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EP1907791A4 - Apparatus and method for measuring a glass sheet - Google Patents

Apparatus and method for measuring a glass sheet

Info

Publication number
EP1907791A4
EP1907791A4 EP06787404A EP06787404A EP1907791A4 EP 1907791 A4 EP1907791 A4 EP 1907791A4 EP 06787404 A EP06787404 A EP 06787404A EP 06787404 A EP06787404 A EP 06787404A EP 1907791 A4 EP1907791 A4 EP 1907791A4
Authority
EP
European Patent Office
Prior art keywords
measuring
glass sheet
glass
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06787404A
Other languages
German (de)
French (fr)
Other versions
EP1907791A2 (en
Inventor
Jesse R Frederick
Jeffrey Clinton Mccreary
John C Morrison
Brian P Strines
James P Trice
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of EP1907791A2 publication Critical patent/EP1907791A2/en
Publication of EP1907791A4 publication Critical patent/EP1907791A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C5/00Measuring height; Measuring distances transverse to line of sight; Levelling between separated points; Surveyors' levels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/04Ball or roller bearings
    • F16C29/045Ball or roller bearings having rolling elements journaled in one of the moving parts
    • F16C29/046Ball or roller bearings having rolling elements journaled in one of the moving parts with balls journaled in pockets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
EP06787404A 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet Withdrawn EP1907791A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70332305P 2005-07-27 2005-07-27
PCT/US2006/027492 WO2007015772A2 (en) 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet

Publications (2)

Publication Number Publication Date
EP1907791A2 EP1907791A2 (en) 2008-04-09
EP1907791A4 true EP1907791A4 (en) 2009-12-23

Family

ID=37709041

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06787404A Withdrawn EP1907791A4 (en) 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet

Country Status (6)

Country Link
EP (1) EP1907791A4 (en)
JP (3) JP5469340B2 (en)
KR (1) KR101294450B1 (en)
CN (1) CN101268356B (en)
TW (1) TWI300838B (en)
WO (1) WO2007015772A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5469340B2 (en) * 2005-07-27 2014-04-16 コーニング インコーポレイテッド Apparatus and method for measuring sheet glass
WO2009070262A1 (en) * 2007-11-30 2009-06-04 Corning Incorporated Method of and apparatus for detecting change in shape of a moving substrate
CN102721356A (en) * 2012-06-12 2012-10-10 无锡市麦希恩机械制造有限公司 Inspection device structure for automotive glass skylight
CN103418644B (en) * 2013-09-02 2015-02-18 苏州赛斯德工程设备有限公司 Bending machine with assisted locating jig
JP2017501951A (en) * 2013-11-25 2017-01-19 コーニング インコーポレイテッド Method for determining the shape of a specular reflecting surface that is substantially columnar
CN103673915A (en) * 2013-12-20 2014-03-26 苏州精创光学仪器有限公司 Device for quickly measuring warping degree of touch screen protective glass
CN104006769B (en) * 2014-05-13 2017-01-18 苏州金牛精密机械有限公司 Jig used for detecting planarity of fin tube
CN104310032A (en) * 2014-11-03 2015-01-28 苏州精创光学仪器有限公司 Conveying device of glass measuring system
CN105783794B (en) * 2016-03-22 2019-03-15 阳谷祥光铜业有限公司 A kind of plane monitoring-network method and apparatus
CN105806247A (en) * 2016-05-23 2016-07-27 南京林业大学 Wood board warping online detection device and detection method
CN109737881A (en) * 2019-03-22 2019-05-10 李兆祥 A kind of gear monitoring device
CN112595281B (en) * 2020-12-31 2022-09-27 域鑫科技(惠州)有限公司 Method and medium for rapidly measuring surface profile of workpiece

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1277576A (en) * 1968-06-27 1972-06-14 Ernest James Price Conveyors or supports
JPH06331339A (en) * 1993-05-21 1994-12-02 Hitachi Cable Ltd Method and apparatus for measuring thin plate deformation
US6567169B1 (en) * 1999-08-31 2003-05-20 Koninklijke Philips Electronics N.V. Method of and device for determining the warpage of a wafer
WO2007018902A1 (en) * 2005-07-27 2007-02-15 Corning Incorporated Process and apparatus for measuring the shape of an article

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60146807U (en) * 1984-03-12 1985-09-30 河口湖精密株式会社 Dustproof structure of digital caliper
JPH057532Y2 (en) * 1986-07-07 1993-02-25
US5291269A (en) * 1991-12-06 1994-03-01 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
JP2991932B2 (en) * 1994-07-12 1999-12-20 新日本製鐵株式会社 Steel plate flatness measurement method
JPH08166226A (en) * 1994-12-14 1996-06-25 Casio Comput Co Ltd Flatness measuring device and flatness measuring method using the same
JPH1070179A (en) * 1996-08-28 1998-03-10 Canon Inc Substrate holding device and exposure apparatus using the same
JPH11351857A (en) * 1998-06-08 1999-12-24 Kuroda Precision Ind Ltd Thin plate surface shape measuring method and thin plate surface shape measuring device
JP2000065506A (en) * 1998-08-24 2000-03-03 Ngk Insulators Ltd Thickness measurement jig
US6608689B1 (en) * 1998-08-31 2003-08-19 Therma-Wave, Inc. Combination thin-film stress and thickness measurement device
JP2000314613A (en) * 1999-05-06 2000-11-14 Kobe Steel Ltd Surface profile measuring device
JP4218916B2 (en) * 1999-07-27 2009-02-04 フジノン株式会社 Method of manufacturing support device for object to be measured
JP2001332609A (en) * 2000-03-13 2001-11-30 Nikon Corp Substrate holding device and exposure device
JP2001330430A (en) * 2000-05-22 2001-11-30 Daido Steel Co Ltd Flatness measurement method and flatness measurement device
WO2002013244A2 (en) * 2000-08-08 2002-02-14 Qc Solutions, Inc. Apparatus and method for handling and testing of wafers
JP2004087593A (en) * 2002-08-23 2004-03-18 Nikon Corp Stage equipment and exposure equipment
JP2004303923A (en) * 2003-03-31 2004-10-28 Shimadzu Corp Substrate alignment mechanism and substrate inspection device using the same
US7131211B2 (en) * 2003-08-18 2006-11-07 Micron Technology, Inc. Method and apparatus for measurement of thickness and warpage of substrates
JP5469340B2 (en) * 2005-07-27 2014-04-16 コーニング インコーポレイテッド Apparatus and method for measuring sheet glass

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1277576A (en) * 1968-06-27 1972-06-14 Ernest James Price Conveyors or supports
JPH06331339A (en) * 1993-05-21 1994-12-02 Hitachi Cable Ltd Method and apparatus for measuring thin plate deformation
US6567169B1 (en) * 1999-08-31 2003-05-20 Koninklijke Philips Electronics N.V. Method of and device for determining the warpage of a wafer
WO2007018902A1 (en) * 2005-07-27 2007-02-15 Corning Incorporated Process and apparatus for measuring the shape of an article

Also Published As

Publication number Publication date
KR101294450B1 (en) 2013-08-07
KR20080036118A (en) 2008-04-24
JP2009503504A (en) 2009-01-29
TW200722705A (en) 2007-06-16
JP2014066721A (en) 2014-04-17
JP5469340B2 (en) 2014-04-16
WO2007015772A3 (en) 2007-04-12
CN101268356A (en) 2008-09-17
CN101268356B (en) 2012-07-25
JP5676726B2 (en) 2015-02-25
JP2015062023A (en) 2015-04-02
EP1907791A2 (en) 2008-04-09
TWI300838B (en) 2008-09-11
WO2007015772A2 (en) 2007-02-08
JP6169063B2 (en) 2017-07-26

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20080214

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): DE FR

RIC1 Information provided on ipc code assigned before grant

Ipc: G01N 21/01 20060101AFI20080519BHEP

RBV Designated contracting states (corrected)

Designated state(s): DE FR

A4 Supplementary search report drawn up and despatched

Effective date: 20091123

RIC1 Information provided on ipc code assigned before grant

Ipc: G01B 11/06 20060101ALI20091117BHEP

Ipc: G01B 11/30 20060101AFI20091117BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20100104