[go: up one dir, main page]

EP1589227A1 - Multi-stage vacuum pump and pumping system having such a pump - Google Patents

Multi-stage vacuum pump and pumping system having such a pump Download PDF

Info

Publication number
EP1589227A1
EP1589227A1 EP05290810A EP05290810A EP1589227A1 EP 1589227 A1 EP1589227 A1 EP 1589227A1 EP 05290810 A EP05290810 A EP 05290810A EP 05290810 A EP05290810 A EP 05290810A EP 1589227 A1 EP1589227 A1 EP 1589227A1
Authority
EP
European Patent Office
Prior art keywords
stage
pump
gases
stages
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05290810A
Other languages
German (de)
French (fr)
Inventor
Pascal Durand
Jean-François Vuillermoz
Patrick Pilotti
Jean-François Grosdaillon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA, Nokia Inc filed Critical Alcatel SA
Publication of EP1589227A1 publication Critical patent/EP1589227A1/en
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the present invention relates to a multi-stage vacuum pump. She further extends to a pumping installation comprising such a pump.
  • a vacuum pump is a device capable of extracting and discharging gaseous molecules in order to lower the pressure inside a chamber.
  • the coarse vacuum is defined as pressures greater than about 1 mbar.
  • a so-called primary pump is used, such as a vane pump.
  • a mean vacuum corresponds to pressures between 1mbar and 10 -3 mbar.
  • a high vacuum is obtained for pressures of less than about 10 -3 mbar and up to about 10 -7 mbar, beyond it is referred to as ulta-vacuum.
  • a secondary pump such as a turbomolecular pump, is coupled to a primary pump.
  • multi-stage pump When several pumping stages of the same type are coupled in series in the same pump, it is called multi-stage pump.
  • a two-stage vacuum pump in common use has two stages.
  • the first stage in the direction of the flow or suction stage (usually called “low pressure stage” because it is the stage that generates the lowest pressure) is large enough to ensure a maximum pumping rate.
  • the second stage in the flow direction or discharge stage (usually called the “high pressure stage” because it is the stage that operates at the highest pressure) is generally smaller in size and less flow.
  • the invention relates in particular to an installation comprising at least two rooms requiring a different level of vacuum and each connected to a pumping unit. Due to the presence of several pumps with characteristics, such an installation proves to be particularly expensive in terms of investment, maintenance and consumption Energy. It is therefore clear the need for a facility requiring a number fewer pumps for equivalent performance and lower cost than currently known installations.
  • document US Pat. No. 5,733,104 describes an installation comprising four successive chambers in which vacuum is required.
  • the last three chambers are connected to a secondary pumping unit comprising two turbomolecular stages (multi-stage turbomolecular pump) and a molecular stage (molecular pump).
  • the two turbomolecular stages have their inlet ports respectively connected to the last two chambers of the installation, the second stage being also connected to the discharge of the first stage.
  • the molecular stage is connected to the discharge of the second turbomolecular stage and has an inlet connected to the third chamber.
  • These stages have their rotors enslaved to a common drive shaft, itself driven by a single motor and a single control member.
  • the first chamber is connected to a dry vacuum pump, like a diaphragm pump.
  • the dry primary pump is installed in series with the secondary pumping unit and connected by its suction port to the discharge of the molecular stage.
  • a conduit for pumping the first chamber is connected to the same orifice.
  • US-3,668,393 shows an installation, for example an electron microscope, comprising on the one hand an enclosure in which a high level of vacuum is required and on the other hand additional compartments under vacuum.
  • the installation also comprises a pumping unit comprising a turbomolecular assembly (turbomolecular group arrangement) and a two-stage primary pump.
  • the turbomolecular assembly consists of a main section (main section) connected to the enclosure and an auxiliary stage (auxiliary section) connected to the additional compartments.
  • the two stages are contained in the same housing and are connected by a common transmission shaft to a single motor; however, a partition with relative sealing separates the ups and downs of the two pumps that do not communicate with each other, each being forced to a different stage of the associated pump.
  • the primary pump comprises a high pressure stage whose inlet is connected to the output of the main pump of the turbomolecular assembly and whose discharge orifice continuously drives the gases to the low pressure stage of the pump. primary.
  • the low pressure stage is then connected to the high pressure stage by a transfer channel on which the output of the auxiliary pump is connected via a valve.
  • the flow of the low-pressure stage of the primary pump is mixed with that of the auxiliary turbomolecular pump to the high-pressure stage thereof, and then the gases pumped by these two channels are discharged to the outside.
  • the present invention aims to improve the facilities of the art previous, by proposing a multi-stage vacuum pump able to ensure both the primary pump function to obtain a coarse vacuum in a chamber, and simultaneously maintain a vacuum at lower pressure, such as at discharge of a secondary pump.
  • the object of the present invention is therefore a multi-stage vacuum pump having at least a first low pressure stage and at least a second high pressure stage at least one of said stages comprising at least one orifice for the admission of gases to be pumped (usually called “suction"), and one to at least one of said stages having at least one opening open to the outside intended for the evacuation of the pumped gases (usually called repression), said first and second communicating stages, to ensure the passage of gas between said first stage and said second stage, characterized in that said first stage works at a lower rate than said second stage.
  • the solution therefore consists in inverting the respective flow rates of the low and high pressure pumping stages compared to pumps currently known.
  • the first stage has a cyclic volume generated lower than that of the second floor.
  • “Generated cyclic volume” means the flow rate of a pump relative to the volume of its components, because the flow rate varies with the size of the volume transferred per turn (geometric dimension of elements) and with velocity of rotation.
  • the speeds of rotation are equal and a longer length translates a cyclic volume generated larger if the diameters are identical, or reciprocally equal lengths with different diameters can generate flow rates different.
  • a first low pressure stage is used low flow, for example to suck the gases from the discharge of a secondary pump, and a second high pressure stage whose flow is higher and which has a gas inlet, for example to suck gas from a room requiring a rough vacuum like a loading chamber of an installation (or "Load Lock").
  • the first and second floors are physically inverted, so the flows are thus changed.
  • the first stage or "low pressure" stage thus has a cyclic volume generated reduced which destines it more particularly to pumping at the repression of the secondary pump.
  • the second stage or repression stage sees its cyclic volume generated increase, and can then be used for aspiration to high flow through an additional intake port.
  • the invention applies in particular to volumetric pumps.
  • a volume filled with gas is cyclically isolated from its inlet point and transferred to a discharge point after a compression operation.
  • To increase the volumetric flow rate of a pump it is necessary, all other dimensions being equal, to increase the cyclic volume generated by the pump or its speed of rotation. Of course, this is not the case for the small flow pumps generated for which the stages can have the same dimension.
  • those rotary rotary ubrified pallets, called "oil seal" are multi-stage and used industrially today. They comprise a reserve of liquid oil in the form of a tank which generally surrounds the functional part of the pump, the stages, and a device for introducing the oil into the compression chamber.
  • This oil is multiple: in addition to its usual role of lubricant, it removes the heat of compression of the pump, it minimizes the dead volumes and constitutes a seal between the mechanical parts in relative movement. Without oil seal, the internal leaks at each stage are much higher and the compression ratio is reduced accordingly. By oil sealing of moving parts one can obtain a maximum compression ratio of 105 in one stage. A minimum leakage rate is the guarantee of a low limit pressure.
  • a prior art vane pump is usually equipped with an orifice for suction of the gaseous molecules from the outside which is located at the "low pressure” stage. The "high pressure" stage has its suction connected to the discharge of the "low pressure” stage and comprises an outlet towards the outside of the compressed compressed gases.
  • the high pressure stage is also defined as the stage in which the oil is introduced from the tank maintained at a pressure close to the atmosphere.
  • the oil which is in regular contact with the external atmosphere, absorbs air and, when it is introduced into the "high pressure” stage, it is released into the vacuum volume.
  • the air is re-evacuated during the discharge cycle and, on the other hand, it partially migrates in the form of an internal leak towards the suction of the "high pressure” stage.
  • the "low pressure” stage is supplied from the "high pressure” stage to oil already degassed therein. The suction pressure is then in the range of values of the high vacuum, and the lowest working pressures at the limit of the medium vacuum / high vacuum domains.
  • the floors retain the traditional position existing on art pumps previous but the role of the stages is reversed.
  • the oil is injected into the second floor, the one with the largest flow.
  • the second floor is therefore the floor "high pressure”.
  • the degassed oil then passes from the high flow stage to the lower flow or "low pressure” stage.
  • the transfer channel is modified accordingly to transfer the gas towards the suction of the "high pressure” stage.
  • An advantage of the invention is that when using the "low” stage pressure "to a steady flow at low pressure as to the discharge of a turbomolecular pump for example, the discharge pressure of the stage “low pressure” will be lower than with a pump of the prior art. upstairs “high pressure” having a higher generated flow rate, the flow discharged by the stage “low pressure” will be released in a larger volume so at a pressure less. In case of cyclic pumping of an airlock by the "high pressure” stage, the volume of the floor and its generated flow being larger, the rise of pressure will be less and time to lower it too.
  • the invention can also be applied to other types of vacuum pumps volumetric like a diaphragm pump, rotating or oscillating piston. It can also be applied to a dynamic compression pump as a Roots multi-stage dry pump. In this case we do not meet any more lubrication problem.
  • the present invention also relates to a vacuum system comprising such a multi-stage pump and further comprising at least one turbomolecular pump whose discharge port is connected to the multi-stage pump.
  • the installation comprises at least two chambers.
  • a first chamber is connected to the multi-stage pump according to the invention, and a second chamber is connected to a turbomolecular pump whose discharge port is connected to the multi-stage pump.
  • the gas inlet of the first low flow stage is connected to the discharge of the turbomolecular pump, and the gas inlet of the second higher flow stage is directly connected to the first chamber.
  • mass spectrometry devices with continuous flow introduction and the CD / DVD replication applications.
  • the devices of mass spectrometry have a coarse pressure inlet chamber and chambers requiring a high vacuum equipped with secondary pumps.
  • Applications of CD / DVD replication include process chambers almost continuously under a high vacuum and whose pressure is much lower than the mbar, and transfer chambers and loading of substrates (or "Load Lock") that pass cyclically from atmospheric pressure to a mean vacuum of the order of a few mbar.
  • FIG. 1 shows a two-stage rotating rotary vane vacuum pump lubricated 1 according to the invention.
  • the pump 1 comprises in known manner a first so-called “low pressure” stage 2 which extracts gas molecules from an enclosure where the vacuum is required, and compresses them before sending them to a second so-called “high pressure” stage 3 in which gas molecules are compressed at a higher pressure before being expelled to the outside.
  • the stages 2, 3 are of similar structure, and each comprise a rotor 4, 5 integral with a mechanical energy transmission shaft provided by a motor (not shown) and having externally a cylindrical surface of a generator parallel to the axis of the tree.
  • the rotor 4, 5 is mounted eccentrically and tangentially inside a stator 6, 7.
  • the low-pressure "low-pressure” stage 2 comprises an orifice 11 allowing admission of the gas to be sucked up, coming for example from the discharge of a secondary pump.
  • the "high pressure" stage 3 of higher flow comprises an orifice 12 for admitting gas to be sucked, for example from a loading chamber and an orifice 13 for the discharge to the outside of the gas to be discharged.
  • Each stage may further comprise openings provided with evacuation valves (not shown).
  • the rotor assembly 4, 5 and stator 6, 7 of each stage is placed in a tank 14 full of oil serving as reservoir 15.
  • the liquid oil is contained in this tank 15 and introduced into the "high pressure” stage 3 by a pipe 16.
  • the Oil circulation can be natural or forced by an oil pump. During a cycle of operation, the oil is transferred from the "high" stage pressure "3 upstairs” low pressure "2 through passage 18.
  • the plant according to the present invention shown in FIG. 2 comprises two chambers 20, 21.
  • the outlet 22 of the first chamber 20 is connected to the intake port 12 of the "high pressure" stage 3 of the pump 1 according to the invention of higher flow, so having the largest pumping volume.
  • the outlet 23 of the next chamber 21 is connected to a pump turbomolecular 24 whose discharge port 25 is itself connected to the inlet port 13 of the "low pressure" stage 2 of the pump 1 according to the invention of lower flow.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
  • Rotary Pumps (AREA)

Abstract

La présente invention a pour objet une pompe à vide multi-étagée comportant au moins un premier étage basse pression et au moins un deuxième étage haute pression. L'un au moins des étages comporte au moins un orifice pour l'admission des gaz à pomper, dit aspiration, et l'un au moins des étages comporte au moins un orifice ouvert vers l'extérieur destinée à l'évacuation des gaz pompés, dit refoulement. Les premier et deuxième étages communiquent afin d'assurer le passage des gaz entre le premier étage et le deuxième étage. Le premier étage travaille à un débit plus faible que le deuxième étage.The present invention relates to a multi-stage vacuum pump having at least a first low pressure stage and at least a second high pressure stage. At least one of the stages has at least one orifice for the admission of gases to be pumped, said aspiration, and at least one of the floors has at least one opening open to the outside for the evacuation of gases pumped, says repression. The first and second floors communicate so to ensure the passage of gases between the first floor and the second floor. The first floor works at a lower flow rate than the second floor.

Dans le cas d'une pompe volumétrique rotative à palettes et à joint d'huile, l'huile est injectée dans l'étage ayant le débit le plus important.

Figure 00000001
In the case of a rotary vane pump with oil seal, the oil is injected into the stage with the largest flow rate.
Figure 00000001

Description

La présente invention se rapporte à une pompe à vide multi-étagée. Elle s'étend en outre à une installation de pompage comprenant une telle pompe.The present invention relates to a multi-stage vacuum pump. She further extends to a pumping installation comprising such a pump.

Une pompe à vide est un dispositif capable d'extraire et d'évacuer des molécules gazeuses afin d'abaisser la pression à l'intérieur d'une chambre. Le vide grossier est définit comme des pressions supérieures à environ 1 mbar. On utilise dans ce cas une pompe dite primaire comme une pompe à palettes. Un vide moyen correspond à des pressions comprises entre 1mbar et 10-3mbar. Un vide poussé est obtenu pour des pressions inférieures à environ 10-3mbar et jusqu'à environ 10-7mbar, au-delà on parle d'ulta-vide. Si on souhaite obtenir un vide poussé dans une installation on couple une pompe secondaire, comme par exemple une pompe turbomoléculaire, à une pompe primaire.
   Lorsque plusieurs étages de pompage du même type sont couplés en série dans une même pompe, on parle de pompe multi-étagée. Par exemple une pompe à vide bi-étagée d'usage courant comporte deux étages. Le premier étage dans le sens du flux ou étage d'aspiration (habituellement appelé "étage basse pression" car c'est l'étage qui génère la plus basse pression) est de grande taille de manière à assurer un débit de pompage maximum. Le second étage dans le sens du flux ou étage de refoulement (habituellement appelé "étage haute pression" car c'est l'étage qui fonctionne à la plus haute pression) est généralement de plus petite taille et de débit moindre.A vacuum pump is a device capable of extracting and discharging gaseous molecules in order to lower the pressure inside a chamber. The coarse vacuum is defined as pressures greater than about 1 mbar. In this case, a so-called primary pump is used, such as a vane pump. A mean vacuum corresponds to pressures between 1mbar and 10 -3 mbar. A high vacuum is obtained for pressures of less than about 10 -3 mbar and up to about 10 -7 mbar, beyond it is referred to as ulta-vacuum. If it is desired to obtain a high vacuum in an installation, a secondary pump, such as a turbomolecular pump, is coupled to a primary pump.
When several pumping stages of the same type are coupled in series in the same pump, it is called multi-stage pump. For example, a two-stage vacuum pump in common use has two stages. The first stage in the direction of the flow or suction stage (usually called "low pressure stage" because it is the stage that generates the lowest pressure) is large enough to ensure a maximum pumping rate. The second stage in the flow direction or discharge stage (usually called the "high pressure stage" because it is the stage that operates at the highest pressure) is generally smaller in size and less flow.

L'invention concerne en particulier une installation comportant au moins deux chambres nécessitant un niveau de vide différent et connectées chacune à une unité de pompage. Du fait de la présence de plusieurs pompes ayant des caractéristiques différentes, une telle installation se révèle être particulièrement onéreuse tant en investissement qu'en maintenance et en consommation énergétique. Il se précise donc le besoin d'une installation nécessitant un nombre moindre de pompes pour une performance équivalente et un coût inférieur aux installations actuellement connues. The invention relates in particular to an installation comprising at least two rooms requiring a different level of vacuum and each connected to a pumping unit. Due to the presence of several pumps with characteristics, such an installation proves to be particularly expensive in terms of investment, maintenance and consumption Energy. It is therefore clear the need for a facility requiring a number fewer pumps for equivalent performance and lower cost than currently known installations.

Par exemple le document US-5,733,104 décrit une installation comportant quatre chambres se succédant dans lesquelles le vide est requis. Les trois dernières chambres sont reliées à une unité de pompage (pumping unit) secondaire comprenant deux étages turbomoléculaires (multi-stage turbomolecular pump) et un étage moléculaire (molecular pump). Les deux étages turbomoléculaires ont leurs orifices d'admission respectivement connectés aux deux dernières chambres de l'installation, le second étage étant aussi connecté au refoulement du premier étage. L'étage moléculaire est connecté au refoulement du second étage turbomoléculaire et possède un orifice d'admission connecté à la troisième chambre. Ces étages ont leurs rotors asservis à un arbre de transmission commun, lui-même entraíné par un seul moteur et un organe de commande unique. La première chambre est reliée à une pompe primaire sèche (dry vacuum pump), comme une pompe à membrane (diaphragm pump). La pompe primaire sèche est installée en série avec l'unité de pompage secondaire et connectée par son orifice d'aspiration au refoulement de l'étage moléculaire. Un conduit permettant le pompage de la première chambre est relié à ce même orifice.
   Cette solution a pour inconvénient que seul un flux compatible avec le débit limité de la pompe à membrane est possible. D'autre part ceci ne permet qu'un fonctionnement stable des rapports de pression d'une chambre à l'autre même si le taux de compression de la partie moléculaire et la présence du piège froid vis à vis de vapeurs condensables permettent d'interrompre le fonctionnement de la pompe à membrane pour prolonger la durée de vie de la membraneFor example, document US Pat. No. 5,733,104 describes an installation comprising four successive chambers in which vacuum is required. The last three chambers are connected to a secondary pumping unit comprising two turbomolecular stages (multi-stage turbomolecular pump) and a molecular stage (molecular pump). The two turbomolecular stages have their inlet ports respectively connected to the last two chambers of the installation, the second stage being also connected to the discharge of the first stage. The molecular stage is connected to the discharge of the second turbomolecular stage and has an inlet connected to the third chamber. These stages have their rotors enslaved to a common drive shaft, itself driven by a single motor and a single control member. The first chamber is connected to a dry vacuum pump, like a diaphragm pump. The dry primary pump is installed in series with the secondary pumping unit and connected by its suction port to the discharge of the molecular stage. A conduit for pumping the first chamber is connected to the same orifice.
This solution has the disadvantage that only a flow compatible with the limited flow rate of the diaphragm pump is possible. On the other hand this allows only stable operation of pressure ratios from one chamber to another even if the compression ratio of the molecular part and the presence of the cold trap with respect to condensable vapors can interrupt the operation of the diaphragm pump to extend the life of the diaphragm

Le document US-3,668,393 montre une installation, par exemple un microscope électronique, comprenant d'une part une enceinte dans laquelle un haut niveau de vide est requis et d'autre part des compartiments additionnels sous vide. L'installation comporte aussi un groupe de pompage comprenant un ensemble turbomoléculaire (turbomolecular group arrangement) et une pompe primaire bi-étagée. L'ensemble turbomoléculaire se compose d'un étage principal (main section) connecté à l'enceinte et d'un étage auxiliaire (auxiliary section) relié aux compartiments additionnels. Les deux étages sont contenu dans un même boítier et sont reliés par un arbre de transmission commun à un moteur unique ; cependant une cloison à étanchéité relative sépare les refoulements des deux pompes qui ne communiquent pas entre elles, chacune étant refoulée vers un étage différent de la pompe associée. La pompe primaire comprend un étage haute pression dont l'orifice d'admission est relié à la sortie de la pompe principale de l'ensemble turbomoléculaire et dont l'orifice de refoulement conduit en permanence les gaz vers l'étage basse pression de la pompe primaire. L'étage basse pression est connecté ensuite à l'étage haute pression par un canal de transfert sur le quel vient se raccorder la sortie de la pompe auxiliaire via une vanne. Le flux de l'étage basse pression de la pompe primaire est mêlé à celui issu de la pompe turbomoléculaire auxiliaire à l'étage haute pression de celle-ci pour ensuite évacuer les gaz pompés par ces deux voies vers l'extérieur.
   Une telle installation permet d'assurer simultanément deux niveaux de vide différents dans deux espaces distincts à l'aide d'une pompe primaire bi-étagée conventionnelle et d'un ensemble intégrant de plus deux pompes secondaires.
   Cette solution a pour inconvénient qu'il y a une forte interdépendance des niveaux de vide et des flux obtenu à chaque orifice de la pompe à palette. Le système fonctionne donc que pour des variations de pression faibles du système de pompage auxiliaire ce qui limite son emploi à des conditions expérimentales bien définies.US-3,668,393 shows an installation, for example an electron microscope, comprising on the one hand an enclosure in which a high level of vacuum is required and on the other hand additional compartments under vacuum. The installation also comprises a pumping unit comprising a turbomolecular assembly (turbomolecular group arrangement) and a two-stage primary pump. The turbomolecular assembly consists of a main section (main section) connected to the enclosure and an auxiliary stage (auxiliary section) connected to the additional compartments. The two stages are contained in the same housing and are connected by a common transmission shaft to a single motor; however, a partition with relative sealing separates the ups and downs of the two pumps that do not communicate with each other, each being forced to a different stage of the associated pump. The primary pump comprises a high pressure stage whose inlet is connected to the output of the main pump of the turbomolecular assembly and whose discharge orifice continuously drives the gases to the low pressure stage of the pump. primary. The low pressure stage is then connected to the high pressure stage by a transfer channel on which the output of the auxiliary pump is connected via a valve. The flow of the low-pressure stage of the primary pump is mixed with that of the auxiliary turbomolecular pump to the high-pressure stage thereof, and then the gases pumped by these two channels are discharged to the outside.
Such an installation makes it possible to simultaneously ensure two different vacuum levels in two distinct spaces using a conventional two-stage primary pump and an assembly integrating two more secondary pumps.
This solution has the disadvantage that there is a strong interdependence of the vacuum levels and flows obtained at each orifice of the vane pump. The system therefore operates only for low pressure variations of the auxiliary pumping system which limits its use to well-defined experimental conditions.

La présente invention a pour but d'améliorer les installations de l'art antérieur, en proposant une pompe à vide multi-étagée apte à assurer à la fois la fonction de pompe primaire pour l'obtention d'un vide grossier dans une chambre, et simultanément maintenir un vide à plus basse pression, comme par exemple au refoulement d'une pompe secondaire.The present invention aims to improve the facilities of the art previous, by proposing a multi-stage vacuum pump able to ensure both the primary pump function to obtain a coarse vacuum in a chamber, and simultaneously maintain a vacuum at lower pressure, such as at discharge of a secondary pump.

L'objet de la présente invention est donc une pompe à vide multi-étagée comportant au moins un premier étage basse pression et au moins un deuxième étage haute pression l'un au moins desdits étages comportant au moins un orifice pour l'admission des gaz à pomper (habituellement appelé "aspiration"), et l'un au moins desdits étages comportant au moins un orifice ouvert vers l'extérieur destinée à l'évacuation des gaz pompés (habituellement appelé refoulement), lesdits premier et deuxième étages communicant, afin d'assurer le passage des gaz entre ledit premier étage et ledit deuxième étage, caractérisé en ce que ledit premier étage travaille à un débit plus faible que ledit deuxième étage.The object of the present invention is therefore a multi-stage vacuum pump having at least a first low pressure stage and at least a second high pressure stage at least one of said stages comprising at least one orifice for the admission of gases to be pumped (usually called "suction"), and one to at least one of said stages having at least one opening open to the outside intended for the evacuation of the pumped gases (usually called repression), said first and second communicating stages, to ensure the passage of gas between said first stage and said second stage, characterized in that said first stage works at a lower rate than said second stage.

La solution consiste donc notamment à inverser les débits respectifs des étages de pompage basse et haute pression par rapport aux pompes actuellement connues. Ainsi le premier étage a un volume cyclique engendré inférieur à celui du deuxième étage. On entend par "volume cyclique engendré", le débit d'une pompe par rapport au volume de ses composants, car le débit varie avec la dimension du volume transféré par tour (dimension géométrique des éléments) et avec la vitesse de rotation. Lorsque les étages sont sur le même arbre de transmission, les vitesses de rotation sont égales et une longueur supérieure traduit un volume cyclique engendré plus grand si les diamètres sont identiques, ou réciproquement des longueurs égales avec des diamètres différents peuvent générer des débits différents. Selon la présente invention, on utilise un premier étage basse pression de faible débit, par exemple pour aspirer les gaz provenant du refoulement d'une pompe secondaire, et un second étage haute pression dont le débit est supérieur et qui comporte une entrée de gaz, par exemple pour aspirer les gaz provenant d'une chambre requérant un vide grossier comme une chambre de chargement d'une installation (ou "Load Lock").The solution therefore consists in inverting the respective flow rates of the low and high pressure pumping stages compared to pumps currently known. Thus the first stage has a cyclic volume generated lower than that of the second floor. "Generated cyclic volume" means the flow rate of a pump relative to the volume of its components, because the flow rate varies with the size of the volume transferred per turn (geometric dimension of elements) and with velocity of rotation. When the stages are on the same transmission shaft, the speeds of rotation are equal and a longer length translates a cyclic volume generated larger if the diameters are identical, or reciprocally equal lengths with different diameters can generate flow rates different. According to the present invention, a first low pressure stage is used low flow, for example to suck the gases from the discharge of a secondary pump, and a second high pressure stage whose flow is higher and which has a gas inlet, for example to suck gas from a room requiring a rough vacuum like a loading chamber of an installation (or "Load Lock").

Selon un premier mode de réalisation de l'invention, les premier et deuxième étages sont physiquement inversés, de ce fait les débits se trouvent ainsi modifiés. Le premier étage ou étage "basse pression" a ainsi un volume cyclique engendré réduit qui le destine plus particulièrement au pompage au refoulement de la pompe secondaire. Le second étage ou étage de refoulement voit son volume cyclique engendré augmenter, et peut alors être utilisé pour l'aspiration à fort débit grâce à un orifice d'admission supplémentaire.According to a first embodiment of the invention, the first and second floors are physically inverted, so the flows are thus changed. The first stage or "low pressure" stage thus has a cyclic volume generated reduced which destines it more particularly to pumping at the repression of the secondary pump. The second stage or repression stage sees its cyclic volume generated increase, and can then be used for aspiration to high flow through an additional intake port.

L'invention s'applique en particulier aux pompes volumétriques. Dans une pompe volumétrique, un volume rempli de gaz est isolé cycliquement de son point d'admission et transféré vers un point de refoulement après une opération de compression. Pour augmenter le débit volumétrique d'une pompe, il faut, toutes dimensions égales par ailleurs, augmenter le volume cyclique engendré de la pompe ou sa vitesse de rotation. Bien entendu ce n'est pas le cas des pompes de petit débit engendré pour lesquelles les étages peuvent avoir la même dimension.
   Parmi les pompes à vide volumétriques, celles rotatives à palettes ubrifiées, dites "à joint d'huile", sont multi-étagées et utilisées industriellement aujourd'hui. Elles comportent une réserve d'huile liquide sous forme d'une cuve qui généralement entoure la partie fonctionnelle de la pompe, les étages, et un dispositif d'introduction de l'huile dans la chambre de compression. Les fonctions demandées à cette huile sont multiples : outre son rôle habituel de lubrifiant, elle évacue la chaleur de compression de la pompe, elle réduit au maximum les volumes morts et constitue un joint d'étanchéité entre les pièces mécaniques en mouvement relatif. Sans joint d'huile, les fuites internes à chaque étage sont beaucoup plus élevées et le taux de compression est réduit en conséquence. Par étanchéification à l'huile des parties mobiles on peut obtenir en un étage un rapport de compression maximum de 105. Un taux de fuites minimum est le gage d'une pression limite basse.
   Une pompe à palettes de l'art antérieur est habituellement équipée d'un orifice pour l'aspiration des molécules gazeuses de l'extérieur qui est situé à l'étage "basse pression". L'étage "haute pression" a son aspiration connectée au refoulement de l'étage "basse pression" et comporte un orifice d'évacuation vers l'extérieur des gaz comprimés refoulés. L'étage haute pression est également défini comme étant l'étage dans lequel est introduite l'huile depuis la cuve maintenue à une pression voisine de l'atmosphère. L'huile, qui se trouve en contact régulier avec l'atmosphère extérieure, absorbe de l'air et, à son introduction dans l'étage "haute pression", celui-ci se libère dans le volume en dépression. Pour une part l'air est re-évacué au cours du cycle au refoulement, et pour une autre part il migre partiellement sous forme de fuite interne vers l'aspiration de l'étage "haute pression". Dans les pompes à joint d'huile à deux étages, l'étage "basse pression" est alimenté depuis l'étage "haute pression" en huile déjà dégazée dans ce dernier. La pression d'aspiration se situe alors dans le domaine de valeurs du vide poussé, et les plus basses pressions de travail à la limite des domaines vide moyen/vide poussé.The invention applies in particular to volumetric pumps. In a positive displacement pump, a volume filled with gas is cyclically isolated from its inlet point and transferred to a discharge point after a compression operation. To increase the volumetric flow rate of a pump, it is necessary, all other dimensions being equal, to increase the cyclic volume generated by the pump or its speed of rotation. Of course, this is not the case for the small flow pumps generated for which the stages can have the same dimension.
Among the volumetric vacuum pumps, those rotary rotary ubrified pallets, called "oil seal", are multi-stage and used industrially today. They comprise a reserve of liquid oil in the form of a tank which generally surrounds the functional part of the pump, the stages, and a device for introducing the oil into the compression chamber. The functions required of this oil are multiple: in addition to its usual role of lubricant, it removes the heat of compression of the pump, it minimizes the dead volumes and constitutes a seal between the mechanical parts in relative movement. Without oil seal, the internal leaks at each stage are much higher and the compression ratio is reduced accordingly. By oil sealing of moving parts one can obtain a maximum compression ratio of 105 in one stage. A minimum leakage rate is the guarantee of a low limit pressure.
A prior art vane pump is usually equipped with an orifice for suction of the gaseous molecules from the outside which is located at the "low pressure" stage. The "high pressure" stage has its suction connected to the discharge of the "low pressure" stage and comprises an outlet towards the outside of the compressed compressed gases. The high pressure stage is also defined as the stage in which the oil is introduced from the tank maintained at a pressure close to the atmosphere. The oil, which is in regular contact with the external atmosphere, absorbs air and, when it is introduced into the "high pressure" stage, it is released into the vacuum volume. On the one hand, the air is re-evacuated during the discharge cycle and, on the other hand, it partially migrates in the form of an internal leak towards the suction of the "high pressure" stage. In two-stage oil seal pumps, the "low pressure" stage is supplied from the "high pressure" stage to oil already degassed therein. The suction pressure is then in the range of values of the high vacuum, and the lowest working pressures at the limit of the medium vacuum / high vacuum domains.

De préférence selon un deuxième mode de réalisation de l'invention, les étages conservent la position traditionnelle existant sur les pompes de l'art antérieur mais le rôle des étage est inversé. L'huile est injectée dans le deuxième étage, celui qui a le débit le plus important. Le deuxième étage est donc l'étage "haute pression". L'huile dégazée passe ensuite de l'étage de fort débit à l'étage de débit moindre ou étage "basse pression". Au refoulement de cet étage "basse pression" le canal de transfert est modifié en conséquence pour transférer le gaz vers l'aspiration de l'étage "haute pression". Cette solution offre l'avantage de conserver la même disposition des étages de la pompe qu'auparavant c'est à dire avec des dimensionnements et une réalisation un coût voisin.Preferably according to a second embodiment of the invention, the floors retain the traditional position existing on art pumps previous but the role of the stages is reversed. The oil is injected into the second floor, the one with the largest flow. The second floor is therefore the floor "high pressure". The degassed oil then passes from the high flow stage to the lower flow or "low pressure" stage. At the repression of this floor "low pressure "the transfer channel is modified accordingly to transfer the gas towards the suction of the "high pressure" stage. This solution offers the advantage of keep the same arrangement of the pump stages as before, ie with dimensions and a realization a nearby cost.

Un avantage de l'invention est que, lors de l'utilisation de l'étage "basse pression" à un flux permanent à basse pression comme au refoulement d'une pompe turbomoléculaire par exemple, la pression de refoulement de l'étage "basse pression" sera plus basse qu'avec une pompe de l'art antérieur. L'étage "haute pression" ayant un débit engendré plus grand, le flux refoulé par l'étage "basse pression" se libérera dans un plus grand volume donc à une pression moindre. En cas de pompage cyclique d'un sas par l'étage "haute pression", le volume de l'étage et son débit engendré étant plus grands, la remontée de pression sera moindre et le temps pour l'abaisser également. Il est à noter que, lors de ces remontées de pression cycliques, les palettes de l'étage "basse pression" agissent comme "clapets anti-retour" vis à vis de la pression d'aspiration de cet étage "basse pression". Les palettes et la réduction du saut de pression de l'étage "haute pression" en intensité et en durée limitent ainsi la remontée de pression vers le refoulement de la pompe secondaire. Ceci est particulièrement intéressant lors du pompage de volumes de sas faibles à moyens depuis la pression atmosphérique par un étage "haute pression" de fort débit dans les applications cycliques de type "Load Lock".An advantage of the invention is that when using the "low" stage pressure "to a steady flow at low pressure as to the discharge of a turbomolecular pump for example, the discharge pressure of the stage "low pressure" will be lower than with a pump of the prior art. upstairs "high pressure" having a higher generated flow rate, the flow discharged by the stage "low pressure" will be released in a larger volume so at a pressure less. In case of cyclic pumping of an airlock by the "high pressure" stage, the volume of the floor and its generated flow being larger, the rise of pressure will be less and time to lower it too. It is to highlight that, during these cyclic upwellings, the pallets of the "low" stage pressure "act as" check valves "with respect to the suction pressure of this "low pressure" stage. The pallets and the reduction of the pressure jump of the "high pressure" stage in intensity and duration thus limit the rise of pressure towards the discharge of the secondary pump. This is particularly interesting when pumping low to medium airlock volumes since the atmospheric pressure by a high pressure "high pressure" stage in the cyclic "Load Lock" type applications.

L'invention peut également s'appliquer à d'autres types de pompes à vide volumétriques comme une pompe à membrane, à piston tournant ou oscillant. Elle peut aussi s'appliquer à une pompe à compression dynamique comme une pompe sèche multi-étagées de type Roots. Dans ce cas on ne rencontre plus de problème de lubrification. C'est le premier mode de réalisation de l'invention qui est utilisé dans ce cas, à savoir l'inversion des étages.The invention can also be applied to other types of vacuum pumps volumetric like a diaphragm pump, rotating or oscillating piston. It can also be applied to a dynamic compression pump as a Roots multi-stage dry pump. In this case we do not meet any more lubrication problem. This is the first embodiment of the invention which is used in this case, namely the inversion of the stages.

La présente invention a encore pour objet une installation de vide comportant une telle pompe multi-étagée et comprenant en outre au moins une pompe turbomoléculaire dont l'orifice de refoulement est raccordé à la pompe multi-étagée.
   De préférence l'installation comporte au moins deux chambres. Une première chambre est connectée à la pompe multi-étagée selon l'invention, et une deuxième chambre est connectée à une pompe turbomoléculaire dont l'orifice de refoulement est raccordé à la pompe multi-étagée. Plus précisément l'entrée de gaz du premier étage de faible débit est connecté au refoulement de la pompe turbomoléculaire, et l'entrée de gaz du deuxième étage de débit supérieur est connecté directement à la première chambre.The present invention also relates to a vacuum system comprising such a multi-stage pump and further comprising at least one turbomolecular pump whose discharge port is connected to the multi-stage pump.
Preferably the installation comprises at least two chambers. A first chamber is connected to the multi-stage pump according to the invention, and a second chamber is connected to a turbomolecular pump whose discharge port is connected to the multi-stage pump. Specifically, the gas inlet of the first low flow stage is connected to the discharge of the turbomolecular pump, and the gas inlet of the second higher flow stage is directly connected to the first chamber.

Parmi les nombreuses applications de l'invention, on peut citer les dispositifs de la spectrométrie de masse à introduction de flux continu et les applications de réplication CD/DVD. Les dispositifs de la spectrométrie de masse comportent une chambre d'admission à pression grossière et des chambres nécessitant un vide poussé équipées de pompes secondaires. Les applications de réplication CD/DVD comportent des chambres de procédés quasi-continuellement sous un vide poussé et dont la pression est très inférieure au mbar, et des chambres de transfert et de chargement de substrats (ou "Load Lock") qui passent cycliquement de la pression atmosphérique à un vide moyen de l'ordre de quelques mbar.Among the many applications of the invention, mention may be made of mass spectrometry devices with continuous flow introduction and the CD / DVD replication applications. The devices of mass spectrometry have a coarse pressure inlet chamber and chambers requiring a high vacuum equipped with secondary pumps. Applications of CD / DVD replication include process chambers almost continuously under a high vacuum and whose pressure is much lower than the mbar, and transfer chambers and loading of substrates (or "Load Lock") that pass cyclically from atmospheric pressure to a mean vacuum of the order of a few mbar.

D'autres caractéristiques et avantages de la présente invention apparaítront à la lecture de la description qui suit d'un mode de réalisation, donné bien entendu à titre illustratif et non limitatif, et dans le dessin annexé sur lequel

  • la figure 1 est une coupe schématique d'une pompe à vide volumétrique rotative bi-étagée selon l'invention,
  • la figure 2 montre schématiquement une installation comprenant la pompe de la figure 1.
Other features and advantages of the present invention will appear on reading the following description of an embodiment, given of course by way of illustration and not limitation, and in the accompanying drawing in which:
  • FIG. 1 is a diagrammatic section of a two-stage rotary volumetric vacuum pump according to the invention,
  • FIG. 2 schematically shows an installation comprising the pump of FIG. 1.

La figure 1 montre une pompe à vide volumétrique rotative bi-étagée à palettes lubrifiée 1 selon l'invention. La pompe 1 comprend de manière connue un premier étage dit "basse pression" 2 qui extrait des molécules de gaz d'une enceinte où le vide est requis, et les comprime avant de les envoyer dans un second étage dit "haute pression" 3 dans lequel les molécules de gaz sont comprimées à une pression plus élevée avant d'être expulsées vers l'extérieur. Les étages 2, 3 sont de structure analogue, et comprennent chacun un rotor 4, 5 solidaire d'un arbre de transmission de l'énergie mécanique fournie par un moteur (non représentés) et présentant extérieurement une surface cylindrique de génératrice parallèle à l'axe de l'arbre. Le rotor 4, 5 est monté excentriquement et tangentiellement à l'intérieur d'un stator 6, 7. Il comporte des palettes 8, 9 perpendiculaires à l'axe du rotor 4, 5 et qui coulissent dans une fente du rotor 4, 5 perpendiculairement à son axe. Les étages 2 et 3 communiquent par une tubulure 10 qui permet le passage dans l'étage "haute pression" 3 des molécules gazeuses comprimée à l'étage "basse pression" 2.
   Selon l'invention, l'étage "basse pression" 2 de plus faible débit comporte un orifice 11 permettant l'admission du gaz à aspirer, provenant par exemple du refoulement d'une pompe secondaire. L'étage "haute pression" 3 de plus fort débit comporte un orifice 12 permettant l'admission de gaz à aspirer, par exemple depuis une chambre de chargement et un orifice 13 permettant le refoulement vers l'extérieur du gaz à évacuer. Chaque étage peut comprendre en outre des ouvertures munies de soupapes d'évacuation (non représentées). Figure 1 shows a two-stage rotating rotary vane vacuum pump lubricated 1 according to the invention. The pump 1 comprises in known manner a first so-called "low pressure" stage 2 which extracts gas molecules from an enclosure where the vacuum is required, and compresses them before sending them to a second so-called "high pressure" stage 3 in which gas molecules are compressed at a higher pressure before being expelled to the outside. The stages 2, 3 are of similar structure, and each comprise a rotor 4, 5 integral with a mechanical energy transmission shaft provided by a motor (not shown) and having externally a cylindrical surface of a generator parallel to the axis of the tree. The rotor 4, 5 is mounted eccentrically and tangentially inside a stator 6, 7. It comprises vanes 8, 9 perpendicular to the axis of the rotor 4, 5 and which slide in a slot of the rotor 4, 5 perpendicular to its axis. The stages 2 and 3 communicate through a pipe 10 which allows the passage in the "high pressure" stage 3 of the gaseous molecules compressed at the "low pressure" stage 2.
According to the invention, the low-pressure "low-pressure" stage 2 comprises an orifice 11 allowing admission of the gas to be sucked up, coming for example from the discharge of a secondary pump. The "high pressure" stage 3 of higher flow comprises an orifice 12 for admitting gas to be sucked, for example from a loading chamber and an orifice 13 for the discharge to the outside of the gas to be discharged. Each stage may further comprise openings provided with evacuation valves (not shown).

L'ensemble rotor 4, 5 et stator 6, 7 de chaque étage est placé dans une cuve 14 pleine d'huile servant de réservoir 15. L'huile liquide est contenue dans ce réservoir 15 et introduite dans l'étage "haute pression" 3 par une tubulure 16. La circulation d'huile peut être naturelle ou forcée par une pompe à huile 17. Au cours d'un cycle de fonctionnement, l'huile est transférée de l'étage "haute pression" 3 à l'étage "basse pression" 2 par le passage 18.The rotor assembly 4, 5 and stator 6, 7 of each stage is placed in a tank 14 full of oil serving as reservoir 15. The liquid oil is contained in this tank 15 and introduced into the "high pressure" stage 3 by a pipe 16. The Oil circulation can be natural or forced by an oil pump. During a cycle of operation, the oil is transferred from the "high" stage pressure "3 upstairs" low pressure "2 through passage 18.

L'installation selon la présente invention représentée sur la figure 2 comporte deux chambres 20, 21. La sortie 22 de la première chambre 20 est reliée à l'orifice d'admission 12 de l'étage "haute pression" 3 de la pompe 1 selon l'invention de plus fort débit, donc ayant le plus grand volume de pompage. La sortie 23 de la chambre suivante 21 est raccordée à une pompe turbomoléculaire 24 dont l'orifice de refoulement 25 est lui-même connecté à l'orifice d'admission 13 de l'étage "basse pression" 2 de la pompe 1 selon l'invention de plus faible débit.The plant according to the present invention shown in FIG. 2 comprises two chambers 20, 21. The outlet 22 of the first chamber 20 is connected to the intake port 12 of the "high pressure" stage 3 of the pump 1 according to the invention of higher flow, so having the largest pumping volume. The outlet 23 of the next chamber 21 is connected to a pump turbomolecular 24 whose discharge port 25 is itself connected to the inlet port 13 of the "low pressure" stage 2 of the pump 1 according to the invention of lower flow.

Claims (11)

Pompe à vide multi-étagée comportant au moins un premier étage basse pression et au moins un deuxième étage haute pression, l'un au moins desdits étages comportant au moins un orifice pour l'admission des gaz à pomper et l'un au moins desdits étages comportant au moins un orifice ouvert vers l'extérieur destinée à l'évacuation des gaz pompés, lesdits premier et deuxième étages communicant afin d'assurer le passage des gaz entre ledit premier étage et ledit deuxième étage, caractérisé en ce que ledit premier étage travaille à un débit plus faible que ledit deuxième étage.Multi-stage vacuum pump comprising at least a first low pressure stage and at least a second high pressure stage, at least one of said stages comprising at least one orifice for the admission of the gases to be pumped and at least one of said stages comprising at least one opening open towards the outside for evacuation of the pumped gases, said first and second stages communicating to ensure the passage of gases between said first stage and said second stage, characterized in that said first stage operates at a lower rate than said second stage. Pompe multi-étagée selon la revendication 1, dans laquelle ledit premier étage a un volume de pompage inférieur à celui dudit deuxième étage.Multi-stage pump according to claim 1, wherein said first stage has a pumping volume lower than that of said second stage. Pompe multi-étagée selon l'une des revendications 1 et 2, dans laquelle ledit deuxième étage aspire les gaz provenant d'une chambre requérant un vide grossier.Multi-stage pump according to one of claims 1 and 2, wherein said second stage draws gases from a chamber requiring a vacuum coarse. Pompe multi-étagée selon l'une des revendications précédentes, dans laquelle ledit premier étage aspire les gaz provenant du refoulement d'une pompe secondaire.Multi-stage pump according to one of the preceding claims, in which said first stage sucks the gases from the discharge of a pump secondary. Pompe multi-étagée selon l'une des revendications précédentes, dans laquelle lesdits premier et deuxième étages sont physiquement inversés.Multi-stage pump according to one of the preceding claims, in which said first and second stages are physically reversed. Pompe multi-étagée selon l'une des revendications précédentes, qui est une pompe volumétrique rotative à palettes et à joint d'huile.Multi-stage pump according to one of the preceding claims, which is a rotary vane pump with oil seal. Pompe multi-étagée selon la revendication 6, dans laquelle l'huile est injectée dans ledit deuxième étage ayant le débit le plus important.Multi-stage pump according to claim 6, wherein the oil is injected into said second stage having the largest flow rate. Pompe multi-étagée selon l'une des revendications 1 à 6, qui est une pompe volumétrique choisie parmi une pompe à membrane, une pompe à piston tournant, une pompe à piston oscillant, et une pompe à compression dynamique de type Roots. Multi-stage pump according to one of claims 1 to 6, which is a volumetric pump selected from a diaphragm pump, a piston pump rotating, an oscillating piston pump, and a dynamic compression pump Roots type. Installation de vide comportant une pompe multi-étagée selon l'une des revendications précédentes, comprenant en outre au moins une pompe turbomoléculaire dont l'orifice de refoulement est raccordé à ladite pompe multi-étagée.Vacuum installation comprising a multi-stage pump according to one of preceding claims, further comprising at least one pump turbomolecular nozzle whose discharge port is connected to said pump multistage. Installation selon la revendication 9, comportant au moins deux chambres et comprenant une pompe multi-étagée, dans laquelle une première chambre est connectée à ladite pompe multi-étagée, et une deuxième chambre est connectée à une pompe turbomoléculaire dont l'orifice de refoulement est raccordé à ladite pompe multi-étagée.Installation according to claim 9, comprising at least two chambers and comprising a multi-stage pump, wherein a first chamber is connected to said multi-stage pump, and a second chamber is connected to a turbomolecular pump whose discharge port is connected to said multi-stage pump. Installation selon la revendication 10, dans laquelle l'entrée de gaz dudit premier étage de faible débit est connecté au refoulement d'une pompe turbomoléculaire, et l'entrée de gaz dudit deuxième étage de débit supérieur est connecté à ladite première chambre.Installation according to claim 10, wherein the gas inlet of said first low flow stage is connected to the discharge of a pump turbomolecular, and the gas inlet of said second upper flow stage is connected to said first chamber.
EP05290810A 2004-04-21 2005-04-13 Multi-stage vacuum pump and pumping system having such a pump Withdrawn EP1589227A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0450741 2004-04-21
FR0450741A FR2869369B1 (en) 2004-04-21 2004-04-21 VACUUM PUMP MULTI-STAGE, AND PUMPING INSTALLATION COMPRISING SUCH A PUMP

Publications (1)

Publication Number Publication Date
EP1589227A1 true EP1589227A1 (en) 2005-10-26

Family

ID=34942115

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05290810A Withdrawn EP1589227A1 (en) 2004-04-21 2005-04-13 Multi-stage vacuum pump and pumping system having such a pump

Country Status (4)

Country Link
US (1) US7670119B2 (en)
EP (1) EP1589227A1 (en)
JP (1) JP2005307978A (en)
FR (1) FR2869369B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3161318B1 (en) * 2014-06-27 2020-02-05 Ateliers Busch S.A. Method of pumping in a system of vacuum pumps and system of vacuum pumps

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080226480A1 (en) * 2007-03-15 2008-09-18 Ion Metrics, Inc. Multi-Stage Trochoidal Vacuum Pump
DE102010019635B4 (en) * 2010-05-06 2014-04-03 Multivac Sepp Haggenmüller Gmbh & Co. Kg Sealing station for a packaging machine
EP2946082B1 (en) * 2013-01-18 2019-11-06 United Technologies Corporation Oil pump transfer plate
JP6616611B2 (en) * 2015-07-23 2019-12-04 エドワーズ株式会社 Exhaust system
CN106540470A (en) * 2016-11-02 2017-03-29 佛山市龙眼智能制造科技有限公司 A kind of energy-efficient vacuum system and its method of work for concentrating baking material
GB2572958C (en) * 2018-04-16 2021-06-23 Edwards Ltd A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
CN211009180U (en) 2019-07-02 2020-07-14 明达实业(厦门)有限公司 A high and low pressure integrated air pump and inflatable product
US20210396236A1 (en) * 2020-06-18 2021-12-23 Milwaukee Electric Tool Corporation Vacuum pump with a solenoid valve
JP7615690B2 (en) 2021-01-13 2025-01-17 トヨタ自動車株式会社 Press Equipment
EP4450817A3 (en) * 2024-08-12 2025-03-12 Pfeiffer Vacuum Technology AG Vacuum apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB863163A (en) * 1956-09-21 1961-03-15 Scaife Company Rotary gas compressor pump
US3668393A (en) * 1969-09-30 1972-06-06 Siemens Ag Apparatus having evacuation spaces and a pumping assembly
DE3710782A1 (en) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Method and device for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE10150015A1 (en) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3116872A (en) * 1959-05-18 1964-01-07 Bendix Balzers Vacuum Inc Gas ballast pumps
JPS5237214A (en) * 1975-09-19 1977-03-23 Hitachi Ltd Multi-stage screw compressor
JPS6223501A (en) * 1985-07-24 1987-01-31 Kobe Steel Ltd Side stream type screw expansion machine
JPH03271578A (en) * 1990-03-20 1991-12-03 Mitsubishi Motors Corp Two-stage vane pump
JPH0436091A (en) * 1990-05-29 1992-02-06 Shimadzu Corp Oil-sealed rotary vacuum pump
JPH0726625B2 (en) * 1990-12-12 1995-03-29 株式会社荏原製作所 2-stage screw vacuum pump
JPH0518382A (en) * 1991-07-10 1993-01-26 Ebara Corp Screw vacuum pump
JPH0658278A (en) * 1992-08-05 1994-03-01 Ebara Corp Multistage screw type vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB863163A (en) * 1956-09-21 1961-03-15 Scaife Company Rotary gas compressor pump
US3668393A (en) * 1969-09-30 1972-06-06 Siemens Ag Apparatus having evacuation spaces and a pumping assembly
DE3710782A1 (en) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Method and device for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE10150015A1 (en) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3161318B1 (en) * 2014-06-27 2020-02-05 Ateliers Busch S.A. Method of pumping in a system of vacuum pumps and system of vacuum pumps

Also Published As

Publication number Publication date
JP2005307978A (en) 2005-11-04
US20050238502A1 (en) 2005-10-27
US7670119B2 (en) 2010-03-02
FR2869369B1 (en) 2006-07-21
FR2869369A1 (en) 2005-10-28

Similar Documents

Publication Publication Date Title
EP1589227A1 (en) Multi-stage vacuum pump and pumping system having such a pump
US3677664A (en) Rotary mechanical pumps of the screw type
FR2591287A1 (en) COMPRESSOR SCREW GROUP AND INTEGRATED APPARATUS WITH OIL SEPARATOR AND DRAWER VALVE.
EP0435291A1 (en) Combined turbomolecular vacuum pump with two shafts and discharge at atmospheric pressure
FR2723766A1 (en) SCREW VACUUM PUMP
EP1510697B1 (en) Vacuum pump
EP0173601A1 (en) Perfectly dry and closed vacuum pump with rectilinear movement for alternating compression
FR2619867A1 (en) POLYETAGE MOLECULAR PUMP
FR2768189A1 (en) PUMPING METHOD AND SYSTEM FOR MIXING LIQUIDS
FR2782348A1 (en) COMPRESSED AIR OPERATED VACUUM PUMP OF THE EJECTOR TYPE
EP0618365B1 (en) Volumetric machine with magnetic driving system
EP0042774B1 (en) Arrangement for obtaining hydraulic fluid quantities of successively graded values
EP3105455A1 (en) Pumping system and method for lowering the pressure in a load-lock chamber
WO2020201218A1 (en) Dry-type vacuum pump and pumping installation
FR2557644A1 (en) ROTARY VACUUM PUMP OF SEPARATION TYPE AT SEVERAL FLOORS
FR2482208A1 (en)
EP3775558B1 (en) Dry-type vacuum pump
FR3086012A1 (en) DRY TYPE VACUUM PUMP
FR2653831A1 (en) VOLUMETRIC PUMP.
JP2002174174A (en) Vacuum exhaust device
FR3112578A3 (en) Rotary vane vacuum pump, detector and freeze-drying installation
FR2653830A1 (en) PALLET PUMP WITH TWO COMPARTMENT ROTOR.
EP2823182B1 (en) Improved pump installation and a control method for such a pump installation
FR2651280A1 (en) PRIMARY VACUUM PUMP.
FR3118649A3 (en) ROTARY VANE VACUUM PUMP WITH GAS BALLAST ASSEMBLY

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR LV MK YU

17P Request for examination filed

Effective date: 20051202

AKX Designation fees paid

Designated state(s): CH DE FR GB IT LI

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL LUCENT

17Q First examination report despatched

Effective date: 20100720

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL LUCENT

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20111101