EP3611806B1 - Adapter and vacuum system - Google Patents

Description

The present invention relates in principle to an adapter for the information technology connection of a vacuum device to a functional element for the vacuum device. Within the scope of the claims, the invention relates to a vacuum system with a vacuum device, functional element and adapter.

Vacuum devices are often optimized for certain properties, e.g. in terms of mechanics, attachment, size and manufacturing costs, in order to be able to be used in the best possible way in the respective applications. However, this is usually accompanied by the restriction or waiver of certain functions, such as connection options for accessories, communication interfaces, control inputs/outputs, separate inputs for power supply, operating and display elements, etc. The same applies to older devices which - due to the relatively long lifetime of the devices in the field of vacuum technology - are to be integrated into newer environments (e.g. data acquisition via Ethernet for the purpose of condition monitoring or new applications) or are to be supplemented by accessories (e.g. integrated pressure measurement technology), in particular for which no connectors were originally intended.

Currently, this is countered by providing external adapters (e.g. to connect an RS485 interface and accessories) or integration into connection components (e.g. accessory connections and switches in DC cables), which then only have to be used when required. The adapters are then adapted to an application, ie plug-in direction, cable outlets, positioning of the respective elements, such as connections, controls and labeling, are based on a specific application and can possibly be do not use in other applications. For example, adapters for accessories (e.g. plug connectors integrated in the DC cable) cannot be used with certain vacuum pumps despite the same connection if the plug connector is unfavorably oriented. It can also happen that cables on adapters exit in different directions due to different mounting orientations of different pumps. In addition, the problem of the cable outlet is of increasing importance with ever shorter turbomolecular pumps and the associated reduced space for adapters. There are also drive units with different connectors for such an adapter, such as D-Sub-15, especially for small turbopumps and backing pumps, and HD-Sub-26 for medium-sized and large turbopumps, which reduces the number of adapters required for special functions or adapters for the connections among themselves further increased.

the EP 3 029 327 A1 discloses a vacuum system with a vacuum device and a functional element.

the US 8,708,722 B1 discloses a power adapter for USB devices, the power adapter having a base element with a USB connection and an interchangeable head with contacts for plugging into a mains socket, different heads with different types of contacts for different country standards being connectable to the base element.

It is an object of the invention to simplify the connection of a vacuum device to a functional element, to make it more flexible and/or to reduce the number of adapters required to connect different functional elements to different vacuum devices.

This object is achieved by a vacuum system according to claim 1.

The object is achieved in particular by an adapter which comprises: a base element, a first and a second primary connector, each for connection to one of the vacuum device and functional element, the primary connectors being connected to one another, a module which is separate from the base element and has the first primary connector and attached to the base member, the base member and the module each having an interconnector which together form an interconnect through which the first primary connector is connected to the second primary connector.

In particular, the intermediate connector and the separate design of the module or the first primary connector enable particular flexibility and a reduction in the number of adapters required. On the one hand, this allows different modules to be used as required, with one and the same basic element being able to be used in particular. The modules can fundamentally differ in their function or also in their spatial orientation of the first primary connector relative to the intermediate connector. On the other hand, with a corresponding configuration of the intermediate connector, this enables the module to be arranged on the base element in different arrangements or with different relative orientations of the first primary connector to the second primary connector.

The terms "connector", "connection" and "connect" are used here in the sense of an electrical and/or information technology connection. A mechanical coupling of two elements, on the other hand, is referred to in particular as "fastening". Within the scope of claim 1, the adapter forms at least one information technology connection. In principle, the adapter can also form an electrical connection.

According to the invention, the connection between the primary plug connectors is made possible by the intermediate connection or is established in the connected state. the Intermediate connectors can be brought together to make the connection, for example at the manufacture of the adapter or by its user.

The present invention aims in particular to design parts of the adapter in such a way that the overall product can be adapted to the circumstances in the best possible way, if necessary also by the user himself be provided uniform controls. However, these can be oriented or configured differently due to the assembly on the overall system. A 15-pin D-Sub connector (D-Sub 15) or an HD-Sub 26 connector, such as those commonly used in vacuum technology, serve as an example. In principle, these are always designed the same way, but differ in details or optional functions depending on the device. For example, with small devices (e.g. turbomolecular pumps or diaphragm vacuum pumps) the power supply is routed via this connector, with larger devices (e.g. backing pumps) not. There, the connector is only used as a signal or analog input, for example. Accessories are also supported on some devices and not on others. However, the alternative uses are defined in such a way that no incompatibilities arise.

Thus, an adapter of the present invention should preferably support the maximum set of possible configurations. In a classic design according to the state of the art, this would amount to a device with a fixed assignment of all elements, which can then only be used to a limited extent in other vacuum solutions. For this reason, the module of the adapter is preferably designed in such a way that it can be mounted at different angles and/or in different places on the base element. The assembly can be done at or before delivery and/or by the user. The parts of the adapter in particular the intermediate connectors are preferably designed in such a way that no impermissible access to certain parts of the adapter, in particular an interior of the base element and/or, for example, sensitive electronic assemblies, can take place.

In particular, the adapter has a function that goes beyond pure contacting or connection. In particular for the purpose of using this function in as many different vacuum components as possible, the adapter has the features according to the invention with particular flexibility, in particular spatial flexibility. For example, the adapter can include a Profinet gateway, the provision of functions or signals and/or signal conversions derived from the primary connectors to other connectors, whereby in particular the connection of the primary connectors can be retained in order to keep the other functions present on these connectors untouched or at least continue to do so to be usable.

For example, a supply voltage for a vacuum device, in particular a turbomolecular pump, can be made available via the second primary connector. The supply voltage can then be passed on to the vacuum device via the first primary connector, for example. For example, other signals for the function can be derived, converted or interrupted, for example RS485 signals, which are only required for a Profinet gateway function and are not forwarded.

The invention thus makes it possible in particular to allow as many vacuum devices as possible to benefit from the advantageous function of the adapter. For example, the orientation of the vacuum device and functional element can be chosen advantageously by rotating the module or mounting it at a different location or using a different connector (e.g. HD-Sub-26 instead of D-Sub-15). for example, to design cable outlets advantageously, to take into account the given space conditions or to enable assembly in principle.

According to one embodiment, it is provided that the module can be arranged and/or fastened in at least two different spatial configurations on the base element. Accordingly, in particular the spatial arrangement of the first primary connector, which is part of the module, is different. This makes it possible in a simple manner for functional elements with differently arranged plug connectors to be connected to the vacuum device.

A difference between two possible arrangements of the module can include, for example, a rotation of the first primary connector, preferably by 90° or 180°. The difference can also include several turns, for example. The axis of rotation of the rotation can preferably be the plug-in axis of the first or second primary connector and/or a connection axis, in particular a plug-in axis, of the intermediate connector or, for example, an axis that runs perpendicular to both plug-in axes.

A development provides that an assignment of contacts of the first primary connector to contacts of the second primary connector is the same in both arrangements. This can be achieved, for example, by appropriate wiring or, for example, by appropriate programming of a logic element of the base element or of the module. In particular, the assignment is the same for at least some of the contacts of the connector or for all contacts. In particular, the assignment can be the same for several or all possible arrangements of the at least one module.

For example, the base element and/or the intermediate connector of the base element can be designed to have different modules with a primary connector can be attached to the base element. This further improves the flexibility of the adapter for connecting vacuum devices with functional elements. The intermediate connector can thus be used for a wide variety of modules, which are each adapted for different functional elements or vacuum devices or their connections. In general, the intermediate connectors on the base element can be designed in such a way that they can be used to connect to functionally different modules. For example, a module of the first type, for example with a 15-pin D-Sub socket, or a module of the second type, for example with a 26-pin HD-Sub socket, can be mounted on the base element. In particular, the assembly of a large number of different modules can also be provided. In particular, the second primary connector retains its function, in particular regardless of which module is connected. This further increases the possible field of application of such an adapter. In particular with appropriate wiring in the base element, a pure plug adaptation can be implemented by the adapter, for example between D-Sub-15 and HD-Sub-26. Alternatively or additionally, the module can have a first primary connector with a function that is not provided for in the second primary connector or in the vacuum device or functional element that is connected to the second primary connector. For example, the module can have a Profinet connection that can be used, for example, for different drive devices. The adapter can therefore generally have functions that the vacuum device or the functional element do not have. The adapter thus enables in particular a connection with old devices and, thanks to the additional functions, their upgrading. In particular, a computing unit, such as a microcontroller, can be provided in the base part, which, for example, provides a conversion of information between two connectors, in particular the primary connectors. The computing unit can thus provide, for example, a bus connection for a vacuum device which—for example because of its age—does not have such a bus connection.

An adapter set for the information technology connection of a vacuum device to a functional element for the vacuum device can advantageously be provided, the adapter set comprising: a base element with a first intermediate connector and a second primary connector or a second intermediate connector for connection to a module with a second primary connector; a first module, separate from the base, having a first primary connector and an intermediate connector for connection to the first interconnect of the base; and a second module, separate from the base, having a third primary connector and an intermediate connector for connection to the first interconnect of the base. In particular, the modules can be different, in particular have different primary connectors. Preferably, three or more modules can also be provided. In principle, one or more modules with intermediate connectors for connection to the second intermediate connector of the base element can also be provided, in particular with different second primary connectors.

According to an exemplary embodiment, it is provided that the intermediate connectors are designed as plug connectors. In general, connectors, in particular the intermediate connectors and/or at least one of the primary connectors, can preferably be designed as a socket or plug.

The intermediate connection can preferably be designed as a detachable connection. This enables particular flexibility and in particular a repeatable change in the configuration, in particular by a service employee of the manufacturer or by the user himself. In general, the module can be detachably attached to the base element, in particular screwed.

In a further development, the intermediate connection is designed in such a way that the intermediate connector of the module can be connected to the intermediate connector of the base element when the module is in different orientations. Here is the Function of the module or the first primary connector at least partially, in particular fully guaranteed. In general, the module can be attached or fastened to the base element in a technically functioning manner, in particular in different orientations and/or at different positions relative to the base element. In particular, the information technology connection is provided in the different orientations or positions and is established in particular by or when attaching or fastening the module to the base element in the selected orientation or position.

Generally preferred, an arrangement of the first primary connector is fixed relative to the intermediate connector of the module. In particular, the module is designed as a fixed structure and/or the first primary connector and the intermediate connector of the module are positioned relative to one another and/or connected to one another by a fixed structure, e.g. by a circuit board, in particular not just by a cable. More generally, an arrangement of the second primary connector or of a second intermediate connector upstream of the second primary connector is fixed relative to the first intermediate connector of the base element. The relative arrangement and/or connection of the (first) intermediate connector to the second primary connector or the second intermediate connector can preferably be formed by a fixed structure, for example a circuit board, and in particular not by a cable.

A particular idea of the invention is that the base element and the module or modules can be flexibly connected to one another as fixed units and that different spatial arrangements and/or different functions can be implemented in this way, and in particular with fewer parts than if - as in State of the art - a specific adapter is provided for each desired configuration.

The base element and/or the module can preferably be designed as a solid body. A base element which is essentially cuboid and/or box-shaped is particularly advantageous.

In a further embodiment, the base element has a second intermediate connector for connecting a module with a primary connector. In this way, in particular, a further arrangement option can be created for a specific module. Alternatively or additionally, a further or another module can be connectable to the second intermediate connector. The module can be, for example, a module with the second primary connector or a module with a further first primary connector or a third primary connector. In general, the second intermediate connector can therefore be provided either for the second primary connector or for a first primary connector. In principle, it is also conceivable that several intermediate connectors are provided and modules with first and second primary connectors can be exchanged for one another.

In principle, it is possible for the adapter to offer a number of mounting positions for mounting at least one module on the base element, which can in particular be assigned once, multiple times or completely. Exactly one of several mounting positions can therefore be selected in a suitable position and orientation, but several modules can also be mounted on these several mounting positions, e.g. to provide a variable number of accessory connections. Preferably, only as many modules, primary connectors and/or accessory connection points (which include, for example, connectors, LEDs, switches and/or the like) can be used as are actually required.

Provision can advantageously be made for the second intermediate connector to be covered by a cover. This allows a simple way, if necessary sensitive intermediate connector or generally an interior of the base element are protected. The cover can be provided on any intermediate connector in particular in the event that no module is connected to this intermediate connector. If, for example, two intermediate connectors are provided for realizing two possible assembly positions of the module on the base element, the module can be connected to one of the intermediate connectors and the second intermediate connector can be covered by the cover. In particular, the cover is detachably fastened to the base element. When changing the module from one possible mounting position to another, the cover can also be attached to the previous mounting position of the module, ie cover the corresponding intermediate connector. The cover can be designed, for example, as a plate, in particular a dummy plate, and/or can be detachably fastened, in particular screwed, to the base element. The cover can preferably have a fastening interface which corresponds to a fastening interface of the module. In this case, the module and the cover are easily interchangeable.

According to a development, it is provided that the module can be arranged and/or fastened optionally on a first side of the base element or on a second side of the base element, preferably opposite the first. This makes it possible in a simple manner for the adapter to be able to be used to connect the vacuum device and functional element in different spatial configurations.

In principle, the adapter can also comprise a second module, which has the second primary connector, with an intermediate connector being provided on the base element and on the second module, which together form a second intermediate connection. This allows the adapter to be used even more flexibly. The connection between the first and the second primary connector takes place in particular via the second intermediate connection. As a result, the connection is realized via the first and the second intermediate connection, wherein, in particular, further conductors are also provided in the modules and/or the base element.

At least one of the primary connectors can preferably be designed as a D-Sub connector. In principle, a module can have one or more primary connectors. A primary connector can be designed as a plug or socket, for example.

In a preferred embodiment, a fixed assignment of contacts of its intermediate connector and/or the first primary connector to contacts of the second primary connector and/or possibly a second intermediate connector of the base element is provided in the base element. The fixed assignment can be wired and/or the base element can have a logic element for assigning contacts and/or converting information. The fixed assignment can also be the same or provided in particular when the module is arranged in at least two different mounting positions or arrangements on the base element.

In general, the second primary connector can therefore be arranged either directly on the base element or on a module. In principle, several primary connectors can each be provided on the base element or on the module. A vacuum device can be connected to the first primary connector, for example, and at least two additional primary connectors can be provided, each for connecting a functional element. In general, a primary connector can be designed for connection to a bus system, for example as a Profinet and/or Ethernet connection. A connection for a bus system can be provided in particular in addition to a first and second primary connector.

According to the invention, the adapter is designed for the transmission of information, analog and/or digital. In addition, it can be designed to transmit electrical power, in particular a drive power of the vacuum device or generally a power supply of the functional element or vacuum device.

Fig. 1

zeigt eine Ausführungsform eines Adapters.

Fig. 2

zeigt ein Modul mit Primärsteckverbinder und Zwischenverbinder.

The invention is explained below purely by way of example with reference to the schematic drawing.

1

Figure 1 shows an embodiment of an adapter.

2

shows a module with primary connector and intermediate connector.

In 1 an adapter 10 is shown in an exploded view. This comprises, in particular, a base element 12, a module 14 and an optional cover 16, which are connected to a functional element (not shown) with the screws shown to form a ready-to-use adapter for the purpose of connecting a vacuum device.

The module 14 includes a first primary connector 18, which is designed here by way of example as a D-Sub connector. The primary connector 18 therefore only allows a connection with a specific orientation of the module 14 relative to the connector to be connected to the vacuum device or the functional element.

The primary connector 18 is preferably connected to a panel 20 of the module 14 and is releasably attached to the panel 20 by two screws 22 on the base member 12 in particular.

The base element 12 includes a second primary connector 24, which is also designed here as a D-Sub connector. The second primary connector 24 is connected to an intermediate connector 26 of the base element 12, namely by lines (not shown) inside the cuboid body of the base element 12.

In particular, the second primary connector 24 can be provided for connection to a vacuum device, with the first primary connector 18 being provided for connection to a functional element for the vacuum device. A reverse configuration is also possible.

In this embodiment, the base element 12 also includes two plug connectors 25, which in particular also form primary plug connectors. At least one of the plug connectors 25 can form a communication and/or bus connection, e.g. a Profinet connection. The vacuum device can be integrated into a process control system via the connection, for example. A computing unit, for example, can be provided in the base part, which defines an interface for the connection. In particular, the connection can be designed for a vacuum device which itself does not have such a connection or a corresponding interface. For example, the adapter 10 can provide such a connection to an older vacuum device. In principle, the plug connectors 25 could also be arranged on a module that is separate from the base element 12 .

The module 14 also comprises an intermediate connector 28 which is arranged on the side of the module 14 which faces the intermediate connector 26 and is therefore in 1 is not visible. Upon attachment of module 14 to base member 12 in the configuration illustrated herein, intermediate connectors 26 and 28 are brought together and then form an interconnection between primary connectors 18 and 24.

The base element 12 also includes a second intermediate connector 30, specifically in this embodiment on the side of the base element 12 opposite or facing away from the first intermediate connector 26. Due to the in 1 selected perspective, the second intermediate connector 30 is not visible.

The second intermediate connector 30 is designed in particular to correspond to the intermediate connector 26 . In particular, therefore, the module 14 can be selectively connected to the intermediate connector 26 or to the intermediate connector 30 . At least two different mounting positions for the module 14 are therefore provided, as indicated by an arrow 32 . Different arrangements of the module 14 or of the first primary connector 18 relative to the second primary connector 24 are thus possible, namely simply by selecting one of the possible assembly positions.

In the illustrated configuration, however, the interposer 30 is covered by the cover 16 to protect the interposer 30 . Optionally, in particular the cover 16 and the module 14 can be interchanged in their assembly position. In principle, for example, an intermediate connector or a mounting position for a module can also be provided on another or further side 34 of the base element 12 .

The intermediate connectors 26 and 28 are designed in such a way that they can be functionally connected in different spatial configurations, that is to say with different relative orientations of the module 14 relative to the base element 12 . In this embodiment, in addition to the in 1 shown orientation of the module 14 another orientation possible, in which the module 14 is rotated 180 ° about the plug-in axis of the first primary connector 18, as it is indicated by the arrow 36. The plug-in axis of the first primary connector 18 corresponds here to the connection axis of the intermediate connectors 26 and 28.

Since the intermediate connector 30 is formed in this embodiment according to the intermediate connector 26, the module 14 or the intermediate connector 28 can also be attached to the intermediate connector 30 or the corresponding side of the base element 12 in different orientations, namely also in different orientations by 180°. A total of four different arrangements of the module 14 on the base element 12 are therefore possible in the embodiment shown.

2 illustrates the structure of a module, in particular the module 14 of 1 . while showing Figure 2a the module 14 in a side view.

The D-sub connector or first primary connector 18 is attached to the board 20 such that its male contacts 36 in Figure 2a to the left and in 1 or are directed outwards in the assembly. The plug contacts 36 have extensions 38 which are connected to a circuit board 40 . Also connected to the circuit board 40 are a plurality of contacts 42 and 44 associated with the extensions 38 and the plug contacts 36, respectively, in particular by conductors formed on the circuit board 40. In Figure 2a only one contact of a respective row 42 or 44 is visible.

The contacts 42 and 44 form an intermediate connector 28 of the module 14 and are designed here as pins. They are respectively to be mated with associated contacts 46 and 48 of the interconnector 26 of the base 12 to form an interconnection. The contacts 46 and 48 are designed as sockets for the pins. The contacts 42 and 44 are arranged such that the interconnection is maintained at various orientations of the module 14 relative to the Base part 12 can be produced. For this purpose, the contacts 42 and 44 on the one hand and 46 and 48 on the other hand are arranged in corresponding rows.

In this embodiment, two orientations of the module 14 are possible, namely firstly by plugging in the in Figure 2a upper row of contacts 42 in the in 1 top row of contacts 46 and the in Figure 2a bottom row 44 into the in 1 lower row 48 and secondly by inserting the in Figure 2a top row 42 into the in 1 lower row 48 and the in Figure 2a bottom row 44 into the in 1 upper row 46. The same applies to a connection with the intermediate connector 30.

An assignment of the plug contacts 36 or their extensions 38 to the contacts 42, 44 is in Figure 2b illustrated by numbering each contact. The male contacts 36 include 15 contacts and the contacts 42 and 44 each include 15 contacts. The contacts 36 are assigned to the contacts 42 or 44 with a corresponding number, ie the contact 36.1 is assigned to both the contact 42.1 and the contact 44.1, etc. By such an assignment and the fact that the intermediate connector 28 can be connected in the two orientations is, the module 14 will automatically function in both orientations. In the case of the intermediate connector 26, for example, only one of the contact rows 46 and 48 needs to be connected. Alternatively or in principle also additionally, it would be possible to provide the double assignment illustrated here on the side of the base part 12 or of the intermediate connector 26 .

In the example described here, the adapter 10 includes a first primary connector 18 which can be arranged on the base part 12 at two different locations or sides of the base part 12 in two orientations and thus in four different ways. This enables a large number of different alignments that are optimal for the application, especially with regard to the alignment of cable outlets or control elements. on the one On the side of the base part 12, the module 14 can be mounted in two orientations rotated by 180°, the other side of the base part 12 has a cover 16, here in the form of a blind plate. However, it is also possible to swap the positions of the cover 16 and the module 14. The remaining elements of the adapter, in particular the second primary connector, retain their position in this example, so that there is a selection of possible orientations and cable outlets depending on the spatial configuration of the module and cover. The intermediate connectors 26 and 28 of the base part 12 are designed in such a way that the parts lying behind them, ie the interior of the base part 12, are inaccessible, so that the user does not have direct access to them during configuration. This ensures safe operation despite the flexible configuration.

In principle, the number and type of primary connectors are arbitrary. As shown in the example, a single module 14 (in this case with a D-Sub connector) can be rotated by 180° by arranging the contacts accordingly, for example by designing a double number of contacts rotationally symmetrically and then actually using the contacts that match the chosen orientation. this is in Figure 2a illustrated and described above.

The orientation of the module 14 relative to the base 12 is selectable either at the time of manufacture, factory assembly, and/or by the user. Depending on the type and arrangement of other modules on the base part, the same module can also be installed elsewhere in the same way. Depending on requirements, either the module 14 can be mounted at different points on the base part 12 and/or in different orientations, which then leads to different accessibility and orientations of the other elements on the adapter. The number of modules that can be mounted in different ways is flexible, as is the position on which the other elements can be mounted. So their orientation and number are also flexible. Generally For example, orientations in 90° steps and/or generally more than two assembly positions can also be conceivable.

The advantages of the adapter include an advantageous arrangement of cable outlets, controls and displays while still allowing the use of standard accessories (e.g. connection, DC cable), mastering the variety of variants with the maximum possible area of application and use with a large number of devices or functional elements.

The adapter can advantageously be used to connect essentially all types of vacuum components, especially small devices (e.g. small turbomolecular pumps or diaphragm vacuum pumps) or older devices of all types, which are functionally expanded by external adapters or newer conditions (e.g. Industry 4.0, industrial communication, accessories ) must be adjusted. For certain applications, the adapter includes a Profinet connection for a vacuum pump, for example. The adapter can generally advantageously be designed for use with a vacuum pump, eg a turbomolecular pump, a diaphragm vacuum pump, a rotary vane pump, a Roots pump and/or a scroll pump.

Reference List

10

adapter

12

base element

14

module

16

lid

18

first primary connector

20

plate

22

screw

24

second primary connector

25

connector

26

intermediate connector

28

intermediate connector

30

intermediate connector

32

arrow

34

page

36

plug contacts

38

renewal

40

circuit board

42

contacts

44

contacts

46

contacts

48

contacts

Claims (14)

1. A vacuum system comprising

   a vacuum device, in particular a vacuum pump;

   a functional element, in particular a drive device, for the vacuum device; and

   an adapter (10) by means of which the vacuum device is or can be connected to the functional element in an IT regard,

   wherein the adapter (10) comprises:

   a base element (12);

   a first and a second primary plug connector (18, 24), each for connection to one of the vacuum device and the functional element, wherein the primary plug connectors (18, 24) are connected to one another; and

   a module (14) which is separate from the base element (12), which has the first primary plug connector (18) and which is fastened to the base element (12),

   wherein the base element (12) and the module (14) each have an intermediate connector (26, 28), said intermediate connectors (26, 28) together forming an intermediate connection via which the first primary plug connector (18) is connected to the second primary plug connector (24).
2. A vacuum system in accordance with claim 1,
   wherein the module (14) can be arranged in at least two different spatial arrangements at the base element (12).
3. A vacuum system in accordance with claim 2,
   wherein a difference between two possible arrangements of the module (14) comprises a rotation of the first primary plug connector (18), preferably by 90° or 180°.
4. A vacuum system in accordance with claim 2 or claim 3,
   wherein an association of contacts (36) of the first primary plug connector (18) with contacts of the second primary plug connector (24) is the same in both arrangements.
5. A vacuum system in accordance with at least one of the preceding claims, wherein the base element (12) and the intermediate connector (26) of the base element (12) are configured such that different modules (14) comprising primary plug connectors (18) can be attached to the base element (12).
6. A vacuum system in accordance with at least one of the preceding claims, wherein the intermediate connectors (26, 28) are configured as plug connectors.
7. A vacuum system in accordance with at least one of the preceding claims, wherein the intermediate connection (28) is configured as a releasable connection.
8. A vacuum system in accordance with at least one of the preceding claims, wherein the intermediate connection (26, 28) is designed such that the intermediate connector (28) of the module (14) can be connected to the intermediate connector (26) of the base element (12) in different orientations of the module (14).
9. A vacuum system in accordance with at least one of the preceding claims, wherein the base element (12) and/or the module (14) is/are configured as a solid body.
10. A vacuum system in accordance with at least one of the preceding claims, wherein the base element (12) has a second intermediate connector (30) for connecting a module comprising a primary plug connector.
11. A vacuum system in accordance with claim 10,
    wherein the second intermediate connector (30) is covered by a cover (16).
12. A vacuum system in accordance with at least one of the preceding claims, wherein the module (14) can be selectively arranged at a first side of the base element (12) or at a second side of the base element (12) which is preferably disposed opposite the first side.
13. A vacuum system in accordance with at least one of the preceding claims, comprising a second module which has the second primary plug connector, wherein an intermediate connector is in each case provided at the base element and at the second module, said intermediate connectors together forming a second intermediate connection.
14. A vacuum system in accordance with at least one of the preceding claims, wherein at least one of the primary plug connectors (18, 24) is a D-sub connector.

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