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EP1692714A1 - Appareil et procede de reduction de bruit electrique dans un mandrin a controle thermique - Google Patents

Appareil et procede de reduction de bruit electrique dans un mandrin a controle thermique

Info

Publication number
EP1692714A1
EP1692714A1 EP04812337A EP04812337A EP1692714A1 EP 1692714 A1 EP1692714 A1 EP 1692714A1 EP 04812337 A EP04812337 A EP 04812337A EP 04812337 A EP04812337 A EP 04812337A EP 1692714 A1 EP1692714 A1 EP 1692714A1
Authority
EP
European Patent Office
Prior art keywords
fluid
temperature
chuck
temperature control
fluid carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04812337A
Other languages
German (de)
English (en)
Inventor
Douglas E. Hudson
James Perlin
Sanjiv Patel
Chin Chien Tee
Kenneth M. Cole, Sr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Temptronic Corp
Original Assignee
Temptronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Temptronic Corp filed Critical Temptronic Corp
Publication of EP1692714A1 publication Critical patent/EP1692714A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring

Definitions

  • the wafer is typically held stationary relative to a vacuum support surface of a prober machine which electrically tests the circuits on the wafer.
  • the prober includes a group of electrical probes which, in conjunction with a tester, apply predetermined electrical excitations to various predetermined portions of the circuits on the wafer and sense the circuits' responses to the excitations.
  • the wafer is mounted on the top surface of a wafer chuck, which is held at its bottom surface to a support structure of the prober.
  • a vacuum system is typically connected to the chuck.
  • a series of channels or void regions in communication with the top surface of the chuck conduct the vacuum to the wafer to hold it in place on the top surface of the chuck.
  • the prober support structure for the chuck is then used to locate the wafer under the probes as required to perform the electrical testing on the wafer circuits.
  • the chuck can also include a temperature control system which raises and lowers the temperature of the chuck surface and the wafer as required to perform the desired temperature screening of the wafer. It is important to the accuracy of such testing that the temperature of the wafer and, therefore, the temperature of the chuck surface, be controlled as accurately and precisely as possible.
  • the chuck can include a circulation system through which a temperature control fluid is circulated. The temperature of the fluid is controlled such that the temperature of the chuck and, therefore, the temperature of the wafer, are controlled.
  • Such temperature- controlled chucks can also include heaters such as electrical resistive heaters within the chuck. By applying power to the resistive heating element, heat is introduced into the chuck. In some applications, such as where a wafer is being tested on a circuit prober, the presence of electrical noise in the system can degrade the performance accuracy of the testing. Therefore, it is important to minimize the electrical noise introduced into the system.
  • One source of electrical noise is the temperature control fluid that circulates through the chuck. The motion and other behavior of the fluid in the chuck or in the lines carrying the fluid to and from the chuck can create electrical noise by triboelectric effects whereby electrical charge is produced by friction between two objects.
  • the invention is directed to a temperature control system and a method for controlling temperature in a workpiece chuck.
  • the system includes a temperature control device for controlling temperature of a temperature control fluid and a fluid inlet and a fluid outlet, the temperature control fluid being carried to and from the chuck via the fluid inlet and the fluid outlet.
  • a controller controls the temperature control device, such as by controlling a flow rate of the temperature control fluid through the chuck, such that the flow rate of the temperature control fluid through the chuck when the temperature of the chuck is in transition is higher than the flow rate of the temperature control fluid through the chuck when the temperature of the chuck is being maintained at a set point temperature and/or by controlling the temperature control device such that, when a temperature of the chuck is above a predetermined temperature, e.g., the boiling temperature of the temperature control fluid, the temperature control fluid is prevented from entering the chuck.
  • a flow controlling device is controllable to change the flow rate of the temperature control fluid.
  • the system includes a first fluid carrying path connected to one of the inlet and the outlet and a second fluid carrying path connected to the other of the inlet and the outlet.
  • the flow controlling device can be connected in one of the first and second fluid carrying paths.
  • the flow controlling device can include a fixed-orifice flow reducing device in one of the first and second fluid carrying paths and a controllable valve in parallel with the fixed-orifice flow reducing device.
  • the controller can control the controllable valve to be open when temperature in the chuck is in transition and closed when the temperature in the chuck is to be maintained at a desired set point.
  • the flow controlling device can include a first controllable valve connected in one of the first and second fluid carrying paths and a second controllable valve connected in the one of the first and second fluid carrying paths in parallel with the first controllable valve.
  • the controller can control the first and second controllable valves such that one of the first and second controllable valves is open when temperature in the chuck is in transition and closed when the temperature in the chuck is to be maintained at a desired set point.
  • a capillary tube can be connected between the first and second fluid carrying paths to balance pressures in the first and second fluid carrying paths.
  • a first valve is connected in the first fluid carrying path, and a second valve is connected in the second fluid carrying path.
  • the first and second valves are closed when the temperature of the chuck is above a predetermined temperature, e.g., the boiling temperature of the temperature control fluid, such that the temperature control fluid is prevented from flowing into the chuck.
  • a predetermined temperature e.g., the boiling temperature of the temperature control fluid
  • the various techniques of the invention result in controlling flow and other behavior of the temperature control fluid used to control temperature in a chuck. The result is that electrical noise introduced by the fluid is reduced, and, accordingly, wafer processing such as prober testing over temperature, can be carried out more accurately.
  • FIG. 1 contains a top-level schematic block diagram of a temperature control system and workpiece chuck connected to control temperature of a workpiece such as a semiconductor wafer mounted on the workpiece chuck.
  • FIG. 2 is a schematic diagram of the temperature control system used to control temperature in a workpiece chuck, in accordance with an embodiment of the invention.
  • FIG. 3 is a schematic diagram of the temperature control system used to control temperature in a workpiece chuck, in accordance with another embodiment of the invention.
  • FIG. 1 contains a top-level schematic block diagram of a temperature control system and workpiece chuck connected to control temperature of a workpiece such as a semiconductor wafer mounted on the workpiece chuck.
  • the system 9 includes a temperature control system such as a chiller 11, which controls the temperature of a temperature control fluid.
  • the chiller 11 can be of the type manufactured and sold by Temptronic Corporation of Sharon, Massachusetts, the assignee of the present application. Specifically, the chiller can be a Model Number TP03500A Atlas Chiller, or similar system, which is modified to include features of the invention used to reduce electrical noise as described herein.
  • the temperature control fluid is routed to and from a test system, such as, for example, a wafer prober 13, along a hose or pipe 15.
  • a test system such as, for example, a wafer prober 13, along a hose or pipe 15.
  • the hose or pipe 15 can be of the type described in U.S. Patent number 6,070,413, assigned to Temptronic Corporation of Sharon, Massachusetts, and incorporated herein in its entirety by reference.
  • the hose or pipe 15 actually includes at least two fluid carrying hoses or pipes, one of which carries the temperature control fluid from the chiller 11 to the prober 13 and the other of which carries the temperature control fluid from the prober 13 back to the chiller 11.
  • the workpiece or wafer 21 being tested by the prober 13 is mounted on a chuck 19.
  • FIG. 2 is a schematic diagram of the temperature control system used to control temperature in a workpiece chuck, in accordance with an embodiment of the invention. Referring to FIG.
  • the temperature control system or chiller 11 is connected to the prober 13 via the hose or pipe 15, which carries the temperature control fluid back and forth to the chuck 19 in the prober 13.
  • the chiller 11 includes a heat exchanger 23 used in controlling the temperature of the temperature control fluid.
  • a pump 25 circulates the fluid through the system. The fluid is carried from the heat exchanger 23 to a fluid outlet of the chiller 11 on a first fluid carrying path 27. The fluid circulates through the chuck 19 and returns to the chiller 11 via the hose or pipe 15. The fluid is pumped along a second fluid carrying path 29 from a fluid inlet of the chiller 11 back to the heat exchanger 23.
  • the chiller 11 includes a controller 7, which controls the functions of the chiller 11 to implement generation and delivery of the temperature control fluid, including, for example, the opening and closing of valves, and the timing of the opening and closing of the valves.
  • a first valve 14 is connected in the first fluid carrying path 27, and a second valve 16 is connected in the second fluid carrying path 29.
  • a fixed-orifice flow reducer 12 is connected in the first fluid carrying path 27, and a third valve
  • the capillary tube 18 is connected between the first and second fluid carrying paths. As shown in FIG. 2, the capillary tube 18 is located between the chuck 19 and the valves 10, 12, 14, 16.
  • One or more approaches in accordance with the invention are utilized in the work chuck thermal control system of the invention to reduce the triboelectric electrical noise in the chuck. The use of these approaches is controlled by the chiller control system and is synchronized to the appropriate thermal control range where their use is most beneficial. These approaches all reduce electrical noise independently in different modes of system operation.
  • the first approach significantly reduces the flow of coolant through the chuck 19 from the flow rate used to temperature transition the chuck 19. It includes the valve 10 and the flow reducer 12.
  • the reduction in coolant flow results in reduced movement (vibration) of the chuck and other chuck components, which in turn results in reduced electrical noise level on the chuck.
  • the reduction in flow is achieved by switching the coolant flow from a high flow line to one with a flow restriction.
  • the restriction is an orifice that has significantly lower flow area than the high flow line.
  • the flow reducer 12 and valves 10, 14 and 16 are used to achieve a high fluid flow rate during temperature transitions and a relatively low flow rate while maintaining the temperature of the chuck and wafer at a desired set point temperature.
  • valves 10, 14 and 16 are opened, allowing fluid to flow at its maximum rate through the valves 10, 14 and 16, as well as the flow reducer 12.
  • the valve 10 is closed, and the valves 14 and 16 remain open.
  • the total fluid flow is reduced to that allowed by the fixed-orifice flow reducer 12.
  • the flow rate at constant temperature is about half of the flow rate during transitions.
  • the lower flow rate while temperature is held constant results in much lower electrical noise, which provides increased accuracy in prober testing of the wafer at the desired set point temperature.
  • the second approach also involves the use of valves 14 and 16. This approach prevents coolant fluid from entering the chuck after the chuck temperature is above the boiling point of the cooling fluid. If the coolant fluid is allowed to enter a work chuck that is at a temperature above the boiling point of the coolant fluid, the coolant vaporizes violently and the resulting pressure pulsation induces vibrations in the chuck causing electrical noise.
  • the coolant fluid can enter the work chuck by periodically flowing from a coolant fluid storage reservoir through the work chuck supply and/or return line.
  • FIG. 3 is a schematic diagram of the temperature control system used to control temperature in a workpiece chuck, in accordance with another embodiment of the invention.
  • valve 10 and flow reducer 12 of FIG. 2 are replaced with a pair of valves 45 and 47 connected in parallel in the first fluid carrying path 27.
  • both valves 45 and 47 are opened to allow for maximum rate of flow of the temperature control fluid.
  • one of the valves, e.g., valve 45 is closed, and the other valve, e.g., valve 47, remains open.
  • the temperature control fluid is allowed to flow through only the open valve 47 at a reduced flow rate, resulting in a reduction in electrical noise caused by fluid at a comparatively high flow rate.
  • the valve 14 is optional.
  • valve 14 can be omitted, because valves 45 and 47 can be used to meet the purpose of valve 14.
  • high transition rate is achieved by using a high flow rate of temperature control fluid through the chuck.
  • the chuck temperature reaches a desired set point temperature, the chuck temperature is maintained at the set point.
  • the flow rate of the temperature control fluid is reduced, such that electrical noise that may be introduced by the moving fluid is reduced.
  • this dual-flow-rate approach is achieved by using a flow control device connected in one or more of the lines carrying the temperature control fluid to and from the chuck.
  • This flow control device can be a pair of valves or a valve and a fixed- orifice flow restrictor connected in parallel. At least one on the valves can be controlled such that it is open during temperature transitions to achieve high-rate transition and closed during steady-state temperature maintenance such that electrical noise is reduced.
  • the dual-flow-rate approach is achieved by using a variable- speed pump as the pump 25.
  • the pump can be set to a relatively high speed during temperature transitions such that the fluid flow rate is relatively high.
  • the pump can operate at a reduced speed such that the fluid flow rate is reduced, resulting in reduced electrical noise in the chuck during testing.
  • the temperature control fluid can be in a gaseous state or a liquid state.
  • the fluid is assumed to be in a liquid state, however, it is known that the fluid can also be in a gaseous state in the system, such as where the liquid state of the fluid boils in the chuck to enter its gaseous state.
  • the temperature control fluid when the temperature control fluid is referred to, such as where the fluid is prevented from entering the chuck in certain embodiments of the invention, it is the liquid state of the fluid that is being referred to.
  • the fluid i.e., liquid state of the fluid
  • the gaseous state of the fluid may be present in the chuck.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Control Of Temperature (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention porte sur un système et un procédé de contrôle de température d'une pièce telle une plaquette à semi-conducteur et du mandrin qui soutient la plaquette. Ce système comprend un échangeur thermique utilisé dans le contrôle de la température d'un fluide de contrôle de température. Un premier trajet de transport de fluide transporte le fluide de contrôle de température de l'échangeur thermique vers une sortie, cette sortie pouvant être reliée au mandrin de la pièce afin de transporter le fluide de contrôle de température vers le mandrin de la pièce de travail. Un second trajet de transport de fluide transporte le fluide de contrôle de température d'une entrée vers l'échangeur thermique, cette entrée pouvant être reliée au mandrin de la pièce de travail afin de transporter le fluide de contrôle de température du mandrin de la pièce de travail vers le système de contrôle de température. Une technique à double débit permet au fluide de contrôle de température de circuler à un débit assez élevé, lorsque la température du mandrin est en transition, si bien que la transition de température du mandrin peut être obtenue à un débit élevé. Lorsque la température du mandrin est maintenue à une température de consigne, le débit du fluide peut être réduit si bien que le bruit électrique introduit par le mouvement du fluide, par exemple par un effet triboélectrique, peut être réduit. Un tube capillaire peut être relié entre le premier trajet de transport de fluide et le second trajet de transport de fluide. La première et la seconde vanne peuvent être reliées dans le premier et le second trajet de transport de fluide afin d'empêcher que le fluide ne circule dans le mandrin lorsque le mandrin est à une température élevée si bien que le mouvement induit par ébullition instantanée est éliminé.
EP04812337A 2003-11-26 2004-11-23 Appareil et procede de reduction de bruit electrique dans un mandrin a controle thermique Withdrawn EP1692714A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US52603003P 2003-11-26 2003-11-26
US10/997,017 US20050121186A1 (en) 2003-11-26 2004-11-23 Apparatus and method for reducing electrical noise in a thermally controlled chuck
PCT/US2004/039798 WO2005055291A1 (fr) 2003-11-26 2004-11-23 Appareil et procede de reduction de bruit electrique dans un mandrin a controle thermique

Publications (1)

Publication Number Publication Date
EP1692714A1 true EP1692714A1 (fr) 2006-08-23

Family

ID=34636548

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04812337A Withdrawn EP1692714A1 (fr) 2003-11-26 2004-11-23 Appareil et procede de reduction de bruit electrique dans un mandrin a controle thermique

Country Status (5)

Country Link
US (1) US20050121186A1 (fr)
EP (1) EP1692714A1 (fr)
JP (1) JP2007512715A (fr)
TW (1) TWI257160B (fr)
WO (1) WO2005055291A1 (fr)

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US9155134B2 (en) * 2008-10-17 2015-10-06 Applied Materials, Inc. Methods and apparatus for rapidly responsive heat control in plasma processing devices
JP6303953B2 (ja) * 2014-09-22 2018-04-04 株式会社島津製作所 Ｘ線管装置

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Also Published As

Publication number Publication date
TW200537666A (en) 2005-11-16
WO2005055291A1 (fr) 2005-06-16
JP2007512715A (ja) 2007-05-17
TWI257160B (en) 2006-06-21
WO2005055291A9 (fr) 2005-11-17
US20050121186A1 (en) 2005-06-09

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