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EP0860514A3 - Reactive sputtering apparatus and process for forming thin film using same - Google Patents

Reactive sputtering apparatus and process for forming thin film using same Download PDF

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Publication number
EP0860514A3
EP0860514A3 EP98102794A EP98102794A EP0860514A3 EP 0860514 A3 EP0860514 A3 EP 0860514A3 EP 98102794 A EP98102794 A EP 98102794A EP 98102794 A EP98102794 A EP 98102794A EP 0860514 A3 EP0860514 A3 EP 0860514A3
Authority
EP
European Patent Office
Prior art keywords
target
substrate
supplying
gas
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98102794A
Other languages
German (de)
French (fr)
Other versions
EP0860514A2 (en
EP0860514B1 (en
Inventor
Kazuho Sone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0860514A2 publication Critical patent/EP0860514A2/en
Publication of EP0860514A3 publication Critical patent/EP0860514A3/en
Application granted granted Critical
Publication of EP0860514B1 publication Critical patent/EP0860514B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0063—Reactive sputtering characterised by means for introducing or removing gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0068—Reactive sputtering characterised by means for confinement of gases or sputtered material, e.g. screens, baffles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

To form a large-area thin film having in-plane uniform thickness and optical and electrical characteristics at a high deposition rate, a reactive sputtering apparatus is provided which comprises a substrate holding means (7) for holding a substrate (2), a target holding means (12) for holding a target (1), a sputter gas supplying means (3) for supplying into a reaction chamber a sputter gas for sputtering the target, a reactive gas supplying means (4) for supplying a reactive gas, and a power supplying means (8) for supplying a power for causing a discharge to take place between the target and the substrate, wherein a partition member (6) having a plurality of openings is provided between the target and the substrate, and wherein a supply port and an exhaust passage (20) both for the sputter gas and a supply port and an exhaust passage (21) both for the reactive gas are provided separately from each other such that the sputter gas is applied to and exhausted from a space between the target and the partition member and the reactive gas is applied to and exhausted from a space between the substrate and the partition member.
EP98102794A 1997-02-19 1998-02-18 Reactive sputtering apparatus and process for forming thin film using same Expired - Lifetime EP0860514B1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP35125/97 1997-02-19
JP3512597 1997-02-19
JP3512597 1997-02-19
JP4218197 1997-02-26
JP4218197 1997-02-26
JP42181/97 1997-02-26

Publications (3)

Publication Number Publication Date
EP0860514A2 EP0860514A2 (en) 1998-08-26
EP0860514A3 true EP0860514A3 (en) 1998-09-30
EP0860514B1 EP0860514B1 (en) 2004-11-03

Family

ID=26374047

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98102794A Expired - Lifetime EP0860514B1 (en) 1997-02-19 1998-02-18 Reactive sputtering apparatus and process for forming thin film using same

Country Status (4)

Country Link
US (1) US6200431B1 (en)
EP (1) EP0860514B1 (en)
KR (1) KR100277321B1 (en)
DE (1) DE69827310T2 (en)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6592728B1 (en) * 1998-08-04 2003-07-15 Veeco-Cvc, Inc. Dual collimated deposition apparatus and method of use
US6627056B2 (en) 2000-02-16 2003-09-30 Applied Materials, Inc. Method and apparatus for ionized plasma deposition
SE519931C2 (en) * 2000-06-19 2003-04-29 Chemfilt R & D Ab Device and method for pulsed, highly ionized magnetron sputtering
KR100419756B1 (en) * 2000-06-23 2004-02-21 아넬바 가부시기가이샤 Thin-film deposition apparatus
JP2002069634A (en) * 2000-08-29 2002-03-08 Canon Inc Thin film manufacturing method and thin film manufacturing apparatus
US6447653B1 (en) * 2000-10-11 2002-09-10 Litton Systems Inc. Method of shaping a flux mask and process of sputtering with the shaped flux mask
US6590344B2 (en) * 2001-11-20 2003-07-08 Taiwan Semiconductor Manufacturing Co., Ltd. Selectively controllable gas feed zones for a plasma reactor
AU2003205849A1 (en) 2002-02-14 2003-09-04 Trikon Technologies Limited Plasma processing apparatus
KR20020063147A (en) * 2002-06-12 2002-08-01 유재원 Apparatus for Forming Metal Thin Film on a Ball-Shaped Substrate and Its Method for Forming the Thin Film
US6863930B2 (en) 2002-09-06 2005-03-08 Delphi Technologies, Inc. Refractory metal mask and methods for coating an article and forming a sensor
JP3953444B2 (en) * 2002-10-16 2007-08-08 株式会社アルバック Thin film forming apparatus and thin film forming method
JP2005105400A (en) * 2003-10-02 2005-04-21 Canon Inc Film forming apparatus, film forming method, optical element, and optical system
JP4280603B2 (en) * 2003-11-04 2009-06-17 キヤノン株式会社 Processing method
CN1942744A (en) * 2004-03-01 2007-04-04 应用材料股份有限两合公司 Substrate comprising Fabry-Perof filter and method for use of filter to said substrate
JP3986513B2 (en) * 2004-08-05 2007-10-03 株式会社シンクロン Thin film forming equipment
JP2006086468A (en) * 2004-09-17 2006-03-30 Canon Anelva Corp Magnetoresistive film manufacturing method and manufacturing apparatus
JP4923450B2 (en) * 2005-07-01 2012-04-25 富士ゼロックス株式会社 Batch processing support apparatus and method, program
US20070012558A1 (en) * 2005-07-13 2007-01-18 Applied Materials, Inc. Magnetron sputtering system for large-area substrates
US20070012663A1 (en) * 2005-07-13 2007-01-18 Akihiro Hosokawa Magnetron sputtering system for large-area substrates having removable anodes
US20070084720A1 (en) * 2005-07-13 2007-04-19 Akihiro Hosokawa Magnetron sputtering system for large-area substrates having removable anodes
US20070012559A1 (en) * 2005-07-13 2007-01-18 Applied Materials, Inc. Method of improving magnetron sputtering of large-area substrates using a removable anode
US20070051616A1 (en) * 2005-09-07 2007-03-08 Le Hienminh H Multizone magnetron assembly
US7588668B2 (en) 2005-09-13 2009-09-15 Applied Materials, Inc. Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers
US20070056843A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones
US20070056850A1 (en) * 2005-09-13 2007-03-15 Applied Materials, Inc. Large-area magnetron sputtering chamber with individually controlled sputtering zones
JP2007088199A (en) * 2005-09-22 2007-04-05 Canon Inc Processing equipment
EP1840936A1 (en) * 2006-03-29 2007-10-03 Applied Materials GmbH & Co. KG Sputtering chamber for coating a substrate
US20070235320A1 (en) 2006-04-06 2007-10-11 Applied Materials, Inc. Reactive sputtering chamber with gas distribution tubes
US20080110752A1 (en) * 2006-11-09 2008-05-15 Stowell Michael W System and method for high-energy sputtering using return conductors
KR100806386B1 (en) * 2007-03-23 2008-02-27 (주)유성특수산업 Filter structure
US20080308411A1 (en) * 2007-05-25 2008-12-18 Energy Photovoltaics, Inc. Method and process for deposition of textured zinc oxide thin films
KR100881954B1 (en) * 2007-11-09 2009-02-06 한국전자통신연구원 Reactive Sputtering Deposition Equipment
TW200921780A (en) * 2007-11-15 2009-05-16 Ind Tech Res Inst Method for forming a corrugation multilayer
US20090242385A1 (en) * 2008-03-28 2009-10-01 Tokyo Electron Limited Method of depositing metal-containing films by inductively coupled physical vapor deposition
CN102373427A (en) * 2010-08-18 2012-03-14 鸿富锦精密工业（深圳）有限公司 Surface anti-corrosion treatment process of aluminium alloy and product thereof
US9115425B2 (en) 2010-10-18 2015-08-25 Electronics And Telecommunications Research Institute Thin film depositing apparatus
US20130319847A1 (en) * 2012-06-05 2013-12-05 Intermolecular, Inc. METHODS AND APPARATUSES FOR LOW RESISTIVITY Ag THIN FILM USING COLLIMATED SPUTTERING
US10309005B2 (en) * 2013-10-30 2019-06-04 Tokyo Electron Limited Deposition device and deposition method
GB201909538D0 (en) * 2019-07-02 2019-08-14 Spts Technologies Ltd Deposition apparatus
DE102020212353A1 (en) 2020-09-30 2022-03-31 Carl Zeiss Smt Gmbh Process for producing an optical element, optical element, device for producing an optical element, secondary gas and projection exposure system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110673A (en) * 1981-12-23 1983-07-01 Hitachi Ltd Reactive sputtering device
US5415753A (en) * 1993-07-22 1995-05-16 Materials Research Corporation Stationary aperture plate for reactive sputter deposition

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3331707A1 (en) * 1983-09-02 1985-03-21 Leybold-Heraeus GmbH, 5000 Köln METHOD AND DEVICE FOR REACTIVELY SPRAYING CONNECTIONS FROM METALS AND SEMICONDUCTORS
JPS6256570A (en) 1985-09-06 1987-03-12 Tdk Corp Reactive sputtering method
JPS62274067A (en) * 1986-05-22 1987-11-28 Nec Corp Thin film forming method
US4824544A (en) * 1987-10-29 1989-04-25 International Business Machines Corporation Large area cathode lift-off sputter deposition device
US4931158A (en) * 1988-03-22 1990-06-05 The Regents Of The Univ. Of Calif. Deposition of films onto large area substrates using modified reactive magnetron sputtering
EP0440377B1 (en) * 1990-01-29 1998-03-18 Varian Associates, Inc. Collimated deposition apparatus and method
JPH0641733A (en) 1992-07-28 1994-02-15 Matsushita Electric Ind Co Ltd Reactive sputtering equipment
US5380414A (en) * 1993-06-11 1995-01-10 Applied Materials, Inc. Shield and collimator pasting deposition chamber with a wafer support periodically used as an acceptor
JPH07335553A (en) 1994-06-08 1995-12-22 Tel Varian Ltd Treatment device and method
US5807467A (en) * 1996-01-22 1998-09-15 Micron Technology, Inc. In situ preclean in a PVD chamber with a biased substrate configuration
US5741404A (en) * 1996-05-24 1998-04-21 Micron Technology, Inc. Multi-planar angulated sputtering target and method of use for filling openings

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110673A (en) * 1981-12-23 1983-07-01 Hitachi Ltd Reactive sputtering device
US5415753A (en) * 1993-07-22 1995-05-16 Materials Research Corporation Stationary aperture plate for reactive sputter deposition

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 007, no. 213 (C - 187) 20 September 1983 (1983-09-20) *

Also Published As

Publication number Publication date
EP0860514A2 (en) 1998-08-26
DE69827310D1 (en) 2004-12-09
EP0860514B1 (en) 2004-11-03
KR100277321B1 (en) 2001-01-15
KR19980071461A (en) 1998-10-26
DE69827310T2 (en) 2005-10-27
US6200431B1 (en) 2001-03-13

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