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EP1414063A2 - Ensemble de garniture pour interface thermique utilisant métal à bas point de fusion avec matrice de rétention - Google Patents

Ensemble de garniture pour interface thermique utilisant métal à bas point de fusion avec matrice de rétention Download PDF

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Publication number
EP1414063A2
EP1414063A2 EP03255643A EP03255643A EP1414063A2 EP 1414063 A2 EP1414063 A2 EP 1414063A2 EP 03255643 A EP03255643 A EP 03255643A EP 03255643 A EP03255643 A EP 03255643A EP 1414063 A2 EP1414063 A2 EP 1414063A2
Authority
EP
European Patent Office
Prior art keywords
thermally conductive
grid
apertures
laminae
particulate
Prior art date
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Granted
Application number
EP03255643A
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German (de)
English (en)
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EP1414063B1 (fr
EP1414063A3 (fr
Inventor
Sanjay Misra
Radesh Jewram
Gm Fazley Elahee
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Bergquist Co Inc
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Bergquist Co Inc
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Publication of EP1414063A3 publication Critical patent/EP1414063A3/fr
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Publication of EP1414063B1 publication Critical patent/EP1414063B1/fr
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Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3736—Metallic materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3737—Organic materials with or without a thermoconductive filler
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24149—Honeycomb-like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24149—Honeycomb-like
    • Y10T428/24157—Filled honeycomb cells [e.g., solid substance in cavities, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24149—Honeycomb-like
    • Y10T428/24165—Hexagonally shaped cavities
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24298—Noncircular aperture [e.g., slit, diamond, rectangular, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y10T428/24331—Composite web or sheet including nonapertured component

Definitions

  • the present invention relates generally to an improved mechanically stabilized thermally conductive interface pad for transferring thermal energy from a heat generating semiconductor device to a heat dissipator such as a heat sink or heat spreader. More specifically, the present invention relates to such an interface which comprises a laminate pad with upper and lower thermally conductive laminae positioned upon and extending through apertures from opposed surfaces of an open mesh grid. In other words, portions of each of the opposed laminae extend through apertures in the stabilizing mesh grid to form a continuum, thus enhancing both mechanical stability and heat transfer efficiency without the creation of additional thermal interfaces.
  • the upper and lower laminae preferably comprise formulations of highly thermally conductive polymer compounds such as a polymeric matrix loaded or filled with solid particulate and a liquid or low melting point metal.
  • liquid metal is intended to refer to a metal or alloy having a melting point which is generally below about 90°C., although some higher melting materials may be included in the definition.
  • the solid particulate typically forms clusters which become coated with the low melting metal and are distributed throughout the matrix.
  • the arrangement of the present invention further provides for extrusion or oozing of portions of the loaded polymer laminae through the grid apertures.
  • Liquid metals as well as thermally conductive particulate have each been proposed for incorporation in a polymeric matrix to form thermally conductive interface pads.
  • the application of liquid metals for this purpose had not been widely used, primarily because of problems created instability and/or tendency of the liquid metal to oxidize or form alloys and amalgams, thereby altering and modifying the physical properties of the liquid metal component in the pad.
  • the liquid metal component would become oxidized, both along the surface as well as in the bulk structure.
  • dispersed liquid metal droplets had a tendency to coalesce, a process known as Ostwald ripening, and cause macroscopic separation of the metal from the polymer matrix.
  • the present invention relates to thermal interface pads which employ the combination of a liquid metal with a polymer carrier.
  • the liquid metal may either be employed as a filler by itself or preferably as a coating or encapsulant for other fillers dispersed in the polymer carrier.
  • the filler or filler combinations may be pretreated with octyl-triethoxysilane, or other such hydrophobic surfactants, to aid in binding the surface oxide layer of the liquid metal component resulting in enhancement of overall moisture resistance.
  • the silane component is blended in the polymeric matrix.
  • the utilization of a silane such as octyl-triethoxysilane in combination with liquid metal is disclosed in co-pending application Serial No. 09/946,879, the substance of which is incorporated by reference herein.
  • the stabilized thermally conductive mechanically compliant laminate pads of the present invention employ a centrally positioned open mesh grid component comprising a grid body with generally reticulated apertures formed therein with the apertures forming passageways or vias through which portions of the loaded polymeric resin may pass.
  • the preparation operations for the stabilized laminate pad include positioning liquid metal/particulate containing laminae on opposed major surfaces of a grid member, and through the application of heat and pressure, causing surface portions of the laminae to flow and merge, so as to create a continuum through apertures in the mesh grid.
  • the apertures in the intermediate mesh grid accommodate the presence of percolating clusters of liquid metal coated particles as a result of extrusion of these clusters within and through apertures.
  • a polymeric matrix is selected, and blended with a quantity of a liquid metal or a liquid metal and particulate combination.
  • the polymeric matrix is preferably selected from the group of compliant compositions including waxes or hot melts. Paraffin waxes, microwaxes, silicone waxes and formulations based on these may be used. Elastomers such as silicone, natural or synthetic rubber, acrylic, polyurethane, etc. may also be used. Glassy materials such as epoxy, phenolics, may also be suitable.
  • the polymeric matrix may be a crosslinked structure or "B-staged", including those which can be crosslinked by the user through through thermal or radiative activation.
  • the liquid metal comprises an alloy of indium and/or gallium, such as a gallium-indium-tin-zinc alloy, a bismuth-indium alloy or a tin-indium-bismuth alloy.
  • a metal that is liquid at room temperature or melting at a relatively low temperature typically below 120°C and preferably below 60°C.
  • a particulate such as boron nitride, alumina or aluminum nitride is initially dried, and thereafter placed in contact with a liquid metal.
  • a mixture of dried particulate and liquid metal is subjected to a mixing operation until the particulate is uniformly coated with the liquid metal. While not absolutely necessary, it is desirable that the particulate be dry before blending with the liquid metal alloy. At this stage of mixing one obtains a thixotropic paste of liquid metal and the powder. One can also visualize the paste as a large percolating cluster.
  • the coated particulate is mixed with a blend of a liquid polymeric carrier material such as, for example, liquid silicone oil of a desired viscosity, and octyl-triethoxysilane. It is preferred that the liquid metal particulate be incorporated in the polymer blend at or near the packing limit.
  • the packing fraction is typically between about 60% and 65% by volume coated particles, balance liquid silicone/octyl-triethoxysilane blend. At these volume fractions, one obtains mechanically compliant compounds that have excellent thermal conductivity due to high packing density.
  • particulate such as aluminum oxide (alumina), and aluminum nitride have also been found to be useful when properly dried prior to contact with the liquid metal.
  • alumina aluminum oxide
  • aluminum nitride have also been found to be useful when properly dried prior to contact with the liquid metal.
  • graphite and similar thermally conductive fillers Other combinations are possible with graphite and similar thermally conductive fillers.
  • the particle size should be such that the average cross-sectional thickness of particles is less than about 50 microns.
  • this portion of the working formulation is subjected to a mechanical mixing operation which typically includes a vigorous or high-speed mixing step, with vigorous mixing being continued until a visually smooth paste is formed.
  • liquid metal coated particulate When incorporated into polymer/silane blend, it has been found that the addition of the liquid metal coated particulate effectively reduces overall viscosity. The mechanism involved in this alteration of viscosity is believed to be due to the reduction of viscous drag at the "effective particle"-polymer /silane interface.
  • the liquid metal coating increases the sphericity of the configuration of the particulate, it also contributes to an effective "softness" of the otherwise hard particles. These two factors function in a mutually cooperative fashion so as to reduce both viscosity and modulus of the resulting composite. For this reason, therefore, it is desirable to control the quantity of liquid metal within the blend to the range of between about 10% and 90% by volume liquid metal, balance polymer resin/particulate. This property also facilitates and enhances passage of the formulation through the apertures or vias formed in the mesh grid.
  • the liquid metal coated particulate stabilizes and anchors the liquid metal into a three phase composite to prevent gross migration.
  • the three phases are particle-liquid metal-polymer blend.
  • the techniques of the present invention are employed in order to enhance mechanical stability. Increased stability is achieved without interposing additional thermal interfaces along and across the entire conductivity path, any one of which increases thermal impedance or resistance.
  • liquid coated particulate provides a Bingham-plastic like character in the resultant composite, this allowing the paste to remain static in the absence of external stress, and yet conform and/or flow easily when subjected to stress.
  • the desirable flow characterized as "oozing" of the composite occurs through the apertures formed in the grid.
  • liquid metals do not typically blend well with polymer liquids, including silicones.
  • particulate in particular boron nitride
  • the microscopic separation phenomena is reduced, with the liquid metal being supported or retained in coated particulate form. This is believed due to the increased thixotropy of the metal phase.
  • the coated particulate when added to the polymer/silane blend, functions effectively to form thermal vias within the composite.
  • the thermal conductivity of the particulate such as boron nitride, may even exceed that of the liquid metal per se, such as, for example, that of a eutectic alloy of indium, gallium, and tin.
  • the grid is preferably a thin mesh body fabricated from a highly thermally conductive metal such as, for example, copper or aluminum, although certain non-metallic materials may be used as well.
  • the thin grid preferably has a cross-sectional thickness of between about 0.5 mil and 10 mils, with a thickness of between about 1 and 5 mils having been found to be preferable.
  • the grid has an array of reticulated apertures, with the size and density of the apertures creating a grid structure which is between about 10% and 90% open, balance structural. For most purposes, a grid aperture pattern with about 50% or more open is preferred.
  • non-metallic grid such a grid may be prepared as a woven or non-woven fabric comprising graphite, carbon or glass fibers. Alternatively, certain other polymer fibers may be employed as well. It is, of course, appropriate to utilize materials of construction which are sufficiently durable for the required application. Any such non-metallic fabric (including non-woven fabrics) would likewise be provided with a reticulated pattern of apertures. It is, of course, always desirable that when non-metallic grids are utilized, the fabric be selected as one having reasonable thermally conductive properties.
  • grids may be fabricated from a fabric of filaments consisting of polyethylene terephthalate (Dacron), or a polyimide such as nylon, or the like.
  • fabric comprising graphite fibers in a reticulated pattern of 50% open may also be useful.
  • grids having thicknesses of between about 0.5 and 10 mils with open patterns of between about 10% and 90% are useful.
  • Interface pads prepared in accordance with the present invention will typically have an overall thickness of between about .5 mil and 10 mils, with the thickness being based upon the application of polymeric liquid metal bearing coatings to opposed surfaces of the grid.
  • Each of the coatings preferably has a thickness ranging from between about .5 mil and 5 mils.
  • thermo interface pad comprising a polymeric matrix material loaded with a liquid metal or a particulate material coated with a liquid metal.
  • the polymer matrix is preferably selected from paraffin wax, microwax, and silicone waxes comprising alkyl silicones.
  • waxes having a melting point of about 50-60°C. have been found particularly suited for this application.
  • soft silicone polymer consisting of a reactive siloxane elastomer, acrylic syrups, epoxy resins , either crosslinked or "B-staged", polyurethane resins are found to be useful.
  • silicone wax utilized in the formulations of the examples is GP-533 (M.P. of 60 °C.) (Genesee Polymer of Flint, MI), with these materials being, of course, commercially available.
  • a microwax employed is that material designated as "M-7332" (M.P. of 55 °C.) available from Moore and Munger of Shelton, CT.
  • Another polymer matrix used is a one-part soft reactive silicone elastomer available from GE Toshiba Silicones of Tokyo, Japan under the trade designation TSE-3053.
  • Silanes and other surface active agents including titanates, zirconates and/or assorted surface active agents are preferred to improve rheology and stability of the dispersion, and particularly for creating a hydrophobic barrier.
  • Surface treatments with surface active agents that work well for improving rheology as well as stability of the dispersion, especially against moisture, are alkyl functional silanes, such as for example octyl triethoxy silane (OTES).
  • OTES octyl triethoxy silane
  • MTMS methyl trimethoxy
  • alumina (aluminum oxide) particulate and/or graphite may be advantageously employed.
  • a particulate of spherical symmetry, with a diameter of 3 microns and a BET surface area of 2m 2 /g. may be employed. This particulate may be blended with the liquid metal alloys and treated similarly to formulations containing boron nitride to prepare smooth coatings with tixotropic properties.
  • Alumina has a specific gravity of 3.75 and a thermal conductivity of 21 W-m -1 -K -1 .
  • Alumina may be blended with a selected polymer matrix and treated with octyl-triethoxysilane for the preparation of coatings pursuant to the present invention.
  • the volume of the combined particulates/liquid metal alloy will comprise between about 50% and 70% by volume of the interface, balance resin matrix.
  • the particulate/liquid metal alloy component may comprise an amount as low as about 40% of the overall combination when blended with the polymer matrix.
  • compositions have been prepared utilizing Alloy 1, with numbers being by weight: TABLE II Formula Matrix Alloy 1 40 ⁇ m Boron Nitride OTES Parts by weight Vol % Parts by weight Vol % Parts by weight Vol % Parts by weight Vol % 1 100 1 30 1200 52 100 15 12 3 2 100 1 30 1800 67 0 0 10 3 3 100 2 32 1200 50 100 15 10 3 1 silicone wax consisting of siloxane backbones with pendant alkyl chains and having a melting point of 60°C. 2 soft silicone polymer consisting of a reactive siloxane elastomer.
  • compositions designated Formulas 4 and 5 are prepared substituting Alloy 2 for Alloy 1 with comparable results.
  • Other particulates may also be employed using alumina or graphite.
  • TABLE IV Formula Matrix Alloy 1 3 ⁇ m Alumina OTES Parts by weight Vol % Parts by weight Vol % Parts by weight Vol % Parts by weight Vol % 6 100 1 30 1200 59 100 8 10 3
  • TABLE V Formula Matrix Alloy 1 Graphite OTES Parts by weight Vol % Parts by weight Vol % Parts by weight Vol % Parts by weight Vol % 7 100 1 33 1200 60 25 4 10 3
  • Formula 1 was applied as two coatings on opposed surfaces of a copper mesh grid having a thickness of 2 mils and a reticulated pattern of diamond apertures 70 mils long and 35 mils wide.
  • This mesh grid had an open area of ⁇ 50 %, with reasonable border margins positioned on and along the surfaces.
  • This formulation was applied to opposed surfaces, the coatings each having a thickness of 2 mils.
  • the assembly was pressed under a unit pressure of 1-15 psi at a temperature of approximately 125° F. Thermal performance was excellent, with the thermal conductivity of the compound being 7 W-m -1 -K -1 and thermal impedance being less than 0.2 °C-cm 2 -W -1 .
  • Formula 2 was applied as two coatings on opposed surfaces of an aluminum mesh grid having a thickness of 1.5 mils and a reticulated pattern of diamond apertures 50 mils long and 25 mils wide.
  • This mesh grid had an open area of between ⁇ 40 and 50 %, with reasonable but narrow border margins positioned on and along the surfaces.
  • This formulation was applied to opposed surfaces, the coatings each having a thickness of 2.5 mils.
  • the assembly was pressed under a unit pressure of 10-15 psi at a temperature of approximately 125° F. Thermal performance was excellent, with the thermal conductivity of the compound being 3 W-m -1 -K -1 and thermal impedance being less than 0.2 °C-cm 2 -W -1 .
  • Thermal interface pads with results substantially similar to those reported in connection with Formulas 1 and 2 above.
  • Thermal interface pads utilizing non-metallic grids of Dacron with openings configured similarly to those of Formulas 1 and 2 have reasonable thermal performance properties.
  • interface pad 10 comprises a central grid body 11 arranged medially between coating layers 12 and 13. Further, as illustrated in Figure 2, grid 11 is provided with reticulated apertures as at 15-15 which are sized so as to permit ingress or mutual oozing of coatings 12 and 13 until fused together and merged. Further, and as shown in the photomicrograph of Figure 3, following fusion and merger, thermal interface pads of the present invention create and form a continuum through the mesh, thereby eliminating internal thermal interfaces in particularly in the apertures where bridging of the opposed coating occurs.
  • FIG. 7 of the drawings a modified interface pad consistent with the present invention is illustrated, having the same features as the modification illustrated in Figures 1-6, with the exception being that the reticulated apertures as at 15A-15A are of a different shape, specifically, a diamond-shaped configuration.
  • the various components of Figure 7 are the same as those shown in the embodiment of Figures 1-6, with these components being designated by the same reference numeral together with the suffix "A".
  • phase change occurs at temperatures indicated as T1 and T2. More particularly, the materials are selected for the present invention wherein the polymeric matrix at least partially fuses or undergoes a phase change at a temperature lower than that of the liquid metal component. Given the presence of the stabilizing mesh grid, overall stability of the composite is preserved.
  • the phase change temperature differential is preferably about 10° C.
  • Figure 5 is provided to demonstrate the utilization of the compliant pad of the present invention in connection with a heat generating semiconductor device of conventional configuration. Accordingly, the assembly 10 shown in Figure 5, includes a heat generating semiconductor device or package illustrated at 21 having a heat sink, heat spreader, or other heat dissipating member illustrated at 22. Interposed between the opposed surfaces of semiconductor device 21 and heat dissipating member 22 is a mechanically compliant stabilized thermal interface pad 23 prepared in accordance with the present invention.
  • BN or alumina particulate can range in size from up to about 1 micron diameter and up to about 40 microns in cross-sectional thickness. It will be observed that the platelet-like configuration of boron nitride in particular provides a highly desirable and effective combination when wetted with liquid metal, with the effective particle being illustrated in the micrograph of Figure 3. As indicated in Figure 3, the individual laminae flow as a continuum through the openings formed in the grid, with the particulate, wetted with liquid metal, aiding in forming the interface-free continuum through the entire thickness of the pad. Viscosity control is aided by this feature.
  • silicone resins may also be utilized as a matrix.
  • One such resin is designated "TSE 3053" from GE-Toshiba Silicones, Inc., with these materials being, of course, commercially available. Silicones having viscosities up to about 1000 centistokes may be satisfactorily utilized. The presence of the silane modifies the viscosity slightly, producing an oil composition with slightly lower viscosities.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
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EP03255643A 2002-10-24 2003-09-10 Ensemble de garniture pour interface thermique utilisant métal à bas point de fusion avec matrice de rétention Expired - Lifetime EP1414063B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/279,593 US6984685B2 (en) 2000-04-05 2002-10-24 Thermal interface pad utilizing low melting metal with retention matrix
US279593 2002-10-24

Publications (3)

Publication Number Publication Date
EP1414063A2 true EP1414063A2 (fr) 2004-04-28
EP1414063A3 EP1414063A3 (fr) 2004-10-13
EP1414063B1 EP1414063B1 (fr) 2007-02-21

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US (1) US6984685B2 (fr)
EP (1) EP1414063B1 (fr)
JP (1) JP4289949B2 (fr)
AT (1) ATE354865T1 (fr)
CA (1) CA2438242C (fr)
DE (1) DE60311936T2 (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005096320A3 (fr) * 2004-03-30 2006-04-06 Gen Electric Compositions thermo-conductrices et procedes de production desdites compositions
WO2006023860A3 (fr) * 2004-08-23 2006-06-29 Gen Electric Composition thermoconductrice et son procede de preparation
EP1908802A1 (fr) * 2006-10-08 2008-04-09 General Electric Company Composition améliorée de nitrure de bore et composition contenant cette composition
WO2009035907A3 (fr) * 2007-09-11 2009-04-23 Dow Corning Matériau d'interface thermique, dispositif électronique contenant le matériau d'interface thermique et leurs procédés de préparation et d'utilisation
US7976941B2 (en) 1999-08-31 2011-07-12 Momentive Performance Materials Inc. Boron nitride particles of spherical geometry and process for making thereof
US9550888B2 (en) 1999-08-31 2017-01-24 Momentive Performance Materials Inc. Low viscosity filler composition of boron nitride particles of spherical geometry and process
US10068830B2 (en) 2014-02-13 2018-09-04 Honeywell International Inc. Compressible thermal interface materials
US10781349B2 (en) 2016-03-08 2020-09-22 Honeywell International Inc. Thermal interface material including crosslinker and multiple fillers
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ATE354865T1 (de) 2007-03-15
EP1414063B1 (fr) 2007-02-21
JP4289949B2 (ja) 2009-07-01
EP1414063A3 (fr) 2004-10-13
JP2004146795A (ja) 2004-05-20
CA2438242C (fr) 2008-07-08
DE60311936D1 (de) 2007-04-05
CA2438242A1 (fr) 2004-04-24
DE60311936T2 (de) 2007-10-31
US6984685B2 (en) 2006-01-10
US20030187116A1 (en) 2003-10-02

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