[go: up one dir, main page]

EP1537611A1 - Corps ceramique comprenant une couche ceramique homogene et procede de production de ce corps - Google Patents

Corps ceramique comprenant une couche ceramique homogene et procede de production de ce corps

Info

Publication number
EP1537611A1
EP1537611A1 EP03750280A EP03750280A EP1537611A1 EP 1537611 A1 EP1537611 A1 EP 1537611A1 EP 03750280 A EP03750280 A EP 03750280A EP 03750280 A EP03750280 A EP 03750280A EP 1537611 A1 EP1537611 A1 EP 1537611A1
Authority
EP
European Patent Office
Prior art keywords
ceramic
layer
homogeneous
layers
ceramic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03750280A
Other languages
German (de)
English (en)
Inventor
Karl Lubitz
Carsten Schuh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of EP1537611A1 publication Critical patent/EP1537611A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
    • B32B2315/02—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/345—Refractory metal oxides
    • C04B2237/348—Zirconia, hafnia, zirconates or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/68—Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer

Definitions

  • the invention relates to a ceramic body with at least one essentially homogeneous ceramic layer.
  • a method for producing the ceramic body is also specified.
  • a ceramic body of the type mentioned and a method for its production are known from US Pat. No. 6,260,248 B1.
  • the ceramic body is a multi-layer piezo actuator.
  • the piezo actuator consists of a large number of ceramic layers arranged one above the other with a ceramic material made of doped lead zirconate titanate Pb (Zr, Ti) 0 3 .
  • the ceramic green foils consist of a green ceramic.
  • the green ceramic is a not yet compacted ceramic and consists of powdered lead zirconate titanate and an organic binder.
  • a layer thickness of the green sheet is, for example, 100 ⁇ m.
  • the stack of printed green foils is consolidated.
  • the stack is laminated and then subjected to a heat treatment.
  • the heat treatment includes debinding of the ceramic green sheets and subsequent sintering.
  • the piezo actuator results in a multilayer construction, the individual ceramic layers being essentially homogeneous.
  • the entire piezo actuator is inhomogeneous.
  • the internal electrodes made of the silver-palladium alloy are arranged in the volume of the piezo actuator.
  • the individual phases each form a chemical and physical unit. Both phases are not homogeneously distributed over the entire piezo actuator.
  • the object of the present invention is to show how an essentially homogeneous ceramic body can be provided.
  • a ceramic body with at least one essentially homogeneous ceramic layer is specified.
  • the ceramic body is characterized in that the ceramic layer has a multiplicity of homogeneous ceramic partial layers arranged one above the other.
  • a method for producing the ceramic body is also specified to achieve the object.
  • the process is characterized by the following process steps: a) Arranging the homogeneous ceramic partial layers one above the other a stack and b) solidifying the stack, the ceramic body being formed with the ceramic layer.
  • the basic idea is to build up the ceramic body or a ceramic layer of the ceramic body from a multiplicity of homogeneous ceramic partial layers and thus to obtain a ceramic body with a homogeneous ceramic layer.
  • the ceramic partial layers can have the same or different partial layer thicknesses.
  • a homogeneous ceramic sublayer consists of a single phase.
  • the phase is formed, for example, from a single ceramic material, the composition of which is independent of location. This means that there is no crack and also almost no gradient in the composition of the ceramic material in the ceramic partial layer. It is also conceivable that there are several phases.
  • the ceramic layer consists of various ceramic materials. The ceramic materials are ' evenly distributed over the entire. There is no concentration of any of the ceramic materials. Ceramic and non-ceramic phases can also be present. This non-ceramic phase is, for example, an organic binder of a green ceramic.
  • the homogeneous ceramic layer is characterized, for example, by a uniform structure. This leads to an improvement in certain properties of the ceramic body compared to a ceramic body with an inhomogeneous ceramic layer.
  • the ceramic body is a piezoelectric transformer. A small number of pores, inclusions, foreign phases or other defects in the ceramic layer leads to a relatively high piezo activity in the piezoelectric transformer, for example.
  • a homogeneous polarity state is realized, which leads to a uniform mechanical load during operation of the transformer. The result is a long service life and high reliability of the transformer.
  • the ceramic sublayer has a ceramic material selected from the group of green ceramics and / or sintered ceramics.
  • Sintered ceramic is an at least partially compacted ceramic.
  • Green ceramic is a ceramic that has not yet been compacted.
  • the ceramic body can be present as a sintered ceramic body or as a green part (non-sintered ceramic body).
  • a sintered ceramic body is produced from the ceramic body in the form of a green part.
  • ceramic green foils with a green ceramic are used as homogeneous ceramic part layers for producing the ceramic body in the form of a green part.
  • These ceramic green films consist, for example, of powdered ceramic material and an organic binder.
  • the green foils consist of homogeneously distributed ceramic and non-ceramic material. Standard processes such as slip casting or film casting are used to produce the ceramic green films.
  • the powdered ceramic material consists, for example, of calcined ceramic.
  • At least one of the ceramic partial layers has a partial layer thickness selected from the range from 5 ⁇ m up to and including 250 ⁇ m.
  • the ceramic partial layers in the form of ceramic green foils have very fine powdered ceramic materials with the specified partial layer thicknesses. These very fine powdered ceramic materials lead to an improved chemical homogeneity of the green sheet, a higher sintering activity and thus to a compaction of the ceramic materials that takes place at lower temperatures.
  • the sintering temperature is relatively low.
  • a grain size distribution (microstructure) within a ceramic partial layer made of a ceramic green sheet is uniform.
  • the ceramic layer consisting of the ceramic partial layers is also characterized by this uniform grain size distribution.
  • the consolidation of the stack includes, in particular, a heat treatment of the stack.
  • the heat treatment is, for example, a debinding of the green ceramic.
  • the heat treatment includes sintering the stack.
  • At least one electrode layer is arranged on at least one surface section of the ceramic layer. At least one further electrode layer is preferably arranged on at least one further surface section of the ceramic layer in such a way that the electrode layers lie opposite one another and the ceramic layer is arranged between the electrode layers.
  • a ceramic body is, for example, a capacitor.
  • At least one of the electrode layers is arranged between the ceramic layer and at least one further ceramic layer.
  • the ceramic layer is essentially covered by the further ceramic layer.
  • the electrode layer is buried by the further ceramic layer.
  • the further ceramic layer is designed, for example, in such a way that an electrical and / or mechanical property of the component is not influenced or is influenced only slightly. Performance data of the component are retained.
  • the further ceramic layer is very thin, for example.
  • the further ceramic layer can also act as a so-called buffer layer. This is advantageous, for example, when the ceramic body is used in an atmosphere that is reactive with the electrode material of the electrode layer. For example, the ceramic body is used in an environment with high humidity.
  • the additional ceramic layer during sintering is inert to the ceramic material of the ceramic layer and partial ceramic layers and to a sintering environment.
  • the electrode layers are guided to separate, lateral surface sections of the ceramic body.
  • an outer metallization is applied to the surface sections.
  • the outer metallizations are applied, for example, using thick-film technology or by sputtering.
  • an electrical plated-through hole can be provided in the further ceramic layer covering the electrode layer for electrical contacting.
  • the . Electrical through-contacting is a through hole (hole) filled with electrically conductive material in the further ceramic layer. It is also conceivable that the additional ceramic layer does not completely, but only partially cover the electrode layer underneath. This leaves a freely accessible contact area of the electrode layer.
  • the ceramic material is, for example, a perovskite.
  • the ceramic material is a piezoceramic.
  • the piezoceramic is preferably a lead zirconate titanate.
  • the invention is distinguished by the following particular advantages: by using thin ceramic green foils with the powdered ceramic material, the sintering temperature can be reduced below 1,300 ° C. This has the advantage that certain components of the lead zirconate titanate, such as lead oxide (PbO) or manganese oxide (MnO), which are volatile during the sintering, do not evaporate to the same extent as with comparable block sintering at higher sintering temperatures would occur.
  • PbO lead oxide
  • MnO manganese oxide
  • a harmful reaction with a sintering aid occurs only to a small extent at lower sintering temperatures.
  • a surface layer of the ceramic body or the ceramic layer that is in contact with the sintering agent during sintering remains largely homogeneous. The surface layer is not destroyed to a depth of 1 mm to 3 mm, as is customary in block sintering at elevated temperatures. After the ceramic body has been produced, the surface layer does not have to be removed by grinding, sawing or the like.
  • Figure 1 shows a section of an embodiment of the ceramic body in the form of a transformer.
  • Figure 2 shows a section of an embodiment of the ceramic body in the form of a bending transducer.
  • Figures 3A to 3C show various electrical
  • each of the partial ceramic layers 3 has a "partial layer thickness of 4 microns of about 20 microns. 20 such ceramic partial layers are arranged one above the other.
  • the piezoelectric transformer 11 has a homogeneous ceramic layer 2 with a total layer thickness 5 of approximately 500 ⁇ m.
  • the ceramic body 1 is a piezoelectric bending transducer 12 (FIG. 2).
  • the homogeneous ceramic layer of the bending transducer consists of five homogeneous ceramic partial layers with partial layer thicknesses of approximately 20 ⁇ m.
  • the electrode layers 8 and 10 are guided to an edge of the homogeneous ceramic layer 2 and thus to a lateral surface section 17 of the piezoceramic bending transducer 12.
  • the electrode layers 8 and 10 are each covered over a large area by a further ceramic layer 13.
  • the layer thickness of the further ceramic layers 13 is approximately 10 ⁇ m.
  • the electrode layers 8 and 10 are buried under the further ceramic layers 13.
  • the piezoelectric bending transducer 12 can also be used in a moist environment which is reactive towards the electrode material of the electrode layers 8 and 10 and has a high long-term stability.
  • the electrode layers 8 and 10 corresponding to the electrode layers 8 and 10 of the transformer 11 of the first exemplary embodiment are not covered by further electrode layers and are freely accessible (cf. FIG. 1).
  • the piezoelectric transformer or the piezoelectric bending transducer To manufacture the piezoelectric transformer or the piezoelectric bending transducer, homogeneous ceramic partial layers in the form of ceramic green foils with a green ceramic are used as the starting point.
  • the ceramic green foils are arranged one above the other to form a stack (18, FIG. 4).
  • a die is used to enable the ceramic green foils to be stacked exactly one on top of the other.
  • the stack is subsequently solidified (19, FIG. 4). This is done by uniaxially pressing the stack (laminating). In an alternative embodiment, the solidification takes place by applying isostatic pressure.
  • the stack After the lamination, the stack is subjected to a heat treatment.
  • the heat treatment includes debinding and subsequent sintering.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

L'invention concerne un corps céramique (1) comprenant au moins une couche céramique (2) sensiblement homogène, cette couche céramique (2) homogène étant constituée d'une pluralité de sous-couches céramiques (4) homogènes superposées. Ce corps céramique peut être produit par exemple par empilage de sous-couches céramiques homogènes sous forme de feuilles céramiques vertes, élimination du liant et frittage. Comparé à un frittage en blocs classique, ce corps céramique peut être aggloméré à une température de frittage inférieure. Par ailleurs, la couche céramique de ce corps comporte un nombre réduit de pores, d'inclusions, de phases étrangères et autres défauts et présente une grande homogénéité. Le corps céramique selon l'invention est en particulier un transducteur de flexion piézoélectrique (12) ou un transformateur piézoélectrique (11). Ce transducteur de flexion ou ce transformateur comprennent de préférence des électrodes (8) de commande électrique noyées sous une couche céramique supplémentaire (13). Cette couche céramique supplémentaire et/ou cette couche d'électrodes servent de barrière de diffusion. Lors du frittage, la couche céramique homogène ne s'appauvrit pas en composants volatils et en cas d'utilisation dans un environnement humide, la diffusion de l'humidité dans ladite couche céramique homogène est empêchée.
EP03750280A 2002-09-11 2003-08-20 Corps ceramique comprenant une couche ceramique homogene et procede de production de ce corps Withdrawn EP1537611A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10241731 2002-09-11
DE10241731 2002-09-11
PCT/DE2003/002776 WO2004027888A1 (fr) 2002-09-11 2003-08-20 Corps ceramique comprenant une couche ceramique homogene et procede de production de ce corps

Publications (1)

Publication Number Publication Date
EP1537611A1 true EP1537611A1 (fr) 2005-06-08

Family

ID=32009813

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03750280A Withdrawn EP1537611A1 (fr) 2002-09-11 2003-08-20 Corps ceramique comprenant une couche ceramique homogene et procede de production de ce corps

Country Status (4)

Country Link
US (1) US20050249928A1 (fr)
EP (1) EP1537611A1 (fr)
JP (1) JP2006512750A (fr)
WO (1) WO2004027888A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005015600A1 (de) * 2005-04-05 2006-10-12 Epcos Ag Piezoelektrischer Transformator
DE102007015446A1 (de) * 2007-03-30 2008-10-02 Siemens Ag Piezoelektrisches Bauteil mit Sicherheitsschicht und Infiltrationsbarriere und Verfahren zu dessen Herstellung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107086A (en) * 1980-12-25 1982-07-03 Matsushita Electric Ind Co Ltd Lamination of piezoelectric ceramic green sheet
JPS6384175A (ja) * 1986-09-29 1988-04-14 Toyota Motor Corp 積層型セラミツクス素子の製造方法
JP2518703B2 (ja) * 1989-11-02 1996-07-31 堺化学工業株式会社 積層型複合圧電体およびその製造方法
US5089070A (en) * 1989-12-07 1992-02-18 Pac Polymers Inc. Poly(propylene carbonate)-containing ceramic tape formulations and the green tapes resulting therefrom
DE4201937C2 (de) * 1991-01-25 1997-05-22 Murata Manufacturing Co Piezoelektrisches laminiertes Stellglied
FR2701188B1 (fr) * 1993-01-29 1995-03-03 Thomson Csf Procédé de fabrication de composant piézoélectrique.
JP3358851B2 (ja) * 1993-03-11 2002-12-24 本田技研工業株式会社 感湿性アクチュエータ
US6395117B1 (en) * 1994-10-19 2002-05-28 Ngk Insulators Method for producing ceramic green sheet
US6140746A (en) * 1995-04-03 2000-10-31 Seiko Epson Corporation Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film
DE19615694C1 (de) * 1996-04-19 1997-07-03 Siemens Ag Monolithischer Vielschicht-Piezoaktor und Verfahren zur Herstellung
EP0813254B1 (fr) * 1996-06-14 2001-10-17 Ngk Insulators, Ltd. Procédé de fabrication d'une structure de membrane en céramique
US6552471B1 (en) * 1999-01-28 2003-04-22 Parallel Design, Inc. Multi-piezoelectric layer ultrasonic transducer for medical imaging
US6476542B2 (en) * 2000-12-20 2002-11-05 Cts Corporation Piezoelectric transformer with dual-phase input drive

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
None *
See also references of WO2004027888A1 *

Also Published As

Publication number Publication date
WO2004027888A1 (fr) 2004-04-01
JP2006512750A (ja) 2006-04-13
US20050249928A1 (en) 2005-11-10

Similar Documents

Publication Publication Date Title
EP1597780B1 (fr) Composant electrique multicouche et empilement de couches
EP0894340B1 (fr) Actionneur piezo multicouche monolithique, et son procede de production
EP1240675B1 (fr) Produit intermediaire pour composant piezoelectrique
EP3238218B1 (fr) Composant multicouche céramique et procédé de fabrication d'un composant céramique multicouche
DE102019107084B4 (de) Verfahren zur Herstellung eines gepolten piezokeramischen Formkörpers
DE3887186T2 (de) Verfahren zur Herstellung eines keramischen Mehrschichtkondensators.
EP2436051B1 (fr) Composant piézoélectrique
WO2007076849A1 (fr) Composant ceramique monolithique et son procede de fabrication
DE112008000744T5 (de) Mehrschichtiger Thermistor mit positivem Temperaturkoeffizienten
DE10006352A1 (de) Piezoelektrischer Keramikkörper mit silberhaltigen Innenelektroden
WO2002089160A2 (fr) Composant electrique multicouche et son procede de production
DE10021919C2 (de) Verfahren zur Herstellung monolithischer piezokeramischer Vielschichtaktoren sowie monolithischer piezokeramischer Vielschichtaktor
DE102020108573B4 (de) Piezoelektrisches Mehrschichtelement
EP2526574B1 (fr) Procédé de fabrication d'un élément multicouche piézoélectrique
EP1497838B1 (fr) Procédé pour la fabrication d'un composant ptc
EP1537611A1 (fr) Corps ceramique comprenant une couche ceramique homogene et procede de production de ce corps
DE10039649B4 (de) Verfahren zur Herstellung eines keramischen Vielschichtbauelements und entsprechendes Vielschichtbauelement
WO2001017038A1 (fr) Structure multicouche piezoceramique presentant une surface de section polygonale
DE10354964A1 (de) Piezoelektrische Keramik und Verfahren zur Herstellung derselben, Betätigungselement und Verfahren zum Herstellen desselben, Druckkopf und Tintenstrahldrucker
WO2007048756A1 (fr) Actionneur piezo-electrique et procede pour le fabriquer
DE102007049145A1 (de) Piezoaktor und Verfahren zu dessen Herstellung
EP2847805B1 (fr) Procédé de production d'un élément mulcicouche et élément multicouche produit selon ce procédé
DE102019206018B4 (de) Elektromechanischer Aktor mit keramischer Isolierung, Verfahren zu dessen Herstellung sowie Verfahren zur Ansteuerung eines solchen Aktors
DE102004005528A1 (de) Laminated piezoelectric elements
WO2010139568A1 (fr) Composant piézoélectrique à couches multiples

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20050223

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

RBV Designated contracting states (corrected)

Designated state(s): DE FR GB

17Q First examination report despatched

Effective date: 20051208

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20080301