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EP2039215B1 - Electroacoustic transducer - Google Patents

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Publication number
EP2039215B1
EP2039215B1 EP07763720.5A EP07763720A EP2039215B1 EP 2039215 B1 EP2039215 B1 EP 2039215B1 EP 07763720 A EP07763720 A EP 07763720A EP 2039215 B1 EP2039215 B1 EP 2039215B1
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Prior art keywords
sound
electroacoustic transducer
transducer according
laser
light
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German (de)
French (fr)
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EP2039215A1 (en
Inventor
Balthasar Fischer
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XARION Laser Acoustics GmbH
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XARION Laser Acoustics GmbH
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound

Definitions

  • the invention relates to the faithful conversion of acoustic signals (sounds, speech and music) into electrical signals.
  • the electrical signals can then be transmitted or stored using conventional methods.
  • a microphone is introduced, which converts the sound waves directly into optical and then into electrical signals, without the help of moving components such as a membrane would be necessary.
  • the novel microphone uses the influence of sound waves, more precisely their pressure fluctuations, on the speed of light of a laser beam, which traverses the medium of the sound field.
  • the change in the speed of light ⁇ c is proportional to the sound pressure p .
  • this small change .DELTA.c can be determined and then converted into an electrical signal proportional to the sound pressure. This is the output of the new microphone.
  • the sound pressure deforms elastic components, e.g. a membrane.
  • the deformation is converted into the electrical measurement signal.
  • Examples of electroacoustic transducers without mechanical parts can be found in the JP 60 028100A , of the US 6,590,661 and the GB 386,315 being found.
  • the mechanical systems have natural oscillations and their deflection is limited, whereby the electrical output signal is partially falsified. It is difficult to reliably compensate for such influences in the wide pressure range (threshold of hearing 20 pPa, threshold of pain 100 Pa) and in the wide frequency range (20 Hz to 20 kHz).
  • the mechanical systems also respond to structure-borne noise and air currents, which can lead to interference signals.
  • Sensitive, accurate and low-noise microphones are usually not sufficiently small and thus disturb the sound field to be measured.
  • Electromagnetic stray fields can affect the output signal in the case of electrically measuring systems (capacitor, plunger coil).
  • What is desired is a sound transducer that converts the sound waves undistorted into electrical signals and thereby manages without moving components. It should work in the entire audible frequency range and at all volumes.
  • the refractive index of air at 15 ° C and under a pressure of 0.101 MPa is 1.000326 for light of wavelength 0.2 ⁇ m and 1.000274 for light of wavelength 1 ⁇ m. It is thus greater by 326 ⁇ 10 -6 for UV light and 274 ⁇ 10 -6 for IR light than the refractive index 1 in vacuum.
  • the speed of light in air decreases by 0.9 m / s when the air pressure is increased by 1 Pa.
  • the change of the speed of light according to Eq. 3 can be used to determine the sound pressure: ⁇ c of the light beam is proportional to the sound pressure p in the sound field traversed.
  • the one beam After the division at the mirror B, the one beam is guided through the sound field S on the path of the length L 1 .
  • the other beam travels along the path of length L 2 through the sound-isolated housing G. Heide rays interfere behind the mirror C.
  • the detector H determines the intensity of the light and outputs a proportional electrical signal.
  • Trigonometric transformation I I 0 - I 0 cos ⁇ c M L 1 - L 2 cos ⁇ c M L 1 ⁇ c c M - I 0 sin ⁇ c M L 1 - L 2 sin ⁇ c M L 1 ⁇ c c M
  • the source of radiation is a laser diode made of a powerful green laser pointer. It is a diode-pumped neodymium yttrium aluminum garnet laser (Nd: YAG laser) with frequency doubling. The wavelength is 532 nm, the output power is a maximum of 5 mW.
  • the laser has been removed from the housing and mounted on the optical table by means of a holder element.
  • beam splitter cubes are used, since they separate the beam cleaner, in comparison to a semitransparent mirror, ie do not cause any secondary reflections.
  • silvered mirrors are used to achieve the highest possible reflectance.
  • the detector is a photodiode that provides an output signal of 0.4 A / W with an already integrated preamplifier (Newport Battery Biased Silicon Pin Detector). The output of the detector is fed to a digital storage oscilloscope (Tektronix TDS220).
  • the sound source is an Elac TM speaker connected to a small amplifier.
  • the signals are generated by a function generator (KR-Lab Sweep Generator F 47).
  • three sine tones generated by the tone generator at 500 Hz, 1 kHz and 2 kHz were measured by the diaphragmless microphone and displayed on the oscilloscope as a function of time.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Description

1. Gegenstand der Erfindung1. Subject of the invention

Die Erfindung betrifft die getreue Umwandlung von akustischen Signalen (Geräusche, Sprache und Musik) in elektrische Signale. Die elektrischen Signale lassen sich dann mit herkömmlichen Methoden übertragen oder speichern. Hier wird ein Mikrofon vorgestellt, das die Schallwellen direkt in optische und danach in elektrische Signale umwandelt, ohne dass die Hilfe beweglicher Bauteile wie beispielsweise einer Membran dazu nötig wäre.The invention relates to the faithful conversion of acoustic signals (sounds, speech and music) into electrical signals. The electrical signals can then be transmitted or stored using conventional methods. Here, a microphone is introduced, which converts the sound waves directly into optical and then into electrical signals, without the help of moving components such as a membrane would be necessary.

Dafür benützt das neuartige Mikrofon den Einfluss der Schallwellen, genauer ihrer Druckschwankungen, auf die Lichtgeschwindigkeit eines Laserstrahls, der das Medium des Schallfeldes durchquert. Die Änderung der Lichtgeschwindigkeit Δc ist proportional zum Schalldruck . Mit Hilfe einer Interferenzanordnung kann diese kleine Änderung Δc bestimmt und dann in ein dem Schalldruck proportionales elektrisches Signal gewandelt werden. Das ist das Ausgangssignal des neuen Mikrofons.For this purpose, the novel microphone uses the influence of sound waves, more precisely their pressure fluctuations, on the speed of light of a laser beam, which traverses the medium of the sound field. The change in the speed of light Δc is proportional to the sound pressure p . By means of an interference arrangement, this small change .DELTA.c can be determined and then converted into an electrical signal proportional to the sound pressure. This is the output of the new microphone.

2. Stand der Technik2. State of the art

Bei den heute verwendeten Mikrofonen (Schallwandlern) verformt der Schalldruck elastische Bauteile, z.B. eine Membran. Die Verformung wird in das elektrische Messsignal umgewandelt.In the microphones (sound transducers) used today, the sound pressure deforms elastic components, e.g. a membrane. The deformation is converted into the electrical measurement signal.

Sehr verbreitet ist das dynamische Mikrofon, bei dem die Auslenkung der Membran eine Spannung in einer Spule induziert. Die grösste Dynamik erreicht heute das Kondensatormikrofon, bei dem die Verformung der Membran zu einer Änderung der Kapazität des Kondensators führt. Seit kürzerer Zeit gibt es auch Mikrofone, bei denen optische Methoden (z.B. Interferenz oder Reflexion) zur Messung der Membranauslenkung dienen. Stets sind bewegliche oder verformbare Materialien involviert (Membran, Tauchspule, Bändchen, Kohlestaub).Very common is the dynamic microphone, in which the deflection of the membrane induces a voltage in a coil. The greatest dynamics reached today the condenser microphone, at the deformation of the membrane leads to a change in the capacitance of the capacitor. For a short time, there are also microphones in which optical methods (eg interference or reflection) are used to measure the diaphragm deflection. There are always moving or deformable materials involved (membrane, plunger, ribbon, carbon dust).

Beispiele für elektroakustische Wandler ohne mechanische Teile können in der JP 60 028100A , der US 6,590,661 und der GB 386,315 gefunden werden.Examples of electroacoustic transducers without mechanical parts can be found in the JP 60 028100A , of the US 6,590,661 and the GB 386,315 being found.

3. Nachteile3. Disadvantages

Die mechanischen Systeme besitzen Eigenschwingungen und ihre Auslenkung ist beschränkt, wodurch das elektrische Ausgangssignal teilweise verfälscht wird. Es ist schwierig, solche Einflüsse in dem großen Druckbereich (Hörschwelle 20 pPa, Schmerzgrenze 100 Pa) und in dem weiten Frequenzbereich (20 Hz bis 20 kHz) zuverlässig zu kompensieren.The mechanical systems have natural oscillations and their deflection is limited, whereby the electrical output signal is partially falsified. It is difficult to reliably compensate for such influences in the wide pressure range (threshold of hearing 20 pPa, threshold of pain 100 Pa) and in the wide frequency range (20 Hz to 20 kHz).

Die mechanischen Systeme sprechen auch auf Körperschall und auf Luftströmungen an, was zu Störsignalen führen kann.The mechanical systems also respond to structure-borne noise and air currents, which can lead to interference signals.

Empfindliche, genaue und rauscharme Mikrofone sind in der Regel nicht hinreichend klein und stören so das zu messende Schallfeld.Sensitive, accurate and low-noise microphones are usually not sufficiently small and thus disturb the sound field to be measured.

Bei den elektrisch messenden Systemen (Kondensator, Tauchspule) können elektromagnetische Streufelder das Ausgangssignal beeinträchtigen.Electromagnetic stray fields can affect the output signal in the case of electrically measuring systems (capacitor, plunger coil).

4. Aufgabe4th task

Gewünscht wird ein Schallwandler, der die Schallwellen unverzerrt in elektrische Signale umsetzt und dabei ohne bewegliche Bauteile auskommt. Er soll im gesamten hörbaren Frequenzbereich und bei allen Lautstärken arbeiten.What is desired is a sound transducer that converts the sound waves undistorted into electrical signals and thereby manages without moving components. It should work in the entire audible frequency range and at all volumes.

5. Lösung5th solution

Die Aufgabe wird gelöst mit einem elektroakustischen Wandler gemäß Anspruch 1. Die Lichtgeschwindigkeit in einem Medium ist c M = c n

Figure imgb0001

  • c: Lichtgeschwindigkeit im Vakuum c = 3·108 ms
  • n: Brechzahl des Mediums
The object is achieved with an electroacoustic transducer according to claim 1. The speed of light in a medium c M = c n
Figure imgb0001
  • c: speed of light in vacuum c = 3 × 10 8 ms
  • n: refractive index of the medium

Die Brechzahl von Luft bei 15°C und unter einem Druck von 0,101 MPa beträgt 1,000326 für Licht der Wellenlänge 0,2 µm und 1,000274 für Licht der Wellenlänge 1 µm. Sie ist also für UV-Licht um 326·10-6 und für IR-Licht um 274·10-6 grösser als die Brechzahl 1 im Vakuum.The refractive index of air at 15 ° C and under a pressure of 0.101 MPa is 1.000326 for light of wavelength 0.2 μm and 1.000274 for light of wavelength 1 μm. It is thus greater by 326 · 10 -6 for UV light and 274 · 10 -6 for IR light than the refractive index 1 in vacuum.

Mit dem Druck ändert sich auch die Brechzahl etwa wie dn dp = 0,3 10 3 10 5 Pa = 3.10 9 1 Pa

Figure imgb0002
doch abhängig von der Lichtwellenlänge. Damit ändert sich auch die Lichtgeschwindigkeit (Gl. 1) gemäss: Δ c M = c n 2 dn dp Δ p
Figure imgb0003
With the pressure, the refractive index changes as well dn dp = 0.3 10 - 3 10 5 Pa = 3.10 - 9 1 Pa
Figure imgb0002
but depending on the wavelength of light. This also changes the speed of light (equation 1) according to: Δ c M = - c n 2 dn dp Δ p
Figure imgb0003

Beispielsweise nimmt die Lichtgeschwindigkeit in Luft um 0,9 m/s ab, wenn der Luftdruck um 1 Pa erhöht wird.For example, the speed of light in air decreases by 0.9 m / s when the air pressure is increased by 1 Pa.

Die Veränderung der Lichtgeschwindigkeit nach Gl. 3 kann benützt werden, um den Schalldruck zu bestimmen: Δc des Lichtstrahls ist proportional zum Schalldruck in dem durchquerten Schallfeld.The change of the speed of light according to Eq. 3 can be used to determine the sound pressure: Δc of the light beam is proportional to the sound pressure p in the sound field traversed.

Mit Hilfe der Interferenz der zwei Hälften eines geteilten Laserstrahls kann diese kleine Geschwindigkeitsänderung Δc bestimmt werden. In Fig. 1 ist der Aufbau schematisch dargestellt.With the help of the interference of the two halves of a split laser beam, this small speed change Δc can be determined. In Fig. 1 the structure is shown schematically.

Nach der Teilung am Spiegel B wird der eine Strahl auf dem Weg der Länge L1 durch das Schallfeld S geführt. Der andere Strahl verläuft auf dem Weg der Länge L2 durch das schallisolierte Gehäuse G. Heide Strahlen interferieren hinter dem Spiegel C. Der Detektor H bestimmt die Intensität des Lichts und gibt ein proportionales elektrisches Signal.After the division at the mirror B, the one beam is guided through the sound field S on the path of the length L 1 . The other beam travels along the path of length L 2 through the sound-isolated housing G. Heide rays interfere behind the mirror C. The detector H determines the intensity of the light and outputs a proportional electrical signal.

Die beiden Strahlen werden durch die zwei Wellengleichungen beschrieben: E 1 = Acos ωt L 1 k 1

Figure imgb0004
E 2 = A cos ωt L 2 k 2
Figure imgb0005

A:
Amplitude
ω:
Kreisfrequenz ω = 2πν; ν: Frequenz des Lichts
L1:
Weg zwischen den Spiegeln im Schallfeld S
L2:
Weg im schallisolierten Gehäuse G
(Anmerkung: Die übrigen Lichtwege werden als gleich lang angenommen. Sie sind dann für die Rechnung ohne Einfluß)
k1:
Wellenzahl im Schallfeld k 1 = 2 π λ 1 = ω c M + Δ c = ω c M 1 Δ c c M
Figure imgb0006
(Anmerkung: Die Reihe darf nach dem ersten Glied abgebrochen werden, weil Δ c c M
Figure imgb0007
sehr klein ist gegen 1)
k2:
Wellenzahl im geschützten Gehäuse k 2 = 2 π λ 2 = ω c M
Figure imgb0008
λ1 und λ2:
Wellenlängen
The two rays are described by the two wave equations: e 1 = Acos .omega.t - L 1 k 1
Figure imgb0004
e 2 = A cos .omega.t - L 2 k 2
Figure imgb0005
A:
amplitude
ω:
Angular frequency ω = 2πν; ν: frequency of the light
L 1 :
Path between the mirrors in Schallfeld S
L 2 :
Way in the soundproof housing G
(Note: The remaining light paths are assumed to be the same length and you will not have any influence on the calculation)
k 1 :
Wave number in the sound field k 1 = 2 π λ 1 = ω c M + Δ c = ω c M 1 - Δ c c M
Figure imgb0006
(Note: The series may be aborted after the first term because Δ c c M
Figure imgb0007
very small is against 1)
k 2 :
Wave number in the protected housing k 2 = 2 π λ 2 = ω c M
Figure imgb0008
λ 1 and λ 2 :
wavelength

Am Empfänger herrscht eine Lichtintensität I proportional zu (E1 + E2)2.At the receiver there is a light intensity I proportional to (E 1 + E 2 ) 2 .

Wegen der zeitlichen Mittelung über eine Lichtperiode fällt die Zeitabhängigkeit fort und für die Intensität am Empfänger ergibt sich I = I 0 1 cos L 1 k 1 L 2 k 2

Figure imgb0009
I = I 0 I 0 cos ω c M L 1 L 2 ω c M Δ c c M L 1
Figure imgb0010
Because of the temporal averaging over a light period, the time dependence continues and for the intensity at the receiver results I = I 0 1 - cos L 1 k 1 - L 2 k 2
Figure imgb0009
I = I 0 - I 0 cos ω c M L 1 - L 2 - ω c M Δ c c M L 1
Figure imgb0010

Trigonometrische Umformung I = I 0 I 0 cos ω c M L 1 L 2 cos ω c M L 1 Δ c c M I 0 sin ω c M L 1 L 2 sin ω c M L 1 Δ c c M

Figure imgb0011
Trigonometric transformation I = I 0 - I 0 cos ω c M L 1 - L 2 cos ω c M L 1 Δ c c M - I 0 sin ω c M L 1 - L 2 sin ω c M L 1 Δ c c M
Figure imgb0011

Über dem Gangunterschied (L1 - L2) läßt sich ω c M L 1 L 2

Figure imgb0012
auf jeden Wert zwischen 0 und 2π einstellen, wobei Vielfache von 2π dazu addiert werden dürfen. Wird dafür der Wert L 1 L 2 = c M ω π 2 + z 2 π
Figure imgb0013
gewählt (z ganze Zahl), so verschwindet die Cosinus-Funktion.About the path difference (L 1 - L 2 ) can be ω c M L 1 - L 2
Figure imgb0012
set to any value between 0 and 2π, where multiples of 2π may be added to it. Will that be the value L 1 - L 2 = c M ω π 2 + z 2 π
Figure imgb0013
selected (z integer), the cosine function disappears.

Es bleibt lediglich I = I 0 I 0 sin 2 π L 1 λ Δ c c M

Figure imgb0014
It only remains I = I 0 - I 0 sin 2 π L 1 λ Δ c c M
Figure imgb0014

Hierbei tritt 2 π λ

Figure imgb0015
mit der Wellenlänge λ an die Stelle von ω c M .
Figure imgb0016
This occurs 2 π λ
Figure imgb0015
with the wavelength λ in the place of ω c M ,
Figure imgb0016

Weil das Argument der Sinus-Funktion sehr klein gegen 1 ist, kann sie näherungsweise durch ihr Argumentersetzt werden.Because the argument of the sine function is very small to 1, it can be approximated by its argument.

Die Abnahme der Intensität I0 - I (gemessen am Empfänger) I 0 I = I 0 2 π L 1 λ Δ c c M

Figure imgb0017
The decrease in intensity I 0 - I (measured at the receiver) I 0 - I = I 0 2 π L 1 λ Δ c c M
Figure imgb0017

Sie ist proportional zur Änderung der Lichtgeschwindigkeit Δc und zur Länge L1 des Lichtwegs im Schallfeld. Wegen G1. (3) ist sie dann auch proportional zum Schalldruck . Auf dieser Proportionalität von Schalldruck und Änderung der Intensität am Empfänger beruht die Funktion des vorgeschlagenen Mikrophons ohne Membran.It is proportional to the change in the speed of light Δc and the length L 1 of the light path in the sound field. Because of G1. (3) then it is also proportional to the sound pressure p . On this proportionality of sound pressure and change in intensity at the receiver, the function of the proposed microphone without membrane based.

6. Die Erfindung wird an einem Ausführungsbeispiel unter Bezugnahme auf die Zeichnung näher erläutert.6. The invention will be explained in more detail using an exemplary embodiment with reference to the drawing.

Ein Prototyp eines membranlosen Mikrophons mit Hilfe von Lichtinterferenz existiert derzeit noch nicht. Hingegen konnte das Prinzip, wie es unter 5. Lösung beschrieben ist, anhand eines Versuchsaufbaus gemäß Fig. 1 bestätigt werden. Als Strahlenquelle dient eine Laserdiode aus einem leistungsstarken grünen Laserpointer. Es handelt sich um einen diodengepumpten Neodym Yttrium-Aluminium-Granat Laser (Nd: YAG-Laser) mit Frequenzverdoppelung. Die Wellenlänge beträgt 532 nm, die Ausgangsleistung beträgt maximal 5 mW.A prototype of a membraneless microphone with the help of light interference does not yet exist. On the other hand, the principle, as described in the 5th solution, could be determined on the basis of a test setup according to Fig. 1 beeing confirmed. The source of radiation is a laser diode made of a powerful green laser pointer. It is a diode-pumped neodymium yttrium aluminum garnet laser (Nd: YAG laser) with frequency doubling. The wavelength is 532 nm, the output power is a maximum of 5 mW.

Der Laser ist aus dem Gehäuse ausgebaut worden und mittels eines Halterelements auf dem optischen Tisch montiert. Zur Strahlteilung werden sogenannte beamsplitter cubes eingesetzt, da sie im Vergleich zu einem halbdurchlässigen Spiegel den Strahl sauberer auftrennen, d.h. keine Sekundärreflexionen verursachen. Ferner werden versilberte Spiegel verwendet, um eine möglichst hohe Reflektanz zu erzielen. Beim Detektor handelt es sich um eine Photodiode, die mit einen bereits integrierten Vorverstärker ein Ausgangssignal von 0,4 A/W liefert (Newport Battery Biased Silicon Pin Detector). Das Ausgangssignal des Detektors wird einem digitalen Speicheroszilloskop (Tektronix TDS220) zugeführt.The laser has been removed from the housing and mounted on the optical table by means of a holder element. For beam splitting, so-called beam splitter cubes are used, since they separate the beam cleaner, in comparison to a semitransparent mirror, ie do not cause any secondary reflections. Furthermore, silvered mirrors are used to achieve the highest possible reflectance. The detector is a photodiode that provides an output signal of 0.4 A / W with an already integrated preamplifier (Newport Battery Biased Silicon Pin Detector). The output of the detector is fed to a digital storage oscilloscope (Tektronix TDS220).

Als Schallquelle kommt ein Elac™ Lautsprecher, angeschlossen an einen kleinen Verstärker, zum Einsatz. Die Signale werden durch einen Funktionsgenerator (KR-Lab Sweep Generator F 47) erzeugt.The sound source is an Elac ™ speaker connected to a small amplifier. The signals are generated by a function generator (KR-Lab Sweep Generator F 47).

Beispielsweise wurden drei von dem Tongenerator erzeugte Sinustöne mit 500 Hz, 1 kHz und 2 kHz von dem membranlosen Mikrofon gemessen und auf dem Oszilloskop als Funktion der Zeit dargestellt.For example, three sine tones generated by the tone generator at 500 Hz, 1 kHz and 2 kHz were measured by the diaphragmless microphone and displayed on the oscilloscope as a function of time.

7. Vorteile der Erfindung7. Advantages of the invention

  • Überraschenderweise gelingt es bereits mit der Experimentierform des neuen Mikrofons, Schallsignale ohne Hilfe bewegter Teile (Membranen), also ohne Mechanik, in elektrische Signale umzuwandeln.Surprisingly, it already succeeds with the experimental form of the new microphone to convert sound signals without the help of moving parts (membranes), ie without mechanics, into electrical signals.
  • Nach der notwendigen Entwicklung, könnte das Mikrofon klein, robust und kompakt gebaut werden. Sein Einfluss auf das Schallfeld wäre dann gering.After the necessary development, the microphone could be made small, robust and compact. His influence on the sound field would then be low.
  • Weil das Mikrofon optisch arbeitet, haben elektromagnetische Störfelder kaum Einfluss.Because the microphone works optically, electromagnetic interference fields have hardly any influence.
  • Das Prinzip der Erfindung kann auch bei anderen Medien als Luft für die Schallmessung eingesetzt werden.The principle of the invention can also be used in other media than air for sound measurement.
  • Dank der Interferenzmethode zwischen den beiden Laserstrahlen bleiben Änderungen des Luftdrucks (Wetter, Arbeitshöhe) ohne Einfluss.Thanks to the interference method between the two laser beams, changes in air pressure (weather, working height) have no effect.

Claims (5)

  1. An electroacoustic membrane-free transducer having:
    a laser source (A);
    a detector (H) having an optical receiver;
    two pairs of plane-parallel immovable mirrors
    a beam splitter (B), which splits a laser beam of a laser source (A) into a first beam and a second beam;
    a sound field (S), through which the first beam is guided; and
    a sound-insulated housing (G), through which the second beam runs;
    the propagation speed of the first beam changing in accordance with the sound pressure in the sound field (S), the detector (H) generating an electrical signal, which depends at least on the change of the propagation speed of the first beam,
    both beams being reflected multiple times in each case between the two pairs of plane-parallel immovable mirrors (e.g. D, E), and the one mirror pair (D, E) and the intermediate space thereof being exposed to the sound,
    characterized in that the second mirror pair and the intermediate space thereof is protected from sound.
  2. The electroacoustic transducer according to Claim 1, characterized in that the variation of the propagation speed of the first beam is detected by means of interference with the second beam.
  3. The electroacoustic transducer according to Claim 1, wherein a path difference between the two laser beams can be set to λ/4 +λz, wherein z is an integer.
  4. The electroacoustic transducer according to Claim 1, characterized in that the pulse rate of the laser source (A) is above the audible range.
  5. The electroacoustic transducer according to Claim 1, in which the housing (G) has an opening for a pressure equalization between the housing interior and the surrounding atmosphere.
EP07763720.5A 2006-06-27 2007-06-26 Electroacoustic transducer Active EP2039215B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT0108206A AT505021B1 (en) 2006-06-27 2006-06-27 MEMBRANLESS MICROPHONE WITH THE HELP OF LIGHT INTERFERENCE
PCT/AT2007/000311 WO2008000007A1 (en) 2006-06-27 2007-06-26 Electroacoustic transducer

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Publication Number Publication Date
EP2039215A1 EP2039215A1 (en) 2009-03-25
EP2039215B1 true EP2039215B1 (en) 2018-08-08

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US (1) US8301029B2 (en)
EP (1) EP2039215B1 (en)
JP (1) JP2009542128A (en)
CN (1) CN101480068A (en)
AT (1) AT505021B1 (en)
WO (1) WO2008000007A1 (en)

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US10352911B2 (en) * 2008-09-12 2019-07-16 Balthasar Fischer Airborne ultrasound testing system for a test object
EP3173781B8 (en) 2015-11-25 2024-06-12 Xarion Laser Acoustics GmbH Airborne ultrasound testing system for a test object
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CN101480068A (en) 2009-07-08
US8301029B2 (en) 2012-10-30
AT505021A4 (en) 2008-10-15
AT505021B1 (en) 2008-10-15
US20090257753A1 (en) 2009-10-15
JP2009542128A (en) 2009-11-26
WO2008000007A1 (en) 2008-01-03

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