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EP0730092B1 - Pompe pour pomper un fluide contenant un gaz liquéfié et dispositif comprenant une telle pompe - Google Patents

Pompe pour pomper un fluide contenant un gaz liquéfié et dispositif comprenant une telle pompe Download PDF

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Publication number
EP0730092B1
EP0730092B1 EP96810107A EP96810107A EP0730092B1 EP 0730092 B1 EP0730092 B1 EP 0730092B1 EP 96810107 A EP96810107 A EP 96810107A EP 96810107 A EP96810107 A EP 96810107A EP 0730092 B1 EP0730092 B1 EP 0730092B1
Authority
EP
European Patent Office
Prior art keywords
bearer
pump
bush
piston
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96810107A
Other languages
German (de)
English (en)
Other versions
EP0730092A1 (fr
Inventor
Claudio Tschopp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cryopump AG
Original Assignee
Cryopump AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cryopump AG filed Critical Cryopump AG
Publication of EP0730092A1 publication Critical patent/EP0730092A1/fr
Application granted granted Critical
Publication of EP0730092B1 publication Critical patent/EP0730092B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F04B53/162—Adaptations of cylinders
    • F04B53/164—Stoffing boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F04B53/162—Adaptations of cylinders
    • F04B53/166—Cylinder liners
    • F04B53/168—Mounting of cylinder liners in cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763—Start-up or control of the process; Details of the apparatus used
    • F25J3/04866—Construction and layout of air fractionation equipments, e.g. valves, machines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/84—Processes or apparatus using other separation and/or other processing means using filter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2235/00—Processes or apparatus involving steps for increasing the pressure or for conveying of liquid process streams
    • F25J2235/02—Processes or apparatus involving steps for increasing the pressure or for conveying of liquid process streams using a pump in general or hydrostatic pressure increase
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2290/00—Other details not covered by groups F25J2200/00 - F25J2280/00
    • F25J2290/62—Details of storing a fluid in a tank
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the invention relates to a pump for pumping a fluid containing liquefied gas.
  • Such a pump also referred to as a cryogenic pump
  • a cryogenic pump can be used, for example, to pump a cryogenic fluid that consists at least in part of at least one liquefied gas - such as liquid nitrogen, oxygen, hydrogen, argon or liquid air - and possibly also still has gaseous fluid.
  • the pump can also be used to pump liquefied butane or propane.
  • the pump can be designed, for example, to pump fluid from a reservoir into a container or any device and to increase the pressure of the fluid from a value of, for example, at most 1.5 MPa to, for example, 15 to 50 MPa.
  • a pump known from EP-A 0 294 322 has a drive device with a support and a pump housing. This has an elongated, sleeve-shaped carrier fastened to the support and a socket partially inserted therein, which is closed at its end protruding from the carrier by an end element.
  • a piston which is displaceable in the bush is connected to a movable part of the drive device by a piston rod.
  • the inner surface of the sleeve-shaped carrier has annular grooves in which seals for sealing the piston rod are seated.
  • the carrier, the bushing and the end element are located in a container, the wall of which is a shell which is tightly connected to the carrier in the vicinity of the drive device and has a shell detachably connected to it by screws.
  • the two shells have an inner wall, an outer wall and an evacuated space between them.
  • the inlet of the pump is connected through the interior of the container and two flow paths, each with a check valve, to a pump chamber which is present in the socket and adjoins the end face of the piston.
  • the pump chamber is also connected to a primary outlet via a check valve.
  • the container has a secondary outlet through which fluid evaporated during operation flows out of the container.
  • This pump has proven itself in itself. However, the manufacture and assembly of the wall consisting of several parts and having evacuated intermediate spaces of the container containing most of the sleeve-shaped carrier and sleeve increases the manufacturing costs of the pump. In addition, the maintenance of the known pump causes a relatively large amount of work and long downtimes. If, for example, the socket and the piston are to be cleaned or if one of the seals attached to the piston or in the sleeve-shaped carrier or part of a check valve is to be replaced, the two shells of the container have to be separated from one another, and then connected again and a number of screws and Loosen the nuts and then tighten them again.
  • a pump known from DE-B 1 169 973 for pumping a liquefied gas has an elongated, hollow support, a bushing which is partly located in the interior of the support and a displaceable piston.
  • the bushing has two collars which bear against the inner surface of the carrier and is separated from the inner surface of the carrier by a space between them.
  • a reservoir is connected to the entrance opening into the intermediate space via a feed line.
  • the socket contains one on the front of the Piston adjacent pump chamber, which is connected to a primary outlet of the pump via a check valve.
  • the carrier is provided with a secondary outlet which is connected to the intermediate space and is connected to the reservoir via a return line.
  • the piston is hollow and has an opening on its end face which can be closed with an axially displaceable closure element and forms a valve together with the latter.
  • Said intermediate space is connected to the cavity present in it by radial holes in the wall of the bushing and by elongated holes in the wall of the hollow piston.
  • the section of the carrier containing the bush has a large outer diameter in comparison with the diameters of the bush and the piston and a large outer surface adjacent to the surroundings of the pump. Furthermore, the portion of the bushing containing the pump chamber protrudes from the carrier. A lot of heat can therefore flow from the surroundings of the pump through the carrier and the end section of the socket protruding therefrom into the carrier and the socket. This heats up the cryogenic fluid so that a lot of fluid evaporates.
  • the secondary outlet is located at the same longitudinal section of the beam as the inlet and is connected to it at the highest point of the intermediate space. Furthermore, the cross-sectional area of the space is much larger than that Passage cross-sectional area of the entrance. There is therefore no defined fluid flow in the intermediate space.
  • the intermediate space can therefore contain relatively warm liquid or gas bubbles at various points, it being possible for this warm liquid and these gas bubbles to remain in the intermediate space for a long time.
  • the liquid flowing through the holes of the bushing into this and the cavity of the piston is displaced back and forth when the piston is displaced, but the volume of the cavity remains constant and is constantly relatively large. Gas bubbles can therefore also enter the cavity of the piston and remain in it for a relatively long time.
  • gas bubbles present in the intermediate space and in the cavity of the piston reduce the efficiency of the pump and can even cause the liquid flow to break off. This known pump therefore does not work reliably and is in particular hardly suitable for long-term operation.
  • the reservoir often still contains solid, fine, contaminant particles dispersed in the liquefied gas, which, for example, consist of a carbon compound and, together with the liquefied gas, can enter the carrier, the bushing and the cavity of the piston. Since no defined, strong flow occurs in the intermediate space of the carrier and also in relatively large areas of the cavity of the piston of the pump according to DE-B 1 169 973, contamination particles can build up in the interior of the carrier and in the piston deposit so that the pump has to be dismantled and cleaned frequently.
  • the liquefied gas which, for example, consist of a carbon compound and, together with the liquefied gas
  • the invention has for its object to overcome disadvantages of the known pumps.
  • the aim is in particular to enable reliable operation of the pump with good efficiency over a long period of time.
  • the pump should be inexpensive to manufacture and allow simple maintenance, which requires only brief interruptions in operation.
  • the invention further relates to a device according to claim 12.
  • the support 1 shows a support 1 and a simplified pump 2 with a drive device 3.
  • the latter has a support 4 which is stationary during operation of the pump.
  • the support 4 has a base 4a standing on the support 1 and, for example, fastened thereon, a motor housing 4b and a hollow, sleeve-shaped connecting section 4c projecting horizontally from the latter. Its end section facing away from the motor housing 4b, which can also be seen in FIG. 2, is provided with an internal thread 4d.
  • the drive device 3 has an electric motor with a rotor (not visible) arranged in the motor housing 4b, the shaft of which is connected to a crank or eccentric disk. This in turn is connected via a connecting rod or the like to a movable part 5 of the drive device 3, namely a part 5 that can be moved back and forth, which is indicated in FIG. 2.
  • a pump housing 7 shown in FIG. 1 in view and in FIGS. 2 and 3 in section defines together with the connection section 4c of the support 4 has a horizontal axis 8 and has three fluid connections, namely an inlet 9, a primary or pressure outlet 10 and a secondary or Return line output 11 and an elongated support 13, which is generally rotationally symmetrical with respect to the axis 8 and can also be seen in FIG. 4.
  • the carrier 13 is formed by an integral, approximately cylindrical sleeve which is open at both ends and consists of a metallic material, namely of stainless steel.
  • the carrier 13 has a wall or a jacket with a carrier outer surface 13a and a carrier inner surface 13b which surrounds the axis 8 and in cross section a carrier interior.
  • the end section of the carrier outer surface 13a located on the left in FIG. 2 is provided with an external thread 13c.
  • the carrier inner surface 13b has, at the end of the carrier 13 on the left in FIG. 2, a short section provided with an internal thread 13d, to which a relatively long, narrower cylindrical section 13e adjoins. This is connected via a radial shoulder surface 13f to a further cylindrical section 13g. This is provided with an annular groove 13h which adjoins the shoulder surface 13f and forms a section thereof.
  • the wall of the carrier 13 has a hole 13m radial to the axis 8, which opens into the annular groove 13h at the lowest circumferential point thereof.
  • the entrance 9 is formed by the hole 13m and a connecting element which projects into it and is tightly connected to the support 13, namely welded, which consists, for example, of a connecting piece or pipe piece or the like.
  • the carrier 13 also has a radial hole 13p with respect to the axis 8, which opens into the cylindrical section 13a at the highest circumferential point of the further cylindrical section 13g in the vicinity of its end facing away from the annular groove 13h.
  • the secondary or return line output 11 is formed by the hole 13p and a connecting element, for example welded, which projects into it and is tightly connected to the carrier 13 for example, consists of a nozzle or pipe section or the like.
  • the mouth of the secondary or return outlet 11 opening into the interior of the carrier is thus above the mouth at which the inlet 9 opens into the interior of the carrier.
  • the carrier 13 is detachably connected to the support 4 and namely screwed with its external thread 13c into the internal thread 4d of the support 4.
  • the screw connection is secured with a lock nut 14 screwed onto the external thread 13c.
  • a metallic sleeve 15 for example made of aluminum, with a number of annular and disk-shaped ribs, which serve to improve the heat exchange with the surroundings, is fastened, namely pressed on.
  • a cylindrical jacket 16 is connected in the vicinity of the sleeve 15 and in the vicinity of the secondary or return outlet 11 tightly with annular sections of the carrier outer surface 13a - for example welded - and bounded together with that located between these latter sections
  • Section of the carrier outer surface 13a has a cavity 17 with an annular cross section.
  • the cavity 17 is penetrated by the connecting element of the inlet 9 and is sealed off from the surroundings of the pump 2.
  • the jacket 16 is provided with a nozzle which forms a connection 18. This has a closable passage through which the cavity 17 can be evacuated by the pump manufacturer and / or possibly later by the user of the pump before it is used.
  • the socket 19 has a wall or a jacket with a Bushing outer surface 19a, a bushing inner surface 19b and two annular, radial, flat end surfaces 19c, 19d, which are located in FIGS. 2, 3, 5 at the left and right ends of the bushing.
  • the socket outer surface 19a has a short, generally cylindrical section 19e at its end on the left in FIGS. 2, 3, 5. This is separated by a collar 19r projecting outward from it from a thinner section 19f which is smooth and completely cylindrical.
  • a generally cylindrical section 19g which has axial ribs 19h distributed along its circumference evenly over the circumference and grooves 19i present between them, at least three and for example eight ribs 19h and the same number of grooves 19i being present.
  • the ribs 19h have curved surfaces in cross section, which together define a cylindrical surface whose diameter is larger than the diameter of the smooth, cylindrical section 19f.
  • the grooves 19i are arcuate in cross-section and, for example, are dimensioned such that their lowest point continuously adjoins the cylindrical section 19f.
  • the section 19g which has the ribs 19h and grooves 19i, is connected at its ends to the radial, annular end surface 19d of the bushing by a conical transition surface which is inclined away from it.
  • the end faces of the ribs 19h are formed by sections of these conical transition surfaces.
  • the length of the ribs 19h and the grooves 19i is preferably at least 30% and, for example, 50% to 70% of the total length of the bush.
  • the inner surface 19b of the socket has a conical section 19k that tapers away from it. This is followed by a smooth cylindrical section 19m, the length of which is at least 50% and, for example, at least or approximately 70% of the total length of the bushing 19.
  • the inner surface 19b of the socket has a short, graduated extension at the end of the socket located on the right in FIGS. 2, 3 19n with two cylindrical sections.
  • the generally cylindrical portion 19e of the sleeve outer surface is provided with an annular groove 19s.
  • the bushing 19 has at least one radial hole 19p and namely a plurality of holes 19p distributed uniformly around its circumference. These lead from the bottom of the annular groove 19s through the casing of the bushing and open into the conical section 19k of the bushing inner surface 19b.
  • the bushing 19 consists of a one-piece body made of a metallic material, namely hardened, stainless steel.
  • the bushing 19 is located completely in the interior of the sleeve-shaped carrier 13 and for the most part in the region of the carrier interior enclosed in cross section by the further cylindrical section 13g of the carrier inner surface 13b. With its radial, flat end surface 19c, the bush lies against the radial, flat shoulder surface 13f of the carrier 13.
  • the end of the bushing 19 located on the right in FIGS. 2 and 3 protrudes a little into that longitudinal region of the carrier interior into which the hole 13p opens.
  • the pump housing 7 has an end element 21 at its end facing away from the drive device 3 and located on the right in FIGS. 1 to 3. This has a thinner end section 21a, a middle, thicker section 21b and an even thicker end section 21c.
  • the thinner end portion 21a and at least most of the middle end portion 21b are located in the interior of the carrier 13, while the thicker end section 21c is located outside the latter.
  • the middle section 21b is provided with an external thread 21d. This is screwed into the internal thread 13i of the carrier 13.
  • the end member 21 has an axial, continuous, stepped hole 21e.
  • the thinner end section 21a of the end element projects into the enlargement 19n of the inner surface of the bushing 19 with at most a small amount of radial play.
  • the end section 21a presses on its end face with a radial, flat shoulder surface on the seal 20 and presses the bushing 19 against the shoulder surface 13f via the seal 20.
  • the socket 19 is thus centered coaxially to the axis 8 by the abutting sections of the carrier inner surface 13 and the socket outer surface 19a and secured by the end element 21 against axial displacement, clamped and releasably connected to the carrier.
  • the end section 21c of the end element 21 which is located outside the carrier 13 has approximately the same diameter as the end of the sleeve-shaped carrier 13 which is on the right in FIGS. 1 to 3 and has a radial end face which faces it and is separated or possibly separated by a narrow gap on this radial ring surface.
  • the connection of the end element 21 to the carrier 13 is sealed with a seal 22 arranged in the vicinity of the outer ends of the threads 13i, 21d.
  • the end element 21 seals both the interior of the carrier 13 and the interior of the socket 19 at the end of the interior concerned that is remote from the drive device 3.
  • An annular filter 23 is attached to the cylindrical section 19e of the outer surface 19a of the sleeve and is secured and held against axial displacements by the radial shoulder surface 13f of the carrier 13 and a radial surface of the collar 19r.
  • the end element 21 is provided with a check valve 25.
  • a nipple 26 has an external thread 26a which is screwed into the internal thread 21f of the end element 21.
  • the nipple 26 is sealed with an annular seal 27 and forms the primary or pressure outlet 10 and together with the end element 21 the valve housing of the check valve 25.
  • the nipple 26 has a continuous, axial, stepped hole, which together with a section of the hole 21e forms the passage 28 of the check valve 25.
  • An axially displaceable closure element 30 is arranged in the passage 28. This consists of fluorine-containing plastic and is pressed by a spring 31 against a shoulder surface of the passage 28 serving as a valve seat.
  • a seal insert 33 shown separately in FIG. 6 has a sleeve-shaped, dimensionally stable, metallic seal holder 34. This has a collar 34a at one end and an external thread 34b in the vicinity thereof. The outer surface of the seal holder 34 has at least one annular groove and, for example, two.
  • the seal holder 34 also has a through axial hole 34c. This has a cylindrical middle section which extends over most of the length of the seal holder.
  • the hole 34c has a generally likewise cylindrical extension at its end facing the drive device 3 and a short narrowing at its other end.
  • the seal holder 34 is inserted from the left side of FIG. 2 - ie from the side of the carrier 13 facing the drive device 3 - into the interior of the carrier 13 and is screwed with its external thread 34b to the internal thread 13d of the carrier 13, so that the collar 34a abuts the end of the sleeve-shaped carrier 13 which is on the left in FIG. 1.
  • the seal holder 34 extends to the right approximately through the entire narrower cylindrical portion 13e of the carrier inner surface 13b almost up to the shoulder surface present in the carrier 13f.
  • the annular grooves present in the outer surface of the seal holder 34 contain annular seals 35, for example made of a plastic, which seal the seal holder against the section 13e of the carrier inner surface 13b.
  • the axial hole 34c includes various parts shown in the figure, including a circlip 42 located near the left end of the seal holder 34. Between this and the other end of the seal holder, an ice scraper 36, a guide bush 37, ring-shaped seals 38, 39, 40, for example with different cross-sectional shapes, some disc springs 41 and some other ring-shaped or sleeve-shaped parts are arranged around the guide bush 37 and to keep the seals 38, 39, 40 in the positions provided.
  • the guide bush 37 consists of a metallic shell, namely bronze, and a fluorine-containing plastic.
  • the seals 38, 39, 40 are made of plastic.
  • the remaining parts arranged in the seal holder consist of metallic materials. For the rest, it should be noted that the parts arranged in the seal holder have been omitted in FIGS. 2 and 3 for simplification.
  • a metallic, for example bronze piston 43 is slidably guided in the socket 19.
  • the piston 43 has a generally cylindrical outer surface which is provided with some annular grooves.
  • ring-shaped seals 44, 45 are interrupted at a peripheral point. These have different cross-sectional shapes and consist, for example, of a fluorine-containing polymer.
  • the piston 43 has an axial blind hole 43a which opens into the end face of the piston facing the end element 21 and has a conical opening section there.
  • the piston 43 has holes 43b penetrating into it from its end facing away from the end element 21 and inclined towards the axis 8 and opening into the base section of the blind hole 43a.
  • the piston 43 has one end of a multi-part piston rod 47 connected, which protrudes through the sealing insert 33 from the carrier 13.
  • the piston rod 47 is slidably guided by the guide bush 37 of the sealing insert 33.
  • the seals 35, 38, 39, 40 held outside or inside the seal holder 34 connect the piston rod 47 indirectly and tightly to the carrier inner surface 13b and thus seal the lead-out of the piston rod from the area of the carrier interior containing the bushing 19.
  • the piston rod 47 has at its end facing away from the piston 43 and protruding from the carrier 13 and the sealing insert 33 an axial blind hole 47a with an internal thread and is there detachably connected, namely screwed, to the movable part 5 of the drive device 3 which can be moved parallel to the axis 8 .
  • the piston rod could also be releasably connected to the drive device by other connecting means.
  • a somewhat simplified guide body 51 is fastened in the axial blind hole 43a of the piston 43, which has a guide hole coaxial with the axis 8 and some axial through holes distributed around it.
  • a closure element 52 has a shaft which is slidably guided in the guide hole of the guide body 51 and a plate.
  • a spring 53 enclosing the shaft of the closure element 52 engages with one end on the guide body 51 and with the other end on a nut screwed onto the shaft and exerts a force directed away from the end element 21 on the closure element 52.
  • the holes 43a, 43b, of the piston, the guide body 51, the closure element 52 and the spring 53 together form a check valve 55 with a passage penetrating the piston.
  • the closure element 52 is drawn in its release position in FIG.
  • the closing element 52 can be moved from the drawn release position to the left by the spring 53 into a closed position in which the plate of the closure element 52 rests on the conical mouth section of the blind hole 43a serving as a valve seat.
  • the mutually facing sections of the carrier inner surface 13b and the socket outer surface 19a which are spaced apart from one another in some cases, delimit a free space 61 which is formed by a region of the carrier interior.
  • the gap 61 has a gap region 61a between the cylindrical sections 19e and 19f of the bush outer surface 19a and the part of the cylindrical section 13g of the carrier inner surface 13b opposite these sections 19e, 19f.
  • This is ring-shaped in cross section, encloses the bushing 19 without interruption along the entire circumference thereof and is also referred to as the first, ring-shaped interior area of the carrier.
  • the passage of the entrance 9 opens into the lowest point of the annular space region 61a. This is through the filter 23 and the annular groove 19s and the holes 19p of the bushing 19 with a support located in FIGS. 2 and 3 to the left of the piston 43 and at least to a large extent between the bushing inner surface 19b and the piston rod 47. Interior area connected. This is referred to below as the suction chamber 62.
  • the size of the volume of the suction chamber 62 is changed when the piston is moved.
  • the volume of the suction chamber is substantially smaller than when the piston is in its end position closest to the end element 21.
  • the suction chamber 62 is in turn through the piston through the check valve 55 present in and / or on the piston to a pump chamber 63 which is enclosed in cross-section by the inner surface 19b of the sleeve and is delimited by the mutually facing surfaces of the end element 21 and the piston 43.
  • the axial dimension and the volume of the pump chamber 63 change when the piston is displaced and in particular become at least approximately zero when the piston is displaced into its end position closest to the end element 21.
  • the pump chamber 63 is connected via the check valve 25 to the nipple 26 forming the primary or pressure outlet 10.
  • the channel-shaped interspace regions 61b open at their ends closer to the end element 21 into a free, second annular interior region 64 of the carrier interior, which exists between the cylindrical section 13g of the carrier inner surface 13b and a surface of the end element that is spaced apart from this .
  • the interior area 64 is connected to the passage of the secondary or return outlet 11.
  • the inlet 9 is thus connected on the one hand via the suction chamber 62 and the check valve 55 in the piston 43 to the pump chamber 63 and on the other hand through the intermediate space 61 adjoining sections of the outer surface 19a of the sleeve to the secondary or return outlet 11.
  • the passages of the input 9 and the secondary or return output 11 are connected to the latter in the vicinity of the opposite ends of the socket 19 at points of the socket 19 and of the intermediate space 61, which are parallel to the axis 8 and at a distance from one another . This distance is preferably at least 50% and for example at least 70% of the length of the socket 19.
  • a reservoir 71 can also be seen in FIG. 1. This consists, for example, of a double-walled tank with an interior that is sealed off from the surroundings on all sides.
  • the reservoir 71 also contains a cryogenic fluid 72 a liquid phase and a gaseous or vapor phase above the liquid level.
  • the reservoir 71 is preferably arranged above the pump 2 and is connected to the inlet 9 of the pump 2 by a supply line 73 opening into its interior near its deepest point and by a valve 74 present therein.
  • the supply line 73 has a section running approximately vertically downward from the reservoir 71 and at its lower end an arc which forms a siphon.
  • the line then runs slightly inclined upwards to the inlet 9, the valve 74 being arranged, for example, between the siphon and the inlet 9.
  • the primary or pressure output 10 of the pump 2 is connected to a filling device 76 by a line 75, for example.
  • the secondary or return line output 11 is connected to the reservoir 71 by a return line 77 with a valve 78.
  • the return line 77 has a section inclining slightly inclined away from the outlet 11 and containing the valve 78, a siphon formed by an arc and a section rising approximately perpendicularly away from it. This opens above the mouth of the feed line 73 into the interior of the reservoir 71, at least the mouth section of the return line being exactly vertical and having a mouth open at the top.
  • the maximum outer diameter of the longitudinal section of the carrier 13, and preferably the entire carrier, containing the bushing 19 is at most 3 times, preferably at most 2.5 times and, for example, approximately 2 times the outer diameter of the piston 43.
  • the outer diameter of each enclosing the bushing 19 in cross section Section of the carrier 13 is furthermore at most 50% larger than the outer diameter of the section of the bushing present in the relevant section of the carrier.
  • the dimension of the space 61 measured radially to the axis 8 is preferably at least essentially in the entire space at most 20% and for example at most or about 10% of the Diameter of the socket 19 at the relevant point of the socket and the space.
  • the passage of the inlet 9 and the passage of the secondary or return outlet 11 preferably have passage cross-sectional areas of approximately the same size as the lines 73, 77.
  • the channel-shaped intermediate regions 61b together have a passage cross-sectional area which is at most 3 times, better at most 2 times and, for example, 50% to 150% of the passage cross-sectional areas of the inlet 9 and the secondary or return outlet 11.
  • the annular space region 61a, the suction chamber 62 and the annular carrier interior region 64 also have relatively small passage cross-sectional areas and volumes.
  • the pressure of the fluid present in the reservoir 71 is preferably greater than the ambient air pressure and is preferably at most 1.5 MPa and, for example, about 0.3 MPa to 1 MPa.
  • the reservoir 71 should preferably contain so much of the liquid phase of the fluid 72 that the liquid level is above the mouth of the return line 77.
  • the reservoir 71 then forms, together with the sections of the lines 73, 77 connected to its interior, a so-called thermosiphon tank.
  • the pressure of the fluid present in the reservoir is greater at the mouth of the feed line 73 than at the mouth of the return line 77 due to the force of gravity acting thereon.
  • the drive device 3 moves the piston 43 back and forth during operation of the pump 2 along the axis 8 in the bushing 19 guiding the piston 43, so that the piston alternately carries out a suction stroke and a pressure stroke.
  • the piston 43 is displaced away from the end element 21 toward the drive device 3 during the suction stroke in the direction indicated by an arrow in FIGS. 2 and 3.
  • the two valves 74 and 78 are opened before the pump 2 is started, so that at least in part and preferably as completely as possible liquid fluid 72 can flow from the reservoir 71 through the inlet 9 into the intermediate space 61 of the pump.
  • the plate of the closure element 52 is lifted off the valve seat of the check valve 55, as is shown in FIGS. 2 and 3.
  • the volume of the suction chamber 62 is reduced, while the volume of the pump chamber 63 is increased.
  • the piston then conveys fluid from the suction chamber 62 into the pump chamber 63 through the holes 43a, 43b of the piston 43 which form the passage of the check valve 55. If necessary, fluid can still flow from the reservoir 71 into the suction chamber 62.
  • the check valve 25 is closed during the suction stroke.
  • the check valve 55 closes while the check valve 25 is opened.
  • the piston presses fluid out of the pump chamber 63 through the passage of the check valve 25 to the primary or pressure outlet 10, the pressure of the fluid being increased, for example, 10 times to 100 times or possibly even more.
  • This at least partly and for example for the most part or completely liquid fluid then flows through the line 75 to the filling device 76 and is evaporated with it for example first and then at least approximately with the pressure generated by the pump 2 in the gaseous state or possibly without previous evaporation Filled in pressure container in liquid state.
  • the volume of the suction chamber 62 is increased so that the piston sucks fluid from the reservoir 71 through the inlet 9, the annular space region 61a, the filter 23, the annular groove 19s and the holes 19p into the suction chamber 62.
  • the longitudinal section of the carrier containing the bushing 19 has - compared to the diameter of the piston 43 - only a relatively small circumference and only a relatively small outer surface.
  • the evacuated cavity 17 also insulates the longitudinal region of the sleeve-shaped carrier 13, which contains the largest part of the bushing and part of the piston rod 47, from the surroundings. There is therefore only relatively little heat from the air surrounding the pump housing 7 through the carrier 13 and the end element 21 into the regions of the carrier interior containing cryogenic fluid and to the bushing 19. Furthermore, a little heat from the surroundings and from the drive device 3 through the piston rod 47 to the piston 43. In addition, part of the mechanical work performed by the piston during pumping can be converted into heat.
  • the fluid flowing along the sleeve outer surface 19a through the intermediate space and the interior area 64 insulates the bushing 19 thermally against the carrier 13 and the end element and absorbs heat conducted from the surroundings through the carrier 13 and the end element 21. Furthermore, the fluid flowing through the intermediate space 61 and the interior area 64 also possibly absorbs heat from the bushing 19 and heat conducted through its jacket from the interior of the bushing and from the piston 43. The fluid flowing along the bush outer surface 19a through the intermediate regions 61a, 61b and through the inner region 64 is thus heated.
  • the originally liquid phase of this fluid present in the intermediate space 61 may even partially or temporarily be completely evaporated, for example in the start-up phase, the fluid absorbing heat of vaporization and cooling the surfaces that come into contact with the fluid.
  • the heat absorbed by the fluid in the form of a temperature increase and / or heat of vaporization is carried away by the fluid flowing out through the secondary or return outlet 11 from the pump 2 and then reaches the reservoir 71.
  • the fluid flowing from the inlet 9 through the intermediate space 61 and through the interior area 64 thus enables effective thermal insulation and cooling of the bushing 19 without the part of the carrier 13 containing the bushing 9 and the end element 21 in a liquid, cryogenic fluid Containers must be arranged.
  • the design and the arrangement of the bushing 19 in the carrier 13 ensure that a defined, pronounced continuous and / or pulsating fluid flow results permanently on practically all free interior areas of the carrier which contain cryogenic fluid. Accordingly, during the operation of the pump, neither highly heated liquid nor any bubbles of gaseous fluid that may be present remain in any area of the carrier interior for a long time. Furthermore, when the pump is operating, fluid coming from the inlet 9 is sucked into the suction chamber 62 over a short distance.
  • the fluid entering the suction chamber is therefore relatively cold and at least approximately completely liquid.
  • the fluid present in the suction chamber 62 at the end of a pressure stroke is largely conveyed through the piston into the pump chamber 63.
  • practically no gas bubbles or warm, liquid fluid can remain in the bushing and in the piston for a long time.
  • the pump can continuously pump fluid with high, approximately constant efficiency for a long time and increase its pressure.
  • the fluid flowing along the sleeve outer surface through the intermediate space 61 and the interior area 64 cools the sleeve 19 when the pump 2 is started, the area of the end element 21 adjoining the carrier interior, the piston 43 and others when the pump is in operation Parts coming into contact with the pumped fluid rapidly drop to a temperature at which the liquid phase of the fluid pumped to the primary or pressure outlet 10 remains liquid. In this case, only relatively little liquid fluid has to be evaporated in order to cool the parts coming into contact with the fluid to be pumped from normal room temperature to a temperature which makes it possible to pump liquefied gas.
  • the filter 23 has a mesh size of 0.2 mm to 0.3 mm, for example, so that it retains large, solid particles, such as metal chips and the like.
  • the fluid stored in the reservoir can possibly contain fine, particulate impurities, for example particles of carbon compounds. Such fine contaminant particles have sizes of a few micrometers, for example. If such particles are dispersed in the liquid phase of the fluid present in the reservoir, such particles can get into the pump and also through the filter 23 together with the fluid. Because the fluid entering the pump is all fluid Containing interior areas of the pump flow continuously or at least intermittently, practically all fine impurity particles transported into the pump by the fluid are also transported out of the pump again by the fluid and not deposited in the pump.
  • the two valves 74, 78 can be closed.
  • the arrangement and design of the reservoir 71 and the lines 73, 77 then prevent the lines 73, 77 from freezing due to, for example, moist air entering them.
  • the different parts of the pump 2 are relatively easy to manufacture and can be assembled with little time and effort.
  • the end element 21 only needs to be screwed with its external thread 21d into the internal thread 13i of the sleeve-shaped carrier 13 and then also holds the bushing 19 previously inserted into the carrier interior.
  • the nipple 26 also only needs to be screwed into the end element 21.
  • the sealing insert 33 with all the seals and other parts belonging to it can be pushed and screwed into the carrier 13 as a whole.
  • the piston rod 47 can be quickly connected to the movable part 5 of the drive device 3 and the carrier 13 can be connected to the connecting section 4c of the Screw supports 4.
  • the pump 2 When servicing the pump 2, it may be necessary to make certain areas of the carrier interior accessible, for example in order to clean the filter 23 and / or possibly other surfaces and parts located within the carrier or for a worn or otherwise damaged part. such as one of the seals 44 attached to the piston, 45 or one of the seals 38, 40 engaging on the piston rod.
  • the pump 2 can be dismantled as necessary for such maintenance work and then reassembled. If, for example, the socket 19 is to be made accessible and removed, all that has to be done is to unscrew the end element 21 from the sleeve-shaped carrier 13. The bushing is then displaceable and can be pushed out of and / or pulled out of the carrier interior, for example by moving the piston at the end of the carrier interior previously closed by the end element 21.
  • the pump can be modified in several ways.
  • the channel-shaped gap regions 61b parallel to the axis of the bushing can be replaced by channel-shaped gap regions which run wholly or partly around the bushing along helical lines. It may even be possible to provide only a single, channel-shaped space region running along a helical line. Furthermore, it would be possible to form the portion of the socket outer surface lying against the carrier inner surface by a smooth cylindrical surface and to provide the carrier inner surface with ribs and / or grooves, so that the carrier inner surface and the socket outer surface have abutting sections and sections separated from each other by a space. Furthermore, the holes 19p of the bushing can be replaced by at least one notch cut into the jacket of the bushing from the end face 19c and preferably by several such notches.
  • the entrance can possibly open into a ring-shaped, first carrier interior area that surrounds the axis 8, which partially surrounds the socket 19 and partly protrudes beyond the end of the socket 19 on the left in FIGS. 2 and 3, or even completely is located to the left of the end of the bushing 19 facing away from the pump chamber 63 and encloses the piston rod between the bushing 19 and the sealing insert 33.
  • fluid guide means could be provided which have a check valve and connect the input of the pump through the end element 21 to the pump chamber.
  • This check valve could then be designed similarly to the corresponding check valve of the pump known from the pump cited in the introduction EP-A 0 294 322.
  • the metallic carrier 13 and / or the metallic jacket 16 and / or the metallic end element 21 could possibly also be provided with thermal insulation made of a non-metallic, thermally insulating material.
  • the return line 77 can open into the interior of the reservoir 71 above the liquid level.
  • the filling device 76 can be replaced, for example, by a tank for holding the fluid pumped and compressed by the pump, or by any device that requires a high pressure, cryogenic fluid to operate.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)

Claims (12)

  1. Pompe pour pomper un fluide (72) contenant un gaz liquéfié, comprenant une pièce portante (13), une chemise (19) disposée au moins partiellement dans cette pièce, un piston (43) disposé coulissant dans cette chemise suivant un axe (8), une entrée (9), une sortie primaire (10) et une sortie secondaire (11), la pièce portante (13) présentant une surface interne (13b) et la chemise (19) présentant une surface externe (19a) qui est soutenue par endroits par la surface interne (13b) de la pièce portante et séparée par endroits de celle-ci par un espace intermédiaire (61), le piston (43) étant adjacent à une chambre de pompage (63), l'entrée (9) et la sortie secondaire (11) étant reliées à l'espace intermédiaire (61) et l'entrée (9) étant reliée à travers une soupape antiretour (55) à la chambre de pompage (63), laquelle est reliée à travers une soupape antiretour (25) à la sortie primaire (10), caractérisée en ce que la sortie secondaire (11) est reliée à l'espace intermédiaire (61) à un endroit situé à distance, suivant l'axe (8), de l'endroit où l'espace intermédiaire (61) est relié à l'entrée (9).
  2. Pompe selon la revendication 1, caractérisée en ce que la chemise (19) se trouve entièrement et sur toute sa longueur dans un volume intérieur entouré en section par la pièce portante (13).
  3. Pompe selon la revendication 1 ou 2, caractérisée en ce qu'elle comprend une chambre d'aspiration (62) située au moins en partie à l'intérieur de la chemise (19) et séparée par le piston (43) de la chambre de pompage (63), chambre d'aspiration (62) qui est reliée à travers le piston (43) et par l'intermédiaire de la soupape antiretour (55) mentionnée en premier à la chambre de pompage (63), que l'entrée (9) et la chambre d'aspiration (62) sont reliées à une première zone du volume intérieur de la pièce portante (13) et que cette première zone est reliée par au moins une zone (61b) de l'espace intermédiaire (61), s'étendant suivant l'axe (8), à une deuxième zone (64) dudit volume intérieur, deuxième zone qui est reliée à la sortie secondaire (11), laquelle sortie est de préférence reliée à la deuxième zone (64) du volume intérieur de la pièce portante (13) à un endroit situé plus haut que l'endroit où l'entrée (9) débouche dans la première zone du volume intérieur de la pièce portante (13).
  4. Pompe selon la revendication 3, caractérisée en ce que la première zone du volume intérieur de la pièce portante (13) est formée en partie par une zone annulaire (61a) de l'espace intermédiaire (61) qui entoure la chemise (19) en section, que la deuxième zone (64) dudit volume intérieur est annulaire et entoure en section une extrémité de la chemise (19) contenant la chambre de pompage (63) et/ou un embout (21) fermant la chemise (19) à cette extrémité, et que la chambre d'aspiration (62) a un volume dont la grandeur est changée par des coulissements du piston (43), la chemise (19) possédant de préférence une paroi latérale entourant l'axe (8) et présentant au moins un orifice (19p) ou une entaille faisant communiquer la première zone dudit volume intérieur avec la chambre d'aspiration (62).
  5. Pompe selon une des revendications 1 à 4, caractérisée en ce que l'espace intermédiaire (61) comporte plusieurs zones en forme de canaux (61b) qui sont réparties autour de la chemise (19) et s'étendent par exemple parallèlement à l'axe (8) ou possédent éventuellement la forme d'une ligne hélicoïdale.
  6. Pompe selon une revendication 5, caractérisée en ce que la dimension des zones en forme de canaux (61b) de l'espace intermédiaire, dimension qui est mesurée suivant l'axe (8), correspond à au moins 30 % et de préférence à au moins 50 % de la longueur totale de la chemise (19).
  7. Pompe selon une des revendications 1 à 6, caractérisée en ce que la pièce portante (13) présente une ouverture fermée par un embout (21) à son extrémité située plus près de la sortie primaire (10), que la pièce portante (13) et l'embout (21) portent des filetages (13i, 21d) vissés ensemble, que l'embout (21) fait saillie dans la pièce portante (13), attaque la chemise (19) à l'intérieur de cette pièce, presse cette chemise contre un épaulement (13f) de la pièce portante (13) et ferme la chambre de pompage (63) sur son côté éloigné de la face de tête du piston (43), et que la chemise (19) peut être retirée de la pièce portante (13), à travers ladite ouverture, après que l'embout (21) a été enlevé de la pièce portante (13).
  8. Pompe selon une des revendications 1 à 7, caractérisée en ce que l'endroit où la sortie secondaire (11) est reliée à l'espace intermédiaire (61), est séparé de l'endroit où l'espace intermédiaire (61) est relié à l'entrée (9) d'une distance, mesurée suivant l'axe (8), qui correspond à au moins 50 % et par exemple à au moins 70 % de la longueur totale de la chemise (19).
  9. Pompe selon une des revendications 1 à 8, caractérisée en ce qu'une enveloppe (16) entourant la pièce portante (13) en section est fixée dans cette pièce, avec laquelle elle délimite un espace creux (17) fermé de façon étanche vis-à-vis de l'environnement et qui est évacué et/ou relié à un raccord (18) permettant son évacuation, espace (17) qui s'étend au moins sur la majeure partie de la longueur de la chemise (19).
  10. Pompe selon une des revendications 1 à 9, caractérisée en ce que la dimension de l'espace intermédaire (61) mesurée radialement par rapport à l'axe (8) correspond essentiellement, à chaque endroit de cet espace, à tout au plus 20 % et, de préférence, à tout au plus 15 % du diamètre de la chemise (19) à l'endroit concerné, et que la partie longitudinale de la pièce portante (13) contenant la chemise (19) possède un diamètre extérieur maximal correspondant tout au plus à 3 fois et de préférence à tout au plus 2,5 fois le diamètre extérieur du piston (43).
  11. Pompe selon une des revendications 1 à 10, caractérisée en ce qu'un dispositif d'entraînement (3) pourvu d'un support (4) lui est coordonné, que la pièce portante (13) est formée par un fourreau d'un seul tenant, s'étendant à partir du support (4) jusqu'à la chambre de pompage (63) au moins, que le support (4) et la pièce portante (13) sont reliés de façon amovible entre eux, que le piston (43) est relié à une pièce mobile (5) du dispositif d'entraînement (3) par l'intermédiaire d'une tige de piston (47) s'étendant à travers le volume intérieur de la pièce portante (13) et qu'un insert d'étanchéité (33) est prévu pour étancher la tige de piston (47) vis-à-vis de la pièce portante (13), insert qui porte plusieurs joints annulaires (38, 40) attaquant la tige de piston (47), l'insert étant situé au moins partiellement dans la pièce portante (13), que la pièce portante (13) et l'insert d'étanchéité (33) sont reliés de façon amovible entre eux et que l'insert d'étanchéité (33) peut être retiré de la pièce portante (13) par l'extrémité de celle-ci reliée au support (4), le support (4) et la pièce portante (13) présentant de préférence des filetages (4d, 13d) vissés ensemble et la pièce portante (13) et l'insert d'étanchéité (33) présentant de préférence des filetages (13d, 34b) vissés ensemble.
  12. Dispositif possédant une pompe selon une des revendications 1 à 11, caractérisé en ce qu'il comprend un réservoir (71) dont le volume intérieur est prévu pour emmagasiner un fluide cryogénique (72) qui est au moins en partie liquide, que le réservoir (71) est relié par une conduite d'amenée (73) à l'entrée (9), que la sortie secondaire (11) est reliée par une conduite de retour (77) au réservoir (71) et que la conduite de retour (77) débouche dans le volume intérieur du réservoir (71) par une embouchure située plus haut que l'endroit où la conduite d'amenée (73) est reliée au volume intérieur du réservoir (71), la conduite d'amenée (73) ainsi que la conduite de retour (77) contenant par exemple une soupape (74, 78) et un siphon et l'embouchure de la conduite de retour (77) étant située par exemple au-dessous du niveau de liquide du fluide (72).
EP96810107A 1995-03-03 1996-02-26 Pompe pour pomper un fluide contenant un gaz liquéfié et dispositif comprenant une telle pompe Expired - Lifetime EP0730092B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH61695 1995-03-03
CH616/95 1995-03-03

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EP0730092A1 EP0730092A1 (fr) 1996-09-04
EP0730092B1 true EP0730092B1 (fr) 1997-12-29

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US (1) US5860798A (fr)
EP (1) EP0730092B1 (fr)
DE (1) DE59600061D1 (fr)

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EP1703128B1 (fr) * 2005-03-17 2012-05-09 Vanzetti Engineering S.r.l. Pompe cryogénique
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EP2402608A1 (fr) 2010-07-02 2012-01-04 Delphi Technologies Holding S.à.r.l. Pompe pour dosage de fluides
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CN113302398A (zh) * 2018-09-24 2021-08-24 伯克哈特压缩机股份公司 迷宫式活塞压缩机
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FR3115334B1 (fr) * 2020-10-19 2022-10-07 F2M Pompe pour fluide cryogénique

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Publication number Publication date
EP0730092A1 (fr) 1996-09-04
DE59600061D1 (de) 1998-02-05
US5860798A (en) 1999-01-19

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