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EP2339332A3 - X-ray optical arrangement with two focussing elements - Google Patents

X-ray optical arrangement with two focussing elements Download PDF

Info

Publication number
EP2339332A3
EP2339332A3 EP10193792.8A EP10193792A EP2339332A3 EP 2339332 A3 EP2339332 A3 EP 2339332A3 EP 10193792 A EP10193792 A EP 10193792A EP 2339332 A3 EP2339332 A3 EP 2339332A3
Authority
EP
European Patent Office
Prior art keywords
sample
ray
focusing element
ray optical
intermediate focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10193792.8A
Other languages
German (de)
French (fr)
Other versions
EP2339332A2 (en
EP2339332B1 (en
Inventor
Christoph Ollinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker AXS SE
Original Assignee
Bruker AXS SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bruker AXS SE filed Critical Bruker AXS SE
Publication of EP2339332A2 publication Critical patent/EP2339332A2/en
Publication of EP2339332A3 publication Critical patent/EP2339332A3/en
Application granted granted Critical
Publication of EP2339332B1 publication Critical patent/EP2339332B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/064—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Ein röntgenoptischer Aufbau (1), umfassend
• eine Position für eine Röntgenquelle (2),
• eine Position für eine Probe (3),
• ein erstes fokussierendes Element (4), mit dem Röntgenlicht von der Position der Röntgenquelle (2) über einen Zwischenfokus (5) auf die Position der Probe (3) gerichtet wird, und
• einen Röntgendetektor (6), der auf einem Kreisbogen (7) mit Radius R um die Position der Probe (3) bewegbar ist,

ist dadurch gekennzeichnet, dass der Aufbau weiterhin umfasst:
• ein zweites fokussierendes Element (8), mit welchem ein Teil des vom Zwischenfokus (5) ausgehenden Röntgenlichts auf die Position der Probe (3) gerichtet wird, und
• ein Blendensystem (9), mit welchem zwischen einer Beleuchtung der Position der Probe (3)
○ ausschließlich vom Zwischenfokus (5) direkt ( = erster Strahlengang (10')) oder
○ ausschließlich über das zweite fokussierende Element (8) (= zweiter Strahlengang (10"))

ausgewählt werden kann.An X-ray optical structure (1) comprising
A position for an X-ray source (2),
A position for a sample (3),
A first focusing element (4), with which X-ray light is directed from the position of the X-ray source (2) via an intermediate focus (5) to the position of the sample (3), and
An X-ray detector (6) which is movable on a circular arc (7) of radius R about the position of the sample (3),

characterized in that the structure further comprises:
A second focusing element (8), with which a part of the X-ray from the intermediate focus (5) is directed to the position of the sample (3), and
A diaphragm system (9) with which between a lighting of the position of the sample (3)
○ exclusively from the intermediate focus (5) directly (= first beam path (10 ')) or
○ exclusively via the second focusing element (8) (= second beam path (10 "))

can be selected.

Durch die Erfindung wird ein Aufbau vorgeschlagen, bei dem ein Wechseln zwischen Reflexions- und Transmissionsgeometrie erleichtert ist, insbesondere wobei Umbau- und Justagearbeiten minimiert oder überflüssig sind.

Figure imgaf001
The invention proposes a construction in which a change between reflection and transmission geometry is facilitated, in particular where conversion and adjustment work are minimized or superfluous.
Figure imgaf001
EP10193792.8A 2009-12-08 2010-12-06 X-ray optical arrangement with two focussing elements Active EP2339332B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009047672.5A DE102009047672C5 (en) 2009-12-08 2009-12-08 X-ray optical construction with two focusing elements

Publications (3)

Publication Number Publication Date
EP2339332A2 EP2339332A2 (en) 2011-06-29
EP2339332A3 true EP2339332A3 (en) 2013-05-29
EP2339332B1 EP2339332B1 (en) 2018-12-05

Family

ID=43769220

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10193792.8A Active EP2339332B1 (en) 2009-12-08 2010-12-06 X-ray optical arrangement with two focussing elements

Country Status (3)

Country Link
US (1) US8345822B2 (en)
EP (1) EP2339332B1 (en)
DE (1) DE102009047672C5 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015226101A1 (en) 2015-12-18 2017-06-22 Bruker Axs Gmbh X-ray optics assembly with switching system for three beam paths and associated X-ray diffractometer
DE102016203588A1 (en) 2016-03-04 2017-09-07 Bruker Biospin Gmbh Low-leakage permanent magnet arrangement for MR apparatuses
AT523121B1 (en) 2019-10-21 2021-12-15 Anton Paar Gmbh X-ray device with multiple beam paths

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10141958A1 (en) * 2001-08-28 2003-04-03 Bruker Axs Gmbh X-ray diffractometer
US6807251B2 (en) * 2001-12-28 2004-10-19 Rigaku Corporation X-ray diffraction apparatus
WO2011002037A1 (en) * 2009-07-01 2011-01-06 株式会社リガク X-ray device, method for using same, and method for applying x-rays

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3757199B2 (en) * 2002-09-03 2006-03-22 株式会社リガク X-ray small angle scattering optical system
JP2004333131A (en) * 2003-04-30 2004-11-25 Rigaku Corp Total reflection fluorescence xafs measuring apparatus
JP4451248B2 (en) * 2004-08-24 2010-04-14 アイシン・エィ・ダブリュ株式会社 Resolver
JP4860418B2 (en) * 2006-10-10 2012-01-25 株式会社リガク X-ray optical system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10141958A1 (en) * 2001-08-28 2003-04-03 Bruker Axs Gmbh X-ray diffractometer
US6807251B2 (en) * 2001-12-28 2004-10-19 Rigaku Corporation X-ray diffraction apparatus
WO2011002037A1 (en) * 2009-07-01 2011-01-06 株式会社リガク X-ray device, method for using same, and method for applying x-rays

Also Published As

Publication number Publication date
US8345822B2 (en) 2013-01-01
DE102009047672A1 (en) 2011-06-09
EP2339332A2 (en) 2011-06-29
DE102009047672B4 (en) 2012-09-27
DE102009047672C5 (en) 2014-06-05
EP2339332B1 (en) 2018-12-05
US20110135059A1 (en) 2011-06-09

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