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EP1908121A4 - DRAIN-ADVANCED MOSFETS WITH DIODE CLAMPING - Google Patents

DRAIN-ADVANCED MOSFETS WITH DIODE CLAMPING

Info

Publication number
EP1908121A4
EP1908121A4 EP05772304A EP05772304A EP1908121A4 EP 1908121 A4 EP1908121 A4 EP 1908121A4 EP 05772304 A EP05772304 A EP 05772304A EP 05772304 A EP05772304 A EP 05772304A EP 1908121 A4 EP1908121 A4 EP 1908121A4
Authority
EP
European Patent Office
Prior art keywords
drain
diode clamping
mosfets
advanced
advanced mosfets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP05772304A
Other languages
German (de)
French (fr)
Other versions
EP1908121A1 (en
Inventor
Sameer Pendharkar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of EP1908121A1 publication Critical patent/EP1908121A1/en
Publication of EP1908121A4 publication Critical patent/EP1908121A4/en
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/101Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
    • H10D84/151LDMOS having built-in components
    • H10D84/153LDMOS having built-in components the built-in component being PN junction diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/62Capacitors having potential barriers
    • H10D1/66Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/028Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs
    • H10D30/0281Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of lateral DMOS [LDMOS] FETs
    • H10D30/0285Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of lateral DMOS [LDMOS] FETs using formation of insulating sidewall spacers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/351Substrate regions of field-effect devices
    • H10D62/357Substrate regions of field-effect devices of FETs
    • H10D62/364Substrate regions of field-effect devices of FETs of IGFETs
    • H10D62/371Inactive supplementary semiconductor regions, e.g. for preventing punch-through, improving capacity effect or leakage current
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/514Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers
    • H10D64/516Gate electrodes for field-effect devices for FETs for IGFETs characterised by the insulating layers the thicknesses being non-uniform
EP05772304A 2005-07-18 2005-07-18 DRAIN-ADVANCED MOSFETS WITH DIODE CLAMPING Ceased EP1908121A4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2005/025396 WO2007011354A1 (en) 2005-07-18 2005-07-18 Drain-extended mosfets with diode clamp

Publications (2)

Publication Number Publication Date
EP1908121A1 EP1908121A1 (en) 2008-04-09
EP1908121A4 true EP1908121A4 (en) 2009-09-30

Family

ID=37669121

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05772304A Ceased EP1908121A4 (en) 2005-07-18 2005-07-18 DRAIN-ADVANCED MOSFETS WITH DIODE CLAMPING

Country Status (4)

Country Link
EP (1) EP1908121A4 (en)
JP (1) JP2009502041A (en)
KR (1) KR100985373B1 (en)
WO (1) WO2007011354A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009059949A (en) * 2007-08-31 2009-03-19 Sharp Corp Semiconductor device and method for manufacturing semiconductor device
US7838940B2 (en) 2007-12-04 2010-11-23 Infineon Technologies Ag Drain-extended field effect transistor
KR100943504B1 (en) 2007-12-31 2010-02-22 주식회사 동부하이텍 Method of manufacturing MOSPF
JP5534298B2 (en) * 2009-06-16 2014-06-25 ルネサスエレクトロニクス株式会社 Semiconductor device
US8344472B2 (en) * 2010-03-30 2013-01-01 Freescale Semiconductor, Inc. Semiconductor device and method
KR101302108B1 (en) * 2011-12-30 2013-08-30 주식회사 동부하이텍 Drain exteneded mos transistor and method for fabricating the same
JP5960445B2 (en) * 2012-02-23 2016-08-02 ラピスセミコンダクタ株式会社 Semiconductor device
JP2013247188A (en) * 2012-05-24 2013-12-09 Toshiba Corp Semiconductor device
US9129990B2 (en) * 2012-06-29 2015-09-08 Freescale Semiconductor, Inc. Semiconductor device and driver circuit with drain and isolation structure interconnected through a diode circuit, and method of manufacture thereof
KR101694091B1 (en) * 2016-03-03 2017-01-17 강희복 A power supply circuit system using a negative threshold five-terminal NMOS FET device for Flyback inductor schematic application
KR101694092B1 (en) * 2016-03-03 2017-01-17 강희복 A power supply circuit system using a negative threshold five-terminal NMOS FET device for three-phase Flyback inductor schematic application
JP6920137B2 (en) * 2017-08-31 2021-08-18 ルネサスエレクトロニクス株式会社 Semiconductor devices and their manufacturing methods
CN112713182B (en) * 2020-12-29 2022-06-28 浙大城市学院 A silicon carbide cell-level power integrated chip structure

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030173624A1 (en) * 2002-02-23 2003-09-18 Fairchild Korea Semiconductor Ltd. High breakdown voltage low on-resistance lateral DMOS transistor
US20040159891A1 (en) * 2003-02-18 2004-08-19 Kabushiki Kaisha Toshiba Semiconductor device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0936674B1 (en) * 1998-02-10 2006-04-26 STMicroelectronics S.r.l. Integrated circuit comprising a VDMOS transistor protected against overvoltages between source and gate
US6924531B2 (en) * 2003-10-01 2005-08-02 Taiwan Semiconductor Manufacturing Company, Ltd. LDMOS device with isolation guard rings

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030173624A1 (en) * 2002-02-23 2003-09-18 Fairchild Korea Semiconductor Ltd. High breakdown voltage low on-resistance lateral DMOS transistor
US20040159891A1 (en) * 2003-02-18 2004-08-19 Kabushiki Kaisha Toshiba Semiconductor device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PARTHASARATHY V ET AL: "Drain profile engineering of resurf LDMOS devices for ESD ruggedness", PROCEEDINGS OF THE 14TH. INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES & ICS. ISPSD'02. SANTA FE, NM, JUNE 4 - 7, 2002; [INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES & IC'S], NEW YORK, NY : IEEE, US, 4 June 2002 (2002-06-04), pages 265 - 268, XP010591617, ISBN: 978-0-7803-7318-1 *
See also references of WO2007011354A1 *

Also Published As

Publication number Publication date
EP1908121A1 (en) 2008-04-09
KR20080033423A (en) 2008-04-16
JP2009502041A (en) 2009-01-22
WO2007011354A1 (en) 2007-01-25
KR100985373B1 (en) 2010-10-04

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