EP2458222A3 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire Download PDF

Info

Publication number: EP2458222A3
Authority: EP; European Patent Office
Prior art keywords: turbomolecular pump; discs; part discs; abutting edges; support ring
Prior art date: 2010-11-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP11008602.2A

Other languages

German (de)

English (en)

Other versions

EP2458222B1 (fr

EP2458222A2 (fr

Inventor

Michael Schweighöfer

Herbert Stammler

Tobias Stoll

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2010-11-26

Filing date

2011-10-27

Publication date

2016-03-09

2011-10-27 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2012-05-30 Publication of EP2458222A2 publication Critical patent/EP2458222A2/fr

2016-03-09 Publication of EP2458222A3 publication Critical patent/EP2458222A3/fr

2017-09-27 Application granted granted Critical

2017-09-27 Publication of EP2458222B1 publication Critical patent/EP2458222B1/fr

Status Not-in-force legal-status Critical Current

2031-10-27 Anticipated expiration legal-status Critical

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

EP11008602.2A 2010-11-26 2011-10-27 Pompe turbomoléculaire Not-in-force EP2458222B1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102010052660A DE102010052660A1 (de)	2010-11-26	2010-11-26	Turbomolekularpumpe

Publications (3)

Publication Number	Publication Date
EP2458222A2 EP2458222A2 (fr)	2012-05-30
EP2458222A3 true EP2458222A3 (fr)	2016-03-09
EP2458222B1 EP2458222B1 (fr)	2017-09-27

Family

ID=45531123

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP11008602.2A Not-in-force EP2458222B1 (fr)	2010-11-26	2011-10-27	Pompe turbomoléculaire

Country Status (2)

Country	Link
EP (1)	EP2458222B1 (fr)
DE (1)	DE102010052660A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP6236806B2 (ja) *	2013-03-07	2017-11-29	株式会社島津製作所	真空ポンプ
JP6241223B2 (ja) *	2013-03-13	2017-12-06	株式会社島津製作所	真空ポンプ
DE102013110251A1 (de)	2013-09-17	2015-03-19	Pfeiffer Vacuum Gmbh	Anordnung mit einer Vakuumpumpe sowie Verfahren zur Kompensation eines Magnetfeldes wenigstens eines in einer Vakuumpumpe angeordneten, ein magnetisches Störfeld erzeugenden Bauteiles
DE102013022539B3 (de)	2013-11-06	2022-04-14	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE102013112185B4 (de)	2013-11-06	2022-04-14	Pfeiffer Vacuum Gmbh	Vakuumpumpe sowie Vakuumpumpe mit wenigstens einer Turbomolekularpumpstufe
DE102013114576A1 (de) *	2013-12-19	2015-06-25	Pfeiffer Vacuum Gmbh	Statorscheibe
DE102014100207B4 (de) *	2014-01-09	2020-07-09	Pfeiffer Vacuum Gmbh	Statorscheibe
EP3051140B1 (fr) *	2015-01-29	2018-01-10	Pfeiffer Vacuum Gmbh	Disque de stator pour une pompe à vide
EP3916235B1 (fr) *	2020-05-27	2023-04-26	Pfeiffer Vacuum Technology AG	Procédé de fabrication d'une pompe à vide

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0967395A2 (fr) *	1998-06-23	1999-12-29	Seiko Seiki Kabushiki Kaisha	Pompe turbo moléculaire
JP2004353652A (ja) *	2003-05-01	2004-12-16	Osaka Vacuum Ltd	分子ポンプ

2010
- 2010-11-26 DE DE102010052660A patent/DE102010052660A1/de not_active Withdrawn
2011
- 2011-10-27 EP EP11008602.2A patent/EP2458222B1/fr not_active Not-in-force

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0967395A2 (fr) *	1998-06-23	1999-12-29	Seiko Seiki Kabushiki Kaisha	Pompe turbo moléculaire
JP2004353652A (ja) *	2003-05-01	2004-12-16	Osaka Vacuum Ltd	分子ポンプ

Also Published As

Publication number	Publication date
DE102010052660A1 (de)	2012-05-31
EP2458222B1 (fr)	2017-09-27
EP2458222A2 (fr)	2012-05-30

Publication	Publication Date	Title
EP2458222A3 (fr)	2016-03-09	Pompe turbomoléculaire
EP2677174A3 (fr)	2018-07-11	Roue de ventilateur et moteur électrique
EP2476865A3 (fr)	2015-07-29	Virole pour turbomachine
EP2789860A3 (fr)	2015-05-13	Rotor caréné d'un compresseur centrifuge et son procédé de fabrication
EP2778431A3 (fr)	2014-12-03	Compresseurs centrifuges et procédés de conception d'aubes de diffuseur pour ceux-ci
EP2196679A3 (fr)	2013-12-18	Roue pour un ventilateur radiale
EP4279119A3 (fr)	2024-01-31	Pompe à sang
EP2453138A3 (fr)	2017-04-19	Ventilateur diagonal
RU2016128925A (ru)	2018-01-23	Деталь или узел газотурбинного двигателя и соответствующий газотурбинный двигатель
EP1744013A3 (fr)	2008-09-10	Procédé de montage et de verrouillage tangentiel d'aubes de rotor et aube de rotor
EP2631488A3 (fr)	2016-08-17	Pompe à vide
WO2010059572A8 (fr)	2011-01-06	Roue à aubes de mélangeur
EP2597270A3 (fr)	2018-03-21	Ensemble carter de turbomachine
EP2660957A3 (fr)	2015-05-06	Procédé d'assemblage pour rotors à induction
EP2993357A3 (fr)	2016-04-13	Étage de compresseur radial
EP2505851A3 (fr)	2014-07-16	Aubage de stator pour un compresseur axial dans une turbomachine
EP4397866A3 (fr)	2024-09-04	Roue à aubes pour pompe centrifuge
EP2090748A3 (fr)	2010-05-19	Ensemble d'une virole pour une turbomachine
EP2410131A3 (fr)	2017-08-02	Rotor d'une turbomachine
EP2253851A3 (fr)	2014-07-09	Pompe à vide
EP2458221A3 (fr)	2016-03-02	Pompe turbomoléculaire
RU2017113691A (ru)	2018-10-24	Рабочее колесо центробежного компрессора и центробежный компрессор
EP2460940A3 (fr)	2014-12-10	Unité ventilateur pour une drague aspiratrice
EP2811117A3 (fr)	2015-02-25	Anneau de renforcement pour une turbomachine
EP2800258A3 (fr)	2016-01-20	Machine électrique

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