EP1266396A1 - Method and device for detecting compounds in a gas stream - Google Patents
Method and device for detecting compounds in a gas streamInfo
- Publication number
- EP1266396A1 EP1266396A1 EP01962408A EP01962408A EP1266396A1 EP 1266396 A1 EP1266396 A1 EP 1266396A1 EP 01962408 A EP01962408 A EP 01962408A EP 01962408 A EP01962408 A EP 01962408A EP 1266396 A1 EP1266396 A1 EP 1266396A1
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- Prior art keywords
- laser
- laser pulse
- ionization
- mass spectrometer
- vuv
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/107—Arrangements for using several ion sources
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
- H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation
Definitions
- the invention relates to a method and a device for detecting compounds in a gas stream according to the preambles of claims 1 and 8, as is known from publication 1.
- the resonance-enhanced ultiphoton ionization technology (resonance-enhanced mul tiphoton ionization - REMPI), the UV laser pulses for the selective ionization of e.g. B. uses aromatics, is used as a selective and soft ionization method for mass spectrometry.
- the selectivity is among others determined by the UV spectroscopic properties and the location of the ionization potentials.
- a typical application is on-line
- the single photon ionization (SPI) with VUV laser light allows a partially selective and soft ionization ⁇ .
- the selectivity is determined by the location of the ionization potentials.
- a typical application is the detection of compounds that cannot be detected with REMPI.
- the disadvantage of the SPI method is that some substance classes cannot be detected.
- the selectivity is lower than with the REMPI method, so that interference can occur with complex samples.
- Electron impact ionization (EI) with an electron beam is the standard technique for ionization in mass spectrometry of volatile inorganic and organic compounds. It is very universal (ie not selective) and leads many often cool to a very high level of fragmentation, but is very well suited for the direct measurement of compounds such as 02, N2, C02, S02, CO, C2H2 etc., which cannot be detected as well with VUV or REMPI.
- the object of the invention is to design a method and a device of the generic type such that a large number of compounds in the analysis gas can be characterized almost simultaneously. This object is achieved by the features of claims 1 and 8.
- the subclaims describe advantageous refinements of the invention.
- El ionization technique is also used, other compounds such as C02, H20 or CH4 can be detected, which can neither be sensibly detected with SPI nor with REMPI.
- the combination of the methods and the device for quasi-parallel use of the same in one device allows the construction of particularly compact analytical MS systems for e.g. B. online analytical field applications (process analysis), which nevertheless have a very high performance.
- the REMPI and / or VUV and / or EI mass spectrometric data obtained in parallel can also be fed to a chemometric analysis by means of pattern-recognition methods (for example a main component analysis).
- FIG. 1 shows an example of the ionization region of the mass spectrometer 14 and the gas cell 9.
- FIG. 2 schematically shows an optical arrangement for generating a UV laser pulse 10 and a VUV laser pulse 2.
- FIG. 3 shows an on-line measurement of NO and naphthalene in the flue gas of a waste incineration plant with alternating SPI ionization (VUV for NO) and REMPI ionization (UV for naphthalene).
- FIG. 1 shows the ionization region of the time of flight (TOF) mass spectrometer.
- TOF time of flight
- the gas stream to be analyzed flows effusively through the inlet needle 12 into the ionization chamber 14 1.
- supersonic oil jet inlet systems (described, for example, in FIG. 3) can also be used.
- Analytes from the gas stream are alternately irradiated with UV laser pulses (266 nm) 10 and VUV laser pulses (118 nm) 2 directly below the inlet needle 12.
- the laser pulse length can be between 1 fs and 100 ns.
- the ions generated by multi-photon ionization (REMPI, 266 nm) or single-photon ionization (SPI, 118 nm) are drawn off through the opening of the hood 13 into the TOF mass spectrometer, where they are mass analyzed.
- REMPI, 266 nm multi-photon ionization
- SPI, 118 nm single-photon ionization
- several pulses of one wavelength can be irradiated one after the other before switching to the other wavelength.
- the VUV laser beams (118 nm) 2 are generated in the gas cell 9, which is filled with noble gas (Xe and Ar) 3, by frequency tripling of 355 nm laser pulses 1.
- the 355 nm laser pulses 1 are focused with a quartz lens 6 and through a quartz window 5 into the gas cell 9. The resulting VUV radiation and the remaining 355 nm - -
- Radiation 1 enters the ionization cube 14 of the TOF mass spectrometer through the MgF2 lens 4.
- the offset irradiation of the 355 nm laser beam 1 relative to the center of the MgF2 lens 4 causes a local separation of the 355 nm laser radiation 1 and 118 nm radiation in the ionization chamber 14.
- the 355 nm radiation can be intercepted in front of the ionization site by means of an aperture. This leads to less fragmented SPI mass spectra.
- the alternating generation of the 266 nm 10 and 118 nm 1 ionization laser pulses takes place with a special optical structure, as shown in FIG. 2.
- the Nd.YAG laser 15 generates 1064 nm laser radiation 23 which are guided through a frequency doubling crystal 17 via two dichroic mirrors 16.
- the resulting laser beam 24 consists of 1064 nm 23 and 532 nm 25 laser radiation.
- the laser radiation 24 is guided through the sum difference mixed crystal 19 and 355 nm laser light 1 is generated, which is separated by the dichroic mirrors 20 from the colinear 532 nm and 1064 nm radiation and into the gas cell 9 to generate the 118 nm VUV laser radiation 2 is used.
- the 532 nm portion of the radiation 24 is directed via the dichroic mirror through a doubling crystal 17.
- the resulting 266 nm laser radiation 10 is separated from the 532 nm radiation by the dichroic mirrors 22 and then used for REMPI ionization in the inlet block 14 of the TOF mass spectrometer.
- the data acquisition system records the REMPI and VUV-SPI mass spectra separately. If a sufficiently intense YAG laser is used, a partially transparent mirror (dichroic beam splitter) can be used instead of a folding mirror. The blanking of the beam that is not required can be realized via a Pockels cell or a chopper wheel. In addition to the Nd: YAG laser, other pulsed solid-state lasers such as Ti: sapphire lasers can also be used.
- the following harmonic frequencies can be generated from the primary wave of the Nd.YAG laser (1064 nm): 523 nm (doubled), 355 nm (tripled), 266 nm (quadrupled), 213 nm (quintuple) and 118 nm (nine times).
- Nd.YAG laser 1064 nm
- 523 nm doubled
- 355 nm tripled
- 266 nm quadromethy-shifted
- 213 nm quintuple
- 118 nm nine times.
- several wavelengths can be irradiated alternately.
- two different REMPI selectivities are used simultaneously (i.e. slightly offset).
- chemometric methods for pattern recognition e.g. main component analysis
- a frequency can also be set to a desired frequency for a selective REMPI Detection of a specific substance can be converted, for example, a wavelength can be tuned to a resonance of monochlorobenzene (for example at approximately 266 nm or at approximately 269.82 nm 4 )
- Monochlorobenzene is an indicator of the occurrence of toxic polychlorinated Dibenzo-p-dioxme and furane (PCDD / F) and can with REMPI on-line in flue gases from e.g.
- VUV laser wavelength compounds such as NH3, NO, many aldehydes and ketones etc. can then be detected in parallel, which cannot be detected with REMPI at the MCB resonance.
- An analytical laser mass spectrometer can furthermore advantageously be designed for certain applications with an inlet system for generating a supersonic molecular beam (jet).
- the adiabatic cooling achievable thereby increases the
- El ionization only achieves much smaller cross sections than laser ionization (with conventional pulse energies), however, the repetition rate of the laser ionization processes, which are pulsed, is limited to 10-20 Hz in many compact laser systems. Since the acquisition of a mass spectrum after the ionization pulse only takes a few 10 ⁇ s, the mass spectrometer is not used for most of the time.
- the El ionization uses an electron gun that accelerates electrons with kinetic energies of 2-200 eV to the sample molecules.
- the normally continuous EI method can also be used with the time-of-flight mass spectrometer using pulsed electron guns and pulsed trigger fields. This is also possible in parallel with the use of laser ionization methods (REMPI, SPI).
- the information about the laser ionization methods is typically recorded via a transient recorder. records true information from the El-ionization on payment cards.
- the integration of electron impact ionization allows the direct on-line measurement of the compounds which are present in higher concentrations and which cannot be detected with REMPI or SPI.
- REMPI has proven to be a very powerful analytical method for online analysis of aromatic hydrocarbons, dioxin indicators (MCB) and other compounds. At the same time, information such as nitrogen compounds such as NO, NH3 or aldehydes was important. These connections can be verified with VUV. Thus, the VUV, SPI and REMPI ionization methods complement each other and can be used together advantageously for a good characterization of the combustion process.
- FIG. 3 shows the concentration profiles of naphthalene and NO in the flue gas of a domestic waste incineration plant (raw gas at 700 ° C.) recorded with parallel VUV-SPI and REMPI ionization. - 8th -
- Example of use 2 On-line analysis of process gases in food technology
- Mass spectrometric methods can be used on-line to monitor food technology processes (drying processes, rusting or cooking processes, etc.) and for quality control of raw materials (mold growth, quality) or evaluation of sensory quality.
- First experiences have already been made with the REMPI method in the field of coffee roasting 7 .
- REMPI (266 nm) the degree of roasting can be determined via the composition of differently substituted substances.
- many flavor-relevant compounds aliphatic aldehydes and ketones, furan derivatives, nitrogen heterocycles etc.
- Electron impact ionization allows the tracking of the primary coffee roast products C02 and H20. In principle, a large number of such processes can be comprehensively checked and validated using the method and a device of the generic type.
- the method can be used with a device of the generic type for the analysis of complex substance mixtures (solid, solution / liquid, gas phase).
- Suitable auxiliary devices headspace sampling, thermal desorber etc.
- process solutions from the chemical industry, mineral oil products but also end products such as perfume or deodorant can be analyzed and monitored.
- the method can be used with a device of the generic type for analyzing the breathing air (exhaled) from patients and control persons. Certain volatile substances such as acetone / indicate illnesses or general health condition.
- the headspace can also be analyzed using medical samples (blood, urine, etc.).
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Abstract
Description
(74) Anwalt: HORST, Günther; Forschungszentrum KarlVeröffentlicht: sruhe GmbH, Stabsabteilung Patente und Lizenzen, — mit internationalem Recherchenbericht Postfach 3640, 76021 Karlsruhe (DE). — vor Ablauf der für Änderungen der Ansprüche geltenden Frist, Veröffentlichung wird wiederholt, falls Änderungen(74) Lawyer: HORST, Günther; Forschungszentrum KarlPublished: sruhe GmbH, Department of Patents and Licenses, - with international search report PO Box 3640, 76021 Karlsruhe (DE). - before the deadline for changes in claims expires, publication will be repeated if changes
(81) Bestimmungsstaaten (national): CA, JP, US. eintreffen(81) Destination countries (national): CA, JP, US. arrive
Zur Erklärung der Zweibuchstaben-Codes, und der anderenTo explain the two-letter codes and the others
(84) Bestimmungsstaaten (regional): europäisches Patent (AT, Abkürzungen wird auf die Erklärungen ("Guidance Notes on BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, Codes and Abbreviations") am Anfang jeder regulären Ausgabe NL, PT, SE, TR). der PCT-Gazette verwiesen (84) Destination countries (regional): European patent (AT, abbreviations refer to the declarations ("Guidance Notes on BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC "Codes and Abbreviations") at the beginning of every regular edition NL, PT, SE, TR). the PCT Gazette
Verfahren und Vorrichtung zum Nachweis von Verbindungen in einem GasströmMethod and device for detecting connections in a gas stream
Die Erfindung betrifft ein Verfahren und eine Vorrichtung zum Nachweis von Verbindungen in einem Gasstrom nach den Oberbegriffen der Patentansprüche 1 und 8, wie sie aus der Veröffentlichung 1 bekannt ist.The invention relates to a method and a device for detecting compounds in a gas stream according to the preambles of claims 1 and 8, as is known from publication 1.
Stand der TechnikState of the art
Die resonanzverstärkte ultiphotonenionisations-Technik ( reso- nance-enhanced mul tiphoton ioni za tion - REMPI), die UV-Laserpulse zur selektiven Ionisation von z. B. Aromaten einsetzt, wird als selektive und weiche Ionisationsmethode für die Mas- senspektrometrie verwendet. Die Selektivität wird u.a. durch die UV spektroskopischen Eigenschaften und die Lage der Ionisationspotentiale bestimmt. Eine typische Anwendung ist der on-lineThe resonance-enhanced ultiphoton ionization technology (resonance-enhanced mul tiphoton ionization - REMPI), the UV laser pulses for the selective ionization of e.g. B. uses aromatics, is used as a selective and soft ionization method for mass spectrometry. The selectivity is among others determined by the UV spectroscopic properties and the location of the ionization potentials. A typical application is on-line
Nachweis aromatischer Verbindungen aus Verbrennungsabgasen^ . Nachteilig bei der REMPI-Methode ist, dass es auf einige Substanzklassen beschränkt ist und der Ionisationsquerschnitt auch für ähnliche Verbindungen teilweise extrem unterschiedlich sein kann.Detection of aromatic compounds from combustion gases ^. A disadvantage of the REMPI method is that it is limited to some substance classes and the ionization cross section can also be extremely different for similar compounds.
Die Einphotonenionisation { Single photon ioniza tion -SPI) mit VUV-Laserlicht erlaubt eine teilselektive und weiche Ionisation^. Die Selektivität wird durch die Lage der Ionisationspotentiale bestimmt. Eine typische Anwendung ist der Nachweis von Verbindungen, die nicht mit REMPI nachgewiesen werden können. Nachteilig bei der SPI Methode ist, dass einige Substanzklassen nicht nachgewiesen werden können. Weiterhin ist die Selektivität kleiner als bei der REMPI-Methode, sodass bei komplexen Proben verstärkt Interferenzen auftreten können.The single photon ionization (SPI) with VUV laser light allows a partially selective and soft ionization ^. The selectivity is determined by the location of the ionization potentials. A typical application is the detection of compounds that cannot be detected with REMPI. The disadvantage of the SPI method is that some substance classes cannot be detected. Furthermore, the selectivity is lower than with the REMPI method, so that interference can occur with complex samples.
Die Elektronenstoßionisation (EI) mit einem Elektronenstrahl ist die Standardtechnik zur Ionisation in der Massenspektrometrie flüchtiger anorganischer und organischer Verbindungen. Sie ist sehr universell (d.h. nicht selektiv) und führt bei vielen Mole- külen häufig zu einer sehr starken Fragmentierung, ist aber sehr gut für eine direkte Messung von Verbindungen wie 02, N2, C02, S02, CO, C2H2 etc. geeignet, die mit VUV oder REMPI nicht so gut erfaßt werden können.Electron impact ionization (EI) with an electron beam is the standard technique for ionization in mass spectrometry of volatile inorganic and organic compounds. It is very universal (ie not selective) and leads many often cool to a very high level of fragmentation, but is very well suited for the direct measurement of compounds such as 02, N2, C02, S02, CO, C2H2 etc., which cannot be detected as well with VUV or REMPI.
Aufgabe der ErfindungObject of the invention
Aufgabe der Erfindung ist es, ein Verfahren und eine Vorrichtung der gattungsgemäßen Art so auszugestalten, dass eine Vielzahl von Verbindungen im Analysengas nahezu gleichzeitig charakterisiert werden können. Gelöst wird diese Aufgabe durch die Merkmale der Patentansprüche 1 und 8. Die Unteransprüche beschrieben vorteilhafte Ausgestaltungen der Erfindung.The object of the invention is to design a method and a device of the generic type such that a large number of compounds in the analysis gas can be characterized almost simultaneously. This object is achieved by the features of claims 1 and 8. The subclaims describe advantageous refinements of the invention.
Die Kombination von (quasi-) simultan durchgeführter SPI- und REMPI-Ionisation in einem Massenspektrometer bringt eine Reihe von Vorteilen. Beide Methoden erfassen mit einer unterschiedlichen Selektivität unterschiedliche Teilmengen des komplexen Analysengases. Insgesamt können so mehr Verbindungen aus der Probe identifiziert werden.The combination of (quasi) simultaneous SPI and REMPI ionization in a mass spectrometer brings a number of advantages. Both methods record different subsets of the complex analysis gas with different selectivity. In total, more compounds from the sample can be identified.
Wird die El-Ionisationstechnik noch hinzugezogen, so können noch weitere Verbindungen wie C02, H20 oder CH4 nachgewiesen werden, die weder mit SPI- noch mit REMPI sinnvoll nachgewiesen werden können. Die Vereinigung der Methoden und die Vorrichtung zum quasi- parallelen Gebrauch derselben in einem Gerät erlaubt den Bau besonders kompakter analytischer MS-Systeme für z. B. online analytische Feldanwendungen (Prozeßanalyse), die trotzdem eine sehr große Leistungsfähigkeit aufweisen. Die parallel erhaltenen REMPI- und/oder VUV- und/oder EI- massenspektropmetri- sche Daten können auch einer chemometrischen Analyse durch mustererkennende Verfahren (z. B. einer Hauptkomponenentanalyse) zugeführt werden.If the El ionization technique is also used, other compounds such as C02, H20 or CH4 can be detected, which can neither be sensibly detected with SPI nor with REMPI. The combination of the methods and the device for quasi-parallel use of the same in one device allows the construction of particularly compact analytical MS systems for e.g. B. online analytical field applications (process analysis), which nevertheless have a very high performance. The REMPI and / or VUV and / or EI mass spectrometric data obtained in parallel can also be fed to a chemometric analysis by means of pattern-recognition methods (for example a main component analysis).
Ausführungsbeispieleembodiments
Die Erfindung wird im folgenden anhand von Ausführungsbeispielen mit Hilfe der Figuren näher erläutert. - -The invention is explained in more detail below on the basis of exemplary embodiments with the aid of the figures. - -
Die Figur 1 zeigt beispielhaft die Ionisationsregion des Massenspektrometer 14 und die Gaszelle 9.FIG. 1 shows an example of the ionization region of the mass spectrometer 14 and the gas cell 9.
Die Figur 2 zeigt schematisch eine optische Abordnung zur Erzeugung eines UV-Laserpulses 10 und eines VUV-Laserpulses 2.FIG. 2 schematically shows an optical arrangement for generating a UV laser pulse 10 and a VUV laser pulse 2.
Die Figur 3 zeigt eine on-line Messung von NO und Naphthalin im Rauchgas einer Müllverbrennungsanlage aufgenommen mit alternierender SPI-Ionisierung (VUV für NO) und REMPI-Ionisierung (UV für Naphthalin) .FIG. 3 shows an on-line measurement of NO and naphthalene in the flue gas of a waste incineration plant with alternating SPI ionization (VUV for NO) and REMPI ionization (UV for naphthalene).
Die (quasi-) parallele Nutzung der Ionisierung mit REMPI und SPI erlaubt somit die gleichzeitige Verfolgung komplexer chemischer Proben. Aufgrund der unterschiedlichen Selektivität der beiden Methoden werden verschiedene Massenspektren mit den jeweiligen Methoden erhalten. Die Figur 1 zeigt dabei die Ionisationsregion des Flugzeit (TOF) Massenspektrometers . Der zu analysierende Gasstrom strömt effusiv durch die Einlaßnadel 12 in die Ionisationskammer 14 1. Alternativ können auch Überschall olku- larstrahleneinlaßsysteme (beschrieben z. B. in 3) eingesetzt werden. Analyte aus dem Gasstrom werden direkt unterhalb der Einlaßnadel 12 abwechselnd mit UV-Laserpulsen (266 nm) 10 und VUV-Laserpulsen (118 nm) 2 bestrahlt. Die Laserpulslänge kann zwischen 1 fs und 100 ns liegen. Die durch Mehrphotonenionisation (REMPI, 266 nm) oder Einphotonenionisation (SPI, 118 nm) erzeugten Ionen werden durch die Öffnung der Abzugsblende 13 in das TOF- Massenspektrometer abgezogen und dort massenanalysiert. Alternativ zum abwechselnden Umschalten zwischen UV-Laserpulsen (266 nm) und VUV-Laserpulsen (118 nm) können auch mehrere Pulse einer Wellenlänge nacheinander eingestrahlt werden bevor auf die andere Wellenlänge umgeschaltet wird. Die VUV-Laserstrahlen (118 nm) 2 werden in der Gaszelle 9, die mit Edelgas gefüllt (Xe und Ar) 3 gefüllt ist, durch Frequenzverdreifachung von 355 nm Laserpulsen 1 erzeugt. Die 355 nm Laserpulse 1 werden mit einer Quarzlinse 6 und durch ein Quarzfenster 5 in die Gaszelle 9 fo- kussiert. Die entstehende VUV-Strahlung und die restliche 355 nm - -The (quasi) parallel use of ionization with REMPI and SPI thus enables the simultaneous tracking of complex chemical samples. Due to the different selectivity of the two methods, different mass spectra are obtained with the respective methods. FIG. 1 shows the ionization region of the time of flight (TOF) mass spectrometer. The gas stream to be analyzed flows effusively through the inlet needle 12 into the ionization chamber 14 1. Alternatively, supersonic oil jet inlet systems (described, for example, in FIG. 3) can also be used. Analytes from the gas stream are alternately irradiated with UV laser pulses (266 nm) 10 and VUV laser pulses (118 nm) 2 directly below the inlet needle 12. The laser pulse length can be between 1 fs and 100 ns. The ions generated by multi-photon ionization (REMPI, 266 nm) or single-photon ionization (SPI, 118 nm) are drawn off through the opening of the hood 13 into the TOF mass spectrometer, where they are mass analyzed. As an alternative to alternating switching between UV laser pulses (266 nm) and VUV laser pulses (118 nm), several pulses of one wavelength can be irradiated one after the other before switching to the other wavelength. The VUV laser beams (118 nm) 2 are generated in the gas cell 9, which is filled with noble gas (Xe and Ar) 3, by frequency tripling of 355 nm laser pulses 1. The 355 nm laser pulses 1 are focused with a quartz lens 6 and through a quartz window 5 into the gas cell 9. The resulting VUV radiation and the remaining 355 nm - -
Strahlung 1 treten durch die MgF2 Linse 4 in den Ionisations- wurfel 14 des TOF-Massenspektrometers ein. Die versetzte Einstrahlung der 355 nm Laserstrahls 1 relativ zum Zentrum der MgF2 Linse 4 bewirkt eine ortliche Separation der 355 nm Laserstrahlung 1 und 118 nm Strahlung in der die Ionisationskammer 14. Durch eine Blende kann die 355 nm Strahlung vor dem Ionisationsort abgefangen werden. Dies fuhrt zu fragmentarmeren SPI- Massenspektren.Radiation 1 enters the ionization cube 14 of the TOF mass spectrometer through the MgF2 lens 4. The offset irradiation of the 355 nm laser beam 1 relative to the center of the MgF2 lens 4 causes a local separation of the 355 nm laser radiation 1 and 118 nm radiation in the ionization chamber 14. The 355 nm radiation can be intercepted in front of the ionization site by means of an aperture. This leads to less fragmented SPI mass spectra.
Die abwechselnde Erzeugung der 266 nm 10 und 118 nm 1 Ionisationslaserpulse erfolgt mit einem speziellen optischen Aufbau, wie er in Figur 2 dargestellt ist. Der Nd.YAG Laser 15 erzeugt 1064 nm Laserstrahlung 23 die über zwei dichroide Spiegel 16 durch einen Frequenzverdopplungskristall 17 geführt werden. Der resultierende Laserstrahl 24 besteht aus 1064 nm 23 und 532 nm 25 Laserstrahlung. Ein beweglich auf einem Arm angebrachter dichroider Spiegel 18, der computergesteuert über ein Galvanometer schnell und präzise in den Strahlengang eingeschwenkt werden kann, wird verwendet um die Laserpulse alternierend umzuleiten oder durchzulassen. Wenn der Spiegelarm 18 aus dem Strahlengang geschwenkt wird die Laserstrahlung 24 durch den Summendifferenz- Mischkristall 19 geleitet und 355 nm Laserlicht 1 erzeugt, dass durch die dichroiden Spiegel 20 von der kolinearen 532nm und 1064nm Strahlung separiert und in die Gaszelle 9 zur Erzeugung der 118 nm VUV-Laserstrahlung 2 eingesetzt wird. Ist der Spiegelarm 18 im Strahlengang so wird der 532 nm Anteil der Strahlung 24 über den dichroiden Spiegel durch einen Verdopplungskristall 17 gelenkt. Die entstehende 266 nm Laserstrahlung 10 wird durch die dichroiden Spiegel 22 von der 532 nm Strahlung separiert und dann zur REMPI Ionisation im Einlaßblock 14 des TOF-Massenspektrometers eingesetzt .The alternating generation of the 266 nm 10 and 118 nm 1 ionization laser pulses takes place with a special optical structure, as shown in FIG. 2. The Nd.YAG laser 15 generates 1064 nm laser radiation 23 which are guided through a frequency doubling crystal 17 via two dichroic mirrors 16. The resulting laser beam 24 consists of 1064 nm 23 and 532 nm 25 laser radiation. A movable dichroic mirror 18 mounted on an arm, which can be swiveled into the beam path quickly and precisely in a computer-controlled manner via a galvanometer, is used to alternately redirect or transmit the laser pulses. When the mirror arm 18 is pivoted out of the beam path, the laser radiation 24 is guided through the sum difference mixed crystal 19 and 355 nm laser light 1 is generated, which is separated by the dichroic mirrors 20 from the colinear 532 nm and 1064 nm radiation and into the gas cell 9 to generate the 118 nm VUV laser radiation 2 is used. If the mirror arm 18 is in the beam path, the 532 nm portion of the radiation 24 is directed via the dichroic mirror through a doubling crystal 17. The resulting 266 nm laser radiation 10 is separated from the 532 nm radiation by the dichroic mirrors 22 and then used for REMPI ionization in the inlet block 14 of the TOF mass spectrometer.
Das Datenaufnahmesystem nimmt die REMPI und VUV-SPI Massenspektren getrennt auf. Wenn ein genügend intensiver YAG Laser angewendet wird so kann anstatt eines Umklappspiegels auch ein teildurchlassiger Spiegel (dichroider Strahlteiler) verwendet werden. Die Ausblendung des jeweils nicht benotigten Strahls kann über eine Pockelszelle oder ein Chopperrad realisiert werden. Neben dem Nd:YAG Laser sind auch andere gepulst betreibare Festkörperlaser wie z.B. Ti : Saphir-Laser einsetzbar.The data acquisition system records the REMPI and VUV-SPI mass spectra separately. If a sufficiently intense YAG laser is used, a partially transparent mirror (dichroic beam splitter) can be used instead of a folding mirror. The blanking of the beam that is not required can be realized via a Pockels cell or a chopper wheel. In addition to the Nd: YAG laser, other pulsed solid-state lasers such as Ti: sapphire lasers can also be used.
Aus der Primarwelle des Nd.YAG Lasers (1064 nm) können folgende harmonischen Frequenzen erzeugt werden: 523 nm (verdoppelt), 355 nm (verdreifacht) , 266 nm (vervierfacht) , 213 nm (verfünffacht) und 118 nm (verneunfacht ) . In Erweiterung zum oben beschrieben Zweistrahlverfahren (266 nm für REMPI und 118 nm für VUV) können auch mehrere Wellenlangen alternierend eingestrahlt werden. Bei einer Kombination von 266, 213 und 118 nm werden beispielsweise neben der VUV-Selektivitat simultan (d.h. leicht versetzt) noch zwei unterschiedliche REMPI-Selektivitaten ausgenutzt. Beispielsweise können Naphthalin und seine methylierten DerivateThe following harmonic frequencies can be generated from the primary wave of the Nd.YAG laser (1064 nm): 523 nm (doubled), 355 nm (tripled), 266 nm (quadrupled), 213 nm (quintuple) and 118 nm (nine times). In addition to the two-beam method described above (266 nm for REMPI and 118 nm for VUV), several wavelengths can be irradiated alternately. With a combination of 266, 213 and 118 nm, for example, in addition to VUV selectivity, two different REMPI selectivities are used simultaneously (i.e. slightly offset). For example, naphthalene and its methylated derivatives
(diese Verbindungen sind Indikatoren für die Effizienz von Verbrennungsprozessen) besonders effizient mit 213 nm nachgewiesen werden. Je nach Festkorperlasertyp lassen sich somit 2, 3 oder mehr Wellenlangen parallel zur Ionisation von Verbindungen aus der Probe einsetzen. Die unterschiedlichen Selektivitäten die durch die verschiedenen REMPI und oder VUV Wellenlangen induziert werden fuhren zu jeweils verscheiden Massenspektren(these compounds are indicators of the efficiency of combustion processes) can be detected particularly efficiently with 213 nm. Depending on the type of solid-state laser, 2, 3 or more wavelengths can be used in parallel for the ionization of compounds from the sample. The different selectivities that are induced by the different REMPI and or VUV wavelengths lead to different mass spectra
(d.h. jeweils andere Verbindungen kommen hinzu oder verschwinden aus dem Massenspektrum. Falls bei sehr komplexen Proben oder unbekannten Proben keine Zuordnung der jeweils beobachteten Verbindungen möglich ist, kann ein Einsatz von chemometrischen Verfahren zur Mustererkennung (z. B. Hauptkomponentenanalyse) und damit z. B. zur phänomenologischen Charakterisierung eingesetzt werden. Durch Einsatz von fest eingestellten Frequenzverschiebeeinheiten (z. B. über optoakustische Kopplung, mit Raman- Shifter, mit Optischer-Parametπschem-Oszillator Kristall, mit Farbstofflasereinheit) kann eine Frequenz auch in eine gewünschte Frequenz für einen selektiven REMPI-Nachweis einer bestimmten Substanz umgewandelt werden. Beispielsweise kann eine Wellenlänge auf eine Resonanz von Monochlorbenzol abgestimmt werden (z. B. bei ca. 266 nm oder bei etwa 269,82 nm 4). Monochlorbenzol ist ein Indikator für das Vorkommen toxischer poly- chlorierter Dibenzo-p-dioxme und -furane (PCDD/F) und kann mit REMPI on-line in Rauchgasen von z. B. technischen Verbrennungsprozessen nachgewiesen werden . Mit einer Wellenlange von ca. 269.82 nm ist eine Nachweis von Monochlorbenzol (MCB) sowie einer Reihe weiterer Aromaten wie z. B. Benzol, Naphthalin oder Pyren möglich. Alternativ kann MCB bei einer Resonanz die ganz knapp neben der vervierfachten Nd:YAG Wellenlange liegt nachgewiesen werden . Hierzu kann es in bestimmten Fallen ausreichend sein, die Grundwelle des Nd:YAG Lasers, z. B. durch Manipulation des Laserresonators, leicht zu verstimmen.(In other words, other compounds are added or disappear from the mass spectrum. If it is not possible to assign the respectively observed compounds to very complex samples or unknown samples, the use of chemometric methods for pattern recognition (e.g. main component analysis) and thus e.g. By using fixed frequency shifting units (eg via optoacoustic coupling, with Raman shifter, with optical parametric oscillator crystal, with dye laser unit), a frequency can also be set to a desired frequency for a selective REMPI Detection of a specific substance can be converted, for example, a wavelength can be tuned to a resonance of monochlorobenzene (for example at approximately 266 nm or at approximately 269.82 nm 4 ) Monochlorobenzene is an indicator of the occurrence of toxic polychlorinated Dibenzo-p-dioxme and furane (PCDD / F) and can with REMPI on-line in flue gases from e.g. B. technical combustion processes can be demonstrated. With a wavelength of approx. 269.82 nm, detection of monochlorobenzene (MCB) and a number of other aromatics such as e.g. B. benzene, naphthalene or pyrene possible. Alternatively, MCB can be detected in the case of a resonance that is very close to the quadrupled Nd: YAG wavelength. In certain cases it may be sufficient to do this, the fundamental of the Nd: YAG laser, e.g. B. by manipulation of the laser resonator, easy to detune.
Mit den VUV-Laserwellenlange können dann parallel Verbindungen wie NH3, NO viele Aldehyde und Ketone etc. nachgewiesen werden, die mit REMPI bei der MCB Resonanz nicht nachweisbar sind.With the VUV laser wavelength, compounds such as NH3, NO, many aldehydes and ketones etc. can then be detected in parallel, which cannot be detected with REMPI at the MCB resonance.
Ein analytischer Lasermassenspektrometer kann weiterhin für bestimmte Anwendungen vorteilhaft mit einem Einlaßsystem zur Erzeugung eines Uberschallmolekularstrahles (Jet) ausgestaltet werden. Die dadurch erreichbare adiabatische Kühlung erhöht dieAn analytical laser mass spectrometer can furthermore advantageously be designed for certain applications with an inlet system for generating a supersonic molecular beam (jet). The adiabatic cooling achievable thereby increases the
Selektivität der REMPI-TOFMS Methode 6 und verringert die Frag- mentation bei SPI und Ei-Ionisierung.Selectivity of REMPI-TOFMS Method 6 and reduces the fragmentation in SPI and egg ionization.
Die El-Ionisierung erreicht nur viel geringere Wirkungsquerschnitte als die Laserionisation (bei üblichen Pulsenergien) allerdings ist die Wiederholrate der Laserionisationsprozesse, die ja gepulst ablaufen, bei vielen kompakten Lasersystemen auf 10- 20 Hz. beschrankt. Da die Aufnahme eines Massenspektrums nach dem Ionisationspuls nur einige 10 μs dauert ist das Massenspektrometer für die meiste Zeit nicht genutzt. Die El-Ioni- sation verwendet eine Elektronenkanone die Elektronen mit kinetischen Energien von 2-200 eV zu den Probenmolekulen beschleunigt. Über gepulste Elektronenkanonen und gepulste Abzugsfelder kann die normalerweise kontinuierlich arbeitende EI-Methode auch mit der Flugzeitmassenspektrometne verwendet werden. Dies ist auch parallel mit der Verwendung der Laserionisationsmethoden (REMPI, SPI) möglich. Typischerweise wird die Information der Laserionisationsmethoden über einen Transientenrekorder aufge- zeichnet wahren die Information aus der El-Ionisation über Zahlkarten erfolgt. Die Einbindung der Elektronenstoßionisation erlaubt die direkte on-line Messung der in höheren Konzentrationen vorliegenden Verbindungen die nicht mit REMPI oder SPI erfaßt werden können.El ionization only achieves much smaller cross sections than laser ionization (with conventional pulse energies), however, the repetition rate of the laser ionization processes, which are pulsed, is limited to 10-20 Hz in many compact laser systems. Since the acquisition of a mass spectrum after the ionization pulse only takes a few 10 μs, the mass spectrometer is not used for most of the time. The El ionization uses an electron gun that accelerates electrons with kinetic energies of 2-200 eV to the sample molecules. The normally continuous EI method can also be used with the time-of-flight mass spectrometer using pulsed electron guns and pulsed trigger fields. This is also possible in parallel with the use of laser ionization methods (REMPI, SPI). The information about the laser ionization methods is typically recorded via a transient recorder. records true information from the El-ionization on payment cards. The integration of electron impact ionization allows the direct on-line measurement of the compounds which are present in higher concentrations and which cannot be detected with REMPI or SPI.
Anwendungsbeispieleapplications
Das oben beschriebene Verfahren und die Vorrichtung kann prinzipiell für eine Vielzahl von Anwendungen eingesetzt werde. Im folgenden sind vier Anwendungsbeispiele gegeben:The method and the device described above can in principle be used for a large number of applications. Four application examples are given below:
Anwendungsbeispiel 1 : Überwachung von VerbrennungsprozessenApplication example 1: Monitoring of combustion processes
REMPI hat sich als sehr machtiges' analytisches Verfahren zur online Analyse von aromatischen Kohlenwasserstoffen, Dioxin-Indikatoren (MCB) und anderen Verbindungen erwiesen 1. Parallel waren Information z.B. über StickstoffVerbindungen wie NO, NH3 oder über Aldehyde von Bedeutung. Diese Verbindungen können mit VUV nachgewiesen werden. Somit erganzen sich die VUV-, SPI- und REMPI-Ionisationsmethoden und können zusammen vorteilhaft für eine gute Charakterisierung des Verbrennungsprozesses eingesetzt werden. Wird die parallele Ei-Ionisierung implementiert, so kommt man schließlich zu einer sehr umfassenden Charakterisierung, da einige chemische Hauptparameter, wie z.B. Konzentrationen an C02, 02 und kleineren organischen Molekülen wie Ace- tylen (wichtig für den Aufbau von polyzyklischen Aromaten und Ruß-Aerosolen) nicht mit den üblichen SPI VUV-Wellenlangen oder mit 2 Photonen-REMPI Prozessen erfaßt werden können. Das Verfahren mit einer Vorrichtung der gattungsgemaßen Art ist geeignet um Verbrennungs- und Pyrolyseprozesse aller Art zu charakterisieren und analysieren. Die Figur 3 zeigt die Konzentrationsverläufe von Naphthalin und NO im Rauchgas einer Hausmull- verbrennungsanlage (Rohgas bei 700 °C) aufgenommen mit paralleler VUV-SPI und REMPI-Ionisierung . - 8 -REMPI has proven to be a very powerful analytical method for online analysis of aromatic hydrocarbons, dioxin indicators (MCB) and other compounds. At the same time, information such as nitrogen compounds such as NO, NH3 or aldehydes was important. These connections can be verified with VUV. Thus, the VUV, SPI and REMPI ionization methods complement each other and can be used together advantageously for a good characterization of the combustion process. If parallel egg ionization is implemented, a very comprehensive characterization is finally achieved, since some main chemical parameters, such as concentrations of C02, 02 and smaller organic molecules such as acetyls (important for the formation of polycyclic aromatics and soot aerosols) ) cannot be detected with the usual SPI VUV wavelengths or with 2 photon REMPI processes. The method with a device of the generic type is suitable for characterizing and analyzing combustion and pyrolysis processes of all types. FIG. 3 shows the concentration profiles of naphthalene and NO in the flue gas of a domestic waste incineration plant (raw gas at 700 ° C.) recorded with parallel VUV-SPI and REMPI ionization. - 8th -
Anwendungsbeispiel 2 : On-line Analyse von Prozeßgasen in der LebensmitteltechnologieExample of use 2: On-line analysis of process gases in food technology
In zur Überwachung lebensmitteltechnologischer Prozesse (Trocknungsprozesse, Rost- oder Garprozesse etc.) sowie zur Qualitätskontrolle von Rohstoffen (Schimmelbefall, Qualität) oder Evaluierung der sensorischen Qualität können on-line massenspektro- metrische Verfahren eingesetzt werden. Erste Erfahrungen wurden mit der REMPI Methode auf dem Gebiet der Kaffeeröstung bereits gemacht 7. Mit REMPI (266 nm) kann der Röstgrad über die Zusammensetzung unterschiedlich substituierter ermittelt werden. Viele aromarelevante Verbindungen (aliphatische Aldehyde und Ke- tone, Furanderivate, Stickstoffheterozyklen etc.) können hingegen sehr gut mit VUV-Ionisierung nachgewiesen werden. Die Elekt- ronenstoßionisation erlaubt die Verfolgung der primären Kaffeeröstprodukte C02 und H20. Eine Vielzahl solcher Prozesse sind prinzipiell mit dem Verfahren und einer Vorrichtung der gattungsgemäßen Art umfassend zu kontrollieren und validieren.Mass spectrometric methods can be used on-line to monitor food technology processes (drying processes, rusting or cooking processes, etc.) and for quality control of raw materials (mold growth, quality) or evaluation of sensory quality. First experiences have already been made with the REMPI method in the field of coffee roasting 7 . With REMPI (266 nm) the degree of roasting can be determined via the composition of differently substituted substances. By contrast, many flavor-relevant compounds (aliphatic aldehydes and ketones, furan derivatives, nitrogen heterocycles etc.) can be detected very well with VUV ionization. Electron impact ionization allows the tracking of the primary coffee roast products C02 and H20. In principle, a large number of such processes can be comprehensively checked and validated using the method and a device of the generic type.
Anwendungsbeispiel 3 : On-line Analyse von Headspace-Proben komplexer MischungenExample of use 3: On-line analysis of headspace samples of complex mixtures
Das Verfahren kann mit einer Vorrichtung der gattungsgemäßen Art zur Analyse komplexer Substanzmischung eingesetzt werden (Feststoff, Lösung/Flüssigkeit, Gasphase) . Geeignete Hilfsgeräte (Headspaceprobeneahme, Thermodesorber etc.) können zur Gewinnung einer repräsentativen Gasprobe eingesetzt werden. Beispielhaft können Prozeßlösungen aus der chemischen Industrie, Mineralölprodukte aber auch Endprodukte wie Parfüm oder Deodorant analysiert und überwacht werden.The method can be used with a device of the generic type for the analysis of complex substance mixtures (solid, solution / liquid, gas phase). Suitable auxiliary devices (headspace sampling, thermal desorber etc.) can be used to obtain a representative gas sample. For example, process solutions from the chemical industry, mineral oil products but also end products such as perfume or deodorant can be analyzed and monitored.
Anwendungsbeispiel 4 : On-line Analyse medizinisch relevanter Proben :Example 4: On-line analysis of medically relevant samples:
Das Verfahren kann mit einer Vorrichtung der gattungsgemäßen Art zur Analyse der Atemluft (ausgeatmet) von Patienten und Kontrollpersonen verwendet werden. Bestimmte flüchtige Stoffe wie Aceton/weisen auf Erkrankungen oder den allgemeine Gesundheits- zustand hin. Ferner kann der Gasraum (Headspace) über medizinischen Proben (Blut, Urin etc.) analysiert werden. The method can be used with a device of the generic type for analyzing the breathing air (exhaled) from patients and control persons. Certain volatile substances such as acetone / indicate illnesses or general health condition. The headspace can also be analyzed using medical samples (blood, urine, etc.).
- -- -
Bezugszeichenliste :Reference symbol list:
1 55 nm Laserstrahl1 55 nm laser beam
2 18 nm Laserstrahl2 18 nm laser beam
3 asfüllung (z.B. 0.001 bar Xe)3 as filling (e.g. 0.001 bar Xe)
4 Sammellinse aus MgF2 4 converging lens made of MgF 2
5 Eintrittsfenster für 355 nm aus Quarz5 entrance windows for 355 nm made of quartz
6 Sammellinse aus Quarz6 quartz lens
7 Dichtungsring7 sealing ring
8 Stutzen zur Befüllung/Evakuierung der Gaszelle 98 nozzle for filling / evacuation of the gas cell 9
9 Gaszelle9 gas cell
10 266 nm Laser10 266 nm laser
11 Eintrittsfenster für 266 nm aus Quarz11 entrance windows for 266 nm made of quartz
12 Gaseinlaß (Nadel)12 gas inlet (needle)
13 Abzugsblende des TOF-Massenspektrometers13 Trigger aperture of the TOF mass spectrometer
14 Ionisationswürfel des TOF-Massenspektrometers14 ionization cubes of the TOF mass spectrometer
15 Nd:YAG Laser15 Nd: YAG laser
16 Dichroider Spiegel für 1064 nm16 dichroic mirrors for 1064 nm
17 Kristall zur Frequenzverdopplung17 crystal for frequency doubling
18 Computergesteuerter klappbarer Arm mit dichroidem Spiegel für 532 nm18 Computer controlled folding arm with dichroic mirror for 532 nm
19 Kristall zur Summenfrequenzmischung19 crystal for sum frequency mixing
20 Dichroider Spiegel für 355 nm20 dichroic mirrors for 355 nm
21 Dichroider Spiegel für 532 nm21 dichroic mirror for 532 nm
22 Dichroider Spiegel für 266 nm22 dichroic mirror for 266 nm
23 1064 nm Laserstrahl23 1064 nm laser beam
24 Colineare 1064 nm und 532 nm Laserstrahlen24 Colineare 1064 nm and 532 nm laser beams
25 532 nm Laserstrahl 25 532 nm laser beam
- -- -
Referenzencredentials
(1) Heger, H. J. ; Zimmermann, R. ; Dorfner, R. ; Beckmann, M. ; Griebel, H . ; Kettrup, A. ; Boesl, U. Anal. Chem. 1999, 71, 46-57.(1) Heger, H. J.; Zimmermann, R.; Dorfner, R.; Beckmann, M.; Griebel, H. ; Kettrup, A.; Boesl, U. Anal. Chem. 1999, 71, 46-57.
(2) Butcher, D. J. ; Goeringer, D. E . ; Hurst, G. B. Anal. Chem. 1999, 71 , 489-496.(2) Butcher, D.J .; Goeringer, D.E. ; Hurst, G.B. Anal. Chem. 1999, 71, 489-496.
(3) Rohlfing, E. A. In 22nd Symposium (International) on Combustion; The Combustion Institute: Pittsburgh, 1988, pp 1843-1850.(3) Rohlfing, E. A. In 22nd Symposium (International) on Combustion; The Combustion Institute: Pittsburgh, 1988, pp 1843-1850.
(4) Heger, H. J. ; Boesl, U. ; Zimmermann, R. ; Dorfner, R. ; Kettrup, A. Eur. Mass Spectrom. 1999, 5, 51-57.(4) Heger, H. J.; Boesl, U.; Zimmermann, R.; Dorfner, R.; Kettrup, A. Eur. Mass Spectrom. 1999, 5, 51-57.
(5) Zimmermann, R. ; Heger, H. J. ; Blumenstock, M. ; Dorfner, R. ; Schramm, K.- .; Boesl, U. ; Kettrup, A. Rapid Comm. Mass . Spectrom. 1999, 13, 307-314.(5) Zimmermann, R.; Heger, H. J.; Blumenstock, M.; Dorfner, R.; Schramm, K.-.; Boesl, U.; Kettrup, A. Rapid Comm. Measure Spectrom. 1999, 13, 307-314.
(6) Tembreull, R. ; Lubman, D. M. Anal . Chem. 1984, 56, 1962- 1967.(6) Tembreull, R.; Lubman, D. M. Anal. Chem. 1984, 56, 1962-1967.
(7) Zimmermann, R. ; Heger, H. J. ; Yeretzian, C . ; Nagel, H.; Boesl, U. Rapid Comm. Mass . Spectrom. 1996, 10, 1975-1979. (7) Zimmermann, R.; Heger, H. J.; Yeretzian, C. ; Nagel, H .; Boesl, U. Rapid Comm. Measure Spectrom. 1996, 10, 1975-1979.
Claims
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| DE10014847 | 2000-03-24 | ||
| DE10014847A DE10014847A1 (en) | 2000-03-24 | 2000-03-24 | Method and device for the detection of connections in a gas stream |
| PCT/EP2001/000848 WO2001073816A1 (en) | 2000-03-24 | 2001-01-26 | Method and device for detecting compounds in a gas stream |
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| DE10235612B4 (en) * | 2002-08-02 | 2012-06-21 | Siemens Aktiengesellschaft | Method and device for monitoring the quality of lubricating oil |
| US6803563B2 (en) | 2002-08-02 | 2004-10-12 | Flender Service Gmbh | Method and apparatus for monitoring the quality of lubricant |
| US7161145B2 (en) * | 2004-04-21 | 2007-01-09 | Sri International | Method and apparatus for the detection and identification of trace organic substances from a continuous flow sample system using laser photoionization-mass spectrometry |
| US20070187591A1 (en) * | 2004-06-10 | 2007-08-16 | Leslie Bromberg | Plasma ion mobility spectrometer |
| US7829843B2 (en) * | 2004-07-09 | 2010-11-09 | The Trustees Of Dartmouth College | Electronic time-of-flight mass selector |
| DE102005039269B4 (en) | 2005-08-19 | 2011-04-14 | Helmholtz Zentrum München Deutsches Forschungszentrum Für Gesundheit Und Umwelt (Gmbh) | Method and apparatus for the mass spectrometric detection of compounds |
| JP4958258B2 (en) | 2006-03-17 | 2012-06-20 | 株式会社リガク | Gas analyzer |
| JP4825028B2 (en) * | 2006-03-17 | 2011-11-30 | 浜松ホトニクス株式会社 | Ionizer |
| CN101752174B (en) * | 2008-12-19 | 2011-11-30 | 中国科学院大连化学物理研究所 | Ionization device of vacuum UV lamp |
| JP5278130B2 (en) * | 2009-04-15 | 2013-09-04 | 新日鐵住金株式会社 | Ionization analyzer and ionization analysis method |
| EP2302372A1 (en) * | 2009-09-18 | 2011-03-30 | Helmholtz Zentrum München Deutsches Forschungszentrum für Gesundheit und Umwelt GmbH | Method and device for repetitive chemical analysis of a gas flow |
| CN102103971B (en) * | 2009-12-18 | 2012-11-07 | 中国科学院大连化学物理研究所 | Hollow cathode discharge vacuum ultraviolet light ionization source inside minitype mass spectrograph |
| CN102479661B (en) | 2010-11-30 | 2014-01-29 | 中国科学院大连化学物理研究所 | Combined ionization source for vacuum ultraviolet photoionization and chemical ionization for mass spectrometry |
| JP5541232B2 (en) * | 2011-06-02 | 2014-07-09 | 新日鐵住金株式会社 | Vacuum ultraviolet light generation and ultraviolet light separation apparatus and method |
| DE102012209324A1 (en) * | 2012-06-01 | 2013-12-05 | Helmholtz Zentrum München | Optical fiber device for an ionization device and method for ionizing atoms and / or molecules |
| CN105552694B (en) * | 2016-02-18 | 2018-10-23 | 绍兴文理学院 | A kind of vacuum optical waveguide calibrating installation |
| CN105762054B (en) * | 2016-04-07 | 2017-11-28 | 绍兴文理学院 | Controllable gas at rest target assembly and its application method outside a kind of vacuum chamber |
| CN112997073B (en) * | 2018-10-03 | 2025-06-03 | 密歇根大学董事会 | Integrated miniature photoionization detector with ultrathin UV-transmitting window |
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| US5206594A (en) * | 1990-05-11 | 1993-04-27 | Mine Safety Appliances Company | Apparatus and process for improved photoionization and detection |
| DE4108462C2 (en) * | 1991-03-13 | 1994-10-13 | Bruker Franzen Analytik Gmbh | Method and device for generating ions from thermally unstable, non-volatile large molecules |
| FR2720747B1 (en) | 1994-06-02 | 1996-07-12 | Roussel Uclaf | New process for the preparation of a 16-beta-methyl steroid and new intermediates. |
| DE19608963C2 (en) * | 1995-03-28 | 2001-03-22 | Bruker Daltonik Gmbh | Process for ionizing heavy molecules at atmospheric pressure |
| US5940418A (en) * | 1996-06-13 | 1999-08-17 | Jmar Technology Co. | Solid-state laser system for ultra-violet micro-lithography |
| DE19754161C2 (en) * | 1997-12-06 | 1999-11-25 | Gsf Forschungszentrum Umwelt | Methods for the detection of substances and substance classes |
| DE19756444C1 (en) * | 1997-12-18 | 1999-07-08 | Deutsch Zentr Luft & Raumfahrt | Method and device for the detection of sample molecules in a carrier gas |
| US6002697A (en) * | 1998-04-03 | 1999-12-14 | Lambda Physik Gmbh | Diode pumped laser with frequency conversion into UV and DUV range |
| DE19820626C2 (en) * | 1998-05-08 | 2000-09-07 | Deutsch Zentr Luft & Raumfahrt | Method and device for the detection of sample molecules |
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