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EP1337694A4 - Procede de fabrication de particules colloidales de type tige sous forme de nano codes-barres - Google Patents

Procede de fabrication de particules colloidales de type tige sous forme de nano codes-barres

Info

Publication number
EP1337694A4
EP1337694A4 EP01977334A EP01977334A EP1337694A4 EP 1337694 A4 EP1337694 A4 EP 1337694A4 EP 01977334 A EP01977334 A EP 01977334A EP 01977334 A EP01977334 A EP 01977334A EP 1337694 A4 EP1337694 A4 EP 1337694A4
Authority
EP
European Patent Office
Prior art keywords
pores
pattern
nanoparticles
substrate
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01977334A
Other languages
German (de)
English (en)
Other versions
EP1337694A1 (fr
Inventor
Walter Stonas
Louis J Dietz
Ian Walton
Michael J Natan
James L Winkler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alavita Pharmaceuticals Inc
Original Assignee
Surromed Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/677,203 external-priority patent/US7045049B1/en
Application filed by Surromed Inc filed Critical Surromed Inc
Publication of EP1337694A1 publication Critical patent/EP1337694A1/fr
Publication of EP1337694A4 publication Critical patent/EP1337694A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54313Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals the carrier being characterised by its particulate form
    • G01N33/54346Nanoparticles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0046Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/006Nanostructures, e.g. using aluminium anodic oxidation templates [AAO]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • B01J2219/005Beads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • B01J2219/00502Particles of irregular geometry
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/0054Means for coding or tagging the apparatus or the reagents
    • B01J2219/00547Bar codes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00585Parallel processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00596Solid-phase processes
    • CCHEMISTRY; METALLURGY
    • C40COMBINATORIAL TECHNOLOGY
    • C40BCOMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES
    • C40B70/00Tags or labels specially adapted for combinatorial chemistry or libraries, e.g. fluorescent tags or bar codes

Definitions

  • the membranes of the present invention may be used as templates for the synthesis of nanoparticles according to methods provided herein.
  • the membranes include anodized alumina membranes, polycarbonate trach-etched membranes, and membranes made using photolithographic methods. Throughout this application, said membranes may be interchangeably referred to as "porous membranes," “porous templates” and “templates.”
  • Nanoparticles may be formed within the pores by deposition methods including, electrochemical deposition, sequential chemical reaction, and chemical vapor deposition (CVD). Alternatively, the nanoparticles maybe directly manufactured using photolithographic techniques.
  • the present invention relates to methods of manufacture of segmented particles and assemblies of differentiable particles (which may or may not be segmented). Without a doubt, there has been a paradigm change in what is traditionally defined as bioanalytical chemistry. A major focus of these new technologies is to generate what could be called “increased per volume information content”. This term encompasses several approaches, from reduction in the volume of sample required to carry out an assay, to highly parallel measurements ("multiplexing"), such as those involving immobilized molecular arrays, to incorporation of second (or third) information channels, such as in 2-D gel electrophoresis or CE-electrospray MS/MS.
  • multiplexing such as those involving immobilized molecular arrays
  • second (or third) information channels such as in 2-D gel electrophoresis or CE-electrospray MS/MS.
  • beads are chemically modified with a ratio of fluorescent dyes intended to uniquely identify the beads, which are then further modified with a unique chemistry (e.g. a different antibody or enzyme).
  • a unique chemistry e.g. a different antibody or enzyme.
  • the beads are then randomly dispersed on an etched fiber array so that one bead associates with each fiber.
  • the identity of the bead is ascertained by its fluorescence readout, and the analyte is detected by fluorescence readout at the same fiber in a different spectral region.
  • the particle flavor is determined by fluorescence, and once the biochemistry is put onto the bead, any spectrally distinct fluorescence generated due to the presence of analyte can be read out. Note that as currently configured, it is necessary to use one color of laser to interrogate the particle flavor, and another, separate laser to excite the bioassay fluorophores.
  • particle-based bioanalysis would become exceptionally attractive, insofar as a single technology platform could then be considered for the multiple high-information content research areas; including combinatorial chemistry, genomics, and proteomics (via multiplexed immunoassays).
  • Rod-shaped nanoparticles have been prepared whose composition is varied along the length of the rod. These particles are referred to as nanoparticles or nanobar codes, though in reality some or all dimensions may be in the micron size range.
  • the present invention is directed to methods of manufacture of such nanoparticles.
  • the present invention includes methods of manufacture of free-standing particles comprising a plurality of segments, wherein the particle length is from 10 nm to 50 ⁇ m and particle width is from 5 nm to 50 ⁇ m.
  • the segments of the particles of the present invention may be comprised of any material. Included among the possible materials are a metal, any metal chalcogenide, a metal oxide, a metal sulfide, a metal selenide, a metal telluride, a metal alloy, a metal nitride, a metal phosphide, a metal antimonide, a semiconductor, a semi-metal, any organic compound or material, any inorganic compound or material, a particulate layer of material or a composite material.
  • the particle types are differentiable based on differences in the length, width or shape of the particles and/or the number, composition, length or pattern of said segments.
  • the particles are differentiable based on the nature of their functionalization or physical properties (e.g., as measured by mass spectrometry or light scattering).
  • the present invention includes the manufacture of nanobar codes by the electrochemical deposition of metals inside a template wherein the process is improved, separately and collectively, by i) electroplating in an ultrasonication bath; and ii) controlling the temperature of the deposition environment, preferably by using a recirculating temperature bath.
  • a plurality of templates are held in a common solution chamber and electrochemical deposition is accomplished by controlling deposition at each membrane by applying current selectively to predetermined electrodes associated with each such membrane.
  • an apparatus for the manufacture of nanobar codes comprising: a plating solution cell, a defined-pore size template, means for applying a current to cause electrochemical deposition of a metal into said template, means for agitation of the plating solution, such as an ultrasonic transducer, and temperature control means.
  • an apparatus for the simultaneous manufacture of a plurality of different types of nanobar codes comprises: a solution chamber, a plurality of templates, means for selectively applying a current to each of said templates, and control means for operating said apparatus.
  • methods of making segmented nanoparticles using a porous template manufactured by standard photolithographic techniques comprising exposing a pattern on a resist-coated substrate or multi-layer stack and then etching the exposed pattern to form pores.
  • Figure 2 is a cross-sectional elevation view of the apparatus of Figure 1.
  • Figure 3 is a schematic illustration of a four-layer stack on a silicon wafer substrate (A) before exposure; (B) following exposure and development of the photoresist, and etching to etch stop; (C) following further etching to conductive layer, (D) after formation of the segmented nanoparticle, and (E) the liberated segmented nanoparticles.
  • Figure 4 is an SEM (top view) of a template prepared using photolithographic techniques in which nanoparticles have been formed by electrochemical deposition. The pore diameter is approximately 2.5 to 3 ⁇ m.
  • Figure 5 is an SEM (side view) of a free-standing nanoparticle made by electrodeposition in a template prepared using photolithographic techniques.
  • Figure 6 is an SEM (cross-sectional view) of a template prepared using photolithographic techniques.
  • the particles to be manufactured according to the present invention are alternately referred to as nanoparticles, nanobar codes, rods, nanorods, NanobarcodesTM particles, and rod shaped particles.
  • the label applied should be ignored.
  • the particle's composition contains informational content, this is not true for all embodiments of the invention.
  • nanometer-sized particles fall within the scope of the invention, not all of the particles of the invention fall within such size range.
  • the nanobar code particles are manufactured by electrochemical deposition in an alumina or polycarbonate template, followed by template dissolution, and typically, they are prepared by alternating electrochemical reduction of metal ions, though they may easily be prepared by other means, both with or without a template material.
  • the nanobar codes have widths between 30 nm and 1,000 nanometers, though they can have widths of several microns.
  • the lengths (i.e. the long dimension) of the materials are typically on the order of 1 to 15 microns, they can easily be prepared in lengths as long as 50 microns, and in lengths as short as 20 nanometers.
  • the particles of this embodiment of the present invention are defined in part by their size and by the existence of at least 2 segments.
  • the length of the particles can be from 10 nm up to 50 ⁇ m. In preferred embodiments the particle is 500 nm - 30 ⁇ m in length. In the most preferred embodiments, the length of the particles of this invention is 1-15 ⁇ m.
  • the width, or diameter, of the particles of the invention is within the range of 5 nm - 50 ⁇ m. In preferred embodiments the width is 10 nm - 1 ⁇ m, and in the most preferred embodiments the width or cross-sectional dimension is 30 nm - 500 nm.
  • the particles of the present invention are characterized by the presence of at least two segments.
  • a segment represents a region of the particle that is distinguishable, by any means, from adjacent regions of the particle. Segments of the particle bisect the length of the particle to form regions that have the same cross-section (generally) and width as the whole particle, while representing a portion of the length of the whole particle.
  • a segment is composed of different materials from its adjacent segments. However, not every segment needs to be distinguishable from all other segments of the particle.
  • a particle could be composed of 2 types of segments, e.g., gold and platinum, while having 10 or even 20 different segments, simply by alternating segments of gold and platinum.
  • a particle of the present invention contains at least two segments, and as many as 50.
  • the particles of the invention preferably have from 2-30 segments and most preferably from 3-20 segments.
  • the particles may have from 2-10 different types of segments, preferably 2 to 5 different types of segments.
  • a segment of the particle of the present invention is defined by its being distinguishable from adjacent segments of the particle.
  • the ability to distinguish between segments includes distinguishing by any physical or chemical means of interrogation, including but not limited to electromagnetic, magnetic, optical, spectrometric, spectroscopic and mechanical.
  • the method of interrogating between segments is optical (reflectivity).
  • the particles of the present invention can have any cross-sectional shape.
  • the particles are generally straight along the lengthwise axis.
  • the particles may be curved or helical.
  • the ends of the particles of the present invention may be flat, convex or concave.
  • the ends may be spiked or pencil tipped. Sharp-tipped embodiments of the invention may be preferred when the particles are used in Raman spectroscopy applications or others in which energy field effects are important.
  • the ends of any given particle may be the same or different.
  • the contour of the particle may be advantageously selected to contribute to the sensitivity or specificity of the assays (e.g., an undulating contour will be expected to enhance "quenching" of fluorophores located in the troughs).
  • pore matrices may be constructed using photolithography techniques, which will give ultimate control over the pore dimensions and lengths, and increase the design flexibility and quality of the resulting nanorods.
  • a positive photoresist-coated substrate is exposed to an interference pattern of light, using a technique similar to that used for interference-lithography generated diffraction gratings.
  • the template thickness which may be the same as pore length, can be tailored to the length of the rods, which may improve uniformity of electroplating across the membrane.
  • 10 10 to 10 12 nanorods can be constructed on a single substrate.
  • the two approaches described above can be utilized to synthesize many types of nanobar code from a single wafer, (iv)
  • a further approach uses the customized lithographically-defined pores from above, and achieves the ultimate in design flexibility by using novel light-directed electroplating.
  • the template pores are constructed just as in the third approach, but on top of a photosensitive semiconductor wafer. The pore- side of the wafer is immersed in an electroplating reagent, and the other side is illuminated with patterns of light.
  • the particles of the present invention may also be prepared in large scale by automating the basic electroplating process that is described in Example 1.
  • an apparatus containing a series of membranes and separate electrodes can be used to make a large number of different flavors of nanoparticles in an efficient computer controlled manner.
  • An example of this type of apparatus is depicted in Figures 1 and 2.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Immunology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Hematology (AREA)
  • General Physics & Mathematics (AREA)
  • Urology & Nephrology (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Cell Biology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microbiology (AREA)
  • Biotechnology (AREA)
  • Composite Materials (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un procédé permettant de fabriquer des particules colloïdales de type tige sous forme de nano codes-barres. La figure 3 illustre un mode de réalisation de cette invention, à l'aide d'un empilage de quatre couches sur un substrat de plaque de silicium (101). Ce substrat (101) est recouvert d'une couche conductrice (102), d'une couche polymère (103), d'une couche d'arrêt de gravure (104) et d'une couche photosensible (105). Des pores (106) sont formés après exposition et développement du film photosensible et gravure jusqu'à la couche d'arrêt de gravure. Des pores (107) sont formés par une gravure ultérieure à travers la couche polymère (103). Des nanoparticules (108) sont formées dans les pores (107) par dépôt électrochimique au moyen de la couche conductrice (102) en tant qu'électrode de dépôt. Les nanoparticules autonomes (109) sont formées par dissolution subséquente de la couche conductrice (102), formant des nano codes-barres.
EP01977334A 2000-10-02 2001-10-02 Procede de fabrication de particules colloidales de type tige sous forme de nano codes-barres Withdrawn EP1337694A4 (fr)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US23732200P 2000-10-02 2000-10-02
US677203 2000-10-02
US237322P 2000-10-02
US09/677,203 US7045049B1 (en) 1999-10-01 2000-10-02 Method of manufacture of colloidal rod particles as nanobar codes
US28501701P 2001-04-19 2001-04-19
US285017P 2001-04-19
PCT/US2001/030729 WO2002029136A1 (fr) 2000-10-02 2001-10-02 Procede de fabrication de particules colloidales de type tige sous forme de nano codes-barres

Publications (2)

Publication Number Publication Date
EP1337694A1 EP1337694A1 (fr) 2003-08-27
EP1337694A4 true EP1337694A4 (fr) 2004-09-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP01977334A Withdrawn EP1337694A4 (fr) 2000-10-02 2001-10-02 Procede de fabrication de particules colloidales de type tige sous forme de nano codes-barres

Country Status (3)

Country Link
EP (1) EP1337694A4 (fr)
AU (1) AU2001296460A1 (fr)
WO (1) WO2002029136A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8497131B2 (en) 1999-10-06 2013-07-30 Becton, Dickinson And Company Surface enhanced spectroscopy-active composite nanoparticles comprising Raman-active reporter molecules
US7192778B2 (en) 1999-10-06 2007-03-20 Natan Michael J Surface enhanced spectroscopy-active composite nanoparticles
US6861263B2 (en) 2001-01-26 2005-03-01 Surromed, Inc. Surface-enhanced spectroscopy-active sandwich nanoparticles
CN102648438A (zh) 2009-08-26 2012-08-22 分子制模股份有限公司 功能性纳米微粒
EP2312393A1 (fr) * 2009-10-14 2011-04-20 Biocartis SA Procédé pour la production de microparticules
EP2529274B1 (fr) * 2010-01-29 2014-10-08 Canon Nanotechnologies, Inc. Procédés de lithographie par nano-impression pour former des nanoparticules
WO2012061753A2 (fr) * 2010-11-05 2012-05-10 Molecular Imprints, Inc. Formation de nanoparticules par lithographie nanométrique à l'aide de doubles couches anti-adhésives

Citations (4)

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Publication number Priority date Publication date Assignee Title
EP0602829A2 (fr) * 1992-12-14 1994-06-22 AT&T Corp. Fabrication de réseaux en lithographie par faisceau d'électrons
WO1999064580A1 (fr) * 1998-06-10 1999-12-16 Georgia Tech Research Corporation Dispositifs a microaiguilles et procedes de fabrication et d'utilisation correspondants
WO2001025002A1 (fr) * 1999-10-01 2001-04-12 Surromed,Inc. Particules de tige colloidales servant de codes nanobar
WO2001025510A1 (fr) * 1999-10-01 2001-04-12 Surromed, Inc. Procede de fabrication de particules cylindriques colloidales en tant que nano code-barres

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US5667667A (en) * 1992-04-24 1997-09-16 Isis Innovation Limited Electrochemical treatment of surfaces
US5985356A (en) * 1994-10-18 1999-11-16 The Regents Of The University Of California Combinatorial synthesis of novel materials
EP0865078A1 (fr) * 1997-03-13 1998-09-16 Hitachi Europe Limited Méthode de dépÔt de particules nanométriques
US6093302A (en) * 1998-01-05 2000-07-25 Combimatrix Corporation Electrochemical solid phase synthesis
US6503231B1 (en) * 1998-06-10 2003-01-07 Georgia Tech Research Corporation Microneedle device for transport of molecules across tissue

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0602829A2 (fr) * 1992-12-14 1994-06-22 AT&T Corp. Fabrication de réseaux en lithographie par faisceau d'électrons
WO1999064580A1 (fr) * 1998-06-10 1999-12-16 Georgia Tech Research Corporation Dispositifs a microaiguilles et procedes de fabrication et d'utilisation correspondants
WO2001025002A1 (fr) * 1999-10-01 2001-04-12 Surromed,Inc. Particules de tige colloidales servant de codes nanobar
WO2001025510A1 (fr) * 1999-10-01 2001-04-12 Surromed, Inc. Procede de fabrication de particules cylindriques colloidales en tant que nano code-barres

Non-Patent Citations (4)

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Title
DECKER J Y ET AL: "GENERATION OF SUBQUARTER-MICRON RESIST STRUCTURE USING OPTICAL INTERFERENCE LITHOGRAPHY AND IMAGE REVERSAL", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 15, no. 6, November 1997 (1997-11-01), pages 1949 - 1953, XP001161902, ISSN: 1071-1023 *
MARTIN B R ET AL: "Orthogonal self-assembly on colloidal gold-platinum nanorods", ADVANCED MATERIALS, VCH VERLAGSGESELLSCHAFT, WEINHEIM, DE, vol. 11, no. 12, 2 August 1999 (1999-08-02), pages 1021 - 1025, XP002284065, ISSN: 0935-9648 *
NAKAJIMA A ET AL: "ISOLATED NANOMETER-SIZE SI DOT ARRAYS FABRICATED USING ELECTRON-BEAM LITHOGRAPHY, REACTIVE ION ETCHING AND WET ETCHING IN NH4OH/H2O2/H2O", JAPANESE JOURNAL OF APPLIED PHYSICS, PUBLICATION OFFICE JAPANESE JOURNAL OF APPLIED PHYSICS. TOKYO, JP, vol. 33, no. 12B, PART 2, 15 December 1994 (1994-12-15), pages L1796 - L1798, XP000624352, ISSN: 0021-4922 *
See also references of WO0229136A1 *

Also Published As

Publication number Publication date
WO2002029136A1 (fr) 2002-04-11
EP1337694A1 (fr) 2003-08-27
AU2001296460A1 (en) 2002-04-15

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