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EP1759119B1 - Dispositif pour produire une depression - Google Patents

Dispositif pour produire une depression Download PDF

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Publication number
EP1759119B1
EP1759119B1 EP05733309.8A EP05733309A EP1759119B1 EP 1759119 B1 EP1759119 B1 EP 1759119B1 EP 05733309 A EP05733309 A EP 05733309A EP 1759119 B1 EP1759119 B1 EP 1759119B1
Authority
EP
European Patent Office
Prior art keywords
ejector
display
valve
ejectors
machine control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP05733309.8A
Other languages
German (de)
English (en)
Other versions
EP1759119A1 (fr
Inventor
Kurt Schmalz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
J Schmalz GmbH
Original Assignee
J Schmalz GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by J Schmalz GmbH filed Critical J Schmalz GmbH
Publication of EP1759119A1 publication Critical patent/EP1759119A1/fr
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Anticipated expiration legal-status Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/466—Arrangements of nozzles with a plurality of nozzles arranged in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps

Definitions

  • the invention relates to a device for generating a negative pressure, with a plurality of ejectors.
  • Ejectors are known in a variety of applications and typically serve to create negative pressure using compressed air. Ejectors offer the significant advantage that they can be connected to the generally existing compressed air network and therefore no vacuum lines are required.
  • the ejectors are supplied with compressed air and generate according to the venturi principle, the negative pressure and are usually located directly in the area where the negative pressure is needed. There are therefore no long vacuum channels required, which would have to be evacuated constantly, so that in the case of the use of ejectors, the negative pressure can be provided immediately.
  • the DE-U-201 20 609 discloses a fluidic device with a diagnostic device for determining the wear, with the Working cycles are measured. From the number of working cycles but can be concluded only empirically on a possible wear. However, the wear can be so high that the ejector fails much sooner than expected, or it can fail much later. In addition, it is not possible to detect the state of the components located outside of the ejector, such as inlets and outlets.
  • the invention is based on the object to provide a device that is simpler in design and are easier to detect malfunction.
  • the control operations of the ejector for example, the switching on and off of the bistable valve in the compressed air channel depending on the presence or the amount of negative pressure.
  • it is recorded, for example, how often or how quickly or more often than normally the negative pressure is adjusted to the desired value.
  • the monitoring device causes the control is switched off for safety's sake and permanent negative pressure is generated.
  • a "reset" via the machine control or ejector or wireless is required, which must be done by a conscious machine operator.
  • the parameters from which such errors are detected are adjustable or fixed.
  • a receiving device for a plurality of ejectors wherein the receiving device has at least one connection for a compressed air line and this Connection in a Druck Kunststoffbuchverteilsystem opens, to which a compressed air channel of each ejector is connected, and for each ejector, a vacuum channel is provided which is connectable to the vacuum system of the ejector, wherein the receiving device forms a support frame and a quick-change system for the ejectors and the receiving device via Control lines connected to the ejectors and can be connected to a machine control.
  • the receiving device is equipped with the ejectors.
  • the receiving device has a compressed air distribution system, to which the compressed air channels of the individual ejectors are connected.
  • This has the significant advantage that not every single ejector must be connected to a compressed air hose, but that only one connection is necessary, via which the Druck Kunststoffverteilsystem the receiving device is supplied with compressed air.
  • a large number of hoses are saved, in particular in large systems with 6 or 12 ejectors, whereby the ejectors can be placed closer and arranged more clearly.
  • the receiving device is provided with a holding frame in which the ejectors are used to keep us safe. It is no longer necessary to prepare the gripping device itself for receiving the ejectors, which may be a great expense, since the ejectors not only have to be fastened but also placed so that the compressed-air and vacuum hoses are guided without kinking. In the case of the device according to the invention, only the receiving device is attached to the gripping device, for which conventional fastening means, for example screws or clamping devices can be used.
  • the holding frame has the advantage that plug-in connectors for the power supply and for data lines are present, via which the ejector is supplied with power and on which data in Data processing devices can be entered in the ejector and data can be read out of the ejector. In this way, the ejector is quick and easy and also safely connected, for example, to a machine control.
  • the receiving device also has a quick-change system for the ejectors, so that they can be used in particular without the use of a tool and the receiving device can be removed again.
  • the ejector has a bistable valve for blocking the compressed air channel.
  • This bistable valve can be used to switch the supply of compressed air into the ejector on or off. In this way, the vacuum generation is specifically switched on or off.
  • the bistable valve can be controlled via a command of the machine control, which is the case, for example, when it is detected that no workpiece is sucked in, since the gripper is not occupied.
  • the machine control is usually aware of what shape the workpiece has and which grippers must be activated to suck the workpiece.
  • the non-active grippers ie the grippers that are not on the workpiece, should not suck in air, so as not to cause unnecessary noise and to avoid unnecessary energy consumption.
  • the bistable valve is controlled via a command of a sensor contained in the ejector, the sensor detects, for example, the amount of negative pressure and the negative pressure generation is switched off by closing the bistable valve when the desired negative pressure is reached. This is the case when the workpiece has been completely sucked by the respective gripper. In this way, compressed air can be saved.
  • the valve is designed to be self-holding, so that it retains its instantaneous position in the event of a voltage drop. If no workpiece is sucked in, the valve remains in its closed position, whereas the valve remains in the open position in the case of a suction gripper which has sucked in a work piece or if the necessary underpressure has been reached and the valve has assumed its closed position, into the open position, to ensure that the workpiece does not fall or that the vacuum on the workpiece does not collapse.
  • the valve is designed as a feed valve, which is controllable via a portion of the air flow required for an air control valve.
  • the valve is designed as a feed valve, which is controllable via a portion of the air flow required for an air control valve.
  • the ejector has a second monitoring device with which the evacuation time can be detected.
  • a second monitoring device typically requires 200 ms to build up the required vacuum. If this evacuation time is exceeded by a preset amount, an error message is issued. Exceeding the preset evacuation time is due, for example, to a leakage in the vacuum line or in the seal between the suction gripper and the workpiece, by clogging of the flow paths, in porous workpieces, in insufficient compressed air, etc.
  • there may be other sensors to them To limit error message.
  • a pressure sensor for the compressed air can determine whether it has the required pressure.
  • a control device which controls the ejector when the suction process ends is provided, which switches the ejector from the suction state into the blow-off state.
  • the duration of the blow-off is fixed.
  • the blow-off time can also be adjustable or variable.
  • the machine control has priority and determines when is switched to the blow-off after the suction, i. determines the pause or delay between the suction process and the blow-off process.
  • the machine controller determines the blow-off time and / or the blow-off pressure.
  • these values are given by the machine control, but the ejector takes precedence. For example, it can be set on the ejector how long the blow-off process lasts, this value being superimposed on the control command of the machine control. Which device has priority can be set on the ejector.
  • the ejector has a counting device with which the number of sucked-in workpieces, the number of valve position changes, the number of control errors and / or the like can be counted. This information can be used, for example, to set the maintenance intervals. In addition, comparisons can be made as to whether the number of actual operations corresponds to the number of sucked and handled workpieces. These counting processes are not only valid for the suction process but also for the blow-off process. The number of control errors can also affect the quality of the workpieces Vacuum suction, the supply and discharge lines, the machine control itself and the ejector are evaluated.
  • Data determined in the evaluation device are transmitted to the machine control, for example via a transmission device. This can be done at the same time, but in the ejector can also be provided a memory in which these data collected are stored. The data is then read at fixed times from this memory. According to the invention, the readout can also be wireless.
  • the ejector has a self-diagnosis device.
  • the quality state of the ejector can be determined and you can prevent malfunction in advance.
  • trends can be determined and determined by the fact that, for example, the evacuation time permanently extended, that accumulate in one or more valves switching changes and the like.
  • the self-diagnosis device is preferably provided with a valve closing the suction channel. If the suction channel is closed by the valve for a self-diagnosis then, for example, the evacuation time can be determined and compared with reference values. This also applies to the maximum achievable negative pressure.
  • the ejector has an evaluation device for the signals detected by sensors of the ejector.
  • This evaluation device is independent of the machine control or of the evaluation of the machine control, so that all detected by the sensors of the ejector signals are evaluated directly in the ejector, so that the ejector is independent of the machine control.
  • a particularly preferred embodiment of an ejector provides that the ejector has a display that can be dimmed or switched off. Since the display is only required for setting operations or for reading values, the display is dimmed or switched off during the remaining time. This can be done either manually or automatically, the display automatically reduces the luminosity or shuts off after expiration of a particular pre-entered period of time.
  • the display can be either an analog display or a digital display, with analog displays not only the lighting but also the display itself returns to its rest position, if the display is not needed.
  • the display can be switched on manually and / or by the machine control, or the display automatically switches on when an error message appears. Switched displays therefore signal a state deviating from the normal state, so that those ejectors with the display switched on can be found quickly.
  • Another visual distinguishing feature is that the display is multicolored. For example, a value above a threshold may be displayed in red and all values within a desired range may be displayed in green. Red displays therefore simply indicate a fault condition. The value itself can be displayed in red or the display has an additional red light.
  • Another visual feature may be a flashing code that flashes quickly or slowly, depending on what you are flashing Importance or urgency of the information to be transmitted.
  • the display In order to be able to see or see the display from a wide or large viewing angle, it is arranged according to the invention along an edge of the ejector. In this case, the display according to the invention projects beyond the surface of the ejector. In this way a viewing angle of more than 270 ° is possible.
  • the display consists for example of a provided in the edge and the surface of the ejector towering light emitting diode, which in particular turns from green to red.
  • FIG. 1 is a reference numeral 10 in total Receiving device for a total of six ejectors 12 shown, wherein the receiving device has a connection 14 for the supply of compressed air and a total of six ports 16 for connection of suction lines.
  • the connection 14 opens into a compressed air distribution system 15 to which the ejectors 12 are connected via distribution plates 17, which will be described in more detail below.
  • channels for the suction air are also provided, which open into the terminals 16.
  • the receiving device 10 has plug connections for the electrical contacting of the ejectors 12, wherein the plug-in connections are arranged in an electrical distribution system 18.
  • control and regulating devices and monitoring devices, counting devices, evaluation and self-diagnostic devices are provided with which the individual ejectors 12 can be controlled or via which the control of the ejectors 12 takes place.
  • Facilities may also be located within the ejectors 12.
  • the receiving device 10 has a quick-change system, via which the ejectors 12 individually taken from the receiving device 10 and can be used in this again.
  • FIG. 2 a single ejector 12 is shown, which has on its back a muffler 22 for the ejector 12 leaving compressed air.
  • the compressed air passes through a connection provided on the underside, which opens out through the distribution plate 17 into the ejector 12.
  • a plug 24 can be seen, which can be plugged into the electrical distribution system 18.
  • the top 26 of the ejector 12 has various buttons 28 and there are two displays 32, 30 and 34 are provided.
  • the display 32 is a digital display and the display 30 is for example an LED and serves as a programming aid. These Display 32 is, as described above, dimmable and / or disabled.
  • the display 34 is a colored display, in particular a multi-colored display, which projects beyond the surface of the upper side 26 and therefore can be seen from both sides and from the front and from above from a viewing angle ⁇ of more than 270 °. This display 34 may also be dimmable and / or disabled and alternates between the colors red and green.
  • the ejector 12 also has on its front side 36 easily accessible adjusting means 38 in the form of adjusting screws with which limit values can be set. As a result, e.g. a throttle for adjusting the blow-off be adjusted. Limit values can also be set via the push-buttons 28, limit values for the number of switching numbers, etc. being adjustable as limit values, for example the blow-off pressure, the suction pressure, suction times, blow-off times, the pause between suction and blow-off.
  • FIG. 3 shows the back 40 of the ejector 12 to which the muffler 22 is attached.
  • a further plug 42 can be seen, which also opens into the electrical distribution system 18 and via which data and / or electrical energy are transmitted.
  • the slim shape of the ejector 12 allows a dense packing of a plurality of ejectors 12 in the receiving device 10, whereby a plurality of hose lines is saved.
  • the housing 20 can also be provided with push buttons 28 and displays 32 and 34, via which the arranged in the receiving device 10 ejectors 12 are set together or via which data these ejectors 12 are displayed.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Manipulator (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)

Claims (22)

  1. Dispositif permettant d'obtenir une dépression comprenant plusieurs éjecteurs (12) et un dispositif de réception (10) des éjecteurs (12), le dispositif de réception (10) comprenant au moins un branchement pour une conduite d'air sous pression, débouchant dans un système de distribution d'air comprimé (15) sur lequel peut être branché un canal d'air comprimé d'un éjecteur (12), et pour chacun des éjecteurs (12) il est prévu un canal en dépression qui peut être relié au système en dépression de l'éjecteur (12), le dispositif de réception (10) formant un cadre de retenue et un système de changement rapide des éjecteurs (12), le dispositif de réception (10) étant relié aux éjecteurs (12) par des conduites de commande et pouvant être reliés à une commande de machine,
    caractérisé en ce que
    l'éjecteur (12) comporte un premier dispositif de surveillance permettant de détecter le nombre de processus de régulation et l'éjecteur (12) comporte un dispositif d'exploitation des signaux détectés par ses capteurs.
  2. Dispositif conforme à la revendication 1,
    caractérisé en ce que
    l'éjecteur (12) comporte une soupape en particulier bistable pour permettre de bloquer le canal d'air comprimé, et la soupape peut être commandée en particulier par un dispositif de commande prévu dans cet éjecteur (12) et/ou par la commande de la machine.
  3. Dispositif conforme à la revendication 2,
    caractérisé en ce que
    la soupape est maintenue automatiquement de sorte qu'elle concerne sa position instantanée en cas de chute de tension et/ou la soupape est réalisée sous la forme d'une soupape de commutation préalable qui peut être commandée par une partie du flux d'air nécessaire à une soupape à commande pneumatique.
  4. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce que
    le dispositif de surveillance comporte une unité de commande par l'intermédiaire de laquelle le dispositif de régulation peut être commandé et en particulier coupé.
  5. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce que
    l'éjecteur (12) comporte un second dispositif de surveillance permettant de détecter la durée d'évacuation, le dispositif de surveillance étant en particulier connecté à un système de notification d'erreurs.
  6. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce qu'
    il est prévu un dispositif de commande commandant l'éjecteur (12) à la fin du processus d'aspiration, qui commute l'éjecteur (12) de l'état d'aspiration à l'état de soufflage et le dispositif de commande comporte en particulier un dispositif de temporisation.
  7. Dispositif conforme à la revendication 6,
    caractérisé en ce que
    la pression de soufflage peut être commandée par le dispositif de commande.
  8. Dispositif conforme à la revendication 6 ou 7,
    caractérisé en ce que
    le dispositif de commande est superposé à la commande de machine ou inversement et en particulier l'éjecteur (12) comporte un dispositif de réglage de la priorité du dispositif de commande ou de la commande de machine.
  9. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce que
    l'éjecteur (12) comporte un dispositif de comptage permettant de compter le nombre de pièces aspirées, le nombre d'inversions de la position de la soupape, le nombre d'erreurs de régulation et/ou similaire, et en particulier, il est prévu dans l'éjecteur (12) un dispositif d'exploitation du dispositif de comptage.
  10. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce que
    l'éjecteur (12) comporte un dispositif de transmission permettant de transmettre des données à la commande de machine.
  11. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce que
    l'éjecteur (12) comporte une mémoire pour les données détectées, la mémoire pouvant, en particulier, être lue par une liaison sans fil.
  12. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce que
    l'éjecteur (12) comporte un dispositif d'autodiagnostic qui est en particulier équipé d'une soupape fermant le canal d'aspiration.
  13. Dispositif conforme à la revendication 12,
    caractérisé en ce que
    le dispositif d'autodiagnostic comporte un dispositif de mesure des variations dans le temps et/ou de la valeur absolue de la dépression.
  14. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce que
    l'éjecteur (12) comporte un affichage (30, 32) en particulier un affichage numérique qui est réglable ou débranchable et en particulier comporte plusieurs couleurs.
  15. Dispositif conforme à la revendication 14,
    caractérisé en ce que
    l'affichage (32) passe automatiquement à l'état de veille ou en mode de repos après écoulement d'une durée prédéfinie.
  16. Dispositif conforme à la revendication 14 ou 15,
    caractérisé en ce que
    l'affichage (32) peut être branché manuellement et/ou par la commande de machines et/ou se branche dans le cas d'une notification d'erreur.
  17. Dispositif conforme à l'une des revendications 14 à 16,
    caractérisé en ce que
    l'affichage (30, 32) change de couleur lors d'une notification d'erreur.
  18. Dispositif conforme à l'une des revendications 14 à 17,
    caractérisé en ce que
    l'affichage (30, 32) est à éclairage permanent ou comporte un code clignotant, et en particulier clignote rapidement ou lentement en fonction du code de clignotant.
  19. Dispositif conforme à l'une des revendications 14 à 18,
    caractérisé en ce que
    l'affichage (30) est situé le long d'une arête de l'éjecteur (12) et peut être identifié sur un angle de vision de 270°.
  20. Dispositif conforme à l'une des revendications 14 à 19,
    caractérisé en ce que
    l'affichage (30) dépasse de la surface de l'éjecteur (12).
  21. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce que
    des paramètres de réglage de l'éjecteur (12) peuvent être réglés par des touches (28), une commande de machine ou par une commande sans fil.
  22. Dispositif conforme à l'une des revendications précédentes,
    caractérisé en ce qu'
    une remise à zéro peut être effectuée par la commande de machine, sous la forme d'un éjecteur (12) ou sans fil.
EP05733309.8A 2004-06-23 2005-04-04 Dispositif pour produire une depression Expired - Lifetime EP1759119B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004031924A DE102004031924B4 (de) 2004-06-23 2004-06-23 Vorrichtung zum Erzeugen eines Unterdrucks
PCT/EP2005/003504 WO2006000265A1 (fr) 2004-06-23 2005-04-04 Dispositif pour produire une depression

Publications (2)

Publication Number Publication Date
EP1759119A1 EP1759119A1 (fr) 2007-03-07
EP1759119B1 true EP1759119B1 (fr) 2018-08-08

Family

ID=34965026

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05733309.8A Expired - Lifetime EP1759119B1 (fr) 2004-06-23 2005-04-04 Dispositif pour produire une depression

Country Status (7)

Country Link
US (2) US20080291235A1 (fr)
EP (1) EP1759119B1 (fr)
JP (1) JP2008507649A (fr)
KR (1) KR20070027720A (fr)
CN (1) CN1989348B (fr)
DE (2) DE102004031924B4 (fr)
WO (1) WO2006000265A1 (fr)

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DE102007058114A1 (de) 2007-12-04 2009-06-10 Festo Ag & Co. Kg Vakuumerzeugervorrichtung und Verfahren zu ihrem Betreiben
DE102007061820B4 (de) * 2007-12-20 2024-08-22 Festo Se & Co. Kg Vakuumerzeugervorrichtung
KR101672560B1 (ko) * 2008-11-21 2016-11-03 페스토 악티엔 게젤샤프트 운트 코. 카게 진공제어장치
FR2945086B1 (fr) * 2009-05-04 2016-10-21 Sapelem Pompe a air pneumatique et installation d'aspiration et de soufflage correspondante
DE102009047083C5 (de) * 2009-11-24 2013-09-12 J. Schmalz Gmbh Druckluftbetriebener Unterdruckerzeuger oder Unterdruckgreifer
DE102011118168B4 (de) * 2011-11-10 2015-12-31 Festo Ag & Co. Kg Verfahren zum Betreiben einer Vakuumgreifeinrichtung, Vakuumsteuereinrichtung und Manipulator
DE102011118173B4 (de) * 2011-11-10 2015-10-08 Festo Ag & Co. Kg Verfahren zum Betreiben einer Vakuumgreifeinrichtung, Vakuumsteuereinrichtung und Manipulator
DE102011119785B3 (de) * 2011-11-30 2012-12-13 Festo Ag & Co. Kg Vakuumgreifeinrichtung und Verfahren zum Betreiben einer Vakuumgreifeinrichtung
WO2013120802A1 (fr) 2012-02-13 2013-08-22 J. Schmalz Gmbh Procédé de fonctionnement d'un générateur de dépression et générateur de dépression pour la mise en œuvre de ce procédé
JP2013226799A (ja) * 2012-03-30 2013-11-07 Seiko Epson Corp 印刷装置の制御方法、印刷装置
JP6186157B2 (ja) * 2013-04-03 2017-08-23 学校法人 関西大学 吸着機構
ES2845927T3 (es) * 2014-06-26 2021-07-28 Schmalz J Gmbh Instalación para la manipulación de piezas de trabajo
DE102015206717B3 (de) * 2015-04-15 2016-08-18 Festo Ag & Co. Kg Vakuumerzeugervorrichtung
JP6612060B2 (ja) * 2015-06-03 2019-11-27 ローランドディー．ジー．株式会社 人工歯作製システム
KR101929359B1 (ko) * 2016-12-08 2018-12-14 이순일 접지 흡인 장치 및 이를 포함한 정합 장치
DE102022110636A1 (de) 2022-05-02 2023-11-02 Festo Se & Co. Kg Vakuumerzeugervorrichtung
DE102022121986A1 (de) 2022-08-31 2024-02-29 Festo Se & Co. Kg Ventilanordnung

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EP1759119A1 (fr) 2007-03-07
DE102004031924B4 (de) 2006-05-04
US20100277331A1 (en) 2010-11-04
DE102004031924A1 (de) 2006-01-12
WO2006000265A1 (fr) 2006-01-05
DE202005021945U1 (de) 2011-10-27
JP2008507649A (ja) 2008-03-13
US20080291235A1 (en) 2008-11-27
CN1989348A (zh) 2007-06-27
US8628186B2 (en) 2014-01-14
KR20070027720A (ko) 2007-03-09

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