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EP2889481B1 - Procédé d'étalonnage d'une pompe sous vide à membrane et pompe sous vide à membrane - Google Patents

Procédé d'étalonnage d'une pompe sous vide à membrane et pompe sous vide à membrane Download PDF

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Publication number
EP2889481B1
EP2889481B1 EP14192137.9A EP14192137A EP2889481B1 EP 2889481 B1 EP2889481 B1 EP 2889481B1 EP 14192137 A EP14192137 A EP 14192137A EP 2889481 B1 EP2889481 B1 EP 2889481B1
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EP
European Patent Office
Prior art keywords
membrane
piston
vacuum pump
control device
head
Prior art date
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Application number
EP14192137.9A
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German (de)
English (en)
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EP2889481B2 (fr
EP2889481A2 (fr
EP2889481A3 (fr
Inventor
Armin Conrad
Sebastian Oberbeck
Swen Söhngen
Peter Vorwerk
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Definitions

  • the invention relates to a method for calibrating a membrane vacuum pump and a membrane vacuum pump.
  • Diaphragm vacuum pumps are dry positive displacement pumps. It is known in practice that a connecting rod driven by a crankshaft moves a diaphragm clamped between a head cover and a housing of the membrane vacuum pump, which forms a suction chamber with the space in the head cover. Diaphragm vacuum pumps require inlet and outlet valves to achieve directional gas delivery. As valves, it is known from practice to use pressure-controlled flutter valves made of elastomer materials. There the pumping chamber is hermetically sealed by the diaphragm towards the drive, the required medium is neither contaminated by oil, nor can aggressive media attack the technique. The dead volume between the outlet valve and the suction chamber leads to a limited compression ratio, so that with a pumping stage usually a final pressure of about 70 hectopascals can be achieved.
  • membrane vacuum pumps are particularly well suited as dry backing pumps for turbomolecular pumps with Holweck stage.
  • Two-stage diaphragm vacuum pumps which reach about 5 hectopascal final pressure, can be used as backing pumps for Holweckturbopumpen.
  • the prior art ( DE 1 960 371 ) includes a diaphragm pump that works on a voice coil principle.
  • these pumps operate in such a way that in known piston pumps the piston is replaced by a diaphragm which is periodically deformed.
  • the drive is effected by a piston coupled to a voice coil.
  • the prior art also includes a diaphragm pump.
  • This to the state of the art belonging diaphragm pump tries to allow an exact dosage of a fluid to be delivered.
  • the piston is brought into contact with a bottom surface of the piston working chamber and this defines an exact, bottom dead center, which is not dependent on further tolerances.
  • This belonging to the prior art diaphragm pump has the disadvantage that must be used in this diaphragm pump with a very high manufacturing accuracy. If the diaphragm is worn, the dead center can not be adjusted, so that a dead volume in the pump chamber can gradually develop during operation, which can not be compensated.
  • the prior art includes a piston compressor for chillers.
  • the piston compressor on a one-sided piston for chillers.
  • the compressor belonging to the prior art operates such that the piston is actuated on its pressure stroke by means of a one-way device which is unable to exert any effect on it when the piston is falling, while the decrease (equal to the suction stroke of the piston) is due to the differential pressure of the piston Refrigerant is effected in the evaporator of the refrigerator relative to the atmosphere.
  • the piston is designed as a membrane clamped around it.
  • the membrane is actuated in both directions by pressure, during the compression stroke, the actuator acts on the membrane, while in the decline, the membrane is moved back by the differential pressure of the refrigerant from the evaporator to the atmosphere.
  • This belonging to the prior art diaphragm pump also has the disadvantage that in this diaphragm pump with a very high manufacturing accuracy has to be worked. If the diaphragm is worn, the dead center is not adjustable.
  • the technical problem underlying the invention is to provide a method for calibrating a membrane vacuum pump and a membrane vacuum pump, with which the disadvantages of the prior art can be avoided.
  • the method according to the invention for calibrating a diaphragm vacuum pump for conveying a gas and metering a medium with a pumping chamber which can be filled with the medium in a drive chamber having a diaphragm which separates the pumping chamber and the drive chamber and oscillates between the pumping chamber and the drive chamber is arranged, with a membrane head, which forms the delivery space with the membrane, wherein characterized in that a device for detecting a dead center and / or a position of the piston is provided and that a control device the dead center in dependence on the detected signal of the device adjusted.
  • the inventive method has the advantage that the membrane vacuum pump is designed as a self-calibrating diaphragm vacuum pump.
  • the method according to the invention is carried out by the control device. With the control device and the voice coil drive of the diaphragm vacuum pump, a calibration of the dead center before each start or once after production is possible.
  • the self-calibrating membrane vacuum pump according to the invention thus achieves an optimum final pressure. Furthermore, manufacturing tolerances can be compensated and / or increased by the method according to the invention. The associated cost savings of mechanical calibration and faster and cheaper manufacturing provides an optimal diaphragm vacuum pump.
  • the control device adjusts the dead center on the basis of a signal of at least one knock sensor.
  • the pump is controlled by a control loop itself. If the diaphragm strikes against the at least one knock sensor, the piston with the diaphragm is commanded at the next stroke to gradually reduce the stroke by a certain amount to finally find the optimal dead center ,
  • the control device adjusts the dead point advantageously only during a calibration drive. This self-calibration is carried out before commissioning the pump. During pumping, the dead center is not adjusted.
  • the piston drives the membrane into the membrane head or against a mechanical end point of the membrane with a force reduced compared to the pumping operation.
  • the inventive method saves the time required for a manual calibration and improves the final pressure of the diaphragm vacuum pump.
  • the movement limit of the piston in the positive direction is determined by the piston driving the diaphragm into the membrane head or against a mechanical end point of the diaphragm with a force reduced compared to the pumping operation.
  • control device continuously detects an actual position of the piston and compares this with a desired position. From the actual position and the desired position, the control device determines the end point of the movement of the diaphragm.
  • the benefit of this self-calibration results from the cost savings resulting from the lower manufacturing cost.
  • the components of such a pump can have lower manufacturing tolerances because the calibration compensates for them, resulting in a more efficient and less expensive one Manufacturing leads.
  • the final pressure and the pumping speed of the membrane vacuum pump can be varied by the method according to the invention.
  • the determined end point of the membrane is advantageously stored and the end point is used during the pumping operation as the maximum stroke.
  • a calibration drive is performed before each startup of the membrane vacuum pump or once after production. This makes it possible to optimize the suction capacity and the final pressure of the diaphragm vacuum pump.
  • the dead center of the piston can be advantageously adjusted so that the membrane rests against the diaphragm head. This ensures that no dead space is created in the delivery chamber, which is particularly advantageous and optimizes the pumping speed of the membrane vacuum pump.
  • the dead point is adjusted so that the membrane is pressed into the membrane head. This means that the membrane is moved "into the membrane head", or is pressed with a certain pressure, whereby the dead volume is reduced to a minimum, which in turn has a positive effect on the final pressure and pumping speed of the membrane vacuum pump.
  • the pressure used should not lead to a plastic strain or destruction of the diaphragm material.
  • the dead center is set such that a distance of less than 0.5 millimeters, particularly advantageously less than 0.3 millimeters remains between the membrane and membrane head.
  • this embodiment has a small dead volume in the membrane head. As a result, however, wear of the membrane is avoided.
  • the calibration is performed fully automatically. This gives a considerable time savings, since a manual calibration is very time consuming.
  • a calibration travel preferably comprises at least one stroke of the piston.
  • the piston generally advantageously performs several strokes in order to achieve the best possible calibration.
  • the stroke of the piston is reduced when the control device receives a signal from the knock sensor. If the knock sensor receives a signal, the diaphragm has moved against the knock sensor. In this case, the control device detects that the stroke is too high or that the dead center has been exceeded for an optimal calibration.
  • the stroke of the piston is either reduced by a predefined value or the stroke is gradually reduced, and after each step, a stroke is executed again to check whether the knock sensor is still providing a signal at a reduced stroke.
  • the predefined value is set in advance. For example, when the knock sensor gives a signal, the stroke may be reduced in the tenths of a millimeter range. It is also possible to specify from the outset that the stroke of the piston will be reduced by 0.3 millimeters or 0.5 millimeters.
  • a holding force is adjusted, with which the membrane is pressed against the membrane head, and that this actual position of the piston is detected and stored.
  • This holding force is needed to hold the membrane there for a short time after it has advantageously been pressed slowly into the mechanical end point, with the result that it is possible to detect and store the end point.
  • the maximum stroke of the piston during the calibration exceeds the determined actual position. It is possible to deliberately set the maximum stroke at the beginning of the calibration run higher than intended. In this case, the piston pushes the membrane in the end point and it is determined so the maximum stroke of the controller.
  • the controller determines this movement as faulty. To continue the movement, the piston is prevented from stopping.
  • the control device ends the movement since the end point of the movement has been reached. This means that according to an advantageous embodiment of the invention, before the pumping operation of the membrane vacuum pump is started, the membrane is moved against the membrane head, that the control device detects this movement as faulty and that after at least two faulty movements, the control device detects and reduces the actual position of the dead center of the piston. This measure serves to minimize the wear of the membrane.
  • the reduction of the actual position of the dead center of the piston is preferably carried out by a predefined value.
  • the value can be set beforehand, for example in tenths of a millimeter increments (depending on the resolution of the installed measuring system).
  • the size of the predefined value advantageously determines whether the membrane is arranged at the dead center of the piston at a distance from the membrane head, adjacent to the diaphragm head or pressed against the membrane head.
  • the defined value is set in advance.
  • the dead volume is reduced as much as possible.
  • the membrane is located only at the membrane head or if there is a minimal gap between the membrane and the membrane head, the wear of the membrane is lower.
  • the piston with the diaphragm intentionally moves against the diaphragm head.
  • the control device measures a faulty movement in the form of "moving errors”. After a certain number of erroneous movements over a certain period of time, the control device takes the actual value of the incremental sensor and subtracts a certain distance from the actual value.
  • the defined distance can be specified in millimeters. It is also possible to use another counting unit, for example "counts”, which is proportional to the units of length.
  • the set distance or the set amount of "counts” depends among other things on the manufacturing tolerances.
  • an overshoot of the dead center of the piston occurring during a high-frequency operation is taken into account when setting the dead center of the piston.
  • a lower movement limit of the piston is determined and stored.
  • a lower movement limit that is, when the piston moves away from the membrane head, is advantageously calculated and stored as the upper limit.
  • the aim in the calculation is that the membrane travels as far as possible the same path in the positive as in the negative direction.
  • a reduction in the reduction of the actuator unit, consisting of voice coil drive, piston and diaphragm, contributing differential pressure minimization is achieved by sealing the drive space against the atmospheric pressure. If the differential pressure is lowered by independently pumping out the back space of the diaphragm, a smaller voice coil drive or a lower current intensity can be used.
  • differential pressure minimization is achieved particularly well with a two-headed diaphragm pump in which the forces of both heads cancel each other out.
  • At least one spring can be integrated in the membrane head or in the linear drive.
  • the actuator is supported in the recovery of the membrane.
  • the diaphragm vacuum pump according to the invention for conveying a gas with a pumpable with the gas delivery chamber with a linearly driven with a voice coil piston in a drive space with a membrane that separates the delivery chamber and the drive space and is arranged oscillating between the delivery chamber and the drive chamber, with a membrane head, the with the membrane forming the delivery chamber, wherein the piston is designed as a piston moving the membrane in motion and movable by a predetermined distance, is characterized in that a device for detecting a dead center and / or a position of the piston is provided and that a control device is provided, which is designed as a dead center as a function of the detected signal of the device adjustable control device.
  • the membrane vacuum pump according to the invention has the advantage that it can be carried out with its self-calibration method, as described in claims 1 to 16.
  • the optimum dead center can be detected and adjusted via a self-calibration so that the membrane vacuum pump achieves an optimum final pressure and an optimal compression ratio.
  • At least one knock sensor is provided.
  • the arranged in the diaphragm vacuum pump control device advantageously adjusted due to a signal of the knock sensor the dead center of the piston.
  • the knock sensor emits a signal when the diaphragm is moving against the knock sensor.
  • the pressure point is not set correctly and the maximum stroke of the piston is reduced.
  • the reduction can be made incrementally by predetermined path lengths or "counts”. It is also possible to provide a predefined value by which the maximum stroke is reduced.
  • control device is designed as a dead center of the piston only during a calibration travel adjusting control device.
  • the pressure point of the piston can be adjusted by the control device. If the dead center is optimally set, it is stored and no longer changed during operation of the pump, that is to say in pump mode.
  • the device for detecting a dead center and / or a position of the piston is designed as a Hall sensor.
  • the device for detecting a dead center and / or a position of the piston is designed as an incremental Hall sensor.
  • Hall sensors are very suitable as displacement sensors to detect the position of the piston.
  • the membrane vacuum pump can be designed as a single-headed, double-headed or multi-headed membrane vacuum pump.
  • the drive space is formed sealed against atmospheric pressure.
  • the differential pressure minimization contributing to the reduction of the actuator unit is achieved by sealing the drive space against the atmospheric pressure.
  • the drive space is designed as a pumped drive space. If the differential pressure is lowered by independently pumping out the back space of the diaphragm, a smaller voice coil drive or a lower current intensity can be used.
  • At least one spring is provided in the membrane head and / or in the linear drive for returning the piston and the membrane.
  • the spring achieves optimization and reduction of force.
  • the actuator is supported by the spring when the diaphragm is returned.
  • the membrane vacuum pump has at least one inlet valve and at least one outlet valve, which communicate with the delivery chamber.
  • the valves are advantageously designed as reed valves and / or ball valves and / or disk valves. Other types of valves are also possible.
  • a diaphragm vacuum pump wherein a voice coil drive has at least one coil and at least one magnet associated with the coil, in which the coil is designed as a stator and the magnet as a rotor.
  • the coil of the drive changes from the position of the rotor to the position of the stator.
  • the magnetic stator becomes the new rotor of the drive.
  • the stator conducts temperature with a housing is connected, and that are arranged on the housing cooling fins. This makes it possible to derive the temperature of the system very well. It can also be provided, for example, to provide a flow-blowing of the housing in order to keep the temperature of the system at a constant level.
  • the rotor can advantageously be mounted on at least two plain bearings or at least two ball sleeves.
  • a further embodiment of the membrane vacuum pump for conveying a gas with a filling chamber which can be filled with the gas, with a piston which can be driven linearly with a voice coil drive in a drive space, with a diaphragm which separates the delivery space and the drive space and is arranged oscillating between the delivery space and the drive space a membrane head which forms the delivery chamber with the membrane, the piston being designed as a piston which moves the membrane in motion and is movable by a predetermined distance, the voice coil drive having at least one coil and at least one magnet associated with the coil, characterized that the coil is designed as a stator and the magnet as a rotor.
  • voice coil drives In known from practice voice coil drives, the coil is designed as a rotor and the magnet as a stator. In these voice coil drives very high temperatures occur in the voice coil drive, since the coil can be poorly cooled as a runner.
  • the coil of the drive changes from the position of the rotor to the position of the stator. At the same time the magnetic stator becomes the new rotor of the drive.
  • the particular advantage of the invention is that the heat generated primarily by the coil, can be dissipated significantly better.
  • the coil is connected in accordance with an advantageous embodiment of the invention with a temperature-conducting housing, wherein on the housing advantageously cooling fins are arranged. This makes it possible to derive the temperature of the system very well. It can also be provided, for example, to provide a flow-blowing of the housing in order to keep the temperature of the system at a constant level.
  • the rotor can advantageously be mounted on at least two plain bearings or at least two ball sleeves.
  • a device for detecting a dead center and / or a position of the piston and a control device is provided, which is adjustable as a dead center in response to the detected signal of the device Control device is formed.
  • This membrane vacuum pump according to the invention has the advantage that it can be carried out with its self-calibration method, as described in claims 1 to 6.
  • the optimal dead center can be detected and adjusted via a self-calibration, so that the membrane vacuum pump reaches an optimal end pressure, at the same time effective cooling of the coils is possible.
  • At least one knock sensor is provided and the control device is designed as a control device based on a signal of the knock sensor which adjusts the dead center.
  • the knock sensor emits a signal when the diaphragm is moving against the knock sensor.
  • the pressure point is not set correctly and the maximum stroke of the piston is reduced.
  • the reduction can be made incrementally by predetermined path lengths or "counts”. It is also possible to provide a predefined value by which the maximum stroke is reduced.
  • control device is designed as a dead center of the piston only during a calibration travel adjusting control device.
  • the pressure point of the piston can be adjusted by the control device. If the dead center is optimally set, it is stored and no longer changed during operation of the pump, that is to say in pump mode.
  • the device for detecting a dead center or a position of the piston is designed as a Hall sensor.
  • the device for detecting a dead center or a position of the piston is designed as an incremental Hall sensor.
  • Hall sensors are very suitable as displacement sensors to detect the position of the piston.
  • the membrane vacuum pump can be designed as a single-headed, double-headed or multi-headed membrane vacuum pump.
  • the drive space is formed sealed against atmospheric pressure.
  • the differential pressure minimization contributing to the reduction of the actuator unit is achieved by sealing the drive space against the atmospheric pressure.
  • the drive space is designed as an evacuated drive space. If the differential pressure is lowered by independently pumping out the back space of the diaphragm, a smaller voice coil drive or a lower current intensity can be used.
  • At least one spring is provided in the membrane head and / or in the linear drive for returning the piston and the membrane.
  • the spring achieves optimization and reduction of force.
  • the actuator is supported by the spring when the diaphragm is returned.
  • the membrane vacuum pump has at least one inlet valve and at least one outlet valve.
  • the valves are advantageously in communication with the delivery chamber.
  • the valves are advantageously designed as reed valves and / or ball valves and / or disk valves. Other types of valves are also possible.
  • the method according to the invention can be used with all the features in the membrane vacuum pumps described in the application.
  • the membrane vacuum pumps described can also be combined with their features disclosed in the application.
  • the membrane vacuum pump can advantageously be designed as a two-headed membrane vacuum pump with a voice coil drive.
  • Two-headed diaphragm vacuum pump means that on both sides of the piston a diaphragm is driven by the reciprocating piston.
  • connection of the at least one coil of the voice coil drive or the coil pairs of the voice coil drive directly to the housing allow effective cooling, for example by blowing a Gepatiusiverrippung.
  • Fig. 1 shows a membrane vacuum pump 1 with two non-positively connected to a piston 2 in connection membranes 3, 4.
  • the membranes 3, 4 is associated with a respective membrane head 5, 6, against which the membranes 3, 4 go at maximum deflection of the piston 2.
  • coils 7, that is current-carrying conductors, are operated in a magnetic field of permanent magnets 8 with a constantly changing current direction. Between the coil 7 and the permanent magnet 8, an air gap is present. This should be as low as possible be to increase the efficiency of the actuator consisting of piston 2 and membranes 3, 4.
  • the piston 2 is non-magnetic and is mounted on plain bearings 9. It is also a bearing without plain bearings possible with optimized positive (stabilizing) radial stiffness of the membrane assemblies (perpendicular to the stroke direction) and negative (destabilizing) radial stiffness of the coil assembly (perpendicular to the stroke direction).
  • an incremental Hall sensor 10 In order to permanently determine the position of the piston 2, there is an incremental Hall sensor 10, which in the Fig. 1 is shown only schematically, for detecting the path in the region of the piston 2.
  • the Hall sensor 10 is also used for current reversal, depending on the position of the piston 2, the current direction is reversed early.
  • springs 11 are provided.
  • the springs 11 are arranged on both sides of the piston 2. It may also be provided capacitors (not shown) for energy recovery.
  • the membranes 3, 4 are clamped between a housing 12 and the membrane heads 5, 6, so that a delivery chamber 13, 14 is gas-tightly separated from a drive space 15.
  • the permanent magnets 8 are formed as a rotor.
  • the housing 12 has cooling ribs 16, in particular in the region of the coil 7. These cooling fins, for example, with room air, which has a lower temperature compared to the housing temperature, flows around be, whereby the coil 7 can be kept at a constant temperature.
  • coil 7 advantageously consists of a plurality of coil pairs, which can be energized differently in order to move the permanent magnet rotor can.
  • Fig. 2 the vacuum pump 1 is shown in cutaway form.
  • the same parts are provided with the same reference numbers. To avoid repetition, refer to the description of the figure Fig. 1 directed.
  • Fig. 3 shows a side view of the vacuum pump 1 with the cooling fins 16.
  • Fig. 4 shows a perspective view of the diaphragm pump 1. Also clearly the cooling fins 16 can be seen.
  • the vacuum pump 1, which in Fig. 1 is shown, has the Hall sensor 10, which serves to detect the position of the piston 2.
  • the control device 17 detected in dependence on the position of the piston 2, the dead center of the piston.
  • the control device 17 detects the actual position of the piston 2 continuously and compares this with a target position. From a comparison of the actual position with the desired position, the control device 17 determines the end point of the movement of the diaphragm. This end point is continuously used during the pumping operation of the membrane vacuum pump 1 as the maximum stroke.
  • the dead center of the piston 2 can be adjusted such that the membrane 3 is arranged adjacent to the membrane head 5.
  • the dead center can also be adjusted so that a distance of less than 0.3 mm remains between the membrane and membrane head.
  • the dead center can also be adjusted so that the membrane 3 is pressed against the membrane head 5 with a certain force.
  • the dead center is set such that the membrane 3 rests completely on the membrane head 5, so that the delivery chamber 13 has no dead volume, so that the pump power of the pump is optimized.
  • Fig. 1 illustrated two-head diaphragm pump
  • the calibration described also for the membrane 4 and the diaphragm head 6 is carried out accordingly.
  • the drive space 15 is sealed against atmospheric pressure.
  • the drive chamber 15 is additionally pumped out.
  • the membrane vacuum pump 1 according to Fig. 1 has an inlet valve and an outlet valve for each delivery chamber 13, 14.
  • Fig. 5 shows a modified embodiment of a membrane vacuum pump 20.
  • the membrane vacuum pump 20 has a housing 21 in which the piston 22 is linearly mounted.
  • the linear drive consisting of coils and magnets, is in Fig. 5 not shown, but according to the principle of Fig. 1 ,
  • the vacuum pump has three membrane heads 22, 23, 24.
  • the membrane heads 22, 23, 24 are associated with membranes 25, 26, 27.
  • the movement of the membrane 27 by the piston 22 is effected directly via a rod 28.
  • the movement of the membranes 25, 26 through the piston 22 via a tee 29.
  • the membrane heads 22, 23 may be connected in parallel or in series.
  • Fig. 5 only the membrane heads 22, 23, 24 are shown schematically. Inlets and outlets are not shown.
  • Fig. 6 shows the sake of completeness, the principle of operation of a diaphragm vacuum pump according to the prior art.
  • Fig. 6 shows a membrane vacuum pump 1 with a housing 12 having a membrane 30 which is clamped in the edge of the housing 12 and can be offset by a drive connecting rod 31 of a motor drive in a tumbling downward movement.
  • housing 12 is a limited by the membrane 3 of a housing head 32 suction chamber 13, which is limited relative to the membrane 3 of the housing head 5 of the housing 12.
  • housing head 5 is at least one leading into the pumping chamber 13 suction line 18 with an inlet valve assembly 33 and at least one of the suction chamber 13 leading discharge line 19 with an outlet valve assembly 34th
  • the inlet valve arrangement 33 has an inlet valve opening 35 and an inlet valve opening 36 which closes the inlet valve opening 35 when there is overpressure in the suction chamber 13.
  • the outlet valve arrangement 34 has a closing outlet valve body 37 at negative pressure in the suction chamber 13.
  • a negative pressure is created in the delivery chamber 13, whereby a differential pressure is present at the inlet valve body 36, which presses the valve body 36 in the direction of the delivery chamber 13.
  • gas flows from the suction line 18 into the suction chamber 13.
  • an overpressure is created in the delivery chamber 13, whereby a differential pressure is present at the inlet valve body 36 which presses the valve body 36 in the direction of the valve opening 35.
  • a negative pressure is created in the delivery chamber 13, whereby a differential pressure arises at the outlet valve body 38, which presses the valve body 38 in the direction of delivery chamber 13 and into the valve opening 39.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Claims (16)

  1. Procédé d'étalonnage d'une pompe à vide à membrane (1) pour le transport d'un fluide, avec une chambre de refoulement (13, 14) pouvant être remplie avec le fluide, avec un piston (2) pouvant être entraîné linéairement avec un entraînement à bobine oscillante dans une chambre d'entraînement (15), avec une membrane (3, 4), qui sépare la chambre de refoulement (13, 14) et la chambre d'entraînement (15) et qui est disposée de façon oscillante entre la chambre de refoulement (13, 14) et la chambre d'entraînement (15), avec une tête de membrane (5), qui forme avec la membrane (3, 4) la chambre de refoulement (13, 14), dans lequel le piston (2) est constitué par un piston (2) mettant la membrane (3, 4) en mouvement et déplaçable d'une course prédéterminée, caractérisé en ce qu'il est prévu un dispositif (10) pour détecter un point mort et/ou une position du piston (2), et en ce qu'un dispositif de commande (17) déplace le point mort en fonction du signal détecté du dispositif (10).
  2. Procédé selon la revendication 1, caractérisé en ce que le dispositif de commande (17) déplace le point mort sur la base d'un signal d'au moins un détecteur de cliquetis, et/ou en ce que le dispositif de commande (17) déplace le point mort du piston (2) uniquement pendant une opération d'étalonnage.
  3. Procédé selon l'une quelconque des revendications précédentes, caractérisé en ce que le dispositif de commande (17) détecte en continu une position réelle du piston (2) et la compare avec une position de consigne, et en ce que le dispositif de commande (17) détermine à partir de la position réelle et de la position de consigne le point final du déplacement de la membrane (3, 4), en particulier en ce que l'on mémorise le point final déterminé de la membrane (3, 4) et en ce que l'on utilise le point final pendant le fonctionnement de la pompe comme course maximale.
  4. Procédé selon l'une quelconque des revendications précédentes, caractérisé en ce que l'on règle le point mort de telle manière qu'il reste entre la membrane (3, 4) et la tête de membrane (5, 6) une distance de moins de 0,5 millimètre, en particulier en ce que l'on règle le point mort de telle manière que la membrane (3, 4) s'applique sur la tête de membrane (5, 6), en particulier en ce que l'on règle le point mort de telle manière que la membrane (3, 4) soit pressée dans la tête de membrane (5, 6).
  5. Procédé selon l'une quelconque des revendications précédentes, caractérisé en ce que l'on effectue l'étalonnage de manière entièrement automatique, et en ce qu'une opération d'étalonnage comprend une course du piston (2), en particulier en ce que lors de l'utilisation d'un détecteur de cliquetis on réduit la course du piston (2), lorsque le dispositif de commande (17) reçoit un signal du détecteur de cliquetis.
  6. Procédé selon l'une quelconque des revendications précédentes, caractérisé en ce qu'avant l'enregistrement du fonctionnement de pompe de la pompe sous vide à membrane (1), on amène la membrane (3, 4) contre la tête de membrane (5, 6), et en ce que le dispositif de commande (17) détecte ce déplacement comme défectueux, et en ce qu'après au moins deux déplacements défectueux le dispositif de commande (17) détecte et diminue la position réelle du point mort du piston (2), et en ce que la diminution de la position réelle du point mort du piston (2) est effectuée avec une valeur prédéfinie, en particulier en ce que la grandeur de la valeur prédéfinie détermine si la membrane (3, 4) au point mort du piston (2) est disposée à une distance de la tête de membrane (5, 6), est appliquée sur la tête de membrane (5, 6) ou est pressée contre la tête de membrane (5, 6).
  7. Pompe sous vide à membrane (1) pour le transport et le dosage d'un gaz, avec une chambre de refoulement (13, 14) pouvant être remplie avec le gaz, avec un piston (2) pouvant être entraîné linéairement avec un entraînement à bobine oscillante dans une chambre d'entraînement (15), avec une membrane (3, 4), qui sépare la chambre de refoulement (13, 14) et la chambre d'entraînement (15) et qui est disposée de façon oscillante entre la chambre de refoulement (13, 14) et la chambre d'entraînement (15), avec une tête de membrane (5), qui forme avec la membrane (3, 4) la chambre de refoulement (13, 14), dans laquelle le piston (2) est constitué par un piston (2) mettant la membrane (3, 4) en mouvement et déplaçable d'une course prédéterminée, caractérisée en ce qu'il est prévu un dispositif (10) pour déterminer un point mort et/ou une position du piston (2), et en ce qu'il est prévu un dispositif de commande (17) qui est configuré comme un dispositif de commande (17) pouvant déplacer le point mort en fonction du signal détecté du dispositif (10).
  8. Pompe sous vide à membrane selon la revendication 7, dans laquelle un entraînement à bobine oscillante présente au moins une bobine et au moins un aimant associé à la bobine, caractérisée en ce que la bobine (7) est configurée comme stator et l'aimant (8) est configuré comme induit.
  9. Pompe sous vide à membrane selon la revendication 7 pour le transport d'un gaz avec une chambre de refoulement pouvant être remplie avec le gaz, avec un piston pouvant être entraîné linéairement avec un entraînement à bobine oscillante dans une chambre d'entraînement, avec une membrane, qui sépare la chambre de refoulement et la chambre d'entraînement et qui est disposée de façon oscillante entre la chambre de refoulement et la chambre d'entraînement, avec une tête de membrane, qui forme avec la membrane la chambre de refoulement, dans lequel le piston est constitué par un piston mettant la membrane en mouvement et déplaçable d'une course prédéterminée, dans laquelle l'entraînement à bobine oscillante présente au moins une bobine et au moins un aimant associé à la bobine, caractérisée en ce que la bobine (7) est configurée comme stator et l'aimant (8) est configuré comme induit.
  10. Pompe sous vide à membrane selon la revendication 7, 8 ou 9, caractérisée en ce que le stator est relié en conduction de température à un boîtier (12) et en ce que des nervures de refroidissement (16) sont disposées sur le boîtier (12).
  11. Pompe sous vide à membrane selon l'une quelconque des revendications 7 à 10, caractérisée en ce qu'il est prévu un dispositif (10) pour la détection d'un point mort et/ou d'une position du piston (2), et en ce qu'il est prévu un dispositif de commande (17), qui est configuré comme un dispositif de commande (17) pouvant déplacer le point mort en fonction du signal détecté du dispositif (10).
  12. Pompe sous vide à membrane selon l'une quelconque des revendications 7 à 11, caractérisée en ce qu'il est prévu au moins un détecteur de cliquetis, et en ce que le dispositif de commande (17) est configuré comme un dispositif de commande (17) déplaçant le point mort sur la base d'un signal du détecteur de cliquetis, et/ou en ce que le dispositif de commande (17) est configuré comme un dispositif de commande (17) déplaçant le point mort du piston (2) uniquement pendant une opération d'étalonnage, et/ou en ce que le dispositif (10) de détection d'un point mort et/ou d'une position du piston (2) est configuré comme un détecteur de Hall, et/ou en ce que le dispositif (10) de détection d'un point mort et/ou d'une position du piston (2) est configuré comme un détecteur de Hall incrémentiel.
  13. Pompe sous vide à membrane selon l'une quelconque des revendications 7 à 12, caractérisée en ce que la pompe sous vide à membrane (1, 21) est réalisée sous la forme d'une pompe sous vide à membrane (1, 21) à une tête, à deux têtes ou à plusieurs têtes, en particulier en ce que la chambre d'entraînement (15) est étanche par rapport à la pression atmosphérique.
  14. Pompe sous vide à membrane selon l'une quelconque des revendications 7 à 13, caractérisée en ce que la chambre d'entraînement (15) est réalisée sous la forme d'une chambre d'entraînement mise sous vide (15).
  15. Pompe sous vide à membrane selon l'une quelconque des revendications 7 à 14, caractérisée en ce qu'il est prévu au moins un ressort (11) dans la tête de membrane (5, 6) ou dans l'entraînement linéaire pour le rappel du piston (2) et de la membrane (3, 4).
  16. Pompe sous vide à membrane selon l'une quelconque des revendications 7 à 15, caractérisée en ce que la pompe sous vide à membrane (1, 21) présente au moins une soupape d'admission (18) et au moins une soupape d'échappement (19), et en ce que les soupapes (18, 19) sont réalisées sous la forme de soupapes à languette et/ou de soupapes à bille et/ou de soupapes à disque.
EP14192137.9A 2013-12-03 2014-11-06 Procédé d'étalonnage d'une pompe sous vide à membrane et pompe sous vide à membrane Active EP2889481B2 (fr)

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DE102013113351.7A DE102013113351A1 (de) 2013-12-03 2013-12-03 Verfahren zur Kalibrierung einer Membranvakuumpumpe sowie Membranvakuumpumpe

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US20170298919A1 (en) * 2016-04-18 2017-10-19 Ingersoll-Rand Company Direct drive linear motor for conventionally arranged double diaphragm pump
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
CN110230585A (zh) * 2019-06-18 2019-09-13 苏州思维医疗科技有限公司 压力真空控制泵
DE102019117729A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe
CN113606121B (zh) * 2021-08-31 2023-09-15 广东佛燃天高流体机械设备有限公司 一种隔膜式压缩机
CN119804129B (zh) * 2025-03-11 2025-07-08 陕西奥德华机械制造有限公司 一种计量泵检测校验装置

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US20050047923A1 (en) 2003-08-26 2005-03-03 Wenjun Li Compact linear air pump and valve package
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US20050047923A1 (en) 2003-08-26 2005-03-03 Wenjun Li Compact linear air pump and valve package
EP1757809A1 (fr) 2005-08-22 2007-02-28 ProMinent Dosiertechnik GmbH Pompe doseuse électromagnétique avec réglage du mouvement et de la vitesse
WO2007058579A1 (fr) 2005-11-15 2007-05-24 Johan Stenberg Système de commande pour pompes électromagnétiques
WO2008031418A2 (fr) 2006-09-16 2008-03-20 Thomas Magnete Gmbh Pompe à membrane

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DE102013113351A1 (de) 2015-06-03
DE102013113351A8 (de) 2024-05-08
EP2889481B2 (fr) 2022-10-26
EP2889481A2 (fr) 2015-07-01
JP2015117696A (ja) 2015-06-25
EP2889481A3 (fr) 2015-10-14
JP6154797B2 (ja) 2017-06-28

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