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EP2401646A1 - Device for homogenizing laser radiation - Google Patents

Device for homogenizing laser radiation

Info

Publication number
EP2401646A1
EP2401646A1 EP10706935A EP10706935A EP2401646A1 EP 2401646 A1 EP2401646 A1 EP 2401646A1 EP 10706935 A EP10706935 A EP 10706935A EP 10706935 A EP10706935 A EP 10706935A EP 2401646 A1 EP2401646 A1 EP 2401646A1
Authority
EP
European Patent Office
Prior art keywords
laser radiation
array
refractive surfaces
partial beams
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10706935A
Other languages
German (de)
French (fr)
Inventor
Daniel Bartoschewski
Manfred Jarczynski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Focuslight Germany GmbH
Original Assignee
Limo Patentverwaltung GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Limo Patentverwaltung GmbH and Co KG filed Critical Limo Patentverwaltung GmbH and Co KG
Publication of EP2401646A1 publication Critical patent/EP2401646A1/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0972—Prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar

Definitions

  • the present invention relates to a device for the homogenization of laser radiation, which has at least in a first, perpendicular to the propagation direction of the laser radiation direction spaced partial beams, in particular for the homogenization of laser radiation emanating from a laser diode bar. Furthermore, the present invention relates to a laser device, comprising a laser radiation source, in particular a laser diode bar, which can emit laser radiation having in the direction perpendicular to the direction of propagation of the laser radiation to each other spaced partial beams, and further comprising a device for homogenizing laser radiation.
  • the propagation direction of the laser radiation means the mean propagation direction of the laser radiation, especially if this is not a plane wave or at least partially convergent or divergent.
  • light beam, sub-beam or beam is meant, unless expressly stated otherwise, an idealized beam of geometric optics, but a real light beam, such as a laser beam with a Gaussian profile, which has no infinitesimal small, but an extended beam cross-section.
  • Laser diode bars have a Gaussian near and far field distribution in the fast axis (fast axis).
  • slow-Axis In the slow axis (Slow-Axis) there is usually a super-Gaussian near-field distribution.
  • Collimation for example with a fast-axis collimation lens and / or a slow-axis collimation lens, converts the near and far field distribution into one another.
  • homogeneous lines or Create fields include diffractive, single and two-stage refractive and Powell lens-based homogenizers (see, for example, FM Dickey, SC Holswade, "Laser Beam Shaping", Marcel Dekker Inc. New York, 2000).
  • Diffractive homogenizers usually have losses of efficiency due to radiation in unwanted diffraction orders. In addition, their diffraction efficiency is limited by the number of steps in the case of a quantized conversion.
  • Refractive homogenizers have the disadvantage that in the case of Gaussian irradiation, diffraction at the grating of the array leads to interferences and thus to impairment of the homogeneity in the field. Since these array elements are illuminated coherently and the lens transitions can not be worked out ideally, there is a loss of efficiency and a reduction in homogeneity (see, for example, WO 03/016963 A1).
  • Powell lenses are based on a phase-shifting process and are only useful with Gaussian sources.
  • the problem underlying the present invention is the provision of a device of the type mentioned, with which the emanating from a laser diode bar laser radiation can be better homogenized. Furthermore, a laser device should be specified with such a device.
  • the device comprises an array of refractive surfaces, which can deflect at least a plurality of partial beams of the laser radiation to be homogenized so differently that they are at least partially convergent to each other after passing through the refractive surfaces, as before passing through the refractive surfaces, and in that the device further comprises lens means through which pass through the sub-beams passed through the array of refractive surfaces, wherein the lens means can superimpose at least some of the sub-beams in a working plane.
  • the concept is based on a suitable superposition of collimated Gauss or Super Gauss single sources.
  • the superimposition is carried out by means of optical array elements arranged in spatial space, which are assigned to each individual emitter and whose far field specifically adds a specific angular offset.
  • the specific angular offset is dimensioned so that the resulting angular distribution overlaps in such a way that a homogeneous field with Gaussian flanks arises.
  • the implementation of the concept can be carried out with a refractive prism array.
  • sub-beams arranged next to one another in two directions perpendicular to one another and to the direction of propagation can be superimposed in such a way that a homogeneous intensity distribution results.
  • a laser radiation with a two-dimensional cross section such as, for example, a stack of laser diode bars, should be able to be homogenized.
  • Claim 14 provides that the laser device comprises a device according to the invention for homogenizing laser radiation and that the angles between the refractive surfaces of the array are such that the angular difference of the deflection which adjacent partial beams experience on adjacent refractive surfaces of the array is between 75%. and 95% of the full half width of the far-field distribution corresponds to one of the sub-beams before passing through the device. In the case of angle differences of this size, a comparatively homogeneous plateau of the far-field intensity distribution of the laser radiation homogenized with the device according to the invention results.
  • angles between the refractive surfaces of the array and / or the lens means can be designed such that the angular differences of adjacent partial beams are each the same size. This results in partial beams of the same intensity distribution to a good homogeneity of the superimposed intensity distribution in the working plane. If the partial beams have a mutually different intensity distribution, such as a different supergauss factor, it may be useful to choose the angular differences of adjacent partial beams differently.
  • FIG. 1 is a schematic view of a laser device according to the invention.
  • FIG. 2 shows a schematic side view of a device according to the invention with exemplary beam paths
  • FIG. 3 shows a schematic detail view according to the arrow I M in FIG. 2;
  • FIG. 6 shows a far-field intensity distribution of the laser radiation homogenized with the device according to the invention.
  • the reference numeral 1 designates a laser diode bar which, in the so-called slow axis or in the figures, has individual emitters (not shown) spaced apart from one another in the X-direction.
  • each of the emitters has a length of about 150 ⁇ m in the slow axis, wherein the distance between two adjacent emitters in this direction is generally 400 ⁇ m or 500 ⁇ m.
  • the individual emitters emit partial beams 2 (see FIG. 2) of the laser radiation of the laser diode bar 1.
  • fast-axis collimation means 3 which can collimate the individual sub-beams 2 in the fast axis or in the figures in the Y direction
  • slow axis collimation means 4 are indicated schematically. which can collimate the individual partial beams 2 in the slow axis or in the figures in the X direction.
  • the fast-axis collimation means 3 may comprise, for example, a cylindrical lens whose cylinder axis extends in the X direction.
  • the slow-axis collimation means 4 may comprise, for example, a cylindrical lens whose cylinder axis extends in the Y direction.
  • the fast-axis collimation means 3 in the propagation direction Z between the fast-axis collimation means 3 and the slow-axis collimation means 4, it is possible to provide a beam transformation device which can rotate each of the individual sub-beams 2 by 90 ° with respect to the propagation direction Z.
  • the divergence of the partial beams in the fast axis is exchanged with that in the slow axis, so that the partial beams 2 are collimated after passing through the beam transformation device in the slow axis or in the figures in the X direction.
  • Such beam transformation devices are well known and have for example in the X direction side by side arranged cylindrical lenses whose cylinder axes are aligned at an angle of 45 ° to the Y direction in the XY plane.
  • the slow axis collimation means 4 could then comprise, for example, a cylindrical lens whose cylinder axis also extends in the X direction.
  • the device according to the invention comprises an array 5 with a plane entrance surface and a plurality of refractive surfaces 6 on the exit surface (see FIG. 2).
  • the array 5 is designed as a prism array, wherein it continues into the plane of the drawing of FIG. 2 or in the Y direction without changing its contour.
  • the refractive surfaces 6 are each flat and adjoin one another in the X direction.
  • the refractive surfaces 6 each enclose an angle ⁇ with each other (see FIG. 3).
  • the angle ⁇ between the surfaces 6 may in each case be between 150 ° and 1 80 °, in particular between 165 ° and 180 °, preferably between 175 ° and 179 °.
  • the refractive surfaces 6 are dimensioned and arranged such that in each case one of the partial beams 2 always strikes one of the refractive surfaces 6.
  • the refractive surfaces 6 By the refractive surfaces 6, the partial beams 2 are deflected such that they extend convergent to one another after emerging from the refractive surfaces 6.
  • a middle refractive surface 6a is provided, which is arranged perpendicular to the propagation direction Z of the laser radiation or in an XY plane. A partial beam 2 passing through the central refractive surface 6a in the Z direction is not deflected.
  • Behind the array 5 lens means 7 are provided in the propagation direction Z of the laser radiation, which are formed, for example, in the illustrated Ausf ⁇ hrungsbeispiel as a biconvex lens.
  • the lens means 7 may also be formed as a plano-convex or konkavkonvexe lens.
  • the lens means 7 can superimpose the emerged from the array 5 partial beams 2 in a working plane 8 with each other.
  • the working plane 8 is arranged in the output-side focal plane of the lens means 7.
  • the lens means 7 thus serve as a Fourier lens and can transform the angular distribution of the laser radiation into a spatial distribution in the working plane 8.
  • FIG. 5 shows a far-field intensity distribution 9 of a single partial beam 2 of the laser radiation. This essentially has a Gaussian profile.
  • FIG. 6 shows a far-field intensity distribution 10 of the laser radiation homogenized with the device according to the invention, in which a plurality, for example 18 partial beams 2 in the far field are superimposed. It can be seen that the far-field intensity distribution 10 has a comparatively homogeneous plateau 11 and Gaussian flanks 12.
  • FIG. 4 illustrates the superimposition of the far-field intensity distribution 9 of individual partial beams 2 to a far-field intensity distribution 10.
  • the intensity of the far field is plotted against an angular coordinate.
  • five far field intensity distributions 9 of individual partial beams 2 are superimposed to form a common far field intensity distribution 10. It turns out that the individual partial beams 2 leave the array 5 at different angles.
  • the angular difference ⁇ of adjacent partial beams corresponds to approximately 85% of the full half-width b of the far-field distribution 9 of each of the individual partial beams 2.
  • a suitable angular difference ⁇ of the deflection that adjacent partial beams 2 experience on adjacent refractive surfaces 6 of the array 5 should be between 75%. and 95% of the full half width b of the far field distribution 9 of the sub-beams 2 before passing through the device. In the case of angle differences in this range, a comparatively homogeneous plateau 11 of the far-field intensity distribution 10 of the laser radiation homogenized with the device according to the invention results.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Lenses (AREA)
  • Laser Beam Processing (AREA)

Abstract

Device for homogenizing laser radiation, having at least in a first direction (X) perpendicular to the direction of propagation (Z) of the laser radiation partial beams (2) spaced apart from each other, in particular for homogenizing laser radiation emanating from a laser diode bar, comprising an array (5) of refractive surfaces (6, 6a), which can deflect at least a majority of the partial beams (2) of the laser radiation to be homogenized in such different manners that said beams run at least partially more convergingly to each other after passing through the refractive surfaces (6, 6a) than before passing through the refractive surfaces (6, 6a), and lens means (7) through which the partial beams (2), which have passed the array (5) of refractive surfaces (6, 6a), can pass, wherein the lens means (7) can superimpose at least some of the partial beams (2) in a working plane (8).

Description

„Vorrichtung zur Homogenisierung von Laserstrahlung" "Apparatus for Homogenizing Laser Radiation"
Die vorliegende Erfindung betrifft eine Vorrichtung zur Homogenisierung von Laserstrahlung, die zumindest in einer ersten, zu der Ausbreitungsrichtung der Laserstrahlung senkrechten Richtung zueinander beabstandete Teilstrahlen aufweist, insbesondere zur Homogenisierung von Laserstrahlung, die von einem Laserdiodenbarren ausgeht. Weiterhin betrifft die vorliegende Erfindung eine Laservorrichtung, umfassend eine Laserstrahlungsquelle, insbesondere einen Laserdiodenbarren, die Laserstrahlung aussenden kann, die in der zu der Ausbreitungsrichtung der Laserstrahlung senkrechten Richtung zueinander beabstandete Teilstrahlen aufweist, sowie weiterhin umfassend eine Vorrichtung zur Homogenisierung von Laserstrahlung.The present invention relates to a device for the homogenization of laser radiation, which has at least in a first, perpendicular to the propagation direction of the laser radiation direction spaced partial beams, in particular for the homogenization of laser radiation emanating from a laser diode bar. Furthermore, the present invention relates to a laser device, comprising a laser radiation source, in particular a laser diode bar, which can emit laser radiation having in the direction perpendicular to the direction of propagation of the laser radiation to each other spaced partial beams, and further comprising a device for homogenizing laser radiation.
Definitionen: In Ausbreitungsrichtung der Laserstrahlung meint die mittlere Ausbreitungsrichtung der Laserstrahlung, insbesondere wenn diese keine ebene Welle ist oder zumindest teilweise konvergent oder divergent ist. Mit Lichtstrahl, Teilstrahl oder Strahl ist, wenn nicht ausdrücklich anderes angegeben ist, kein idealisierter Strahl der geometrischen Optik gemeint, sondern ein realer Lichtstrahl, wie beispielsweise ein Laserstrahl mit einem Gauß-Profil, der keinen infinitesimal kleinen, sondern einen ausgedehnten Strahlquerschnitt aufweist.Definitions: In the propagation direction of the laser radiation means the mean propagation direction of the laser radiation, especially if this is not a plane wave or at least partially convergent or divergent. By light beam, sub-beam or beam is meant, unless expressly stated otherwise, an idealized beam of geometric optics, but a real light beam, such as a laser beam with a Gaussian profile, which has no infinitesimal small, but an extended beam cross-section.
Laserdiodenbarren besitzen in der schnellen Achse (Fast-Axis) eine gaußförmige Nah- und Fernfeldverteilung. In der langsamen Achse (Slow-Axis) liegt in der Regel eine supergaußförmige Nahfeldverteilung vor. Durch die Kollimation, beispielsweise mit einer Fast-Axis-Kollimationslinse und/oder einer Slow-Axis- Kollimationslinse, werden Nah- und Fernfeldverteilung ineinander überführt. Es gibt verschiedene Konzepte homogene Linien oder Felder zu erzeugen. Dazu zählen diffraktive, ein- und zweistufige refraktive und auf Powell-Linsen basierende Homogenisierer einsetzbar (siehe dazu beispielsweise F. M. Dickey, S. C. Holswade, „Laser beam shaping", Marcel Dekker Inc. New York, 2000).Laser diode bars have a Gaussian near and far field distribution in the fast axis (fast axis). In the slow axis (Slow-Axis) there is usually a super-Gaussian near-field distribution. Collimation, for example with a fast-axis collimation lens and / or a slow-axis collimation lens, converts the near and far field distribution into one another. There are different concepts homogeneous lines or Create fields. These include diffractive, single and two-stage refractive and Powell lens-based homogenizers (see, for example, FM Dickey, SC Holswade, "Laser Beam Shaping", Marcel Dekker Inc. New York, 2000).
Diffraktive Homogenisierer weisen in der Regel Effizienzverluste durch Abstrahlung in unerwünschte Beugungsordnungen auf. Zudem ist ihre Beugungseffizienz im Falle einer quantisierten Umsetzung durch die Stufenanzahl begrenzt.Diffractive homogenizers usually have losses of efficiency due to radiation in unwanted diffraction orders. In addition, their diffraction efficiency is limited by the number of steps in the case of a quantized conversion.
Refraktive Homogenisierer haben den Nachteil, dass bei gaußförmiger Bestrahlung Beugung am Gitter des Arrays zu Interferenzen und damit zu Beeinträchtigungen der Homogenität im Feld führen. Da diese Arrayelemente zusammenhängend ausgeleuchtet werden und die Linsenübergänge nicht ideal ausgearbeitet werden können, kommt es zu Effizienzverlusten und Verminderung der Homogenität (siehe dazu beispielsweise WO 03/016963 A1 ).Refractive homogenizers have the disadvantage that in the case of Gaussian irradiation, diffraction at the grating of the array leads to interferences and thus to impairment of the homogeneity in the field. Since these array elements are illuminated coherently and the lens transitions can not be worked out ideally, there is a loss of efficiency and a reduction in homogeneity (see, for example, WO 03/016963 A1).
Powell-Linsen basieren auf einem phasenschiebenden Verfahren und sind nur bei gaußförmigen Quellen sinnvoll.Powell lenses are based on a phase-shifting process and are only useful with Gaussian sources.
Das der vorliegenden Erfindung zugrunde liegende Problem ist die Schaffung einer Vorrichtung der eingangs genannten Art, mit der die von einem Laserdiodenbarren ausgehende Laserstrahlung besser homogenisiert werden kann. Weiterhin soll eine Laservorrichtung mit einer derartigen Vorrichtung angegeben werden.The problem underlying the present invention is the provision of a device of the type mentioned, with which the emanating from a laser diode bar laser radiation can be better homogenized. Furthermore, a laser device should be specified with such a device.
Dies wird erfindungsgemäß durch eine Vorrichtung mit den Merkmalen des Anspruchs 1 beziehungsweise durch eine Laservorrichtung mit den Merkmalen des Anspruchs 14 erreicht. Die Unteransprüche betreffen bevorzugte Ausführungsformen der vorliegenden Erfindung. Gemäß Anspruch 1 ist vorgesehen, dass die Vorrichtung ein Array refraktiver Flächen umfasst, die zumindest eine Mehrzahl der Teilstrahlen der zu homogenisierenden Laserstrahlung derart unterschiedlich ablenken können, dass sie nach dem Hindurchtritt durch die refraktiven Flächen zumindest teilweise konvergenter zueinander verlaufen, als vor dem Hindurchtritt durch die refraktiven Flächen, sowie dass die Vorrichtung weiterhin Linsenmittel umfasst, durch die die durch das Array refraktiver Flächen hindurch getretenen Teilstrahlen hindurch treten können, wobei die Linsemittel zumindest einige der Teilstrahlen in einer Arbeitsebene überlagern können. Das Konzept beruht auf einer geeigneten Überlagerung kollimierter Gauß- oder Super-Gauß-Einzelquellen. Die Überlagerung wird mittels im Ortsraum angeordneter optischer Arrayelemente durchgeführt, die jedem Einzelemitter zugeordnet sind und dessen Fernfeld gezielt einen spezifischen Winkeloffset hinzufügen. Der spezifische Winkeloffset ist so dimensioniert, dass die resultierende Winkelverteilung in der Art überlappt, dass ein homogenes Feld mit gaußförmigen Flanken entsteht. Die Umsetzung des Konzepts kann mit einem refraktiven Prismenarray durchgeführt werden.This is inventively achieved by a device having the features of claim 1 or by a laser device having the features of claim 14. The subclaims relate to preferred embodiments of the present invention. According to claim 1 it is provided that the device comprises an array of refractive surfaces, which can deflect at least a plurality of partial beams of the laser radiation to be homogenized so differently that they are at least partially convergent to each other after passing through the refractive surfaces, as before passing through the refractive surfaces, and in that the device further comprises lens means through which pass through the sub-beams passed through the array of refractive surfaces, wherein the lens means can superimpose at least some of the sub-beams in a working plane. The concept is based on a suitable superposition of collimated Gauss or Super Gauss single sources. The superimposition is carried out by means of optical array elements arranged in spatial space, which are assigned to each individual emitter and whose far field specifically adds a specific angular offset. The specific angular offset is dimensioned so that the resulting angular distribution overlaps in such a way that a homogeneous field with Gaussian flanks arises. The implementation of the concept can be carried out with a refractive prism array.
Es soll an dieser Stelle angemerkt werden, dass mit einer erfindungsgemäßen Vorrichtung auch in zwei zueinander und zu der Ausbreitungsrichtung senkrechten Richtungen nebeneinander angeordnete Teilstrahlen derart überlagert werden können, dass sich eine homogene Intensitätsverteilung ergibt. Es soll somit von der vorliegenden Erfindung nicht nur die in den Ausführungsbeispielen beschriebene Laserstrahlung mit im Wesentlichen eindimensionalem Querschnitt, wie beispielsweise die Laserstrahlung eines Laserdiodenbarrens, sondern auch eine Laserstrahlung mit einem zweidimensionalen Querschnitt, wie beispielsweise die eines Stacks von Laserdiodenbarren, homogenisiert werden können. Anspruch 14 sieht vor, dass die Laservorrichtung eine erfindungsgemäße Vorrichtung zur Homogenisierung von Laserstrahlung umfasst und dass die Winkel zwischen den refraktiven Flächen des Arrays derart ausgebildet sind, dass die Winkeldifferenz der Ablenkung, die benachbarte Teilstrahlen an benachbarten refraktiven Flächen des Arrays erfahren, zwischen 75% und 95% der vollen Halbwertsbreite der Fernfeldverteilung eines der Teilstrahlen vor dem Hindurchtritt durch die Vorrichtung entspricht. Bei Winkeldifferenzen dieser Größe ergibt sich ein vergleichsweise homogenes Plateau der Fernfeldintensitätsverteilung der mit der erfindungsgemäßen Vorrichtung homogenisierten Laserstrahlung.It should be noted at this point that, with a device according to the invention, sub-beams arranged next to one another in two directions perpendicular to one another and to the direction of propagation can be superimposed in such a way that a homogeneous intensity distribution results. Thus, not only the laser radiation of essentially one-dimensional cross-section described in the exemplary embodiments, such as the laser radiation of a laser diode bar, but also a laser radiation with a two-dimensional cross section, such as, for example, a stack of laser diode bars, should be able to be homogenized. Claim 14 provides that the laser device comprises a device according to the invention for homogenizing laser radiation and that the angles between the refractive surfaces of the array are such that the angular difference of the deflection which adjacent partial beams experience on adjacent refractive surfaces of the array is between 75%. and 95% of the full half width of the far-field distribution corresponds to one of the sub-beams before passing through the device. In the case of angle differences of this size, a comparatively homogeneous plateau of the far-field intensity distribution of the laser radiation homogenized with the device according to the invention results.
Insbesondere können dabei die Winkel zwischen den refraktiven Flächen des Arrays und/oder die Linsenmittel derart ausgebildet sind, dass die Winkeldifferenzen benachbarter Teilstrahlen jeweils gleich groß sind. Dies führt bei Teilstrahlen gleicher Intensitätsverteilung zu einer guten Homogenität der überlagerten Intensitätsverteilung in der Arbeitsebene. Falls die Teilstrahlen eine zueinander unterschiedliche Intensitätsverteilung aufweisen, wie beispielsweise einen unterschiedlichen Supergaußfaktor, kann es sinnvoll sein, die Winkeldifferenzen benachbarter Teilstrahlen unterschiedlich zu wählen. In particular, the angles between the refractive surfaces of the array and / or the lens means can be designed such that the angular differences of adjacent partial beams are each the same size. This results in partial beams of the same intensity distribution to a good homogeneity of the superimposed intensity distribution in the working plane. If the partial beams have a mutually different intensity distribution, such as a different supergauss factor, it may be useful to choose the angular differences of adjacent partial beams differently.
Weitere Merkmale und Vorteile der vorliegenden Erfindung werden deutlich anhand der nachfolgenden Beschreibung bevorzugter Ausfϋhrungsbeispiele unter Bezugnahme auf die beiliegenden Abbildungen. Darin zeigenFurther features and advantages of the present invention will become apparent from the following description of preferred Ausführungsbeispiele with reference to the accompanying drawings. Show in it
Fig. 1 eine schematische Ansicht einer erfindungsgemäßen Laservorrichtung;1 is a schematic view of a laser device according to the invention;
Fig. 2 eine schematische Seitenansicht einer erfindungsgemäße Vorrichtung mit beispielhaften Strahlengängen;FIG. 2 shows a schematic side view of a device according to the invention with exemplary beam paths; FIG.
Fig. 3 eine schematische Detailansicht gemäß dem Pfeil I M in Fig. 2;FIG. 3 shows a schematic detail view according to the arrow I M in FIG. 2; FIG.
Fig. 4 eine schematische Veranschaulichung einer Überlagerung mehrerer Teilstrahlen;4 shows a schematic illustration of a superposition of a plurality of partial beams;
Fig. 5 eine Fernfeldintensitätsverteilung eines einzelnen Teilstrahls der Laserstrahlung;5 shows a far-field intensity distribution of a single partial beam of the laser radiation;
Fig. 6 eine Fernfeldintensitätsverteilung der mit der erfindungsgemäßen Vorrichtung homogenisierten Laserstrahlung.6 shows a far-field intensity distribution of the laser radiation homogenized with the device according to the invention.
In einigen der Figuren sind zur besseren Orientierung kartesische Koordinatensysteme eingezeichnet. Weiterhin werden in den Figuren gleiche oder funktional gleiche Teile oder Elemente mit den gleichen Bezugszeichen versehen.Some of the figures show Cartesian coordinate systems for better orientation. Furthermore, the same or functionally identical parts or elements are provided with the same reference numerals in the figures.
In Fig. 1 ist mit dem Bezugszeichen 1 ein Laserdiodenbarren bezeichnet, der in der sogenannten Slow-Axis beziehungsweise in den Figuren in X-Richtung beabstandet zueinander nebeneinander angeordnete einzelne Emitter (nicht abgebildet) aufweist. Beispielsweise weist ein jeder der Emitter eine Länge von etwa 150 μm in der Slow-Axis auf, wobei der Abstand zweier benachbarter Emitter zueinander in dieser Richtung in der Regel 400 μm oder 500 μm beträgt. Die einzelnen Emitter senden Teilstrahlen 2 (siehe Fig. 2) der Laserstrahlung des Laserdiodenbarrens 1 aus.In FIG. 1, the reference numeral 1 designates a laser diode bar which, in the so-called slow axis or in the figures, has individual emitters (not shown) spaced apart from one another in the X-direction. For example, each of the emitters has a length of about 150 μm in the slow axis, wherein the distance between two adjacent emitters in this direction is generally 400 μm or 500 μm. The individual emitters emit partial beams 2 (see FIG. 2) of the laser radiation of the laser diode bar 1.
In Fig. 1 sind in Ausbreitungsrichtung Z hinter dem Laserdiodenbarren 1 schematisch Fast-Axis-Kollimationsmittel 3, die die einzelnen Teilstrahlen 2 in der Fast-Axis beziehungsweise in den Figuren in Y- Richtung kollimieren können, und Slow-Axis-Kollimationsmittel 4 angedeutet, die die einzelnen Teilstrahlen 2 in der Slow-Axis beziehungsweise in den Figuren in X-Richtung kollimieren können.In FIG. 1, in the propagation direction Z behind the laser diode bar 1, fast-axis collimation means 3, which can collimate the individual sub-beams 2 in the fast axis or in the figures in the Y direction, and slow axis collimation means 4 are indicated schematically. which can collimate the individual partial beams 2 in the slow axis or in the figures in the X direction.
Die Fast-Axis-Kollimationsmittel 3 können beispielsweise eine Zylinderlinse umfassen, deren Zylinderachse sich in X-Richtung erstreckt. Weiterhin können die Slow-Axis-Kollimationsmittel 4 beispielsweise eine Zylinderlinse umfassen, deren Zylinderachse sich in Y-Richtung erstreckt.The fast-axis collimation means 3 may comprise, for example, a cylindrical lens whose cylinder axis extends in the X direction. Furthermore, the slow-axis collimation means 4 may comprise, for example, a cylindrical lens whose cylinder axis extends in the Y direction.
Alternativ dazu besteht die Möglichkeit, in Ausbreitungsrichtung Z zwischen den Fast-Axis-Kollimationsmitteln 3 und den Slow-Axis- Kollimationsmitteln 4 eine Strahltransformationsvorrichtung vorzusehen, die einen jeden der einzelnen Teilstrahlen 2 um 90° hinsichtlich der Ausbreitungsrichtung Z drehen kann. Dadurch wird die Divergenz der Teilstrahlen in der Fast-Axis mit der in der Slow-Axis getauscht, so dass die Teilstrahlen 2 nach Hindurchtritt durch die Strahltransformationsvorrichtung in der Slow-Axis beziehungsweise in den Figuren in X-Richtung kollimiert sind. Derartige Strahltransformationsvorrichtungen sind hinlänglich bekannt und weisen beispielsweise in X-Richtung nebeneinander angeordnete Zylinderlinsen auf, deren Zylinderachsen unter einem Winkel von 45° zur Y-Richtung in der X-Y-Ebene ausgerichtet sind. Bei Vorsehen einer derartigen Strahltransformationsvorrichtung könnten dann die Slow-Axis-Kollimationsmittel 4 beispielsweise eine Zylinderlinse umfassen, deren Zylinderachse sich ebenfalls in X- Richtung erstreckt.Alternatively, in the propagation direction Z between the fast-axis collimation means 3 and the slow-axis collimation means 4, it is possible to provide a beam transformation device which can rotate each of the individual sub-beams 2 by 90 ° with respect to the propagation direction Z. As a result, the divergence of the partial beams in the fast axis is exchanged with that in the slow axis, so that the partial beams 2 are collimated after passing through the beam transformation device in the slow axis or in the figures in the X direction. Such beam transformation devices are well known and have for example in the X direction side by side arranged cylindrical lenses whose cylinder axes are aligned at an angle of 45 ° to the Y direction in the XY plane. By providing such a beam transformation device, the slow axis collimation means 4 could then comprise, for example, a cylindrical lens whose cylinder axis also extends in the X direction.
In Ausbreitungsrichtung Z hinter den Fast- und Slow-Axis- Kollimationsmitteln 3, 4 umfasst die erfindungsgemäße Vorrichtung ein Array 5 mit einer planen Eintrittsfläche und einer Mehrzahl von refraktiven Flächen 6 auf der Austrittsfläche (siehe dazu Fig. 2). Das Array 5 ist als Prismenarray ausgebildet, wobei es sich in die Zeichenebene der Fig. 2 hinein beziehungsweise in Y-Richtung ohne Veränderung seiner Kontur fortsetzt.In the propagation direction Z behind the fast and slow axis collimation means 3, 4, the device according to the invention comprises an array 5 with a plane entrance surface and a plurality of refractive surfaces 6 on the exit surface (see FIG. 2). The array 5 is designed as a prism array, wherein it continues into the plane of the drawing of FIG. 2 or in the Y direction without changing its contour.
Die refraktiven Flächen 6 sind jeweils plan und grenzen in X-Richtung aneinander an. Die refraktiven Flächen 6 schließen jeweils einen Winkel α miteinander ein (siehe Fig. 3). Der Winkel α zwischen den Flächen 6 kann jeweils zwischen 150° und 1 80°, insbesondere zwischen 165° und 180°, vorzugsweise zwischen 175° und 179° betragen.The refractive surfaces 6 are each flat and adjoin one another in the X direction. The refractive surfaces 6 each enclose an angle α with each other (see FIG. 3). The angle α between the surfaces 6 may in each case be between 150 ° and 1 80 °, in particular between 165 ° and 180 °, preferably between 175 ° and 179 °.
Dabei sind die refraktiven Flächen 6 derart dimensioniert und angeordnet, dass jeweils immer einer der Teilstrahlen 2 auf eine der refraktiven Flächen 6 trifft. Durch die refraktiven Flächen 6 werden die Teilstrahlen 2 derart abgelenkt, dass sie nach dem Austreten aus den refraktiven Flächen 6 konvergent zueinander verlaufen. Insbesondere ist bei einer ungeraden Anzahl von Teilstrahlen 2 eine mittlere refraktive Fläche 6a vorgesehen, die senkrecht zur Ausbreitungsrichtung Z der Laserstrahlung beziehungsweise in einer X-Y-Ebene angeordnet ist. Ein in Z-Richtung durch die mittlere refraktive Fläche 6a hindurch tretender Teilstrahl 2 wird nicht abgelenkt. Hinter dem Array 5 sind in Ausbreitungsrichtung Z der Laserstrahlung Linsenmittel 7 vorgesehen, die beispielsweise im abgebildeten Ausfϋhrungsbeispiel als bikonvexe Linse ausgebildet sind. Die Linsenmittel 7 können auch als plankonvexe oder konkavkonvexe Linse ausgebildet sein. Weiterhin besteht auch die Möglichkeit, die Linsenmittel 7 als Zylinderlinse, insbesondere als Zylinderlinse mit einer asphärischen Kontur auszubilden.In this case, the refractive surfaces 6 are dimensioned and arranged such that in each case one of the partial beams 2 always strikes one of the refractive surfaces 6. By the refractive surfaces 6, the partial beams 2 are deflected such that they extend convergent to one another after emerging from the refractive surfaces 6. In particular, with an odd number of partial beams 2, a middle refractive surface 6a is provided, which is arranged perpendicular to the propagation direction Z of the laser radiation or in an XY plane. A partial beam 2 passing through the central refractive surface 6a in the Z direction is not deflected. Behind the array 5 lens means 7 are provided in the propagation direction Z of the laser radiation, which are formed, for example, in the illustrated Ausfϋhrungsbeispiel as a biconvex lens. The lens means 7 may also be formed as a plano-convex or konkavkonvexe lens. Furthermore, it is also possible to form the lens means 7 as a cylindrical lens, in particular as a cylindrical lens with an aspherical contour.
Die Linsenmittel 7 können die aus dem Array 5 ausgetretenen Teilstrahlen 2 in einer Arbeitsebene 8 miteinander überlagern. Dabei ist die Arbeitsebene 8 in der ausgangsseitigen Brennebene der Linsenmittel 7 angeordnet. Die Linsenmittel 7 dienen somit als Fourierlinse und können die Winkelverteilung der Laserstrahlung in eine Ortsverteilung in der Arbeitsebene 8 transformieren.The lens means 7 can superimpose the emerged from the array 5 partial beams 2 in a working plane 8 with each other. In this case, the working plane 8 is arranged in the output-side focal plane of the lens means 7. The lens means 7 thus serve as a Fourier lens and can transform the angular distribution of the laser radiation into a spatial distribution in the working plane 8.
Fig. 5 zeigt eine Fernfeldintensitätsverteilung 9 eines einzelnen Teilstrahls 2 der Laserstrahlung. Diese weist im Wesentlichen ein Gauß-Profil auf. Fig. 6 zeigt eine Fernfeldintensitätsverteilung 10 der mit der erfindungsgemäßen Vorrichtung homogenisierten Laserstrahlung, bei der eine Mehrzahl, beispielsweise 18 Teilstrahlen 2 im Fernfeld überlagert sind. Es zeigt sich, dass die Fernfeldintensitätsverteilung 10 ein vergleichsweise homogenes Plateau 1 1 und gaußförmige Flanken 12 aufweist.5 shows a far-field intensity distribution 9 of a single partial beam 2 of the laser radiation. This essentially has a Gaussian profile. FIG. 6 shows a far-field intensity distribution 10 of the laser radiation homogenized with the device according to the invention, in which a plurality, for example 18 partial beams 2 in the far field are superimposed. It can be seen that the far-field intensity distribution 10 has a comparatively homogeneous plateau 11 and Gaussian flanks 12.
Fig. 4 verdeutlicht die Überlagerung der Fernfeldintensitätsverteilung 9 einzelner Teilstrahlen 2 zu einer Fernfeldintensitätsverteilung 10. Dabei ist in Fig. 4 die Intensität des Fernfeldes gegen eine Winkelkoordinate aufgetragen. Im in Fig. 4 abgebildeten Beispiel werden fünf Fernfeldintensitätsverteilungen 9 einzelner Teilstrahlen 2 zu einer gemeinsamen Fernfeldintensitätsverteilung 10 überlagert. Es zeigt sich, dass die einzelnen Teilstrahlen 2 das Array 5 unter unterschiedlichen Winkeln verlassen. Die Winkeldifferenz Δφ benachbarter Teilstrahlen zueinander entspricht etwa 85% der vollen Halbwertsbreite b der Fernfeldverteilung 9 eines jeden der einzelnen Teilstrahlen 2.FIG. 4 illustrates the superimposition of the far-field intensity distribution 9 of individual partial beams 2 to a far-field intensity distribution 10. In FIG. 4, the intensity of the far field is plotted against an angular coordinate. In the example depicted in FIG. 4, five far field intensity distributions 9 of individual partial beams 2 are superimposed to form a common far field intensity distribution 10. It turns out that the individual partial beams 2 leave the array 5 at different angles. The angular difference Δφ of adjacent partial beams corresponds to approximately 85% of the full half-width b of the far-field distribution 9 of each of the individual partial beams 2.
Je nachdem ob die Teilstrahlen 2 ein reines Gauß-Profil oder ein modifiziertes Gauß-Profil wie beispielsweise ein Supergauß-Profil aufweisen, sollte eine geeignete Winkeldifferenz Δφ der Ablenkung, die benachbarte Teilstrahlen 2 an benachbarten refraktiven Flächen 6 des Arrays 5 erfahren, zwischen 75% und 95% der vollen Halbwertsbreite b der Fernfeldverteilung 9 der Teilstrahlen 2 vor dem Hindurchtritt durch die Vorrichtung entsprechen. Bei Winkeldifferenzen in diesem Bereich ergibt sich ein vergleichsweise homogenes Plateau 1 1 der Fernfeldintensitätsverteilung 10 der mit der erfindungsgemäßen Vorrichtung homogenisierten Laserstrahlung.Depending on whether the partial beams 2 have a pure Gaussian profile or a modified Gaussian profile such as a Supergauß profile, a suitable angular difference Δφ of the deflection that adjacent partial beams 2 experience on adjacent refractive surfaces 6 of the array 5 should be between 75%. and 95% of the full half width b of the far field distribution 9 of the sub-beams 2 before passing through the device. In the case of angle differences in this range, a comparatively homogeneous plateau 11 of the far-field intensity distribution 10 of the laser radiation homogenized with the device according to the invention results.
Es besteht die Möglichkeit, anstelle eines Arrays 5 zwei in Ausbreitungsrichtung Z der Laserstrahlung hintereinander angeordnete, als Prismenarrays ausgebildete Arrays vorzusehen. Dabei können in Anlehnung an die DE 1 0 2007 952 782 die Zwischenräume zwischen einzelnen Teilstrahlen 2 verringert werden. It is possible, instead of an array 5, to provide two arrays arranged successively in the propagation direction Z of the laser radiation and designed as prism arrays. In this case, based on DE 1 0 2007 952 782, the spaces between individual partial beams 2 can be reduced.

Claims

Patentansprüche: claims:
1 . Vorrichtung zur Homogenisierung von Laserstrahlung, die zumindest in einer ersten, zu der Ausbreitungsrichtung (Z) der Laserstrahlung senkrechten Richtung (X) zueinander beabstandete Teilstrahlen (2) aufweist, insbesondere zur Homogenisierung von Laserstrahlung, die von einem Laserdiodenbarren ausgeht, umfassend1 . Device for the homogenization of laser radiation, comprising at least in a first, to the propagation direction (Z) of the laser radiation perpendicular direction (X) spaced apart partial beams (2), in particular for the homogenization of laser radiation emanating from a laser diode bar comprising
ein Array (5) refraktiver Flächen (6, 6a), die zumindest eine Mehrzahl der Teilstrahlen (2) der zu homogenisierenden Laserstrahlung derart unterschiedlich ablenken können, dass sie nach dem Hindurchtritt durch die refraktiven Flächen (6, 6a) zumindest teilweise konvergenter zueinander verlaufen, als vor dem Hindurchtritt durch die refraktiven Flächen (6, 6a), sowiean array (5) of refractive surfaces (6, 6a) that can deflect at least a plurality of the partial beams (2) of the laser radiation to be homogenized differently such that they pass at least partially more convergent after passing through the refractive surfaces (6, 6a) , as before passing through the refractive surfaces (6, 6a), as well as
Linsenmittel (7), durch die die durch das Array (5) refraktiver Flächen (6, 6a) hindurch getretenen Teilstrahlen (2) hindurch treten können, wobei die Linsemittel (7) zumindest einige der Teilstrahlen (2) in einer Arbeitsebene (8) überlagern können.Lens means (7) through which the partial beams (2) passed through the array (5) of refractive surfaces (6, 6a) can pass, wherein the lens means (7) at least some of the partial beams (2) in a working plane (8) can overlay.
2. Vorrichtung nach Anspruch 1 , dadurch gekennzeichnet, dass einem jeden der Teilstrahlen (2) jeweils eine der refraktiven Flächen (6, 6a) des Arrays (5) zugeordnet ist.2. Device according to claim 1, characterized in that one of the partial beams (2) is associated with one of the refractive surfaces (6, 6a) of the array (5).
3. Vorrichtung nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass die refraktiven Flächen (6, 6a) des Arrays (5) zueinander geneigt sind.3. Device according to one of claims 1 or 2, characterized in that the refractive surfaces (6, 6 a) of the array (5) are inclined to each other.
4. Vorrichtung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die refraktiven Flächen (6, 6a) des Arrays (5) zumindest teilweise plan sind, wobei insbesondere das Array (5) als Prismenarray ausgebildet ist.4. Device according to one of claims 1 to 3, characterized in that the refractive surfaces (6, 6 a) of the Arrays (5) are at least partially planar, in particular, the array (5) is designed as a prism array.
5. Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die refraktiven Flächen (6, 6a) des Arrays (5) zumindest teilweise in der ersten Richtung (X) aneinander anschließen.5. Device according to one of claims 1 to 4, characterized in that the refractive surfaces (6, 6a) of the array (5) at least partially in the first direction (X) adjoin one another.
6. Vorrichtung nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass die refraktiven Flächen (6, 6a) des Arrays (5) zumindest teilweise einen Winkel (α) zwischen 150° und 180°, insbesondere einen Winkel (α) zwischen 165° und 180°, vorzugsweise einen Winkel (α) zwischen 175° und 179° miteinander einschließen.6. Device according to one of claims 1 to 5, characterized in that the refractive surfaces (6, 6a) of the array (5) at least partially an angle (α) between 150 ° and 180 °, in particular an angle (α) between 165 ° and 180 °, preferably an angle (α) between 175 ° and 179 ° with each other.
7. Vorrichtung nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die refraktiven Flächen (6, 6a) des Arrays (5) auf einer zylindrischen Kontur angeordnet sind.7. Device according to one of claims 1 to 6, characterized in that the refractive surfaces (6, 6a) of the array (5) are arranged on a cylindrical contour.
8. Vorrichtung nach Anspruch 7, dadurch gekennzeichnet, dass die Zylinderachse der zylindrischen Kontur sich in einer zweiten, zu der ersten Richtung (X) und zu der Ausbreitungsrichtung (Z) der zu homogenisierenden Laserstrahlung senkrechten Richtung (Y) erstreckt.8. The device according to claim 7, characterized in that the cylinder axis of the cylindrical contour extending in a second, to the first direction (X) and to the propagation direction (Z) of the laser radiation to be homogenized perpendicular direction (Y).
9. Vorrichtung nach einem der Ansprüche 7 oder 8, dadurch gekennzeichnet, dass die zylindrische Kontur konvex geformt ist.9. Device according to one of claims 7 or 8, characterized in that the cylindrical contour is convex.
10. Vorrichtung nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Linsenmittel (7) eine Sammellinse umfassen oder aus einer Sammellinse bestehen. 10. Device according to one of claims 1 to 9, characterized in that the lens means (7) comprise a converging lens or consist of a converging lens.
1 1 . Vorrichtung nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass die Arbeitsebene (8) in der ausgangsseitigen Brennebene der Linsenmittel (7) angeordnet ist.1 1. Device according to one of claims 1 to 10, characterized in that the working plane (8) in the output side focal plane of the lens means (7) is arranged.
12. Vorrichtung nach einem der Ansprüche 1 bis 1 1 , dadurch gekennzeichnet, dass die Vorrichtung Kollimationsmittel (3, 4) umfasst, die die zu homogenisierende Laserstrahlung hinsichtlich der ersten Richtung (X) und/oder hinsichtlich der zweiten Richtung (Y) zumindest teilweise kollimieren können.12. The device according to one of claims 1 to 1 1, characterized in that the device comprises collimation means (3, 4) which at least partially the laser radiation to be homogenized with respect to the first direction (X) and / or with respect to the second direction (Y) can collimate.
13. Vorrichtung nach Anspruch 12, dadurch gekennzeichnet, dass die Kollimationsmittel (3, 4) in Ausbreitungsrichtung (Z) der zu homogenisierenden Laserstrahlung vor den refraktiven Flächen (6, 6a) des Arrays (5) angeordnet sind.13. The apparatus according to claim 12, characterized in that the collimation means (3, 4) in the propagation direction (Z) of the laser radiation to be homogenized in front of the refractive surfaces (6, 6a) of the array (5) are arranged.
14. Laservorrichtung, umfassend14. Laser device comprising
eine Laserstrahlungsquelle, insbesondere einen Laserdiodenbarren (1 ), die Laserstrahlung aussenden kann, die in der zu der Ausbreitungsrichtung (Z) der Laserstrahlung senkrechten Richtung (X) zueinander beabstandete Teilstrahlen (2) aufweist, sowiea laser radiation source, in particular a laser diode bar (1), which can emit laser radiation having in the direction perpendicular to the propagation direction (Z) of the laser radiation direction (X) spaced partial beams (2), and
eine Vorrichtung zur Homogenisierung von Laserstrahlung,a device for homogenizing laser radiation,
dadurch gekennzeichnet, dass die Vorrichtung zur Homogenisierung von Laserstrahlung eine Vorrichtung nach einem der Ansprüche 1 bis 13 ist und dass die Winkel (α) zwischen den refraktiven Flächen des Arrays derart ausgebildet sind, dass die Winkeldifferenz (Δφ) der Ablenkung, die benachbarte Teilstrahlen (2) an benachbarten refraktiven Flächen (6, 6a) des Arrays (5) erfahren, zwischen 75% und 95% der vollen Halbwertsbreite (b) der Fernfeldverteilung (9) eines der Teilstrahlen (2) vor dem Hindurchtritt durch die Vorrichtung entspricht.characterized in that the device for homogenizing laser radiation is a device according to one of claims 1 to 13 and that the angles (α) between the refractive surfaces of the array are such that the angular difference (Δφ) of the deflection, the neighboring partial beams ( 2) on adjacent refractive surfaces (6, 6a) of the array (5), between 75% and 95% the full half width (b) of the far field distribution (9) corresponds to one of the partial beams (2) before passing through the device.
15. Laservorrichtung nach Anspruch 14, dadurch gekennzeichnet, dass die Winkel (α) zwischen den refraktiven Flächen des Arrays und/oder die Linsenmittel (7) derart ausgebildet sind, dass die Winkeldifferenzen (Δφ) benachbarter Teilstrahlen (2) jeweils gleich groß sind. 15. A laser device according to claim 14, characterized in that the angles (α) between the refractive surfaces of the array and / or the lens means (7) are formed such that the angular differences (Δφ) of adjacent partial beams (2) are each equal.
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US20110305023A1 (en) 2011-12-15
JP5576886B2 (en) 2014-08-20
WO2010097198A1 (en) 2010-09-02
DE102009010693A1 (en) 2010-09-02
KR20110128175A (en) 2011-11-28
CN102334060A (en) 2012-01-25
JP2012518813A (en) 2012-08-16

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