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EP2320090A3 - High vacuum pump - Google Patents

High vacuum pump Download PDF

Info

Publication number
EP2320090A3
EP2320090A3 EP10013671.2A EP10013671A EP2320090A3 EP 2320090 A3 EP2320090 A3 EP 2320090A3 EP 10013671 A EP10013671 A EP 10013671A EP 2320090 A3 EP2320090 A3 EP 2320090A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
high vacuum
rotor
stator
rolling bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10013671.2A
Other languages
German (de)
French (fr)
Other versions
EP2320090A2 (en
EP2320090B1 (en
Inventor
Mirko Mekota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2320090A2 publication Critical patent/EP2320090A2/en
Publication of EP2320090A3 publication Critical patent/EP2320090A3/en
Application granted granted Critical
Publication of EP2320090B1 publication Critical patent/EP2320090B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Hochvakuumpumpe (100) mit einem Stator (120), einem schnell drehenden Rotor (110), einem Wälzlager (130; 230; 330) und einem Mittel (144; 268; 368) zur Schmierung des Wälzlagers. Die Erfindung schlägt vor, dass das Mittel angepasst ist, durch Entladung des Rotors Überschläge zwischen Stator (120) und Rotor (110) zu verhindern

Figure imgaf001
The invention relates to a high vacuum pump (100) comprising a stator (120), a fast rotating rotor (110), a rolling bearing (130; 230; 330) and a means (144; 268; 368) for lubricating the rolling bearing. The invention proposes that the means is adapted to prevent flashovers between stator (120) and rotor (110) by discharging the rotor
Figure imgaf001
EP10013671.2A 2009-11-06 2010-10-15 High vacuum pump Not-in-force EP2320090B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910052180 DE102009052180A1 (en) 2009-11-06 2009-11-06 High vacuum pump

Publications (3)

Publication Number Publication Date
EP2320090A2 EP2320090A2 (en) 2011-05-11
EP2320090A3 true EP2320090A3 (en) 2017-06-07
EP2320090B1 EP2320090B1 (en) 2019-02-20

Family

ID=43500019

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10013671.2A Not-in-force EP2320090B1 (en) 2009-11-06 2010-10-15 High vacuum pump

Country Status (2)

Country Link
EP (1) EP2320090B1 (en)
DE (1) DE102009052180A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109930A1 (en) * 2011-08-10 2013-02-14 Pfeiffer Vacuum Gmbh Rolling bearing and vacuum pump with roller bearings
DE102011119907A1 (en) * 2011-12-01 2013-06-06 Pfeiffer Vacuum Gmbh Rolling bearing for a vacuum pump
DE102013210109A1 (en) * 2013-05-29 2014-12-04 Pfeiffer Vacuum Gmbh vacuum pump
CN108678975A (en) * 2018-07-17 2018-10-19 中国工程物理研究院机械制造工艺研究所 A kind of anti-vibration molecular pump
EP3594498B1 (en) 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh System with a recirculation device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002009258A1 (en) * 2000-07-21 2002-01-31 Rexroth Indramat Gmbh Rolling bearing arrangement for an electromotor
WO2007022332A2 (en) * 2005-08-16 2007-02-22 The Boc Group, Inc. Turbomolecular pump with static charge control
EP1921322A2 (en) * 2006-11-11 2008-05-14 Pfeiffer Vacuum GmbH Bearing module for a vacuum pump
WO2009004378A2 (en) * 2007-07-02 2009-01-08 Edwards Limited Vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002009258A1 (en) * 2000-07-21 2002-01-31 Rexroth Indramat Gmbh Rolling bearing arrangement for an electromotor
WO2007022332A2 (en) * 2005-08-16 2007-02-22 The Boc Group, Inc. Turbomolecular pump with static charge control
EP1915512A2 (en) * 2005-08-16 2008-04-30 Edwards Vacuum, Inc. Turbomolecular pump with static charge control
EP1921322A2 (en) * 2006-11-11 2008-05-14 Pfeiffer Vacuum GmbH Bearing module for a vacuum pump
WO2009004378A2 (en) * 2007-07-02 2009-01-08 Edwards Limited Vacuum pump

Also Published As

Publication number Publication date
EP2320090A2 (en) 2011-05-11
DE102009052180A1 (en) 2011-05-12
EP2320090B1 (en) 2019-02-20

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