the surface treatment chamber of the flow-down system may be used together.
  • the workpieces 4 are treated in all the surface treatment chambers P5 to Pn, except for the treatment chambers P1 to Pn for hanger cleaning.
  • various types of surface treatment chambers may be provided, and only the necessary surface treatment chamber may be selected for treatment according to the treatment required for the workpiece 4. Such a selection is especially effective not for pretreatment but for main treatment (plating, desmear, etc.). According to this embodiment, this can be easily achieved by controlling the movement of the electric actuator 18 with the control circuit.
  • a plurality of surface treatment chambers may be provided to perform the surface treatment that requires a longer treatment time than other surface treatments. Accordingly, the workpieces 4 can be treated simultaneously in the plurality of surface treatment chambers, and the surface treatment requiring a longer treatment time does not become a bottleneck.
  • only one electric actuator 18 is provided to move the workpiece 4 in and out of the surface treatment chambers P1 to Pn.
  • a plurality of independently movable electric actuators 18a, 18b, 18c may be provided.
  • each of them can perform a necessary treatment, so a plurality of workpieces 4 can be efficiently processed in parallel.
  • the electric actuator 18b which does not need to receive and deliver the workpieces 4 at the outgoing deliver position 14 and intermediate deliver position 24, may be configured to be short.
  • the surface treatment chambers P1 to Pn are arranged in a row.
  • the surface treatment chambers P1 to Pn+n may be arranged in two rows, and the electric actuator 18 may be provided across the surface treatment chambers on both sides.
  • the workpiece 4 is introduced into either the left or right surface treatment chamber by the electric actuator 18.
  • the surface treatment chambers may be arranged in three or more rows.
  • a plurality of rows of the surface treatment chambers P1 to Pn+n may be provided on one side.
  • the surface treatment chambers P1 to Pn are arranged in the first row, and the surface treatment chambers Pn+1 to Pn+n are arranged in the second row.
  • the following configuration may be added to the surface treatment chamber P of the above embodiment.
  • a water jacket 170 which is a hot water circulation mechanism, may be provided.
  • the water jacket 170 covers the surface treatment chamber P and has a flow path 171 to flow hot water around it.
  • Hot water from a hot water supply section 174 is supplied through a supply pipe 176 and discharged through a discharge pipe 178 for circulation. Accordingly, the air in the surface treatment chamber P can be warmed to appropriately perform desmear treatment or the like that requires a high-temperature treatment solution.
  • an inlet/outlet 172 is provided for introducing workpieces. (11)
  • the following configuration may be added to the surface treatment chamber P of the above embodiment.
  • a high-temperature air supply section 180 is provided on the top of the surface treatment chamber P, and high-temperature air is supplied to the upper part of the surface treatment chamber P through a pipe 182.
  • a negative pressure suction port 184 is provided in the lower part of the surface treatment chamber P (above the circulating solution tank 96). In this embodiment, the negative pressure suction port 184 is provided directly below the workpiece 4. The negative pressure suction port 184 is connected to a room that is negatively pressurized by a pump or the like.
  • the air flow from top to bottom can stabilize the workpiece 4. This is especially effective when the workpiece 4 is a thin plate.
  • the temperature of the surface treatment chamber can be kept high.
  • the surface treatment chamber except for the immersion system of each embodiment, may be supplied with non-high-temperature air from top to bottom by applying the embodiment shown in FIG. 24 . In this case, it is particularly useful for stabilizing the position of an ultra-thin substrate of 100 ⁇ m or less.
  • the shutter 89 is provided at the inlet/outlet 16 to prevent the treatment solution from scattering outside when the treatment solution is discharged.
  • a partition plate having an inlet/outlet in the similar shape to the inlet/outlet 16 may be provided at a predetermined distance from the inlet/outlet 16 of the surface treatment chamber P to separate the front side as the front chamber and the back side as the discharge chamber.
  • the position where the treatment solution is discharged and brought into contact is the part above the semicircular projected section 48 of the flat plate 46 of the hanger 6.
  • the position may be brought into contact with the vicinity of the boundary between the flat plate 46 and the projected section 48. Accordingly, the falling speed of the treatment solution along the surface of the workpiece 4 can be reduced to ensure that the surface treatment is performed.
  • Each of the above modifications can be combined with other embodiments and modifications thereof as long as they do not contradict the essence thereof.
  • FIG. 25 shows an entire configuration of a surface treatment apparatus according to the second embodiment.
  • the basic configuration is the same as that of the first embodiment, such that surface treatment chambers P1, P2 ...and Pn (second surface treatment chambers) arranged in a row, and an electric actuator 18 (second movement mechanism) and a housing box body 30 are moved in the direction of arrows A and B by a driving roller 72 (first movement mechanism).
  • a plurality of second surface treatment chambers for performing the same treatment may be provided according to the difference in treatment time of each treatment.
  • a characteristic feature of this embodiment is that a pipe 160 for discharging treatment solution is provided inside the housing box body 30. That is, in this embodiment, the housing box body 30 also functions as the surface treatment chamber (a first surface treatment chamber or a moving surface treatment chamber).
  • FIG. 26 shows a cross-sectional view of the housing box body 30.
  • the treatment solution is discharged from the pipe 160 having long holes 162 provided at predetermined intervals.
  • the discharged treatment solution contacts a hanger 6 and flows over the surface of a workpiece 4 through the hanger 6.
  • a circulating liquid tank (circulating solution reservoir) 166 is provided at the bottom of the housing box body 30 to store the treatment solution that has flowed down. This treatment solution is sent to the pipe 160 again by a pump 164 and discharged.
  • a filter 165 is provided in a supply path between the pump 164 and the pipes 160.
  • the surface treatment can be performed on the workpiece 4 in the state of being placed in the housing box body 30 to improve efficiency. This is particularly efficient because the surface treatment can be performed while moving the housing box body 30. Furthermore, by attaching a filter (not shown) to the piping between the circulating pump 164 and the pipe 160, a clean treatment solution always can be supplied to a treatment target, and co-deposition of foreign substances especially on the plating film can be prevented in the surface treatment.
  • the surface treatment chambers P1 to Pn may not be provided, but instead only the housing box body 30 that performs the surface treatment may be provided. Different surface treatments can be performed by changing the treatment solution, and the surface treatment can be completed while the housing box body 30 is moved and transported to the desired location. For example, the surface treatment can be completed while moving from process Ato process B to improve efficiency.
  • the shutter 89 as shown in FIG. 10 is not provided.
  • the same shutter 89 may be provided at either one of inlet/outlet 76 or both of the inlet/outlet 76. This prevents scattering of the treatment solution.
  • the housing box body 30 is provided with a configuration for discharging the treatment solution by a flow-down system.
  • a configuration may be provided in which the surface treatment is performed by an immersion system.
  • a treatment solution accumulation chamber 196 is provided, and the treatment solution is accumulated therein.
  • an upper chamber 198 is provided to guide the workpiece 4.
  • FIG. 27B shows a view in which the upper part of the housing box body 30 is cut off to show the inside.
  • shutters 200 and 202 which are similarly configured as shown in FIG. 16B .
  • One of the shutters 200 and 202 is opened to introduce the workpiece 4 into the upper chamber 198. Both shutters 200 and 202 are, then, closed. Next, the treatment solution in the treatment solution accumulation chamber 196 shown in FIG. 27A is sucked up by a pump 190 and sent into the upper chamber 198 through a filter 192. When the liquid level reaches the point where the workpiece 4 is completely immersed, the pump 190 is stopped to stop sending the treatment solution.
  • a discharge valve 194 is opened to discharge the treatment solution in the upper chamber 198 to the outside.
  • one of the shutters 200 and 202 is opened to move the workpiece 4 from the housing box body 30 to the surface treatment apparatus P6 to Pn or the like.
  • control treatments of the liquid level or the like is performed by a control circuit having a CPU (provided in the housing box body 30 but not shown).
  • the housing box body 30 also serves as the surface treatment chamber, the modification regarding the surface treatment chamber P in the first embodiment can be applied to the housing box body 30 in the second embodiment.
  • the hanger 6 with a width slightly wider than the width of the workpiece 4 is used.
  • the width W of the hanger 6 be widened by at least 1/5 of its width D, so that the treatment solution covers the entire width W of the hanger 6. Accordingly, the amount of treatment solution which flows along the ends of the workpiece 4 is increased, and the above problem can be resolved.
  • the hanger 6 with dummy plates 107 made of thin metal plates fixed to both sides of the workpiece 4 may be used.
  • dummy plates 107 obliquely formed toward the lower end may be provided.
  • These dummy plates 107 ensure the supply of the treatment solution at the ends.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)
EP22210630.4A 2021-12-10 2022-11-30 Appareil de traitement de surface Pending EP4194586A3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021200760A JP2023086328A (ja) 2021-12-10 2021-12-10 表面処理装置

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EP4194586A2 true EP4194586A2 (fr) 2023-06-14
EP4194586A3 EP4194586A3 (fr) 2023-08-23

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EP (1) EP4194586A3 (fr)
JP (1) JP2023086328A (fr)
KR (1) KR20230088237A (fr)
CN (1) CN116254492A (fr)
TW (1) TW202324622A (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6403739B2 (ja) 2016-09-27 2018-10-10 上村工業株式会社 表面処理装置

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Publication number Priority date Publication date Assignee Title
JPS4940660Y1 (fr) * 1968-08-30 1974-11-08
JPS5658999A (en) * 1979-10-18 1981-05-22 Toshiba Corp Automatic plating apparatus
JP4114456B2 (ja) * 2002-10-09 2008-07-09 コニカミノルタホールディングス株式会社 無電解メッキ装置及び無電解メッキ方法
JP5026114B2 (ja) * 2007-03-13 2012-09-12 株式会社アイプラント メッキ処理システム
KR101120039B1 (ko) * 2010-05-28 2012-03-22 주식회사 테라세미콘 가스 혼합 방지용 대면적 증착장치
JP6793762B2 (ja) * 2019-01-10 2020-12-02 上村工業株式会社 表面処理装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6403739B2 (ja) 2016-09-27 2018-10-10 上村工業株式会社 表面処理装置

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TW202324622A (zh) 2023-06-16
CN116254492A (zh) 2023-06-13
KR20230088237A (ko) 2023-06-19
JP2023086328A (ja) 2023-06-22

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