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EP0589362A1 - Appareil de pompe à vide - Google Patents

Appareil de pompe à vide Download PDF

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Publication number
EP0589362A1
EP0589362A1 EP93114957A EP93114957A EP0589362A1 EP 0589362 A1 EP0589362 A1 EP 0589362A1 EP 93114957 A EP93114957 A EP 93114957A EP 93114957 A EP93114957 A EP 93114957A EP 0589362 A1 EP0589362 A1 EP 0589362A1
Authority
EP
European Patent Office
Prior art keywords
pump
oil
motor housing
line
mist filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93114957A
Other languages
German (de)
English (en)
Other versions
EP0589362B1 (fr
Inventor
Kazuaki Nakamori
Minoru Taniyama
Katsuhiko Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of EP0589362A1 publication Critical patent/EP0589362A1/fr
Application granted granted Critical
Publication of EP0589362B1 publication Critical patent/EP0589362B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the present invention relates to a vacuum pump apparatus of the type that comprises a pump mechanism section having a suction port and a discharge port exposed to the atmospheric pressure, a pump-driving section having an exhaust port and a seal between the pump mechanism section and the pump-driving section. More particularly, the invention is concerned with a vacuum pump apparatus of the type specified above and in which a part of lubricant oil exhausted through the exhaust port of the pump-driving section can be effectively collected and recirculated into the pump apparatus.
  • the vacuum pump shown in the Japanese publication is structured such that lubricant oil exhausted through an exhaust port of a pump-driving section is collected by an oil mist filter and is returned from the filter directly into an oil reservoir provided in the pump-driving section.
  • a pump mechanism section 9 is isolated from a pump-driving section 10 by means of a shaft seal section 6.
  • the pump mechanism section 9 is operated in a vacuumed condition, while the pump-driving section 10 is under the atmospheric pressure.
  • the shaft seal section 6 is supplied with purge gas and divides the flow 15 of the purge gas into two brunches 19 and 20 which respectively enter the pump mechanism section 9 and the pump-driving section 10.
  • the pump-driving section 10 incorporates ball bearings (not shown) which are supplied with lubricant oil by an oil pump 12 disposed outside the vacuum pump.
  • the purge gas introduced into the pump mechanism section is discharged therefrom through a discharge port 2, while the purge gas introduced into the pump-driving section 10 is discharged therefrom through an exhaust port 18.
  • An oil mist filter 21 is provided in an exhaust line 21a connected to and extending from the exhaust port 18.
  • the oil mist filter 21 has a drain line 17 which is connected to an oil reservoir (not shown ) provided in the pump-driving section 10 so that the lubricant oil exhausted from the pump-driving section is collected by the filter and returned to the pump.
  • the oil mist filter was required to be of a structure providing an extremely low pressure loss. For this reason, the lubricant oil exhausted from the pump-driving section together with the purge gas also exhausted therefrom could be collected only to limited percentages, with resultant disadvantages that the amount of the lubricant oil exhausted and released from the oil mist filter into the atmosphere was increased and that the oil reservoir had to be supplied with fresh lubricant oil at a short interval or cycle.
  • the pump in the case where the vacuum pump is used with a semiconductor producing apparatus or the like which must be operated in a cleaned room, the pump is to be also installed in the cleaned room. In such case, therefore, a difficulty is involved that the gas exhausted from the pump-driving section of the vacuum pump must be processed so as not to contaminate the cleaned room.
  • the pump had to be equipped with two different discharge lines, one being a line connected to the discharge port of the pump mechanism section and the other being an exhaust line for the purge gas and mist of lubricant oil exhausted from the pump-driving section.
  • vacuum pump apparatus which comprises: a pump mechanism section including a pump casing having suction and discharge ports formed therein, and pump rotor and stator both accommodated in the pump casing; a pump-driving section including a motor housing connected to an end of the pump casing and a driving motor accommodated in the motor housing, the driving motor having a driving shaft extending from the motor housing through the end of said pump casing into the pump casing and drivingly connected to the pump rotor so that the pump rotor is rotated by the driving motor to suck a gas through the suction port into the pump casing and discharge the thus sucked gas from the pump casing through the discharge port; bearing means rotatably supporting the driving shaft on the end of the pump casing; means for introducing purge gas into the pump casing and the motor housing and providing a seal between the pump casing and the motor housing; the motor housing defining a reservoir for lubricant oil to be fed to the bearing means; an oil pump disposed outside the pump casing
  • the drain line of the oil mist filter has its downstream end communicated with the suction port of the oil pump. Accordingly, because the oil mist filter is subjected to vacuum created by the oil pump, the oil mist filter does not exert any resistance to the discharge of the purge gas and mist of lubricant oil from the pump-driving section of the vacuum pump. Accordingly, the oil mist filter can be of a high oil-collection efficiency that is capable of collect substantially all parts of the lubricant oil exhausted from the pump-driving section of the vacuum pump.
  • an oil mist filter having such a high oil-collection efficiency is operative to reduce the amount of gas flowing, together with the oil thus collected lubricant oil, from the filter through the drain line into and through the oil pump.
  • an oil mist filter of such a high oil-collection efficiency can avoid the occurrence of reduction in the performance of the oil pump which otherwise would be caused by the use of such oil mist filter.
  • an oil mist filter of a high oil-collection efficiency It would be possible also in the prior art to provide an oil mist filter of a high oil-collection efficiency.
  • high oil-collection efficiency involves a high pressure loss
  • an oil mist filter of such a high oil-collection efficiency if simply provided in an exhaust line in the prior art vacuum pump apparatus will exert a resistance to the flow of gas-oil mixture exhausted from the pump-driving section of the pump apparatus, so that the pressure in the pump-driving section is increased to pressurize the lubricant oil in the oil reservoir and thus forcibly cause the lubricant oil to blow out of the drain line of the oil mist filter.
  • the drain line of the oil mist filter is provided with means for increasing a resistance of the drain line to the fluid flow therethrough.
  • the resistance increasing means may preferably comprise at least one restriction orifice provided in the drain line. The restriction orifice will increase the resistance of the drain line to the fluid flow therethrough and thus reduce the amount of gas sucked into the oil pump for thereby avoiding the occurrence of reduction in the oil-pumping performance of the oil pump which would otherwise be caused if a large amount of gas is sucked into the oil pump.
  • the provision of the oil mist filter of a high oil-collection efficiency is effective to assure that the amount of the lubricant oil exhausted from the oil mist filter through the gas-outlet thereof can be greatly reduced.
  • an exhaust line connected to and extending from the gas-outlet of the oil mist filter can be connected to or merged into a pump discharge line extending from the discharge port of the pump mechanism section of the vacuum pump to greatly simplify the overall structure of the pump.
  • a pump mechanism section 9 includes a pump casing 3 having formed therein suction and discharge ports 1 and 2 and pump stator and rotor 4 and 5 both accommodated in the pump casing 3 and disposed in opposed relationship.
  • a pump-driving section 10 includes a motor housing 10a fixedly connected to an end of the pump casing 3 and a motor 8 disposed in the motor housing 10a and having a driving shaft 8a which is drivingly connected to the pump rotor 5.
  • the pump mechanism section 9 When the pump rotor 5 is driven by the motor 8, the pump mechanism section 9 operates to suck a gas into the pump casing 3 through the suction port 1, as indicated by an arrow A in Fig. 1, and discharges the thus sucked gas from the pump casing 3 through the discharge port 2, as indicated by another arrow B also shown in Fig. 1.
  • a passage 15 is formed to introduce purge gas, as indicated by a further arrow C, to shaft seals 6 operative to distribute the purge gas to the pump casing 3 and the motor housing 10a so that the pump mechanism section 9 and the pump-driving section 10 are kept at predetermined pressures, respectively.
  • the driving shaft 8a is rotatably supported by upper and lower bearings 7.
  • the upper bearing 7 is mounted on the end of the pump casing 3 to which the motor housing 10a is connected.
  • the other or lower bearing 7 is mounted in the motor housing 10a.
  • the motor housing 10a has a lower part which defines therein an oil reservoir 11 for storing an amount of lubricant oil therein.
  • An oil pump 12 is disposed outside the pump casing 3 and the motor housing 10a to suck the lubricant oil from the oil reservoir 11 and through an oil suction line 12a and positively circulate or feed the thus sucked oil through an oil feeding line 12b to the bearings 7.
  • the motor housing 10a has formed therein an exhaust port 18 connected with an exhaust line 18a in which is disposed an oil mist filter 13 of a high oil-collection efficiency.
  • the oil mist filter 13 has a gas-outlet 14 forming a part of the exhaust line 18a and a drain port connected with a drain line 17 having a downstream end connected to the oil suction line 12a so that the oil mist filter 13 is subjected to a vacuum force created in the oil pump 12.
  • the drain line includes a box 23 for collecting fine particles of foreign matter.
  • the particle collection box 23 has an inlet formed in the top wall thereof and connected to the drain port of the oil mist filter 13 by a short conduit 22.
  • the top wall of the box 23 has also formed therein an outlet connected with an end of a pipe line 24 having a small inner diameter.
  • the other end of the pipe line 24 is connected to the oil suction line 12a of the oil pump 12.
  • a plurality of restriction orifices 25 are provided in the pipe line 24 to increase the resistance of the pipe line 24 to the fluid flow therethrough.
  • Fig. 3 graphically illustrates the results of tests on the relationship between the length 1 of the pipe line 24 and the rate G of the fluid flow therethrough.
  • the solid line in Fig. 3 shows the result of the test in which the pipe line 24 was not provided with any restriction orifice 25, while the broken line shows the result of the test in which the pipe line 24 was provided with restriction orifices 25.
  • the rate Q of the flow of a gas-oil mixture through the pipe line 24 can be adjusted by varying the number of restriction orifices 25 to be installed in the pipe line 24 and by varying the length 1 of the pipe line 24. Accordingly, the flow rate Q can be adjusted to fall within the range which is allowable for the oil pump 12 to avoid the occurrence of gas flow into the pump at such an unduly high level that will deteriorate the oil-pumping performance of the oil pump 12.
  • the oil mist filter 13 disposed in the exhaust line 18a can be of a high oil-collection efficiency, so that the interval or cycle with which the oil reservoir in the motor housing 10a is supplied with fresh or additional lubricant oil can be extended to assure a prolonged maintenance-free period of the pump.
  • the amount of lubricant oil released into the atmosphere through the gas-outlet 14 of the oil mist filter 13 can be reduced to minimize the problem of contamination of a room in which the vacuum pump is installed.
  • the particle collection box 23 provided in the drain line 17 just downstream of the oil mist filter 13 is operative to collect and trap therein any fine particles of a foreign matter which would fall from the filter 13 and, thus, guard the pipe line 24 downstream of the particle collecting box 23.
  • Fig. 4 shows another embodiment of the invention which is based on the preceding embodiment described with reference to Figs. 1 - 3.
  • the exhaust line connected to the exhaust port 18 of the pump-driving section 10 includes a filter-exhaust line 18b connected at one end to the gas-outlet 14 of the oil mist filter 13.
  • the other or downstream end of the filter-exhaust line 18b is connected to a pump discharge line 26 connected to and extending from the discharge port 2 of the pump mechanism section 9 of the vacuum pump.
  • This design advantageously reduces the number of pipe lines to be extended from the vacuum pump to a point remote therefrom and, thus, simplifies the arrangement of pipes and assures a simplified maintenance of the vacuum pump apparatus. It will be noted that these advantageous results can be obtained from the fact that substantially all parts of the lubricant oil exhausted from the pump-driving section 10 can be removed from the exhausted gas by the oil mist filter 13.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP19930114957 1992-09-21 1993-09-16 Appareil de pompe à vide Expired - Lifetime EP0589362B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP251179/92 1992-09-21
JP4251179A JP2978339B2 (ja) 1992-09-21 1992-09-21 真空ポンプ

Publications (2)

Publication Number Publication Date
EP0589362A1 true EP0589362A1 (fr) 1994-03-30
EP0589362B1 EP0589362B1 (fr) 1996-07-03

Family

ID=17218863

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19930114957 Expired - Lifetime EP0589362B1 (fr) 1992-09-21 1993-09-16 Appareil de pompe à vide

Country Status (3)

Country Link
EP (1) EP0589362B1 (fr)
JP (1) JP2978339B2 (fr)
DE (1) DE69303447T2 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1148288A1 (fr) * 2000-04-07 2001-10-24 Heian Corporation Machine à commande numérique et dispositif pour collecter un brouillard d'huile
WO2006111695A1 (fr) * 2005-04-20 2006-10-26 Edwards Limited Pompe a vide
US7600921B2 (en) * 2004-03-22 2009-10-13 Paul Müller GmbH & Co. KG Unternehmens-Beteiligungen Spindle for a machine tool, comprising a bearing element with a capillary feed line for supplying lubricants
EP2060795B1 (fr) * 2007-11-15 2019-03-20 Pfeiffer Vacuum GmbH Pompe à vide
CN112840130A (zh) * 2018-10-31 2021-05-25 埃地沃兹日本有限公司 真空泵、保护网及接触零件
CN113883059A (zh) * 2021-10-20 2022-01-04 浙江方远力鑫真空设备有限公司 一种滑阀真空泵用的内置过滤器

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006177281A (ja) * 2004-12-24 2006-07-06 Shimadzu Corp 高速回転機器
KR101340375B1 (ko) * 2011-11-22 2013-12-11 동일자동화(주) 진공단열패널 가공장치
US10648509B2 (en) 2017-05-30 2020-05-12 Itt Manufacturing Enterprises Llc. Oil filter/liquid indicator assembly
DE102017011691B4 (de) * 2017-12-18 2025-12-04 Mann+Hummel Gmbh Flüssigkeitsabscheider

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1208696A (fr) * 1957-11-29 1960-02-25 Sulzer Ag Installation de turbo-machine
US4213307A (en) * 1978-11-13 1980-07-22 Westinghouse Electric Corp. Oil separation and return system for centrifugal refrigerant compressors
US4311004A (en) * 1979-10-26 1982-01-19 Rotoflow Corporation Gas compression system and method
JPS6430093A (en) * 1987-07-24 1989-01-31 Hitachi Ltd Semiconductor storage device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1208696A (fr) * 1957-11-29 1960-02-25 Sulzer Ag Installation de turbo-machine
US4213307A (en) * 1978-11-13 1980-07-22 Westinghouse Electric Corp. Oil separation and return system for centrifugal refrigerant compressors
US4311004A (en) * 1979-10-26 1982-01-19 Rotoflow Corporation Gas compression system and method
JPS6430093A (en) * 1987-07-24 1989-01-31 Hitachi Ltd Semiconductor storage device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 013, no. 376 (M - 862)<3724> 21 August 1989 (1989-08-21) *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1148288A1 (fr) * 2000-04-07 2001-10-24 Heian Corporation Machine à commande numérique et dispositif pour collecter un brouillard d'huile
US7600921B2 (en) * 2004-03-22 2009-10-13 Paul Müller GmbH & Co. KG Unternehmens-Beteiligungen Spindle for a machine tool, comprising a bearing element with a capillary feed line for supplying lubricants
WO2006111695A1 (fr) * 2005-04-20 2006-10-26 Edwards Limited Pompe a vide
EP2060795B1 (fr) * 2007-11-15 2019-03-20 Pfeiffer Vacuum GmbH Pompe à vide
CN112840130A (zh) * 2018-10-31 2021-05-25 埃地沃兹日本有限公司 真空泵、保护网及接触零件
CN112840130B (zh) * 2018-10-31 2024-03-08 埃地沃兹日本有限公司 真空泵、保护网及接触零件
CN113883059A (zh) * 2021-10-20 2022-01-04 浙江方远力鑫真空设备有限公司 一种滑阀真空泵用的内置过滤器

Also Published As

Publication number Publication date
JPH06101699A (ja) 1994-04-12
DE69303447T2 (de) 1996-10-31
EP0589362B1 (fr) 1996-07-03
DE69303447D1 (de) 1996-08-08
JP2978339B2 (ja) 1999-11-15

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