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EP3499039A1 - Pompe à vide à vis - Google Patents

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Publication number
EP3499039A1
EP3499039A1 EP17207576.4A EP17207576A EP3499039A1 EP 3499039 A1 EP3499039 A1 EP 3499039A1 EP 17207576 A EP17207576 A EP 17207576A EP 3499039 A1 EP3499039 A1 EP 3499039A1
Authority
EP
European Patent Office
Prior art keywords
screw
vacuum pump
pump
screw vacuum
rotors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17207576.4A
Other languages
German (de)
English (en)
Other versions
EP3499039B1 (fr
Inventor
Peter Huber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17207576.4A priority Critical patent/EP3499039B1/fr
Priority to JP2018232381A priority patent/JP7221672B2/ja
Publication of EP3499039A1 publication Critical patent/EP3499039A1/fr
Application granted granted Critical
Publication of EP3499039B1 publication Critical patent/EP3499039B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control

Definitions

  • the present invention relates to a screw vacuum pump having a housing, two screw rotors arranged in the housing and engaged with each other, which repeatedly conveyed flow volumes of the process gas to convey a process gas in cooperation with the housing and convey toward an outlet.
  • the vacuum performance of screw vacuum pumps is highly dependent on the size and number of gaps in the pump active area, in particular between engaged screw rotors and between a respective screw rotor and an enclosing housing wall. These gaps change during operation or compared to standstill due to heat-dependent changes in shape, in particular expansions, of the components involved.
  • By controlling heat generation and limiting or reducing high temperatures in the screw pump the influence of the temperature on the gap and thus on the vacuum technical performance of the screw pump can be improved.
  • heat unless it is desired in some places, generally corresponds to losses, so that reduction of heat production can improve the efficiency of the screw vacuum pump. There is a close relationship between the power consumption of the pump and the resulting heat, where high power density requires effective heat removal.
  • a screw vacuum pump having a housing, two screw rotors disposed in the housing and engaging with each other, which repeatedly deliver closed process gas delivery volumes to convey a process gas in cooperation with the housing and convey toward an outlet, the screw vacuum pump at least one of has features described below.
  • a motor which is designed as a direct drive for one of the screw rotors. Since the motor is designed as a direct drive, no coupling between the motor and the relevant screw rotor must be provided. Since a clutch basically generates heat during operation, a heat source is thus completely avoided. In addition, this avoids the corresponding mechanical losses in the coupling, which improves the energy efficiency of the pump.
  • active cooling refers to an externally operated cooling, ie in particular a liquid cooling with a pump.
  • a separate pump can be provided or be used on a house connection line anyway provided water pressure.
  • the active cooling may include water cooling. The active cooling ensures fast heat dissipation and thus helps to limit the temperatures in the screw pump
  • Active liquid cooling may be provided for both the screw rotors and the motor.
  • the term "for” includes both an active cooling in the region of the element in question, that is, for example in the field of screw rotors or the engine, as well as a design directly in the element in question.
  • active liquid cooling can be provided in or on the housing for the screw rotors in an axial region, in particular, in which the screw rotors are arranged.
  • a single active liquid cooling system can be provided both for the motor and for the screw rotors, or several active liquid cooling systems can also be provided.
  • the directly driven screw rotor forms a rotor of the motor.
  • no additional storage for a screw rotor is necessary, which further reduces mechanical losses and corresponding heat production.
  • the motor may e.g. be designed as a permanent magnet synchronous machine, in particular with internal magnets or as IPMSM.
  • IPMSM internal magnets
  • a, in particular external, frequency converter for the motor is provided.
  • this also contributes to the reduction of mechanical losses.
  • no transmission gear between the engine and the relevant screw rotor must be provided. Since a transmission gear basically generates heat during operation, a further heat source is thus completely avoided. In addition, so the corresponding mechanical losses are avoided in the transmission gear, whereby the energy efficiency of the pump is further improved.
  • no transmission gear between the motor and the corresponding screw rotor is necessary, however, for example, a synchronization gear can be provided between the screw rotors.
  • the screw rotors in each case have at least two sections adjacent to the screw axis, the screw rotors each having an at least substantially constant or increasing gradient in a first section closer to an inlet and a lower slope in a second section in the first section, and wherein with respect to the screw axis, the first portion is longer than a closed delivery volume in the first section, in particular more than 360 ° or one revolution of the screw profile.
  • a gap length between a compressing portion and an inlet of the pump is increased, whereby the corresponding sealing effect is improved.
  • the pump can thus be made more efficient.
  • this can be a necessary processing quality of a termination surface for the screw rotors reduce in the inlet area. This reduces the manufacturing cost of the pump.
  • a pressure relief valve is provided in the region of an internal compression of the pump, which is connected to an outlet of the pump or forms an outlet.
  • the internal compression is thus limited to atmospheric pressure, which makes the necessary for a further compression drive power unnecessary and accordingly further heat of compression avoids. This leads to a reduction of the temperature.
  • the pump may have a control device which is designed and / or set up to operate the pump at least in a normal operating mode at a rotor speed of about 120 Hz or less, in particular of about 80 Hz or more.
  • a correspondingly low power consumption or correspondingly low mechanical losses are achieved.
  • rotor and housing temperature and outlet gas temperature are kept low.
  • control device is designed and / or configured to temporarily operate the pump at least in a boost operation mode in which the rotor speed is higher than in the normal operation mode.
  • the power can then be selectively increased when necessary, while still maintaining the low power consumption and the low heat production in the normal operation mode.
  • an overall efficient pump is provided which, however, can be used flexibly.
  • This embodiment is particularly advantageous, for example, for use with, in particular frequent, repeated evacuation, since in each case at the beginning of the evacuation performance can be added as needed, the power consumption and heat production remains relatively low on average.
  • a small-sized motor to operate the screw vacuum pump sufficient.
  • a further development is characterized in that at least one of the screw rotors is provided with a non-contact seal, in particular a piston ring.
  • the heat production can be further reduced thereby, in particular in comparison to a pump with radial shaft sealing rings.
  • a lubricant discharge device e.g. a deflector, in particular adjacent to a seal may be provided. This may assist a seal for a screw rotor by removing a particular large part of the lubricant, e.g. Oil, already not reached the seal, but is previously discharged. This can in particular improve a non-contact seal in its sealing effect.
  • a lubricant discharge device e.g. a deflector
  • the screw rotors may, for example, be coupled via a synchronization gear, wherein the synchronization gear has a straight toothing. This has in engagement a small contact surface, in particular in comparison to a helical toothing, on. Correspondingly low is the heat production in the engagement region of a correspondingly designed transmission.
  • the pump is designed in such a way that at least one heat source, such as e.g. an internal compression, a motor or a transmission, in the vicinity of at least one heat sink, e.g. a liquid cooling, is arranged. This ensures a particularly effective heat dissipation.
  • at least one heat source such as e.g. an internal compression, a motor or a transmission
  • at least one heat sink e.g. a liquid cooling
  • the pump is designed such that at least one heat source of at least one heat-sensitive region, for example a heat-sensitive component and / or an oil-lubricated region, is arranged remotely or a shield is arranged between the heat source and the heat-sensitive region.
  • at least one heat source of at least one heat-sensitive region for example a heat-sensitive component and / or an oil-lubricated region
  • the shield may be formed, for example, by a waist of the housing.
  • the sidecut limits a possible heat flow and thus ensures an effective insulation. At the same time, a sidecut can be easily produced and, in particular, no additional insulation is necessary.
  • the sidecut acts to a certain extent like a heat collecting point for the active cooling, so that the heat substantially or hardly the waisting happens, but is supplied to a large extent of the active cooling.
  • the shield may in particular be provided between an outlet and a bearing section for the screw rotors.
  • a lubricant provided in the bearing section can be protected from high heat input from the outlet region, since lubricants are often sensitive to temperature or are more expensive to purchase at higher temperatures.
  • the shield may also be used as insulation, for example as an insulating layer, in particular with a poorly heat-conducting material, for example a foamed material or a gas, e.g. Air, be trained.
  • a bearing section in particular a bearing plate, may be formed as a sandwich component, in particular with an insulation layer.
  • the liquid cooling is designed such that it forms a turbulent flow in the region of a heat source.
  • a particularly good heat transfer is ensured in this area.
  • cooling lines of the active cooling aluminum or another material of high thermal conductivity include, be formed in a cast aluminum body and / or be formed as, in particular in housing grooves, pressed-in cooling lines. Cooling lines are arranged in particular close to a heat source and / or follow their contour in the shortest possible distance.
  • cooling circuits can also be divided for cooling various heat sources and / or be suitably connected.
  • a section of the cooling circuit can be completely provided for a particularly warm or heat-sensitive area, in particular a particularly warm or heat-sensitive component, while, for example, other sections of the cooling circuit for other area or components that are less sensitive or produce less heat in Series can be switched.
  • the outlet itself constitutes a heat source.
  • the heat here can be dissipated particularly effectively locally.
  • a dip cooler may be provided, which in particular comprises aluminum.
  • the immersion cooler can be arranged, for example, in a bath of a lubricant of the vacuum pump, in particular of a Sychnronmaschinesgetriebes, in particular an oil bath.
  • a lubricant of the vacuum pump in particular of a Sychnronticiansgetriebes, in particular an oil bath.
  • the temperature of a sensitive lubricant can be controlled particularly well or can be provided in this temperature-sensitive area for a local cooling, while other areas may need to be cooled less.
  • the screw rotors of the screw vacuum pump may in particular be formed by a cycloidal profile or have such a structure and / or be designed to be double-threaded.
  • a helical pitch of the screw rotors may for example be made constant in sections, i. the pitch changes along a screw axis only in transition areas between the sections, wherein a transition area is in particular smaller than a section, in particular all transition areas are smaller than all sections.
  • an outlet of the pump may be oriented downwardly.
  • an inlet of the pump may be directed upwardly.
  • the screw vacuum pump may have, for example, an internal compression with a compression ratio of less than 5 to 1, in particular less than 4 to 1, in particular less than 3.5 to 1, and / or greater than 2 to 1, in particular greater than 3 to 1.
  • a respective screw profile can simultaneously form or convey more than 7, in particular more than 10, in particular more than 12, in particular 13 closed delivery volumes.
  • a respective screw rotor can in particular be a ratio of the length of its screw profile to its Diameter of at least 2.0, in particular at least 2.5, in particular at least 3.0 and / or at most 5.0, in particular at most 4.0.
  • a vacuum chamber in particular frequently, in particular several times a day, in particular several times an hour, repeatedly evacuated, wherein in particular one of the screw pump upstream Roots pump is provided, wherein in particular the Roots pump has a pumping speed which is at most three times, in particular at most or about twice, as large as a pumping speed of the screw vacuum pump.
  • a vacuum chamber is operated substantially permanently at a final pressure, wherein in particular one of the screw pump upstream Roots pump is provided, in particular, the Roots pump has a pumping speed, which at least five times, in particular at least seven times, is as large as a pumping speed of the screw vacuum pump.
  • the pumps, pumping systems, and methods described herein may be further developed in the sense of any of the features or measures described herein for pumps, pumping systems, and methods.
  • a screw vacuum pump 10 which has a motor 12, a gear box 14, a housing 16, a bearing plate 18 and a cover 20.
  • the screw vacuum pump 10 delivers a process gas from an inlet 22 to a downward, in Fig. 3 visible outlet 24.
  • an active liquid cooling is provided which emerges from a housing of the engine 12.
  • an active liquid cooling which has two cooling lines, which in Fig. 1 are not shown, but their course is indicated by corresponding grooves 32 of the housing 16, in which the cooling lines are pressed.
  • active liquid coolers are provided in the gear box 14 and in the lid 20 and are each formed here as immersion coolers 34, which are described below with reference to FIG Fig. 5 be explained in more detail.
  • the housing 16 of the screw vacuum pump 10 has a sidecut 36.
  • the sidecut 36 is arranged in the region of the outlet 24.
  • Fig. 4 the screw vacuum pump 10 is shown in a sectional view, the sectional plane of the line AA in Fig. 3 equivalent.
  • the screw profiles 38 and 40 in cooperation with the housing 16, form a pump-active area of the screw vacuum pump 10 and repeatedly deliver closed volumes of delivery of the process gas from the inlet 22 to the outlet 24, in FIG Fig. 4 from left to right.
  • the pumping power of the screw vacuum pump 10 depends on the size and shape of different gaps in the pump active region, which are unavoidable due to the relative movement of rotors 28, 30 and housing 16, but are small and as constant as possible for the purpose of good pumping performance. Temperature changes in the components involved lead to their change in shape. The measures described herein for the prevention, removal and general control of heat in the pump 10 thus cause the least possible change in shape and, as a result, controllable gaps as far as possible. The gaps can therefore be designed more precisely, which improves the pumping power and its efficiency.
  • the screw rotor 28 is directly, so without intermediate clutch, driven by the motor 12.
  • the screw rotor 30, in contrast, is driven via a synchronization gear 42 with toothed wheels 43 in a defined angular relationship with the screw rotor 28.
  • the motor 12 comprises a housing 44, which is made of aluminum, for example, and in which cooling lines 26 for the active liquid cooling are formed.
  • the motor 12 further includes a wound stator 46 which, together with a magnet carrier 48 mounted on a shaft end of the screw rotor 28, forms an electric motor and a direct drive for the screw rotor 28.
  • the screw rotor 28 forms a rotor of the motor 12.
  • the magnet carrier 48 comprises a plurality of permanent magnets.
  • the motor 12 thus forms a permanent magnet synchronous machine with internal magnets, which is also referred to as IPMSM.
  • the stator 46 is arranged in a potting body 50 which isolates electrical conductors (not shown) at the stator 46 and leads them in isolation to a circuit board 52.
  • the potting body 50 here, in conjunction with the circuit board 52, forms a vacuum-tight connection of the motor 12 to one in an atmospheric region Pressure provided control electronics.
  • control electronics for example, an external frequency converter for the motor 12 may be provided.
  • at least part of control electronics for the motor 12 may be provided on the circuit board 52.
  • the synchronization gear 42 is arranged in the gear box 14.
  • oil is provided as a lubricant, which is distributed by splash disks 54 via the synchronization gear 42 and adjacent bearings 56.
  • the waist 36 forms a shield or thermal barrier, in particular for heat produced in the area of the screw rotors 28, 30 during the pumping operation. Characterized in that a small material cross-section remains, and in that a heat path is extended by the change in shape, the heat from the screw rotor, which otherwise spreads in the housing 16, prevented from entering into otherworldly areas.
  • the oil in the gear box 14 and the bearings 56 are protected from excessive temperatures.
  • the immersion cooler 34 arranged in the gearbox 14 also contributes to the temperature reduction. This is arranged in an oil bath of the gear box 14, not shown, and thus cools the oil directly.
  • a respective deflector 58 forms a barrier for the oil in the gearbox so that it does not enter a pump-active region or a vacuum region, in particular an outlet region.
  • the deflector 58 includes an unspecified Abschleuderkante for the oil. Opposite the Abschleuderkante a drain groove is formed in the housing 16, which absorbs thrown off oil and this back in the gear box 14 and in a local oil bath passes. The oil, which is conveyed or distributed by the spray disks 54 on the gear 42 and bearing 56, is thus removed by the deflectors 58 again from the rotors 28 and 30 respectively.
  • piston rings are provided on a piston ring carrier 60. These form a non-contact seal and thus avoid frictional heat.
  • the Deflektoren 58 lead back as much oil to the gearbox 14, so that as little as possible oil is present at the piston rings. This achieves an overall reliable sealing effect with particularly low heat production.
  • the screw rotors 28 and 30 have in their respective screw profile 38 and 40, three sections of different pitch.
  • a in pumping direction first section 62 in Fig. 4 left, forms a suction section and has a constant and the largest slope under the three sections.
  • the first portion 62 is longer than a closed delivery volume in the first portion with respect to a screw axis 63 extending along a respective rotor 28, 30, respectively.
  • a second portion 64 has a plurality of subsections, which are not further referenced, with different but each constant pitches in the screw profile 38 and 40, wherein the slopes are lower than in the first section.
  • the second section 64 forms the longest section here.
  • a third section 66 of even lower pitch forms an ejection section. In the third section, again, there is a constant slope. Due to the reduced slope along the pumping direction, an internal compression is effected, which compresses the process gas even before the ejection.
  • the rotors 28, 30 and the screw profiles 38, 40 can be particularly easy to design and manufacture by providing the constant sections. As it is based on Fig. 4 As can be seen, an extended first portion 62 leads to correspondingly extended gaps between the screw profiles 28, 30 and the Housing 16, so that the path or the gap from the inner compression at the transition of the sections 62 and 64 toward a suction chamber or suction 67 is longer. Accordingly, the sealing effect of the gap is correspondingly increased, which leads to improved sealing of the internal compression relative to the intake region 67, especially at high differential pressures.
  • the screw vacuum pump 10 thus has an internal compression.
  • the size of a delivery volume is determined by a cross-section of a screw profile 38, 40 and its pitch.
  • the size of a delivery volume on the inlet side or in the section 62 determines a theoretical pumping speed of the screw pump 10.
  • the pitch of the screw profile 38, 40 is constant on the inlet side over section 62, so that the delivery volume is compressed only after completion by the internal compression. If a respective rotor 28, 30 closes a respective delivery volume too early or too late, or if the internal compression begins too early, the theoretical pumping speed of the pump decreases.
  • the size of a respective delivery volume on the outlet side or in section 66 determines the power consumption of the pump in operation at an achievable final pressure.
  • the ratio of the sizes of the delivery volume on the inlet side and outlet side or in the sections 62 and 66 corresponds to the ratio of the internal compression of the pump.
  • the pitch over several revolutions of the screw profile 38, 40 is constant.
  • the slope corresponds approximately to the minimum of achievable by a particular machining tool pitch and thus, in particular under consideration of costs, production-related.
  • a plurality of revolutions that is, a plurality of completed delivery volumes, are provided in section 66, a return flow due to a pressure difference between the columns is compensated.
  • the overall gradient along the rotors 28, 30 and the size of the gaps formed between the rotors 28, 30 and between rotors 28, 30 and the housing 16 determine the vacuum performance data of the pump, ie in particular the pumping speed and an achievable final pressure.
  • the screw profiles 38, 40 have by their saussen morte configuration on a particularly low imbalance. Thus, for example, there are no compensating elements, such as e.g. Compensation masses that require additional space, and / or compensation holes, in which material can deposit, necessary.
  • the pump can be operated with the two-speed cycloidal screw profiles 38, 40 in a wide speed range, in particular with speed control, and / or for example in a stand-by mode.
  • the compression of the process gas in general generates heat, which is dissipated in the screw pump 10 primarily by a liquid cooling.
  • a liquid cooling In Fig. 4 the grooves 32 provided for this purpose are visible. Cooling lines of the liquid cooling extend here and preferably in the longitudinal direction over a wide range of screw profiles, in particular over at least half the length of the screw profiles.
  • the liquid cooling is arranged in the region or in the vicinity of an internal compression.
  • bearing plate 18 At an inlet end of the housing 16 of the bearing plate 18 is attached. This carries, inter alia, a further storage with bearings 68, which form a loose storage.
  • bearing plate 70 which is integral with the housing 16 is formed but can also be formed separately, the bearing plate 68 is formed as a separate component, but may also be integrally formed.
  • spray disks 54, deflectors 58 and a piston ring carrier 60 with a plurality of piston rings are also provided, which operate in accordance with the outlet-side arrangement.
  • a further, separately executed oil bath is provided in the lid 20.
  • a dip cooler 34 is provided for this oil bath.
  • a cooling line in a wall of the bearing plate 14 and / or the cover 20 may be provided, in particular encapsulated
  • a biasing device in particular a spring, be provided, which is provided in particular at a floating bearing of the rotor and / or inlet side.
  • the biasing device can for example also absorb forces acting on the rotors by means of helical gears and / or generally guarantee a design-appropriate preloading of the bearings, regardless of the operating state, with changing pressures or pressure ratios.
  • a dip cooler 34 is shown as it is arranged in the gear box 14 and in the cover 20 of the screw vacuum pump 10.
  • the immersion coolers 34 are thus formed identically, which leads to a small number of parts and low production costs.
  • the immersion cooler 34 has a cooling line 72 which extends through a heat sink 74.
  • the heat sink has a structuring to increase the surface of the heat sink in order to optimize the heat transfer.
  • the immersion cooler 34 also has a flange 76 with which the immersion cooler 34 is attached.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP17207576.4A 2017-12-15 2017-12-15 Pompe à vide à vis Active EP3499039B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17207576.4A EP3499039B1 (fr) 2017-12-15 2017-12-15 Pompe à vide à vis
JP2018232381A JP7221672B2 (ja) 2017-12-15 2018-12-12 スクリュー式真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17207576.4A EP3499039B1 (fr) 2017-12-15 2017-12-15 Pompe à vide à vis

Publications (2)

Publication Number Publication Date
EP3499039A1 true EP3499039A1 (fr) 2019-06-19
EP3499039B1 EP3499039B1 (fr) 2021-03-31

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4067658B1 (fr) 2021-03-29 2025-02-12 Ebara Corporation Appareil de pompe à vide

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19745615A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoren
DE19745616A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
DE102010061202A1 (de) * 2010-12-14 2012-06-14 Gebr. Becker Gmbh Vakuumpumpe
US20150125312A1 (en) * 2005-02-02 2015-05-07 Edwards Limited Method of operating a pumping system
DE202016005209U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Schraubenvakuumpumpe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09308183A (ja) * 1996-05-16 1997-11-28 Matsushita Electric Ind Co Ltd 液冷式電動機フレーム
JP2004350466A (ja) * 2003-05-26 2004-12-09 Kobe Steel Ltd 液冷式モータ
JP2008038764A (ja) * 2006-08-07 2008-02-21 Shimadzu Corp ターボ分子ポンプおよびそのための電源装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19745615A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoren
DE19745616A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
US20150125312A1 (en) * 2005-02-02 2015-05-07 Edwards Limited Method of operating a pumping system
DE102010061202A1 (de) * 2010-12-14 2012-06-14 Gebr. Becker Gmbh Vakuumpumpe
DE202016005209U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Schraubenvakuumpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4067658B1 (fr) 2021-03-29 2025-02-12 Ebara Corporation Appareil de pompe à vide

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Publication number Publication date
JP2019113064A (ja) 2019-07-11
JP7221672B2 (ja) 2023-02-14
EP3499039B1 (fr) 2021-03-31

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