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EP3990895B1 - Module de capteurs pour l'analyse multiparamétrique d'un milieu - Google Patents

Module de capteurs pour l'analyse multiparamétrique d'un milieu Download PDF

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Publication number
EP3990895B1
EP3990895B1 EP20733373.3A EP20733373A EP3990895B1 EP 3990895 B1 EP3990895 B1 EP 3990895B1 EP 20733373 A EP20733373 A EP 20733373A EP 3990895 B1 EP3990895 B1 EP 3990895B1
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EP
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Prior art keywords
sensor module
photonic
sensor
measurement
functional layer
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EP20733373.3A
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German (de)
English (en)
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EP3990895A1 (fr
EP3990895C0 (fr
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Matthias Lau
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Sentronic GmbH Gesellschaft fuer Optische Messsysteme
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Sentronic GmbH Gesellschaft fuer Optische Messsysteme
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M23/00—Constructional details, e.g. recesses, hinges
    • C12M23/28—Constructional details, e.g. recesses, hinges disposable or single use
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M41/00—Means for regulation, monitoring, measurement or control, e.g. flow regulation
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M41/00—Means for regulation, monitoring, measurement or control, e.g. flow regulation
    • C12M41/12—Means for regulation, monitoring, measurement or control, e.g. flow regulation of temperature
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M41/00—Means for regulation, monitoring, measurement or control, e.g. flow regulation
    • C12M41/44—Means for regulation, monitoring, measurement or control, e.g. flow regulation of volume or liquid level
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6802—Sensor mounted on worn items
    • A61B5/6803—Head-worn items, e.g. helmets, masks, headphones or goggles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6846—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
    • A61B5/6847—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
    • A61B5/6861—Capsules, e.g. for swallowing or implanting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7769—Measurement method of reaction-produced change in sensor
    • G01N2021/7773—Reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7769—Measurement method of reaction-produced change in sensor
    • G01N2021/7786—Fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N21/643—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" non-biological material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G01N2201/0628—Organic LED [OLED]

Definitions

  • the invention relates to a sensor module for multiparametric analysis of a medium, having at least one organic light emitter for emitting a photonic signal and at least one device for detecting photonic signals, wherein the at least one organic light emitter and the at least one device for detecting photonic signals are monolithically on a semiconductor substrate or in are formed on a semiconductor substrate, and further comprising at least one functional layer system which at least partially covers the at least one organic light emitter and/or the at least one device for detecting photonic signals and is in contact with the medium, wherein the functional layer is designed such that it has at least one active area that has at least one property that can be influenced by at least one property of the measuring medium, as well as the use of the sensor module for multiparametric analysis of a medium.
  • the simultaneous determination of pH value, conductivity, temperature and concentration can be particularly interesting for biological, biochemical or chemical measurement tasks.
  • OLED-based organic photosensors for biotechnological applications are known from the prior art, for example [Krujatz2016].
  • Such sensors have organic light-emitting diodes (OLED) as a light source and photodetectors and are called Photoluminescence sensor, biosensor or absorption/transmission sensor used, for example, to determine dissolved oxygen in aqueous solutions, oxygen saturation in blood or for enzymatic detection of glucose.
  • OLEDs are applied to substrates such as foils, glass or silicon.
  • OLED-based sensor arrays are known for the simultaneous detection of different parameters of the analyte, such as dissolved oxygen, lactate, glucose, etc.
  • the DE 10 2007 056 275 B3 discloses a chip for analyzing a medium, with organic semiconductors for illuminating the medium and photodetectors being monolithically integrated in a matrix arrangement on an active CMOS substrate. Additional active electronic elements can be integrated in the substrate for signal processing.
  • An optical arrangement is described, for example for recording physiological parameters of living beings or for visually displaying information.
  • At least one organic light-emitting diode and at least one photodiode and/or one CMOS photodiode are preferably arranged on a common substrate or formed thereon and connected to an electronic evaluation and control unit.
  • the arrangement can have further active and passive electronic/electrical components for amplifying, storing and/or controlling the individual elements.
  • the WO 2011/048472 A1 shows an optical sensor system for immunodiagnostics with a layer structure and an OLED as a light source, in which a fluorescent or phosphorescent marker element binds to an antibody.
  • the EP 1 672 356 B1 discloses a single-use optical sensor in which a light source and a photodiode are arranged on a substrate and separated by a separating layer from a functional layer that emits an optical signal depending on an analyte.
  • DE 10 2016 220 086 A1 describes a microstructured organic sensor component made up of a large number of sensor segments that are arranged on CMOS substrates. On the At least one light-emitting diode, each with one or more emitters, can additionally be arranged on the substrate.
  • the EP 2 955 759 B1 discloses a manufacturing method for a semiconductor device having a photodetector on a substrate having a dielectric layer with embedded wiring.
  • the US 2014/0001058 A1 describes a test device in which a container for the biological sample to be tested is arranged monolithically in or on a flexible substrate. Output signals of the sample are generated by optical or electrical excitation or a chemical reaction, which are evaluated in an electrical circuit.
  • the test device can have a light source to illuminate the sample container and to generate a corresponding output signal, which can be measured with a photodetector.
  • the object of the present invention is therefore to provide a device by means of which several properties of a medium over wide parameter ranges can be recorded with a sensor module, the values for the respective parameter being at least z.
  • the solution according to the invention is based on the sensor module advantageously combining photonic and non-photonic measurement principles on the same semiconductor substrate.
  • photonic measurement principles is understood to mean the use of optical methods and technologies for the detection of photonic signals, whereby photonic signals can in principle include photons of the entire electromagnetic spectrum, which can be converted into electrical signals using the measurement technology.
  • the photonic signals include in particular photons with wavelengths in the range of visible light or in the range of near infrared light.
  • non-photonic measurement principles are understood to mean measurement methods that are not based on the detection of photons as information carriers.
  • the sensor module has at least one organic light emitter, in particular an organic light-emitting diode (OLED), and at least one device for detecting photonic signals (photodetector, PD), which are monolithically formed on or in a semiconductor substrate.
  • OLED organic light-emitting diode
  • PD photodetector
  • “monolithic” means that the organic light emitter and the device for detecting photonic signals form an inseparable unit with the semiconductor substrate.
  • component-inherent photodiodes which can serve as photodetectors, at pn interfaces.
  • the sensor module further has at least one functional layer system that at least partially covers the at least one organic light emitter and/or the at least one PD and is in direct or indirect contact with the medium to be analyzed.
  • the functional layer system is designed such that it has at least one active area that has at least one property that can be influenced by at least one property of the medium. This is to be understood as meaning that the at least one active region of the functional layer system contains at least one sensory active component, whose interaction with the medium to be analyzed determines the response of the sensory active component to the first photonic signal emitted by the at least one organic light emitter influenced.
  • the sensory active component emits a second photonic signal related to the first photonic signal.
  • the second photonic signal can e.g. B.
  • the sensory active component of the functional layer system can be, for example, a functional group, a dye, an enzyme, a protein, an antibody, a nucleic acid, a virus or a noble metal cluster.
  • the sensory active component can also be, for example, a polymer whose swelling behavior depends on the pH or temperature of the medium.
  • the term “property” also includes changes to properties;
  • the second photonic signal can contain information about absolute and/or relative values of a property of the medium.
  • the photonic response can be influenced by interaction with the medium using, for example, luminescence spectroscopy (e.g. fluorescence spectroscopy), spectrophotometry (e.g. absorption measurement, reflectance measurement), color measurement (e.g. ratiometric, photometric, colorimetry/color change), plasmon resonance ( SPR) and/or non-dispersive infrared measurement methods (NDIR).
  • luminescence spectroscopy e.g. fluorescence spectroscopy
  • spectrophotometry e.g. absorption measurement, reflectance measurement
  • color measurement e.g. ratiometric, photometric, colorimetry/color change
  • SPR plasmon resonance
  • NDIR non-dispersive infrared measurement methods
  • the semiconductor substrate is further designed such that at least a second property, preferably different from the photonically determined property of the medium, can be determined using a non-photonic measuring principle, or the sensor module has at least one component for determining at least a second property, whereby the component is arranged on the semiconductor substrate.
  • the sensor module advantageously offers a highly integrated combination of different sensor technologies.
  • the sensor module according to the invention is suitable for inexpensive mass production using proven semiconductor manufacturing technologies. This means that for each parameter to be measured, at least z. B. the most suitable method can be used in terms of accuracy, long-term stability, resolution, reproducibility, energy consumption, manufacturing costs, the necessary space requirements and still e.g. B. Energy, size and manufacturing costs can be saved compared to conventional solutions.
  • the sensor module according to the invention Due to the size, energy consumption and cost minimization, it is possible to design the sensor module according to the invention as a disposable item, which advantageously allows factory calibration of all parameters. Effective self-monitoring and/or compensation or referencing is made possible.
  • the sensor module according to the invention offers the possibility of being able to advantageously select the measuring location of the photonic and non-photonic measuring principle in a simple manner.
  • the functional layer system also acts as a shield for the organic light emitter and PD or semiconductor chip from the environment.
  • the semiconductor substrate is designed as CMOS.
  • CMOS complementary metal-oxide-semiconductor
  • the integrated CMOS circuit technology can be supplemented by a stable, efficient light emitter, whereby the OLED can be arranged monolithically above the CMOS backplane.
  • the semiconductor substrate comprises at least one device for carrying out an electrochemical measurement or at least one device for carrying out a temperature measurement or at least one device for carrying out an impedance measurement or at least one device for carrying out a magnetic field measurement or at least one device for carrying out a backscatter measurement or at least a device for carrying out a flow measurement or at least one device for carrying out a flow velocity measurement or at least one device for carrying out a heat flow measurement or at least one device for carrying out a pressure measurement or a combination of the aforementioned.
  • the devices can advantageously be integrated monolithically into the semiconductor substrate. It can also be advantageous for the devices to be integrated into the functional layer system and/or arranged on the functional layer system.
  • the at least one device for carrying out an electrochemical measurement preferably comprises an electrode-on-CMOS or ISFET or ChemFET or ENFET or pH-FET or solid-state electrolyte structure or a combination of the aforementioned.
  • the at least one device for carrying out a temperature measurement preferably comprises an R-on-CMOS or a thermocouple or a semiconductor sensor or a combination of the aforementioned.
  • the at least one device for carrying out an impedance measurement preferably comprises an interdigital electrode structure.
  • the at least one device for carrying out a magnetic field measurement preferably comprises a Hall sensor.
  • the at least one device for carrying out a flow velocity measurement preferably comprises the principle of a hot-wire anemometer.
  • the at least one device for carrying out a heat flow measurement preferably comprises a thermopile sensor.
  • the at least one device for carrying out a pressure measurement preferably comprises a thin-film or thick-film or piezoresistive or MEMS sensor or a combination of the aforementioned.
  • the sensor module according to the invention has a plurality of organic light emitters, which can be arranged spatially separated from one another at definable positions on or in the semiconductor substrate, and which each emit a first photonic signal, the wavelengths of the first photonic signals of different organic light emitters being different from one another or can be the same.
  • the multiple organic light emitters can be arranged in segments or arrays.
  • the sensor module according to the invention has a plurality of devices for detecting photonic signals, which can be arranged spatially separated from one another at definable positions on or in the semiconductor substrate.
  • the multiple devices for detecting photonic signals can be designed in such a way that they have different spectral sensitivity ranges from one another, so that devices that are different from one another can detect photonic signals of different wavelengths.
  • the multiple devices for detecting photonic signals can also be designed in such a way that they have the same or overlapping sensitivity ranges, with the respective detected second photonic signal being assigned to the location of its emission via distinguishable overlaps of the numerical apertures.
  • the multiple devices for detecting photonic signals can also be arranged in segments or arrays.
  • spatially resolved means the assignment of detected signals to a measurement location or place of origin.
  • an active area of the functional layer system can have several sensory active components, e.g. B. dyes, which are excited by means of different organic light emitters, which emit first photonic signals with different wavelengths, and emit second photonic signals with different wavelengths, which are detected by the corresponding, different PDs with different spectral sensitivity ranges .
  • B. dyes which are excited by means of different organic light emitters, which emit first photonic signals with different wavelengths, and emit second photonic signals with different wavelengths, which are detected by the corresponding, different PDs with different spectral sensitivity ranges .
  • the several sensory active components of an active region of the functional layer system are excited differently, but emit second photonic signals in the same sensitivity range.
  • an assignment of the second photonic signals detected by means of different PDs to the location of their Emission, in particular to one of the sensory active components can be carried out via the numerical aperture of the optical system of light emitter - sensory active component - PD.
  • a time-delayed excitation of the sensory active components can also take place, or a mixture/superposition of the second photonic signals can be detected.
  • At least one device for detecting photonic signals is arranged directly below at least one organic light emitter.
  • the emitted first photonic signal can advantageously be used directly for referencing e.g. B. intensity and/or phase fluctuations can be measured.
  • At least one combination of measured values generated using two second photonic signals or two non-photonic signals or a second photonic and a non-photonic signal can be used.
  • the location assignment of the organic light emitter and PD on the sensor module according to the invention enables referencing directly at the position to be referenced.
  • the functional layer system has more than one active area, the active areas being arranged spatially separated from one another.
  • the spatial separation also includes an arrangement of several active areas one above the other, i.e. in the same optical path between the organic light emitter and the device for detecting photonic signals.
  • the active areas can contain the same sensory active components and be sensitive to the same properties of the medium. Due to the spatial separation of the active areas, a spatially resolved analysis of the medium with regard to a specific property is possible in this configuration.
  • the active areas can be designed in such a way that they are sensitive to properties that differ from one another. This can be achieved, for example, using different sensory active components, or by at least one of the several active areas having a defined coating.
  • the sensor module according to the invention advantageously enables the multiparametric analysis of the medium in a particularly compact, simple and miniaturized manner.
  • the multiple active areas of the functional layer system can also have spectral sensitivities that differ from one another, whereby the spectral areas in which the sensory active components of different active areas can be photonically excited can overlap.
  • This embodiment can advantageously be combined with the embodiment of the sensor module according to the invention with several organic light emitters and several devices for detecting photonic signals.
  • An exemplary advantageous embodiment includes the excitation of a lower active region of a plurality of active regions of the functional layer system arranged one below the other by means of a first photonic signal, this lower active region sending a second photonic signal (which generally comprises a different wavelength range) to one arranged above it in the optical path , emits another active area, whereby sensory active components are excited in this further active area and a third photonic signal, modulated by the property changes of this further active area caused by at least one property of the surrounding medium, is emitted, for this third photonic signal at least the areas/layers of the functional layer system arranged between the semiconductor substrate and this further active area are transparent are so that this signal, in this case referred to as the third photonic signal, can be received by at least one photodiode.
  • the functional layer system of the sensor module according to the invention comprises at least one functional layer which is arranged on a functional layer support.
  • the functional layer system can be made up of several layers, of which only one or more have active areas.
  • the functional layer support is transparent to the wavelength of the first and second photonic signals.
  • the functional layer support can be designed as an optical lens or as an optical lens array or as an optical filter or as an optical grating or as a combination of the aforementioned.
  • the functional layer support can be arranged directly on the semiconductor substrate or at a distance from it.
  • the functional layer carrier can also be designed as part of a housing that accommodates the semiconductor substrate or can encapsulate/close the semiconductor substrate (including possible structures) by direct joining processes (e.g. gluing, anodic bonding, adhesive bonding, casting). This advantageously enables effective, e.g. B. non-parasitic luminescent module encapsulation.
  • the sensor module according to the invention includes at least one of the devices described in the following two paragraphs.
  • the sensor module according to the invention has at least one device for storing data, e.g. B. measurement data, program code, logbook data, history data, and/or for evaluating and influencing data, e.g. B. to compensate and/or to transmit data, e.g. B. measurement data, evaluation data, status information, data logger data, and/or for communication. Transmission and communication can be digital and/or analog, wired or wireless.
  • the sensor module can also work autonomously and the measurement data can be read out after the measurement has been completed.
  • the sensor module according to the invention has at least one device for controlling and/or modulating/demodulating the at least one organic light emitter and/or the at least one device for detecting photonic signals.
  • the aforementioned devices are formed monolithically in the semiconductor substrate.
  • the sensor module according to the invention has at least one device for providing the electrical energy to be used to operate the sensor module.
  • This can be e.g. B. be a battery or super capacity.
  • the device can also be suitable for converting other forms of energy into electrical energy, e.g. B. potential energy of sound, kinetic energy or thermal energy, commonly known as energy harvesting.
  • the energy can be transmitted wirelessly, e.g. using standards such as NFC or Ql, or can also be induced through field coupling. This advantageously allows the sensor module to work autonomously.
  • the sensor module according to the invention has at least one actuator component, e.g. B. a heater for temperature control, in particular thermal stabilization, of the sensor module or for activating enzymes in the functional layer system, or actuator components for controlling microfluidics.
  • the actuator system in the sensor module according to the invention can be integrated into the smallest space in an energy-efficient and reaction-accelerated manner. Due to the compact design, the thermal stabilization of the sensor module can be carried out energy-efficiently and with short control times.
  • sensor modules according to the invention can be combined with a base module, e.g. B. in a cubic arrangement, and within the base module, for example, use a common power supply, data processing, data storage or communication, whereby the sensor modules can be mounted separately, interchangeably or modularly.
  • a base module e.g. B. in a cubic arrangement
  • the sensor modules can be mounted separately, interchangeably or modularly.
  • the small and compact design of the sensor modules according to the invention enables faster reaction times, faster response times and shorter settling times of the sensor module combination.
  • microfluidics can be coupled directly or indirectly to the functional layer system, or the microfluidics can be a structural part of the semiconductor substrate or the functional layer system.
  • the sensor module according to the invention can advantageously be designed to be sterilizable or disinfectable in a simple manner. This results in further preferred uses.
  • the use of the sensor module according to the invention for fermentation monitoring is preferred, in particular in a disposable fermentation bag.
  • These are usually sterilized at the factory by the manufacturer using gamma radiation.
  • the subsequent introduction of measurement technology to record the control parameters is cumbersome and can lead to subsequent contamination of the disposable fermentation bag. This is why, for example, in the pharmaceutical industry, extensive procedures have to be carried out to check cleanup, which are expensive, time-consuming and in turn pose the risk of cross-contamination.
  • Due to the sterilizability of the sensor module according to the invention it can be introduced into the disposable fermentation bag before sterilization.
  • the sensor module according to the invention is inexpensive and biocompatible, and can be disposed of or recycled easily and without environmental damage, so that it can advantageously be used as a disposable item.
  • there are other disinfection and sterilization options e.g. B. using disinfectants, by autoclaving (steam-sterilizable), by plasma sterilization, by UV radiation.
  • the use of the sensor module according to the invention for monitoring vital parameters is preferred.
  • a particularly advantageous combination of parameters can be obtained through transcutaneous measurements of the CO 2 and/or O 2 partial pressure using a photonic measuring principle as well as temperature and pH value measurements on the skin using a non-photonic measuring principle.
  • metabolic diseases such as diabetes can advantageously be detected, or enzymatic disorders or disorders of the intestinal flora can be examined continuously over a longer period of time.
  • the sensor module according to the invention offers z. B. the combination of an ultra-fast oxygen and/or carbon dioxide partial pressure sensor (pO 2 and/or pCO 2 ) with the measurement of the flow of respiratory gases the airway opening and thus provides this highly desired and crucial information, which can then be used, for example, to optimize the ventilator settings in intensive care patients and patients under anesthesia.
  • pO 2 and/or pCO 2 ultra-fast oxygen and/or carbon dioxide partial pressure sensor
  • CO 2 and O 2 are gases that diffuse easily through body and skin tissue and can therefore be measured using an appropriate non-invasive sensor placed on the surface of the skin.
  • the sensor module according to the invention can be arranged on a carrier that can be applied to the skin.
  • the sensor module according to the invention can be arranged on a brace, a nose clip or a bite guard.
  • the sensor module can be integrated in a ventilator and/or anesthesia machine and/or pulmonary function device.
  • the sensor module according to the invention can be arranged on a collecting vessel for urine and stool samples as well as blood samples.
  • the arrangement also includes embodiments in which the sensor module is embedded in the above-mentioned aids so that it is accessible to the medium.
  • the sensor module When using the sensor module according to the invention to monitor vital parameters, the sensor module can advantageously be implanted in animals or humans.
  • the sensor module according to the invention can be designed to be packed as a capsule for swallowing. This allows for better passage through the gastrointestinal tract.
  • the sensor module according to the invention can be designed as a disposable item and can be disposed of with the urine, blood or stool samples, which also minimizes the risk of cross-contamination.
  • the multiparametric analysis of the medium enables parallel real-time or online monitoring of various vital parameters.
  • the uses according to the invention can be made non-invasive; no analyte is consumed.
  • the sensor module on which the invention is based is more environmentally friendly, since the high proportions of lead currently used in O 2 sensors are avoided.
  • the sensor module can be sterilized, e.g. B. by gamma radiation, plasma sterilization, autoclaving, sterilizing cleaning agents.
  • the sensor module according to the invention can be designed to be powered autonomously. It offers the possibility of radio communication, is ultra-compact and has the lowest power losses, can detect photonic and non-photonic sensory parameters, has integrated methods for referencing, and the functional layer can at the same time represent part of the encapsulation of the medium, which facilitates miniaturization
  • the invention is not limited to the embodiments shown and described, but also includes all embodiments that have the same effect within the meaning of the invention. Furthermore, the invention is not limited to the specifically described combinations of features, but can also be defined by any other combination of specific features of all of the individual features disclosed as a whole, provided that the individual features are not mutually exclusive or a specific combination of individual features is not explicitly excluded. The invention is limited only by the appended claims.
  • an R-on-CMOS sensor can be arranged directly next to a detection structure for fluorescent light, so that the correction variable “temperature” of the associated fluorescent dye can be detected without much delay or transmission characteristic.
  • Fig. 1 shows schematically a side view of a sensor module 1 according to the invention for multiparametric analysis of a medium 105.
  • the sensor module 1 has at least one organic light emitter for emitting a first photonic signal 101 and at least one device for detecting photonic signals 102.
  • the organic light emitter 101 and the device for detecting photonic signals 102 are formed monolithically on a semiconductor substrate 100, which is advantageously designed as a CMOS semiconductor substrate.
  • the sensor module 1 has at least one functional layer system 103, which covers the at least one organic light emitter 101 and/or the at least one device for detecting photonic signals 102 and is in contact with the medium 105.
  • the functional layer system 103 has at least one active area 104.
  • the sensor module 1 has a component for determining a second property using a non-photonic measuring principle 106, which is arranged on the semiconductor substrate 100.
  • the sensor module 1 advantageously has at least one device for storing data and/or for evaluating and influencing data and/or for transmitting data and/or for communication and/or at least one device for controlling and/or for modulating/demodulating the at least one organic light emitter and/or the at least one device for detecting photonic signals 107. Furthermore, the sensor module 1 advantageously has a device for providing the electrical energy 108 to be used for the operation of the sensor module 1.
  • Fig. 2 shows a schematic side view of an embodiment of the sensor module 1 according to the invention for multiparametric analysis of a medium 105.
  • the sensor module 1 corresponds to the sensor module Fig. 1 .
  • the functional layer system 103 has a functional layer support 103.1 and a functional layer 103.2.
  • the functional layer support 103.1 can be designed as an optical lens or as an optical lens array or as an optical filter or as an optical grating or as a combination of the aforementioned.
  • Fig. 3 shows schematically a sensor module 1 in a fermentation reactor 2, which is filled with a medium 105.
  • the sensor module 1 corresponds to that in Fig. 1 1. It can be seen that the functional layer system 103 is in contact with the medium 105 and shields the organic light emitter 101 and the device for detecting photonic signals 102 from the medium 105.
  • the sensor module 1 has at least one device for storing data and/or for evaluating and influencing data and/or for transmitting data and/or for communication 107. Furthermore, the sensor module 1 can have at least one device for controlling and/or modulating/demodulating the at least one organic light emitter and/or the at least one device for detecting photonic signals (not shown).
  • the sensor module 1 can also have a device for providing the electrical energy required to operate the sensor module (not shown).

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Claims (15)

  1. Module de capteurs (1) pour l'analyse multiparamétrique d'un milieu (105), présentant
    - au moins un émetteur de lumière organique (101) permettant d'émettre un premier signal photonique et
    - au moins un dispositif permettant de détecter des signaux photoniques (102),
    - au moins un système à couche fonctionnelle (103) qui recouvre au moins partiellement l'au moins un émetteur de lumière organique (101) et/ou l'au moins un dispositif permettant de détecter des signaux photoniques (102) et est en contact avec le milieu (105), dans lequel le système à couche fonctionnelle (103) est conçu de sorte qu'il présente au moins une zone active (104), laquelle possède au moins une propriété pouvant être influencée par au moins une propriété du milieu (105), et dans lequel l'au moins une zone active (104) du système à couche fonctionnelle (103) peut être excitée de manière photonique au moyen de l'au moins un émetteur de lumière organique (101) et émet un second signal photonique qui est détecté au moyen de l'au moins un dispositif permettant de détecter des signaux photoniques (102), dans lequel le second signal photonique contient des informations concernant l'au moins une propriété du milieu (105),
    caractérisé en ce que
    ∘ l'au moins un émetteur de lumière organique (101) et l'au moins un dispositif permettant de détecter des signaux photoniques (102) sont conçus de manière monolithique sur un substrat semi-conducteur (100) ou dans un substrat semi-conducteur (100) et
    ∘ qu'au moins un dispositif permettant de stocker des données et/ou d'évaluer et d'influencer des données et/ou de transmettre des données et/ou au moins un dispositif permettant de commander et/ou de moduler/démoduler l'au moins un émetteur de lumière organique et/ou l'au moins un dispositif permettant de détecter des signaux photoniques sont conçus dans le substrat semi-conducteur, et
    ∘ que le substrat semi-conducteur (100) est conçu de sorte qu'au moins une seconde propriété peut être déterminée au moyen d'un principe de mesure non photonique ou le module de capteurs présente au moins un composant (106) permettant de déterminer au moins une seconde propriété au moyen d'un principe de mesure non photonique, lequel composant est disposé sur le substrat semi-conducteur (100).
  2. Module de capteurs (1) selon la revendication 1, caractérisé en ce que le substrat semi-conducteur (100) est conçu en tant que CMOS.
  3. Module de capteurs (1) selon la revendication 1 ou 2,
    caractérisé en ce que le substrat semi-conducteur (100) comprend :
    i.) au moins un dispositif permettant de réaliser une mesure électrochimique, lequel comprend de préférence une structure de type électrode sur CMOS ou ISFET ou ChemFET ou ENFET ou pH-FET ou électrolyte à l'état solide ou une combinaison des éléments susmentionnés, ou
    ii.) au moins un dispositif permettant de réaliser une mesure de température, lequel comprend de préférence un capteur de type R sur CMOS ou un capteur à thermocouple ou un capteur à semi-conducteur ou une combinaison des éléments susmentionnés, ou
    iii.) au moins un dispositif permettant de réaliser une mesure d'impédance, lequel comprend de préférence une structure d'électrodes interdigitale, ou
    iv.) au moins un dispositif permettant de réaliser une mesure de champ magnétique, lequel comprend de préférence un capteur à effet Hall, ou
    v.) au moins un dispositif permettant de réaliser une mesure de rétrodiffusion ou
    vi.) au moins un dispositif permettant de réaliser une mesure de débit ou
    vii.) au moins un dispositif permettant de réaliser une mesure de vitesse d'écoulement, lequel comprend de préférence le principe d'un anémomètre à fil chaud, ou
    viii.) au moins un dispositif permettant de réaliser une mesure de flux thermique, lequel comprend de préférence un capteur à thermopile, ou
    ix.) au moins un dispositif permettant de réaliser une mesure de pression, lequel comprend de préférence un capteur à couche mince ou à couche épaisse ou piézorésistif ou MEMS ou une combinaison des éléments susmentionnés, ou
    x.) une combinaison des éléments susmentionnés.
  4. Module de capteurs (1) selon l'une des revendications 1 à 3,
    caractérisé en ce que le module de capteurs (1) présente plusieurs émetteurs de lumière organiques (101) qui peuvent être disposés dans des positions définissables de manière à être séparés spatialement les uns des autres et qui émettent respectivement un premier signal photonique de longueurs d'onde différentes les unes des autres ou émettent respectivement un premier signal photonique de même longueur d'onde.
  5. Module de capteurs (1) selon l'une des revendications 1 à 4,
    caractérisé en ce que le module de capteurs (1) présente plus d'un dispositif permettant de détecter des signaux photoniques (102) qui peuvent être disposés dans des positions définissables de manière à être séparés spatialement les uns des autres, dans lequel les dispositifs permettant de détecter des signaux photoniques (102) sont configurés de sorte qu'ils présentent des plages de sensibilité spectrales différentes les unes des autres, de sorte qu'ils détectent respectivement un second signal photonique de longueurs d'onde différentes les unes des autres, ou dans lequel les dispositifs permettant de détecter des signaux photoniques (102) sont configurés de sorte qu'ils présentent les mêmes plages de sensibilité ou des plages de sensibilité se chevauchant, dans lequel une attribution du second signal photonique respectivement détecté à l'emplacement de son émission est effectuée par l'intermédiaire d'ouvertures numériques pouvant être différenciées.
  6. Module de capteurs (1) selon l'une des revendications 1 à 5,
    caractérisé en ce qu'au moins un dispositif permettant de détecter des signaux photoniques (102) est disposé directement en dessous d'au moins un émetteur de lumière organique (101).
  7. Module de capteurs (1) selon l'une des revendications 1 à 6,
    caractérisé en ce que le système à couche fonctionnelle (103) présente plus d'une zone active (104), dans lequel les zones actives (104) sont disposées de manière à être séparées spatialement les unes des autres et sont de préférence configurées de sorte que les seconds signaux photoniques émis par des zones actives (104) séparées contiennent des informations concernant différentes propriétés du milieu (105).
  8. Module de capteurs (1) selon l'une des revendications 1 à 7,
    caractérisé en ce que le système à couche fonctionnelle (103) comprend au moins une couche fonctionnelle (103.2) qui est disposée sur un support de couche fonctionnelle (103.1),
    dans lequel le support de couche fonctionnelle (103.1) est conçu de préférence en tant que lentille optique ou en tant que réseau de lentilles optique ou en tant que filtre optique ou en tant que réseau optique ou en tant que combinaison des éléments susmentionnés.
  9. Module de capteurs (1) selon l'une des revendications 1 à 8,
    caractérisé en ce que le module de capteurs (1) présente en outre :
    i. au moins un dispositif permettant de stocker des données et/ou d'évaluer et d'influencer des données et/ou de transmettre des données et/ou de communiquer (107) et/ou
    ii. un dispositif permettant de commander et/ou de moduler/démoduler l'au moins un émetteur de lumière organique (101) et/ou l'au moins un dispositif permettant de détecter des signaux photoniques (102).
  10. Module de capteurs (1) selon la revendication 9, caractérisé en ce que l'au moins un dispositif (107) est conçu de manière monolithique dans le substrat semi-conducteur (100).
  11. Module de capteurs (1) selon l'une des revendications 1 à 10, caractérisé en ce que le module de capteurs (1) présente au moins un dispositif permettant de fournir l'énergie électrique à utiliser pour le fonctionnement du module de capteurs (1).
  12. Module de capteurs (1) selon l'une des revendications 1 à 11, caractérisé en ce qu'au moins un composant actionneur est disposé sur le module de capteurs (1).
  13. Utilisation du module de capteurs (1) selon l'une des revendications 1 à 12
    dans un système de type laboratoire sur puce ou pour la surveillance de la fermentation, en particulier dans un sac de fermentation jetable.
  14. Utilisation du module de capteurs (1) selon l'une des revendications 1 à 12 pour la surveillance de paramètres vitaux.
  15. Utilisation selon la revendication 14, caractérisée en ce que
    a.) le module de capteurs (1) est disposé dans un support pouvant être appliqué sur la peau, ou
    b.) le module de capteurs (1) est disposé sur un appareil dentaire, un pincenez ou un cale-dents, ou
    c.) le module de capteurs (1) est intégré dans un respirateur ou un appareil d'anesthésie ou un appareil pour fonctions pulmonaires, ou
    d.) le module de capteurs (1) est disposé dans un récipient de collecte pour des échantillons d'urine ou de selles ou de sang, ou e.) le module de capteurs (1) est conçu de manière à pouvoir être implanté, ou
    f.) le module de capteurs (1) est disposé dans une capsule pouvant être avalée.
EP20733373.3A 2019-06-25 2020-06-08 Module de capteurs pour l'analyse multiparamétrique d'un milieu Active EP3990895B1 (fr)

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PCT/EP2020/065837 WO2020259996A1 (fr) 2019-06-25 2020-06-08 Module de capteurs pour l'analyse multiparamétrique d'un milieu

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DE102023133568A1 (de) 2023-11-30 2025-06-05 Hamilton Medical Ag Beatmungsvorrichtung und Verfahren des Betreibens einer Beatmungsvorrichtung
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ES2979357T3 (es) 2024-09-25
CN114270173A (zh) 2022-04-01
EP3990895A1 (fr) 2022-05-04
CA3145141A1 (fr) 2020-12-30
AU2020305383B2 (en) 2022-05-19
EP3990895C0 (fr) 2024-02-21
CN114270173B (zh) 2023-12-15
AU2020305383A1 (en) 2022-01-20
US20220205924A1 (en) 2022-06-30
KR20220027985A (ko) 2022-03-08
US11733168B2 (en) 2023-08-22
WO2020259996A1 (fr) 2020-12-30

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