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EP2431568A2 - Des moyens de fixation pour une pompe à vide - Google Patents

Des moyens de fixation pour une pompe à vide Download PDF

Info

Publication number
EP2431568A2
EP2431568A2 EP11007001A EP11007001A EP2431568A2 EP 2431568 A2 EP2431568 A2 EP 2431568A2 EP 11007001 A EP11007001 A EP 11007001A EP 11007001 A EP11007001 A EP 11007001A EP 2431568 A2 EP2431568 A2 EP 2431568A2
Authority
EP
European Patent Office
Prior art keywords
plane
outlet
shaft
vacuum pump
lubricant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11007001A
Other languages
German (de)
English (en)
Other versions
EP2431568A3 (fr
EP2431568B1 (fr
Inventor
Gerd Baitinger
Johannes Kümmel
Peter Huber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2431568A2 publication Critical patent/EP2431568A2/fr
Publication of EP2431568A3 publication Critical patent/EP2431568A3/fr
Application granted granted Critical
Publication of EP2431568B1 publication Critical patent/EP2431568B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/028—Means for improving or restricting lubricant flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • the vacuum pump according to the invention is based on the observation that part of the lubricant leakage is caused by lubricant foam.
  • This lubricant foam is generated when the pressure in the room drops and gas escaping from the decreased solubility for gases in liquids in the lubricant. This foam then rises into the area of the shaft and from there into the pump chamber.
  • the arrangement of the drain such that the distance to the edge of the centrifugal disc, which is substantially close to the lubricant level is large, prevents foam passes through this flow to the shaft.
  • the lubricant leakage is significantly reduced, especially when using the vacuum pump in systems in which the operating pressure in the pump chamber often changes between atmosphere and vacuum, for example so-called load-lock applications.
  • the distance is chosen so that the spout is either above the rising foam or sufficiently deep in the lubricant fill. The latter prevents lubricant from being sucked through the spout into the area of the shaft.
  • the distance is at least half, advantageously two-thirds, the distance between the shaft axis and intersection plane or the distance between the intersection plane and a lowermost point of a space bounding the housing.
  • the Fig. 1 a section through a vacuum pump 1, the housing having a plurality of sections, in particular a gear compartment section 10, a pump chamber section 12 and a distribution space section 14.
  • the housings of the individual sections can be designed separately. Alternatively, a plurality of sections may be arranged together in a housing part.
  • a suction opening 2 provided in the suction chamber section allows the vacuum pump to suck fluid into its suction space.
  • the fluid is ejected through an ejection opening 4, which is likewise provided in the pumping chamber section.
  • the feet 6 are provided as mounting means.
  • the part of the housing forming the suction or discharge opening for example by suitable design of the respective flange, may be designed in such a way that the vacuum pump is mounted thereon.
  • a shaft 30 is arranged, which is rotatably supported by a roller bearing 32 and a drive-side roller bearing 34.
  • a piston 36 is mounted or made integral with her. This causes the pumping effect when the shaft rotates.
  • the rotation of the shaft is effected by a drive 38, for example an asynchronous motor, which may be connected via a magnetic coupling 40 with the shaft.
  • a synchronizing gear 50 is provided in a space provided in the gear compartment section, which interacts with a second synchronizing gear, not visible in this illustration, on a likewise not visible second shaft such that both shafts have the same frequency but opposite directions of rotation move to each other.
  • Synchronous gear and bearings 32 must be supplied with lubricant.
  • a lubricant filling quantity 72 is present in the space 20, into which a centrifugal structure 60 mounted on the shaft is immersed at least during one phase of the rotary movement.
  • lubricant is distributed throughout the space 20 and in particular the synchronizing gears and the roller bearing 32 is supplied. From this it passes through a return 54, which opens into a space 20 to the open outlet 58, the lubricant filling 72 back.
  • a second space 22 is provided, in which a second centrifugal structure 70 dips into a drive-side lubricant filling 74.
  • lubricant is distributed in the second space and fed to the rolling bearing 34. From this it passes through a return 64, which opens into an outlet 68, back to the lubricant filling 74.
  • FIG. 2 In a schematic representation shows Fig. 2 the geometric relationships in space 20 in the direction along the shaft axis.
  • the mounting means 6 define a mounting plane 102 and a perpendicular thereto 100, wherein the vertical corresponds to the direction of gravity.
  • the shaft axis 112 of the shaft 30 is perpendicular to the plane of the drawing and lies in a wave plane 118 whose surface normal coincides with the vertical 100.
  • the synchronizing gears 50 and 52 are engaged with each other so that the rotational movement of the shaft 30 is transmitted to the second shaft 28.
  • the spin structure 60 is arranged on the shaft 30, the spin structure 60 is arranged. In the example shown, it is designed as a rectangular plate whose corners describe a circular path. With respect to the direction of gravity, this circular path has a lowest point 104, by which an intersection plane 106 is defined, on which the direction of gravity is perpendicular.
  • the spin-on structure can be designed as a solid disk, disk segment or the like.
  • the deepest point is below the lubricant surface 76, so that the spinneret dips into the lubricant filling and takes on re-emergence lubricant from this and distributed in space.
  • the space 20 When evacuating the vacuum pump, the space 20 is also evacuated. As a result, the pressure is reached at which gas dissolved in the lubricant escapes from this. As a result, the lubricant foams up, the foam rises with an increasing volume in the direction of the vertical.
  • a plane parallel to the intersection plane outlet level 108 is fixed.
  • the distance 110 between the intersection plane and the outlet plane is chosen to be large, with the outlet plane between the wave plane and the intersection plane lies. Large means that the spout is arranged as far as possible in the foam, preferably outside of the foam. This is limited by the fact that the outlet and the associated return must ensure the return of the lubricant from the area of the shaft. This design ensures that the amount of lubricant reaching the pump chamber along the shaft is considerably reduced.
  • the distance is at least half, better two-thirds, the distance between the intersection plane and the shaft axis of the shaft that carries the spin structure.
  • the angle 122 between a line 120 extending through the outlet and the shaft axis and the outlet plane is at least 10 °.
  • a further development relates to the volumes that result from the intersection plane and the exit plane.
  • a first volume 114 is bounded by the outlet plane, housing 10 and intersection plane 106.
  • a second volume 116 is located, with respect to the vertical, on the side of the intersection plane facing away from the first volume and is bounded by the intersection plane and housing.
  • the first volume 114 is at least twice the second volume 116.
  • the lubricant can foam without ascending into the outlet , so that the lubricant leakage is reduced again. This effect can be improved if the first volume is three times or four times the second volume.
  • the mounting means may comprise additional feet 6 'or the like, which allow a second mounting position, so that an alternative mounting plane 102' results. This results in a plurality of orientations of the vertical.
  • the position of the outlet is chosen so that the distance between the intersection plane and outlet plane for at least two orientations is large in the above sense. This is achieved in the example shown, in which the angle 122 is about 45 °.
  • Fig. 3 to Fig. 6 deal with embodiments in which the outlet is below the intersection level and thus in operation below the lubricant surface. These solutions are based on the gear chamber of the vacuum pump Fig. 1 explained.
  • FIG. 3 a shaft 230 having a shaft axis 212 and a synchronizing gear 250 mounted thereon, and a spin structure 260.
  • This dive at least part of its rotational movement under the lubricant surface 216 and thus lubricant with it, which is subsequently detached by centrifugal force and thereby distributed in the space 220.
  • it reaches the synchronizing gear and a rolling bearing 232 which rotatably supports the shaft.
  • a piston ring 276 forms a bottleneck between the shaft and housing and acts as a throttle. In the flow path behind the piston ring a centrifugal edge 274 is provided on the shaft, are centrifuged on the lubricant by centrifugal forces from the shaft.
  • the shaft is surrounded by a catching chamber 270, in which the centrifuged lubricant is collected and supplied to the return 254.
  • the catching chamber has a substantially conical boundary wall 272 at least over part of its circumference. The diameter of the cone increases with increasing distance to the rolling bearing. Centrifugal edge and conical boundary wall are arranged to each other so that centrifuged lubricant hits the boundary wall. This design causes the impinging lubricant to move in a preferred direction along the boundary wall and not be reflected back directly toward the shaft. The lubricant is brought together in the direction of the return. In the flow direction of the catching chamber follows another acting as a throttle piston ring 278th
  • the return 254 comprises a catching chamber outlet 260, which receives the lubricant from the catching chamber. Through this Fangcroauslauf the lubricant enters the next part of the return, the drain chamber 262. With respect to the vertical 200 deepest point of this drain chamber, a drain passage 266 is connected through which lubricant expires from the drain chamber and passes back into the lubricant filling, where leaves the return through the outlet 258. Through this outlet an outlet plane 208 is set, the surface normal is formed by the vertical. The spin structure defines the point of intersection 206 through the lowest point of its orbit, the surface normal of which is also formed by the vertical. The distance 210 between these two planes is chosen to be large.
  • the distance of the planes is at least half, advantageously two-thirds, the distance between the intersection plane and a lowermost point of the inner wall of the space-limiting housing 222.
  • the discharge chamber is arranged above the point of intersection, in particular such that it is located above the lubricant surface 216 during operation of the vacuum pump. This has the effect that the foam resulting from the lubricant present in the drainage channel 266 can not rise up into the catching chamber but expands in the drainage chamber.
  • the volume of the return between the shaft and the intersection plane is twice the volume between the outlet and the intersection plane. This can be further improved if three or four times is achieved.
  • the volume of the drain chamber 262 is at least twice the volume of the drain passage 266.
  • the drain chamber may be configured as a recess in the housing which is closed by a chamber lid 264.
  • the drainage channel can be designed inexpensively as a pipe.
  • a further education shows Fig. 4 in a schematic representation.
  • the shaft 230 is surrounded by a catching chamber 270 ', to which in relation to the vertical 200 lower part of a drain chamber 262' is formed. Their cross section decreases in the direction of the intersection plane 206 and reaches above this the smallest Value.
  • the drain chamber is at this point in the flow channel 266 'over, which ends in the outlet 258'. This determines the outlet plane 208, wherein the intersection plane and outlet plane in the aforementioned sense have a large distance 210.
  • a shield 280 is disposed on the lower end of the drain channel relative to the vertical. This shield closes the outlet 258 'such that the drainage channel is closed opaque in the direction of the vertical. As a result, ascending foam can not reach the drainage channel directly in this direction.
  • the outlet is arranged such that it opens in the direction of rotation 218 of the centrifugal structure. This prevents lubricant from flowing through the flow generated by the centrifugal structure into the outlet.
  • FIGS. 5 and 6 provide training that take into account the existence of two returns.
  • the arrangement after Fig. 5 has a first shaft 330 and a second shaft 328.
  • a return 354 allows the return of lubricant from the first shaft to the lubricant fill, a second return 356 from the second shaft.
  • the returns lead to one another at the junction 364, so that the lubricant quantities conducted in both are continued through the common drainage channel 366. This ends in the outlet 358.
  • the volumes of the drainage channel and the return lines are advantageously dimensioned to one another in such a way that lubricant, which is located between the intersection plane 206 and the outlet 358, can foam up in the direction of the vertical 200 without reaching the corrugations.
  • the arrangement after Fig. 6 has a first shaft 330 and a second shaft 328.
  • a return 354 and a second return 356 are provided to return lubricant from the shaft.
  • a drain chamber 362 and a second drain chamber 380 are provided in the recirculation.
  • a connection 382 connects each of the points of intersection of the closest points of the drainage chambers together.
  • the connection has an outlet 358 on the side of the intersection point facing away from the waves. This is in an advantageous development on which, based on the vertical 200, farthest from the point of intersection point is arranged.
  • the outlet is arranged in the aforementioned sense near the bottom of the gear chamber 322.
  • FIGS. Can be combined with one another.
  • the invention has been described on a single-stage vacuum pump, but it is generally applicable to twin-shaft vacuum pumps, even to multi-stage vacuum pumps.
  • Their pistons may have a two- or multi-leaf Wälzkolbenprofil or designed as a claw or screw structure.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP11007001.8A 2010-09-17 2011-08-27 Pompe à vide avec structure de centrifugation du lubrifiant Active EP2431568B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010045880A DE102010045880A1 (de) 2010-09-17 2010-09-17 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2431568A2 true EP2431568A2 (fr) 2012-03-21
EP2431568A3 EP2431568A3 (fr) 2016-04-06
EP2431568B1 EP2431568B1 (fr) 2019-11-13

Family

ID=44674067

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11007001.8A Active EP2431568B1 (fr) 2010-09-17 2011-08-27 Pompe à vide avec structure de centrifugation du lubrifiant

Country Status (2)

Country Link
EP (1) EP2431568B1 (fr)
DE (1) DE102010045880A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2963240A3 (fr) * 2014-07-04 2016-07-06 Pfeiffer Vacuum Gmbh Pompe à vide
EP3401501A1 (fr) * 2017-05-10 2018-11-14 Edwards Limited Lubrification d'engrenages dans des pompes à deux arbres
WO2025008122A1 (fr) * 2023-07-03 2025-01-09 Edwards s.r.o. Pompe à vide avec mécanisme d'entraînement lubrifié

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014101113A1 (de) 2014-01-30 2015-07-30 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014107709A1 (de) 2014-06-02 2015-12-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202014010177U1 (de) * 2014-12-23 2016-03-29 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE825359C (de) * 1950-05-28 1952-03-06 Getrag Getriebe Zahnrad Schmiereinrichtung fuer Getriebe von Kraftfahrzeugen
DE1939717B2 (de) * 1969-08-05 1978-03-23 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Waelzkolbenpumpe
DE3540842C2 (de) * 1985-11-18 1996-07-18 Leybold Ag Schmiervorrichtung für eine Drehkolbenvakuumpumpe
DE3774711D1 (de) * 1987-10-31 1992-01-02 Leybold Ag Zweiwellenvakuumpumpe mit mindestens einer verbindungsleitung zwischen den lagerkammern.
JP4403670B2 (ja) * 2001-05-16 2010-01-27 株式会社デンソー コンプレッサ
DE10134054A1 (de) * 2001-07-13 2003-01-23 Zahnradfabrik Friedrichshafen Fahrzeuggetriebe
GB0709529D0 (en) * 2007-05-18 2007-06-27 Boc Group Plc Vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2963240A3 (fr) * 2014-07-04 2016-07-06 Pfeiffer Vacuum Gmbh Pompe à vide
EP3401501A1 (fr) * 2017-05-10 2018-11-14 Edwards Limited Lubrification d'engrenages dans des pompes à deux arbres
WO2025008122A1 (fr) * 2023-07-03 2025-01-09 Edwards s.r.o. Pompe à vide avec mécanisme d'entraînement lubrifié

Also Published As

Publication number Publication date
EP2431568A3 (fr) 2016-04-06
EP2431568B1 (fr) 2019-11-13
DE102010045880A1 (de) 2012-03-22

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