EP2425468A4 - MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS DETECTION - Google Patents

MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS DETECTION

Info

Publication number: EP2425468A4
Authority: EP; European Patent Office
Prior art keywords: cmos structure; mass detection; fbar; monolithic; monolithic fbar
Prior art date: 2009-04-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP10770334.0A

Other languages

German (de)

French (fr)

Other versions

EP2425468A1 (en

Inventor

Matthew Johnston

Kenneth Shepard

Ioannis Kymissis

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Columbia University in the City of New York

Original Assignee

Columbia University in the City of New York

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-04-29

Filing date

2010-04-29

Publication date

2014-05-21

2010-04-29 Application filed by Columbia University in the City of New York filed Critical Columbia University in the City of New York

2012-03-07 Publication of EP2425468A1 publication Critical patent/EP2425468A1/en

2014-05-21 Publication of EP2425468A4 publication Critical patent/EP2425468A4/en

Status Withdrawn legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
- H03H9/0557—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the other elements being buried in the substrate
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors

Landscapes

Physics & Mathematics (AREA)
Biochemistry (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Acoustics & Sound (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Oscillators With Electromechanical Resonators (AREA)
Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

EP10770334.0A 2009-04-29 2010-04-29 MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS DETECTION Withdrawn EP2425468A4 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US17386609P	2009-04-29	2009-04-29
US21561109P	2009-05-07	2009-05-07
PCT/US2010/032976 WO2010127122A1 (en)	2009-04-29	2010-04-29	Monolithic fbar-cmos structure such as for mass sensing

Publications (2)

Publication Number	Publication Date
EP2425468A1 EP2425468A1 (en)	2012-03-07
EP2425468A4 true EP2425468A4 (en)	2014-05-21

Family

ID=43032556

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP10770334.0A Withdrawn EP2425468A4 (en)	2009-04-29	2010-04-29	MONOLITHIC FBAR-CMOS STRUCTURE SUCH AS FOR MASS DETECTION

Country Status (4)

Country	Link
EP (1)	EP2425468A4 (en)
CN (1)	CN102414855B (en)
CA (1)	CA2760508A1 (en)
WO (1)	WO2010127122A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US9255912B2 (en)	2009-04-29	2016-02-09	The Trustees Of Columbia University In The City Of New York	Monolithic FBAR-CMOS structure such as for mass sensing
WO2014062936A1 (en)	2012-10-17	2014-04-24	The Trustees Of Columbia University In The City Of New York	Cmos-integrated jfet for dense low-noise bioelectronic platforms
US10122345B2 (en)	2013-06-26	2018-11-06	The Trustees Of Columbia University In The City Of New York	Co-integrated bulk acoustic wave resonators
CN105866815B (en) *	2016-05-06	2018-12-28	中国工程物理研究院电子工程研究所	A kind of FBAR gamma irradiation sensor of flexible structure
WO2018031055A1 (en) *	2016-08-11	2018-02-15	Qorvo Us, Inc.	Acoustic resonator device with controlled placement of functionalization material
GB2554400A (en)	2016-09-26	2018-04-04	Univ Warwick	Bulk acoustic wave resonator based sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20030199105A1 (en) *	2002-04-22	2003-10-23	Kub Francis J.	Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting
US20060125489A1 (en) *	2002-07-19	2006-06-15	Hans-Dieter Feucht	Device and method for detecting a substance
US20060202779A1 (en) *	2005-03-14	2006-09-14	Fazzio R S	Monolithic vertical integration of an acoustic resonator and electronic circuitry

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Publication number	Priority date	Publication date	Assignee	Title
CA2271179A1 (en) *	1999-05-05	2000-11-05	Sensorchem International Corporation	Process for monitoring and detecting small molecule - biomolecule interactions
KR100865652B1 (en) *	2001-05-11	2008-10-29	우베 고산 가부시키가이샤	Piezoelectric Thin Film Resonators
JP3939939B2 (en) *	2001-07-17	2007-07-04	富士通株式会社	Method for manufacturing piezoelectric thin film resonant element
JP3949990B2 (en) *	2002-03-29	2007-07-25	株式会社東芝	Voltage controlled oscillator
CN100567972C (en) *	2003-10-08	2009-12-09	皇家飞利浦电子股份有限公司	Bulk Acoustic Wave Sensor
EP1528677B1 (en) *	2003-10-30	2006-05-10	Agilent Technologies, Inc.	Film acoustically-coupled transformer with two reverse c-axis piezoelectric elements
US7323805B2 (en) *	2004-01-28	2008-01-29	Kabushiki Kaisha Toshiba	Piezoelectric thin film device and method for manufacturing the same
US7138889B2 (en) *	2005-03-22	2006-11-21	Triquint Semiconductor, Inc.	Single-port multi-resonator acoustic resonator device
EP1959568A1 (en) *	2007-02-19	2008-08-20	Consejo Superior de Investigaciones Cientificas	Thin-film bulk acoustic ware resonator and method for performing heterogeneous integration of the same with complementary-metal-oxide-semiconductor integrated circuit
CN101246162A (en) *	2008-03-12	2008-08-20	浙江大学	Antibody Detection Biochip Using Piezoelectric Thin Film Bulk Acoustic Wave Device

2010
- 2010-04-29 EP EP10770334.0A patent/EP2425468A4/en not_active Withdrawn
- 2010-04-29 CA CA2760508A patent/CA2760508A1/en not_active Abandoned
- 2010-04-29 CN CN201080018971.9A patent/CN102414855B/en not_active Expired - Fee Related
- 2010-04-29 WO PCT/US2010/032976 patent/WO2010127122A1/en not_active Ceased

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20030199105A1 (en) *	2002-04-22	2003-10-23	Kub Francis J.	Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting
US20060125489A1 (en) *	2002-07-19	2006-06-15	Hans-Dieter Feucht	Device and method for detecting a substance
US20060202779A1 (en) *	2005-03-14	2006-09-14	Fazzio R S	Monolithic vertical integration of an acoustic resonator and electronic circuitry

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BREDERLOW R ET AL: "Biochemical sensors based on bulk acoustic wave resonators", INTERNATIONAL ELECTRON DEVICES MEETING 2003. IEDM. TECHNICAL DIGEST. WASHINGTON, DC, DEC 8 - 10, 2003; [INTERNATIONAL ELECTRON DEVICES MEETING], NEW YORK, NY : IEEE, US, 8 December 2003 (2003-12-08), pages 992 - 994, XP010684243, ISBN: 978-0-7803-7872-8 *
See also references of WO2010127122A1 *

Also Published As

Publication number	Publication date
CN102414855B (en)	2015-02-11
CA2760508A1 (en)	2010-11-04
WO2010127122A1 (en)	2010-11-04
EP2425468A1 (en)	2012-03-07
CN102414855A (en)	2012-04-11

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Legal Events

Date	Code	Title	Description
2012-02-03	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2012-03-07	17P	Request for examination filed	Effective date: 20111102
2012-03-07	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
2012-08-15	DAX	Request for extension of the european patent (deleted)
2014-05-21	A4	Supplementary search report drawn up and despatched	Effective date: 20140424
2014-05-21	RIC1	Information provided on ipc code assigned before grant	Ipc: H01L 47/00 20060101AFI20140416BHEP
2015-05-22	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2015-06-24	18D	Application deemed to be withdrawn	Effective date: 20141125