EP1491851A1 - Capteur tactile - Google Patents
Capteur tactile Download PDFInfo
- Publication number
- EP1491851A1 EP1491851A1 EP03775822A EP03775822A EP1491851A1 EP 1491851 A1 EP1491851 A1 EP 1491851A1 EP 03775822 A EP03775822 A EP 03775822A EP 03775822 A EP03775822 A EP 03775822A EP 1491851 A1 EP1491851 A1 EP 1491851A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- touch sensor
- magnet
- coupling member
- hall
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
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- 238000010168 coupling process Methods 0.000 claims abstract description 43
- 238000005859 coupling reaction Methods 0.000 claims abstract description 43
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 29
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- 230000004075 alteration Effects 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
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- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/965—Switches controlled by moving an element forming part of the switch
- H03K17/97—Switches controlled by moving an element forming part of the switch using a magnetic movable element
Definitions
- the present invention relates to a touch sensor aiming to correct an error of process dimension due to abrasion of an edge tool by setting a reference position for checking the machining position while the cutting edge of the edge tool such as a bite and drill in an automated computer-controlled machine tool such as a machining center and a jig drilling machine advances. More specifically, the invention relates to a construction of a mechanism that enables it to detect a minute displacement (in microns or sub-microns) with a minute measuring pressure.
- IC integration level has increased dramatically.
- This requires further minute precision hole processing for example, accurately depth-processing 2 - 4 layers out of 5 - 6 layers of printed boards in the order of micro-meter, using a drill made of an ultra-hard material such as diamond having a diameter in the order of 0.1 mm or less.
- the revolution speed of the drill reaches hundreds of thousands per minute, causing abrasion to occur at the cutting edge. Therefore, the edge position must be checked regularly, e.g. every one hundred times of hole processing, in order to keep the relative position between the working table and the cutting edge constant.
- a touch sensor is used as a checking apparatus for keeping the cutting edge stable with respect to a reference position provided as a predetermined height from the surface of the working table of the aforementioned machine tool. It is provided with a mechanical means for switching an electric contact from ON state to OFF state by a snap action of, e. g. toggle mechanism, when a free end of a lever-type actuator rotatably supported by a hinge is pressed against an edge tool, and its movement is transferred to a sliding pin. Alternatively, it may be provided with an optical means wherein the reference position of the edge is detected with a signal output at which the edge directly blocks the light beam, to correct the fluctuation due to the abrasion at the edge.
- a contact load for activating a touch sensor having a mechanical means requires e.g. 100 to 300 gf as an energizing force in order to counteract resistance by anti-action accompanied with a snap action of a contact by moving the actuator lever. Accordingly, without such a contact pressure, a setting of a reference position with accuracy and stable reproducibility is not obtained.
- processing a diameter of 0.1 mm or less in the order of 0.01 mm using a diamond drill requires a touch sensor with a very light contact pressure, because activating a touch sensor with a contact load as described above may cause the drill itself to bend at a buckle, resulting in unstable position setting of the drill tip, thereby damaging reproducibility.
- an object of the invention is to provide a touch sensor having a contact load of 0.5 gf or less as an operation force, reproducing sensitivity or precision in the range of ⁇ 0.5 ⁇ m, freedom of attaching to and detaching from the working table of the automated machine tool, and furthermore ease of handling the reference position setting.
- a touch sensor is characterized by comprising, a first coupling member 18 constructed in a united manner with a pedestal 22, plate springs 16 arranged to be parallel to each other, one end sides of the plate springs being fixed to both ends of the first coupling member 18 respectively, a second coupling member 19 to couple other ends of the plate springs 16s to each other, a magnet installed in a manner that the side of each plate spring corresponds to the side of either magnetic pole, a pipe mounted to each plate springs 16 in parallel to the direction of the magnetic poles of the magnet 25, and a detecting means located near the magnetic pole boundary line of the magnet 25 and detects a displacement of the magnet 25 caused by an external force applied to the pipe 30, wherein the each plate 16 has a rigid part with rigidity on the base end side, and an elastic part with elasticity on the both end sides.
- the touch sensor comprises elastic bodies 38s to cancel the effect of gravity on the second coupling member 19.
- the touch sensor comprises, a supporting member 20 having one end side fixed to the first coupling member 18 and other end side provided with the detecting means 26 or the magnet 25, the supporting member 20 being inclined from the one end side to the other end side, and an adjusting member 36 for adjusting the distance between the supporting member 20 and the pedestal 22, wherein the magnet 25 or the detecting means 26 is mounted to the second coupling member 19.
- holes are provided to portions 16 and 19 where displacement is caused by an external force applied to the pipe.
- One end of the pipe 30 is provided with a rigid anvil 34 to receive an external force.
- the touch sensor comprises a notifying member for notifying whether or not a signal is output from the detecting means 26.
- Pedestals 22 are provided to at least two parts on a bottom surface of the pedestal 22.
- the pipe is provided with a regulating member 35 for regulating a displacement of pipe body 30.
- the pipe 30 is provided so that its other end regulates a displacement of the pipe body 30.
- the touch sensor according to the invention uses a hall 1C to detect a minute displace of 0.1 mm or less of the small-size magnet which is displaced unitedly with the parallel displacement of the anvil caused by a light load of 0.5 gf or less, so as to provide an open/close control of an electric circuit.
- the parallel displacement is basically provided by a parallel-link cantilever mechanism consisting of a dual structure by plate springs having the same shape, wherein, any of the plate spring is an empty frame having a rectangular shaped plan skeleton, polyimide thin plates forms a shape provided by elastic arms of a same length extended in a parallel manner in an elongated direction from each of the four corners of the skeleton, and an aluminum alloy thin plate with the same shape as the skeleton and a rib provided to protrude along the inner circumferential edge defining a rectangular space of the empty frame, is adhered to the skeleton so as to render the skeleton part a rigid body.
- the coupling member for the plate springs on the fixed end side in the cantilever mechanism is fastened on the supporting block provided uprightly at the central part of the pedestal through the empty portion of the plate spring.
- the coupling member for the plate springs at the free end in the cantilever mechanism is formed in a U-shape by bend-processing an aluminum alloy thin plate, and its weight is decreased by boring halls.
- a tube material of a small diameter perpendicular to the plate springs penetrates the upper and lower surfaces of the U-shape and joins as a pipe with the surfaces.
- the small-size magnet is fastened to a predetermined position near the center of the coupling member at the free end, while opposed to the small-size magnet, a hall IC is positioned to the free end of the supporting member provided and fixed to the coupling member on the fixed end side and extended.
- an adjusting rod provided to the supporting block inhibits the supporting member from making an elastic deformation inclined from the fixing position to the pedestal, enabling to forcibly displace the hall IC to a position where it is opposed to the small-size magnet, and enabling a fine-adjustment in the direction of the rod axis by means of the screw action of the adjusting rod.
- a signal light is provided and fixed to the supporting member.
- a molded housing totally surrounding the cantilever mechanism to form on the top surface of the pedestal a peripheral wall of a hermetical fitting stage for an inner surface of the bottom aperture of the molded housing.
- the molded housing is provided on the top surface with an aperture of a large diameter through which the pipe is inserted and a window having a transparent cover to render the signal light visible, and on the side surface with an opening through which an electric wire material is pulled out.
- a flanged boss facing the lock-washer is provided and fixed on the outside, and on the inside a bush to abut with and position the free end of the parallel link.
- anvil and the lock-washer are fastened to a tube material of a large diameter fitting the outer diameter of the tube material of a small diameter as the pipe, whereby the anvil is freely detachable from the pipe while the lock-washer regulates downward displacement of the pipe.
- an elastic body is provided in a tensioned manner between the fixed and free ends of the parallel link in order to yield a force in the direction to cancel the effect of gravity acting on the construction at the free end, and thus restrain an inertia movement.
- the pedestal is provided with an extended part overhanging from the wall around the fitting stage to the exterior of the housing, and pedestals are drilled at at least two appropriate positions on the bottom surface.
- the anvil contacting with the cutting edge is subject to a parallel movement by means of the parallel link mechanism of the cantilever beams of the parallel plate springs made of polyimide thin plates.
- the movable portion of the parallel plate springs is made of aluminum alloy thin plates and a tube material with a small diameter, so that its weight is decreased.
- the hall IC With the hall IC detecting the movement of the magnet caused by the parallel movement of the anvil, it is enabled to detect a displacement at a reproduction precision of ⁇ 0.5 ⁇ m or less to renew the default position setting the cutting edge.
- the parallel plate spring has an empty skeleton through which space the supporting block at the fixed end of the cantilever beam is penetrated and constructed, and thus allowing a compact package of the total touch sensor.
- the movable portion of the parallel plate spring has its self-weight supported by a cantilever elastic wire material and abuts with the bush fixed inside the housing, which allows a compact construction as well as the movable portion of the parallel plate spring to be held stably.
- the elastically displaced position of the hall IC supporting member is normally held by the adjusting rod, it is made possible to fine-adjust the relative position between the hall IC and the magnet to a position indicating the optimal sensitivity, controlling the screw part of the adjusting rod renders.
- the anvil is freely detachable from the pipe, so that it can be easily replaced when abrasion or deformation occurs.
- Such a touch sensor can always be installed to a predetermined position on the working table by means of the knock hole drilled on the pedestal, it is made possible for an appropriate clamp to be engaged with and easily bolted to the extended part over-hanged to the exterior of the housing.
- Fig. 1 shows an embodiment of a touch sensor 10 according to the invention, (a) a side cross-sectional view and (b) a cross-sectional view along line B-B of (a).
- Fig. 2 is a plan view to illustrate one of two parallel plate springs 16 of the same shape which are constructed mirror-symmetrically opposed to each other having a same geometry, (b) a cross-sectional view along line B-B of (a), and (c) an expanded view of the part of (b) circulated with a sigh c.
- Fig. 3 is a bottom view along line III-III of Fig. 1 (a).
- FIG. 4 is a perspective view of Fig. 1, parts thereof being disassembled.
- Fig. 5 is an operational illustration of the touch sensor 10 of Fig. 1, a housing 12 and a signal light 14 being removed. Note that plate thicknesses are all exaggeratedly illustrated in the drawings.
- a cantilever mechanism 15 which is a major member of the touch sensor 10 is a type of parallel link mechanism (see FIG. 6 (b)) constructed by the two plate springs 16 having the same shape.
- a plate spring 16 is a formation of polyimide thin plate member (having a thickness of about 75 ⁇ m) shaped by a rectangular empty frame 16a, from four corners of which, elastic arms 16bs, elastic parts, are respectively extended in parallel in a longitudinal direction.
- an aluminum alloy thin plate 17, a rigid part is matched and adhered to each plate spring skeleton 16a (see Fig.
- the plate 17 being molded into an empty frame having the same plan shape as the skeleton 16a, and provided with a rib 17a cut and raised by burring along an inner circumferential edge so as to protrude from it.
- This turns the skeleton 16a of each plate spring 16 into a rigid structure, with only the part of each elastic arm 16b functioning as a movable portion.
- the thus constructed two plate springs 16, 16 having the same shape are spaced in parallel at an appropriate distance in upward, downward, and lateral directions, and opposed mirror-symmetrically to each other.
- the ends of the both springs are respectively combined by coupling members 18, 19 which are rigid bodies perpendicular to each plate spring 16.
- the upward and downward displacements at free ends of the parallel plate springs 16, 16 are provided by curvature of four elastic arms 16b extended form the skeleton 16a. That is, the parallel link mechanism by four rigid bar bodies a, b, c, d shown in the schematic view of FIG. 6 (b) is equivalent to one of FIG. 6 (a), and a joint k in FIG. 6 corresponds to the elastic arm 16b circled by a two-dot chain line in FIG. 6 (a).
- the coupling member 18 on the fixed end side of the parallel plate spring 16 in the cantilever mechanism 15 is advantageously a molded block of a ferrous material, considering expansion coefficient of the member having to be approximated to one of the processing machine to which the member is to be equipped for use. However, weight of the coupling member 18 may be decreased using an aluminum alloy or a synthetic resin depending on purpose of use.
- the coupling member 18 on the fixed end side has two columns 18d, 18d extending from the both sides of a central pedestal 18a. Each of the columns has mounting surfaces on a top surface 18b and a lower surface 18c onto which the end of the elastic arm 16b of the parallel plate spring 16 is screw-combined and fixed.
- the two columns 18d, 18d are formed so that the extended portions above a seat surface 18e of the central pedestal 18a are sufficiently long.
- the seat surface 18e is provided as a mounting seat for a halt IC supporting member 20 described hereinafter (see Fig. 1 (b)).
- a ferrous molded supporting block 24 is screw-combined from the lower surface and fixed to a mounting seat 22a provided to the top surface of the ferrous molded pedestal 22 to protrude from it, which is formed for the same reason as above (see Figs. 1 and 3).
- a mounting seat 22a provided to the top surface of the ferrous molded pedestal 22 to protrude from it, which is formed for the same reason as above (see Figs. 1 and 3).
- an upright portion 24a on the mounting seat 22a penetrates the rectangular empty space formed in the plate spring 16 positioned at the lower side, so that a transverse beam 24b extends in parallel with the mounting seat 22a through the middle position spaced apart from the both upper and lower parallel plate springs 16, 16.
- the transverse beam 24b intrudes into a penetration hole 18f provided by drilling the middle pedestal 18a of the coupling member 18 on the fixed end side, so that the upper and lower surfaces 18b, 18c of the column 18d to be the fixing surfaces for the parallel plate springs 16s are provided and fixed to the mounting seat 22a in parallell. Under this condition, the free end of the cantilever mechanism 15 is elastically deformed to a position where the elasticity of the elastic arms 16b of the two upper and lower parallel plate springs 16 come to balance with the action of gravity m to be supported (see FIG. 6 (a)).
- the coupling member 19 on the free end sides of the parallel plate springs 16 in the cantilever mechanism 15 is provided by outwardly bend-processing upper and lower parts of a lightweight aluminum alloy thin plate, and conjugating the parts to the free ends of the elastic arms 16b of each parallel plate spring 16. That is, forming U-shaped structure in section comprising two parallel upper and lower surfaces 19a, 19b provides the coupling member 19 on the free end sides with rigidity. Moreover, in order to decrease the weight, suitably shaped holes 19c, 19d are provided on a vertical surface 19e by drilling.
- a pocket 19f is cut out to match the circumference of a small-size rare-earth magnet molded in a cube form 25 with its top surface side is provided as the South pole, the magnet 25 is adhered to a seat surface 19g provided by bending the lower hem at right angle to be cut and raised, and a surface 25a comprising South and North poles on the upper and lower sides respectively is opposed to a detecting surface 26a of the hall IC 26 provided and fixed to the free end of the hall IC supporting member 20 installed inside of the pocket 19f.
- positioning is performed with pedestals 16cs provided by drilling the free ends of the elastic arms 16bs on the free end sides of the parallel plate springs 16s, and pedestals 19hs provided by drilling each of both ends of the top surface 19a and the lower surface 19b of the coupling member 19 at the free end side.
- the top surface 19a and the lower surface 19b of the coupling member 19 on the free end side are thereby adhered to the free ends of the elastic arms 16bs on the upper and lower free end sides.
- the free ends of the two upper and lower parallel plate springs 16 are coupled to the coupling member 19, so that a movable portion 28 of the cantilever mechanism 15 is formed.
- a pipe 30 is adhered to the movable portion 28, the pipe 30 penetrating through the central part of the top surface 19a and the lower surface 19b of the coupling member 19 at the free end side, and being perpendicular to the mounting seat 22a of the molded pedestal 22.
- the pipe 30 is preferably a thin stainless tube, and the coupling member 19 is lightweighted by providing holes inside.
- the upper end of the pipe 30 is long enough to protrude from the housing 12 described hereinafter, and relates to the setting of a reference height H from the working table surface F.
- an anvil 34 formed of pure aluminum on which surface highly rigid material such as sapphire, ruby and diamond is provided, is attachably/detachably provided to provide a flat contact surface 32 directly contacting with the cutting edge (not shown) of a measuring object and determining the reference height. That is, the anvil 34 is constructed such that it is adhered to a thin stainless tube rib 34a of a large diameter slidably fitting the outer diameter of the thin stainless tube forming the pipe 30, together with a lock-washer 35 functioning as a stopper.
- the lower end of the pipe 30 may be provides as a stopper to set a distance from the top surface of the molded pedestal 22 to limit the lower movement range of the movable portion 28.
- the hall IC supporting member 20 comprises an elastic part 20a whose end part is fixed to the seat surface 18e of the pedestal 18a at the center of the coupling member on the fixed end side, a rigid part 20b forming a structure by bending downwardly the both lines along the longitudinal direction, and an adhering seat 20c of the a hall IC26 formed by bending downwardly the free end.
- the elastic part 20a is fixed to the seat surface 18e of the central pedestal 18a, with the rigid part 20b forcibly deformed and inclined downwardly by a small angle (e.g. 40 degrees) as shown by the two-dot chain line in the drawing.
- the slightly inclined rigid part 20b of the hall IC supporting member 20 is supported at an upper end 36a of an adjusting rod 36 screwed to an appropriate position on the top surface of the supporting block upright portion 24a, and raised to an nearly horizontal position in order to move the hall IC detecting surface 26a to an area that reacts to the flux of the magnet 25.
- the axially-directed upward and downward movement due to the screwing action of the adjusting rod 36 allows a fine adjustment of the optimal activating position of the hall IC26.
- the pedestal 22 conceals a head part 36b to control the axially-directed movement of the adjusting rod 36.
- the signal light 14 of a light emitting diode is provided and fixed to the hall IC supporting member 20 so that it is possible to visualize an activating signal by lighting the signal light 14 which is emitted when the hall IC 26 reacts to a magnetic potential of a preset threshold value.
- two elastic wire materials 38s stainless spring wire materials with a diameter of 0.1 mm, the natural shape thereof being illustrated with a two-dot chain line
- the weight m (arrow) of the movable portion 28 including the coupling member 19 the parallel plate spring 16, the magnet 25, the pipe 30, the anvil 34, and the lock-washer 35 in the cantilever mechanism 15 are provided and fixed to the hall TC supporting member 20 by an end 38a in order to warp an free end 38b.
- the wire materials are inserted through two transparent holes 19i, 19i provided on the coupling member 19 corresponding to the extension lines of the elastic wire materials 38 right below the top surface 19a of the coupling member 19, so that an upward energizing force t (arrow) may be supplied.
- the imparting force t is much greater than weight m, and the top surface 19a of the coupling member 19 is lightly pressed against a lower surface 40a of a bush 40 provided and fixed to the inner surface of the housing 12. This renders it possible to hold the parallel plate springs 16 almost horizontally and stably, as well as stably set the position of the magnet 25 in the direction of the height.
- a flanged boss 43 opposed to the lock-washer 35 mounted to the anvil 34 is adhered to the exterior of the large diameter aperture 42 to limit the range of downward movement of the anvil 34 by the lock-washer 35 and the boss 43a abutted to each other.
- the bush 40 is provided and fixed to loosely fit the pipe 30 to regulate the upper limit of the movement of the movable portion 28 or the magnet 25, so that the reference position of the anvil 34 is set.
- An electric wire pullout opening 45 with a rubber cap 44 is provided on a sidewall 12b of the molded housing 12 facing the coupling member 18 on the fixed end side of the cantilever mechanism 15. Moreover, a sidewall circumference surface 12c of the side wall surrounding the molded housing 12 matches the same surface as the outer circumferential edge of the molded pedestal 22. Inside the outer circumferential edge 22b of the molded pedestal 22, a fitting stage peripheral wall 22c is formed to which a fitting inner surface 12d formed at the bottom aperture of the molded housing 12 is tightly fitted.
- a drilled hole for accommodating the head of a bolt 24c for bolting the molded supporting block 24 and a knock hole 22e for positioning are provided on a lower surface 22d of the molded pedestal 22 .
- an extended portion 22f is formed overhanging outwardly from the fitting stage peripheral wall 22c to the sidewall circumference surface 12c of the sidewall of the molded housing, and engaged with a clamp 46 as illustrated in Figs. 1 (b) and 4.
- a bolt 47 is inserted through a bolt hole 46a provided on the top surface, and screwed to a screw hole 48 carved on the working table surface F, so that the touch sensor 10 is fixed to the working table surface F.
- the touch sensor 10 is installed at an appropriate position on the working table F of a machine tool such as a computer-controlled machining center or jig drilling machine.
- a knock pin 49 is implanted and the screw hole 48 is carved at the installing position on the working table F so that the sensor can be installed at the same position all the time.
- the knock hole 22e for positioning provided on the lower surface 22d of the molded pedestal 22 of the touch sensor 10 is engaged with the knock pin 49 implanted on the working table F.
- the clamp 46 is engaged with the extended part 22f of the molded pedestal 22 overhanging outwardly from the sidewall circumference surface12c of the molded housing 12, and then the bolt 47 is inserted through the bolt hole 46a provided on the top surface of the clamp, to be screwed to the screw hole 48 on the working table F.
- the bolt 47 By tightening the bolt 47, the working table F is pressed against the extended part 22f of the pedestal 22 by means of the clamp 46, so that the touch sensor 10 is fixed at the defined position.
- the reference height H from the working table F to the top surface of the anvil 34 is automatically set For example, in a precision hole processing, a drill (not shown) is moved from a processing position to a position right above the central axis of the anvil 34 of the touch sensor 10. When the drill is descended gradually, the tip of the drill come into contact with a contacting surface (reference surface) 32 of the anvil 34, so that the pipe 30 is downwardly pressed and moved.
- the weight of the movable portion 28 of the cantilever mechanism 15 is almost in balance with the integrated energizing force of the parallel plate springs 16 and the compensating elastic wire materials 38, allowing the load with which the cutting edge of the drill downwardly displaces the movable portion 28 via the anvil 34 to be provided as 0.5 gf or less. This dispels the concern that the drill may be buckling-deformed.
- the magnetic potential of the magnetic field formed by the magnet 25 is zero on a plane Vo which crosses perpendicularly the axis of the magnet 25 at an equal distance from the both magnetic poles S, N.
- the magnetic power gradually strengthens toward the both poles.
- the threshold value of the hall IC26 to respond to the magnetic force is set to, for example, 20 gauss (S20G) on the S-pole side, so that a hall IC 26 transfers a closing signal to the connected electric circuit (not shown) at the moment the magnetic potential surface -V 20 such as of 20 gauss of the magnet 25 which descends together with the coupling member 19 united with the pipe 30 passes through, for example, a point P on the detecting surface 26a.
- the computer of the machine tool renews the initial setting of the reference position.
- the signal light 14 of the emitting diode also lights up and blinks to notify that the cutting edge has reached the reference position.
- a drip proof function can be added by covering in a close-tight manner the gap between the lock-washer 35 provided unitedly with the anvil 34 and the flanged boss 43, by means of a thin flexible rubber bellows.
- the elastic wire materials 38 to cancel the weight m of the movable portion 28 may be replaced with a tension coil spring, a compression coil spring, a spring wire, or a piano wire.
- These elastic wire materials may be of beryllium copper or phosphor bronze.
- the elastic wire materials 38 may be provided in such a manner that the plate spring 16 is suspended from the upper side or the plate spring 16 is pressed up from the lower side.
- the plate spring 16 may be installed to incline upwardly from the coupling member 18 to the coupling member 19, so that the self-weight of the plate spring 16, the coupling member, etc. will cause the plate spring 16 to be horizontal.
- a magnetically sensitive semiconductor such as a magneto resistance sensor may be employed instead of the hall IC 26.
- a material of the elastic arm16c a material having flexibility such as polyester and film-like metal may be employed instead of polyimide.
- Stainless for example, may be employed as a material for the aluminum alloy plate 17, and the plate does not need to have a tabular shape.
- the installing positions of the magnet 25 and the hall IC 26 may be mutually exchanged.
- the closing signal it is preferred to provide the closing signal as a radio signal from the hall IC 26, which can lightweight the coupling member 19.
- other notifying means may be used to notify the reception of the closing signal, such as providing a speaker from which a sound may be output to indicate the reception of the closing signal.
- the present invention may be used to check the machining position through which the cutting edge of an edge tool advances, such as a bite and drill in an automated computer-controlled machine tool such as a machining center and jig drilling machine.
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Geophysics And Detection Of Objects (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002345112 | 2002-11-28 | ||
| JP2002345112A JP3795008B2 (ja) | 2002-11-28 | 2002-11-28 | タッチセンサ |
| PCT/JP2003/014530 WO2004048884A1 (fr) | 2002-11-28 | 2003-11-14 | Capteur tactile |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1491851A1 true EP1491851A1 (fr) | 2004-12-29 |
| EP1491851A4 EP1491851A4 (fr) | 2007-05-09 |
Family
ID=32375986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP03775822A Withdrawn EP1491851A4 (fr) | 2002-11-28 | 2003-11-14 | Capteur tactile |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7243439B2 (fr) |
| EP (1) | EP1491851A4 (fr) |
| JP (1) | JP3795008B2 (fr) |
| CN (1) | CN100498203C (fr) |
| AU (1) | AU2003284400A1 (fr) |
| WO (1) | WO2004048884A1 (fr) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006062061A (ja) * | 2004-08-30 | 2006-03-09 | Daishowa Seiki Co Ltd | 工具位置検出装置 |
| DE102006024680B4 (de) * | 2006-05-26 | 2016-04-28 | Leopold Kostal Gmbh & Co. Kg | Positionsmeßvorrichtung |
| EP1961985B1 (fr) * | 2007-02-23 | 2011-09-14 | Schaeffler Technologies AG & Co. KG | Cylindre récepteur doté d'un dispositif de mesure de trajectoire |
| US20090095075A1 (en) * | 2007-10-12 | 2009-04-16 | Yevgeniy Vinshtok | Sensor housing |
| JP5658883B2 (ja) * | 2010-01-29 | 2015-01-28 | 株式会社ブリヂストン | 非空気入りタイヤ |
| JP5403524B2 (ja) * | 2010-12-08 | 2014-01-29 | レーザーテック株式会社 | 電池用電極材の厚さ測定装置、及び厚さ測定方法 |
| CN104090309B (zh) * | 2014-07-09 | 2016-08-31 | 苏州博众精工科技有限公司 | 一种漏件检测机构 |
| CN104154837B (zh) * | 2014-09-04 | 2017-08-18 | 中国工程物理研究院机械制造工艺研究所 | 一种基于标准心轴的四极杆组件装配装置 |
| US9528824B2 (en) * | 2015-03-31 | 2016-12-27 | Mitutoyo Corporation | Tactile probing system |
| CN105751005A (zh) * | 2015-10-20 | 2016-07-13 | 邓海程 | 数控机床对刀仪 |
| CN109061530B (zh) * | 2018-06-13 | 2023-10-03 | 杭州永磁集团有限公司 | 磁体永久磁化检测装置及其测量控制方法 |
| US20230304830A1 (en) * | 2018-11-07 | 2023-09-28 | National Tsing Hua University | Low-cost compact micro-displacement sensor |
| CN111283277B (zh) * | 2018-12-06 | 2024-12-20 | 东莞市深动精密机械有限公司 | 一种模内攻牙丝锥检测装置 |
| CN110244364B (zh) * | 2019-05-23 | 2024-06-21 | 深圳市爱康生物科技股份有限公司 | 一种样本载架检测装置 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2047408A (en) * | 1931-12-31 | 1936-07-14 | Western Electric Co | Gauging apparatus |
| US2018384A (en) * | 1933-09-14 | 1935-10-22 | Western Electric Co | Gauge |
| US2384519A (en) * | 1943-04-26 | 1945-09-11 | Sheffield Corp | Gauging device |
| US2627119A (en) * | 1951-02-24 | 1953-02-03 | Cleveland Instr Company | Electromagnetic pickup for gauging devices |
| DE2242355C2 (de) * | 1972-08-29 | 1974-10-17 | Fa. Carl Zeiss, 7920 Heidenheim | Elektronischer Mehrkoordinatentaster |
| US3987551A (en) * | 1973-01-06 | 1976-10-26 | Tesa S.A. | Apparatus for measuring continuous or discontinuous surfaces |
| CH596538A5 (fr) * | 1976-02-12 | 1978-03-15 | Maag Zahnraeder & Maschinen Ag | |
| JPS58177258U (ja) * | 1982-05-24 | 1983-11-26 | 日立精機株式会社 | 切削工具の刃先位置検出装置 |
| CA1276710C (fr) * | 1983-11-30 | 1990-11-20 | Kazuo Asakawa | Systeme de commande de la force appliquee par un robot |
| JPS60119402A (ja) | 1983-11-30 | 1985-06-26 | Fujitsu Ltd | 触覚装置 |
| CH662649A5 (de) * | 1983-12-15 | 1987-10-15 | Maag Zahnraeder & Maschinen Ag | Zahnmesstaster. |
| JPS6240755A (ja) | 1985-08-16 | 1987-02-21 | Nec Corp | 半導体装置接続用基板 |
| US5154002A (en) * | 1987-02-26 | 1992-10-13 | Klaus Ulbrich | Probe, motion guiding device, position sensing apparatus, and position sensing method |
| JPH0682238A (ja) | 1992-08-31 | 1994-03-22 | Toshiba Corp | 三次元測定プロ−ブ |
| DE4424225A1 (de) * | 1994-07-09 | 1996-01-11 | Zeiss Carl Fa | Tastkopf für Koordinatenmeßgeräte |
| DE19637554B4 (de) * | 1995-09-19 | 2004-01-08 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Verfahren und Vorrichtung zum Meßfehlerausgleich bei Meßrobotern |
| JPH10172382A (ja) | 1996-12-03 | 1998-06-26 | Metro-Le:Kk | ストッパスイッチ |
| JP3071155B2 (ja) | 1997-05-16 | 2000-07-31 | ユーエイチティー株式会社 | B・g・a、p・g・a等のicパッケージ用の基板の導通検査方法及びその装置 |
| JP2001264050A (ja) * | 2000-03-14 | 2001-09-26 | Mitsutoyo Corp | 微細形状測定装置 |
| JP3628938B2 (ja) * | 2000-06-23 | 2005-03-16 | 株式会社ミツトヨ | タッチ信号プローブ |
| JP2002090103A (ja) | 2000-09-12 | 2002-03-27 | Toshiba Corp | 紙葉類の厚さ検知装置 |
| JP2005016972A (ja) * | 2003-06-23 | 2005-01-20 | Tokyo Seimitsu Co Ltd | 測定ヘッド |
| JP4330388B2 (ja) * | 2003-07-28 | 2009-09-16 | 株式会社ミツトヨ | 倣いプローブ |
| JP4436665B2 (ja) * | 2003-12-24 | 2010-03-24 | パナソニック株式会社 | 測定用プローブ及び形状測定方法 |
-
2002
- 2002-11-28 JP JP2002345112A patent/JP3795008B2/ja not_active Expired - Fee Related
-
2003
- 2003-11-14 US US10/510,612 patent/US7243439B2/en not_active Expired - Lifetime
- 2003-11-14 WO PCT/JP2003/014530 patent/WO2004048884A1/fr not_active Ceased
- 2003-11-14 CN CNB2003801004334A patent/CN100498203C/zh not_active Expired - Fee Related
- 2003-11-14 AU AU2003284400A patent/AU2003284400A1/en not_active Abandoned
- 2003-11-14 EP EP03775822A patent/EP1491851A4/fr not_active Withdrawn
Non-Patent Citations (2)
| Title |
|---|
| No further relevant documents disclosed * |
| See also references of WO2004048884A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US7243439B2 (en) | 2007-07-17 |
| AU2003284400A1 (en) | 2004-06-18 |
| US20050231195A1 (en) | 2005-10-20 |
| CN100498203C (zh) | 2009-06-10 |
| JP2004174678A (ja) | 2004-06-24 |
| WO2004048884A1 (fr) | 2004-06-10 |
| EP1491851A4 (fr) | 2007-05-09 |
| JP3795008B2 (ja) | 2006-07-12 |
| CN1692267A (zh) | 2005-11-02 |
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