EP4168676B1 - Micro diaphragm pumping device - Google Patents

Description

The present invention relates to a micro-membrane pump device for pumping a fluid. Micro-membrane pump devices are known, for example, from the documents 2015308144 A1 and US20160153444 A1 Such a pump is also made of EN 199 18 694 It has a deformation sensor that is arranged on the outside of an actuator of the pump.

However, this document does not contain any information about a carrier body embedded in an insulating adhesive layer between the actuator and the membrane body, with a deformation sensor arranged on it.

The object of the present invention is to improve such known micro-membrane pump devices.

• eine Pumpkammer, welcher ein Einlassventil zum Einlassen des Fluids in die Pumpkammer, ein Auslassventil zum Auslassen des Fluids aus der Pumpkammer und
• eine Membraneinrichtung zum Variieren eines Volumens der Pumpkammer zugeordnet ist, wobei die Membraneinrichtung einen plattenförmigen Aktor zum Verformen der Membraneinrichtung aufweist; und
• eine Beeinflussungseinrichtung zum Beeinflussen des plattenförmigen Aktors, um so das Volumen der Pumpkammer zu beeinflussen;
• wobei die Membraneinrichtung einen die Pumpkammer begrenzenden plattenförmigen Membrankörper aufweist;
• wobei der plattenförmige Aktor auf einer der Pumpkammer abgewandten Seite des plattenförmigen Membrankörpers angeordnet ist;
• wobei der plattenförmige Aktor mittels einer elektrisch isolierenden Kleberschicht an dem plattenförmigen Membrankörper befestigt ist, so dass der plattenförmige Aktor elektrisch isoliert gegenüber dem Membrankörper ist;
• wobei innerhalb der elektrisch isolierenden Kleberschicht zumindest ein eingebetteter Abschnitt eines Trägerkörpers angeordnet ist, an welchem oder in welchem ein Verformungssensor zur Erfassung einer Verformung der Membraneinrichtung angeordnet ist, um so das Volumen der Pumpkammer zu erfassen;
• wobei die Beeinflussungseinrichtung, der plattenförmige Aktor und der Verformungssensor einen geschlossenen Regelkreis zur Regelung eines Verhältnisses zwischen einer Volumenänderung der Pumpkammer während eines Arbeitszyklus der Mikromembranpumpeinrichtung und einer Dauer des Arbeitszyklus der Mikromembranpumpeinrichtung bilden.

The task is solved by a micro membrane pump device for pumping a fluid, which has the following features:

• a pumping chamber having an inlet valve for admitting the fluid into the pumping chamber, an outlet valve for discharging the fluid from the pumping chamber and
• a membrane device for varying a volume of the pump chamber is associated, wherein the membrane device has a plate-shaped actuator for deforming the membrane device; and
• an influencing device for influencing the plate-shaped actuator in order to influence the volume of the pumping chamber;
• wherein the membrane device comprises a plate-shaped membrane body delimiting the pump chamber;
• wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber;
• wherein the plate-shaped actuator is attached to the plate-shaped membrane body by means of an electrically insulating adhesive layer, so that the plate-shaped actuator is electrically insulated from the membrane body;
• wherein within the electrically insulating adhesive layer at least one embedded portion of a carrier body is arranged, on which or in which a A deformation sensor is arranged to detect a deformation of the diaphragm device in order to detect the volume of the pumping chamber;
• wherein the influencing device, the plate-shaped actuator and the deformation sensor form a closed control loop for controlling a relationship between a volume change of the pump chamber during a working cycle of the micro-membrane pump device and a duration of the working cycle of the micro-membrane pump device.

The fluid to be pumped can be a liquid or a gas. The pump chamber is a closed cavity into which the respective fluid can be let in via an inlet valve and from which the respective fluid can be let out via an outlet valve. The inlet valve and the outlet valve can each be a passive valve.

The membrane device is part of a housing that surrounds the pump chamber and is elastically deformable so that the volume of the pump chamber changes so that when the volume increases, the fluid is sucked into the pump chamber and when the volume decreases, the fluid is pushed out of the pump chamber. By periodically increasing and decreasing the volume of the pump chamber, a defined volume flow of the fluid can be achieved.

In order to bring about such volume changes in the pump chamber, the membrane device has a plate-shaped actuator which is designed to deform the membrane device in such a way that the volume of the pump chamber changes. The plate-shaped actuator is preferably an electrically operated actuator.

A plate-shaped body is understood to mean that the body has a significantly smaller extension in one spatial direction than in the other two spatial directions. The actuator can be round or polygonal in a top view.

Furthermore, an influencing device is provided which influences the plate-shaped actuator in order to achieve the desired volume change of the pump chamber to influence. The influencing device can be an electrical influencing device which generates electrical signals which are fed to the actuator in order to influence it.

The membrane device has an elastically deformable membrane body that delimits the pump chamber and is plate-shaped. The membrane body can be attached to a frame or a bracket of the housing, for example. However, it can also be formed in one piece with other parts of the housing.

The plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber. It is therefore not in direct contact with the fluid to be pumped, which in particular simplifies the transmission of electrical signals from the influencing device to the actuator.

The plate-shaped actuator is attached to the plate-shaped membrane body by means of an electrically insulating adhesive layer. The adhesive layer is designed to transfer forces from the actuator to the membrane body in order to enable a deformation of the membrane body and thus a change in the volume of the pump chamber. The electrically insulated design of the adhesive layer means that the plate-shaped actuator is electrically insulated from the membrane body. This makes it possible to use a plate-shaped actuator that is electrically supplied independently of ground on its side facing the membrane body even if the membrane body is electrically conductive.

The actuator can have a height between 30 µm and 2000 µm, in particular between 45 µm and 1500 µm, to ensure the required forces. It should have high rigidity, good adhesive properties, resistance to environmental influences (humidity, solvents, temperature, radiation (which is often used for sterilization in medical devices)). In addition, it should be break-proof, fatigue-proof and electrically dielectric-proof.

The electrically insulated design of the adhesive layer is also advantageous if the membrane body is designed to be electrically insulating, since in this case the electrical field strength between the actuator and the fluid to be pumped is reduced. so that electrical arcing between the actuator and the fluid can be prevented. This is particularly advantageous when the plate-shaped actuator is operated with higher electrical voltages, for example in the range of 20 V to 400 V.

The adhesive layer should be as thin as possible on both sides of the embedded section of the carrier body. It should have high rigidity, good adhesive properties, resistance to environmental influences (moisture, solvents, temperature, radiation (which is often used for sterilization in medical devices)). In addition, it should be break-resistant, durable, non-conductive and electrically breakdown-proof.

An embedded section of a carrier body is arranged within the electrically insulating adhesive layer, on the surface or in the interior of which a deformation sensor is arranged, which can detect the volume of the pumping chamber over time by detecting a deformation of the membrane device.

The embedded section of the carrier body can be thinner than 500 µm to ensure the required flexibility. It should have high rigidity, good adhesive properties, resistance to environmental influences (humidity, solvents, temperature, radiation (which is often used for sterilization in medical devices). In addition, it should be break-resistant, fatigue-resistant, non-conductive and electrically dielectric-proof.

The influencing device, the plate-shaped actuator and the deformation sensor form a closed control loop for controlling the relationship caused by the micro-membrane pumping devices between a volume change of the pump chamber (2) during a working cycle of the micro-membrane pumping device (1) and a duration of the working cycle of the fluid.

A closed-loop control circuit is generally a closed loop control circuit for influencing a physical variable in a technical process or other system. The key here is the direct or indirect feedback of the current value of the controlled variable to the controller, which counteracts a deviation from the setpoint (negative feedback). It is the task of the controller to regulate the disturbances and to determine the time behavior of the controlled variable with regard to the static and dynamic behavior according to specified requirements.

In the context of the present invention, the influencing device takes on the role of a controller. The controlled variable is the ratio between the volume change of the pump chamber during a working cycle of the micro-membrane pump device and the duration of the working cycle. The working cycle comprises a phase in which the fluid is let into the pump chamber via the inlet valve and a further phase in which the fluid is let out via the outlet valve. In trouble-free operation, this ratio corresponds to the volume flow of the respective fluid. The volume flow is measured indirectly from knowledge of the duration of the working cycles, which is specified by the influencing device, and from knowledge of the deformation of the membrane device, which is detected by the deformation sensor.

The indirect measurements are transmitted to an influencing device so that if the volume flow deviates from a setpoint, the control of the plate-shaped actuator can be changed so that the desired volume flow is achieved. In particular, the volume flow can be influenced by increasing or decreasing the amplitude of the volume change in the pump chamber. Likewise, the frequency of the volume change in the pump chamber can be increased or decreased.

It has been shown that such an indirect measurement of the volume flow is significantly faster and more accurate, as well as simpler and cheaper than a direct measurement of the volume flow with known flow sensors, which have a vane wheel, for example, so that disturbances can be regulated much better. The proposed micro-membrane pump device is also superior to pump devices in which individual disturbances, such as temperatures and pressures, are recorded by sensors and used in an open-loop control circuit of the pump device.

The proposed control loop allows the volume flow to be controlled much more precisely than is the case with uncontrolled control devices. The use of a deformation sensor and its arrangement in the adhesive layer between the membrane body and the actuator allows highly precise feedback of the actual value of the volume flow to the influencing device.

• Drücke, zum Beispiel der Druck des Fluids stromaufwärts des Einlassventils, der Druck des Fluids stromabwärts des Auslassventils oder der Druck an der Außenseite der Membraneinrichtung.
• Temperaturen, zum Beispiel des Fluids oder der Umgebung der Mikromembranpumpeinrichtung, welche zu einer Verspannung der Membraneinrichtung oder zu einer veränderten Kennlinie des Aktors führen können. Beispielsweise ist bei einem piezokeramischen Aktor der technisch relevante d31-Koeffizient temperaturabhängig.
• Änderungen der Eigenschaften des Fluids, welche zu einer Änderung der effektiven Volumenänderung der Pumpkammer bei gleichbleibender Ansteuerung des Aktors, insbesondere bei der Förderung von Flüssigkeiten, führen können. Hier führt beispielsweise eine Viskositätsänderung, hervorgerufen durch eine Temperaturänderung oder eine Änderung einer Zusammensetzung des Fluids, zu unterschiedlichen Ein- und Ausströmzeiten und somit zu einem anderen Volumenstrom.
• Toleranzen der mechanischen Komponenten der Mikromembranpumpeinrichtung, beispielsweise des Gehäuses der Pumpkammer, des Einlassventils, des Auslassventils, des Aktors oder des Membrankörpers. Hierdurch können unterschiedliche Volumenströme bei unterschiedlichen Mikromembranpumpeinrichtungen derselben Serie aufgrund von geometrischen Abweichungen (Verbiegung, Dickenschwankungen, Parallelitätsfehler) der mechanischen Komponenten vermieden werden.
• Toleranzen beim Verbinden der mechanischen Komponenten der Mikromembranpumpeinrichtung, beispielsweise beim Ausbilden der Kleberschicht.

External influences, also known as disturbances, on the volume flow can be precisely regulated. Disturbances that can be regulated by the micro-membrane pump device according to the invention are:

• Pressures, for example the pressure of the fluid upstream of the inlet valve, the pressure of the fluid downstream of the outlet valve or the pressure on the outside of the diaphragm device.
• Temperatures, for example of the fluid or the environment of the micro-membrane pump device, which can lead to a distortion of the membrane device or to a changed characteristic curve of the actuator. For example, in a piezoceramic actuator, the technically relevant d31 coefficient is temperature-dependent.
• Changes in the properties of the fluid, which can lead to a change in the effective volume change of the pump chamber with constant control of the actuator, especially when pumping liquids. Here, for example, a change in viscosity caused by a change in temperature or a change in the composition of the fluid leads to different inflow and outflow times and thus to a different volume flow.
• Tolerances of the mechanical components of the micro-membrane pump device, for example the housing of the pump chamber, the inlet valve, the outlet valve, the actuator or the membrane body. This makes it possible to avoid different volume flows in different micro-membrane pump devices of the same series due to geometric deviations (bending, thickness variations, parallelism errors) of the mechanical components.
• Tolerances when connecting the mechanical components of the micro membrane pump device, for example when forming the adhesive layer.

The micro-membrane pump device according to the invention can be used with advantage whenever a highly precise dosing of a fluid is required, for example when mixing different fluids. In particular, it can be used in the medical field for dosing medication or for mixing medication components.

According to a preferred development of the invention, the adhesive layer lies flat, in particular over the entire surface, on a side of the plate-shaped actuator facing the membrane body and/or the adhesive layer lies flat, in particular over the entire surface, on a side of the membrane body facing the plate-shaped actuator. In this way, forces generated by the actuator can be safely transferred to the adhesive layer and from the adhesive layer to the membrane body. This results in particular in a high rigidity of the arrangement and insensitivity to high shear forces, which ultimately serves to ensure dosing accuracy.

According to an expedient development of the invention, the adhesive layer comprises a hardened liquid adhesive, a hardened adhesive paste and/or an adhesive film. Liquid adhesives, adhesive pastes and adhesive films are easy to handle when producing the diaphragm pump device and have sufficiently good adhesive properties to safely transfer the required forces from the actuator to the diaphragm body, so that the dosing accuracy is increased.

According to a preferred development of the invention, the adhesive layer comprises a temperature-curing material, an anaerobic-curing material, a material curing through UV radiation, a material curing through an activator, a material curing through humidity, a material curing through drying and/or a hot melt adhesive material. Such adhesive materials are easy to handle when producing the diaphragm pump device and have sufficiently good adhesive properties to safely transfer the required forces from the actuator to the diaphragm body, so that the dosing accuracy is increased.

According to an advantageous development of the invention, the plate-shaped actuator is an electromagnetic actuator, a single- or multi-layer piezoelectric actuator, a Shape memory actuator or a bimetallic actuator. Single-layer piezoelectric actuators have an electrical connection on their underside and an electrical connection on their top. Since the adhesive layer is non-conductive in the context of the invention, the single-layer piezoelectric actuator can be fed symmetrically with respect to ground. In multi-layer actuators, both electrical contacts are arranged on the side facing the man crane body, whereby the non-conductive properties of the adhesive layer prevent a short circuit. Shape memory actuators or bimetallic actuators can also be used without any problems due to the insulating properties of the adhesive layer.

According to an expedient development of the invention, the carrier body comprises one or more electrically insulating materials. Polyimides, for example, are particularly suitable.

According to an expedient development of the invention, the carrier body comprises glass, one or more semiconductor materials, one or more composite materials, one or more polymeric materials or one or more ceramic materials.

According to an advantageous development of the invention, the deformation sensor is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

According to an expedient development of the invention, the deformation sensor is a force sensor.

According to an expedient development of the invention, the membrane body comprises a metal, a semiconductor material and/or a plastic.

According to an expedient development of the invention, at least part of an evaluation electronics for evaluating signals from the deformation sensor is arranged on or in the carrier body. This can improve the interference immunity, which ultimately benefits the dosing accuracy.

According to a preferred development of the invention, the influencing device for detecting operational faults of the micro-membrane pump device based on measurement signals from the deformation sensor. During operation of the micro membrane pump device, operational faults can occur again and again. For example, the inlet valve or the outlet valve can become jammed by particles, the actuator can fail, an air bubble can get into the pump chamber in the case of a liquid fluid, and many other things. Such faults can be recognized in the measurement signals from the deformation sensor, as they influence the deformation of the membrane device or have a direct influence on the actuator.

According to an expedient development of the invention, the carrier body has a non-embedded section which extends out of the adhesive layer, wherein contacts for picking up measurement signals from the deformation sensor are attached to the non-embedded section and are electrically connected to the deformation sensor. The electrical connections between the contacts for the deformation sensor and the deformation sensor can be formed on or in the carrier body so that they are mechanically protected and electrically insulated from both the actuator and the membrane body.

According to an expedient development of the invention, a heating wire is arranged on or in the embedded section. The heating wire allows the heating of the fluid to be pumped. In addition, the heating wire can be used during the manufacture of the micro-membrane pump device to heat the adhesive layer in order to harden it, provided that the adhesive layer comprises a material which hardens through temperature. The heating wire can be supplied with electrical energy by the influencing device or by an external device.

According to an expedient development of the invention, the carrier body has a non-embedded section which extends out of the adhesive layer, wherein contacts for supplying the heating wire with electrical energy are attached to the non-embedded section, which contacts are electrically connected to the heating wire. The electrical connections between the contacts for the heating wire and the heating wire can be formed on or in the carrier body, so that they are mechanically protected and electrically insulated from both the actuator and the membrane body.

According to an expedient development of the invention, a temperature sensor is arranged on or in the embedded section. Measurement signals from the temperature sensor can be fed, for example, to the influencing device or an external device which supplies the heating wire with electrical energy. In this way, the heating effect of the heating wire can be regulated during the manufacture of the micro-membrane pump device or during the operation of the micro-membrane pump device.

According to an expedient development of the invention, the carrier body has a non-embedded section which extends out of the adhesive layer, wherein contacts for picking up measurement signals from the temperature sensor are attached to the non-embedded section and are electrically connected to the temperature sensor. The electrical connections between the contacts for the temperature sensor and the temperature sensor can be formed on or in the carrier body so that they are mechanically protected and electrically insulated from both the actuator and the membrane body.

According to an advantageous development of the invention, a condition sensor, in particular a moisture sensor or a chemical sensor, is arranged on or in the embedded section to monitor the condition of the adhesive layer. The measurement signals of the condition sensor can be fed to the influencing device. In this way, the influencing device can detect a deterioration in the condition of the adhesive layer due to age or external influences before the adhesive layer fails, which can be particularly advantageous in medical applications.

According to an advantageous development of the invention, the carrier body has a non-embedded section which extends out of the adhesive layer, wherein contacts for picking up measurement signals from the condition sensor are attached to the non-embedded section and are electrically connected to the condition sensor. The electrical connections between the contacts for the condition sensor and the condition sensor can be formed on or in the carrier body so that they are mechanically protected and electrically insulated from both the actuator and the membrane body.

According to an expedient development of the invention, the embedded section of the carrier body, viewed in a direction from the plate-shaped actuator to the plate-shaped membrane body, has a surface area which is smaller than a surface area of the plate-shaped membrane body facing the embedded section of the carrier body, and which is smaller than a surface area of the plate-shaped actuator facing the embedded section of the carrier body. In this way, it is ensured that the adhesive layer is at least partially continuous in the specified direction from the actuator to the membrane body. This results in a particularly good force transmission between the actuator and the membrane body.

According to an advantageous development of the invention, the embedded section of the carrier body has at least one through hole, which extends from a side of the embedded section of the carrier body facing the plate-shaped actuator to a side of the embedded section of the carrier body facing the plate-shaped membrane body. This causes the adhesive layer to extend in the area of the through hole in the direction from the actuator to the membrane body without interruption from the actuator to the membrane body. This leads to a particularly good force transmission between the actuator and the membrane body.

According to an expedient development of the invention, the embedded section of the carrier body has an edge which has indentations when viewed in a direction from the plate-shaped actuator to the plate-shaped membrane body. In the area of the indentations, the adhesive layer extends without interruption from the actuator to the membrane body. Since a large part of the forces generated by the actuator are transferred to the adhesive layer in an edge area of the actuator, this results in a particularly good transfer of the forces from the actuator to the membrane body.

Figur 1

zeigt ein erstes Ausführungsbeispiel einer Mikromembranpumpein-richtung gemäß der vorliegenden Erfindung in einer schematischen Seitenansicht;

Figur 2

zeigt ein zweites Ausführungsbeispiel einer Mikromembranpumpeinrichtung gemäß der vorliegenden Erfindung in einer schematischen Seitenansicht;

Figur 3

zeigt ein drittes Ausführungsbeispiel einer Mikromembranpumpeinrichtung gemäß der vorliegenden Erfindung in einer schematischen Seitenansicht;

Figur 4

zeigt einen beispielhaften Aktor, einen beispielhaften Trägerkörper und einen beispielhaften Membrankörper für eine Mikromembranpumpeinrichtung gemäß der vorliegenden Erfindung in einer schematischen dreidimensionalen Explosionsdarstellung;

Figur 5

zeigt einen beispielhaften Trägerkörper mit einem beispielhaften Verformungssensor für eine Mikromembranpumpeinrichtung gemäß der vorliegenden Erfindung in einer schematischen Aufsicht;

Figur 6

zeigt eine vereinfachte Teilansicht einer Mikromembranpumpeinrichtung gemäß der vorliegenden Erfindung in einer schematischen Seitenansicht in einem Ruhezustand;

Figur 7

zeigt eine vereinfachte Teilansicht einer Mikromembranpumpeinrichtung gemäß der vorliegenden Erfindung in einer schematischen Seitenansicht beim Einlassen eines Fluids; und

Figur 8

zeigt eine vereinfachte Teilansicht einer Mikromembranpumpeinrichtung gemäß der vorliegenden Erfindung in einer schematischen Seitenansicht beim Auslassen eines Fluids.

In the following, the present invention and its advantages are described in more detail with reference to figures.

Figure 1

shows a first embodiment of a micro membrane pump device according to the present invention in a schematic side view;

Figure 2

shows a second embodiment of a micro membrane pump device according to the present invention in a schematic side view;

Figure 3

shows a third embodiment of a micro membrane pump device according to the present invention in a schematic side view;

Figure 4

shows an exemplary actuator, an exemplary carrier body and an exemplary membrane body for a micro membrane pump device according to the present invention in a schematic three-dimensional exploded view;

Figure 5

shows an exemplary carrier body with an exemplary deformation sensor for a micro-membrane pump device according to the present invention in a schematic plan view;

Figure 6

shows a simplified partial view of a micro membrane pump device according to the present invention in a schematic side view in a rest state;

Figure 7

shows a simplified partial view of a micro-membrane pump device according to the present invention in a schematic side view when admitting a fluid; and

Figure 8

shows a simplified partial view of a micro membrane pump device according to the present invention in a schematic side view when discharging a fluid.

Identical or similar elements or elements with identical or equivalent functions are provided with identical or similar reference symbols below.

In the following description, embodiments with a variety of features of the present invention are described in more detail in order to provide a better understanding of the invention. However, it should be noted that the present invention can also be implemented without using individual features described. It should also be noted that the features shown in various embodiments can also be combined in other ways, unless this is expressly excluded or would lead to contradictions.

Figure 1 shows a first embodiment of a micro membrane pump device 1 according to the present invention in a schematic side view.

• eine Pumpkammer 2, welcher ein Einlassventil 3 zum Einlassen des Fluids FL in die Pumpkammer 2, ein Auslassventil 4 zum Auslassen des Fluids FL aus der Pumpkammer 2 und eine Membraneinrichtung 5 zum Variieren eines Volumens der Pumpkammer 1 zugeordnet ist, wobei die Membraneinrichtung 5 einen plattenförmigen Aktor 6 zum Verformen der Membraneinrichtung 5 aufweist; und
• eine Beeinflussungseinrichtung 7 zum Beeinflussen des plattenförmigen Aktors 6, um so das Volumen der Pumpkammer 2 zu beeinflussen;
• wobei die Membraneinrichtung 5 einen die Pumpkammer 2 begrenzenden plattenförmigen Membrankörper 8 aufweist;
• wobei der plattenförmige Aktor 6 auf einer der Pumpkammer 2 abgewandten Seite des plattenförmigen Membrankörpers 8 angeordnet ist;
• wobei der plattenförmige Aktor 6mittels einer elektrisch isolierenden Kleberschicht 9 an dem plattenförmigen Membrankörper 8 befestigt ist, so dass der plattenförmige Aktor 6 elektrisch isoliert gegenüber dem Membrankörper 8 ist;
• wobei innerhalb der elektrisch isolierenden Kleberschicht 9 zumindest ein eingebetteter Abschnitt 10 eines Trägerkörpers 11 angeordnet ist, an welchem oder in welchem ein Verformungssensor 12 zur Erfassung einer Verformung der Membraneinrichtung 5 angeordnet ist, um so das Volumen der Pumpkammer 2 zu erfassen;
• wobei die Beeinflussungseinrichtung 7, der plattenförmige Aktor 6 und der Verformungssensor 12 einen geschlossenen Regelkreis zur Regelung eines Verhältnisses zwischen einer Volumenänderung der Pumpkammer (2) während eines Arbeitszyklus der Mikromembranpumpeinrichtung (1) und einer Dauer des Arbeitszyklus der Mikromembranpumpeinrichtung 1 bilden.

The micro membrane pump device 1 for pumping a fluid FL has the following features:

• a pump chamber 2, to which an inlet valve 3 for admitting the fluid FL into the pump chamber 2, an outlet valve 4 for discharging the fluid FL from the pump chamber 2 and a membrane device 5 for varying a volume of the pump chamber 1 are assigned, wherein the membrane device 5 has a plate-shaped actuator 6 for deforming the membrane device 5; and
• an influencing device 7 for influencing the plate-shaped actuator 6 in order to influence the volume of the pump chamber 2;
• wherein the membrane device 5 has a plate-shaped membrane body 8 delimiting the pump chamber 2;
• wherein the plate-shaped actuator 6 is arranged on a side of the plate-shaped membrane body 8 facing away from the pump chamber 2;
• wherein the plate-shaped actuator 6 is attached to the plate-shaped membrane body 8 by means of an electrically insulating adhesive layer 9, so that the plate-shaped actuator 6 is electrically insulated from the membrane body 8;
• wherein within the electrically insulating adhesive layer 9 at least one embedded Section 10 of a carrier body 11 is arranged, on which or in which a deformation sensor 12 is arranged for detecting a deformation of the membrane device 5 in order to thereby detect the volume of the pump chamber 2;
• wherein the influencing device 7, the plate-shaped actuator 6 and the deformation sensor 12 form a closed control loop for controlling a relationship between a volume change of the pump chamber (2) during a working cycle of the micro-membrane pump device (1) and a duration of the working cycle of the micro-membrane pump device 1.

According to a preferred development of the invention, the adhesive layer 9 lies flat, in particular over its entire surface, on a side of the plate-shaped actuator 6 facing the membrane body 8 and/or the adhesive layer 9 lies flat, in particular over its entire surface, on a side of the membrane body 8 facing the plate-shaped actuator 6.

According to an advantageous development of the invention, the adhesive layer 9 comprises a cured liquid adhesive, a cured adhesive paste and/or an adhesive film.

According to an advantageous development of the invention, the adhesive layer 9 comprises a temperature-curing material, an anaerobic-curing material, a material curing by UV radiation, a material curing by an activator, a material curing by air humidity, a material curing by drying and/or a hot melt adhesive material.

According to an expedient development of the invention, the plate-shaped actuator 6 is an electromagnetic actuator, a single- or multi-layer piezoelectric actuator, a shape memory actuator or a bimetallic actuator.

According to an advantageous development of the invention, the carrier body 11 comprises one or more electrically insulating materials.

According to an expedient development of the invention, the carrier body 11 comprises glass, one or more semiconductor materials, one or more composite materials, one or more polymeric materials or one or more ceramic materials.

According to an advantageous development of the invention, the deformation sensor 12 is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.

According to an expedient development of the invention, the deformation sensor 12 is a force sensor.

According to an expedient development of the invention, the membrane body 8 comprises a metal, a semiconductor material and/or a plastic.

According to an expedient development of the invention, at least a part of an evaluation electronics for evaluating signals of the deformation sensor 12 is arranged on or in the carrier body 11.

According to an expedient development of the invention, the influencing device 7 is designed to detect operational faults of the micro-membrane pump device 1 on the basis of measuring signals MS of the deformation sensor 12.

According to an expedient development of the invention, the carrier body 11 has a non-embedded section 13 which is led out of the adhesive layer 9, wherein contacts 14 for picking up measurement signals MS of the deformation sensor are attached to the non-embedded section 13, which are electrically connected to the deformation sensor.

In the example of Figure 1 the deformation sensor 12 is electrically connected to contacts 14, which are arranged on the non-embedded section 13 of the carrier body 11. The contacts 14 are in turn electrically connected to the influencing device 7 via a measuring line 15, so that measurement signals MS of the deformation sensor 12 can be transmitted to the influencing device 7. Based on the measurement signals MS, the influencing device generates 7 control signals ST, which are transmitted to the actuator 6 via a control line 16 and control it. The control signals ST can also serve to supply energy to the actuator 6.

Figure 2 shows a second embodiment of a micro membrane pump device 1 according to the present invention in a schematic side view. The embodiment of the Figure 2 is based on the embodiment of the Figure 1 , so only the differences are described and explained below.

According to a preferred development of the invention, a heating wire 17 is arranged on or in the embedded section 10.

According to an advantageous development of the invention, the carrier body 11 has a non-embedded section 13 which is led out of the adhesive layer 9, wherein contacts 18 for supplying the heating wire 17 with electrical energy EE are attached to the non-embedded section 13, which contacts are electrically connected to the heating wire 17.

According to an advantageous development of the invention, a temperature sensor 20 is arranged on or in the embedded section 10.

According to an expedient development of the invention, the carrier body 11 has a non-embedded section 13 which is led out of the adhesive layer 9, wherein contacts 21 for picking up measurement signals TMS of the temperature sensor 20 are attached to the non-embedded section 13, which are electrically connected to the temperature sensor 20.

In the example of Figure 2 the heating wire 17 is electrically connected to contacts 18 which are formed on the non-embedded section 13 of the carrier body 11. The contacts 18 are connected to the influencing device 7 via a supply line 19, so that the influencing device 7 can supply the heating wire 17 with electrical energy EE. The fluid FL can thereby be heated in a controlled manner by the influencing device 7. Likewise, during the manufacture of the micro-membrane pump device 1, the adhesive layer 9 can be heated in order to harden it. The electrical energy EE could, however, can also be provided by a device independent of the influencing device 7.

Furthermore, the temperature sensor 20 is connected to contacts 21 which are formed on the non-embedded section 13 of the carrier body 11. The contacts 21 are connected to the influencing device 7 via a measuring line 22, so that measuring signals TMS of the temperature sensor 20 can be transmitted to the influencing device 7. The measuring signals TMS can be used by the influencing device 7 to regulate the heating power of the heating wire 17.

Figure 3 shows a third embodiment of a micro membrane pump device 1 according to the present invention in a schematic side view. The embodiment of the Figure 3 is based on the embodiment of the Figure 1 , so only the differences are described and explained below.

According to an advantageous development of the invention, a condition sensor 23, in particular a moisture sensor or a chemical sensor, is arranged on or in the embedded section 10 for monitoring a condition of the adhesive layer 9.

According to an expedient development of the invention, the carrier body 11 has a non-embedded section 13 which is led out of the adhesive layer 9, wherein contacts 24 for picking up measurement signals ZMS of the condition sensor 23 are attached to the non-embedded section 13, which are electrically connected to the condition sensor 23.

In the example of Figure 3 a condition sensor 23 is electrically connected to contacts 24 which are formed on the non-embedded section 13 of the carrier body 11 and which are electrically connected to the influencing device 7 via a measuring line 25, so that measurement signals ZMS of the condition sensor 23 can be transmitted to the influencing device 7. The measurement signals ZMS can be used by the influencing device 7 for the early detection of a malfunction of the micro membrane pump device 1 due to damage to the adhesive layer 9.

Figure 4 shows an exemplary actuator 6, an exemplary carrier body 11 and an exemplary membrane body 8 for a micro membrane pump device 1 according to the present invention in a schematic three-dimensional exploded view.

According to an advantageous further development of the invention, the embedded section 10 of the carrier body 11, viewed in a direction RI from the plate-shaped actuator 6 to the plate-shaped membrane body 8, has a surface 26 which is smaller than a surface 27 of the plate-shaped membrane body 8 facing the embedded section 10 of the carrier body 11, and which is smaller than a surface 28 of the plate-shaped actuator 6 facing the embedded section 10 of the carrier body 11.

According to an expedient development of the invention, the embedded section 10 of the carrier body 11 has at least one through-hole 29 which extends from a side of the embedded section 10 of the carrier body 11 facing the plate-shaped actuator 6 to a side of the embedded section 10 of the carrier body 11 facing the plate-shaped membrane body 8.

Figure 5 shows an exemplary carrier body with an exemplary deformation sensor 12 for a micro membrane pump device 1 according to the present invention in a schematic plan view.

According to an advantageous development of the invention, the embedded portion 10 of the carrier body 11, seen in the direction RI from the plate-shaped actuator 6 to the plate-shaped membrane body 8, has an edge 30 which has indentations 31.

Figure 6 shows a simplified partial view of a micro membrane pump device 1 according to the present invention in a schematic side view in a resting state. The actuator 6 is shown in its resting position, so that the membrane body 8 is also in its resting position.

Figure 7 shows a simplified partial view of a micro membrane pump device 1 according to the present invention in a schematic side view when inlet of a fluid FL. The actuator 6 is controlled in such a way that it moves in such a way that, together with the membrane body 8, it increases the volume of the pump chamber 2 compared to the volume which the pump chamber 2 occupies when the actuator 6 is in its rest position.

Figure 8 shows a simplified partial view of a micro-membrane pump device according to the present invention in a schematic side view when discharging a fluid. Here, the actuator 6 is controlled so that it moves in such a way that, together with the membrane body 8, it reduces the volume of the pump chamber 2 compared to the volume that the pump chamber 2 occupies when the actuator 6 is in its rest position.

The volume flow of the fluid FL can be generated by periodically switching the actuator 6 between the Figure 7 shown position and the one in the Figure 8 It is also conceivable that the volume flow of the fluid FL is generated by moving the actuator 6 between the position shown in the Figure 6 shown position and the one in the Figure 7 It is also conceivable that the volume flow of the fluid FL is generated by moving the actuator 6 between the position shown in the Figure 6 shown position and the one in the Figure 8 shown position is moved back and forth.

Although specific embodiments of the invention are illustrated and described herein, it will be apparent to those skilled in the art that a variety of alternative and/or equivalent embodiments may be substituted for the specific embodiments shown and described.

Reference number:

1

Micro membrane pump device

2

Pump chamber

3

Inlet valve

4

outlet valve

5

Membrane device

6

Actuator

7

Influencing device

8

Membrane body

9

Adhesive layer

10

embedded section

11

Carrier body

12

Deformation sensor

13

non-embedded section

14

Contacts

15

Measuring line

16

Control line

17

Heating wire

18

Contacts

19

Supply line

20

Temperature sensor

21

Contacts

22

Measuring line

23

Condition sensor

24

Contacts

25

Measuring line

26

Area

27

Area

28

Area

29

Through hole

30

edge

31

Indentations

FL

Fluid

MS

Measurement signals

ST

Control signals

EEE

electrical energy

TMS

Measurement signals

ZMS

Measurement signals

RI

Direction

Claims (15)

1. A micromembrane pumping device for pumping a fluid (FL), comprising:

   a pump chamber (2) to which an inlet valve (3) for introducing the fluid (FL) into the pump chamber (2), an outlet valve (4) for discharging the fluid (FL) from the pump chamber (2), and a membrane device (5) for varying a volume of the pump chamber (1) are associated, wherein the membrane device (5) comprises a plate-shaped actuator (6) for deforming the membrane device (5); and

   influencing means (7) for influencing the plate-shaped actuator (6) so as to influence the volume of the pump chamber (2);

   wherein the membrane device (5) comprises a plate-shaped membrane body (8) limiting the pump chamber (2);

   wherein the plate-shaped actuator (6) is arranged on a side of the plate-shaped membrane body (8) facing away from the pump chamber (2);

   wherein the plate-shaped actuator (6) is mounted to the plate-shaped membrane body (8) by means of an electrically insulating glue layer (9) so that the plate-shaped actuator (6) is electrically insulated from the membrane body (8);

   wherein at least one embedded portion (10) of a support body (11) at which or in which a deformation sensor (12) for detecting a deformation of the membrane device (5) is arranged, is arranged within the electrically insulating glue layer (9) in order to detect the volume of the pump chamber (2);

   wherein the influencing means (7), the plate-shaped actuator (6) and the deformation sensor (12) form a closed-loop control circuit for regulating a ratio between a change in volume of the pump chamber (2) during an operating cycle of the micromembrane pumping device (1) and a duration of the operating cycle of the micromembrane pumping device (1).
2. The micromembrane pumping device in accordance with the preceding claim, wherein the glue layer (9) is applied over an area, in particular the entire area, on a side of the plate-shaped actuator (6) facing the membrane body (8), and/or wherein the glue layer (9) is applied over an area, in particular the entire area, on a side of the membrane body (8) facing the plate-shaped actuator (6).
3. The micromembrane pumping device in accordance with any of the preceding claims, wherein the glue layer (9) comprises a temperature-curing material, an anaerobically curing material, a UV radiation-curing material, an activator-curing material, humidity-curing material, dry-curing material and/or hot-melt glue material.
4. The micromembrane pumping device in accordance with any of the preceding claims, wherein the plate-shaped actuator (6) is an electromagnetic actuator, a single-layer or multi-layer piezoelectric actuator, a shape-memory actuator or bimetal actuator.
5. The micromembrane pumping device in accordance with any of the preceding claims, wherein the support body (11) comprises glass, one or more semiconductor materials, one or more composites, one or more polymeric materials or one or more ceramic materials.
6. The micromembrane pumping device in accordance with any of the preceding claims, wherein the deformation sensor (12) is a strain gauge, in particular a resistive, capacitive or piezoresistive strain gauge.
7. The micromembrane pumping device in accordance with any of the preceding claims, wherein the membrane body (8) comprises a metal, semiconductor material and/or plastic.
8. The micromembrane pumping device in accordance with any of the preceding claims, wherein at least a part of evaluating electronics for evaluating signals of the deformation sensor (12) is arranged at or in the support body (11).
9. The micromembrane pumping device in accordance with any of the preceding claims, wherein the influencing means (7) is configured for recognizing operating disturbances of the micromembrane pumping device (1) using measuring signals (MS) of the deformation sensor (12).
10. The micromembrane pumping device in accordance with any of preceding claims, wherein the support body (11) comprises a non-embedded portion (13) which is led out from the glue layer (9), wherein contacts (14) for tapping measuring signals (MS) of the deformation sensor (12) which are electrically connected to the deformation sensor (12) are attached to the non-embedded portion (13).
11. The micromembrane pumping device in accordance with any of claims 1 to 9, wherein a heating wire (17) is arranged at or in the embedded portion (10), wherein the support body (11) comprises a non-embedded portion (13) which is led out from the glue layer (9), wherein contacts (18) for providing the heating wire (17) with electrical energy (EE) which are electrically connected to the heating wire (17) are attached to the non-embedded portion (13).
12. The micromembrane pumping device in accordance with any of claims 1 to 9, wherein a temperature sensor (20) is arranged at or in the embedded portion (10). wherein the support body (11) comprises a non-embedded portion (13) which is led out from the glue layer (9), wherein contacts (21) for tapping measuring signals (TMS) of the temperature sensor (20) which are electrically connected to the temperature sensor (20) are attached to the non-embedded portion (13).
13. The micromembrane pumping device in accordance with any of claims 1 to 9, wherein a state sensor (23), in particular a humidity sensor or a chemical sensor, for checking a state of the glue layer (9) is arranged at or in the embedded portion (10), wherein the support body (11) comprises a non-embedded portion (13) which is led out from the glue layer (9), wherein contacts (24) for tapping measuring signals (ZMS) of the state sensor (23) which are electrically connected to the state sensor (23) are attached to the non-embedded portion (13).
14. The micromembrane pumping device in accordance with any of the preceding claims, wherein the embedded portion (10) of the support body (11), when viewed in a direction (RI) from the plate-shaped actuator (6) towards the plate-shaped membrane body (8), comprises an area (26) which is smaller than an area (27) of the plate-shaped membrane body (8) facing the embedded portion (10) of the support body (11), and which is smaller than an area (28) of the plate-shaped actuator (6) facing the embedded portion (10) of the support body (11).
15. The micromembrane pumping device in accordance with any of the preceding claims, wherein the embedded portion (10) of the support body (11) comprises at least one through hole (29) which extends from a side of the embedded portion (10) of the support body (11), facing the plate-shaped actuator (6), to a side of the embedded portion (10) of the support body (11), facing the plate-shaped membrane body (8), wherein the embedded portion (10) of the support body (11), when viewed in the direction (RI) from the plate-shaped actuator (6) towards the plate-shaped membrane body (8), comprises an edge (30) which comprises recesses (31).

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