EP0799910A1 - Electroforming cell with adjusting device - Google Patents

Abstract

The apparatus comprises a container (50) for electrolyte (58) and a container (56) for anode material with an essentially plane outlet surface (89) which is passable for metal ions of the anode material. The surface faces the surface of the carrier element (87) to be coated. The apparatus also includes a carrier element holder (86) with a shaft (84) and drive (54) on the lid (52) of the electrolyte container. The surface of the carrier element facing the anode container outlet surface (89) is adjustable relative to the latter.

Description

The invention relates to a device for the galvanic deposition of a metal layer on a support, with a container for holding the electrolyte, with an anode container filled with anode material with an essentially flat exit surface for metal ions of the anode material, which serves on the support surface facing the anode container and serves as the cathode Carrier are deposited, the carrier surface being arranged obliquely to the vertical and substantially parallel and at a distance from the outlet surface of the anode container facing it, with a carrier holder which is connected to a driven shaft extending in the direction of the normal to the carrier surface, which is in a drive device is mounted on a lid of the container, the lid being rotatably mounted about an axis of rotation of a pivoting device which is fastened on the side of the container opposite the anode container.

Such a device is used, for example, for the galvanoplastic manufacture of pressing tools or molds, in particular made of nickel. These pressing tools are used in the compression molding or injection molding of plates, for example compact discs (so-called CD's), laser vision plates and other information-bearing plates. The aforementioned forms, which include primary forms such as the so-called "glass master" and impressions from the glass master, are intermediate forms for the production of the pressing tools. The shapes carry information in relief on their surfaces. The surface structure is transferred to the press tool by galvanoplastic molding. The information contained in this surface structure is embossed on the surface of a plastic material by the use of the pressing tool during injection molding or compression molding. In the case of the optical disc, to which the compact disc also belongs, the relief structure modulates the light of a laser beam so that the information present on the surface of the plastic body can be read out.

In the manufacture of the pressing tools or the molds, a metal layer, generally a nickel layer, is deposited on a carrier, either an insulating carrier with a thin electrically conductive layer, for example made of glass, or a metallic carrier, for example made of nickel, the each carrier surface has the relief-like structure which contains the information to be read out. The smallest information unit, the so-called "pit", has a local wavelength in the micrometer range, the track spacing between adjacent information tracks also being in the micrometer range. Since the carrier surface can contain several billion information units and the associated fine structures in the micrometer range are to be transferred to the metal layer, the metal deposition process is subject to the highest demands. The deposited metal layer should be very fine-grained and free of tension; it's supposed to be a relatively large one Thickness of the deposited layer can be achieved, for example for the production of compact discs, the pressing tool produced by metal deposition should have a thickness of 295 µm ± 5 µm; in addition, the deposition process should run at high speed. Furthermore, the device for galvanic deposition should have a small size and be easy to use. An important requirement in the production of galvanoplastic metal layers on a carrier is the uniformity of the layer thickness. It may only fluctuate within small limits over the entire area of the carrier. If these limits are exceeded, the product quality of the optical disks produced with this metal layer suffers.

A device of the type mentioned is known from EP-A-0 058 649. The anode container filled with anode material is arranged at an angle to the vertical. Its exit surface is essentially parallel to the carrier surface, which is held by a carrier holder driven by a shaft. The metal layer deposited on the carrier with the known device shows considerable thickness fluctuations when viewed over the surface of the carrier.

It is an object of the invention to provide a device for the electrodeposition of a metal layer, the thickness variation of which is reduced over a relatively large area of the carrier.

This object is achieved for the known device in that the carrier surface is adjustable with respect to the opposite exit surface of the anode container.

The invention is based on the consideration that an uneven electrical current line distribution in the space between the anode and the carrier surface connected as the cathode is essentially responsible for the thickness fluctuation is. It is desirable that the streamlines between the exit surface of the anode container and the carrier surface run as uniformly and homogeneously as possible in the manner of parallel rays. Since in practice the electrical resistance along lines between the exit surface and the carrier surface is not constant, the uniformity of the streamline distribution is also disturbed, which leads to a different growth in the thickness of the metal layer on the carrier surface. By changing the position of the support surface relative to the position of the exit surface of the anode container, for example by changing the distance, by different inclination of the surfaces on both sides to one another, etc., the resistance along lines between the exit surface and the support surface and thus the streamline distribution can be influenced. In this way, this streamlined distribution on the carrier surface can be evened out, as a result of which the thickness of the metal layer also increases evenly.

In theory, it is possible to cover both surfaces, i.e. the carrier surface and the exit surface to change and adjust to each other at the same time. In practice, however, it is advantageous to keep either the support surface or the exit surface in a stable position and to change the position of the other surface. The carrier surface is preferably suitable as a position-variable surface, since it is connected to the cover via the carrier holder, which protects the container for holding the electrolyte against the ingress of foreign bodies during operation. The position of this cover can be adjusted from the outside, or the position of the carrier holder attached to the cover can be easily changed from the outside.

A preferred embodiment of the invention is characterized in that the axis of rotation of the cover lies in a plane which runs parallel to the shaft axis and intersects a clamping plate of the carrier holder, the cover being closed State is displaceable towards the anode container in order to reduce the distance between the carrier surface and the exit surface of the anode container.

In practice it has been shown that the speed of the deposition of metal ions is increased with a reduced distance between the carrier surface and the exit surface of the anode container. This is due to a reduction in the electrical resistance along the connecting straight line between the carrier surface and the exit surface. If the voltage between the anode and cathode remains unchanged, the current and thus the number of metal ions transported per unit of time are increased. An inhomogeneous streamline distribution has a disadvantageous effect on the thickness fluctuation of the deposited layer with a reduced distance between the carrier and the anode container. To even out the streamline distribution, an insulating screen with an opening is arranged between the anode container and the carrier. Due to the proximity of this panel to the carrier, care must be taken that the clamping plate holding the carrier does not hit this panel during its pivoting movement when the lid is opened. The measures of the above-mentioned further development ensure, on the one hand, that the distance between the carrier surface and the outlet surface of the anode container is small during operation; on the other hand, the lid can be pulled open in the direction away from the anode container, so as to increase the distance between the carrier surface and the exit surface. When the cover is pivoted, the edge of the clamping plate can be guided past the panel at a sufficient distance.

Another aspect of the invention, which is important for the uniform layer thickness build-up on the carrier surface, relates to the anode container. As mentioned, the general aim is that the exit surface for metal ions is plane-parallel to the carrier surface. The anode container contains the material to be deposited in the form of pieces of material, for example pieces of nickel. During the operation of the galvanic deposition cell, the anode container is refilled with pieces of material in order to maintain a high degree of filling in the anode container. This is necessary so that the titanium material from which the anode container is made is not dissolved in the electrolyte, but remains passivated.

It has now been found that known anode containers are deformed after only a short use, i.e. the originally cuboid anode container bulges during operation or its outer surface becomes wavy. This is presumably due to the compression of the anode material that is removed during the deposition process. Particularly when the front of the anode container containing the exit surface deforms, the streamline distribution between the exit surface and the carrier surface changes, which leads to a layer thickness fluctuation over the surface of the deposited metal layer.

In order to solve this problem, according to one aspect of the invention, a spacer made of titanium is arranged between the rear wall and the front wall of the anode container.

This spacing device ensures that the exit surface maintains a constant distance with respect to the rear wall of the anode container. Once the plane parallelism between the exit surface and the support surface has been set, it remains intact even during operation with the anode material being compressed.

The spacer device preferably comprises a plurality of titanium screws which connect the front wall and the rear wall to one another and run in titanium spacer sleeves, the screw heads preferably being arranged on the front side and associated threaded holes on the rear wall. This type of spacer is simple and easy to implement. In areas where the front wall If the outlet surface becomes slightly bulged or wavy during operation, the number of screws and spacers can be larger than in other areas.

Another aspect of the invention relates to the power supply to the anode container. To generate a high deposition rate, considerable currents, e.g. 90 amperes to be fed to the anode container. Secure contacting must therefore be guaranteed. Furthermore, the anode line and the contact device for establishing the contact between the anode line and the anode container should be arranged in the electrolyte container in such a way that the current-carrying elements do not influence the flow line distribution in the electrolyte as far as possible.

From EP-A-0 058 649 already mentioned, it is known to guide the anode line in the lower region of the electrolyte container and to provide terminals as contact devices which establish the electrical connection to the anode line. To reduce the contact resistance, the contact pressure is often generated by a screw connection. Such a screw connection is susceptible to electrolyte encrustations, which have the consequence that the nuts or screws are incorrectly fitted and the thread is injured and unusable. The connection between the contact device and the anode line then does not have the required contact pressure, so that the contact point is overheated when there is a high current flow and even destruction of the deposition cell in the vicinity of the contact point can occur through melting of plastic. The problem thus arises of creating a device for the galvanic deposition of a metal layer on a support, in which the current supply to the anode container is carried out safely and the anode container can be easily assembled without complicated handling.

According to the invention, the contact device is now provided as a spring strip which can be plugged into and removed from the anode line form, which can be brought into contact with the anode lead under the action of spring force. The required contact pressure is provided by the female connector, so that a loose contact point with the above-mentioned disadvantages cannot arise. The female connector can easily be plugged onto the anode lead, which means that the anode container can be replaced quickly without the need for laborious assembly measures. Due to the spring pressure of the female connector, the contact point is released in each case during the plug-on process. As a result, electrolyte encrustations are avoided at the contact point and a low contact resistance is generated.

Fig. 1

schematisch ein wichtiges Anwendungsgebiet der Erfindung, bei dem Formen und Preßwerkzeuge für die Compactdisc-Herstellung durch Metallabscheidung erzeugt werden,

Fig. 2

eine Ansicht einer Galvanikanlage, in welche eine Abscheidungszelle einbezogen ist,

Fig. 3

eine schematische Ansicht der Abscheidungszelle mit einem schwenkbaren und verschiebbaren Deckel,

Fig. 4

eine teilweise geschnittene Ansicht durch die auf dem Deckel angeordnete Verstellvorrichtung und die Welle,

Fig. 5

eine Draufsicht auf die Stellplatte zum Justieren der Antriebseinheit und der von ihr angetriebenen Welle,

Fig. 6

eine Draufsicht auf den Deckel bei demontierter Antriebseinheit,

Fig. 7

eine Draufsicht auf die Edelstahlplatte mit Schwenkvorrichtung,

Fig. 8

eine Seitenansicht des Aufbaus nach Figur 7,

Fig. 9

eine Draufsicht auf die verschiebbare Grundplatte der Schwenkvorrichtung,

Fig. 10

verschiedene Betriebszustände der Schwenkvorrichtung beim Öffnen und Schließen des Deckels,

Fig. 11

ein anderes Ausführungsbeispiel der Schwenkvorrichtung in verschiedenen Betriebsphasen,

Fig. 12

einen Schnitt durch den Anodenbehälter mit Federleiste und Anodenleitung, und

Fig. 13

eine Vorderansicht auf den Anodenbehälter mit als Abstandsvorrichtung dienenden Titanschrauben.

Exemplary embodiments of the invention are explained in more detail below with reference to the drawings. In it show:

Fig. 1

schematically an important field of application of the invention, in which molds and pressing tools for compact disc production are produced by metal deposition,

Fig. 2

1 shows a view of a galvanic plant, in which a deposition cell is included,

Fig. 3

1 shows a schematic view of the deposition cell with a swiveling and sliding cover,

Fig. 4

a partially sectioned view through the adjusting device arranged on the cover and the shaft,

Fig. 5

a plan view of the positioning plate for adjusting the drive unit and the shaft driven by it,

Fig. 6

a plan view of the cover with the drive unit removed,

Fig. 7

a plan view of the stainless steel plate with swivel device,

Fig. 8

7 shows a side view of the structure according to FIG. 7,

Fig. 9

a plan view of the displaceable base plate of the swivel device,

Fig. 10

different operating states of the swivel device when opening and closing the cover,

Fig. 11

another embodiment of the swivel device in different operating phases,

Fig. 12

a section through the anode container with female connector and anode lead, and

Fig. 13

a front view of the anode container with titanium screws serving as a spacer.

Figure 1 shows schematically the production of a compact disc for audio applications. In the manufacturing process, molds are used whose metal layers are produced by electrodeposition in a device according to the invention. The quality of this metal layer is decisive for the quality of the finished product, i.e. for the playback quality of the audio signals stored on the compact disc.

The manufacturing steps can be roughly divided into four groups A, B, C, D, of which A relates to the manufacture of the glass master, B the manufacture of the pressing tool, C the pressing and D the finishing. The starting point for the production of the glass master is the generation of a master magnetic tape (step 10), audio information being stored digitally on the magnetic tape with the highest precision. For the production of the glass master (production steps group A) a thin photoresist is applied to a polished glass pane (steps 12 and 14). In the subsequent step 16, the photoresist is exposed by a bundled laser beam, the laser beam being modulated by the digital information on the master magnetic tape. In the subsequent development step 18, the exposed areas of the photoresist are removed - a relief-like photoresist structure remains on the glass pane. This structure contains the digital information taken over from the master magnetic tape in the form of pits. In the subsequent step 20, the relief-like surface structure is coated with a thin electrically conductive layer, for example a nickel layer. The so-called glass master for the compact disc is obtained as an intermediate product.

The next group B of manufacturing steps relates to the production of the press tool. In step 22, the so-called "father" is produced in a galvanic device according to the invention as a metal mold, with a thick nickel layer, e.g. with a thickness of 500 microns, is deposited in a galvanic process. The father now has a relief structure that is complementary to the glass master. The father can be used directly as the tool for making compact discs. Typically, in a further galvanoplastic process, the father creates a form of nickel called the "mother". The actual pressing tool is then derived from the mother in a further galvano process (step 26) as a negative image. The resulting shape is called "son" or "stamper" and serves as a pressing tool for mass production. It should be mentioned that, of course, several mothers or sons can be produced in order to be used in various manufacturing plants for compact disc production.

In the subsequent pressing (manufacturing steps group C), the in an injection molding process or in a compression molding process Transfer the relief structure on the press tool to plastic material (step 28). The digital information originally contained on the master magnetic tape (step 10) is now contained on the disk-shaped plastic material as a relief structure or as a so-called pit structure, a pit representing the smallest unit of information in the form of a depression in the surface of the plastic material.

In the subsequent finishing (manufacturing steps group D), a thin aluminum reflective layer is applied to the surface of the plastic material in a sputtering process. This reflection layer enables a laser scanning beam to be modulated when the information is read out, from which the original audio information is obtained. In the final manufacturing step 32, the compact disc is covered with a transparent protective layer which protects the reflection layer from damage and corrosion.

In the present example, the steps for producing an audio compact disc (audio CD) were described. The production of data compact discs, laser vision disks and other optical disks with information recorded in a pit structure is carried out in the same or similar manner.

The relief-like pit structure on the reflection layer of the compact disc has extremely small dimensions, for example the width of a pit is approximately 0.5 µm, the depth approximately 0.1 µm and the length varies from 1 to 3 µm, with the track spacing approximately 1.6 µm is. With these small structures, it is understandable that the highest demands are placed on the various electroplating steps for producing the various shapes, in particular also on the uniformity of the thickness of the metal layer over the entire surface. Excessive fluctuations in thickness in connection with the spraying process in the production of the compact disc result in poorer demolding and lead to problems when the protective lacquer is applied later. In addition, there is a large fluctuation in thickness to the fact that during the rapid rotation of the compact disc, the optical scanning sensor no longer regulates the height fluctuations resulting on the compact disc to a sufficient extent and a loss of information can occur.

FIG. 2 shows a view of an electroplating system 40, in which a deposition cell 42 is included. In this deposition cell 42, the various forms, such as fathers, mothers and matrices (sons), are produced by deposition of nickel metal. A cleaning system 44 for cleaning and filtering the electrolyte is located in the foot part of the electroplating system 40. Electrical control and power units for controlling the electroplating process are accommodated in the head part 46. The rectifiers for generating the high direct current required are computer-controlled. Components that are in contact with the electrolyte are made of polypropylene plastic or titanium. A clean room filter 48 is arranged above the deposition cell 42. As can be seen in FIG. 2, the deposition cell 42 has a container 50 with two outer walls which are inclined essentially at an angle to the vertical. The other outer walls, not shown, run vertically. A drive device 54 is arranged on a cover 52 of the container 50 and is described in more detail below. A removable cover plate 51 adjoins the cover 52, separated by a parting line 53. Within the container 50 there is an anode container 56 made of titanium, which is accessible to an operator when the cover plate 51 is open.

FIG. 3 shows a schematic view of the deposition cell 42 according to the invention. Within the container 50 filled with electrolyte 58, the two outer walls 60, 62 of which are inclined at 45 ° to the vertical, is arranged parallel to the outer wall 62 of the anode container 56, which is filled with nickel material in the form of pieces, also called pellets or flats is. On its upper side, the anode container 56 carries a female connector 66, which is in electrical contact with an anode line 68, which has a circular cross section. The female connector 66 can be easily detached from the anode line 68 so that the anode container 56 can be removed from the container 50 by an operator.

The lid 52 is connected to the base of the electroplating system 40 or to an edge part of the container 50 by a swivel device 70. The lid 52 can thus be raised in the direction of the arrow 72 in order to make the interior of the container 50 accessible. An adjusting device 74 is mounted on the cover 52, which has an angle plate 76 and an adjusting plate 78 connected to it by screws. The setting plate 78 carries the drive device 54, which contains a motor 82, which drives a drive shaft 84 via a transmission, to the end of which a clamping plate 86 is fastened. The carrier 87, on which nickel is deposited, is clamped on this clamping plate 86. By adjusting the screws of the adjusting device 74, the clamping plate 86 and thus the carrier 87 can be aligned parallel to the planar outlet surface 89 for nickel ions of the anode container 56 opposite it, or the distance between the carrier 87 and the anode container 56 can be finely regulated.

Between the clamping plate 86 and the anode container 56, a partition 88 is fixedly connected to the outer wall of the container 50 with a filter element 85. This filter element 85 prevents the entry of particles or sludge made of anode material into the opening of an opposite guide screen 90. The guide screen 90 has a handle 90a, which facilitates the insertion. An injection nozzle 92 is arranged below the guide orifice 90 and injects the cleaned electrolyte into the space between the guide orifice 90 and the carrier 87 spanned on the clamping plate 86. The electrolyte is supplied by a indicated supply pipe 94. The necessary removal of the electrolyte 58 is not shown in Figure 3 for reasons of clarity.

FIG. 4 shows a cross section of the upper part of the drive device 54 fastened to the cover 52. This upper part is fastened on the setting plate 78 by means of screws 96 in threaded holes 98. For a better understanding of the arrangement of the connecting elements on the setting plate 78, reference is made to FIG. 5, which shows a top view of the setting plate 78. Opposing the setting plate 78, the angle plate 76 is arranged at a distance a. The adjusting plate 78 is supported on the angle plate 76 by means of adjusting screws 100 (only one of which is shown in FIG. 4), which are guided in threaded bores 101. By turning the respective set screw 100, the angular position and spacing of the setting plate 78 relative to the angle plate 76 can be changed, and thus the position of the surface of the carrier 87 with respect to the exit surface 89 of the anode container 56 facing it can be adjusted. The setting plate 78 with the drive device 54 is fastened on the angle plate 76 by means of screws 103 through the through bores 105 in threaded holes 107. For a better overview, the through bores 105 can only be seen in FIG. 5 and the threaded holes 107 can only be seen in FIG. 6.

The angle plate 76 is welded or screwed to a solid stainless steel plate 102, which is connected to the cover 52 by means of screws 104. The stainless steel plate 102 is bent close to the swivel device 70 and fastened to the cover 52 by means of screws 104. The drive unit 55 partially projects into an oval opening 116 (cf. FIG. 6) of the cover 52 and the stainless steel plate 102 fastened thereon. In order to protect the drive device 54 from the electrolyte 58, it is surrounded by a protective cover 106. The shaft 84 provided with an insulating layer 108 is sealed against the penetration of the electrolyte by sealing elements 110. On Protective tube 112, which protrudes with its end below the mirror 114 of the electrolyte 58, serves as a splash guard when the shaft 84 is rotating.

FIG. 5 shows a plan view of the setting plate 78 with the threaded holes 98 for fastening the drive unit 55. The change in the angular position and the spacing position of the setting plate 78 from the angle plate 76 is carried out by the four screws 100 which are guided through the threaded holes 101. The through bores 105 arranged parallel to it at a short distance from it are provided for the four screws 103, which rigidly connect the drive device 54 to the angle plate 76. Two recesses 109, 109 are provided for weight reduction.

FIG. 6 shows a top view of the cover 52 with a stainless steel plate 102 and angled plate 76 with the drive device 54 removed and without a pivoting device 70. The cover 52 is screwed to the stainless steel plate 102 by means of screws 104. The threaded holes 107 in the angle plate 76 serve to fasten the setting plate 78 to it. The oval opening 116, into which the drive device 54 partially projects (see FIG. 4), is clearly visible. At the upper end of the stainless steel plate 102, threaded holes 118 are provided, with the aid of which a flange (not shown) can be fastened, on which a drive for opening and closing the cover 52 engages. The recesses 111 in the angle plate 76 serve to reduce weight.

FIG. 7 shows the stainless steel plate 102 with the swivel device 70 attached to it, which is shown as a partial drawing. The angle plate 76 on the stainless steel plate 102 has been omitted for a better overview. In this example, the stainless steel plate 102 contains threaded holes 105 for fastening the angle plate 76 by means of screws. FIG. 8 shows a side view of the construction according to FIG. 7. The swiveling device 70, which is symmetrical about the center line M1, has two extension pieces 120, which are welded onto the stainless steel plate 102. At the end of the respective extension piece 120 facing away from the stainless steel plate 102, an upper rotary bearing 122 is formed, in which a spacer element 126 is pivotably mounted, which extends over the entire width between the two extension pieces 120. The spacer element 126 has a lower pivot bearing 128, to which a hinge 134 is articulated. This hinge 134 is fastened by a screw 135 on a base plate 160 in a groove-like recess 161. The hinge 134 has an elongated hole 137, as a result of which it can be adjusted along the double arrow P1. The base plate 160 also has elongated holes 163, through which screws can be inserted in order to fasten them to the edge of the container 50 or to the frame of the electroplating system. The base plate 160 can thus be adjusted in the direction of the double arrow P2.

FIG. 9 shows a side view and a top view of the base plate 160 with the elongated holes 163. The grooves 161 contain threaded holes 161a for fastening the hinges 134.

FIG. 10 shows an exemplary embodiment of the swivel device 70 in different operating phases A, B, C when opening and closing the cover 52. The swivel device 70 is fastened to the stainless steel plate 102 by the extension piece 120, which via the upper pivot bearing 122, which contains the axis of rotation 124 , is connected to the spacer 126. This spacer element 126 is connected by the lower pivot bearing 128, which contains the lower axis of rotation 130, to the pivot lever 132, which is supported in the hinge 134. The hinge 134 comprises a pivot bearing 136 containing an axis of rotation 138 and is firmly connected to the base plate 160, which is only indicated in FIG. 10 and is preferably formed on the edge of the container 50. The pivot lever 132 has a lower stop surface 142 which, viewed counterclockwise, has a small acute angle w1 with the vertical (cf. Phase B) includes, as well as an upper, oblique stop surface 144, which, viewed clockwise, includes a small acute angle w2 with the vertical. On the spacer element 126, the stop surfaces 142, 144 are opposed by corresponding, continuously flat stop surfaces 146, 148.

The mode of operation of the pivoting device 70 is explained below on the basis of the operating phases A, B, C, the arrow G in the upper part of the image indicating the direction of the weight, that is to say the vertical. In the raised state according to operating phase A - the opening angle w3 in this example is approximately 50 ° - the stop surface 146 bears against the lower stop surface 142. The center line 127 of the spacer element 126 is then inclined slightly against the vertical by the angle w1, so that the stop 146 presses against the stop 142 due to the weight of the cover 52.

In the operating phase B (closed cover), the cover 52 is moved about the axis of rotation 124 in the direction of the arrow G, the contact of the stop surfaces 146 and 142 being maintained. There is a small distance b between the front edge of the pivot lever 132 and the angled stainless steel plate 102.

In the operating phase G, the cover 52 is moved in the direction of the arrow 150 until the stop surface 148 comes into contact with the upper stop surface 144. Due to the inclination of the stop surface 144 by the angle w2, the pivot bearing 124 moves to the right, so that the distance b is increased. In order to achieve a height adjustment, the swivel lever 132 rotates clockwise around the axis of rotation 138 by a small angle w4. The arrangement according to FIG. 7 causes the carrier 87 clamped on the clamping plate 86 to be at a distance from the outlet surface 89 of the anode container facing it 56 reduced, whereby the deposition process can be accelerated. Thus on the carrier 87 built up a nickel layer with a high total current while maintaining the same electrical voltage.

In order to open the lid 52, it is shifted in the direction opposite the arrow 150 (cf. operating phase B) and then raised (operating phase A). The distance between the surface of the clamping plate 86 facing the anode container 56 and the guide screen 90 (see FIG. 3) is increased by moving in the direction opposite the arrow 150, so that the clamping plate 86 guides the guide screen 90 past the opening of the cover 52 can be without the risk that the clamping plate 86 or the baffle 90 are injured.

FIG. 11 shows a further exemplary embodiment of the swivel device 70 in different operating phases A, B, C. The same parts are identified with the same name. The spacer element 126 has a lower stop surface 152 and a rear stop surface 156, which in the operating phases A and B abuts an oblique stop surface 157 of the hinge. The lower stop surface 152 of the spacer element 126 comes into contact with a flat stop surface 158 on the base plate 160 in the operating phase C. In the operating phase A, the cover 52 is raised, the rear stop surface 156 coming into contact with the stop surface 157.

In the operating phase B, the cover 52 is lowered, the contact between the stop surfaces 156 and 157 being maintained. The distance b between the base plate 160 and the angled stainless steel plate 102 results. In the operating phase C, the cover 52 is moved in the direction of the arrow 150, so that the stop surfaces 152 and 158 interact. The distance b is thus increased.

As can be seen particularly well in the operating phase C, the axis of rotation 124 does not lie on the center line 162 of the spacer element 126. This ensures that when moving of the lid 52, the extension piece 120 is slightly raised in a circular path, which reduces the sliding resistance of the lid 52 with respect to the container 50.

FIG. 12 shows a cross section through the upper part of the anode container 56. It is essentially cuboid with a continuously closed rear wall 170 made of titanium with a thickness of 4 mm. This relatively thick rear wall 170 gives the anode container 56 mechanical strength. In the upper area, which is accessible to an operator, the anode container 56 opens to enable the nickel pieces to be filled in easily. For this purpose, a front wall 172 also made of titanium with a reduced thickness of 2 mm is angled in the region 174. A U-shaped female connector 176 is welded to the underside of the angled part of the front wall 172, and its legs 178, 180 encompass the anode line 182, which is circular in cross section. The legs 178, 180 are arched inward and form a funnel-shaped opening towards their ends, as a result of which it is easier to plug the female connector 176 onto the anode lead 182. During this push-on process, any electrolyte encrustations that form on the anode line 182 are removed; Contact points 184, 186 on the anode line 182 and on the legs 178, 180 are burnished bright. A further contact point 188 forms the base of the female connector 176. This type of electrical contact between the female connector 176 and the anode lead 182 ensures a low contact resistance and makes it easier to handle the anode container 56. In the opening area of the anode container 56, a handle bar 190 is attached to the side walls 192, 194 (cf. also FIG. 13). This handle bar 190 is gripped by an operator for removing and inserting the anode container 56 into the electrolyte container 50.

Furthermore, a screw 196 can be seen in FIG. 12 between front wall 172 and rear wall 170, which screw with its Countersunk head 198 is flush with the front of the front wall 172. The middle part of the screw 196 runs within a spacer sleeve 197, the ends of which are supported on the front wall 172 or on the rear wall 170. The length between the ends thus defines the distance between the front and rear walls 172, 170. Around the spacer sleeves 197, pieces of nickel can be arranged casually. The threaded part 200 of the screw 196 engages in a threaded hole 202 in the stable rear wall 170. The screw 196 is part of a spacing device 208, with the aid of which the distance and the flatness of the front wall 172 with respect to the rear wall 170 can be adjusted. In this way it is possible to compensate for bulges or undulations of the front wall 172.

Figure 13 shows a plan view of the anode container 56. It can be seen that the female connector 176 extends over the entire width of the anode container 56 and thus forms a large electrical contact area for the power supply. The front wall 172 and the side walls 192, 194 are perforated up to the upper edge of the spring strip 176, as indicated at 204 on the edge. The surface of the front wall 172 thus forms the exit surface 89 for the exit of the nickel ions from the anode container 56. The anode container 56 is rounded in the lower region 206. The arrangement of the screws 196 with the spacer sleeves 197 together form the spacer device 208 for maintaining the flatness of the outlet surface 89 and the distance to the stable rear wall 170.

Claims (29)

Device for the galvanic deposition of a metal layer on a carrier, with a container (50) for receiving the electrolyte (58), with an anode material filled with anode material (56) with a substantially flat exit surface (89) for metal ions of the anode material, which on the the support surface of the support (87) serving as the cathode facing the anode container (56) is deposited, the support surface being arranged obliquely to the vertical and substantially parallel and at a distance from the exit surface (89) of the anode container (56) facing it, with a support holder (86), which is connected to a drive shaft (84) which extends in the direction of the normal to the carrier surface and which is mounted in a drive device (54) on a lid (52) of the container (50), the lid (52) around an axis of rotation of a swivel device (70) is rotatably mounted, which on the Se anode container (56) opposite ite of the container (50), characterized in that the carrier surface is adjustable with respect to the opposite exit surface (89) of the anode container (56). Device according to claim 1, characterized in that the axis of rotation (124) of the cover (52) lies essentially in a plane which runs parallel to the shaft axis and intersects a clamping plate (86) of the carrier holder, and in that the cover (52) is closed State to the anode container (56) is displaceable to reduce the distance between the support surface and the exit surface (89) of the anode container (56). Device according to claim 1 or 2, characterized in that the pivoting device (70) contains a spacer element (126), at one end of which a rotary bearing (122) with the axis of rotation (124) is arranged and the other end with a hinge (134) connected is. Device according to claim 3, characterized in that the other end of the spacer element (126) is articulated on a pivot bearing (128) of a pivot lever (132) which is connected to the hinge (134). Device according to claim 4, characterized in that the pivot lever (132) has two stop surfaces (142, 144) which cooperate with associated stop surfaces (146, 148) on the spacer element (126), and in that the first stop surfaces (142, 146) when opening the lid (52) and in the open state of the lid (52) cooperate, and that the second stop surfaces (144, 148) cooperate when the lid (52) is closed and moved towards the anode container (50). Device according to claim 3, characterized in that the spacer element (126) has at least two stop surfaces (152, 156) which interact with associated stop surfaces (158) on a base plate (160), and in that one stop surface (156) when the Lid (52) and in the open state of the lid (52) on an oblique stop surface (157) of the hinge (134), and that the second stop surface (152) with the cover closed and displaced towards the anode container (50) (52) abuts a stop surface (158) of the base plate (160). Device according to one of the preceding claims, characterized in that the cover (52) is an adjusting device (74) carries through which the shaft (84) can be pivoted about at least one axis. Device according to claim 7, characterized in that the adjusting device (74) supports the shaft (84) so as to be pivotable about two axes, preferably about two axes lying approximately in one plane and preferably perpendicular to one another. Device according to claim 7 or 8, characterized in that the adjusting device (74) holds the shaft (84) displaceably in the direction of its longitudinal axis. Device according to one of claims 7 to 9, characterized in that the adjusting device (74) holds the shaft (84) in a plane perpendicular to the shaft axis or parallel to the plane of the cover (52). Device according to one of the preceding claims, characterized in that the adjusting device (74) has two interconnected first plate (76) and second plate (78), that the first plate (76) is firmly connected to the cover (52) in that the second plate (78) is held at a distance from the first plate (76) by means of adjusting screws (100) and supports the drive device (54), and that by turning the adjusting screws (100) the position of the two plates (76, 78) relative to one another and / or their distance from one another is adjustable. Device according to claim 11, characterized in that the second plate (78) is arranged within a plane approximately parallel to the surface of the anode container (56) and is preferably designed as a stainless steel plate. Device according to claim 12, characterized in that the first plate (76) is part of an angular plate which is firmly connected to a solid stainless steel plate (102) which is attached to the cover (52). Device according to one of the preceding claims, characterized in that a drive unit is provided for opening and closing the cover (52). Device according to one of the preceding claims, characterized in that the anode container (56) consists of titanium, and that between the rear wall (170) and front wall (172) of the anode container (56) a spacer device (208) made of titanium to maintain a predetermined distance between Rear wall (170) and front wall (172) is arranged. Device according to claim 15, characterized in that the spacing device (208) comprises a plurality of titanium screws (196) which connect the front wall (172) and the rear wall (170) to one another and which between the front wall (172) and the rear wall (170) arranged spacer sleeves (197) made of titanium, preferably the screw heads (198) on the front wall (172) and associated threaded holes (202) on the rear wall (170). Device according to one of the preceding claims, characterized in that an anode line (182) for supplying the anode current to the anode container (56) and a contact device arranged on the anode container (56) for establishing the electrical connection to the anode line (182) are provided, and in that the contact device is designed as a spring strip (176) which can be plugged into and removed from the anode line (182) and which can be brought into contact with the anode line (182) under the action of spring force. Device according to claim 17, characterized in that the spring strip (176) has a resilient U-shaped bracket, the legs (184, 186) of which grip around the anode lead (182) for making contact. Device for the galvanic deposition of a metal layer on a carrier, with a container (50) for receiving the electrolyte (58), at least one wall of the container (50) being inclined obliquely to the vertical, with an anode container (56) filled with anode material Titanium, which has an exit surface (89) for ions which are deposited on the carrier surface of the carrier (87) serving as the cathode, facing the anode container (56), the approximately cuboidal anode container (56) with its rear wall (170) at least approximately parallel is arranged to the wall of the container (50) or abuts the wall, characterized in that a spacer device (208) made of titanium between the rear wall (170) and the front wall (172) of the anode container (56) to maintain a predetermined distance between the rear wall (170 ) and front wall (172) is arranged. Device according to claim 19, characterized in that the spacer device (208) comprises a plurality of titanium screws (196) which connect the front wall (172) and the rear wall (170) to one another and which between the front wall (172) and the rear wall (170) arranged spacer sleeves (197) made of titanium, preferably the screw heads (198) on the front wall (172) and associated threaded holes (202) on the rear wall (170). Device according to one of the preceding claims, characterized in that the continuously closed rear wall (170) has a thickness of 3 to 5 mm, preferably approximately 4 mm. Device according to one of the preceding claims, characterized in that the front wall (172) is perforated and has a thickness of 1 to 3 mm, preferably about 2 mm. Device for the galvanic deposition of a metal layer on a carrier, with a container (50) for receiving the electrolyte (58), with an anode container (56) filled with anode material, which has a substantially flat front wall (172) as an exit surface (89) for metal ions which are deposited on the support surface of the support (87) serving as cathode, facing the anode container (56), with an anode line (182) for supplying the anode current to the anode container (56), and with a contact device provided on the anode container (56) Establishing the electrical connection to the anode line (182), characterized in that the contact device is designed as a spring strip (176) which can be plugged into and removed from the anode line (182) and which can be brought into contact with the anode line (182) under the action of spring force . Device according to claim 23, characterized in that the anode line (182) and the spring strip (176) extend over almost the entire width of the anode container (56). Device according to claim 23 or 24, characterized in that the anode line (182) is essentially circular in cross section. Device according to one of the preceding claims, characterized in that the spring strip (176) has a resilient U-shaped bracket, the legs (184, 186) of which grip around the anode lead (182) for making contact. Device according to claim 26, characterized in that the base of the U-shaped bracket (176) rests on the anode lead (182). Device according to one of the preceding claims, characterized in that the spring strip (176) is provided on the front wall (172) of the anode container (56) near the opening of the container (50) for receiving the electrolyte (58). Device according to one of the preceding claims, characterized in that a handle bar (190) extending in its width direction is arranged in the opening area of the anode container (56).

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