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EP0852709A1 - Dispositif a capteurs multispectral - Google Patents

Dispositif a capteurs multispectral

Info

Publication number
EP0852709A1
EP0852709A1 EP95933433A EP95933433A EP0852709A1 EP 0852709 A1 EP0852709 A1 EP 0852709A1 EP 95933433 A EP95933433 A EP 95933433A EP 95933433 A EP95933433 A EP 95933433A EP 0852709 A1 EP0852709 A1 EP 0852709A1
Authority
EP
European Patent Office
Prior art keywords
spectral
sensor device
measurement
signal values
logic circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP95933433A
Other languages
German (de)
English (en)
Inventor
Norbert Haase
Andreas Kalz
Jens Knobloch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of EP0852709A1 publication Critical patent/EP0852709A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G01J3/513—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs

Definitions

  • the present invention relates to a multispectral sensor device for analyzing optical radiation with an unknown spectral composition and intensity distribution, predominantly from the ultraviolet (UV) to the visible (VIS) to the near infrared (NIR) range.
  • UV ultraviolet
  • VIS visible
  • NIR near infrared
  • Such a sensor is, for example, as a color detection system with the predetermined three spectral components red, green and blue in the VIS range, as an extended color detection system with the additional spectral components as color equivalents, or when increasing the number of channels and the associated reduction of the spectral bandwidth can also be used as a channel spectrometer.
  • DE 36 22 043 AI describes a device for color measurement.
  • This device requires at least two predefined spectral sensitivity functions and for spectral filtering a multiplicity of illuminated filters, a detector arrangement with one detector behind each filter and an evaluation circuit which receives the detector signals emitted by the detectors and the measured value signals assigned to the individual sensitivity functions ab ⁇ there.
  • a plurality of weighting factors, each assigned to the individual sensitivity curves, are stored in a data memory of the evaluation circuit.
  • the evaluation circuit derives the measured value signals, which are assigned to the individual sensitivity curves, from the detector signals of these detectors, the same with those of the weighting factors assigned to the respective sensitivity function. With this arrangement, only a rough color determination can be carried out. For spectral analyzes with, for example, 10 nm resolution per measuring channel, 40 channels would be required in the visible range (380 nm to 700 nm), which can only be implemented in this way with great effort.
  • DE 41 43 284 AI describes an integrated semiconductor sensor for spectrometers.
  • This sensor consists of a large number of radiation detectors, charge storage and charge transport devices, supply potential lines, logic circuits and output amplifiers. These devices are arranged in a one- or two-dimensional arrangement in order to convert the radiation from partial areas of the spectrum into electrical signals.
  • the radiation detectors arranged on one or more contiguous wavelength ranges of the spectrum imaged on the integrated semiconductor sensor each have dimensions which are adapted to the spatially resolving conditions which result from the aperture and dispersion system of the spectrometer and the radiation source to be examined and are corresponding to the Row structure of the spectrum arranged.
  • the storage charge transport amplifier and circuit devices connected downstream of the detectors are set up in a manner which is specifically adapted to the sensors used in each case.
  • the signals of the detectors of selectable connected sections of at least one wavelength region regularly occupied by detectors are combined individually or partially and read out serially and / or in parallel. Furthermore, the light integration time of the individual sections is controlled.
  • This sensor can also be used as a color sensor.
  • its disadvantage is that each sub-area of the spectrum requires a correspondingly adapted detector in the measuring channel. This means that either the spectral limited range or a large number of such detectors must be implemented to capture the entire spectral range. In the case of many measurement problems, however, this is not possible since the measurement beam of the incident light must be optically widened in such a way that all spectrally adapted detectors are irradiated in the same way. As a result, the actual semiconductor sensor becomes large and the luminance at the individual detector drops.
  • DE 41 33 581 AI describes another multispectral sensor.
  • the measuring beam is broken down into several partial beams by an optical device and reflected on filters.
  • Radiation-sensitive elements are arranged behind the filters, which detect the spectral range that corresponds to the transmission range of the upstream filter.
  • the remaining spectral region of the partial beam is reflected from the filter surface onto the other filters.
  • Such an arrangement only makes sense for a few spectral ranges, since otherwise this sensor also requires a large and complicated optical structure.
  • the known multispectral sensors for the UV-VIS-NIR spectral range have the disadvantage that they are used for each measuring channel a detector and / or, for spectral decomposition, additional optical paths and components, such as gratings or prisms, which are sometimes also arranged to be movable, are required, as a result of which they are correspondingly large and complex to manufacture.
  • the object of the present invention is to create a multispectral sensor device which, by detecting a few spectral subregions with a relatively large spectral bandwidth, enables statements to be made about a larger number of spectral subregions with a smaller bandwidth .
  • the present invention provides a multispectral sensor device with the following features: a plurality of opto-electrical transducers, each optoelectric transducer generating wavelength-selectively from an optical signal an electrical measurement signal in a respective measurement channel; a processing circuit in which the electrical measurement signals generated are each processed into measurement signal values; and a fuzzy logic circuit in which the measurement signal values generated are compared with reference values and the measurement signal values are assigned on the basis of the comparison to a number of channels which is greater than the number of measurement channels.
  • the optoelectrical transducers used in the present invention are preferably photodiodes, which are each provided with multilayer filters which are spectrally different from one another.
  • the processing circuit preferably has measurement amplifiers, analog / digital converters and measurement value accumulators in order to convert the measurement signals into measurement signal values.
  • the measurement signal values are then fed to the fuzzy logic circuit via a reference value memory in which the reference values are stored.
  • Such a sensor can be integrated together with analog and digital signal processing components as a microsystem on a chip in an extremely small monolithic manner and can therefore be produced inexpensively in large quantities. Very high system requirements can also be met, in particular because of the fuzzy logic circuit of the detector system.
  • the fuzzy classification of the measurement signal values enables a sufficiently reliable evaluation even in the case of inexactly defined (unsharp) ambient conditions, such as, for example, the lighting and the associated evaluation of the measured material or in the case of disturbed signals.
  • the unfavorable properties of inexpensive integrated sensors compared to expensive individual sensors, which are due to unavoidable tolerances in the joint production of all photodiodes and multilayer filters and to the lack of individual optimization of each sensor component, are compensated for by suitable design of the fuzzy logic circuit.
  • a multispectral sensor device with, for example, n-channels for the UV-VIS-NIR range is created which, by means of the acquisition of only a few spectral subregions with a relatively large spectral bandwidth, has a large number of spectral ranges by means of integrated fuzzy logic Sub-areas generated significantly lower bandwidth. These are assigned to discrete channels, so that this sensor device can be used both for determining the color components or color equivalents and for discrete spectral analysis with the channel width as a discretization measure, the discretization measure corresponding to the spectral resolution of the multispectral sensor device.
  • Such multispectral sensor devices can be used, for example, to make statements regarding the classification of the deviation with respect to a predetermined color, the occurrence of defined spectral components or the color of the measurement object.
  • Such a sensor can be used in many ways, especially since it can be produced inexpensively and in large quantities as a monolithically integrated component, for example in Si-CMOS technology, together with analog and digital signal processing units on a chip.
  • FIG. 1 shows an embodiment of the multispectral sensor device according to the present invention.
  • a preferred exemplary embodiment of the present invention has five photodiodes 1 (UVA, B, G, R, NIR). These photodiodes are applied to a silicon substrate and each are provided with a bandwidth and center wavelength desired for the technology and suitable multilayer filter.
  • the multilayer filter or filter layer system is applied to the photoactive region of the diode, which is located in a thin semiconductor layer, an insulating intermediate layer being arranged between this semiconductor layer and the Si substrate.
  • Each of the diodes is connected to a measuring amplifier 2.
  • Each measuring amplifier is in turn connected to an analog / digital converter 3.
  • the analog / digital converters are connected to accumulators 4, the outputs of which are connected to a measuring and Reference value memory 5 are connected.
  • the outputs of the measurement and reference value memory 5 are connected to a fuzzy logic unit 6. If necessary, temperature compensation can also be added to this circuit.
  • the multispectral sensor If radiation of any spectral composition and intensity distribution falls on the multispectral sensor, it is detected by its five photodiodes simultaneously, but according to their spectrally different sensitivity.
  • the detected measurement signals are fed to the respectively assigned measurement amplifiers, the output signals of the same are converted into digital signals by analog / digital converters and, after a digital characteristic curve correction, are integrated in an accumulator.
  • the measurement signal values thus obtained are then fed to the fuzzy logic circuit via the measurement and reference value memory 5.
  • the fuzzy logic circuit has the task, among other things, of forming the spectral components of the light to be measured with a higher resolution from the signals of a few photosensors (in the present example 5) and realizing a classification. Different fuzzy systems are provided for different applications.
  • the comparison with a given color i.e. a classification of the deviation with respect to the specified color
  • a spectral analysis i.e. a fuzzy statement about the occurrence of defined spectral components
  • a color classification i.e. a fuzzy statement about the color of the measurement object.
  • object detection and classification can be carried out by means of the fuzzy logic circuit 6.
  • FIG. 2 shows the course of the spectral sensitivity of the 5 diodes used in the preferred exemplary embodiment.
  • the multilayer filters of the five diodes are dimensioned for the spectral range UV-VIS-NIR (250 nm to 950 nm). The dimensioning of the five multilayer filters or filter layer systems for the respective diodes is described below. 1st diode (UVA):
  • the filter layer system of the 1st diode is due to the successive application of SiO 2 with a thickness of 320 nm to 340 nm, Al with a thickness of 10 nm to 15 nm, SiO 2 with a thickness of 180 nm, Al with a thickness of 10 nm to 15 nm and finally SiO 2 with a thickness of 80 nm to 90 nm in the photoactive region of the diode.
  • the filter dimensioned in this way has a maximum transmission 8 at a wavelength of around 290 nm with a half width of approximately 55 nm and has a maximum transmission of approximately 65%.
  • the filter layer system of the second diode is formed by the successive application of TiO 2 with a thickness of 50 nm, SiO 2 with a thickness of 125 nm and finally Al with a thickness of 10 to 15 nm in the photoactive region of the diode.
  • the filter dimensioned in this way has a maximum transmission 9 at a wavelength of approximately 440 nm with a half width of approximately 75 nm.
  • the maximum transmission 9 is approximately 70%.
  • the filter layer system of the third diode is formed by the successive application of TiO 2 with a thickness of 50 nm, SiO 2 with a thickness of 160 nm and Au with a thickness of 30 nm to 35 nm in the photoactive region of the diode.
  • This filter has a maximum transmission 10 at a wavelength around 550 nm with a half width of 130 nm.
  • the maximum transmission 10 is approximately 65%.
  • the filter layer system of the fourth diode is formed by the successive application of TiO 2 with a thickness of 50 nm, SiO 2 with a thickness of 220 nm and Au with a thickness of 30 to 35 nm in the photoactive region of the diode.
  • the maximum transmission 11 at a wavelength around 680 nm has a half width of approximately 115 nm and a maximum value of about 60%.
  • the filter layer system of the 5th diode is photoactive by successively applying TiO 2 with a thickness of 50 nm, SiO 2 with a thickness of 560 nm to 580 nm and polycrystalline silicon with a thickness of 1.5 ⁇ m to 2.1 ⁇ m Be ⁇ area formed.
  • the maximum transmission 12 of this filter at approximately 810 nm has a half width of approximately 240 nm. The maximum transmission is about 55%.
  • optoelectric transducers can be used to acquire other spectral ranges, which receive a correspondingly differently adapted spectral sensitivity.
  • the fuzzy logic circuit extracts features from the measurement signal values and adds further application-specific ones. Using the membership functions and fuzzy rules stored in the fuzzy system, all features are overlaid with the aim of optimal classification.
  • the measured signal values of, for example, five photodiodes are assigned, for example, to n spectral channels with an association between 0 and 1. It is thereby achieved that a high discrete spectral resolution is achieved with only a few photodiodes which differ in their spectral sensitivity.
  • the fuzzy system is adaptive by means of appropriate algorithms and storage methods, i.e. it can be optimized and adapted to changing conditions.
  • a fuzzy logic that can be used in the fuzzy logic circuit of the preferred exemplary embodiment is described below.
  • the feature vector in the present example consists of the five values “UV”, “blue”, “green”, “red” and “NIR”, which can be supplemented or reduced in specific applications.
  • the signal size of each feature becomes value ranges, e.g. "close to zero (nn)", “small (k)”, “medium (m)”, “medium (mg)”, “large (g)” and “very large (sg)", which are fuzzy are limited.
  • Corresponding empirical values are used for the assignment to a signal variable, this assignment forming the membership function of the corresponding feature.
  • a connection, which is defined by verbal fuzzy rules, to the feature vector is formed for the desired classes (for example 8 special colors). If, for example, a class "blue-green" is to be formed according to Figure 2, one possible rule is:
  • the feature vector, the corresponding membership functions and the entire set of fuzzy rules form the basis of the classifier. If there are n classes, the classifier forms an n-dimensional feature space in which each class corresponds to a sub-area.
  • the task of this fuzzy classifier is now to assign an object, in this case a color, to a class, even if this signal is disturbed by additional information, for example a fluctuating luminosity, a gloss or the surface structure. Since the individual classes are described in a vague manner, the result is not a sharp value, but rather a certain degree of belonging to a class. This degree of belonging, also called sympathy, can take values between 0 and 1. If, for example, the above rule is fully fulfilled, the degree of affiliation or sympathy for the class "blue-green” has the value 1. A reduced luminosity or results of further rules for the class "blue-green” can of course reduce this value.
  • this method makes it possible to define color levels between the measured color values and to interpret transitions.
  • the classification decision based on the evaluation of the sympathy values of each class, three cases are to be distinguished:
  • the sympathy value of a class is significantly larger than all other sympathy values: the object is clearly assigned to a class.
  • the sympathy value of a class is only marginally greater than another sympathy value: the classification decision can only be accepted with reservations, and there may be a tendency to an adjacent class.
  • the mentioned properties of the multispectral sensor device with fuzzy logic of the present invention enable the same to be used for all tasks which relate to a real or false color analysis. These include tasks of colorimetry in the color, automotive and printing industries, as well as color rendering techniques.
  • the present invention can also be used in multispectral image analysis, for example remote earth detection, soil analysis, environmental protection and medical technology.
  • the multispectral sensor device according to the present invention can be used for three-dimensional object recognition by means of color triangulation. Further areas of application are sorting systems and devices in which artificial vision is required.
  • spectrometry e.g. for reaction kinetic measurements, for determining the rate constants of chemical reactions and for clarifying the reaction mechanisms.
  • Such measurements require a fast sensor which is capable of detecting a larger wavelength range selectively in situ in a very short time.
  • the present invention can be used in the paper and printing industry, in which high demands are placed on a multispectral sensor device.
  • a basic prerequisite for on-line color measurement in the paper manufacturing and printing process is that the same must take place without contact, and that the material to be measured is fluttering at the same speeds because of it is difficult to fix.
  • the problem of translucency which has a fluctuation in the measurement results, the cause of which lies in the local paper structure, makes matters more difficult.
  • the multispectral sensor device according to the present invention has all the features in order to be able to carry out such measurements satisfactorily.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

Un dispositif à capteurs multispectral présente une pluralité de convertisseurs opto-électriques (1). Chaque convertisseur opto-électrique (1) génère, par sélection de longueurs d'ondes, un signal de mesure électrique dans son propre canal de mesure à partir d'un signal optique. Un circuit de traitement (2,3,4) traite chaque signal de mesure électrique généré pour produire des valeurs de signaux de mesure. Un circuit à logique floue (6) réalise une comparaison des valeurs de signaux de mesure produits avec des valeurs de référence et, sur la base de cette comparaison, affecte les valeurs de signaux de mesure à un certain nombre de canaux (7), ce nombre étant supérieur au nombre de canaux de mesure.
EP95933433A 1995-09-27 1995-09-27 Dispositif a capteurs multispectral Withdrawn EP0852709A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1995/003824 WO1997012212A1 (fr) 1995-09-27 1995-09-27 Dispositif a capteurs multispectral

Publications (1)

Publication Number Publication Date
EP0852709A1 true EP0852709A1 (fr) 1998-07-15

Family

ID=8166102

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95933433A Withdrawn EP0852709A1 (fr) 1995-09-27 1995-09-27 Dispositif a capteurs multispectral

Country Status (3)

Country Link
US (1) US5926282A (fr)
EP (1) EP0852709A1 (fr)
WO (1) WO1997012212A1 (fr)

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US6163377A (en) * 1999-07-23 2000-12-19 Cv Us, Inc. Colorimeter
US7554586B1 (en) 1999-10-20 2009-06-30 Rochester Institute Of Technology System and method for scene image acquisition and spectral estimation using a wide-band multi-channel image capture
AU2001259975A1 (en) * 2000-05-22 2001-12-03 Shaowen Song N-valued optical logic architecture and method
US6778303B2 (en) 2000-05-22 2004-08-17 Shaowen Song N-valued optical logic architecture and method
DE60227183D1 (de) * 2001-09-21 2008-07-31 Datacolor Holding Ag Farbmesser
US7092088B2 (en) * 2002-12-04 2006-08-15 Raytheon Company Field multiplexed dispersive imaging spectrometer
CN101095043A (zh) * 2004-11-16 2007-12-26 数据色彩控股股份公司 设计有集成cie彩色匹配滤波器的比色计的方法
US7593105B2 (en) * 2004-11-17 2009-09-22 Datacolor Holding Ag Tristimulus colorimeter having integral dye filters
US7580130B2 (en) * 2005-03-23 2009-08-25 Datacolor Holding Ag Method for designing a colorimeter having integral illuminant-weighted CIE color-matching filters
US7474402B2 (en) * 2005-03-23 2009-01-06 Datacolor Holding Ag Reflectance sensor for integral illuminant-weighted CIE color matching filters
US8081304B2 (en) 2006-07-31 2011-12-20 Visualant, Inc. Method, apparatus, and article to facilitate evaluation of objects using electromagnetic energy
DE102007012115A1 (de) 2006-11-30 2008-06-05 Osram Opto Semiconductors Gmbh Strahlungsdetektor
EP2187341A1 (fr) * 2008-11-12 2010-05-19 Fundación Robotiker Procédé pour la modélisation d'un spectre électromagnétique
US20100208266A1 (en) * 2009-02-17 2010-08-19 Colman Shannon Tristimulus colorimeter having integral dye filters
WO2013043737A1 (fr) * 2011-09-23 2013-03-28 Visualant, Inc. Système et procédé de capteur de milieu fluide
WO2013119824A1 (fr) 2012-02-10 2013-08-15 Visualant, Inc. Systèmes, procédés et articles apparentés aux symboles et indices lisibles par une machine
US8975594B2 (en) 2012-11-09 2015-03-10 Ge Aviation Systems Llc Mixed-material multispectral staring array sensor
US9316581B2 (en) 2013-02-04 2016-04-19 Visualant, Inc. Method, apparatus, and article to facilitate evaluation of substances using electromagnetic energy
US9041920B2 (en) 2013-02-21 2015-05-26 Visualant, Inc. Device for evaluation of fluids using electromagnetic energy
WO2014165003A1 (fr) 2013-03-12 2014-10-09 Visualant, Inc. Systèmes et procédés permettant une analyse de fluide à l'aide de l'énergie électromagnétique
US10580341B2 (en) 2015-02-11 2020-03-03 Apple Inc. Electronic device with color sensing ambient light sensor

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EP0081702A1 (fr) * 1981-11-25 1983-06-22 Kollmorgen Technologies Corporation Système électro-optique pour le contrôle de la couleur
JPS60169726A (ja) * 1984-02-13 1985-09-03 Omron Tateisi Electronics Co 色識別のための弁別基準の作成方法
US4653925A (en) * 1985-08-23 1987-03-31 Thornton Jr William A Method and apparatus for measuring any of a large number of characteristics of lamplight
DE3622043A1 (de) * 1986-07-01 1988-01-14 Georg Thoma Vorrichtung zur farbmessung
DE3933461A1 (de) * 1988-10-11 1990-04-26 Georg Diamantidis Elektronisches farberkennungssystem
US5218555A (en) * 1989-11-27 1993-06-08 Toyo Boseki Kabushiki Kaisha Method for judging a color difference using rules fuzzy inference and apparatus therefor
IL101612A0 (en) * 1992-04-16 1992-12-30 Electro Optics Ind Ltd Apparatus and method for inspecting articles such as agricultural produce
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Also Published As

Publication number Publication date
US5926282A (en) 1999-07-20
WO1997012212A1 (fr) 1997-04-03

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