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EP1650441A2 - Pompe à vide à faible vibration - Google Patents

Pompe à vide à faible vibration Download PDF

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Publication number
EP1650441A2
EP1650441A2 EP05021097A EP05021097A EP1650441A2 EP 1650441 A2 EP1650441 A2 EP 1650441A2 EP 05021097 A EP05021097 A EP 05021097A EP 05021097 A EP05021097 A EP 05021097A EP 1650441 A2 EP1650441 A2 EP 1650441A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump according
motor stator
housing
bearings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05021097A
Other languages
German (de)
English (en)
Other versions
EP1650441A3 (fr
EP1650441B1 (fr
Inventor
Helmut Bernhardt
Armin Blecker
Heinz Reichhart
Jörg Stanzel
Wolfgang Eberl
Christopher Mark Rippl
Michael Willig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1650441A2 publication Critical patent/EP1650441A2/fr
Publication of EP1650441A3 publication Critical patent/EP1650441A3/fr
Application granted granted Critical
Publication of EP1650441B1 publication Critical patent/EP1650441B1/fr
Anticipated expiration legal-status Critical
Not-in-force legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a low-vibration vacuum pump according to the preamble of the first claim.
  • Vacuum pumps have many components that can generate mechanical vibrations or vibrations of the entire pump. These vibrations can then be transferred via the flange to the vacuum chamber or other connected systems.
  • Molecular pumps and turbomolecular pumps are used to generate high and ultra high vacuum.
  • the pumping action is achieved in a turbomolecular pump by a combination of very fast rotating and with standing alternating wing discs.
  • the fast-rotating wing discs sit on a shaft and together with this form the rotor. It rotates about its axis at tens of thousands of revolutions per minute.
  • the rotation support is provided by axial and radial bearings, such as roller bearings and / or magnetic bearings.
  • the rotation also creates vibrations, for example, by small imbalances of the rotor, which can arise on the one hand by the limited balancing accuracy in the production and on the other hand by deposition of particles on the wing discs. These vibrations are delivered via the bearings to the pump housing.
  • the drive can be a source of vibration (Journal of Vacuum Science and Technology A, 7 (1989) May / June, No. 311, New York, US, pp. 2377-2380).
  • the motor geometry, ie roundness and orientation of the components, is, according to this article, decisive for the strength of the vibration and also for a successful suppression.
  • the object is to present a vacuum pump in which the vibrations occurring at the housing are reduced compared to the prior art.
  • the vibrations occurring at the housing are reduced by at least part of the electrically operated bearing and drive elements being decoupled from the housing of the vacuum pump in terms of vibration technology.
  • These electrically operated bearing and drive elements include the motor stator.
  • the vibrational decoupling is achieved by the stator of the drive, hereinafter “motor stator”, elastically suspended in the housing of the vacuum pump.
  • motor stator elastically suspended in the housing of the vacuum pump.
  • vacuum pumps with conventional storage vibration isolation of the bearing can be improved by the housing of the pump by between housing and bearing an intermediate member of a high density material is suspended in elastic material.
  • PWM pulse width modulation
  • the motor stator is vibrationally decoupled from the housing and still maintain the heat engineering coupling.
  • elements are incorporated that transmit no vibrations but heat. As a result, an impermissible stagnation of the heat is avoided in the motor stator and still reduces the occurring at the housing of the pump level of vibration.
  • the first figure shows a turbomolecular pump 1 with a housing 2, which has a gas inlet 3 and a gas outlet 4. Between the gas inlet and outlet, the gas is conveyed through a pump-active structure.
  • This structure has rotating pump-active components 9 and stationary pump-active components 10.
  • the rotating components 9 are mounted on a rotor shaft 5, both parts 5 and 9 together form the rotor of the pump.
  • the rotor is rotatably supported with bearings 8.
  • On the rotor shaft sits the motor rotor 6, which forms the drive together with the motor stator 7.
  • the motor stator is suspended in elastic components 11 in the housing 2. These elastic components may be elastomeric rings.
  • a displacement of the rings in the axial direction can be avoided by grooves are provided in the housing and motor stator, in which the rings dive with a portion of its diameter.
  • the motor rotor can be designed as an arrangement of permanent magnets, so that the overall result is a DC motor.
  • the energization of the motor stator is then carried out with pulse width modulation.
  • FIG. 2 shows a detail of the vacuum pump 1.
  • the rotor shaft 5 with the permanent magnets 6 is rotatably supported by a rolling bearing, which has an inner ring 17 seated on the rotor shaft and an outer ring 18.
  • This ring is taken in an intermediate member 12, which is supported by elastic components 11, for example elastomeric rings, in the housing 2.
  • This intermediate member is made of high-density material, so that it has a high mass with a small size and thus acts vibration-damping.
  • the motor stator 7 can be seen.
  • FIG. 3 shows an embodiment of the elastic suspension of the motor stator.
  • energy In order to set the rotor in rotation via the drive, energy must be supplied, for example by energizing the coils of the motor stator. In this case, not all of the supplied electrical energy is converted into rotational energy. A part is released as heat loss. For pumps with high power requirements, a correspondingly high heat loss must be dissipated. In these cases, a heat technology coupling of the motor stator is to be provided, or to avoid the thermal decoupling.
  • FIG. 3 the motor stator 7 sits between the rotor shaft 5 and the housing 2 of the vacuum pump.
  • the elastic components 11 decouple it from an oscillation point of view. The result is a space 15 in the area between the motor stator 7, housing 2 and the elastic members 11. This area is filled with a good heat conducting material 16, but does not transmit vibrations.
  • Such agents may be, for example, highly viscous liquids.
  • these means may be thermal grease.
  • these means are a woven fabric or a mesh of good heat-conducting material.
  • this fabric or braid may consist of material with high proportions of copper or aluminum.
  • An effective cooling of the motor stator can also be achieved by providing at least one cooling channel in the region of the motor stator, in which a coolant circulates. This is shown in FIG.
  • a coolant such as water
  • the motor stator itself is suspended with the elastic components 11 in the housing 2 of the vacuum pump.
  • Another embodiment relates to such vacuum pumps whose bearings are 8 active magnetic bearings, which can be active in both the axial and in the radial direction. These bearings also belong to the electrically operated bearing and drive elements. This is shown by way of example of an active radial magnetic bearing 24 in Figure 5.
  • active magnetic bearings is a regulation of the current in the control coils 21 instead, with this current magnetic restoring forces are generated. These forces are intended to counteract the deflection of the rotor shaft 5 measured by a sensor 23.
  • a common method is the current control by pulse width modulation. The frequency of this pulse width modulation is impressed on the actuating forces, whereby mechanical vibrations occur on the bearing stator 22, which are transmitted to the pump housing 2.
  • these vibrations can be avoided by supporting the bearing stator in elastic components 11.
  • the amplitudes of those vibrations generated by the bearing stator need not be comparable to those of the motor stator.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Vibration Prevention Devices (AREA)
  • Reciprocating Pumps (AREA)
EP20050021097 2004-10-19 2005-09-28 Pompe à vide à faible vibration Not-in-force EP1650441B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200410050743 DE102004050743A1 (de) 2004-10-19 2004-10-19 Vibrationsarme Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP1650441A2 true EP1650441A2 (fr) 2006-04-26
EP1650441A3 EP1650441A3 (fr) 2012-04-25
EP1650441B1 EP1650441B1 (fr) 2014-07-30

Family

ID=35506016

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20050021097 Not-in-force EP1650441B1 (fr) 2004-10-19 2005-09-28 Pompe à vide à faible vibration

Country Status (2)

Country Link
EP (1) EP1650441B1 (fr)
DE (1) DE102004050743A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102425563A (zh) * 2011-12-08 2012-04-25 北京中科科仪技术发展有限责任公司 同步抑制磁悬浮分子泵转子次临界振动的方法和系统
WO2013083000A1 (fr) * 2011-12-05 2013-06-13 北京中科科仪股份有限公司 Procédé d'équilibrage dynamique d'une pompe moléculaire à sustentation magnétique (5)
FR3016294A1 (fr) * 2014-01-14 2015-07-17 Airfan Procede d'optimisation thermique et phonique d'un moteur de production regule de gaz et appareil d'assistance respiratoire correspondant

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009027872A1 (de) 2009-07-21 2011-01-27 Brose Fahrzeugteile GmbH & Co. Kommanditgesellschaft, Würzburg Anordnung zur akustischen Entkopplung eines Stators eines Elektromotors
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
DE102022214013A1 (de) 2022-12-20 2024-06-20 Robert Bosch Gesellschaft mit beschränkter Haftung Anschlussplatte für eine elektrische Maschine mit einem flexiblen Entkoppelelement

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2249985A1 (de) 1972-10-12 1974-04-18 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE3537822A1 (de) 1985-10-24 1987-04-30 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe mit gehaeuse und rotor
DE19712711A1 (de) 1997-03-26 1998-10-01 Pfeiffer Vacuum Gmbh Dämpfungssystem für magnetisch gelagerte Rotoren
DE10117075A1 (de) 2000-10-13 2002-04-25 Mitsubishi Electric Corp Informationsterminalgerät

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3877546A (en) * 1973-04-12 1975-04-15 Airco Inc Lubrication system for vertical spindle motor
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
EP0196352A1 (fr) * 1985-04-04 1986-10-08 Leybold Aktiengesellschaft Pompe turbomoléculaire à vide ayant un rotor et au moins un palier à rouleaux
JP2823412B2 (ja) * 1992-02-21 1998-11-11 ファナック株式会社 電動機の冷却装置
DE19846189A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe
JP2003083249A (ja) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2249985A1 (de) 1972-10-12 1974-04-18 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE3537822A1 (de) 1985-10-24 1987-04-30 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe mit gehaeuse und rotor
DE19712711A1 (de) 1997-03-26 1998-10-01 Pfeiffer Vacuum Gmbh Dämpfungssystem für magnetisch gelagerte Rotoren
DE10117075A1 (de) 2000-10-13 2002-04-25 Mitsubishi Electric Corp Informationsterminalgerät

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOUMAL OF VACUUM SCIENCE AND TECHNOLOGY A, vol. 7, no. 311, May 1989 (1989-05-01), pages 2377 - 2380

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013083000A1 (fr) * 2011-12-05 2013-06-13 北京中科科仪股份有限公司 Procédé d'équilibrage dynamique d'une pompe moléculaire à sustentation magnétique (5)
GB2511985A (en) * 2011-12-05 2014-09-17 Kyky Technology Co Ltd Method of dynamic balance for magnetic levitation molecular pump
US9479035B2 (en) 2011-12-05 2016-10-25 Kyky Technology Co., Ltd. Method of dynamic balancing for magnetic levitation molecular pump
GB2511985B (en) * 2011-12-05 2018-05-23 Kyky Technology Co Ltd Method of rotor dynamic balancing for magnetic levitation molecular pump
CN102425563A (zh) * 2011-12-08 2012-04-25 北京中科科仪技术发展有限责任公司 同步抑制磁悬浮分子泵转子次临界振动的方法和系统
WO2013082998A1 (fr) * 2011-12-08 2013-06-13 北京中科科仪股份有限公司 Procédé et système de suppression synchrone de la vibration sous-critique d'un rotor de pompe moléculaire à suspension magnétique
CN102425563B (zh) * 2011-12-08 2014-03-12 北京中科科仪股份有限公司 同步抑制磁悬浮分子泵转子次临界振动的方法和系统
GB2511984A (en) * 2011-12-08 2014-09-17 Kyky Technology Co Ltd Method and system for synchronously suppressing subcritical vibration of magnetic suspension molecular pump rotor
GB2511984B (en) * 2011-12-08 2019-04-10 Kyky Technology Co Ltd Method and system for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor
FR3016294A1 (fr) * 2014-01-14 2015-07-17 Airfan Procede d'optimisation thermique et phonique d'un moteur de production regule de gaz et appareil d'assistance respiratoire correspondant
WO2015107027A1 (fr) * 2014-01-14 2015-07-23 Airfan Procede d'optimisation thermique et phonique d'un appareil de production regule de gaz, et appareil d'assistance respiratoire correspondant

Also Published As

Publication number Publication date
EP1650441A3 (fr) 2012-04-25
EP1650441B1 (fr) 2014-07-30
DE102004050743A1 (de) 2006-04-20

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