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EP2130025A2 - Élément détecteur d'un capteur de gaz - Google Patents

Élément détecteur d'un capteur de gaz

Info

Publication number
EP2130025A2
EP2130025A2 EP08708915A EP08708915A EP2130025A2 EP 2130025 A2 EP2130025 A2 EP 2130025A2 EP 08708915 A EP08708915 A EP 08708915A EP 08708915 A EP08708915 A EP 08708915A EP 2130025 A2 EP2130025 A2 EP 2130025A2
Authority
EP
European Patent Office
Prior art keywords
sensor element
measuring
electrode
electrodes
branches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08708915A
Other languages
German (de)
English (en)
Inventor
Peer Kruse
Enno Baars
Alexander Hetznecker
Lothar Diehl
Henrik Schittenhelm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP2130025A2 publication Critical patent/EP2130025A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths

Definitions

  • the present invention relates to a sensor element for determining a gas component or of particles in a sample gas, and to a method for its production and its use according to the preamble of the independent claims.
  • DE 10 2004 046 882 A1 discloses a sensor for detecting soot in a fluid flow, which sensor is designed on the basis of a ceramic substrate. It comprises two spaced-apart, designed as interdigital electrodes measuring electrodes which are exposed to the investigated combustion exhaust gas. If soot deposits between the measuring electrodes, the insulation resistance of the ceramic material is reduced. This is detected and assigned to a soot concentration in the fluid stream.
  • a heating element of the sensor makes it possible to free the electrodes or their surroundings thermally from deposited soot particles.
  • the object of the present invention is to provide a sensor element for sensors for determining a gas component or of particles in a measurement gas or a method for the production thereof, the sensor functionality of which is essentially independent of manufacturing tolerances during the singulation of the sensor elements.
  • the measuring electrodes of the sensor element are positioned on a surface of the sensor element such that they can be severed during the singulation process of the sensor elements without being impaired in their function. For this reason, it is possible to deliberately guide the measuring electrodes of the sensor element to the outer edge of the sensor element. In this way, on the one hand a copy scattering by the singulation process is avoided and on the other the sensor sensitivity increases disproportionately, since an increase of the sensitive area is achieved and, moreover, the sensitivity of electrodes in the area of the outer edge of a sensor element due to the favorable Ansröm argue for a metered sample gas is particularly pronounced.
  • the measuring electrodes are designed as interdigital electrodes whose branches have a spacing of between 40 and 200 ⁇ m. This way is reliable ensures that even low particle concentrations can be detected in a manageable time period.
  • the sensor element has a heating element or a temperature sensor. In this way, a temporary heating and regeneration of the sensor element is possible as well as a temperature compensation of the measurement signals determined with the sensor element.
  • the sensor element described can be used advantageously for determining soot in exhaust gases of internal combustion engines or stationary incinerators.
  • Figure 1 is a schematic representation of a sensor element for determining
  • Figure 2 is a schematic representation of a sensor element for determining
  • FIG. 1 shows a basic structure of a first embodiment of the present invention.
  • a ceramic sensor element which serves to determine a particle concentration, such as the soot concentration, in a gas mixture surrounding the sensor element.
  • the sensor element 10 comprises, for example, a plurality of ceramic layers 11a and 11b, which form a planar ceramic body. They are preferably made of an electrically insulating material such as alumina, barium-containing alumina or ceria.
  • the ceramic layers of an oxygen-ion-conducting solid electrolyte material such as with Y 2 O 3 stabilized or partially stabilized ZrÜ 2 executed, in which case all electrically conductive leads for measuring electrodes or optionally heating element or temperature sensor by insulating layers, not shown from a electrically insulating ceramic material relative to the surrounding solid electrolyte material are isolated.
  • LTCC Low Temperature Cof ⁇ red Ceramics
  • the integrated shape of the planar ceramic body of the sensor element 10 is produced by laminating together the functional films printed with ceramic films and then sintering the laminated structure in a conventional manner.
  • two measuring electrodes 15, 16 are applied, which are preferably formed as interdigitated interdigital electrodes.
  • the use of interdigital electrodes as measuring electrodes 15, 16 enables a particularly accurate determination of the electrical resistance or the electrical conductivity of the surface material located between the measuring electrodes 15, 16.
  • contact surfaces 18, 20 are provided in the region of an end of the sensor element facing away from the gas mixture, which are connected to the measuring electrodes 15, 16 by electrode feed lines 22, 24.
  • a voltage is applied to the measuring electrodes 15, 16. Since the measuring electrodes 15, 16 are for example applied to the surface of the electrically insulating ceramic layer 11a, substantially no current flow initially occurs between the measuring electrodes 15, 16. If a measuring gas flowing around the sensor element 10 contains electrically conductive particles, in particular soot, so they are deposited on the surface of the ceramic layer 1 Ia. Since soot has a certain electrical conductivity, sufficient loading of the surface of the ceramic layer 11a with carbon black leads to an increasing current flow between the measuring electrodes 15, 16, which correlates with the extent of the loading.
  • a preferably constant direct or alternating voltage is applied to the measuring electrodes 15, 16 and the current flow occurring between the measuring electrodes 15, 16 is determined, an impedance or capacitance change can be detected and the loading of the sensor element with soot can be detected. Furthermore, it can be concluded from the integral of the current flow over time on the deposited particle mass or on the current particle mass flow, in particular soot mass flow, and on the particle concentration in the gas mixture. With this measurement method, the concentration of all those particles in a gas mixture is detected, which influence the electrical conductivity of the located between the measuring electrodes 15, 16 ceramic material positive or negative.
  • the application of the electrode structures of the measuring electrodes 15,16 on the ceramic layer I Ia can be done directly by screen printing in Cofiretechnik or in the wake of the production of the ceramic base support by subsequent baking of the structure by Postfiring.
  • the advantage of Postf ⁇ ring lies in the additional usability of other materials that would not survive a sintering in the context of Cofiring at about 1400 0 C.
  • For applying the measuring electrodes 15,16 by means of post fi ring coating processes offer that work without contact, such as Inkj et techniques.
  • the sensor element 10 furthermore preferably has a ceramic heating element, not shown, which is designed in the form of an electrical resistance conductor and serves to heat the sensor element 10 in particular to the temperature of the gas mixture to be determined or to burn off the soot particles deposited on the large areas of the sensor element.
  • the resistance conductor track is preferably designed in the form of a meander. By applying a corresponding heating voltage to the resistance track, the heating power of the heating element can be regulated accordingly.
  • the sensor element 10 may include a temperature sensor, not shown, which is preferably designed in the form of an electrical resistance track or alternatively as a thermocouple, NTC or PTC resistor.
  • the temperature sensor is used to measure the temperature of the gas mixture and is u.a. for correcting the temperature-dependent measured resistance of the ceramic material located between the measuring electrodes 15, 16 or for correcting the diffusion bonding.
  • the sensor element is used in a sensor for determining the soot concentration in an exhaust gas system and if a separate exhaust gas temperature sensor or alternatively a control device with a temperature model stored as a map exists, then a temperature measuring sensor integrated in the sensor element can be dispensed with.
  • the production of the sensor element 10 takes place by first producing a plurality of ceramic sensor elements on a common ceramic substrate and subsequently separating them. Due to manufacturing tolerances in the production of the sensor elements, for example.
  • the measuring electrodes 15, 16 by screen printing is in conventional sensor elements, only a limited range of the sensor surface available because exceeding this range there is a risk that the conductive paths of the measuring electrodes be damaged in the subsequent separation of the sensor elements and there is a total failure of the sensor element.
  • the arrangement of the measuring electrodes 15, 16 or the electrode leads 22 or 24 in a sensor element according to the invention in such a way that it does not affect the functionality of the measuring electrodes 15, 16 when the conductive paths of one of the measuring electrodes 15, 16 comes.
  • the measuring electrodes 15, 16 are preferably designed as interdigital electrodes, the interdigital electrodes having a series of intermeshing branches 15a, 16a, and a main strand 15b, 16b, respectively, to which the branches 15a, 16a are electrically connected, and the branches of the interdigital electrodes 15a, 16a are aligned substantially parallel to a longitudinal axis of the sensor element 10.
  • the main strands 15b, 16b are preferably guided up to the outer edge of the ceramic layer 11a parallel to a longitudinal axis of the sensor element 10 and thus positioned over the entire width of the sensor element 10, so that they are severed when the sensor element 10 is singulated.
  • the particular advantage of this electrode arrangement is that the sensitive area of the sensor element 10 formed by the interdigitated measuring electrodes 15, 16 is maximized and that the sensitive area is extended, in particular, into the area of the outer edges of the ceramic layer 11a, which is responsible for the sensitivity of the sensor element 10 is of great importance.
  • At least one of the electrode leads 22, 24 is guided in another layer plane of the sensor element 10, for example in the layer plane of the ceramic layer 11b.
  • the contacting of the electrode feed line 22 guided in another layer plane of the ceramic sensor element 10 takes place by means of plated-through holes in order to ensure the electrical connection of the electrode feed line 22 to the contact point 20 or the measuring electrode 15.
  • the electrode leads 22, 24 are preferably applied with a safety margin to the outer edges of the sensor element 10 on the ceramic layer I Ia, I Ib, as in a separation of the same, the associated measuring electrode 15,16 would be inoperative.
  • the branches 15 a, 16 a at least in regions a greater distance from a longitudinal axis of symmetry of the sensor element 10 than the electrode leads 22, 24th
  • one of the two measuring electrodes 15, 16 is preferably designed in the form of two partial electrodes 151, 1511.
  • Both sub-electrodes 151, 1511 have a common electrode lead 22, which branches, for example, in the region of the measuring electrode 15, wherein each sub-electrode 151, 1511 is contacted by a branch.
  • the two sub-electrodes 151, 1511 are positioned on the surface of the ceramic layer 11a in such a way that the electrode lead 24 of the second measuring electrode 16 can be guided centrally between the two sub-electrodes 151, 1511 in particular without causing electrical contact with one of the electrodes two partial electrodes 151, 1511 comes.
  • each of the sub-electrodes 151, 1511 has a separate electrode lead and thus three contact points for contacting the measuring electrodes 151, 1511, 16 are provided.
  • the sensor element according to the present invention is particularly suitable for determining the soot concentration in exhaust gases of internal combustion engines or stationary combustion devices such as heating systems, turbines or power plants. However, it is also suitable for determining the particle concentration in fluids, as used for example in the chemical industry.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Elément détecteur pour déterminer une composante gaz ou des particules contenues dans un gaz à mesurer, comprenant une première et une deuxième électrode de mesure (15, 16), lesdites électrodes de mesure (15, 16) étant réalisées comme électrodes interdigitales qui présentent une série de ramifications (15a, 16a) et respectivement une branche principale (15b, 16b) qui permet le raccordement électrique des ramifications (15a, 15b), les ramifications (15a, 16a) des électrodes interdigitales étant orientées sensiblement parallèle à un axe longitudinal de l'élément détecteur (10).
EP08708915A 2007-03-21 2008-02-12 Élément détecteur d'un capteur de gaz Withdrawn EP2130025A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007013522A DE102007013522A1 (de) 2007-03-21 2007-03-21 Sensorelement eines Gassensors
PCT/EP2008/051682 WO2008113644A2 (fr) 2007-03-21 2008-02-12 Élément détecteur d'un capteur de gaz

Publications (1)

Publication Number Publication Date
EP2130025A2 true EP2130025A2 (fr) 2009-12-09

Family

ID=39433883

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08708915A Withdrawn EP2130025A2 (fr) 2007-03-21 2008-02-12 Élément détecteur d'un capteur de gaz

Country Status (4)

Country Link
US (1) US8402813B2 (fr)
EP (1) EP2130025A2 (fr)
DE (1) DE102007013522A1 (fr)
WO (1) WO2008113644A2 (fr)

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CN101965511A (zh) * 2008-02-27 2011-02-02 沃尔沃技术公司 用于检测粒子的方法及布置
JP2011247650A (ja) * 2010-05-24 2011-12-08 Denso Corp 粒子状物質検出センサ、及び粒子状物質検出センサユニット
DE102010048748A1 (de) * 2010-10-16 2012-04-19 Man Truck & Bus Ag Verfahren und Vorrichtung zur Bestimmung der Russkonzentration im Motoröl von Brennkraftmaschinen
JP5240679B2 (ja) * 2011-01-20 2013-07-17 株式会社デンソー 検出装置
EP2492481A1 (fr) * 2011-02-22 2012-08-29 Delphi Technologies Holding S.à.r.l. Surveillance de capacité fonctionnelle de capteur de suie
KR101389971B1 (ko) * 2011-03-24 2014-05-08 익스팬테크주식회사 매립형 전극을 구비한 센서 및 그 제조방법
US8677803B2 (en) * 2011-06-27 2014-03-25 Delphi Technologies, Inc. Particulate matter detection method for a particulate matter sensor
JP5709808B2 (ja) * 2012-08-02 2015-04-30 株式会社日本自動車部品総合研究所 粒子状物質検出素子の製造方法、並びに、粒子状物質検出センサ
EP2833128A1 (fr) * 2013-07-30 2015-02-04 Sensirion AG Capteur chimique d'oxyde métallique intégré
US9638127B2 (en) * 2014-01-28 2017-05-02 Delphi Technologies, Inc. Method of verifying particulate matter sensor validity
DE102014208736A1 (de) * 2014-05-09 2015-11-26 Robert Bosch Gmbh Sensor zur Detektion von Teilchen
DE102015213270A1 (de) * 2015-07-15 2017-01-19 Ust Umweltsensortechnik Gmbh Keramisches Gas- und Temperatursensorelement
US10241021B2 (en) 2015-07-22 2019-03-26 International Business Machines Corporation Measurement of particulate matter deliquescence relative humidity
DE102017210625A1 (de) * 2017-06-23 2018-12-27 Robert Bosch Gmbh Resistiver Partikelsensor
US11650144B2 (en) * 2020-02-11 2023-05-16 Colorado State University Research Foundation Interdigitated capacitive sensor for real-time monitoring of sub-micron and nanoscale particulate matters
TWI821853B (zh) * 2022-01-05 2023-11-11 財團法人工業技術研究院 微機電感測裝置及其感測模組
US11952905B1 (en) 2022-10-07 2024-04-09 Rtx Corporation Detecting engine exhaust debris using saturation current

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US5698089A (en) * 1995-03-27 1997-12-16 California Institute Of Technology Sensor arrays for detecting analytes in fluids
DE19751128A1 (de) * 1997-11-19 1999-05-20 Bosch Gmbh Robert Sensorelement und Verfahren zur Herstellung eines Sensorelements
DE102004045210A1 (de) * 2004-09-17 2006-04-06 Infineon Technologies Ag Sensor-Anordnung und Verfahren zum Ermitteln eines Sensorereignisses
DE102005030134A1 (de) * 2005-06-28 2007-01-04 Siemens Ag Sensor und Betriebsverfahren zur Detektion von Ruß
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Title
See also references of WO2008113644A2 *

Also Published As

Publication number Publication date
WO2008113644A2 (fr) 2008-09-25
US8402813B2 (en) 2013-03-26
WO2008113644A3 (fr) 2009-04-02
US20100180668A1 (en) 2010-07-22
DE102007013522A1 (de) 2008-09-25

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