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EP1521946A1 - Detecteur de position con u comme detecteur a effet hall - Google Patents

Detecteur de position con u comme detecteur a effet hall

Info

Publication number
EP1521946A1
EP1521946A1 EP03763663A EP03763663A EP1521946A1 EP 1521946 A1 EP1521946 A1 EP 1521946A1 EP 03763663 A EP03763663 A EP 03763663A EP 03763663 A EP03763663 A EP 03763663A EP 1521946 A1 EP1521946 A1 EP 1521946A1
Authority
EP
European Patent Office
Prior art keywords
position sensor
sensor according
hall
carrier
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03763663A
Other languages
German (de)
English (en)
Inventor
Thomas Reininger
Stephan Schauz
Jörg SCHREIER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP1521946A1 publication Critical patent/EP1521946A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2892—Means for indicating the position, e.g. end of stroke characterised by the attachment means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2807—Position switches, i.e. means for sensing of discrete positions only, e.g. limit switches
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3493—Moulded interconnect devices, i.e. moulded articles provided with integrated circuit traces

Definitions

  • the invention relates to a position sensor designed as a Hall sensor, which is provided in particular to detect a specific position of the moving output part, for example a piston, in connection with pneumatic or hydraulic linear drives.
  • German utility model G 9414869 shows a position sensor that can be fixed in a fastening groove of a working cylinder and is based on the magnetoresistive functional principle. It is actuated without contact by a permanent magnet moving past, which is arranged on the piston of the working cylinder.
  • DE 19504608 C2 describes a position sensor which has a tubular housing in which a carrier board provided with an electrical circuit is accommodated. A sensor element formed by a coil sits at the front end of the carrier board. The remaining cavities within the housing are filled with a thermoset compound.
  • a similar, inductive position sensor emerges from DE 10013218 AI.
  • This also contains a carrier board which is equipped with an electronic circuit and The iifcsä-LLiw one Su-ule carries, ⁇ ia ⁇ ri ⁇ nnSlisrung a metallic object generates a sensor signal.
  • the carrier board is, for example, a printed circuit board, a ceramic substrate or a flexible film.
  • the known position sensors have in common that they have relatively large dimensions and appear to be in need of improvement in the detection accuracy provided. For example, there are problems with multiple circuits when the actuating element that triggers the detection process moves past the sensor element.
  • MID Molded Interconnect Device
  • the realization of the position sensor on the basis of an injection-molded 3D circuit carrier according to the MID concept enables an optimal arrangement and alignment of the sensor element equipped with a Hall plate or formed by a Hall plate in the smallest space.
  • the sensor element can s elü ⁇ üi ⁇ e by rlip chip -T ⁇ cl ili and anisotropic adhesive on sprayed plastic bumps -a the wing of the carrier element.
  • bonding technology or classic assembly and connection techniques could also be used for fastening.
  • the circuit carrier is not only equipped with the sensor element, but also takes up the layout of the conductor tracks required for the function of the sensor or the electrical circuit realized therefrom.
  • the special alignment of the Hall plate with the plane of the plate perpendicular to the longitudinal axis of the circuit carrier ensures that multiple circuits are excluded during operation and that there is even the possibility of detecting the sign of the magnetic field direction in connection with a permanent magnetic actuating element and thus on the direction of movement of the Close actuator-carrying component.
  • the special alignment of the Hall plate can be optimally realized in connection with the MID technology in a very small installation space, especially since the circuit path can be designed very flexibly by the circuit structure being formed by a structured metal layer applied to the carrier element.
  • the position sensor is preferably constructed in such a way that an electrical connection cable goes out on the rear side of the circuit carrier opposite the front end face equipped with the sensor element, the electrical conductors of which are electrically contacted with the conductor tracks of the circuit carrier and via which the sensor signals are transmitted.
  • a fastening device can be provided between the front and the rear end region of the circuit carrier. hot 'fcteLu., ⁇ & it the position.:sensor at ⁇ ? ⁇ > r ⁇ ' ⁇ h can be fixed legibly by clamping in a mounting groove.
  • the circuit carrier designed as a MID component can not only carry the sensor-relevant circuit of the position sensor, but can also serve as a carrier for fastening means serving to fix the position sensor, so that no separate housing components are required.
  • the conductor tracks expediently run at least partially in depressions in the carrier element which are filled with a film material which hermetically covers the conductor tracks.
  • All of the electrical components of the position sensor are preferably encapsulated in a wrapping material, which is in particular plastic material applied by injection molding.
  • the wrapping material acts as a housing and at the same time the passivation of the electrical areas.
  • the signals of integrated luminous display means can be reliably detected visually from the outside. This enables problem-free monitoring of the switching status of the position sensor.
  • the wing for the sensor element is expediently located directly on the front face of the carrier element and points in the longitudinal direction of the circuit carrier.
  • the front end region of the carrier element is preferably formed by a T-shaped support section, which has a connecting web that runs in the middle in the longitudinal direction and ne ne quer — erirrure d Tmgplstcc.
  • the support plate defines the support surface for the sensor element. Due to its slim design, the connecting bridge can be used to attach electronic components.
  • the carrier element can be equipped with electronic components which are switched on in the course of the conductor tracks and which participate in the evaluation of the sensor signals.
  • they can form evaluation electronics.
  • the latter is particularly the case when the sensor element is formed directly by a Hall plate.
  • the position sensor with at least one further Hall sensor element, which can be used for the detection of the second field component of the magnetic field.
  • FIG. 1 shows a longitudinal section of a section of a fluid-actuated linear drive equipped with the position sensor according to the invention, according to section line I-I from FIG. 2,
  • FIG. 2 shows a cross section through the arrangement from FIG. 1 according to section line II-II,
  • Figure 3 is an individual representation of the position sensor in a perspective view in a view from above, and FIG. 4 shows the position sensor in a lower view, the present envelope material not being shown or only indicated by dash-dotted lines in order to make the one-component components more visible.
  • FIGS. 1 and 2 show sections of a fluid-actuated linear drive 1, for example a pneumatically or hydraulically actuated working cylinder. It has an elongated housing 2, in which a piston chamber 3 is defined, which receives a piston 4 which can be displaced in the longitudinal direction.
  • the linear movement 6 of the piston which is illustrated by a double arrow, is brought about by suitable fluid action on the two piston chamber sections separated from the piston.
  • the linear drive 1 is equipped with at least one position sensor 7. This is detachably fixed in a fastening groove 8 made on the outer circumference of the piston chamber 3 in the outer surface of the housing 2.
  • the fastening groove 8 of the exemplary embodiment is a so-called T-groove.
  • This has a slot neck 13 which defines a slot-like slot opening 12 and which is adjoined in the slot depth direction by a wider base section 14 of the fastening slot 8 which is contoured in particular in a rectangular shape.
  • the position sensor / .rann ⁇ urc which iu GE u ⁇ ig 12 are inserted into the fastening groove 8 at any point. It is equipped with fastening means 15, which enable a releasable, clamping fixation in the fastening groove 8. They are in particular designed to be braced with the groove flanks of the fastening groove 8.
  • the position sensor 7 has an elongated, in particular beam-like shape.
  • its longitudinal axis 16 runs parallel to the longitudinal axis 17 of the fastening groove 8.
  • the position sensor 7 has a front side 18 oriented in the direction of the longitudinal axis 16 and a rear side 19 oriented opposite thereto. an underside 23 facing the groove base 22 of the fastening groove 8 and an upper side 24 oriented opposite the underside 23, in particular at the level of the groove opening 12.
  • the position sensor 7 is provided in order to detect a predetermined position of the piston 4. This can be a piston end position or any intermediate piston position during the piston movement. The position detection takes place without contact and is based on the interaction of an actuating element 25 arranged on the piston 4 and a sensor element 26 arranged in the position sensor 7.
  • the position sensor 7 is a compact Hall sensor. Its sensor element 26 contains one
  • Hall plate 27 which reacts to components of a magnetic field 28 indicated by dash-dotted lines, which penetrate it at right angles to its plate plane 29.
  • the magnetic field 28 is generated by the actuating element 25, which is expediently a permanent magnet.
  • the functional principle is based on the so-called Hall effect. This exploits the fact that in electrical conductors, which are located in a homogeneous magnet and in which an electrical current flows perpendicular to the magnetic field, a voltage difference occurs perpendicular to the magnetic field and perpendicular to the current, the so-called Hall voltage. In the Hall sensor, the function of the electrical conductor is taken over by a plate-like conductor element called a Hall plate.
  • a great advantage of the position sensor 7 according to the invention is based on the special orientation of the Hall plate 27. It is installed on the position sensor 7 in such a way that its plate plane 29 runs at right angles to the longitudinal axis 16 of the position sensor 7. In other words, the normal vector of the Hall plate 27 runs parallel to the longitudinal axis 16.
  • the drive voltage generating the electrical current flow is applied to two mutually opposite edges of the Hall plate 27.
  • the components of the magnetic field 28 passing through the Hall plate 27 at right angles to the plate plane 29 then produce the Hall voltage which can be tapped between the two other edges of the Hall plate 27 and from which the sensor signal is derived.
  • the advantage here is that the course of the Hall voltage has only a single maximum when the Hall plate 27 is penetrated by the magnetic field 28 moving past. Multiple switching can be excluded in this way. There is also the possibility of detecting the sign of the field direction and thus the direction of movement of the piston 4. It should be pointed out to this stall that the required position sensor can be used particularly advantageously in connection with fluid technology devices, in particular with fluid-actuated linear drives or other drives. However, other fields of application are also possible in which the position of another, moving component is to be detected instead of the piston 4.
  • the design of the position sensor 7 has a significant share in the possibility of placing the Hall plate 27 in the described orientation on the position sensor 7 and still ensuring very compact sensor dimensions.
  • the longitudinal axis 33 of the circuit carrier simultaneously defines the longitudinal axis 16 of the position sensor 7.
  • the circuit carrier 32 contains an elongated support member 34 made of injection molded plastic material. It forms the supporting structure of the position sensor 7 and at the same time functions as a carrier for the aforementioned circuit and associated components.
  • the conductor tracks 35 are formed by a structured metal layer applied to the carrier element 34. Manufacturing takes place, for example, through large-scale measurement Tallization of the -VL ⁇ ? QX by injection molding produced support element 34 with the following structuring by galvanic treatment. It is particularly advantageous that a three-dimensional conductor pattern can be easily generated using this MID technology, which enables an optimal, space-saving conductor path.
  • the sensor element 26 is attached to a wing 36 defined by the carrier element 34.
  • the conductor tracks 35 can be configured as contact pads which, by means of flip-chip technology, permit electrical contact and at the same time mechanical fixing of the sensor element 26.
  • other contacting measures are also possible.
  • the sensor element 26 is attached to the supporting surface 36 in such a way that the plate plane 29 of the Hall plate 27 extends at right angles to the longitudinal axis 33 of the circuit carrier 32 and thereby assumes the desired orientation described above when the position sensor 7 is installed in the fastening groove 8.
  • the support surface 36 is located in the region of the front end face 37 of the carrier element 34.
  • the desired Hall plate alignment can be achieved particularly easily when the sensor is manufactured, if the support surface 36 is already oriented in the longitudinal direction 33 of the circuit carrier 32, in particular in this way that its surface normal is aligned with the longitudinal axis 33 of the circuit carrier 32.
  • the support surface 36 is located directly on the front end face 37 of the carrier element 34 oriented in the direction of the longitudinal axis 33.
  • the front area of the position sensor 7 can thus be referred to as the detection area.
  • an electrical connection cable 38 is connected to the circuit carrier 32.
  • this connection cable 38 extends from the rear of the circuit carrier 32, so that the rear region of the circuit carrier 32 can be referred to as the connection region.
  • the electrical conductors 42 of the connecting cable 38 are contacted on the circuit carrier 32 with the conductor tracks 35 running thereon.
  • the conductor tracks 35 thus run on the support element 34 between the detection area and the connection area. Their course, within the scope of the MID manufacturing technology, is determined as required so that the other boundary conditions are taken into account, for example the space-saving arrangement of electronic components 43 or the optimal integration of the fastening means 15 with regard to the fastening technology.
  • the conductor tracks 35 according to FIG. 4 run on their path between the sensor element 26 and the electrical conductors 42 ending in the connection area at least partially on the underside of the carrier element 34 and at least partially in depressions 44 formed in the carrier element 34.
  • These depressions 44 are with a only partially indicated filling material 45, which covers the conductor tracks 35 and the contacting areas to the electrical conductors 42, whereby it connects to the carrier element 34 in a cohesive manner in such a way that the components mentioned are hermetically sealed or encapsulated.
  • Position sensor 7 arranged.
  • the encapsulation is preferably carried out here by means of an enveloping body 46 integrally molded onto the carrier element 34 by injection molding, the material for the enveloping body 46 preferably being a material identical to the aforementioned filler material.
  • the filling of the depressions 44 and the molding of the enveloping body 46 expediently take place in a single injection molding process.
  • the enveloping body 46 together with the carrier element 34, therefore takes over the function of the sensor housing and at the same time ensures the passivation of the electrical areas.
  • the conductor tracks 35 are equipped with electronic components 43 in addition to the sensor element 26 to the extent required for the operation of the position sensor. If the sensor element 26 consists only of the Hall plate 27, the electronic components 43 can form evaluation electronics suitable for signal evaluation. However, it is also possible to provide the evaluation electronics together with the Hall plate directly in the sensor element 26 and to combine them in a Hall chip, which simplifies the electrical assembly of the conductor tracks 35 because the number of components to be fixed is reduced.
  • the evaluation electronics can be a so-called ASIC, for example.
  • Luminous display means 43 ′ for example at least one LED, can be located below the electronic components 43 contacted with the conductor tracks 35. The switching state of the position sensor 7 can be visualized with them.
  • ⁇ i' ⁇ -i üi " ⁇ iusamiai a ⁇ g is The material "of the enveloping body 4S is designed to be translucent, so that the light radiation can emerge.
  • the carrier element 34 at its front end region forming the detection region.
  • This front end region is formed by a T-shaped support section 47, which has a connecting web 48 corresponding to the vertical section of the T and a support plate 49 corresponding to the cross section of the T on the head side.
  • the connecting web 48 projects forward in the longitudinal direction, wherein it is oriented in the middle of the width. It has a plate-like flat shape, its main expansion plane being spanned by vectors which run in the longitudinal direction and in the vertical direction of the position sensor 7.
  • the support plate 49 runs transversely to it, its plane of expansion being parallel to that of the Hall plate 27 and the side of the support plate 49 facing away from the connecting web 48 directly defining the support surface 36.
  • This construction results in receiving recesses 53 of the carrier element 34 which lie axially between the support plate 49 and the main section 52 on both sides of the connecting web 48 and in which electronic components 43 contacted with the conductor tracks 35 can be accommodated.
  • it makes sense to use the two oppositely oriented, larger-area side surfaces of the connecting web 48 for fitting with electronic components 43.
  • d ⁇ p. xrig eler ⁇ ent 34 for the detection of the second field component of the magnetic field -28 can be equipped with a further Hall sensor element 54, the Hall plate 54 'of which is oriented differently from the Hall plate 27 of the previously explained first sensor element 26.
  • the further Hall plate 54 * is expediently aligned at right angles to the first Hall plate 26 with a course in the transverse direction of the position sensor 7 (indicated by dash-dotted lines in FIG. 4).
  • the abovementioned fastening means 15 form a single fastening device 55, which is placed between the front and the rear end region of the circuit carrier 32. It is in particular placed longitudinally on the circuit carrier 32.
  • it contains a rotary member 56, which is seated in a receiving recess 57 of the carrier element 34 which is open to the upper side 24 and to the two transversely oriented longitudinal sides and can be rotated relative to the carrier element 34 about a rotational axis 58 running in the vertical direction of the circuit carrier 32.
  • FIG. 4 shows a cylindrical bearing extension 56 'of the rotary member 56 which, starting from the receiving recess 57, rotatably engages in a subsequent complementary bearing seat 59 of the carrier element 34.
  • the rotary member 56 is provided with two diametrically opposite clamping projections 63.
  • they can have a radially oriented clamping surface 64 with an eccentric course with respect to the axis of rotation 58.
  • the rotary member 56 is oriented such that the clamping projections 63 are aligned in the longitudinal direction of the position sensor 7, so that the rotary member 56 does not protrude or only slightly laterally over the outer surface of the circuit carrier 32.
  • the ßr ⁇ fcgiiso r »G is rotated until the 1-lemming projections 62 are braced with the hat flanks of the fastening groove 8 and the position sensor 7 is thus fixed in place by a releasable girder fastening (FIG. 2).
  • the position sensor can be designed without any problems to the effect that he serkennung a Wegbereieh- (Setup recognition) allows further reliable detection of the field strength and their processing allow an analog signal and may eventually be executed as teachable 'Sensor ,

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

L'invention concerne un détecteur de position à effet Hall comprenant un substrat circuit (32) allongé qui est conçu comme un composant MID (MID = dispositif d'interconnexion moulé) et qui comprend un élément support (34) allongé qui est réalisé dans un matériau plastique moulé par injection, lequel présente, dans la zone de sa face frontale avant (37), une surface d'appui (36) qui est équipée d'un élément détecteur (26) contenant une plaque à effet Hall (27) ou constitué d'une plaque à effet Hall (27) de telle façon que le plan de la plaque à effet Hall (27) soit perpendiculaire à l'axe longitudinal du substrat circuit (32). L'élément détecteur (26) est électriquement en contact par des pistes conductives (35) constituées d'une couche métallique structurée appliquée sur l'élément support (34).
EP03763663A 2002-07-13 2003-06-28 Detecteur de position con u comme detecteur a effet hall Withdrawn EP1521946A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE20211518U DE20211518U1 (de) 2002-07-13 2002-07-13 Als Hall-Sensor ausgebildeter Positionssensor
DE20211518U 2002-07-13
PCT/EP2003/006875 WO2004008080A1 (fr) 2002-07-13 2003-06-28 Detecteur de position conçu comme detecteur a effet hall

Publications (1)

Publication Number Publication Date
EP1521946A1 true EP1521946A1 (fr) 2005-04-13

Family

ID=7973541

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03763663A Withdrawn EP1521946A1 (fr) 2002-07-13 2003-06-28 Detecteur de position con u comme detecteur a effet hall

Country Status (4)

Country Link
US (1) US20050231197A1 (fr)
EP (1) EP1521946A1 (fr)
DE (1) DE20211518U1 (fr)
WO (1) WO2004008080A1 (fr)

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US7631885B2 (en) 2007-04-16 2009-12-15 Harley-Davidson Motor Company Group, LLC Intelligent interlock for a motorcycle stand
CN109931840A (zh) * 2019-03-27 2019-06-25 合肥联宝信息技术有限公司 一种检测模具

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CN109931840A (zh) * 2019-03-27 2019-06-25 合肥联宝信息技术有限公司 一种检测模具

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US20050231197A1 (en) 2005-10-20
DE20211518U1 (de) 2002-09-12

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