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EP1753890B1 - Outils ceramiques en al2o3 a couche amelioree a liaison par diffusion - Google Patents

Outils ceramiques en al2o3 a couche amelioree a liaison par diffusion Download PDF

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Publication number
EP1753890B1
EP1753890B1 EP05782671.1A EP05782671A EP1753890B1 EP 1753890 B1 EP1753890 B1 EP 1753890B1 EP 05782671 A EP05782671 A EP 05782671A EP 1753890 B1 EP1753890 B1 EP 1753890B1
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Prior art keywords
aluminium
titanium
nitride
cutting tool
coating
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German (de)
English (en)
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EP1753890A1 (fr
Inventor
X. Daniel Fang
David J. Wills
Gilles Festeau
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Kennametal Inc
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Kennametal Inc
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24—Nitriding
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C12/00—Solid state diffusion of at least one non-metal element other than silicon and at least one metal element or silicon into metallic material surfaces
    • C23C12/02—Diffusion in one step
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/25—Cutters, for shaping including cut off tool
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Definitions

  • ceramic tools are increasing. These ceramic tools find use in a wide range of high-speed finishing operations and for the machining of difficult-to-machine materials at a high removal rate.
  • the increase in use of ceramic tools may be due to improvements in alloyed ceramics and ceramic-matrix composites, as well as with the advances in ceramic processing technology.
  • the ceramics used in cutting tools are typically inorganic, nonmetallic materials.
  • the production of ceramic tools typically involves the consolidation and sintering of powdered ceramics.
  • Sintering provides the necessary densification of the consolidated powder and may optionally be performed under pressure.
  • pressureless sintering the powder is first shaped into a green, or unsintered, body which may then be sintered to achieve the necessary densification.
  • Hot pressing of ceramics involves heating along with simultaneous uniaxial pressing of the powder in a die. Although hot-pressed ceramics are more expensive, they may be prepared with a finer grain size, a higher density and higher transverse rupture strength than cold-pressed materials.
  • the ceramics currently used in cutting tools are based either on aluminum oxide (alumina, Al 2 O 3 ) or silicon nitride (Si 3 N 4 ).
  • Other ceramics such as, magnesia, yttria, zirconia, chromium oxide, and titanium carbide may be used as additives to aid sintering or to form alloyed ceramics with improved thermo-mechanical properties.
  • a ceramic tool comprising an aluminum oxide substrate may be used in metal machining with high cutting speed due to the chemical inertness and great strength of the aluminum oxide substrate.
  • Commercially significant aluminum oxide ceramic tools were basically fine grained (less than 5 ⁇ m) Al 2 O 3 with magnesia added as a sintering aid and grain growth inhibitor.
  • Aluminum oxide ceramics may also be alloyed with suboxides or titanium or chromium to form solid solutions.
  • the three main commercially available aluminum oxide based tool materials are Al 2 O 3 /Ti, Al 2 O 3 /ZrO 2 , and Al 2 O 3 reinforced with silicon carbide (SiC) whiskers.
  • Other Al 2 O 3 base ceramics may have additives of TiN, TiB 2 , Ti(C,N), and Zr(C,N).
  • Alumina-zirconia (Al 2 O 3 /ZrO 2 ) is an alloyed ceramic.
  • the addition of zirconium oxide increases the higher fracture toughness and thermal shock resistance of an aluminum oxide substrate.
  • the toughening of aluminum oxide with zirconium oxide exploits a specific crystallographic change, a martensitic type transformation, that results from an energy absorbing mechanism.
  • the presence of metastable tetraorthoganol ZrO 2 provides the potential for transformation under stress into a stable monoclinic structure. The transformation acts as a stress absorber and prevents, even when cracks exist, further cracking.
  • the zirconia oxide particles are concentrated at the aluminum oxide grain boundaries. Although fracture is intergranular, the presence of these particles is believed to provide additional toughness before failure can occur by fracture.
  • the three most popular compositions contain 10, 25 and 40 weight % (wt.%) ZrO 2 with the remainder being aluminum oxide. The higher ZrO 2 compositions are less hard but tougher.
  • Cutting inserts may be coated to increase their resistance to wear.
  • Single or multiple layers of coatings by chemical vapor deposition (“CVD”) or physical vapour deposition (“PVD”) may be applied to cutting tool.
  • CVD chemical vapor deposition
  • PVD physical vapour deposition
  • Titanium nitride (TiN), titanium carbon nitride (TiCN) and aluminum oxide (Al 2 O 3 ) are among the most popular CVD coating materials for carbide-based cutting tools.
  • Thin coatings (2 ⁇ m to 5 ⁇ m) on ceramic substrates have been developed primarily to limit chemical interactions between the tool and the work material and improve wear resistance. Examples of the very recent research efforts in applying the latest CVD coating technologies to ceramic cutting inserts include coated reinforced ceramic cutting tools, United States Patent No.
  • coated silicon nitride ceramic cutting tools United States Patent Application No. 2002/0076284 ; coated composite ceramic cutting inserts containing a hard phase dispered with an alumina matrix phase, Published United States Patent Application No. 2002/0054794 .
  • the invention provides a cutting tool in accordance with claim 1 of the appended claims.
  • the invention further provides a method of coating a cutting tool in accordance with claim 30.
  • the present invention is directed to cutting tools comprising a substrate, wherein the substrate comprises aluminum oxide and zirconium oxide and a diffusion bonding enhanced layer.
  • the present invention is also directed to methods of forming a diffusion bonding enhanced layer on a substrate.
  • a diffusion bonding enhanced layer increases the adherence of a wear resistant coating applied to the cutting tool.
  • the diffusion bonding enhanced layer comprises the reaction products between a mixture comprising nitrogen and aluminum chloride, and at least the zirconium oxide present in the substrate.
  • the present invention is directed to a cutting insert comprising a substrate, wherein the substrate comprises aluminum oxide and zirconium oxide, an intermediate layer comprising nitrides of zirconium, zirconium oxide and nitrides of aluminum, and at least one wear resistant coating.
  • the method of the present invention comprises exposing a substrate to aluminum chloride and nitrogen, wherein the substrate comprises alumina and zirconia; and coating the substrate by at least one of chemical vapor deposition process or pressure vapor deposition process.
  • the substrate may comprise, by weight, from 0.5 to 45 % zirconium oxide of the total weight of the substrate.
  • the method may include exposing the substrate to a gaseous mixture comprising aluminum chloride and nitrogen.
  • the coating on the substrate may be applied by CVD or PVD, as well as other means.
  • Each coating may independently comprise at least one of a metal carbide, a metal nitride, a metal silicon, and a metal oxide of a metal oxide of a metal selected from Groups IIIA, IVB, VB, and VIB of the periodic table, such as, but not limited to at least one of titanium nitride (TiN), titanium carbonitride (TiCN), titanium aluminum nitride (TiAIN), titanium aluminum nitride plus carbon (TiAIN+C), aluminum titanium nitride (AITiN), aluminum titanium nitride plus carbon (AITiN+C), titanium aluminum nitride plus tungsten carbide/carbon (TiAIN+WC/C), aluminum titanium nitride plus tungsten carbide/carbon (AITiN+WC/C), aluminum oxide (Al 2 O 3 ), titanium diboride (TiB 2 ),tungsten carbide carbon (WC
  • the present invention relates cutting tools comprising a substrate comprising aluminum oxide and zirconium oxide, and a diffusion bonding enhanced layer.
  • the diffusion bonding enhanced layer results from the reaction between reagents and at least one of the zirconium oxide and aluminum oxide in the substrate.
  • the diffusion bonding enhanced layer may comprise nitrides of zirconium and nitrides of aluminum and the presence of these compounds enhances the adhesion of subsequent coatings. Therefore, the diffusion bonding enhanced layer may be used as an intermediate layer between the substrate and a wear resistant coating. The presence of a diffusion bonding enhanced layer may significantly improve the tool life of coated Al 2 O 3 ceramic cutting inserts.
  • An embodiment of the present invention results in a chemical reaction between at least one of the aluminum oxide and the zirconium oxide of the substrate and a mixture of nitrogen (N 2 ) and aluminum chloride (AlCl 3 ) in a surface region.
  • the reaction is between a gaseous mixture of N 2 and AlCl 3 and and the components of the substrate.
  • Single or multiple wear resistant coatings may be applied by a known coating means, including, but not limited to, CVD and PVD.
  • the thickness of the diffusion bonded enhanced layer depends on the diffusion of the reactants into the substrate. Diffusion is the process by which molecules intermingle as a result of their kinetic energy of random motion, or in other words, it is the result of random motion of the individual atoms in a surface region of the substrate, i.e. the aluminum oxide with zirconium oxide ceramic substrate in this invention. At a relatively high temperature, the rate of diffusion increases and, therefore, certain reactants may be chemically bonded to a surface region at a certain depth into the substrate.
  • the diffusion bonding enhanced layer does not intend to function as a wear resistant coating, rather as an intermediate layer between the ceramic substrate and the refractory metals-based CVD coatings to increase adherence. Experiments have shown consistently that the direct application of CVD coatings on the aluminum oxide with zirconium oxide ceramic substrate often does not result in good adhesion. The coatings typically peel and crack during the machining process resulting in a short service life of the ceramic tool.
  • the diffusion bonding enhanced layer provided in this invention may be relatively uniform, stable and highly adherent layer to the ceramic substrate. It is believed that the diffusion bonding enhanced layer comprises the products of a reaction between nitrogen and aluminum chloride, and the zirconium oxide present in the substrate.
  • the thickness of the diffusion bonding enhanced layer may be controlled by adjusting at least one of the temperature, pressure, reaction time, surface roughness of the substrate, as well as other parameters to produce the desired thickness of the coating.
  • Embodiments of the cutting tool of the present invention comprise a substrate comprising aluminum oxide and zirconium oxide.
  • substrates comprise, by weight, from 0.5 to 45 % zirconium oxide.
  • the substrate may comprise, by weight, from 0.5 to 26 % zirconium oxide or preferably, from 2 to 26 % zirconium oxide, or more preferably from 9 to 11 % zirconium oxide.
  • Embodiments of the cutting tool may comprise single or multiple wear resistant or chemical resistant coatings, together referred to herein as "wear resistant coatings.”
  • the cutting tool may comprise any coating capable of being deposited by CVD or PVD.
  • the wear resistant coatings may independently comprise at least one of a metal carbide, a metal nitride, a metal carbonitride, a metal silicon and a metal oxide of a metal selected from groups IIIA, IVB, VB, and VIB of the periodic table or combination thereof, such as, but not limited to, titanium nitride (TiN), titanium carbonitride (TiCN), titanium aluminum nitride (TiAIN), titanium aluminum nitride plus carbon (TiAIN+C), aluminum titanium nitride (AITiN), aluminum titanium nitride plus carbon (AITiN+C), titanium aluminum nitride plus tungsten carbide/carbon (TiAIN+WC/C), aluminum titanium nitride plus tungsten carbide/carbon (AITiN+WC/C), aluminum oxide (AlO 3 ), titanium diboride (TiB 2 ), tungsten carbide carbon (WC/C), chromium nitride (CrN)
  • each wear resistant coating may be any thickness desired for the specific machining application or the material to be machined.
  • the total thickness of the coating on the surface of the substrate will typically be from about 1 to about 20 micrometers or more typically from 1 to 5 micrometers.
  • Individual wear resistant coatings, typically, may have a thickness of from 0.25 to 2 micrometers.
  • the present invention also relates to a method of coating a cutting tool.
  • the method comprises exposing a substrate to aluminum chloride and nitrogen, wherein the substrate comprises aluminum oxide and zirconium oxide, and coating the substrate by at least one process selected from CVD and PVD.
  • Embodiments of the method of the present invention include a substrate comprising, by weight, from 0.5 to 45 % zirconium oxide.
  • the substrate comprises, by weight, from 0.5 to 26 % zirconium oxide or preferably, by weight, from 2 to 26 % zirconium oxide, or more preferably, by weight, from 9 to 11 % zirconium oxide.
  • the substrate is exposed to a gaseous mixture comprising aluminum chloride and nitrogen.
  • the gaseous mixture may comprise an aluminum chloride concentration from 25% to 99% by weight or more preferably, from 75% to 99% by weight.
  • the gaseous mixture may contain other components that are inert or essentially inert, by "essentially inert” is meant that the additional components do not interfere with formation of a diffusion bonding enhanced layer.
  • any pressure may be used although higher pressures will allow more interaction between the gaseous phase and the solid phase.
  • the pressure of gaseous mixture used in the diffusion process may be used to control the reaction for forming the diffusion enhanced layer.
  • a higher pressure may promote a higher level of reactivity between the zirconium oxide and nitrogen. Therefore, to provide the appropriate control, it may be preferable to maintain a pressure from 200 millibar to 1500 millibar or even a pressure from 400 millibar to 1000 millibar.
  • Diffusion may occur in a solid at any temperature.
  • Either the gaseous mixture or the substrate may be heated to increase the rate of diffusion. Higher temperatures may result in a higher rate of diffusion but the operating temperatures should not be so high as to cause any undesired changes in the solid substrate. Therefore, for substrates comprising aluminum oxide and zirconium oxide, it may be preferred that the gaseous mixture or the substrate is at a temperature from 50°C to 1400°C or from 50°C to 1200°C. More narrow temperature ranges may be desired to maintain a commercially acceptable rate of diffusion and not affect the substrate, therefore, it may be desired to have a temperature of the gaseous mixture or the substrate from 500°C to 1200°C or more preferably from 1000°C to 1200°C.
  • the following examples demonstrate the formation of diffusion bonding enhanced layer on the substrate comprising aluminum oxide and zirconium oxide and the increased adherence of the wear resistant coatings on the substrate.
  • the ceramic substrate of this example comprised in weight percentage, 90% Al 2 O 3 and 10% Zr02.
  • the substrate had a density of 4.0 g/cm 3 , a hardness of 1800 Hv, a toughness of 4.5 MN/m 3/2 , and a heat transfer coefficient of 0.07 cal/cm.sec °C.
  • the substrate was exposed to a gaseous mixture comprising aluminum chloride and nitrogen under a pressure of 500 millibar.
  • the substrate was heated to a temperature of approximately 1020°C.
  • the ratio of AlCl 3 /N 2 in the gaseous mixture was approximately 7.
  • Figure 1 is a photomicrograph taken at 1000X magnification of a prepared cross-section of a cutting tool 10 of the present invention at a perspective view showing the edge 11 between the top 12 and the cross-sectional face 13.
  • the diffusion bonding enhanced layer 14 is clearly shown on the substrate 15 after exposure to the gaseous mixture. As may be seen in Figure 1 , the diffusion bonding enhanced layer 14 is formed evenly across the surface of the substrate 15. The thickness of the diffusion-bonding layer 14 on the substrate 15 of Figure 1 is about half micrometer (0.5 micrometer).
  • Figure 2A and 2B are photomicrographs taken at a magnification of 1000X of cross-sections of coated Al 2 O 3 /ZrO 2 ceramic substrate on which multiple wear resistant coatings were applied.
  • Figure 2A shows a photomicrograph of a cross-section of a coated ceramic substrate 20 having a first coating of TiN 22, a second coating of TiCN 23, and a third coating of TiN 24 applied directly on the substrate 21 without an intermediate diffusion bonding enhanced layer.
  • Figure 2B shows a photomicrograph of a cross-section of a coated ceramic substrate 25 with a diffusion bonding enhanced layer 30 between the first coating of TiN 27 coating and the substrate 26.
  • the coated ceramic substrate 25 also has a second coating of TiCN 28 and a third coating of TiN 29.
  • the first coating of TiN 22 neither adheres well nor distributes uniformly across the Al 2 O 3 /ZrO 2 ceramic substrate 21, the poor adherence may be evidenced by the dark areas 31 of the photomicrograph between the first coating of TiN 22 and the substrate 21.
  • the diffusion bonding enhanced layer 30 has good adherence and uniform distribution on both the first coating of TiN 27 and the substrate 26.
  • the multiple coatings shown in both substrates 20 and 25 of Figures 2A and 2B are TiN-TiCN-TiN all deposited by CVD with a total thickness of 3 micrometers
  • the diffusion bonding enhanced layer formed on the base Al 2 O 3 /ZrO 2 ceramic substrate 26 may be composed of various chemical elements or compounds, including zirconium nitride, zirconium oxide, and aluminum nitride, that are melted together in a fashion to produce a uniform distribution of the mixed metals.
  • Performance tests were conducted to determine whether a cutting tool comprising a diffusion bonding enhanced layer intermediate to the substrate and the first wear resistant coating would provide a strong adherence for the CVD or PVD coatings (single or multiple layers).
  • Two cutting tools were prepared one with a multiple wear resistant coatings applied directly to the substrate and a second with a diffusion enhanced bonding layer intermediate to the substrate and the multiple wear resistant coatings formed by the method described above. Both cutting inserts were similarly coated with TiN-TiCN-TiN with three micrometers in thickness by CVD.
  • Figure 3A and Figure 3B are photographs of each of the coated ceramic substrates after scratch tests were performed under a constant load of 10 kg.
  • the cutting insert 40 of Figure 3A does not comprise a diffusion bonding enhanced layer and the cutting insert 50 of Figure 3B does comprise the diffusion bonding enhanced layer.
  • the CVD coatings 41 have peeled and chipped along the scratch mark 42 and the white ceramic surface 43 is exposed under the scratch pressure applied.
  • the weak adhesion of the CVD coatings without a diffusion bonding enhanced bonding layer is also indicated by comparing the width scratch mark 42 in Figure 3A with the narrow scratch mark 52 in Figure 3B .
  • the formation of a wider scratch 42 in Figure 3A is because the wear resistant coatings 41 has a low resistance to chipping and peeling from the scratch load applied during the test (same 10-kg constant pressure for both cases).
  • a series of comparative machining tests was carried out under various cutting conditions and with various work materials to demonstrate the advantages of a cutting tool comprising an intermediate diffusion bonding enhanced layer and multiple wear resistant coatings.
  • Insert designated C1 B was coated directly on the substrate while insert designated C1 C was coated accordingly to the method of the present invention, as described above.
  • the test results are shown in Figure 4A . It is clear that the cutting insert C1C (TiN-TiCN-TiN CVD coated) with the diffusion bonding enhanced layer demonstrated the best performance.
  • the diffusion bonding enhanced layer resulted in more than 80% increase in tool life compared with the cutting insert C1 B (TiN CVD coated), and a nearly 200% increase comparing with the uncoated cutting insert C1 C.

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  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Claims (51)

  1. Outil de coupe, comprenant :
    un substrat, dans lequel le substrat comprend de l'oxyde d'aluminium et de l'oxyde de zirconium ; et
    une couche améliorée à liaison par diffusion, dans lequel la couche améliorée à liaison par diffusion comprend des produits de réaction entre l'oxyde de zirconium et un mélange gazeux d'azote et de chlorure d'aluminium.
  2. Outil de coupe selon la revendication 1, dans lequel l'épaisseur de la couche améliorée à liaison par diffusion va de 0,25 à 2,0 micromètres.
  3. Outil de coupe selon la revendication 1, dans lequel la couche améliorée à liaison par diffusion comprend au moins l'un parmi l'oxyde de zirconium, des nitrures de zirconium et des nitrures d'aluminium.
  4. Outil de coupe selon la revendication 1, dans lequel le substrat comprend, en poids, de 0,5 à 45 % d'oxyde de zirconium.
  5. Outil de coupe selon la revendication 1, dans lequel le substrat comprend, en poids, de 0,5 à 26 % d'oxyde de zirconium.
  6. Outil de coupe selon la revendication 1, dans lequel le substrat comprend, en poids, de 2 à 26 % d'oxyde de zirconium.
  7. Outil de coupe selon la revendication 1, dans lequel le substrat comprend, en poids, de 9 à 11 % d'oxyde de zirconium.
  8. Outil de coupe selon la revendication 1, dans lequel le substrat comprend, en poids, de 0,3 à 35 % de zirconium.
  9. Outil de coupe selon la revendication 8, dans lequel le substrat comprend, en poids, de 6 à 20 % de zirconium.
  10. Outil de coupe selon la revendication 1, comprenant en outre :
    un revêtement résistant à l'usure.
  11. Outil de coupe selon la revendication 10, dans lequel le revêtement comprend au moins l'un parmi un carbure de métal, un nitrure de métal, un silicium métallique et un oxyde métallique d'un métal choisi parmi les groupes IIIA, IVB, VB et VIB du tableau périodique.
  12. Outil de coupe selon la revendication 11, dans lequel le revêtement comprend au moins l'un parmi le nitrure de titane (TiN), le carbonitrure de titane (TiCN), le nitrure de titane-aluminium (TiAIN), le nitrure de titane-aluminium plus carbone (TiAIN+C), le nitrure d'aluminium-titane (AlTiN), le nitrure d'aluminium-titane plus carbone (AITiN+C), le nitrure de titane-aluminium plus carbure de tungstène/carbone (TiAIN+WC/C), le nitrure d'aluminium-titane plus carbure de tungstène/carbone (AITiN+WC/C), l'oxyde d'aluminium (Al2O3), le diborure de titane (TiB2), le carbure de tungstène/carbone (WC/C), le nitrure de chrome (CrN) et le nitrure d'aluminium-chrome (AlCrN).
  13. Outil de coupe selon la revendication 10, comprenant en outre un deuxième revêtement.
  14. Outil de coupe selon la revendication 13, dans lequel le deuxième revêtement comprend au moins l'un parmi un carbure de métal, un nitrure de métal, un silicium métallique et un oxyde métallique d'un métal choisi parmi les groupes IIIA, IVB, VB et VIB du tableau périodique.
  15. Outil de coupe selon la revendication 14, dans lequel le deuxième revêtement comprend au moins l'un parmi le nitrure de titane (TiN), le carbonitrure de titane (TiCN), le nitrure de titane-aluminium (TiAIN), le nitrure de titane-aluminium plus carbone (TiAlN+C), le nitrure d'aluminium-titane (AITiN), le nitrure d'aluminium-titane plus carbone (AITiN+C), le nitrure de titane-aluminium plus carbure de tungstène/carbone (TiAIN+WC/C), le nitrure d'aluminium-titane plus carbure de tungstène/carbone (AITiN+WC/C), l'oxyde d'aluminium (Al2O3), le diborure de titane (TiB2), le carbure de tungstène/carbone (WC/C), le nitrure de chrome (CrN) et le nitrure d'aluminium-chrome (AICrN).
  16. Outil de coupe selon la revendication 11, dans lequel le revêtement a une épaisseur allant de 1 à 20 micromètres.
  17. Outil de coupe selon la revendication 14, dans lequel le deuxième revêtement a une épaisseur allant de 1 à 20 micromètres.
  18. Outil de coupe selon la revendication 1, dans lequel la couche améliorée à liaison par diffusion comprend une couche intermédiaire comprenant des nitrures de zirconium, de l'oxyde de zirconium et des nitrures d'aluminium ; et
    l'outil de coupe comprend en outre un premier revêtement résistant à l'usure.
  19. Outil de coupe selon la revendication 18, comprenant en outre :
    un deuxième revêtement résistant à l'usure.
  20. Outil de coupe selon la revendication 19, dans lequel l'épaisseur conjointe du premier revêtement résistant à l'usure et du deuxième revêtement résistant à l'usure est comprise entre 1 et 20 micromètres.
  21. Outil de coupe selon la revendication 20, dans lequel le premier revêtement résistant à l'usure et le deuxième revêtement résistant à l'usure comprennent indépendamment au moins l'un parmi un carbure de métal, un nitrure de métal, un silicium métallique et un oxyde métallique d'un métal choisi parmi les groupes IIIA, IVB, VB et VIB du tableau périodique.
  22. Outil de coupe selon la revendication 21, dans lequel le premier revêtement résistant à l'usure et le deuxième revêtement résistant à l'usure comprennent indépendamment au moins l'un parmi le nitrure de titane (TiN), le carbonitrure de titane (TiCN), le nitrure de titane-aluminium (TiAIN), le nitrure de titane-aluminium plus carbone (TiAIN+C), le nitrure d'aluminium-titane (AITiN), le nitrure d'aluminium-titane plus carbone (AITiN+C), le nitrure de titane-aluminium plus carbure de tungstène/carbone (TiAIN+WC/C), le nitrure d'aluminium-titane plus carbure de tungstène/carbone (AITiN+WC/C), l'oxyde d'aluminium (Al2O3), le diborure de titane (TiB2), le carbure de tungstène/carbone (WC/C), le nitrure de chrome (CrN) et le nitrure d'aluminium-chrome (AlCrN).
  23. Outil de coupe selon la revendication 20, comprenant en outre un troisième revêtement résistant à l'usure.
  24. Outil de coupe selon la revendication 23, dans lequel le troisième revêtement résistant à l'usure comprend au moins l'un parmi un carbure de métal, un nitrure de métal, un silicium métallique et un oxyde métallique d'un métal choisi parmi les groupes IIIA, IVB, VB et VIB du tableau périodique.
  25. Outil de coupe selon la revendication 24, dans lequel le troisième revêtement résistant à l'usure comprend au moins l'un parmi le nitrure de titane (TiN), le carbonitrure de titane (TiCN), le nitrure de titane-aluminium (TiAlN), le nitrure de titane-aluminium plus carbone (TiAIN+C), le nitrure d'aluminium-titane (AITiN), le nitrure d'aluminium-titane plus carbone (AITiN+C), le nitrure de titane-aluminium plus carbure de tungstène/carbone (TiAIN+WC/C), le nitrure d'aluminium-titane plus carbure de tungstène/carbone (AITiN+WC/C), l'oxyde d'aluminium (Al2O3), le diborure de titane (TiB2), le carbure de tungstène/carbone (WC/C), le nitrure de chrome (CrN) et le nitrure d'aluminium-chrome (AlCrN).
  26. Outil de coupe selon la revendication 23, dans lequel le premier revêtement résistant à l'usure comprend du nitrure de titane, le deuxième revêtement résistant à l'usure comprend du carbonitrure de titane et le troisième revêtement résistant à l'usure comprend du nitrure de titane.
  27. Outil de coupe selon la revendication 26, dans lequel la couche améliorée à liaison par diffusion a une épaisseur de 0,25 à 2 micromètres.
  28. Outil de coupe selon la revendication 27, dans lequel ledit au moins un revêtement parmi le premier revêtement résistant à l'usure, le deuxième revêtement résistant à l'usure et le troisième revêtement résistant à l'usure ont été appliqués par dépôt chimique en phase vapeur.
  29. Outil de coupe selon la revendication 28, dans lequel la concentration en oxyde de zirconium va de 0,5 à 45 % en poids.
  30. Procédé de revêtement d'un outil de coupe, comprenant :
    la fourniture d'un substrat comprenant de l'oxyde d'aluminium et de l'oxyde de zirconium ;
    l'exposition du substrat à un mélange gazeux constitué de chlorure d'aluminium et d'azote et facultativement de composants inertes supplémentaires de telle sorte que le chlorure d'aluminium et l'azote réagissent avec l'oxyde de zirconium dans le substrat pour former une couche améliorée à liaison par diffusion comprenant les produits de réaction entre l'oxyde de zirconium et le mélange gazeux de chlorure d'aluminium et d'azote ; et
    le revêtement du substrat avec un premier revêtement par au moins un processus parmi un processus de dépôt chimique en phase vapeur ou un processus de dépôt physique en phase vapeur.
  31. Procédé selon la revendication 30, dans lequel le substrat comprend, en poids, de 0,5 à 45 % d'oxyde de zirconium.
  32. Procédé selon la revendication 31, dans lequel le substrat comprend, en poids, de 0,5 à 26 % d'oxyde de zirconium.
  33. Procédé selon la revendication 32, dans lequel le substrat comprend, en poids, de 2 à 26 % d'oxyde de zirconium.
  34. Procédé selon la revendication 32, dans lequel le substrat comprend, en poids, de 0,5 à 11 % d'oxyde de zirconium.
  35. Procédé selon la revendication 34, dans lequel le substrat comprend, en poids, de 9 à 11 % d'oxyde de zirconium.
  36. Procédé selon la revendication 30, dans lequel le mélange gazeux est sous une pression allant de 20 kPa (200 millibars) à 150 kPa (1500 millibars).
  37. Procédé selon la revendication 36, dans lequel le mélange gazeux est sous une pression allant de 50 kPa (500 millibars) à 100 kPa (1000 millibars).
  38. Procédé selon la revendication 30, dans lequel le mélange gazeux est à une température allant de 50 °C à 1400 °C.
  39. Procédé selon la revendication 38, dans lequel le mélange gazeux est à une température allant de 50 °C à 1200 °C.
  40. Procédé selon la revendication 39, dans lequel le mélange gazeux est à une température allant de 500 °C à 1200 °C.
  41. Procédé selon la revendication 40, dans lequel le mélange gazeux est à une température allant de 1000 °C à 1200 °C.
  42. Procédé selon la revendication 41, dans lequel le mélange gazeux comprend une concentration en chlorure d'aluminium allant de 25 % à 99 % en poids.
  43. Procédé selon la revendication 42, dans lequel le mélange gazeux comprend une concentration en chlorure d'aluminium allant de 75 % à 99 % en poids.
  44. Procédé selon la revendication 30, dans lequel le revêtement du substrat par au moins un processus parmi un processus de dépôt chimique en phase vapeur ou un processus de dépôt physique en phase vapeur donne un revêtement comprenant au moins l'un parmi un carbure de métal, un nitrure de métal, un silicium métallique et un oxyde métallique d'un métal choisi parmi les groupes IIIA, IVB, VB et VIB du tableau périodique.
  45. Procédé selon la revendication 44, dans lequel le revêtement comprend au moins l'un parmi le nitrure de titane (TiN), le carbonitrure de titane (TiCN), le nitrure de titane-aluminium (TiAIN), le nitrure de titane-aluminium plus carbone (TiAIN+C), le nitrure d'aluminium-titane (AlTiN), le nitrure d'aluminium-titane plus carbone (AITiN+C), le nitrure de titane-aluminium plus carbure de tungstène/carbone (TiAIN+WC/C), le nitrure d'aluminium-titane plus carbure de tungstène/carbone (AITiN+WC/C), l'oxyde d'aluminium (Al2O3), le diborure de titane (TiB2), le carbure de tungstène/carbone (WC/C), le nitrure de chrome (CrN) et le nitrure d'aluminium-chrome (AlCrN).
  46. Procédé selon la revendication 30, comprenant en outre :
    le revêtement du substrat avec un deuxième revêtement par un processus parmi un processus de dépôt physique en phase vapeur et un processus de dépôt chimique en phase vapeur.
  47. Procédé selon la revendication 46, dans lequel le revêtement du substrat avec un deuxième revêtement donne un deuxième revêtement comprenant au moins l'un parmi un carbure de métal, un nitrure de métal, un silicium métallique et un oxyde métallique d'un métal choisi parmi les groupes IIIA, IVB, VB et VIB du tableau périodique.
  48. Procédé selon la revendication 47, dans lequel le deuxième revêtement comprend au moins l'un parmi le nitrure de titane (TiN), le carbonitrure de titane (TiCN), le nitrure de titane-aluminium (TiAIN), le nitrure de titane-aluminium plus carbone (TiAIN+C), le nitrure d'aluminium-titane (AITiN), le nitrure d'aluminium-titane plus carbone (AITiN+C), le nitrure de titane-aluminium plus carbure de tungstène/carbone (TiAIN+WC/C), le nitrure d'aluminium-titane plus carbure de tungstène/carbone (AITiN+WC/C), l'oxyde d'aluminium (Al2O3), le diborure de titane (TiB2), le carbure de tungstène/carbone (WC/C), le nitrure de chrome (CrN) et le nitrure d'aluminium-chrome (AlCrN).
  49. Procédé selon la revendication 47, dans lequel le premier revêtement a une épaisseur allant de 0,25 à 20 micromètres.
  50. Procédé selon la revendication 49, dans lequel le premier revêtement a une épaisseur allant de 0,25 à 5,0 micromètres.
  51. Procédé selon la revendication 47, dans lequel le revêtement total a une épaisseur allant de 1 à 20 micromètres.
EP05782671.1A 2004-05-19 2005-05-05 Outils ceramiques en al2o3 a couche amelioree a liaison par diffusion Expired - Lifetime EP1753890B1 (fr)

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US10/848,776 US7581906B2 (en) 2004-05-19 2004-05-19 Al2O3 ceramic tools with diffusion bonding enhanced layer
PCT/US2005/015720 WO2005121388A1 (fr) 2004-05-19 2005-05-05 Outils ceramiques en al2o3 a couche amelioree a liaison par diffusion

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RU2392350C2 (ru) 2010-06-20
BRPI0511149B8 (pt) 2017-10-10
NO20065637L (no) 2006-12-08
KR101178978B1 (ko) 2012-09-05
HK1104586A1 (zh) 2008-01-18
JP5078615B2 (ja) 2012-11-21
US7914913B2 (en) 2011-03-29
US20100227160A1 (en) 2010-09-09
BRPI0511149B1 (pt) 2017-07-18
CN1997766A (zh) 2007-07-11
CN1997766B (zh) 2010-06-16
JP2007537968A (ja) 2007-12-27
WO2005121388A9 (fr) 2006-03-23
TW200611993A (en) 2006-04-16
NO341546B1 (no) 2017-12-04
US7968147B2 (en) 2011-06-28
RU2006144956A (ru) 2008-06-27
IL218773A0 (en) 2012-05-31
US20090186154A1 (en) 2009-07-23
US20080057327A1 (en) 2008-03-06
WO2005121388A1 (fr) 2005-12-22
CA2566173C (fr) 2013-12-17
US8147992B2 (en) 2012-04-03
EP1753890A1 (fr) 2007-02-21
MXPA06013262A (es) 2007-02-28
AU2005252629A1 (en) 2005-12-22
AU2005252629B2 (en) 2011-01-27
KR20070015965A (ko) 2007-02-06
US7581906B2 (en) 2009-09-01
IL179122A0 (en) 2007-03-08
BRPI0511149A (pt) 2007-11-27
CA2566173A1 (fr) 2005-12-22
TWI299368B (en) 2008-08-01
US20050260454A1 (en) 2005-11-24
IL179122A (en) 2012-04-30

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