EP3724623A1

EP3724623A1 - Sensor with thermal-shock-resistant substrate

Info

Publication number: EP3724623A1
Application number: EP18796640.3A
Authority: EP
Inventors: Tim ASSMUS; Stefan Dietmann
Original assignee: Heraeus Nexensos GmbH
Current assignee: Yageo Nexensos GmbH
Priority date: 2017-12-12
Filing date: 2018-11-01
Publication date: 2020-10-21
Also published as: DE102017222495A1; WO2019115087A1

Abstract

The invention relates to a sensor, more particularly a high-temperature sensor, having: at least one substrate (3) with a first side and a second side opposite the first side; and at least one first sensor structure (7) arranged at least in some regions on the first side of the substrate (3), wherein the substrate (3) comprises an oxide-ceramic fibre composite material. The present invention also relates to a use of a sensor and a method (1000) for producing a sensor.

Description

Sensor with thermal shock resistant substrate

description

The present invention relates to a sensor for determining gas parameters. The present invention also relates to a method for producing a sensor.

Various sensors for the analysis of gases are known from the prior art. Such sensors are often used in the exhaust system of internal combustion engines, for example as temperature sensors, soot sensors, flow sensors and as multi-sensors, which may comprise a combination of different sensor types. The combustion gases or exhaust gases of such internal combustion engines may, depending on the position of the sensor in the exhaust gas system relative to the engine, have a very high temperature. Therefore, when the sensor cools down, correspondingly very high temperature gradients can occur, which can adversely affect the functioning of the sensor. Depending on the application, these sensors must also be actively brought to a specific temperature level for pyrolytic cleaning, permanently or at certain intervals. Therefore, the sensors should have a high thermal shock resistance, i. a high resistance to strong temperature changes. For example, such changes in temperature can also be caused by exposure to condensation droplets.

An example of a sensor that can be used in the exhaust system of an internal combustion engine is described in WO 2007/048573 A1. The sensor comprises a flow sensor element with a temperature measuring element and a heating element. These elements are arranged on a carrier element, wherein the temperature measuring element has a platinum thin film resistor on a ceramic substrate for temperature measurement and is heated with an additional platinum thin film resistor.

An example of a soot sensor with heating element is shown in WO 2006/1 1 1386 A1. The soot sensor described has a sensor structure on a substrate for determining a Soot occupancy. To burn off carbon black, a heating conductor is arranged on the substrate as a thin-layer structure of platinum.

However, the known from the prior art sensors have the disadvantage that these sensors have only a low thermal shock resistance to rapid Tempe- raturänderungen. This low thermal shock resistance often manifests itself in cracks and / or other changes in the material of the substrate.

It is therefore an object of the present invention to provide an improved sensor which overcomes the disadvantages of the prior art. In particular, to provide a high-temperature-resistant sensor with an increased crack resistance of the substrate and which is inexpensive to manufacture.

This object is achieved by a sensor according to the subject of patent claim 1.

The sensor according to the invention, in particular high-temperature sensor, has for this purpose:

at least one substrate having a first side and a second side opposite the first side; and

at least one first sensor structure arranged at least partially on the first side of the substrate, wherein the substrate comprises an oxide-ceramic fiber composite material.

According to the invention, the substrate comprises an oxide-ceramic fiber composite material. For this purpose, the substrate can also be formed from an oxide-ceramic fiber composite material. "Oxide-ceramic fiber composite material" can be understood as meaning a material in which ceramics such as, for example, Al 2 O 3 are mixed with glass fibers or ceramic fibers prior to a subsequent firing of the substrate. The resulting oxide ceramic fiber composite material may have a thickness of 10-20 pm.

For the purposes of the present invention, "sensor structure" can be understood to mean any structure which is adapted to detect at least one gas parameter of a gas flowing past. Furthermore, the term "sensor structure" can also be used to designate a resistance conductor track or heating conductor track which heats up at least in regions when a current flows through it. With the invention, for the first time it has been possible to provide a sensor for high-temperature applications, which has a high thermal shock resistance and withstands high temperature changes essentially without damage. Compared to the known from the prior art substrates show fewer and smaller cracks, which do not propagate substantially on the surface of the substrate.

In one example, the oxide-ceramic fiber composite comprises fibers of silica, alumina, titania, baria, boria, zirconia, and / or any mixtures thereof, and / or comprising matrices comprising alumina, silica, magnesia, baria, and / or zirconia For example, the oxide-ceramic fiber composite includes a matrix of alumina and zirconia as a binder.

Advantageously, a very high strength of the substrate can be achieved by a matrix of aluminum oxide and zirconium oxide as the binding agent.

In a further example, the sensor has at least one first covering layer, arranged at least in regions on the first side of the substrate, wherein the first covering layer is arranged at least in regions between the substrate and the first sensor structure, and / or at least one second covering layer is arranged at least in regions on the second side of the substrate, wherein the second cover layer is at least partially disposed between the substrate and a second sensor structure.

In one example, the first cover layer and / or the second cover layer comprises / comprises a glass layer, a ceramic layer, and / or a layer comprising platinum and glass.

By arranging a first and / or second cover layer, surface defects on the substrate can advantageously be compensated, the connection of the sensor structure to the substrate can be improved, and increased stability after a thermal shock can be achieved.

For example, in a simple but working example, a covering layer comprising platinum and glass, for example a mixture of SiO 2, BaO, Al 2 O 3, can be screen printed on the substrate. This covering layer has the function of a bonding agent layer and promotes a good bonding of the sensor structure to the substrate. On the cover Layer can then also be arranged by screen printing the sensor structure. Subsequently, the assembly can be fired in one step. The fired assembly may have a thickness of 15-20 μm.

In another example, instead of a cover layer comprising platinum and glass, a cover layer comprising glass may be screen printed on the substrate and baked. Advantageously, unevenness and microcracks in the substrate can be smoothed by this covering layer. Subsequently, the sensor structure can be arranged on the baked cover layer and also baked.

In yet another example, the sensor has at least one first insulation layer arranged at least in regions on the first cover layer and / or on the first sensor structure; and / or the sensor has at least one second insulation layer, arranged at least in regions on the second cover layer and / or on the second sensor structure, wherein the first and / or second insulation layer is a glass, a metal oxide, a ceramic and / or a mixture of a Glass, metal oxide and / or ceramic.

Advantageously, the first sensor structure and / or the second sensor structure can be protected by such an insulating layer / insulation layers.

In another example, the sensor has:

at least a first cladding layer arranged at least partially on the first Isolati onsschicht; and or

at least one second cladding layer is arranged at least in regions on the second insulation layer.

Such a cladding layer may be used as a passivation layer, which may contain, for example, quartz glass and optionally a ceramic, as is also described, for example, in DE10 2007 046 900 B4.

In one example, the first sensor structure and / or a second sensor structure comprise / at least one resistance structure for temperature measurement, in particular a meandering measurement resistance. The measuring resistor can be formed from a conductor track with a curved course between two electrodes. For example, the conductor can be configured meander-shaped. Such a measuring resistor may be arranged only on one side, either on the first or the second side of the substrate. In another example, a measuring resistor may also be arranged on both sides of the substrate.

Furthermore, in the above-mentioned example, the first sensor structure and / or the second sensor structure may comprise / comprises at least one comb structure, IDK structure, for measuring a concentration of a deposit of soot particles.

Typically, IDK structures can be used to determine soot particles in a soot sensor.

In yet another example, the first sensor structure and / or the second sensor structure include / includes at least one electrical heating element and at least one temperature sensor for anemometric measurement.

Such sensor structures can be used in flow sensors, which can also be referred to as flow sensors, in order to measure a throughput in a channel, for example in an exhaust gas line.

Also, different sensor structures, for the determination of different sizes, can be arranged on both sides of the substrate. Such a sensor may be referred to as a multi-sensor.

In another example, the first sensor structure and / or the second sensor structure comprise / comprises at least one noble metal, preferably platinum.

Advantageously, the sensor structure (s) can have a platinum resistance as a measuring resistor.

The invention also proposes a use of a sensor according to one of the preceding claims, in particular in the exhaust gas line of a motor vehicle, as a temperature sensor, soot sensor, flow sensor, gas sensor, inertial sensor, impedance sensor, heat flow sensor, Flow sensor and / or as a multi-sensor, which comprises a combination of two or more of said sensors.

Furthermore, the invention proposes a method for producing a sensor, in particular a high-temperature sensor, comprising the steps:

Providing at least one substrate having a first side and a second side opposite the first side, the substrate comprising an oxide-ceramic fiber composite; and

Applying at least a first sensor structure at least partially on the first side of the substrate.

For example, the sensor structure can be applied as a platinum layer to the substrate in thin-film technology or in thick-film technology. For this purpose, platinum powder can be mixed with oxides and binders and applied to the substrate by screen printing. Subsequently, a tempering can take place.

In one example, the method further includes:

Arranging at least a first cover layer at least partially on the first side of the substrate at least partially between the substrate and the first sensor structure, and / or

Arranging at least partially on the second side of the substrate at least in regions between the substrate and the second sensor structure, the first covering layer and / or the second covering layer preferably comprising a glass layer, a ceramic layer, and / or a layer comprising platinum and Glass comprises / comprises.

In yet another example, the method further includes:

Arranging at least one first insulation layer at least in regions on the first cover layer and / or on the first sensor structure; and or

Arranging at least one second insulation layer at least in regions on the second covering layer and / or on the second sensor structure, the first and / or second insulating layer being a glass, a metal oxide, a ceramic and / or a mixture of a glass, a metal oxide and / or a ceramic.

In the above example, the method may further include: Arranging at least one first cladding layer at least in regions on the first insulating layer; and or

Arranging at least a second cladding layer at least partially on the second insulating layer.

Further features and advantages of the invention will become apparent from the following description in which preferred embodiments of the invention are explained with reference to schematic drawings.

Showing:

Figure 1 is a schematic plan view of a sensor according to an embodiment of the invention;

Figure 2 is a schematic exploded view of a sensor according to a

Embodiment of the invention; and

FIG. 3 shows a method for producing a sensor according to an embodiment of the invention.

FIG. 1 shows a schematic plan view of a sensor 1 according to an embodiment of the invention. In the embodiment shown, a first cover layer 5 is arranged on the substrate 3 on the first side of the substrate 3 between the substrate 3 and a first sensor structure 7.

In the embodiment shown, an IDK structure for determining soot particles as the first sensor structure 7 is arranged on the substrate 3. In embodiments not shown, the first sensor structure 7 may also comprise further / alternative structures that are adapted to detect one or more gas parameters of a passing gas. In the example shown, the first sensor structure 7 is heated to determine soot particles. As a heater, a resistance trace located below the first sensor structure 7 (not shown) may be used. For example, a second sensor structure, not shown, can be arranged on a second side of the substrate and heat the region A at / around the first sensor structure 7. In an embodiment not shown, the first sensor structure 7 in addition to the IDK structure still have a heat conductor for heating the IDK structure.

Also shown in FIG. 1 is a region B with a large temperature gradient from the right (cold) to the left (hot), which at the same time represents an area with a high susceptibility to breakage or breakage. In this area, the substrates used in the prior art are often damaged.

2 shows a schematic exploded view of a sensor 1 according to an embodiment of the invention. The sensor 1 shown by way of example may be the sensor 1 shown in FIG. The sensor 1 has a substrate 3, which comprises an oxide-ceramic fiber composite material.

Optionally, in the embodiment shown in FIG. 2, a first covering layer 5 is shown, which is arranged on the first side of the substrate 3. For example, the first cover layer 5 can be applied by screen printing and comprise a glass layer, a ceramic layer, and / or a layer comprising platinum and glass. The first cover layer 5 may cover a surface of the substrate 3 over its entire area, or may be arranged only on a partial area of the surface of the substrate 3.

On the substrate 3 or on the optionally applied first cover layer 5, a first sensor structure 7 is arranged, which is designed as an IDK structure. As is shown in FIG. 2, the first sensor structure 7 can have two connection contacts in order to be able to connect the sensor structure 7 to an evaluation electronics (not shown in FIG. 2). Alternatively or in addition to the illustrated IDK structure, in other embodiments, not shown, further sensor structures or heating elements may be arranged on the first side of the substrate 3.

Furthermore, it is merely optionally shown in FIG. 2 that the first sensor structure 7 and regions of the covering layer 5, which are not covered by the first sensor structure 7, can be at least partially covered by a first insulation layer 9. The first insulation layer 9 may in turn, only optionally, be at least partially covered by a cladding layer 11. The person skilled in the art knows, however, that an insulation layer 9 and / or a cladding layer 11 are not necessary for the use of the sensor 1 shown in FIG. sensor, soot sensor, flow sensor, and / or as a multi-sensor, for example in the exhaust system of a motor vehicle.

In the embodiment shown in FIG. 2, a second covering layer 5 ', which may comprise a material similar to the first covering layer 5, is arranged on the second side of the substrate 3.

In the embodiment shown, a meander structure as a second sensor structure 7 'is arranged on the substrate 3 by way of example. The meander structure shown can be used, for example, to heat the substrate 3 and / or to measure the temperature. In alternative embodiments not shown herein, the second sensor structure 7 'may also comprise further / alternative structures adapted to detect one or more gas parameters of a passing gas.

Also, as already described herein with regard to the first side of the all-ceramic heater 3, a second insulation layer 9 'may be arranged on the second sensor structure 7' at least in regions, on which in turn at least in regions a second skin layer 1 is arranged can be.

However, an arrangement of structures on the second side of the substrate 3 is not essential to the invention. A sensor 1 according to the invention may also comprise only a substrate 3 and a first sensor structure 7.

FIG. 3 shows a method 1000 for producing a sensor according to an embodiment of the invention. The method 1000 has the following steps:

Providing 1010 at least one substrate having a first side and a second side opposite the first side, the substrate comprising an oxide-ceramic fiber composite; and

Applying 1020 at least a first sensor structure at least partially on the first side of the substrate.

Furthermore, the method can also have the following steps:

Arranging 1030 at least a first cover layer at least partially on the first side of the substrate at least partially between the substrate and the first sensor sorstruktur, and / or Arranging 1040 at least one second cover layer at least in regions on the second side of the substrate at least in regions between the substrate and the second sensor structure, wherein the first cover layer and / or the second cover layer preferably a glass layer, a ceramic layer, and / or a layer comprising platinum and glass, and / or

Arranging 1050 at least one first insulation layer at least in regions on the first cover layer and / or on the first sensor structure; and or

Arranging 1060 at least one second insulating layer at least in regions on the second covering layer and / or on the second sensor structure, wherein the first and / or second insulating layer is a glass, a metal oxide, a ceramic and / or a mixture of a glass, a metal oxide and / or a ceramic includes /, and / or

Arranging 1070 at least one first cladding layer at least in regions on the first insulating layer; and or

Arranging 1080 at least a second cladding layer at least partially on the second insulation layer.

The features set forth in the foregoing description, in the claims and in the figures may be essential to the invention in its various embodiments both individually and in any desired combination.

LIST OF REFERENCES

1 sensor

3 substrate

5, 5 'first / second cover layer

7, 7 'first / second sensor structure

9, 9 'first / second insulation layer

1 1, 11 'first / second cladding layer

A range A

B area B

1000 method for producing a sensor

1010 manufacture

1020 application

1030 Arrange first cover layer

1040 Arrange second cover layer

1050 Arrange first insulation layer

1060 Arrange second insulation layer

1070 Arrange first cladding layer

1080 Arrange second cladding layer

Claims

claims

1. Sensor, in particular high-temperature sensor, comprising:

at least one substrate (3) having a first side and a second side opposite the first side; and

at least a first sensor structure (7) arranged at least partially on the first side of the substrate (3), characterized in that

the substrate (3) comprises an oxide-ceramic fiber composite material.

2. Sensor according to claim 1, characterized in that

the oxide-ceramic fiber composite comprises fibers of silica, alumina, titania, baria, boria, zirconia, and / or any mixtures thereof, and / or comprising matrices comprising alumina, silica, magnesia, baria, and / or zirconia, preferably the oxide ceramic fiber composite a matrix of alumina and zirconia as a binding aid.

3. Sensor according to claim 1 or 2, characterized in that

the sensor has:

at least a first cover layer (5) arranged at least in regions on the first side of the substrate (3), wherein the first cover layer (5) at least partially between the substrate (3) and the first sensor structure (7) is arranged, and / or

at least one second covering layer (5 ') is arranged at least in regions on the second side of the substrate (3), wherein the second covering layer (5') is arranged at least in some areas between the substrate (3) and a second sensor structure (7 ').

4. Sensor according to claim 3, characterized in that

the first covering layer (5) and / or the second covering layer (5 ') comprises / comprises a glass layer, a ceramic layer, and / or a layer comprising platinum and glass

5. Sensor according to claim 3 or 4, characterized in that

the sensor has: at least one first insulating layer (9) arranged at least in regions on the first covering layer (5) and / or on the first sensor structure (7); and / or at least one second insulating layer (9 ') arranged at least in regions on the second covering layer (5') and / or on the second sensor structure (7 '), wherein the first and / or second insulating layer (9') comprises a glass, a metal oxide, a ceramic and / or a mixture of a glass, a metal oxide and / or a ceramic include / includes.

6. Sensor according to claim 5, characterized in that

the sensor has:

at least one first cladding layer (11) arranged at least in regions on the first insulating layer (9); and or

at least one second cladding layer (1 1 ') arranged at least partially on the second insulating layer (9').

7. Sensor according to one of the preceding claims, characterized in that the first sensor structure (7) and / or a second sensor structure (7 '), at least one resistance structure for temperature measurement include / includes, in particular a meander-shaped measuring resistor comprises / includes ,

8. Sensor according to one of the preceding claims, characterized in that

the first sensor structure (7) and / or the second sensor structure (7 ') comprises / comprises at least one comb structure, IDK structure, for measuring a concentration of a deposit of soot particles.

9. Sensor according to one of the preceding claims, characterized in that

the first sensor structure (7) and / or the second sensor structure (7 ') comprises / comprises at least one electrical heating element and at least one temperature sensor for anemometric measurement.

10. Sensor according to one of the preceding claims, characterized in that the first sensor structure (7) and / or the second sensor structure (7 ') at least one precious metal, preferably platinum include / comprises.

11. Use of a sensor according to one of the preceding claims, in particular in the exhaust system of a motor vehicle, as a temperature sensor, soot sensor, flow sensor, gas sensor, inertial sensor, impedance sensor, Wärmeströnungssensor, flow sensor and / or as a multi-sensor comprising a combination of two or more of said sensors ,

12. A method for producing a sensor, in particular a high-temperature sensor, comprising the steps:

Providing (1010) at least one substrate (3) with a first side and a second side opposite the first side, the substrate (3) comprising an oxide-ceramic fiber composite material; and

Applying (1020) at least one first sensor structure (7) at least in regions on the first side of the substrate (3).

13. The method of claim 12, comprising:

Arranging (1030) at least one first covering layer (5) at least in regions on the first side of the substrate (3) at least in regions between the substrate (3) and the first sensor structure (7), and / or

Arranging (1040) at least one second covering layer (5 ') at least in regions on the second side of the substrate (3) at least in regions between the substrate (3) and the second sensor structure (7'), wherein the first covering layer (5) and / or the second covering layer (5 ') preferably comprises / comprises a glass layer, a ceramic layer, and / or a layer comprising platinum and glass.

14. The method of claim 12 or 13, comprising:

Arranging (1050) at least one first insulation layer (9) at least in regions on the first covering layer (5) and / or on the first sensor structure (7); and / or arranging (1060) at least one second insulation layer (9 ') at least in regions on the second cover layer (5') and / or on the second sensor structure (7 '), wherein the first and / or second insulation layer (9, 9' ) comprises / comprises a glass, a metal oxide, a ceramic and / or a mixture of a glass, a metal oxide and / or a ceramic.

15. The method of claim 14, comprising:

Arranging (1070) at least one first cladding layer (1 1) at least in regions on the first insulating layer (9); and or

Arranging (1080) at least one second cladding layer (11 ') at least in regions on the second insulating layer (9').