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EP1650441B1 - Low vibration vacuum pump - Google Patents

Low vibration vacuum pump Download PDF

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Publication number
EP1650441B1
EP1650441B1 EP20050021097 EP05021097A EP1650441B1 EP 1650441 B1 EP1650441 B1 EP 1650441B1 EP 20050021097 EP20050021097 EP 20050021097 EP 05021097 A EP05021097 A EP 05021097A EP 1650441 B1 EP1650441 B1 EP 1650441B1
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EP
European Patent Office
Prior art keywords
vacuum pump
pump according
bearings
motor stator
rotor shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP20050021097
Other languages
German (de)
French (fr)
Other versions
EP1650441A3 (en
EP1650441A2 (en
Inventor
Helmut Bernhardt
Armin Blecker
Anneliese Reichhart
Jörg Stanzel
Wolfgang Eberl
Christopher Mark Rippl
Michael Willig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1650441A2 publication Critical patent/EP1650441A2/en
Publication of EP1650441A3 publication Critical patent/EP1650441A3/en
Application granted granted Critical
Publication of EP1650441B1 publication Critical patent/EP1650441B1/en
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Not-in-force legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a low-vibration vacuum pump according to the preamble of the first claim.
  • Vacuum pumps have many components that can generate mechanical vibrations of the entire pump. These vibrations can then be transferred via the flange to the vacuum chamber or other connected systems.
  • Molecular pumps and turbomolecular pumps are used to generate high and ultra-high vacuum.
  • the pumping action is achieved in a turbomolecular pump by a combination of very fast rotating and with standing alternating wing discs.
  • the fast-rotating wing discs sit on a shaft and together with this form the rotor. It rotates about its axis at tens of thousands of revolutions per minute.
  • the rotation support is provided by axial and radial bearings, such as roller bearings and / or magnetic bearings.
  • the rotation also creates vibrations, for example, by small imbalances of the rotor, which can arise on the one hand by the limited balancing accuracy in the production and on the other hand by deposition of particles on the wing discs. These vibrations are delivered via the bearings to the pump housing.
  • the drive can also be the source of vibrations ( Journal of Vacuum Science and Technology A, 7 (1989) May / June, No. 311, New York, US, pp. 2377-2380 ).
  • the motor geometry, ie roundness and orientation of the components, is, according to this article, decisive for the strength of the vibration and also for a successful suppression.
  • the object is to present a vacuum pump in which the vibrations occurring at the housing are reduced compared to the prior art. Additional space outside the pump and an enlargement of the housing should be avoided.
  • the vibrations occurring at the housing are reduced by at least part of the electrically operated bearing and drive elements being decoupled from the housing of the vacuum pump in terms of vibration technology.
  • These electrically operated bearings and drive elements include the motor stator.
  • the vibrational decoupling is achieved by the stator of the drive, hereinafter “motor stator”, elastically suspended in the housing of the vacuum pump.
  • motor stator elastically suspended in the housing of the vacuum pump.
  • the vibration isolation of the bearings can be improved by the housing of the pump by between housing and bearing an intermediate member of a high density material is suspended in elastic material.
  • PWM pulse width modulation
  • the heat loss occurring in the motor stator must be taken into account. Therefore, according to the invention, the motor stator vibrationally decoupled from the housing and still maintain the heat technology coupling. For this purpose, elements are incorporated that transmit no vibrations but heat. As a result, an impermissible stagnation of the heat is avoided in the motor stator and still reduces the occurring at the housing of the pump level of vibration.
  • the first figure shows a turbomolecular pump 1 with a housing 2, which has a gas inlet 3 and a gas outlet 4. Between the gas inlet and outlet, the gas is conveyed through a pump-active structure.
  • This structure has rotating pump-active components 9 and stationary pump-active components 10.
  • the rotating components 9 are mounted on a rotor shaft 5, both parts 5 and 9 together form the rotor of the pump.
  • the rotor is rotatably supported with bearings 8.
  • On the rotor shaft sits the motor rotor 6, which forms the drive together with the motor stator 7.
  • the motor stator is suspended in elastic components 11 in the housing 2. These elastic components may be elastomeric rings.
  • a displacement of the rings in the axial direction can be avoided by grooves are provided in the housing and motor stator, in which the rings dive with a portion of their diameter.
  • the motor rotor can be designed as an arrangement of permanent magnets, so that the overall result is a DC motor.
  • the energization of the motor stator is then carried out with pulse width modulation.
  • FIG. 2 a section of the vacuum pump 1 is shown.
  • the rotor shaft 5 with the permanent magnets 6 is rotatably supported by a rolling bearing, which has an inner ring 17 seated on the rotor shaft and an outer ring 18.
  • This ring is taken in an intermediate member 12, which is supported by elastic components 11, for example elastomeric rings, in the housing 2.
  • This intermediate member is made of high-density material, so that it has a high mass with a small size and thus acts vibration-damping.
  • the motor stator 7 can be seen.
  • FIG. 3 shows an embodiment of the elastic suspension of the motor stator.
  • energy In order to set the rotor in rotation via the drive, energy must be supplied, for example by energizing the coils of the motor stator. In this case, not all of the supplied electrical energy is converted into rotational energy. A part is released as heat loss. For pumps with high power requirements, a correspondingly high heat loss must be dissipated. In these cases, a heat technology coupling of the motor stator is to be provided, or to avoid the thermal decoupling.
  • FIG. 3 represented: Between the rotor shaft 5 and housing 2 of the vacuum pump sits the motor stator 7. The elastic components 11 decouple it vibrationally. The result is a space 15 in the area between the motor stator 7, housing 2 and the elastic members 11. This area is filled with a good heat conducting material 16, but does not transmit vibrations. Such agents may be, for example, highly viscous liquids.
  • these means may be thermal grease.
  • these means are a woven fabric or a mesh of good heat-conducting material.
  • this fabric or braid may consist of material with high proportions of copper or aluminum.
  • An effective cooling of the motor stator can also be achieved by providing at least one cooling channel in the region of the motor stator, in which a coolant circulates. This is in FIG. 4 shown.
  • a coolant such as water
  • the motor stator itself is suspended with the elastic components 11 in the housing 2 of the vacuum pump.
  • Another embodiment relates to such vacuum pumps whose bearings are 8 active magnetic bearings, which can be active in both the axial and in the radial direction. These bearings also belong to the electrically operated bearing and drive elements. This is shown by way of example on an active radial magnetic bearing 24 in FIG. 5 , In active magnetic bearing control of the current takes place in the control coils 21, which magnetic restoring forces are generated with this current. These forces are intended to counteract the deflection of the rotor shaft 5 measured by a sensor 23.
  • a common method is the current control by pulse width modulation. The frequency of this pulse width modulation is impressed on the actuating forces, whereby mechanical vibrations occur on the bearing stator 22, which are transmitted to the pump housing 2. According to the invention, these vibrations can be avoided by supporting the bearing stator in elastic components 11. The amplitudes of those vibrations generated by the bearing stator need not be comparable to those of the motor stator. Depending on the given

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Vibration Prevention Devices (AREA)
  • Reciprocating Pumps (AREA)

Description

Die Erfindung betrifft eine vibrationsarme Vakuumpumpe nach dem Oberbegriff des ersten Anspruches.The invention relates to a low-vibration vacuum pump according to the preamble of the first claim.

Vakuumpumpen besitzen viele Bauteile, die mechanische Schwingungen bzw. Vibrationen der gesamten Pumpe erzeugen können. Diese Vibrationen können dann über den Flansch auf die Vakuumkammer oder andere angeschlossene Systeme übertragen werden.Vacuum pumps have many components that can generate mechanical vibrations of the entire pump. These vibrations can then be transferred via the flange to the vacuum chamber or other connected systems.

Molekularpumpen und Turbomolekularpumpen dienen der Erzeugung von Hoch- und Ultrahochvakuum. Die Pumpwirkung wird in einer Turbomolekularpumpe durch eine Kombination aus sehr schnell drehenden und mit stehenden abwechselnden Flügelscheiben erzielt. Die schnelldrehenden Flügelscheiben sitzen auf einer Welle und bilden mit dieser zusammen den Rotor. Dieser rotiert mit einigen zehntausend Umdrehungen pro Minute um seine Achse. Die Unterstützung der Drehung erfolgt durch axiale und radiale Lager, beispielsweise Wälzlager und/oder Magnetlager. Die Drehung erzeugt überdies Schwingungen, beispielsweise durch geringe Unwuchten des Rotors, die einerseits durch die begrenzte Wuchtgenauigkeit bei der Herstellung und andererseits auch durch Ablagerung von Partikeln auf den Flügelscheiben entstehen können. Diese Schwingungen werden über die Lager an das Pumpengehäuse abgegeben.Molecular pumps and turbomolecular pumps are used to generate high and ultra-high vacuum. The pumping action is achieved in a turbomolecular pump by a combination of very fast rotating and with standing alternating wing discs. The fast-rotating wing discs sit on a shaft and together with this form the rotor. It rotates about its axis at tens of thousands of revolutions per minute. The rotation support is provided by axial and radial bearings, such as roller bearings and / or magnetic bearings. The rotation also creates vibrations, for example, by small imbalances of the rotor, which can arise on the one hand by the limited balancing accuracy in the production and on the other hand by deposition of particles on the wing discs. These vibrations are delivered via the bearings to the pump housing.

Gerade wenn Turbomolekularpumpen in Analysegeräten zum Einsatz kommen, müssen Schwingungen unterdrückt werden, um Eznpfindlichkeitsverluste der Analysesysteme zu vermeiden. Der Formschritt in den elektrischen und elektronischen Komponenten der Analysesysteme hat zu einer deutlichen Steigerung der Nachweisempfindlichkeit geführt. In der Umkehrung bedeutet dies, dass Schwingungen des Vakuumsystems, also beispielsweise der Turbomolekularpumpe, in immer geringerem Maße toleriert werden können.Especially when turbomolecular pumps are used in analysis equipment, vibrations must be suppressed in order to avoid sensitivity losses of the analysis systems. The forming step in the electrical and electronic components of the analytical systems has led to a significant increase in detection sensitivity. In reverse, this means that vibrations of the vacuum system, so for example, the turbomolecular pump, can be tolerated to an ever lesser extent.

Im Stand der Technik werden zwei Wege beschritten, um eine Übertragung der Schwingungen auf das Analysesystem zu vermeiden.In the prior art, two approaches are taken to avoid transmission of the vibrations to the analysis system.

Der erste Weg, offenbart in DE-OS 101 17 075 , versucht, die Vakuumpumpe über eine schwingungsentkoppelnde Komponente mit Flansch und Analysesystem oder Vakuumkammer zu verbinden. Dadurch soll eine Übertragung der Schwingungen vermieden werden. Diese Lösung erfordert allerdings zusätzlichen Bauraum, der in den heute immer kleiner werdenden Systemen nicht zur Verfügung steht. Außerdem führen zusätzliche Komponenten im Valcuumsystem insbesondere vor dem Ansaugflansch zu Leitwertverlusten. Auch diese sind im Zuge der Effizienzsteigerung und angestrebter sinkender Leistungsaufnahme nicht oder schwer tolerierbar.The first way, revealed in DE-OS 101 17 075 , attempts to connect the vacuum pump to the flange and analysis system or vacuum chamber via a vibration isolating component. This is to prevent transmission of the vibrations. However, this solution requires additional space, which is not available in today ever smaller systems. In addition, additional components in the valcue system lead, in particular before the intake flange, to conductance losses. These too are not or hardly tolerable in the course of the increase in efficiency and the targeted decline in power consumption.

In DE 35 37 822 wird daher eine Vakuumpumpe vorgestellt, in der die Lager des schnelldrehenden Rotors durch ein System aus Elastomerringen gegen das Pumpengehäuse abgestützt wird. Dadurch wird die Übertragung von Schwingungen über die Lager reduziert. Leider zeigt sich, dass noch immer Schwingungen von der Vakuumpumpe übertragen werden.In DE 35 37 822 Therefore, a vacuum pump is presented in which the bearings of the high-speed rotor is supported by a system of elastomeric rings against the pump housing. This reduces the transmission of vibrations through the bearings. Unfortunately, it shows that vibrations are still transmitted by the vacuum pump.

Auch der Antrieb kann Quelle von Schwingungen sein ( Journal of Vacuum Science and Technology A, 7 (1989) May/June, Nr. 311, New York, US, pp. 2377-2380 ). Die Motorgeometrie, also Rundheit und Ausrichtung der Komponenten, ist nach diesem Artikel maßgeblich für die Stärke der Schwingung und ebenso für eine erfolgreiche Unterdrückung.The drive can also be the source of vibrations ( Journal of Vacuum Science and Technology A, 7 (1989) May / June, No. 311, New York, US, pp. 2377-2380 ). The motor geometry, ie roundness and orientation of the components, is, according to this article, decisive for the strength of the vibration and also for a successful suppression.

Ein weiteres zum Stand der Technik gehörendes Dämpfungssystem für magnetisch gelagerte Rotoren ( DE 197 12 711 A1 ) sieht ein Zwischenbauteil vor, welches schwingungsgedämpft gelagert ist. An dem Zwischenbauteil ist ein Statormagnct angeordnet. Dem Statormagnet gegenüberliegend ist ein Rotormagnet angeordnet. Diese zum Stand der Technik gehörende Vorrichtung weist den Nachteil auf, dass Schwingungen des Antriebes nicht gedämpft werden.Another state-of-the-art damping system for magnetically supported rotors (US Pat. DE 197 12 711 A1 ) provides an intermediate component, which is mounted vibration-damped. A stator magnet is arranged on the intermediate component. The stator magnet opposite a rotor magnet is arranged. This belonging to the prior art device has the disadvantage that vibrations of the drive are not damped.

Weiterhin gehört zum Stand der Technik ( DE 2 249 985 A1 ) eine Turbomolekularpumpe. Gemäß dieser Druckschrift ist zwar das Gehäuse des Antriebsmotors in einem Flanschteil des Pumpengehäuses elastisch gelagert. Weitere Lagerstellen der Rotorwelle können ebenfalls mit dämpfenden Federpaketen oder dergleichen versehen sein. Diese zum Stand der Technik gehörende Turbomolekularpumpe weist jedoch den Nachteil auf, dass die Dämpfung noch nicht optimiert istFurthermore belongs to the state of the art ( DE 2 249 985 A1 ) a turbomolecular pump. According to this document, although the housing of the drive motor is elastically mounted in a flange part of the pump housing. Other bearings of the rotor shaft may also be provided with damping spring packs or the like. However, this belonging to the prior art turbomolecular pump has the disadvantage that the damping is not yet optimized

Die Aufgabe ist es, eine Vakuumpumpe vorzustellen, bei der die am Gehäuse auftretenden Schwingungen gegenüber dem Stand der Technik reduziert werden. Zusätzlicher Platzbedarf außerhalb der Pumpe und eine Vergrößerung des Gehäuses sollen vermieden werden.The object is to present a vacuum pump in which the vibrations occurring at the housing are reduced compared to the prior art. Additional space outside the pump and an enlargement of the housing should be avoided.

Gelöst wird diese Aufgabe durch die kennzeichnenden Merkmale des ersten Anspruchs. Die weiteren Ansprüche stellen Ausgestaltungsformen dar.This object is achieved by the characterizing features of the first claim. The further claims represent embodiments.

Erfindungsgemäß werden die am Gehäuse auftretenden Schwingungen reduziert, indem mindestens ein Teil der elektrisch betriebenen Lager- und Antriebselemente schwingungstechnisch vom Gehäuse der Vakuumpumpe entkoppelt wird. Zu diesen elektrisch betriebenen Lager und Antriebselementen gehört der Motorstator. Die schwingungstechnische Entkopplung wird erreicht, indem der Stator des Antriebs, im Folgenden "Motorstator", elastisch im Gehäuse der Vakuumpumpe aufgehängt wird. Bei Vakuumpumpen mit konventioneller Lagerung kann die schwingungstechnische Entkopplung der Lager vom Gehäuse der Pumpe verbessert werden, indem zwischen Gehäuse und Lager ein Zwischenglied aus einem Material hoher Dichte in elastischem Material aufgehängt wird.
Bei solchen Vakuumpumpen, die einen Gleichstrommotor als Antrieb haben, der mit Pulsweitenmodulation (PWM) angesteuert wird, wird eine Übertragung der durch die PWM ausgelösten hochfrequenten Schwingungen auf das Gehäuse vermieden.
Bei leistungsstarken Antrieben muss die im Motorstator auftretende Verlustwärme berücksichtigt werden. Daher wird gemäß der Erfindung der Motorstator schwingungstechnisch vom Gehäuse entkoppelt und trotzdem die wärmetechnische Ankopplung beibehalten. Dazu werden Elemente eingebaut, die keine Schwingungen aber Wärme übertragen. Hierdurch wird eine unzulässige Stauung der Wärme im Motorstator vermieden und trotzdem das am Gehäuse der Pumpe auftretende Maß an Schwingungen reduziert.According to the invention, the vibrations occurring at the housing are reduced by at least part of the electrically operated bearing and drive elements being decoupled from the housing of the vacuum pump in terms of vibration technology. These electrically operated bearings and drive elements include the motor stator. The vibrational decoupling is achieved by the stator of the drive, hereinafter "motor stator", elastically suspended in the housing of the vacuum pump. In vacuum pumps with conventional storage, the vibration isolation of the bearings can be improved by the housing of the pump by between housing and bearing an intermediate member of a high density material is suspended in elastic material.
In such vacuum pumps, which have a DC motor as the drive, which is driven by pulse width modulation (PWM), a transmission of the high-frequency vibrations caused by the PWM is avoided on the housing.
For high-performance drives, the heat loss occurring in the motor stator must be taken into account. Therefore, according to the invention, the motor stator vibrationally decoupled from the housing and still maintain the heat technology coupling. For this purpose, elements are incorporated that transmit no vibrations but heat. As a result, an impermissible stagnation of the heat is avoided in the motor stator and still reduces the occurring at the housing of the pump level of vibration.

Die Erfindung soll am Beispiel einer erfindungsgemäß gestalteten Turbomolekularpumpe an Hand der Figuren dargestellt werden.
Es zeigen:

Fig. 1
Senkrechter Schnitt durch eine Turbomolekularpumpe mit schwingungstechnischer Entkopplung des Antriebes;
Fig. 2
schwingungstechnische Entkopplung eines der Rotorlager mit einem Zwischenglied;
Fig. 3
schwingungstechnische Entkopplung bei wärmetcchnischer Kopplung des Motorstators;
Fig. 4
eine weitere Maßnahme zur Abführung der Wärme vom Motor;
Fig. 5
vertikaler Schnitt durch ein aktiv geregeltes Radialmagnetlager.
The invention will be illustrated using the example of an inventively designed turbomolecular pump with reference to the figures.
Show it:
Fig. 1
Vertical section through a turbomolecular pump with vibrational decoupling of the drive;
Fig. 2
vibration control decoupling of one of the rotor bearings with an intermediate member;
Fig. 3
vibration-related decoupling with heat-technical coupling of the motor stator;
Fig. 4
another measure to dissipate the heat from the engine;
Fig. 5
vertical section through an actively controlled radial magnetic bearing.

Die erste Figur zeigt eine Turbomolekularpumpe 1 mit einem Gehäuse 2, welches einen Gaseintritt 3 und einen Gasaustritt 4 aufweist. Zwischen dem Gaseintritt und - austritt wird das Gas durch eine pumpaktive Struktur gefördert. Diese Struktur weist rotierende pumpaktive Bauteile 9 und stehende pumpaktive Bauteile 10 auf. Die rotierenden Bauteile 9 sind auf einer Rotorwelle 5 befestigt, beide Teile 5 und 9 bilden zusammen den Rotor der Pumpe. Der Rotor ist mit Lagern 8 drehbar unterstützt. Auf der Rotorwelle sitzt der Motorrotor 6, der zusammen mit dem Motorstator 7 den Antrieb bildet. Erfindungsgemäß ist der Motorstator in elastischen Bauteilen 11 im Gehäuse 2 aufgehängt. Diese elastischen Bauteile können Elastomerringe sein. Eine Verschiebung der Ringe in axialer Richtung kann vermieden werden, indem in Gehäuse und Motorstator Nuten vorgesehen sind, in denen die Ringe mit einem Teil ihres Durchmessers eintauchen.
Der Motorrotor kann als eine Anordnung von Permanentmagneten ausgebildet sein, so dass sich insgesamt ein Gleichstrommotor ergibt. Vorzugsweise wird die Bestromung des Motorstators dann mit Pulsweitenmodulation durchgeführt.The first figure shows a turbomolecular pump 1 with a housing 2, which has a gas inlet 3 and a gas outlet 4. Between the gas inlet and outlet, the gas is conveyed through a pump-active structure. This structure has rotating pump-active components 9 and stationary pump-active components 10. The rotating components 9 are mounted on a rotor shaft 5, both parts 5 and 9 together form the rotor of the pump. The rotor is rotatably supported with bearings 8. On the rotor shaft sits the motor rotor 6, which forms the drive together with the motor stator 7. According to the invention, the motor stator is suspended in elastic components 11 in the housing 2. These elastic components may be elastomeric rings. A displacement of the rings in the axial direction can be avoided by grooves are provided in the housing and motor stator, in which the rings dive with a portion of their diameter.
The motor rotor can be designed as an arrangement of permanent magnets, so that the overall result is a DC motor. Preferably, the energization of the motor stator is then carried out with pulse width modulation.

Die durch die Lager übertragenen Schwingungen sind abhängig von der Art der Lager. In Vakuumpumpen, insbesondere Molekularpumpen, kommen verschiedene Lager wie Magnetlager (aktiv und passiv) und Wälzlager zum Einsatz. Letztere erzeugen und übertragen Schwingungen auf das Pumpengehäuse. Eine Ausführungsform der Erfindung reduziert daher die am Lager übertragenen Schwingungen. In Figur 2 ist ein Ausschnitt aus der Vakuumpumpe 1 gezeigt. Die Rotorwelle 5 mit den Permanentmagneten 6 ist durch ein Wälzlager drehbar unterstützt, welches einen auf der Rotorwelle sitzenden inneren Ring 17 und einen äußeren Ring 18 aufweist. Dieser Ring ist in einem Zwischenglied 12 gefasst, welches sich durch elastische Bauteile 11, z.B. Elastomerringe, im Gehäuse 2 abstützt. Dieses Zwischenglied ist aus Material mit hoher Dichte hergestellt, so dass es bei geringer Baugröße eine hohe Masse besitzt und damit schwingungsdämpfend wirkt. Im oberen Teil der Abbildung ist noch der Motorstator 7 zu sehen.The vibrations transmitted through the bearings are dependent on the type of bearings. In vacuum pumps, in particular molecular pumps, come various Bearings such as magnetic bearings (active and passive) and rolling bearings are used. The latter generate and transmit vibrations to the pump housing. An embodiment of the invention therefore reduces the vibrations transmitted to the bearing. In FIG. 2 a section of the vacuum pump 1 is shown. The rotor shaft 5 with the permanent magnets 6 is rotatably supported by a rolling bearing, which has an inner ring 17 seated on the rotor shaft and an outer ring 18. This ring is taken in an intermediate member 12, which is supported by elastic components 11, for example elastomeric rings, in the housing 2. This intermediate member is made of high-density material, so that it has a high mass with a small size and thus acts vibration-damping. In the upper part of the figure is still the motor stator 7 can be seen.

Figur 3 zeigt eine Ausführungsform der elastischen Aufhängung des Motorstators. Um den Rotor über den Antrieb in Drehung zu versetzen, muss Energie zugeführt werden, beispielsweise durch Bestromung der Spulen des Motorstators. Dabei wird nicht die gesamte zugeführte elektrische Energie in Rotationsenergie umgesetzt. Ein Teil wird als Verlustwärme frei. Bei Pumpen mit hohem Leistungsbedarf muss eine entsprechend hohe Verlustwärme abgeführt werden. In diesen Fällen ist eine wärmetechnische Ankopplung des Motorstators vorzusehen, bzw. die wärmetechnische Abkopplung zu vermeiden. Die notwendige Maßnahme ist in Figur 3 dargestellt: Zwischen Rotorwelle 5 und Gehäuse 2 der Vakuumpumpe sitzt der Motorstator 7. Die elastischen Bauteile 11 entkoppeln ihn schwingungstechnisch. Es entsteht ein Zwischenraum 15 im Bereich zwischen Motorstator 7, Gehäuse 2 und den elastischen Bauteilen 11. Dieser Bereich wird mit einem gut wärmeleitenden Material 16 gefüllt, das aber keine Schwingungen überträgt. Solche Mittel können beispielsweise hochviskose Flüssigkeiten sein. FIG. 3 shows an embodiment of the elastic suspension of the motor stator. In order to set the rotor in rotation via the drive, energy must be supplied, for example by energizing the coils of the motor stator. In this case, not all of the supplied electrical energy is converted into rotational energy. A part is released as heat loss. For pumps with high power requirements, a correspondingly high heat loss must be dissipated. In these cases, a heat technology coupling of the motor stator is to be provided, or to avoid the thermal decoupling. The necessary action is in FIG. 3 represented: Between the rotor shaft 5 and housing 2 of the vacuum pump sits the motor stator 7. The elastic components 11 decouple it vibrationally. The result is a space 15 in the area between the motor stator 7, housing 2 and the elastic members 11. This area is filled with a good heat conducting material 16, but does not transmit vibrations. Such agents may be, for example, highly viscous liquids.

In einer anderen Ausführungsform kann es sich bei diesen Mitteln um Wärmeleitpaste handeln.In another embodiment, these means may be thermal grease.

In einer weiteren Ausführungsform handelt es sich bei diesen Mitteln um ein Gewebe oder ein Geflecht aus gut wärmeleitendem Material. Beispielsweise kann dieses Gewebe oder Geflecht aus Material mit hohen Kupfer- oder Aluminiumanteilen bestehen.In a further embodiment, these means are a woven fabric or a mesh of good heat-conducting material. For example, this fabric or braid may consist of material with high proportions of copper or aluminum.

Eine wirksame Kühlung des Motorstators kann auch erreicht werden, indem mindestens ein Kühlkanal im Bereich des Motorstators vorgesehen ist, in dem ein Kühlmittel zirkuliert. Dies ist in Figur 4 dargestellt. Auf dem Motorstator 7 sitzt eine Hülse 19 mit einem gewindeartig um den Motorstator geführten Kühlkanal 20. In diesem Kanal zirkuliert ein Kühlmittel, beispielsweise Wasser, welches durch den Einlass 25 in den Kanal oder die Kanäle ein- und durch den Auslass 26 wieder austritt. Statt dem einfachen Kanal können auch mehrere parallele Kanäle angeordnet sein. Der Motorstator selbst ist mit den elastischen Bauelementen 11 im Gehäuse 2 der Vakuumpumpe aufgehängt.An effective cooling of the motor stator can also be achieved by providing at least one cooling channel in the region of the motor stator, in which a coolant circulates. This is in FIG. 4 shown. On the motor stator 7 sits a sleeve 19 with a thread-like guided around the motor stator cooling channel 20. In this channel circulates a coolant, such as water, which enters through the inlet 25 into the channel or channels and exits through the outlet 26 again. Instead of the simple channel and several parallel channels can be arranged. The motor stator itself is suspended with the elastic components 11 in the housing 2 of the vacuum pump.

Eine weitere Ausführungsform betrifft solche Vakuumpumpen, deren Lager 8 aktive Magnetlager sind, wobei diese sowohl in axialer als auch in radialer Richtung aktiv sein können. Diese Lager gehören ebenfalls zu den elektrisch betriebenen Lager- und Antriebselementen. Gezeigt ist dies beispielhaft an einem aktiven radialen Magnetlager 24 in Figur 5. In aktiven Magnetlager findet eine Regelung des Stromes in den Steuerspulen 21 statt, wobei mit diesem Strom magnetische Rückstellkräfte erzeugt werden. Diese Kräfte sollen der durch einen Sensor 23 gemessenen Auslenkung der Rotorwelle 5 entgegenwirken. Ein gängiges Verfahren ist die Stromregelung per Pulsweitenmodulation. Die Frequenz dieser Pulsweitenmodulation ist den Stellkräften aufgeprägt, wodurch mechanische Schwingungen an dem Lagerstator 22 auftreten, die auf das Pumpengehäuse 2 übertragen werden. Erfindungsgemäß können diese Schwingungen vermieden werden, indem der Lagerstator in elastischen Bauteilen 11 gelagert wird. Die Amplituden jener Schwingungen, die durch den Lagerstator erzeugt werden, müssen nicht mit denjenigen des Motorstators vergleichbar sein. Abhängig vom gegebenenAnother embodiment relates to such vacuum pumps whose bearings are 8 active magnetic bearings, which can be active in both the axial and in the radial direction. These bearings also belong to the electrically operated bearing and drive elements. This is shown by way of example on an active radial magnetic bearing 24 in FIG FIG. 5 , In active magnetic bearing control of the current takes place in the control coils 21, which magnetic restoring forces are generated with this current. These forces are intended to counteract the deflection of the rotor shaft 5 measured by a sensor 23. A common method is the current control by pulse width modulation. The frequency of this pulse width modulation is impressed on the actuating forces, whereby mechanical vibrations occur on the bearing stator 22, which are transmitted to the pump housing 2. According to the invention, these vibrations can be avoided by supporting the bearing stator in elastic components 11. The amplitudes of those vibrations generated by the bearing stator need not be comparable to those of the motor stator. Depending on the given

Fall kann es daher sinnvoll sein, Motorstator und Lagerstator in elastischen Bauelementen (wie bspw. Elastomerringe, Vitonringe, etc.) zu lagern.Case, it may therefore be useful to store motor stator and bearing stator in elastic components (such as. Elastomer rings, Viton rings, etc.).

Claims (14)

  1. A vacuum pump (1), having a casing (2) which has at least one gas inlet (3) and gas outlet (4), having a rotor shaft (5), having a drive which rotates the rotor shaft and includes a motor rotor (6) on the rotor shaft and a motor stator (7), having bearings (8) which rotatably support the rotor shaft, having rotating components (9) and stationary components (10) which are active in pumping,
    characterised
    in that the motor stator is an electrically operated drive element and is retained in the casing by resilient structural elements (11), and in that means (16) for thermal coupling are provided in the intermediate space (15) between the motor stator (7) and the casing (2).
  2. A vacuum pump according to Claim 1, characterised in that at least one of the bearings (8) is seated in an intermediate member (12) that is retained by resilient structural elements.
  3. A vacuum pump according to Claim 2, characterised in that the intermediate member (12) is made from a material of high density.
  4. A vacuum pump according to one of the preceding claims, characterised in that at least one of the bearings (8) is a roller bearing.
  5. A vacuum pump according to Claim 1, characterised in that at least one of the bearings (8) is an actively regulated magnetic bearing and is part of the electrically operated bearing and drive elements.
  6. A vacuum pump according to one of the preceding claims, characterised in that the resilient structural elements (11) are elastomer rings.
  7. A vacuum pump according to Claim 1, characterised in that the means (16) for thermal coupling are highly viscous fluids.
  8. A vacuum pump according to Claim 1, characterised in that the means comprise thermally conductive paste.
  9. A vacuum pump according to Claim 1, characterised in that the means are fabrics or braids made from material which has good thermal conductivity.
  10. A vacuum pump according to Claim 9, characterised in that the material contains copper.
  11. A vacuum pump according to Claim 9, characterised in that the material contains aluminium.
  12. A vacuum pump according to one of the preceding claims, characterised in that the vacuum pump (1) is a turbomolecular pump.
  13. A vacuum pump according to one of the preceding claims, characterised in that the motor rotor (6) is an arrangement of permanent magnets.
  14. A vacuum pump according to one of the preceding claims, characterised in that at least one cooling duct (20) is arranged in the region of the motor stator (7).
EP20050021097 2004-10-19 2005-09-28 Low vibration vacuum pump Not-in-force EP1650441B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200410050743 DE102004050743A1 (en) 2004-10-19 2004-10-19 Vacuum pump with housing and gas input and gas output

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EP1650441A2 EP1650441A2 (en) 2006-04-26
EP1650441A3 EP1650441A3 (en) 2012-04-25
EP1650441B1 true EP1650441B1 (en) 2014-07-30

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EP20050021097 Not-in-force EP1650441B1 (en) 2004-10-19 2005-09-28 Low vibration vacuum pump

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DE102009027872A1 (en) 2009-07-21 2011-01-27 Brose Fahrzeugteile GmbH & Co. Kommanditgesellschaft, Würzburg Arrangement for the acoustic decoupling of a stator of an electric motor
DE102011105806A1 (en) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vacuum pump with rotor
CN102425561B (en) * 2011-12-05 2014-04-30 北京中科科仪股份有限公司 Dynamic balance method for magnetic suspension molecular pump
CN102425563B (en) * 2011-12-08 2014-03-12 北京中科科仪股份有限公司 Method and system for synchronously inhibiting subcritical vibration of rotor of magnetic suspension molecular pump
FR3016294B1 (en) * 2014-01-14 2019-08-02 Airfan METHOD FOR THERMAL AND PHONIC OPTIMIZATION OF A REGULATED GAS PRODUCTION ENGINE AND CORRESPONDING RESPIRATORY ASSISTANCE APPARATUS
DE102022214013A1 (en) 2022-12-20 2024-06-20 Robert Bosch Gesellschaft mit beschränkter Haftung Connection plate for an electrical machine with a flexible decoupling element

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DE2249985A1 (en) * 1972-10-12 1974-04-18 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP
US3877546A (en) * 1973-04-12 1975-04-15 Airco Inc Lubrication system for vertical spindle motor
DE3239328C2 (en) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetically mounted turbomolecular pump with vibration damping
EP0196352A1 (en) * 1985-04-04 1986-10-08 Leybold Aktiengesellschaft Turbomolecular vacuum pump having a rotor and at least one roller bearing
DE3537822A1 (en) 1985-10-24 1987-04-30 Leybold Heraeus Gmbh & Co Kg VACUUM PUMP WITH HOUSING AND ROTOR
JP2823412B2 (en) * 1992-02-21 1998-11-11 ファナック株式会社 Motor cooling device
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DE19846189A1 (en) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Friction vacuum pump
JP2002123685A (en) 2000-10-13 2002-04-26 Mitsubishi Electric Corp Information terminal equipment
JP2003083249A (en) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd Vacuum pump

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EP1650441A3 (en) 2012-04-25
EP1650441A2 (en) 2006-04-26
DE102004050743A1 (en) 2006-04-20

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