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EP0703364A1 - Procédé et dispositif pour commander une micropompe - Google Patents

Procédé et dispositif pour commander une micropompe Download PDF

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Publication number
EP0703364A1
EP0703364A1 EP95112161A EP95112161A EP0703364A1 EP 0703364 A1 EP0703364 A1 EP 0703364A1 EP 95112161 A EP95112161 A EP 95112161A EP 95112161 A EP95112161 A EP 95112161A EP 0703364 A1 EP0703364 A1 EP 0703364A1
Authority
EP
European Patent Office
Prior art keywords
driver signal
valve structure
micropump
pump
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95112161A
Other languages
German (de)
English (en)
Other versions
EP0703364B1 (fr
Inventor
Roland Zengerle
Axel Richter
Stefan Kluge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of EP0703364A1 publication Critical patent/EP0703364A1/fr
Application granted granted Critical
Publication of EP0703364B1 publication Critical patent/EP0703364B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/04—Motor parameters of linear electric motors
    • F04B2203/0404—Frequency of the electric current

Definitions

  • the present invention relates to a method and a device for controlling a micropump by means of a driver signal such that a conveying direction defined by a valve structure is reversed.
  • Micro diaphragm pumps are known for example from WO-93/05295. One of the pumps described there is shown in Fig. 1.
  • This micro-diaphragm pump 100 comprises a two-part displacement unit 102 and also a two-part valve unit 104.
  • the two parts of the displacement unit 102 comprise a flexible pump diaphragm 106 and a rigid counter electrode 108.
  • a so-called drive chamber 110 is formed between the pump diaphragm 106 and a counter chamber 108.
  • the pump membrane 106 is attracted by the counter electrode 108.
  • the volume of the pump chamber 112 increases and a fluid to be pumped is sucked in via an inlet.
  • the pump membrane 106 relaxes in its output region and displaces the fluid to be pumped into the outlet 116.
  • Two passive check valves 118, 120 which define a preferred direction for the fluid flow, result in a directional pumping action when the displacement unit 102 is periodically activated from inlet 114 to outlet 116 of the pump.
  • the behavior of the valves 118, 120 is quasi static, ie the position of the movable valve part results at all times from the hydrostatic pressure difference applied across the valve.
  • Known methods for controlling such a micro diaphragm pump enable a fluid to be pumped in the preferred direction defined by the valves 118, 120.
  • micromembrane pump In technical applications of the micromembrane pump, the situation often arises in which fluids, for example, both have to be transported to a sensor element and have to be removed again. This occurs, for example, in chemical analysis, in which liquids both have to be transported to a sensor element and have to be removed again. So far, a micro-diaphragm pump has to be used both for the forward transport and for the removal, these micro-diaphragm pumps being arranged in opposite directions. The need for the two micro diaphragm pumps increases the complexity of such analytical systems and their manufacturing costs and makes it difficult to fill them with a fluid when operating these systems.
  • the present invention is based on the object of creating a method and a device for controlling a micropump which make it possible to reverse the conveying direction defined by a valve structure.
  • the present invention provides a method for controlling a micro-diaphragm pump by means of a driver signal, the micro-diaphragm pump having a delivery direction defined by a valve structure, with the method step of applying the driver signal to the excitation frequency Micro diaphragm pump, the excitation frequency being in the range above a resonance of a system formed from the moving parts of the micro diaphragm pump and the fluid to be pumped, as a result of which the delivery direction defined by a valve structure is reversed.
  • the present invention provides a device for controlling a micro-diaphragm pump by means of a driver signal, the micro-diaphragm pump having a delivery direction defined by a valve structure, with a device for generating the driver signal with an excitation frequency which is in the range above a resonance of one of the movable ones Parts of the micro-diaphragm pump and the system to be pumped fluid is located, whereby the delivery direction defined by a valve structure is reversed.
  • An advantage of the present invention is that for practical applications in which both a transport and a transport of fluids to an element is required, only a micro-diaphragm pump has to be used, whereby the required space is reduced.
  • Another advantage is that the filling of such systems with a fluid is made easier.
  • Yet another advantage is that the manufacturing cost of such systems can be significantly reduced.
  • the method according to the invention and the device according to the invention make it possible to reverse the pumping direction in micro-diaphragm pumps (see FIG. 1) with so-called passive check valves 118, 120.
  • the displacement unit 102 is acted upon by a driver signal which has an operating frequency in the region of a resonance, which is essentially defined by the movable valve parts, which lies above this resonance.
  • this resonance is a resonance of a system which is formed from the moving parts of the micro diaphragm pump (106, 118, 120) and from the fluid to be pumped.
  • This behavior corresponds to that of an oscillatory, mechanical system, which is stimulated to a forced oscillation by an external force.
  • the amplitude of the vibration has the known resonance behavior.
  • the curves 200 and 202 shown in FIG. 2 represent the course of the deflection and the phase shift with different damping or quality factors.
  • the course of the curve 200 is assigned a quality factor of 3 and the course of the curve 202 is assigned a quality factor of 1 .
  • the deflection and phase shift of a movable valve part shown in FIG. 2 applies to a resonance of this part of 3000 Hz.
  • the curves in the first line indicate the so-called exciting pressure
  • the signal curves in the middle line indicate the opening state of the movable valve
  • the signal curves in the lower row show the time-dependent flow
  • the respective y-scales in any Units are shown.
  • the second effect is that the valve can only be opened in the positive direction (see second line of Fig. 3), i.e. the valve is completely closed for half a period.
  • the micro diaphragm pump In the frequency range from 1 Hz to 1 kHz, the micro diaphragm pump is in its so-called standard operating range, which is shown by arrow 400. In this standard operating range 400, the micro diaphragm pump has a positive pumping rate ( ⁇ > 0), which corresponds to a forward pumping effect.
  • the micro diaphragm pump In the frequency range from 2 kHz to 6 kHz, which is represented by the arrow 410, the micro diaphragm pump has a negative pumping rate ( ⁇ ⁇ 0), which corresponds to a backward pumping effect.
  • the resonance frequency of the movable valve parts used in a micro diaphragm pump can be varied by a suitable change in the shape of the valves used. This makes it possible to influence the frequency range 410 in which the negative pumping rate occurs.
  • the frequency range 410 where a negative pumping rate occurs is the frequency range where there is a phase difference of about 90 degrees to about 180 degrees between the drive signal and the deflection of the valves.
  • the frequency range in which a positive pumping rate occurs is that frequency range in which a phase difference of approximately 0 degrees to 90 degrees occurs between the driver signal and the deflection of the valve structure.
  • FIG. 5 shows a block diagram of the arrangement of a device for generating a driver signal and a micro diaphragm pump.
  • the device according to the invention for controlling a micro-diaphragm pump 510 by means of a driver signal comprises a device 500 for generating the driver signal with an excitation frequency which lies in the range above a resonance of the system formed from the moving parts of the micro-diaphragm pump 510 and the fluid to be pumped.
  • the driver signal is over one or more Signal lines 520 applied to the micro diaphragm pump 510.
  • the driver signal generating device generates a second driver signal with a second excitation frequency, which is in a range in which a phase difference of approximately 0 degrees to 90 degrees occurs between the driver signal and the deflection of the valve structure, in order to fluid to be pumped into that defined by the valve structure Pump direction of pumping.
  • the method according to the invention and the device according to the invention are not limited to micro-diaphragm pumps that use check valves.
  • the application of the invention to micro diaphragm pumps which use passive valves of a different design is readily possible.
  • the application of the present invention is not limited to a micro diaphragm pump that uses two valves.
  • the use of micro diaphragm pumps that use one valve or more than two valves is easily possible.
  • piezoelectric and pneumatic or thermopneumatic drive mechanisms for the micro diaphragm pump are also possible.
  • a two-phase thermal drive is also contemplated, in which a liquid is heated in a drive chamber, whereby a vapor bubble is formed, through which a pump membrane is actuated by displacement.
  • the thermal two-phase drive enables higher pressures to be generated than a purely thermopneumatic drive.
  • a piston displacer can also be considered in addition to a membrane displacer.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP95112161A 1994-09-22 1995-08-02 Procédé et dispositif pour commander une micropompe Expired - Lifetime EP0703364B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4433894A DE4433894A1 (de) 1994-09-22 1994-09-22 Verfahren und Vorrichtung zur Ansteuerung einer Mikropumpe
DE4433894 1994-09-22

Publications (2)

Publication Number Publication Date
EP0703364A1 true EP0703364A1 (fr) 1996-03-27
EP0703364B1 EP0703364B1 (fr) 1997-04-23

Family

ID=6528930

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95112161A Expired - Lifetime EP0703364B1 (fr) 1994-09-22 1995-08-02 Procédé et dispositif pour commander une micropompe

Country Status (2)

Country Link
EP (1) EP0703364B1 (fr)
DE (2) DE4433894A1 (fr)

Cited By (70)

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WO1998051928A1 (fr) * 1997-05-12 1998-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Procede de production d'un corps de pompe a micromembrane
WO1998051929A1 (fr) * 1997-05-12 1998-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pompe a micromembrane
WO1999037400A1 (fr) * 1998-01-22 1999-07-29 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Dispositif de microdosage
EP0844395A3 (fr) * 1996-11-25 2001-01-10 Vermes Mikrotechnik GmbH Micropompe réversible
EP1065378A3 (fr) * 1999-06-28 2001-05-02 California Institute of Technology Système de micropompes ou soupapes flexibles
DE19837434C2 (de) * 1997-08-20 2001-05-17 Hitachi Ltd Automatische chemische Analyseeinrichtung
EP1195523A3 (fr) * 1999-06-28 2003-01-08 California Institute of Technology Système de micropompes ou soupapes flexibles
US6818395B1 (en) 1999-06-28 2004-11-16 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences
US6899137B2 (en) 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6929030B2 (en) 1999-06-28 2005-08-16 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6951632B2 (en) 2000-11-16 2005-10-04 Fluidigm Corporation Microfluidic devices for introducing and dispensing fluids from microfluidic systems
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US7118910B2 (en) 2001-11-30 2006-10-10 Fluidigm Corporation Microfluidic device and methods of using same
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US7143785B2 (en) 2002-09-25 2006-12-05 California Institute Of Technology Microfluidic large scale integration
US7192629B2 (en) 2001-10-11 2007-03-20 California Institute Of Technology Devices utilizing self-assembled gel and method of manufacture
US7195670B2 (en) 2000-06-27 2007-03-27 California Institute Of Technology High throughput screening of crystallization of materials
US7214298B2 (en) 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
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US7220549B2 (en) 2004-12-30 2007-05-22 Helicos Biosciences Corporation Stabilizing a nucleic acid for nucleic acid sequencing
US7232109B2 (en) 2000-11-06 2007-06-19 California Institute Of Technology Electrostatic valves for microfluidic devices
US7244402B2 (en) 2001-04-06 2007-07-17 California Institute Of Technology Microfluidic protein crystallography
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US7291512B2 (en) 2001-08-30 2007-11-06 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
US7294503B2 (en) 2000-09-15 2007-11-13 California Institute Of Technology Microfabricated crossflow devices and methods
US7297518B2 (en) 2001-03-12 2007-11-20 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences by asynchronous base extension
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US7326296B2 (en) 2001-04-06 2008-02-05 California Institute Of Technology High throughput screening of crystallization of materials
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US7368163B2 (en) 2001-04-06 2008-05-06 Fluidigm Corporation Polymer surface modification
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US7459022B2 (en) 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US7476363B2 (en) 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US7476734B2 (en) 2005-12-06 2009-01-13 Helicos Biosciences Corporation Nucleotide analogs
US7482120B2 (en) 2005-01-28 2009-01-27 Helicos Biosciences Corporation Methods and compositions for improving fidelity in a nucleic acid synthesis reaction
EP2027923A1 (fr) * 2007-07-19 2009-02-25 Formulatrix, Inc. Ensemble de dosage et procèdé de distribution des fluides
US7526741B2 (en) 2000-06-27 2009-04-28 Fluidigm Corporation Microfluidic design automation method and system
US7583853B2 (en) 2003-07-28 2009-09-01 Fluidigm Corporation Image processing method and system for microfluidic devices
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US7645596B2 (en) 1998-05-01 2010-01-12 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
US7666361B2 (en) 2003-04-03 2010-02-23 Fluidigm Corporation Microfluidic devices and methods of using same
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US7704735B2 (en) 2004-01-25 2010-04-27 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
JP2010151717A (ja) * 2008-12-26 2010-07-08 Aida Eng Ltd マイクロ流路チップ
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US7867454B2 (en) 2003-04-03 2011-01-11 Fluidigm Corporation Thermal reaction device and method for using the same
US7981604B2 (en) 2004-02-19 2011-07-19 California Institute Of Technology Methods and kits for analyzing polynucleotide sequences
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US8105553B2 (en) 2004-01-25 2012-01-31 Fluidigm Corporation Crystal forming devices and systems and methods for using the same
US8282896B2 (en) 2003-11-26 2012-10-09 Fluidigm Corporation Devices and methods for holding microfluidic devices
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US11022470B2 (en) 2015-12-08 2021-06-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Free-jet dosing system
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US7397546B2 (en) 2006-03-08 2008-07-08 Helicos Biosciences Corporation Systems and methods for reducing detected intensity non-uniformity in a laser beam
DE102013015453A1 (de) 2012-12-21 2014-07-10 Thomas Magnete Gmbh Hubkolbenpumpe mit zwei Förderrichtungen
US20220252062A1 (en) * 2019-07-23 2022-08-11 Q T Flow Ltd Tuned micro check valves and pumps

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EP0844395A3 (fr) * 1996-11-25 2001-01-10 Vermes Mikrotechnik GmbH Micropompe réversible
US6261066B1 (en) 1997-05-12 2001-07-17 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Micromembrane pump
WO1998051929A1 (fr) * 1997-05-12 1998-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pompe a micromembrane
WO1998051928A1 (fr) * 1997-05-12 1998-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Procede de production d'un corps de pompe a micromembrane
US6395638B1 (en) * 1997-05-12 2002-05-28 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Method for producing a micromembrane pump body
US6599477B1 (en) 1997-08-20 2003-07-29 Hitachi, Ltd. Chemical analysis apparatus
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US7214298B2 (en) 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
WO1999037400A1 (fr) * 1998-01-22 1999-07-29 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Dispositif de microdosage
US6416294B1 (en) 1998-01-22 2002-07-09 Hans-Schickard-Gesellschaft Fur Angewandte Forschung E.V. Microdosing device
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