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EP1335641A1 - Buse à plasma - Google Patents

Buse à plasma Download PDF

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Publication number
EP1335641A1
EP1335641A1 EP02002927A EP02002927A EP1335641A1 EP 1335641 A1 EP1335641 A1 EP 1335641A1 EP 02002927 A EP02002927 A EP 02002927A EP 02002927 A EP02002927 A EP 02002927A EP 1335641 A1 EP1335641 A1 EP 1335641A1
Authority
EP
European Patent Office
Prior art keywords
electrode
nozzle
nozzle tube
plasma
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02002927A
Other languages
German (de)
English (en)
Other versions
EP1335641B1 (fr
Inventor
Peter FÖRNSEL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasma Treat GmbH
Original Assignee
Plasma Treat GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Treat GmbH filed Critical Plasma Treat GmbH
Priority to EP02002927A priority Critical patent/EP1335641B1/fr
Priority to AT02002927T priority patent/ATE274787T1/de
Priority to DE50200894T priority patent/DE50200894D1/de
Publication of EP1335641A1 publication Critical patent/EP1335641A1/fr
Application granted granted Critical
Publication of EP1335641B1 publication Critical patent/EP1335641B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3468—Vortex generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3478—Geometrical details

Definitions

  • the invention relates to a plasma nozzle for generating a jet of an atmospheric Plasma, with a nozzle tube through which a working gas flows, an electrode arranged coaxially in the nozzle tube, a high-frequency generator for applying a voltage between the electrode and the Nozzle tube and a swirl device for the swirled introduction of the working gas in an annular space between the electrode and the nozzle tube.
  • a plasma nozzle of this type is known from US-A-5 837 958 and serves in particular for surface pretreatment, for example for hydrophilizing of workpieces, but can also be used for other purposes, for example for plasma polymerization or plasma coating.
  • the high frequency generator generates a voltage of, for example, 500 kV or more a frequency of 1 kHz or more between the electrode and the nozzle pipe. This results in an arc discharge, but its discharge arc is carried away by the swirled flow of the working gas. The working gas forms a vortex that rotates around the axis of the nozzle tube.
  • the arc is channeled in the vortex core on the axis of the nozzle tube, so that it branches and opens only at the mouth of the nozzle tube the nozzle tube overturns. Due to the rapid rotation of the working gas in the The vortex core is intimate along the entire length of the arc Contact of the working gas with the arc. This makes one more proportionate cool but highly reactive secondary plasma, which is then called Jet emerges from the mouth of the nozzle tube.
  • the inside of the nozzle tube is lined with a ceramic tube, which is a dielectric forms and has the purpose of igniting and forming the arc to control. Specifically, there is one when the voltage is switched on Corona discharge in the annular space between the electrode and the dielectric, and only through this corona discharge is the actual arc discharge ignited so that the arc forms in the desired manner.
  • the object of the invention is a simple and compact plasma nozzle to create, in which the geometry of the plasma beam control better leaves.
  • This object is achieved in that the annular space along the length of the electrode is limited to the outside by the conductive surface of the nozzle tube.
  • the plasma nozzle does not function impaired but on the contrary is improved if you look at the No dielectric at all.
  • the ignition then occurs suddenly by skipping of the arc between the electrode and the wall of the nozzle tube.
  • the swirled flow of the working gas is sufficient, the arc to blow out of the annulus so that it is like the conventional nozzle is channeled in the vortex core.
  • the structure of the plasma nozzle is simplified and the manufacturing costs are reduced.
  • the diameter and the axial length of the Reduce the plasma nozzle without negatively affecting the geometry of the plasma jet.
  • the nozzle tube tapers conically towards the mouth.
  • a ceramic tube with such a rejuvenation it is difficult to manufacture a transition point between the ceramic tube in the conventional plasma nozzle and give the conductive surface of the nozzle tube. Through this transition point the flow of the working gas in the nozzle pipe was disturbed.
  • these problems are avoided, and the inner surface of the nozzle tube can be designed with a high degree of design freedom depending on the application Design so that the plasma jet has the desired shape and length receives.
  • the swirl device is preferably formed by a wall made of metal with a spiral shape arranged holes formed electrically opposite the electrode is insulated and is at the potential as the nozzle tube. Due to the Flow and pressure conditions in the annulus will cause the arc to die Flow of the working gas is sucked in and carried away, so that it is reliable too a shift of the base point of the arc to the tip of the electrode comes.
  • the plasma nozzle 10 shown in FIG. 1 has a nozzle tube 12 made of metal, which tapers conically to an outlet opening 14. At the outlet opening 14 opposite end, the nozzle tube 12 has an inlet 16 for a working gas on, for example for compressed air.
  • An intermediate wall 18 of the nozzle tube 12 has a ring of bores 20 made obliquely in the circumferential direction and thus forms a swirl device for the working gas.
  • the downstream one Conical tapered part of the nozzle tube is therefore from the working gas in the Form flows through a vortex 22, the core of which on the longitudinal axis of the nozzle tube runs.
  • An electrode 24 is arranged centrally on the underside of the intermediate wall 18, which projects coaxially into the tapered section of the nozzle tube.
  • the electrode 24 is rounded off by a rotationally symmetrical one Pin formed, for example of copper, which is electrically isolated by an insulator 26 insulated from the intermediate wall 18 and the other parts of the nozzle tube is.
  • a high frequency is applied to the electrode 24 via an insulated shaft 28 AC voltage applied by a high frequency transformer 30 is generated.
  • the voltage can be regulated variably and is, for example 500 V or more, preferably 2 - 5 kV.
  • the frequency is, for example, in the Order of magnitude from 1 to 20 kHz and is preferably also adjustable.
  • the Shaft 28 is connected to high-frequency transformer 30 via a flexible high-voltage cable 32 connected.
  • the inlet 16 is via a not shown Hose connected to a variable flow compressed air source, preferably combined with the high-frequency generator 30 to form a supply unit is.
  • the plasma nozzle 10 can be effortlessly by hand or with the help of a robot arm.
  • the nozzle tube 12 and the intermediate wall 18 are grounded.
  • FIG. 2 shows a plasma nozzle 10 'according to a modified embodiment.
  • the electrode 24 is separated from the intermediate wall 18 designed and suspended on thin, radial webs 38, the wall of the nozzle tube 12 on electrically insulating bushings Enforce 40.
  • the voltage supply to the electrode 24 takes place via the webs 38.
  • This embodiment has the advantage of greater freedom in terms of the design of the electrode 24.
  • this electrode have a streamlined shape so that the swirling flow of the working gas is further optimized in the nozzle tube. Since also the partition 18 here does not act as a heat sink for the electrode, the electrode 24 can be on a higher temperature, so that the work function for the electrons is smaller.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Geometry (AREA)
  • Plasma Technology (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Arc Welding In General (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP02002927A 2002-02-09 2002-02-09 Buse à plasma Expired - Lifetime EP1335641B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP02002927A EP1335641B1 (fr) 2002-02-09 2002-02-09 Buse à plasma
AT02002927T ATE274787T1 (de) 2002-02-09 2002-02-09 Plasmadüse
DE50200894T DE50200894D1 (de) 2002-02-09 2002-02-09 Plasmadüse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02002927A EP1335641B1 (fr) 2002-02-09 2002-02-09 Buse à plasma

Publications (2)

Publication Number Publication Date
EP1335641A1 true EP1335641A1 (fr) 2003-08-13
EP1335641B1 EP1335641B1 (fr) 2004-08-25

Family

ID=27589098

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02002927A Expired - Lifetime EP1335641B1 (fr) 2002-02-09 2002-02-09 Buse à plasma

Country Status (3)

Country Link
EP (1) EP1335641B1 (fr)
AT (1) ATE274787T1 (fr)
DE (1) DE50200894D1 (fr)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006117324A1 (fr) * 2005-04-29 2006-11-09 Basf Aktiengesellschaft Element composite, notamment vitre de fenetre
WO2006117325A1 (fr) * 2005-04-29 2006-11-09 Basf Aktiengesellschaft Element composite, notamment vitre de fenetre
WO2006136467A1 (fr) 2005-04-22 2006-12-28 Plasmatreat Gmbh Procede et dispositif pour caracteriser une surface d'une piece a usiner
DE202007018327U1 (de) 2006-11-23 2008-08-07 Plasmatreat Gmbh Vorrichtung zum Erzeugen eines Plasmas
DE102007011235A1 (de) 2007-03-06 2008-09-11 Plasma Treat Gmbh Verfahren und Vorrichtung zur Behandlung einer Oberfläche eines Werkstückes
EP1990387A1 (fr) 2007-05-11 2008-11-12 Sika Technology AG Corps de couche composite lié par de la matière collante transdermique tout comme procédé de collage de plastifiants comprenant du plastique
DE102008029681A1 (de) 2008-06-23 2009-12-24 Plasma Treat Gmbh Verfahren und Vorrichtung zum Aufbringen einer Schicht, insbesondere einer selbstreinigend und/oder antimikrobiell wirkenden photokatalytischen Schicht, auf eine Oberfläche
DE102008058783A1 (de) 2008-11-24 2010-05-27 Plasmatreat Gmbh Verfahren zur atmosphärischen Beschichtung von Nanooberflächen
WO2011107510A1 (fr) 2010-03-02 2011-09-09 Plasmatreat Gmbh Procédé pour la fabrication d'un emballage
WO2011113848A1 (fr) 2010-03-16 2011-09-22 Christian Buske Dispositif pour le traitement au plasma de tissu vivant
WO2012072401A1 (fr) * 2010-12-03 2012-06-07 Evonik Degussa Gmbh Procédé de conversion de couches de semi-conducteurs
WO2012152714A1 (fr) 2011-05-06 2012-11-15 Tesa Se Procédé de renforcement des propriétés adhésives de substances auto-adhésives sur des substrats au moyen d'un traitement par plasma
DE102012102721A1 (de) 2012-03-29 2013-10-02 BSH Bosch und Siemens Hausgeräte GmbH Verfahren zum Passivieren einer Metalloberfläche
EP2644739A1 (fr) 2012-03-29 2013-10-02 BSH Bosch und Siemens Hausgeräte GmbH Procédé de passivation d'une surface métallique et appareil ménager, notamment lave-vaisselle ménager, doté d'une partie de paroi
DE102012206081A1 (de) 2012-04-13 2013-10-17 Krones Ag Beschichtung von Behältern mit Plasmadüsen
US8702892B2 (en) 2005-02-11 2014-04-22 Sika Technology Ag Bonding of air-plasma treated thermoplastics
DE102012220286A1 (de) 2012-11-07 2014-05-08 Tesa Se Verfahren zur Erhöhung der adhäsiven Eigenschaften von Haftklebemassen auf Untergründen mittels Plasmabehandlung
DE102015009764A1 (de) 2015-07-31 2017-02-02 Tesa Se Reaktives Klebstofffilm-System zur Verklebung unpolarer Oberflächen
DE102016201565A1 (de) 2015-11-25 2017-06-01 Tesa Se Verklebung mit verbesserter Feucht-Wärme-Beständigkeit

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007010996A1 (de) 2007-03-05 2008-09-11 Arcoron Gmbh Plasmadüse
DE202008017836U1 (de) 2008-03-05 2010-08-12 Arcoron Gmbh Plasmadüse

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1350055A (fr) * 1962-12-11 1964-01-24 Centre Nat Rech Scient Perfectionnements à l'injection des gaz dans les chalumeaux à plasma
EP0639041A1 (fr) * 1993-08-11 1995-02-15 Miller Thermal, Inc. Pistolet de pulvérisation par plasma d'arc et anode correspondante
WO1995018521A1 (fr) * 1993-12-24 1995-07-06 Komatsu Ltd. Chalumeau a plasma
WO2001043512A1 (fr) * 1999-12-09 2001-06-14 Agrodyn Hochspannungstechnik Gmbh Buse a plasma

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1350055A (fr) * 1962-12-11 1964-01-24 Centre Nat Rech Scient Perfectionnements à l'injection des gaz dans les chalumeaux à plasma
EP0639041A1 (fr) * 1993-08-11 1995-02-15 Miller Thermal, Inc. Pistolet de pulvérisation par plasma d'arc et anode correspondante
WO1995018521A1 (fr) * 1993-12-24 1995-07-06 Komatsu Ltd. Chalumeau a plasma
WO2001043512A1 (fr) * 1999-12-09 2001-06-14 Agrodyn Hochspannungstechnik Gmbh Buse a plasma

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8702892B2 (en) 2005-02-11 2014-04-22 Sika Technology Ag Bonding of air-plasma treated thermoplastics
WO2006136467A1 (fr) 2005-04-22 2006-12-28 Plasmatreat Gmbh Procede et dispositif pour caracteriser une surface d'une piece a usiner
WO2006117324A1 (fr) * 2005-04-29 2006-11-09 Basf Aktiengesellschaft Element composite, notamment vitre de fenetre
WO2006117325A1 (fr) * 2005-04-29 2006-11-09 Basf Aktiengesellschaft Element composite, notamment vitre de fenetre
US7771829B2 (en) 2005-04-29 2010-08-10 Basf Aktiengesellschaft Composite element, especially a window pane
DE202007018327U1 (de) 2006-11-23 2008-08-07 Plasmatreat Gmbh Vorrichtung zum Erzeugen eines Plasmas
DE102007011235A1 (de) 2007-03-06 2008-09-11 Plasma Treat Gmbh Verfahren und Vorrichtung zur Behandlung einer Oberfläche eines Werkstückes
EP1990387A1 (fr) 2007-05-11 2008-11-12 Sika Technology AG Corps de couche composite lié par de la matière collante transdermique tout comme procédé de collage de plastifiants comprenant du plastique
US8932721B2 (en) 2007-05-11 2015-01-13 Sika Technology Ag Laminates joined by polyurethane hot-melt adhesive and process for bonding plasticizer-containing plastics
DE102008029681A1 (de) 2008-06-23 2009-12-24 Plasma Treat Gmbh Verfahren und Vorrichtung zum Aufbringen einer Schicht, insbesondere einer selbstreinigend und/oder antimikrobiell wirkenden photokatalytischen Schicht, auf eine Oberfläche
DE102008058783A1 (de) 2008-11-24 2010-05-27 Plasmatreat Gmbh Verfahren zur atmosphärischen Beschichtung von Nanooberflächen
DE102010055532A1 (de) 2010-03-02 2011-12-15 Plasma Treat Gmbh Verfahren zur Herstellung eines mehrschichtigen Verpackungsmaterials und Verfahren zum Auftragen eines Klebers sowie Vorrichtung dazu
WO2011107510A1 (fr) 2010-03-02 2011-09-09 Plasmatreat Gmbh Procédé pour la fabrication d'un emballage
WO2011113848A1 (fr) 2010-03-16 2011-09-22 Christian Buske Dispositif pour le traitement au plasma de tissu vivant
DE102010011643B4 (de) 2010-03-16 2024-05-29 Christian Buske Vorrichtung und Verfahren zur Plasmabehandlung von lebendem Gewebe
DE102010011643A1 (de) 2010-03-16 2011-09-22 Christian Buske Vorrichtung und Verfahren zur Plasmabehandlung von lebendem Gewebe
WO2012072401A1 (fr) * 2010-12-03 2012-06-07 Evonik Degussa Gmbh Procédé de conversion de couches de semi-conducteurs
CN103229602A (zh) * 2010-12-03 2013-07-31 赢创德固赛有限公司 用于转换半导体层的方法
WO2012152714A1 (fr) 2011-05-06 2012-11-15 Tesa Se Procédé de renforcement des propriétés adhésives de substances auto-adhésives sur des substrats au moyen d'un traitement par plasma
WO2012152715A1 (fr) 2011-05-06 2012-11-15 Tesa Se Procédé pour l'augmentation des propriétés adhésives de compositions adhésives de contact sur des supports au moyen d'un traitement au plasma
EP2644739A1 (fr) 2012-03-29 2013-10-02 BSH Bosch und Siemens Hausgeräte GmbH Procédé de passivation d'une surface métallique et appareil ménager, notamment lave-vaisselle ménager, doté d'une partie de paroi
US9771652B2 (en) 2012-03-29 2017-09-26 Plasmatreat Gmbh Method for passivating a metal surface
DE102012102721A1 (de) 2012-03-29 2013-10-02 BSH Bosch und Siemens Hausgeräte GmbH Verfahren zum Passivieren einer Metalloberfläche
DE102012206081A1 (de) 2012-04-13 2013-10-17 Krones Ag Beschichtung von Behältern mit Plasmadüsen
DE102012220286A1 (de) 2012-11-07 2014-05-08 Tesa Se Verfahren zur Erhöhung der adhäsiven Eigenschaften von Haftklebemassen auf Untergründen mittels Plasmabehandlung
DE102015009764A1 (de) 2015-07-31 2017-02-02 Tesa Se Reaktives Klebstofffilm-System zur Verklebung unpolarer Oberflächen
DE102016201565A1 (de) 2015-11-25 2017-06-01 Tesa Se Verklebung mit verbesserter Feucht-Wärme-Beständigkeit

Also Published As

Publication number Publication date
EP1335641B1 (fr) 2004-08-25
DE50200894D1 (de) 2004-09-30
ATE274787T1 (de) 2004-09-15

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