[go: up one dir, main page]

EP1080339A1 - Procede de palpage et dispositif pour la determination de caracteristiques d'une surface d'une eprouvette selon ledit procede - Google Patents

Procede de palpage et dispositif pour la determination de caracteristiques d'une surface d'une eprouvette selon ledit procede

Info

Publication number
EP1080339A1
EP1080339A1 EP99926478A EP99926478A EP1080339A1 EP 1080339 A1 EP1080339 A1 EP 1080339A1 EP 99926478 A EP99926478 A EP 99926478A EP 99926478 A EP99926478 A EP 99926478A EP 1080339 A1 EP1080339 A1 EP 1080339A1
Authority
EP
European Patent Office
Prior art keywords
probe
extension
arrangement according
target mark
push button
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99926478A
Other languages
German (de)
English (en)
Inventor
Ralf Christoph
Frank HÄRTIG
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Werth Messtechnik GmbH
Original Assignee
Werth Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik GmbH filed Critical Werth Messtechnik GmbH
Publication of EP1080339A1 publication Critical patent/EP1080339A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Definitions

  • the invention relates to a probe cut method for determining the characteristic size of a surface of a test specimen, in particular for determining the waviness and / or roughness depth and / or smoothing depth of the surface, with a probe element of a probe that is supported on the surface and includes a probe extension. Furthermore, the invention relates to an arrangement for determining the characteristic size of a surface of a test specimen according to the tactile cut method, in particular for determining the ripple and or roughness depth and / or smoothing depth of the surface, comprising a probe element that can be supported on the surface of a probe comprising a probe extension.
  • the surface inspection is used to assess the boundary surface of a body.
  • stylus devices are known, with which, for example B. a sapphire, diamond or simple steel tip, the surface is scanned, which is drawn at the desired speed evenly relatively over the surface to be tested. The surface is then assessed based on the deflection of the needle perpendicular to the surface. These displacements can e.g. B. be measured with a sensitive mechanical pointer.
  • the needle deflections are converted into an electrical signal, amplified and used as an upper area characteristic displayed or registered by a high-speed recorder.
  • a mechanical optical stylus device an oscillating needle is guided along the surface and is connected to a mirror. A light mark is deflected by this mirror and deflected onto light-sensitive material.
  • Non-contact methods are also known, such as e.g. B. the light section process according to Schmaltz.
  • a thin, sharply delimited band of light is radiated onto a surface to be tested and then viewed as a profile curve through a microscope.
  • Scanning force microscopy is used to measure the technical surfaces of small areas.
  • a very fine tip is not necessarily touching a sample surface.
  • the probe tip is attached to a small leaf spring, the surface of which faces away from the tip is acted upon by a laser light which is detected to detect the movement of the spring by means of a PSD sensor (Technica 5/96, pages 13 to 20).
  • PSD sensor Technica 5/96, pages 13 to 20.
  • Coordinate measuring machines can be used to determine the geometries of objects such as bores in these, in which, according to DE 297 10 242 Ul, a probe element originating from a resilient shaft comes into direct contact with the body to be measured, in order to directly contact the probe element itself to detect the assigned target mark by means of a photogrammetry system.
  • a coordinate measuring machine is described in the magazine VDI-Z 131 (1989) No. 11, pages 12 to 16, in which the geometries of a body are determined purely mechanically both optically and with tactile sensors.
  • an optical fiber is moved manually along a shape to be measured, the optical fiber forming a luminous vector which is optically recorded.
  • the present invention is based on the problem of developing a method and an arrangement of the type mentioned at the outset, which follow the mechanical measuring principle, in such a way that measurements with minimal contact forces of, for. B. 1 ⁇ N and less can be carried out, with very small surface characteristics should be measured with high measurement accuracy.
  • the problem is solved in terms of the method in that a flexurally elastic shaft is used as the stylus extension and that the position of the feeler element directly or a position of at least one target mark directly associated with the feeler element that originates from the flexurally elastic shaft is detected with an optical sensor and taking into account the relative movement between the DUT and the probe element as well as the deflection of the probe element caused by the touch of the object, the surface measured variable is determined.
  • an optical method is used using an optical sensor, by means of which the position of the probe element supported on the surface is determined directly or a target mark clearly assigned to the probe.
  • the position of the probe element and / or the at least one target mark is determined by means of reflecting radiation and / or radiation emitting from the probe element or the target mark.
  • the deflection of the sensing element caused by touching the object is optically determined in order to measure the course of the surface.
  • the deflection of the probe element can be detected by shifting the image on a sensor field of an electronic image processing system such as an electronic camera.
  • an electronic image processing system such as an electronic camera.
  • determining the deflection of the sensing element by evaluating a contrast function of the image using an electronic image processing system.
  • Another possibility for determining the deflection is to determine this from a change in size of the image of a target mark, from which the radiation-optical relationship between the object distance and the magnification results.
  • the deflection of the probe element can also be determined by the apparent size change of a target mark, which results from the loss of contrast due to defocusing.
  • the position of the feeler element or the at least one target mark assigned to it can be determined by means of a photogrammetry system. If there are several target marks, their position can be optically recorded and the position of the sensing element can then be calculated, since there is a clear, fixed relationship between these and the target marks.
  • An arrangement for determining the characteristic size according to the tactile cut method is characterized in that the stylus extension is designed, at least in sections, as a flexible shaft and that the arrangement detects the optical element emanating from the stylus extension and / or at least one target mark directly associated with the stylus element and originating from the stylus extension Includes sensor that with the probe element as a unit relative to the measuring surface is adjustable.
  • the feeler element and / or the target should preferably be designed as a body that radiates or reflects radiation such as a sphere or cylinder.
  • the feeler element can be made with the feeler extension such as a shaft by gluing, welding or other suitable connection types.
  • the feeler element and / or the target can also be a section of the feeler extension itself.
  • the push button extension or the shaft is designed as a light guide or comprises such a light guide in order to supply the required light to the push button element or the target.
  • the end of the shaft can be designed as a button or comprise such a button.
  • the feeler element and / or the target should be interchangeably connected to the feeler extension for the shaft.
  • a stylus device which is designed in particular as a coordinate measuring machine or has the basic structure, or is integrated in a coordinate measuring machine, the stylus device combining the advantages of optical and mechanical methods without accepting their disadvantages, one use in particular in the mechanical measurement of very small structures and in particular sensitive surfaces is possible, since only extremely low contact forces of e.g. B. 1 ⁇ N and less are required with small dimensions of the probe element itself in order to determine surface parameters with high accuracy and reproducibility.
  • a touch or probe element or a target mark assigned to it is determined in its or its position by a sensor such as an electronic camera after the former has been brought into mechanical contact with the surface of a test specimen to be measured. Because either the probe element itself or the target mark, which is directly connected to the probe element, in position is measured, deformations of a shaft receiving the probe have no influence on the measurement signals. When measuring, the elastic behavior of the shaft does not have to be taken into account, nor can plastic deformations, hysteresis and drift phenomena of the mechanical coupling between the probe element and the sensor influence the measurement accuracy.
  • an active light-emitting probe element or another active target it is not necessary for an active light-emitting probe element or another active target to be used. Particularly high accuracies can be achieved with light-emitting probe balls or other light-emitting target marks on the probe extension.
  • the light from a light source is the probe element such as ball or other target marks of the probe extension via z.
  • an optical fiber is supplied, which itself can represent the stylus shaft or the stylus extension.
  • the light can also be generated in the barrel or in the target marks by z. B. contain LEDs.
  • the probe element should have a disk-shaped or disc-shaped geometry.
  • an ideally contrasting and ideally circular image of the probe ball results from all viewing directions. This applies in particular when using a volume-scattering ball. Disturbances caused by the depiction of structures of the object itself are avoided, since the object itself is only brightly illuminated in the immediate vicinity of the probe ball. However, the image of the probe ball created by reflection on the object will practically always appear less bright than the probe ball itself. Errors can therefore be corrected easily. There is also the possibility of making the target mark fluorescent, so that incident and emitted light are separated in terms of frequency and thus the target marks in the image can also be more clearly isolated from the surroundings. The same considerations apply to the touch element itself.
  • Balls represent comparatively ideal, clear target marks. Good light coupling into the balls can be achieved by disturbing the light-guiding properties of the shaft, in which, for example, B. the pierced volume-scattering balls on the shaft, d. H. of the push button extension and glued to it.
  • the volume-scattering balls can also be glued to the side of the shaft, and light can also be coupled in, provided the shaft guides light up to its surface, ie does not have a jacket at the point of adhesion.
  • a particularly high level of accuracy is achieved if the probe element position is experimentally recorded (calibrated) as a function of the fiber position and fiber curvature (zones of the fiber at some distance from the probe element).
  • the dimension of target marks applied along the fiber is possible instead of the dimension of the fiber itself.
  • the separation of the elements of the probe element such as the probe ball and target marks additionally reduces the probability of a disturbance in the measurement of the probe element position due to reflections of the target mark on the object surface.
  • the touch element, the target marks or the shaft can be illuminated not only from the inside by the shaft, but also by suitable lighting devices from the outside.
  • the tactile element or target mark can be designed as retro-reflectors.
  • the button extension can be designed as a light guide and a - diameter of z. B. 20 microns.
  • the diameter of the probe element such as the probe ball should then preferably be 50 ⁇ m.
  • a casing can e.g. B. generated by sputtering.
  • Fig. 1 is a schematic diagram of a first embodiment of an arrangement for performing a probe cut method
  • Fig. 2 is a schematic diagram of a further arrangement for performing the probe cut method.
  • a characteristic surface characteristic such as roughness depth, smoothing depth, average roughness value.
  • the surface 10 is mechanically scanned according to the invention by means of a sensing element 14. continuously and the position of the sensing element 14 or a target mark 16 associated therewith is detected by means of an optical sensor 18, in order then to determine the desired surface parameter from the position of the sensing element 14 or the target mark 16 and the relative movement between the test object 12 and the sensing element 14.
  • Probe element 14 and target mark are based on probe extensions 22, 26, which together form a probe.
  • the senor 18 is aligned with its optical axis 20 directly on the probe element 14, whereas in the embodiment of FIG. 2 there is an alignment with the target mark 16.
  • the pushbutton element 14 is arranged at the end of the pushbutton extension designed as a light guide 22, which extends from a holder 24 which preferably has a light source.
  • the touch element 14 being self-illuminating, for. B. by means of an LED or to apply light from the outside, so that the reflected light is evaluated by the sensor 18 for determining the position of the probe element 14.
  • the senor 18 does not use the touch element 14 itself, but rather the target mark 16 directly associated with it, i. H. the position of which is evaluated, the target mark 16 likewise starting from the push-button extension, such as light guide 26, which is received by the holder 24.
  • the probe element 14 or the target mark 16 are adjusted for the measurement to be carried out with respect to the optical axis 20 and the focal plane. After the adjustment of the sensing element 14 or the target mark 16, the corresponding element is observed by means of the optical sensor 18. Deflections due to the structure of the surface 10 of the test object 12 are evaluated by electronic image processing.
  • the feeler element 14 and the target mark 16 each have a spherical shape radiating in terms of volume.
  • the feeler element 14 or the target 16 can be connected to the feeler extension 22, 26 by gluing, welding or in any other suitable manner. An interchangeable connection via a coupling is also possible.
  • the touch element 14 should preferably have a disk or disc shape.
  • the end of the push button extension that is to say in the exemplary embodiments of the optical fibers 22, 26, can be designed as a push button element.
  • the respective end section is preferably shaped accordingly at the end.
  • the touch element 14 or the target mark 16 can consist of different materials such as ceramic, ruby or glass. Furthermore, the optical quality of the corresponding elements can be improved by coatings with scattering or reflecting layers. The use of fluorescent material is also possible.
  • the diameter of the push button extension 22, 26 is preferably less than 100 ⁇ m, in particular approximately 20 ⁇ m.
  • the feeler element 14 or the target mark 16 has a larger diameter, preferably a diameter that is between 1.5 and 3 times larger than that of the feeler extension 22, 26.
  • the image of the touch element 14 or the target mark 16 associated therewith can, for. B. are imaged on a CCD field of the optical sensor 18.
  • the displacement of the light spot in the CCD field can be measured with sub-pixel accuracy. Consequently, with the method according to the invention, reproducible measurements with an accuracy in the ⁇ m range are possible, wherein only probing forces are required that can be in the range of 1 ⁇ N and less.
  • the body 12 can be arranged on a measuring table of a coordinate measuring machine, to which buttons with holder 24 and optical sensor 18 can be aligned in CNC technology.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un procédé de palpage permettant la détermination de caractéristiques d'une surface d'une éprouvette à l'aide d'un élément palpeur reposant sur ladite surface. La position de cet élément palpeur est mesurée directement à l'aide d'un capteur optique, ou bien la position d'au moins un repaire associé directement audit élément palpeur est mesurée à l'aide dudit capteur optique, et la caractéristique de la surface est déterminée par prise en compte du déplacement relatif entre l'éprouvette et l'élément palpeur.
EP99926478A 1998-05-29 1999-05-29 Procede de palpage et dispositif pour la determination de caracteristiques d'une surface d'une eprouvette selon ledit procede Withdrawn EP1080339A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19824107 1998-05-29
DE1998124107 DE19824107A1 (de) 1998-05-29 1998-05-29 Tastschnittverfahren sowie Anordnung zur Messgrößenbestimmung einer Oberfläche eines Prüflings nach dem Tastschnittverfahren
PCT/EP1999/003745 WO1999063299A1 (fr) 1998-05-29 1999-05-29 Procede de palpage et dispositif pour la determination de caracteristiques d'une surface d'une eprouvette selon ledit procede

Publications (1)

Publication Number Publication Date
EP1080339A1 true EP1080339A1 (fr) 2001-03-07

Family

ID=7869339

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99926478A Withdrawn EP1080339A1 (fr) 1998-05-29 1999-05-29 Procede de palpage et dispositif pour la determination de caracteristiques d'une surface d'une eprouvette selon ledit procede

Country Status (4)

Country Link
EP (1) EP1080339A1 (fr)
AU (1) AU4371899A (fr)
DE (1) DE19824107A1 (fr)
WO (1) WO1999063299A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1248073B1 (fr) * 2001-04-03 2006-04-12 Saphirwerk Industrieprodukte AG Procédé de détermination de l'amplitude des déformations d'un stylet palpeur
DE10349946B4 (de) * 2003-10-24 2008-04-17 Werth Messtechnik Gmbh Anordnung zur Messung von Oberflächeneigenschaften
DE102006002618B3 (de) * 2006-01-19 2007-07-26 Forschungszentrum Karlsruhe Gmbh Vorrichtung zur Messung von Strukturen eines Objekts
EP2511656A1 (fr) 2011-04-14 2012-10-17 Hexagon Technology Center GmbH Système de mesure pour la détermination de coordonnées 3D d'une surface d'objet
DE102014117978A1 (de) 2013-12-06 2015-06-11 Werth Messtechnik Gmbh Vorrichtung und Verfahren zur Messung von Werkstücken
WO2015082683A2 (fr) 2013-12-06 2015-06-11 Werth Messtechnik Gmbh Dispositif et procédé pour la mesure de pièces
EP3230683B1 (fr) 2014-12-12 2019-10-02 Werth Messtechnik GmbH Machine de mesure de coordonnées et procédés de mesure de caractéristiques sur des pièces
DE102015121582A1 (de) 2014-12-12 2016-06-16 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Messung von Merkmalen an Werkstücken
CH715610A1 (fr) 2018-12-04 2020-06-15 Watch Out S A Système et procédés de mesure du profil d'une pièce.
CN109520399B (zh) * 2019-01-18 2020-11-03 南县伟业机械制造有限公司 一种水田平整度检测系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29710242U1 (de) * 1997-06-12 1997-08-07 Trapet, Eugen, Dr., 38176 Wendeburg Taster zur Messung geometrischer Strukturen

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57141040A (en) * 1981-02-24 1982-09-01 Toshiba Corp Recording and reproducing decive
DE4002043C2 (de) * 1990-01-24 1997-03-20 Paul Hans Ulrich Prof Dipl Ing Meßsystem zur Ermittlung geometrischer Bearbeitungsdaten an zu vermessenden Formen
DE69230198T2 (de) * 1991-07-17 2000-07-06 Canon K.K., Tokio/Tokyo Informationsaufzeichnungs-/Wiedergabegrät zur Informationsaufzeichnung und/oder -wiedergabe auf/von einem Informationsaufzeichnungsträger durch Benutzung einer Sonde.
JPH05332712A (ja) * 1992-05-27 1993-12-14 Olympus Optical Co Ltd トラップサイト検出顕微鏡
JP3076467B2 (ja) * 1992-12-25 2000-08-14 キヤノン株式会社 面合わせ方法およびそれを用いたトンネル顕微鏡および記録再生装置
US5670712A (en) * 1994-08-15 1997-09-23 The Regents Of The University Of California Method and apparatus for magnetic force control of a scanning probe
JPH10142240A (ja) * 1996-11-14 1998-05-29 Hitachi Constr Mach Co Ltd 走査型プローブ顕微鏡とこの走査型プローブ顕微鏡を備えた加工装置
JP3260644B2 (ja) * 1996-12-10 2002-02-25 セイコーインスツルメンツ株式会社 カンチレバーおよびその製造方法
JPH10232240A (ja) * 1997-02-19 1998-09-02 Canon Inc 表面観察装置
JPH10339736A (ja) * 1997-06-10 1998-12-22 Olympus Optical Co Ltd 走査型プローブ顕微鏡用プローブとその作製方法
DE19724739A1 (de) * 1997-06-12 1998-12-17 Werth Messtechnik Gmbh Taster zur Messung geometrischer Strukturen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29710242U1 (de) * 1997-06-12 1997-08-07 Trapet, Eugen, Dr., 38176 Wendeburg Taster zur Messung geometrischer Strukturen

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
G. MATTEE: "Fertigungsmesstechnik und Arbeitsmaschinen", 1972, ROWOLT-VERLAG, REINBEK BEI HAMBURG *
See also references of WO9963299A1 *

Also Published As

Publication number Publication date
WO1999063299A1 (fr) 1999-12-09
AU4371899A (en) 1999-12-20
DE19824107A1 (de) 1999-12-23

Similar Documents

Publication Publication Date Title
EP0988505B1 (fr) Appareil de mesure de coordonnées avec une prolongation de palpeur élastique et capteur optique
WO2002025206A1 (fr) Dispositif et procede de mesure opto-tactile de structures
EP1071922B1 (fr) Procede et dispositif permettant de detecter la geometrie d'objets a l'aide d'appareils de mesure de coordonnees
EP1407224B1 (fr) Procede pour mesurer des proprietes superficielles et dispositif de mesure de coordonnees
DE69214951T2 (de) Sonden
EP1362216B1 (fr) Appareil de mesure de coordonnees avec un tete de palpage pour le palpage d'une piece a usiner
DE68921003T2 (de) Sonden.
EP1996898B1 (fr) Eprouvette et procede de calibrage d'un appareil de mesure de coordonnees
EP1071921B1 (fr) Procede et dispositif de mesure de la structure d'un objet
DE202009018895U1 (de) Oberflächenmesstaster
EP3608625B1 (fr) Système de mesure oct
EP1082581B1 (fr) Dispositif pour la mesure de structures d'un objet
DE102018217285A1 (de) Tastsystem zur optischen und taktilen Vermessung mindestens eines Messobjekts
EP1080339A1 (fr) Procede de palpage et dispositif pour la determination de caracteristiques d'une surface d'une eprouvette selon ledit procede
DE19805892A1 (de) Verfahren und Anordnung zur Messung von Strukturen eines Objekts
WO2004065904A1 (fr) Procede de mesure optique et machine de mesure de precision pour la determination d'ecarts par rapport a une forme ideale de surfaces polies par des moyens techniques
DE19724739A1 (de) Taster zur Messung geometrischer Strukturen
DE112005000934B4 (de) Koordinatenmessgerät sowie Verfahren zum Messen von Strukturen mittels eines Koordinatenmessgerätes
DE29710242U1 (de) Taster zur Messung geometrischer Strukturen
DE4134689C1 (en) Optically measuring contour of toroidal opaque object - registering shadows cast by light source using line or matrix camera taking into account distance from object and imaging scale
EP0676033B1 (fr) Procede et dispositif pour la mesure de la geometrie de surfaces de produits techniques
DE19847711B4 (de) Anordnung zur Messung von Strukturen eines Objektes
DE19620419A1 (de) Verfahren zur berührungslosen und markierungsfreien Messung von Verschiebungen
WO2005040716A1 (fr) Systeme de mesure d'un objet a l'aide d'un appareil de mesure par coordonnees

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20001121

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE ES FR GB IT

17Q First examination report despatched

Effective date: 20010918

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20020329