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EP0347473B1 - Cryogenic condensation pump - Google Patents

Cryogenic condensation pump Download PDF

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Publication number
EP0347473B1
EP0347473B1 EP89901554A EP89901554A EP0347473B1 EP 0347473 B1 EP0347473 B1 EP 0347473B1 EP 89901554 A EP89901554 A EP 89901554A EP 89901554 A EP89901554 A EP 89901554A EP 0347473 B1 EP0347473 B1 EP 0347473B1
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EP
European Patent Office
Prior art keywords
pump
housing
out element
vessel
radiation shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89901554A
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German (de)
French (fr)
Other versions
EP0347473A4 (en
EP0347473A1 (en
Inventor
Marxen Petrovich Larin
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NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Original Assignee
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
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Publication of EP0347473A1 publication Critical patent/EP0347473A1/en
Publication of EP0347473A4 publication Critical patent/EP0347473A4/en
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Publication of EP0347473B1 publication Critical patent/EP0347473B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the invention relates to vacuum technology and in particular to the construction of cryogenic condensation vacuum pumps.
  • the invention can be used in vacuum technology which is widely used in the electronics and radio frequency industries and in other industries, as well as in scientific research where it is necessary to have an extra pure, completely oil-free vacuum in a range of operating pressures 1.10 ⁇ 4 to 1.10 ⁇ 10 Pa to generate and maintain for a long time.
  • Cryogenic condensation pumps are currently being perfected by optimizing their designs in terms of reducing weight and metal expenditure, simplifying the assembly and disassembly of pumps and increasing their cost-effectiveness.
  • a cryogenic condensation pump with a housing in the interior of which a radiation shield containing, connected to one another, a cryogenic agent vessel, a heat-conducting frame and an arrow umbrella, and a pumping element designed as a vessel are arranged.
  • the cryogenic agent vessel of the radiation shield and the drainage element are provided with hanging tubes which serve for filling the cryogenic agents, liquid nitrogen or liquid helium, into the said vessels, and for fastening these vessels in the housing (magazine of the USSR Academy of Sciences "Pribory i tekhnika experimenta” , No. 2, 1982, Moscow, MPLarin "Vysokovakuumnye agregaty s kriogennum i magnitozaryadnym nasosami").
  • a cryogenic condensation pump with a housing in the interior of which a radiation shield, which, connected to one another, contains a cryogenic agent vessel, a heat-conducting frame and an arrow umbrella, and a pumping element in the form of a vessel are arranged (SU, A, 1017817).
  • the pump-off element is designed as a vessel and is accommodated in a cavity which is formed by the bottom of the cryogenic agent vessel of the radiation shield, the surface of the heat-conducting frame and the arrow shield.
  • the cryogenic agent vessel of the radiation shield and the pumping-off element are provided with hanging tubes which serve for the liquid nitrogen or the liquid helium to enter the said vessels and for fastening these vessels in the housing.
  • the latter is designed as a corrugated metal tube with a spiral profile of the beads.
  • the suspension tubes are connected to the cryogenic center vessel of the radiation shield or to the pumping element by welding.
  • To connect the suspension tubes to the housing their upper end faces are welded to the upper end faces of the housing connecting piece, in which the suspension tubes are inserted.
  • the housing of the pump and the suspension tubes are made of stainless steel and elements of the radiation shield - the cryogenic agent vessel, the heat-conducting frame and the arrow shield - and the pumping element are made of copper.
  • a disadvantage of this pump is complicated assembly and disassembly, for example when repairing the cryogenic agent vessel of the radiation shield or the pumping element.
  • one has to cut off the upper end faces of the welded suspension tubes and housing sockets and after a repair and the subsequent assembly of the pump, a high-quality re-welding of these Ensure elements.
  • These operations are labor intensive, they require special conditions and take a lot of time.
  • the design of the pump elements made of stainless steel and copper means that they are heavy and require a lot of metal. This causes greater stress on the pump elements and their welded joints and entails the risk of their destruction, in particular when transporting pumps.
  • the pump described is insufficiently economical due to a rather large consumption of the cryogenic agents - liquid nitrogen and helium - due to their evaporation, which is due to the greater heat input into the pumping element and into the cryogenic agent vessel of the radiation shield.
  • the invention has for its object to provide a cryogenic condensation pump containing a housing, in the interior of which a radiation shield with a cryogenic agent vessel and a pumping element in the form of a vessel are accommodated, which are provided with suspension tubes, in which a connection of the suspension tubes to the housing and the vessel of the radiation shield is designed and the housing, the radiation shield and the pumping element are made of such a material that an assembly or disassembly of the pump while reducing the weight and reducing the metal expenditure of the pump and ensuring the reliable vacuum-tight connection of the pump elements can be facilitated and simplified.
  • each suspension tube with at the opposite End arranged assemblies for connection to the housing and to the cryogenic agent vessel of the radiation shield or to the pumping element is provided, wherein the assembly for connecting the suspension tube to the housing contains a socket accommodated in the bore of a housing flange, which has one end on the suspension tube is attached airtight, and at the other end of this neck a collar is made with an annular projection facing the housing, whereupon an annular counterstop is carried out, a sealing metallic insert being placed between said annular projections and in the central part of said Stutzen a ring flange is fixed, in which stop bolts are arranged, which come
  • each suspension tube By equipping each suspension tube with assemblies for connection to the housing and the cryogenic agent vessel of the radiation shield or to the pumping element and by said design of these assemblies, the assembly and disassembly of the pump are facilitated and simplified when a repair of the cryogenic agent vessel, the radiation shield or the pumping element, for example for repeated vapor deposition of their surfaces with aluminum is required.
  • the pump is disassembled, only the assemblies for connecting the suspension tubes to the housing are taken apart, after which all internal assemblies of the pump are removed from the housing. When assembling, the assemblies of the pump are assembled in reverse order.
  • connection assemblies which are designed in the manner described, make it possible to manufacture the pump housing, the radiation shield and the pumping element out of metals with a small specific weight, namely the housing made of titanium, the radiation shield and the pumping element out of aluminum, which makes it possible the weight and the metal expenditure of the pump can be reduced.
  • connection assemblies ensures a vacuum-tight connection of a pump housing made of titanium and, made of aluminum, a radiation shield and a pumping element with hanging tubes made of stainless steel.
  • connection assemblies are tightened, ring-shaped projections and a sealing insert between them, which are made of a soft metal, e.g. Aluminum is made, are present, a vacuum-tight connection of the housing made of titanium with a suspension tube made of stainless steel and the aluminum-made cryogen vessel of the radiation shield or the pumping element is achieved with a suspension tube also made of stainless steel.
  • contact surfaces of the bearing bush and the annular element are made conical. This design of the contact surfaces facilitates the removal process of the pumping element when the pump is disassembled and ensures better thermal contact of the middle part of the suspension tube with the cryogenic agent vessel of the radiation shield after its assembly.
  • suspension tube of the pumping element is provided on the side facing the pumping element with a coaxially arranged screen which has thermal contact with the suspension tube in the vicinity of its assembly for connection to the pumping element.
  • Said shield reduces radiation heat from the cryogenic center vessel of the radiation shield into the assembly for connecting the suspension tube to the pumping element, which is at the liquid helium temperature, and into the lower part of the suspension tube, the temperature of which is close to that of the liquid helium.
  • the supply of heat is reduced by the thermal conductivity in the pumping element itself from the suspension tube and its assembly for connection and the pumping element, as a result of which liquid helium evaporation in the pumping element is reduced and the economy of the pump is thus increased.
  • cryogenic center vessel of the radiation shield is provided with an additional shield, which is arranged between the housing and the said vessel with a gap with respect to these.
  • the additional screen reduces the supply of heat due to radiation from the pump housing into the cryogen container, which reduces evaporation of the cryogen (liquid nitrogen) and thus increases the economy of the pump.
  • a socket is arranged in the axis thereof, in the opposite ends of which coaxial blind holes are made and in the arrow screen there is a hole which is coaxial with the holes in the socket.
  • Said bushing with holes enables the pumping element to be rigidly fixed in the pump housing with the aid of rods inserted and locked in these holes, which ensures the integrity of the pump elements and assemblies and their welded connections when the pump is being transported.
  • the cryogenic condensation pump contains a housing 1 (FIG. 1) with a lid 2, in the interior of which is connected to one another, a vessel 3 for the cryogen (liquid nitrogen), a heat-conducting frame 4 and an arrow screen 5, which together form a radiation screen 3, 4 , 5 form, and a pumping element 6 are housed.
  • the cryogenic agent vessel 3 has a lid 7 and a bottom 8.
  • the pumping element is designed as a vessel which receives a cryogenic agent (liquid helium) and is accommodated in a cavity which is through the bottom 8 of the cryogenic agent vessel 3, the heat-conducting frame 4 and the arrow screen 5 is formed.
  • the cryogenic agent vessel 3 of the radiation shield 3, 4, 5 and the pumping element 6 are provided with associated suspension tubes 9 and 10.
  • the suspension tube 9 contains assemblies 11a and 12a arranged at its opposite ends for connection to the housing 1 and the cryogen container 3, respectively.
  • the suspension tube 10 also contains assemblies 11-b and 12-b arranged at its opposite ends for connection to the housing 1 and 12, respectively the pumping element 6.
  • the assembly 11-a for connecting the suspension tube 9 to the housing 1 contains a connection piece 13 (FIG. 2) which is accommodated in a bore 14 in a flange 15 of the housing 1.
  • the flange 15 is inside a connecting piece 16 of the cover 2 of the housing 1 arranged and rigidly connected to the socket 16 and consequently to the housing.
  • One end 17 of the connecting piece 13 is attached to the suspension tube 9 in an airtight manner and at its other end a collar 18 is designed with an annular shoulder 19 which faces the flange 15 of the housing 1, whereupon an annular counter-shoulder 20 is executed.
  • a sealing insert 21 is attached, which is made of soft metal, e.g. Aluminum is made.
  • an annular flange 22 is arranged on a thread, which has threaded bores, in which stop bolts 23 are inserted.
  • the assembly 11-b for connecting the suspension tube 10 to the housing 1 is similar to the assembly 11-a for connecting the suspension tube 9 to the housing 1 with the only difference that the flange 15 is attached directly to the bottom 2 of the housing 1 (the flange is not shown in detail so that the drawings remain clear).
  • the assembly 12-a for connecting the hanging tube 9 to the cryogenic agent vessel 3 of the radiation shield 3, 4, 5 contains a connection piece 24 (FIG. 3), which is connected to a neck 26 of the cryogenic agent vessel 3 in an airtight manner, with an end face sealing collar 25.
  • the assembly 12-a also contains two flanges 27 and 28 which face each other with end faces 29 and 30 and are connected to one another by means of clamping screws 31.
  • the flange 27 is airtightly attached to one end of the suspension tube 9 and the flange 28 is at the end of the neck 24 arranged.
  • the flanges 27 and 28 are provided on their end faces 29 and 30 with annular projections 32 and 33 and between them is the said sealing collar 25.
  • the assembly 12-a for connecting the suspension tube 9 to the cryogen container 3 is provided with a shield 34 with a collar 35.
  • the screen 34 reduces the supply of heat by radiation from the housing 1 to the assembly 12-a.
  • the assembly 12-b for connecting the suspension tube 10 to the pumping-out element 6 is similar to the assembly 12-a for connecting the suspension tube 9 to the cryogenic agent vessel 3 and is shown in FIG. 4, in which the elements of the same name have the same designations as in FIG are designated.
  • the hanging tube 10 of the pumping element 6 runs through the cryogenic agent vessel 3 of the radiation shield 3, 4, 5 inside a cylinder 36 which is arranged in the axis of the cryogenic agent vessel 3 and is fastened in the lid 7 and in the bottom 8 of the said vessel.
  • the suspension tube 10 is provided with a bearing bush 37 which is screwed onto a spiral profile of the beads of the suspension tube 10 and an annular element 38 is fastened in the cover 7 of the cryogenic agent vessel 3 and comes into contact with the bearing bush 37.
  • Contact surfaces of the bearing bush 37 and the ring member 38 are tapered. This design of the contact surfaces of the bearing bush 37 and the ring element 38 facilitates the insertion or Removal of the pumping element 6 during assembly or disassembly of the pump. In addition, this ensures better thermal contact between the suspension tube 10 and the cryogen container 3 to reduce the heat input due to thermal conductivity via the upper part of the suspension tube 10 from the housing 1 of the pump.
  • the cryogenic agent vessel 3 is provided with an additional screen 39, which is arranged between the housing 1 and the cryogenic agent vessel 3 with a gap 10 opposite them.
  • the screen 39 is suspended from the collar 35 of the screen 34 (FIG. 3). This screen reduces the supply of heat by radiation from the housing 1 of the pump to the cryogen container 3, as a result of which evaporation of the cryogen (liquid nitrogen) is reduced and the economy of the pump is increased.
  • the suspension tube 10 of the pumping element 6 is provided on the side facing the pumping element with a coaxially arranged screen (FIG. 4), which consists of two parts, namely an upper part 41, which covers the surface of the suspension tube 10 on one half encloses its length, and a lower part 42, which protects the assembly 12-b for connecting the suspension tube 10 to the pumping element 6.
  • the upper 41 and the lower 42 screen part are connected by a thread 43.
  • the shield has a thermal contact with the hanging tube 10 in the vicinity of its assembly for connection to the pumping element 3 correctly: pumping element 6. The contact is achieved with the aid of a collar 44, which is embodied on the lower shield part 42 and engages with the bead spiral of the hanging tube 10.
  • One end of the suspension tube 10 is directly connected (welded) to the flange 27 of the assembly 12-b for its connection to the pumping element 6 and therefore has a temperature which is close to the liquid helium temperature in the pumping element 6 (4.2K). Thanks to the thermal contact of the hanging tube 10 with the lower screen part 42, a temperature is maintained along the screen that is close to the liquid helium temperature. The temperature of the hanging tube 10 changes from its end, which connects to the pumping element 6, to the middle of the length from 4.5 to 50 K.
  • This screen reduces the supply of heat by radiation from the vessel 3 of the radiation screen 3, 4, 5 into the assembly 12-b of the suspension tube 10 with the pumping element 6 and the lower part of the suspension tube 10. Consequently, the heat supply by heat conduction into the pumping element 6 from the suspension tube 10 and reduced by the assembly 12-b for connection to the pumping element 6, thereby reducing the evaporation of liquid helium and therefore increasing the economy of the pump.
  • the pump is equipped with flanges 45, 46, 47 for connection to an auxiliary pump for high vacuum evacuation e.g. an ion atomizing pump, to a pump for pre-evacuation, e.g. an adsorption pump, and to a working chamber (not shown so that the drawings remain clear) and provided with a stopper flange 48 with a bottom 49 which serves to transport the pump and test it "on itself".
  • an auxiliary pump for high vacuum evacuation e.g. an ion atomizing pump
  • a pump for pre-evacuation e.g. an adsorption pump
  • a working chamber not shown so that the drawings remain clear
  • a bushing 51 is fastened in its axis, in the opposite ends of which blind holes 52, 53 are made, and in the arrow screen 5 there is a hole 54 which is coaxial with the holes 52, 53.
  • a rod is inserted into the bore 52, which rod is lowered within the suspension tube 10 and fastened to the socket 13.
  • a rod is inserted into the bore 53, which is passed through the bore 54 in the arrow screen 5 and fastened in the bottom 49 of the plug flange 48 (the rods are not shown, so that the drawings remain clear).
  • the bush 51 with the bores 52, 53 ensures rigid attachment of the pumping element 6 by means of rods, as a result of which the integrity of the elements and the components of the pump is ensured when the pump is transported.
  • the housing 1 of the pump is made of titanium, the radiation shield (the cryogen container 3, the heat-conducting frame 4, the arrow shield 5) and the pumping element 6 made of aluminum produced. This makes it possible to reduce the weight and the metal expenditure of the pump.
  • the cryogenic condensation pump works as follows.
  • the plug flange 48 is removed, the lower rod is removed and a copper or aluminum plug is screwed into the bore 54.
  • the pump with the flange 47 is placed on a counter flange of the working chamber and connected to one another in a vacuum-tight manner. You take out the top bar.
  • the plugs are then removed from the flanges 45 and 46 and the ion atomizing pump is connected to the flange 45 and a valve with a metal seal is connected to the flange 46. Via this valve, a system for pre-evacuation is connected to the pump, which consists of a mechanical pre-vacuum pump and an adsorption pump.
  • the mechanical fore-vacuum pump is used to evacuate the volume of the pump according to the invention and the working chamber to a pressure of 100 ... 40 Pa and then with the aid of an adsorption pump to a pressure of 1.10 1.12 ... 1.10 ⁇ 4 Pa .
  • liquid nitrogen is poured into the cryogen container 3 via one of the suspension tubes 9.
  • the ion atomizing pump is switched on and the pressure in the pump is reduced by one or two orders of magnitude.
  • the pumping element 6 is cooled with a small amount of liquid nitrogen (1 to 2 liters) to a temperature of 80 ... 100 K, which is filled in via the hanging tube 10. You can control the temperature with the help of a thermocouple, which is lowered via the hanging tube 10 to the bottom of the pumping element.
  • the cavity of the pumping element 6 is to be evacuated to a pressure of 100 to 40 Pa with the aid of the mechanical backing pump, filled with gaseous helium and then the pumping element 6 is filled with liquid helium. Then the pressure in the working chamber will generally drop to 1.10 ⁇ 7 ... 1.10 ⁇ 9 Pa and below. Then the connector 13 is connected to a system for collecting the gaseous helium. With the help of the pump prepared in this way, the working chamber is evacuated to the required pressure.
  • the invention can be used in vacuum technology that is widely used in the electron and radio frequency industries and other industries, as well as in scientific research where it is necessary to have an extra pure, completely oil-free vacuum in a range of operating pressures 1.10 ⁇ 4 ... 1.10 ⁇ 10 Pa.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)

Abstract

A cryogenic condensation pump comprises a casing (1) inside which are mounted a reservoir (3) for the cryogenic agent-liquid nitrogen, a heat-carrying envelope (4) and a herring-bone screen (5) all together forming a radiation screen (3, 4, 5), and a pumping-out element (6). The reservoir (3) for the cryogenic agent and the pumping-out element (6) are provided with suspension tubes (9) and (10), respectively. Each suspension tube (9, 10) is provided, respectively, with units (11-a) and (11-b) for its fastening to the casing (1), and with units (12-a) and (12-b) for its fastening, respectively, to the reservoir (3) for the cryogenic agent and to the pumping-out element (6). The suspension tube (10) of the pumping-out element (6) is provided with a supporting bushing (37), whereas in the cap (7) of the reservoir (3) for the cryogenic agent is fixed an annular element (38) contacting with the supporting bushing (37). The casing (1) of the pump, the radiation screen (3, 4, 5) and the pumping-out element (6) are made of light metals.

Description

Die Erfindung bezieht sich auf die Vakuumtechnik und insbesondere auf Konstruktionen kryogener Kondensations vakuumpumpen. Am vorteilhaftesten kann die Erfindung in der Vakuumtechnick verwendet werden, die in der Elektronen- und Hochfrequenzindustrie und in anderen Industriezweigen sowie in wissenschaftlichen Forschungen zu einem breiten Einsatz kommt, in denen es erforderlich ist, ein extra reines, vollkommen ölfreies Höchstvakuum in einem Bereich der Betriebsdrücke 1.10⁻⁴ bis 1.10⁻¹⁰ Pa zu erzeugen und eine längere Zeit aufrechtzuerhalten.The invention relates to vacuum technology and in particular to the construction of cryogenic condensation vacuum pumps. Most advantageously, the invention can be used in vacuum technology which is widely used in the electronics and radio frequency industries and in other industries, as well as in scientific research where it is necessary to have an extra pure, completely oil-free vacuum in a range of operating pressures 1.10⁻⁴ to 1.10⁻¹⁰ Pa to generate and maintain for a long time.

Zur Zeit werden kryogene Kondensationspumpen vervollkommnet, indem man ihre Konstruktionen in bezug auf eine Senkung des Gewichtes und des Metallaufwandes, eine Vereinfachung der Montage und der Demontage der Pumpefn und eine Steigerung deren Wirtschaftlichkeit optimiert.Cryogenic condensation pumps are currently being perfected by optimizing their designs in terms of reducing weight and metal expenditure, simplifying the assembly and disassembly of pumps and increasing their cost-effectiveness.

Es ist eine kryogene Kondensationspumpe mit einem Gehäuse bekannt, in dessen Innerem ein Strahlungsschirm, enthaltend, miteinander verbunden, ein Kryomittelgefäß, eine wärmeleitende Zarge und einen Pfeilschirm, sowie ein als Gefäß ausgeführtes Abpumpelement angeordnet sind. Das Kryomittelgefäß des Strahlungsschirms und das Abpumfelement sind mit Aufhängerohren versehen, die zum Einfüllen der Kryomittel, Flüssigstickstoff bzw. Flüssighelium, in die besagten Gefäße, sowie zur Befestigung dieser Gefäße im Gehäuse dienen (Zeitschrift der Akademie der Wissenschaften der UdSSR "Pribory i tekhnika experimenta", Nr. 2, 1982, Moskau, M.P.Larin "Vysokovakuumnye agregaty s kriogennum i magnitozaryadnym nasosami").A cryogenic condensation pump with a housing is known, in the interior of which a radiation shield containing, connected to one another, a cryogenic agent vessel, a heat-conducting frame and an arrow umbrella, and a pumping element designed as a vessel are arranged. The cryogenic agent vessel of the radiation shield and the drainage element are provided with hanging tubes which serve for filling the cryogenic agents, liquid nitrogen or liquid helium, into the said vessels, and for fastening these vessels in the housing (magazine of the USSR Academy of Sciences "Pribory i tekhnika experimenta" , No. 2, 1982, Moscow, MPLarin "Vysokovakuumnye agregaty s kriogennum i magnitozaryadnym nasosami").

Es is bekannt, daß in kryogenen Hellium-Kondensationspumpen eine der wichtigsten Fragen jene eines wirtschaftlichen Verbrauchs von Flüssighelium infolge dessen Knappheit und hohen Preises ist. In der beschriebenen Pumpe ist aber ein aus Kupfer ausgeführtes Abpumpelement, das mit Flüssighelium gefüllt wird, einer großen Wärmezufuhr über ein glattwandiges Aufhängerohr ausgesetzt. Infolgedessen weist diese Pumpe eine verhältnismäßig hohe Verdampfungsrate des Flüssigheliums auf, wodurch eine Pumpe dieser Konstruktion unzureichend wirtschaftlich ist.It is known that in cryogenic hellium condensation pumps one of the most important questions is that of economical consumption of liquid helium due to its scarcity and high price. In the pump described, however, there is a pumping element made of copper, the one with liquid helium is exposed to a large supply of heat via a smooth-walled suspension tube. As a result, this pump has a relatively high evaporation rate of the liquid helium, which makes a pump of this construction insufficiently economical.

Es ist eine kryogene Kondensationspumpe mit einem Gehäuse bekannt, in dessen Innerem ein Strahlungsschirm, der, miteinander verbunden, ein Kryomittelgefäß, eine wärmeleitende Zarge und einen Pfeilschirm enthält, sowie ein Abpumpelement in Form eines Gefäßes angeordnet sind, (SU, A, 1017817). Das Abpumpelement ist als ein Gefäß ausgeführt und in einem Hohlraum untergebracht, der durch den Boden des Kryomittelgefäßes des Strahlungsschirms, die Oberfläche der wärmeleitenden Zarge und den Pfeilschirm gebildet ist. Das Kryomittelgefäß des Strahlungsschirms und das Abpumpelement sind mit Aufhängerohren versehen, die zum Einfällen des Flüssigstickstoffes bzw. des Flüssigheliuns in die besagten Gefäße, sowie zur befestigung dieser Gefäße im Gehäuse dienen. Dabei ist zur Verminderung einer Wärmezufuhr in das mit Flüssighelium gefüllte Abpumpelement über das Aufhängerohr das letztere als ein gewelltes Metallrohr mit einem Spiralprofil der Sicken ausgeführt. Die Aufhängerohre sind an das Kryomittelgefäß des Strahlungsschirms oder an das Abpumpelement durch Schweißung angeschlossen. Zum Anschluß der Aufhängerohre an das Gehäuse werden ihre oberen Stirnflächen an die oberen Stirnflächen der Gehäusestutzen angeschweißt, worin die Aufhängerohre eingesteckt werden. Das Gehäuse der Pumpe und die Aufhängerohre sind aus nichtrostendem Stahl und Elemente des Strahlungsschirms - das Kryomittelgefäß, die wärmeleitende Zarge und der Pfeilschirm - und das Abpumpelement aus Kupfer ausgeführt.A cryogenic condensation pump with a housing is known, in the interior of which a radiation shield, which, connected to one another, contains a cryogenic agent vessel, a heat-conducting frame and an arrow umbrella, and a pumping element in the form of a vessel are arranged (SU, A, 1017817). The pump-off element is designed as a vessel and is accommodated in a cavity which is formed by the bottom of the cryogenic agent vessel of the radiation shield, the surface of the heat-conducting frame and the arrow shield. The cryogenic agent vessel of the radiation shield and the pumping-off element are provided with hanging tubes which serve for the liquid nitrogen or the liquid helium to enter the said vessels and for fastening these vessels in the housing. In order to reduce the heat input into the pumping element filled with liquid helium, the latter is designed as a corrugated metal tube with a spiral profile of the beads. The suspension tubes are connected to the cryogenic center vessel of the radiation shield or to the pumping element by welding. To connect the suspension tubes to the housing, their upper end faces are welded to the upper end faces of the housing connecting piece, in which the suspension tubes are inserted. The housing of the pump and the suspension tubes are made of stainless steel and elements of the radiation shield - the cryogenic agent vessel, the heat-conducting frame and the arrow shield - and the pumping element are made of copper.

Ein Nachteil dieser Pumpe besteht in einer komplizierten Montage und Demontage, z.B. bei einer Reparatur des Kryomittelgefäßes des Strahlungsschirms bzw. des Abpumpelementes. In diesem Falle hat man die oberen Stirnflächen der miteinander geschweißten Aufhängerohre und Gehäusestutzen abzuschneiden und nach einer Reparatur und der anschließenden Montage der Pumpe eine hochwertige nochmalige Schweißung dieser Elemente sicherzustellen. Diese Arbeitsgänge sind arbeitsintensiv, sie erfordern Spezialbedingungen und einen hohen Zeitaufwand. Außerdem werden durch die Ausführung der Pumpenelemente aus nichtrostendem Stahl und Kupfer ein großes Gewicht und ein hoher Metallaufwand bedingt. Dies bewirkt größere Beanspruchungen der Pumpenelemente und deren Schweißverbindungen und bringt die Gefahr ihrer Zerstörung mit sich, insbesondere beim Pumfentransport.A disadvantage of this pump is complicated assembly and disassembly, for example when repairing the cryogenic agent vessel of the radiation shield or the pumping element. In this case, one has to cut off the upper end faces of the welded suspension tubes and housing sockets and after a repair and the subsequent assembly of the pump, a high-quality re-welding of these Ensure elements. These operations are labor intensive, they require special conditions and take a lot of time. In addition, the design of the pump elements made of stainless steel and copper means that they are heavy and require a lot of metal. This causes greater stress on the pump elements and their welded joints and entails the risk of their destruction, in particular when transporting pumps.

Es ist auch darauf hinzuweisen, daß die beschriebene Pumpe unzureichend wirtschaftlich infolge eines ziemlich großen Verbrauchs der Kryomittel - Flüssigstickstoff und Helium - durch deren Verdampfung ist, die durch großere Wärmezufuhr in das Abpumpelement und in das Kryomittelgefäß des Strahlungsschirms bedingt wird.It should also be noted that the pump described is insufficiently economical due to a rather large consumption of the cryogenic agents - liquid nitrogen and helium - due to their evaporation, which is due to the greater heat input into the pumping element and into the cryogenic agent vessel of the radiation shield.

Der Erfindung liegt die Aufgabe zugrunde, eine kryogene Kondensationspumpe zu schaffen, enthaltend ein Gehäuse, in dessen Innerem ein Strahlungsschirm mit einem Kryomittelgefäß und ein Abpumpelement in Form eines Gefäßes untergebracht sind, die mit Aufhängerohren versehen sind, bei der eine Verbindung der Aufhängerohre mit dem Gehäuse und dem Gefäß des Strahlungsschirms derart ausgeführt ist und das Gehäuse, der Strahlungsschirm und das Abpumpelement aus solch einem Werkstoff hergestellt sind, daß eine Montage bzw. Demontage der Pumpe bei der gleichzeitigen Reduzierung des Gewichtes und der Verminderung des Metallaufwandes der Pumpe sowie unter Sicherstellung der zuverlässigen vakuumdichten Verbindung der Pumpenelemente erleichtert und vereinfacht werden.The invention has for its object to provide a cryogenic condensation pump containing a housing, in the interior of which a radiation shield with a cryogenic agent vessel and a pumping element in the form of a vessel are accommodated, which are provided with suspension tubes, in which a connection of the suspension tubes to the housing and the vessel of the radiation shield is designed and the housing, the radiation shield and the pumping element are made of such a material that an assembly or disassembly of the pump while reducing the weight and reducing the metal expenditure of the pump and ensuring the reliable vacuum-tight connection of the pump elements can be facilitated and simplified.

Diese Aufgabe wird bei einer kryogenen Kondensationspumpe mit einem Gehäuse, in dessen Innerem ein Strahlungsschirm, enthaltend, miteinander verbunden, ein Kryomittelgefäß, eine wärmeleitende Zarge und einen Pfeilschirm, sowie ein als Gefäß ausgeführtes Abpumpelement angeordnet sind, wobei das Kryomittelgefäß des Strahlungsschirms und das Abpumpelement mit Aufhängerohren versehen sind, erfindungsgemäß dadurch gelöst, daß jedes Aufhängerohr mit an dessen gegenüberliegenden Enden angeordneten Baugruppen zum Anschluß an das Gehäuse und an das Kryomittelgefäß des Strahlungsschirm bzw. an das Abpumpelement versehen ist, wobei die Baugruppe zum Anschluß des Aufhängerohrs an das Gehäuse einen in der Bohrung eines Gehäuseflansches untergebrachten Stutzen enthält, der mit dem einen Ende an dem Aufhängerohr luftdicht befestigt ist, und an dem anderen Ende dieses Stutzens ein Bund mit einem ringförmigen Ansatz ausgeführt ist, der den Gehäuse zugekehrt ist, worauf ein ringförmiger Gegenanschlag ausgeführt ist, wobei zwischen den besagten ringförmigen Ansätzen eine abdichtende metallische Einlage angebracht und im mittleren Teil des besagten Stutzens ein Ringflansch befestigt ist, worin Anschlagbolzen angeordnet sind, die mit dem Gehäuseflansch zur Berührung kommen, und daß die Baugruppe zum Auschluß des Aufhängerohrs an des Kryomittelgefäß des Strahlungsschirms bzw. an das Abpumpelement einen an den Hals des Kryomittelgefäßes des Strahlungsschirms bzw. des Abpumpelements luftdicht angeschlossenen Stutzen mit einem stirnseitigen Dichtungsbund und zwei zueinander mit ihren Stirnflächen zugekehrte, miteinander verbundene Flansche enthält, von denen der eine am Ende des Aufhängerohrs luftdicht befestigt und der andere am Ende des besagten Stutzens angeordnet ist, wobei die besagten Flansche an den einander zugekehrten Flächen mit ringförmigen Ansätzes versehen sind und der besagte stirnseitige Dichtungsbund des Stutzens zwischen den ringförmigen Ansätzen der besagten Flansche angeordnet ist, wobei das Aufhängerohr des Abpumpelementes mit einer Lagerbuchse versehen ist und im Deckel des Kryomittelgefäßes des Strahlungsschirms ein Ringelement befestigt ist, das mit der Lagerbuchse in Berührung kommt, wobei das Pumpengehäuse, der Strahlunggschirm und das Abpumpelement aus Metallen mit einem kleinen spezifischen Gewicht hergestellt sind.This task is arranged in a cryogenic condensation pump with a housing, in the interior of which a radiation shield containing, is connected to one another, a cryogenic agent vessel, a heat-conducting frame and an arrow screen, and a pumping element designed as a vessel, the cryogenic agent vessel of the radiation screen and the pumping element being arranged Hanger tubes are provided, according to the invention solved in that each suspension tube with at the opposite End arranged assemblies for connection to the housing and to the cryogenic agent vessel of the radiation shield or to the pumping element is provided, wherein the assembly for connecting the suspension tube to the housing contains a socket accommodated in the bore of a housing flange, which has one end on the suspension tube is attached airtight, and at the other end of this neck a collar is made with an annular projection facing the housing, whereupon an annular counterstop is carried out, a sealing metallic insert being placed between said annular projections and in the central part of said Stutzen a ring flange is fixed, in which stop bolts are arranged, which come into contact with the housing flange, and that the assembly to exclude the suspension tube on the cryogenic agent vessel of the radiation shield or on the pumping element one on the neck of the cryogenic agent vessel of the radiation contains the connection or the pumping-off element in an airtight manner with an end face sealing collar and two mutually connected flanges facing one another with their end faces, one of which is attached at the end of the suspension tube in an airtight manner and the other is arranged at the end of the said connection piece, the said flanges are provided on the mutually facing surfaces with annular projections and said front sealing collar of the socket is arranged between the annular projections of said flanges, the hanging tube of the pumping element being provided with a bearing bush and an annular element being fastened in the lid of the cryogenic agent vessel of the radiation shield comes into contact with the bearing bush, the pump housing, the radiation shield and the pumping element being made of metals with a small specific weight.

Durch Ausrüstung jedes Aufhängerohrs mit Baugruppen zum Anschluß an das Gehäuse und das Kryomittelgefäß des Strahlungsschirms bzw. an das Abpumpelement und durch besagte Ausführung dieser Baugruppen werden die Montage und die Demontage der Pumpe erleichtert und vereinfacht, wenn eine Reparatur des Kryomittelgefäßes,des Strahlungsschirms bzw. des Abpumpelementes, z.B. zum wiederholten Bedampften von deren Flächen mit Aluminium erfoderlich ist. Bei einer Demontage der Pumpe werden nur die Baugruppen zum Anschluß der Aufhängerohre an das Gehäuse auseinandergenommen, wonach alle inneren Baugruppen der Pumpe aus dem Gehäuse herausgenommen werden. Bei der Montage werden die Baugruppen der Pumpe in umgekehter Reihenfolge zusammengebaut.By equipping each suspension tube with assemblies for connection to the housing and the cryogenic agent vessel of the radiation shield or to the pumping element and by said design of these assemblies, the assembly and disassembly of the pump are facilitated and simplified when a repair of the cryogenic agent vessel, the radiation shield or the pumping element, for example for repeated vapor deposition of their surfaces with aluminum is required. When the pump is disassembled, only the assemblies for connecting the suspension tubes to the housing are taken apart, after which all internal assemblies of the pump are removed from the housing. When assembling, the assemblies of the pump are assembled in reverse order.

Die besagten Anschlußbaugruppen, die auf die beschriebene Art und Weise ausgeführt sind, machen die Herstellung des Pumpengehäuses, des Strahlungsschirms und des Abpumpelementes aus Metallen mit einem kleinen spezifischen Gewicht, und zwar das Gehäuse aus Titan, der Strahlungsschirm und das Abpumpelement aus Aluminium möglich, wodurch das Gewicht und der Metallaufwand der Pumpe verkleinert werden können.Said connection assemblies, which are designed in the manner described, make it possible to manufacture the pump housing, the radiation shield and the pumping element out of metals with a small specific weight, namely the housing made of titanium, the radiation shield and the pumping element out of aluminum, which makes it possible the weight and the metal expenditure of the pump can be reduced.

Die besagte Ausführung der Anschlußbaugruppen stellt eine vakuumdichte Verbindung eines aus Titan hergestellten Pumpengehäuses sowie, aus Aluminium hergestellt, eines Strahlungsschirms und eines Abpumpelementes mit aus nichtrostendem Stahl hergestellten Aufhängerohren sicher. Bei einem Festziehen der Anschlußbaugruppen wird dadurch, daß an den zu verbindenden Elementen ringförmige Ansätze und eine Dichtungseinlage dazwischen, die aus einem weichen Metall, z.B. Aluminium ausgeführt ist, vorhanden sind, eine vakuumdichte Verbindung des aus Titan ausgeführten Gehäuses mit einem aus nichtrostendem Stahl hergestellten Aufhängerohr und des aus Aluminium hergestelten Kryomittelgefäßes des Strahlungsschirms bzw. des Abpumpelementes mit einem ebenfalls aus nichtrostendem Stahl hergestellten Aufhängerohr erreicht.The said design of the connection assemblies ensures a vacuum-tight connection of a pump housing made of titanium and, made of aluminum, a radiation shield and a pumping element with hanging tubes made of stainless steel. When the connection assemblies are tightened, ring-shaped projections and a sealing insert between them, which are made of a soft metal, e.g. Aluminum is made, are present, a vacuum-tight connection of the housing made of titanium with a suspension tube made of stainless steel and the aluminum-made cryogen vessel of the radiation shield or the pumping element is achieved with a suspension tube also made of stainless steel.

Es ist zweckmäßig, daß die Kontaktflächen der Lagerbuchse und des ringförmigen Elementes kegelig ausgeführt werden. Diese Ausführung der Kontaktflächen erleichtert den Ausbauvorgang des Abpumpelementes bei einem Auseinandernehmen der Pumpe und Stellt einen besseren Wärmekontact des mittleren Tiels des Aufhängerohrs mit dem Kryomittelgefäß des Strahlungsschirms nach deren Zusammenbau sicher.It is expedient that the contact surfaces of the bearing bush and the annular element are made conical. This design of the contact surfaces facilitates the removal process of the pumping element when the pump is disassembled and ensures better thermal contact of the middle part of the suspension tube with the cryogenic agent vessel of the radiation shield after its assembly.

Es ist zweckmäßig, daß das Aufhängerohr des Abpumpelementes auf der Seite, die dem Abpumpelement zugekehrt ist, mit einem koaxial angeordneten Schirm versehen ist, der einen Wärmekontakt mit dem Aufhängerohr in der Nähe seiner Baugruppe zum Anschluß mit dem Abpumpelement aufweist.It is expedient that the suspension tube of the pumping element is provided on the side facing the pumping element with a coaxially arranged screen which has thermal contact with the suspension tube in the vicinity of its assembly for connection to the pumping element.

Der besagte Schirm setzt eine Wärmezufuhr durch Strahlung vom Kryomittelgefäß des Strahlungsschirms in die Baugruppe zum Anschluß des Aufhängerohrs an das Abpumpelement, das die Flüssigheliumtemperatur aufweist, sowie in den unteren Teil des Aufhängerohrs herab, dessen Temperatur jener des Flüssigheliums nahe ist. Folglich wird eine Wärmezufuhr durch die Wärmeleitfähigkeit in das Abpumpelement selbst vom Aufhängerohr und seiner Baugruppe zum Anschluß un das Abpumpelement vermindert, wodurch eine Flüssigheliumverdampfung im Abpumpelement vermindert und somit die Wirtschaftlichkeit der Pumpe gesteigert werden.Said shield reduces radiation heat from the cryogenic center vessel of the radiation shield into the assembly for connecting the suspension tube to the pumping element, which is at the liquid helium temperature, and into the lower part of the suspension tube, the temperature of which is close to that of the liquid helium. As a result, the supply of heat is reduced by the thermal conductivity in the pumping element itself from the suspension tube and its assembly for connection and the pumping element, as a result of which liquid helium evaporation in the pumping element is reduced and the economy of the pump is thus increased.

Es ist zweckmäßig, daß das Kryomittelgefäß des Strahlungsschirms mit einen zusätzlichen Schirm versehen wird, der zwischen dem Gehäuse und dem besagten Gefäß mit einem Spalt gegenüber diesen angeordnet ist. Der zusätzliche Schirm vermindert eine Wärmezufuhr durch Strahlung vom Pumpengehäuse in das Kryomittelgefäß, wodurch eine Verdampfung des Kryomittels (Flüssigstickstoff) herabgesetzt und somit die Wirtschaftlichkeit der Pumpe gesteigert werden.It is expedient that the cryogenic center vessel of the radiation shield is provided with an additional shield, which is arranged between the housing and the said vessel with a gap with respect to these. The additional screen reduces the supply of heat due to radiation from the pump housing into the cryogen container, which reduces evaporation of the cryogen (liquid nitrogen) and thus increases the economy of the pump.

Es ist zweckmäßig, daß im Boden des Abpumpelenentes in dessen Achse ein Buchse angeordnet wird, in deren gegenüberliegenden Enden koaxiale Blindbohrungen ausgeführt sind und im Pfeilschirm eine Bohrung vorhanden ist, die mit den Bohrungen in der Buchse gleichachsig ist.It is expedient that in the bottom of the Abpumpelenentes a socket is arranged in the axis thereof, in the opposite ends of which coaxial blind holes are made and in the arrow screen there is a hole which is coaxial with the holes in the socket.

Die besagte Buchse mit Bohrungen gibt die Möglichkeit, das Abpumpelement in Pumpengehäuse mit Hilfe von in diese Bohrungen eingesteckten und arretierten Stangen starr zu befestigen, was beim transport der Pumpe die Unversehrtheit der Pumpenelemente und -baugruppen und deren Schweißverbindungen gewährleistet.Said bushing with holes enables the pumping element to be rigidly fixed in the pump housing with the aid of rods inserted and locked in these holes, which ensures the integrity of the pump elements and assemblies and their welded connections when the pump is being transported.

Kurzbescthreibung der ZeichnungenBrief description of the drawings

Nachstehend wird die Erfindung durch eine ausführliche Beschreibung eines Ausführungsbeispiels unter Bezugnahme auf die Zeichungen näher erläutert. Es zeigt

  • Fig.1 eine erfindungsgemäße kryogene Kondensationspumpe im Schnitt;
  • Fig.2 die Baugruppe A in Fig.1 im vergrößerten Maßstab im Schnitt;
  • Fig.3 die Baugruppe B in Fig.1 im vergrößerten Maßstab im Schnitt und
  • Fig.4 die Baugruppe C in Fig.1 im vergrößerten Maßstab im Schnitt.
The invention is explained in more detail below by a detailed description of an exemplary embodiment with reference to the drawings. It shows
  • 1 shows a cryogenic condensation pump according to the invention in section;
  • 2 shows the assembly A in Figure 1 on an enlarged scale in section;
  • 3 shows the assembly B in Figure 1 on an enlarged scale in section and
  • 4 shows the assembly C in Figure 1 on an enlarged scale in section.

Die beste Ausführungsvariante der ErfindungThe best variant of the invention

Die kryogene Kondensationspumpe enthält ein Gehäuse 1 (Fig.1) mit einem Deckel 2, in dessen Innerem, miteinander verbunden, ein Gefäß 3 für das Kryomittel (Flüssigstickstoff), eine wärmeleitende Zarge 4 und ein Pfeilschirm 5, die gemeinsam einen Strahlungsschirm 3, 4, 5 bilden, und ein Abpumpelement 6 untergebracht sind. Das Kryomittelgefäß 3 hat einen Deckel 7 und einen Boden 8. Das Abpumpelement ist als ein Gefäß ausgeführt, das ein Kryomittel (Flüssighelium) aufnimmt und in einem Hohlraum untergebracht ist, der durch den Boden 8 des Kryomittelgefäßes 3, die wärmeleitende Zarge 4 und den Pfeilschirm 5 gebildet ist.The cryogenic condensation pump contains a housing 1 (FIG. 1) with a lid 2, in the interior of which is connected to one another, a vessel 3 for the cryogen (liquid nitrogen), a heat-conducting frame 4 and an arrow screen 5, which together form a radiation screen 3, 4 , 5 form, and a pumping element 6 are housed. The cryogenic agent vessel 3 has a lid 7 and a bottom 8. The pumping element is designed as a vessel which receives a cryogenic agent (liquid helium) and is accommodated in a cavity which is through the bottom 8 of the cryogenic agent vessel 3, the heat-conducting frame 4 and the arrow screen 5 is formed.

Das Kryomittelgefäß 3 des Strahlungsschirms 3, 4, 5 und das Abpumpelement 6 sind mit zugehörigen Aufhängerohren 9 und 10 versehen. Das Aufhängerohr 9 enthält an seinen gegenüberliegenden Enden angeordnete Baugruppen 11a und 12a zum Anschluß an das Gehäuse 1 bzw. das Kryomittelgefäß 3. Das Aufhängerohr 10 enthält auch an seinen gegenüberliegenden Enden angeordnete Baugruppen 11-b und 12-b zum Anschluß an das Gehäuse 1 bzw. das Abpumpelement 6.The cryogenic agent vessel 3 of the radiation shield 3, 4, 5 and the pumping element 6 are provided with associated suspension tubes 9 and 10. The suspension tube 9 contains assemblies 11a and 12a arranged at its opposite ends for connection to the housing 1 and the cryogen container 3, respectively. The suspension tube 10 also contains assemblies 11-b and 12-b arranged at its opposite ends for connection to the housing 1 and 12, respectively the pumping element 6.

Die Baugruppe 11-a zum Anschluß des Aufhängerohrs 9 an das Gehäuse 1 enthält einen Stutzen 13 (Fig.2), der in einer Bohrung 14 eines Flansches 15 des Gehäuses 1 untergebracht ist. Der Flansch 15 ist im Inneren eines Stutzens 16 des Deckels 2 des Gehäuses 1 angeordnet und mit dem Stutzen 16 und folglich mit dem Gehäuse starr verbunden.The assembly 11-a for connecting the suspension tube 9 to the housing 1 contains a connection piece 13 (FIG. 2) which is accommodated in a bore 14 in a flange 15 of the housing 1. The flange 15 is inside a connecting piece 16 of the cover 2 of the housing 1 arranged and rigidly connected to the socket 16 and consequently to the housing.

Das eine Ende 17 des Stutzens 13 ist am Aufhängerohr 9 luftdicht befestigt und an seinem anderen Ende ist ein Bund 18 mit einem Ringansatz 19 ausgeführt, der dem Flansch 15 des Gehäuses 1 zugekehrt ist, worauf ein ringförmiger Gegenansatz 20 ausgeführt ist. Zwischen den ringförmigen Ansätzen 19 und 20 ist eine Dichtungseinlage 21 anbebracht, die aus weichem Metall, z.B. Aluminium hergestellt ist. Im Mittelteil des Stutzens 13 ist auf einem Gewinde ein ringförmiger Flansch 22 angeordnet, der Gewindebohrungen aufweist, worin Anschlagbolzen 23 eingesetzt sind.One end 17 of the connecting piece 13 is attached to the suspension tube 9 in an airtight manner and at its other end a collar 18 is designed with an annular shoulder 19 which faces the flange 15 of the housing 1, whereupon an annular counter-shoulder 20 is executed. Between the annular lugs 19 and 20 a sealing insert 21 is attached, which is made of soft metal, e.g. Aluminum is made. In the middle part of the connector 13, an annular flange 22 is arranged on a thread, which has threaded bores, in which stop bolts 23 are inserted.

Die Baugruppe 11-b zum Anschluß des Aufhängerohrs 10 an das Gehäuse 1 ist ähnlich der Baugruppe 11-a zum Anschluß des Aufhängerohrs 9 an das Gehäuse 1 mit dem einzigen Unterschied ausgeführt, daß der Flansch 15 unmittelbar am Boden 2 des Gehäuses 1 befestigt ist (der Flansch ist im einzelnen nicht eingezeichnet, damit die Zeichnungen übersichtlich bleiben).The assembly 11-b for connecting the suspension tube 10 to the housing 1 is similar to the assembly 11-a for connecting the suspension tube 9 to the housing 1 with the only difference that the flange 15 is attached directly to the bottom 2 of the housing 1 ( the flange is not shown in detail so that the drawings remain clear).

In den Baugruppen 11-a und 11-b zum Anschluß der Aufhängerohre 9 bzw. 10 an das Gehäuse 1 der Pumpe wird beim Festziehen der Anschlagbolzen 23 infolgedessen, daß auf den einander zugekehrten Flächen des Bundes 18 bzw. des Flansches 15 des Gehäuses 1 die ringförmigen Ansätze 19 und 20 und eine Dichtungseinlage 21 zwischen diesen vorhanden sind, die aus weichem Metall, z.B. Aluminium Hergestellt wird, eine vakuumdichte Verbindung mit dem aus nichtrostendem Stahl hergestellten Gehäuse 1 sichergestellt.In the assemblies 11-a and 11-b for connecting the suspension tubes 9 and 10 to the housing 1 of the pump when tightening the stop bolt 23, consequently, that on the facing surfaces of the collar 18 and the flange 15 of the housing 1 annular approaches 19 and 20 and a sealing insert 21 are present between them, which are made of soft metal, for example Aluminum is produced, a vacuum-tight connection with the housing 1 made of stainless steel is ensured.

Die Baugruppe 12-a zum Anschluß des Aufhängerohrs 9 an das Kryomittelgefäß 3 des Strahlungsschirms 3, 4, 5 enthält einen an einen Hals 26 des Kryomittelgefäßes 3 luftdicht angeschlossenen Stutzen 24 (Fig.3) mit einem stirnseitigen Dichtungsbund 25. Die Baugruppe 12-a enthält auch zwei Flansche 27 und 28, die einander mit Stirnflächen 29 bzw. 30 zugekehrt und miteinander durch Spannschrauben 31 verbunden sind. Der Flansch 27 ist an einem Ende des Aufhängerohrs 9 luftdicht befestigt und der Flansch 28 ist am Ende des Stutzens 24 angeordnet. Die Flansche 27 und 28 sind auf ihren Stirnflächen 29 bzw. 30 mit ringförmigen Ansätzen 32 bzw. 33 versehen und zwischen ihnen befindet sich der besagte Dichtungsbund 25.The assembly 12-a for connecting the hanging tube 9 to the cryogenic agent vessel 3 of the radiation shield 3, 4, 5 contains a connection piece 24 (FIG. 3), which is connected to a neck 26 of the cryogenic agent vessel 3 in an airtight manner, with an end face sealing collar 25. The assembly 12-a also contains two flanges 27 and 28 which face each other with end faces 29 and 30 and are connected to one another by means of clamping screws 31. The flange 27 is airtightly attached to one end of the suspension tube 9 and the flange 28 is at the end of the neck 24 arranged. The flanges 27 and 28 are provided on their end faces 29 and 30 with annular projections 32 and 33 and between them is the said sealing collar 25.

Die Baugruppe 12-a zum Anschluß des Aufhängerohrs 9 an das Kryomittelgefäß 3 ist mit einem Schirm 34 mit einem Bund 35 versehen. Der Schirm 34 setzt eine Wärmezufuhr durch Strahlung vom Gehäuse 1 zur Baugruppe 12-a herab.The assembly 12-a for connecting the suspension tube 9 to the cryogen container 3 is provided with a shield 34 with a collar 35. The screen 34 reduces the supply of heat by radiation from the housing 1 to the assembly 12-a.

Die Baugruppe 12-b zum Anschluß des Aufhängerohrs 10 an das Abpumpelement 6 ist ähnlich der Baugruppe 12-a zum Anschluß des Aufhängerohrs 9 an das Kryomittelgefäß 3 ausgeführt und in Fig.4 dargestellt, worin die gleichnamigen Elemente durch dieselben Bezeichnungen wie in Fig.3 bezeichnet sind.The assembly 12-b for connecting the suspension tube 10 to the pumping-out element 6 is similar to the assembly 12-a for connecting the suspension tube 9 to the cryogenic agent vessel 3 and is shown in FIG. 4, in which the elements of the same name have the same designations as in FIG are designated.

In den Baugruppen 12-a zum Anschluß des Aufhängerohrs 9 an das Kryomittelgefäß 3 und 12-b zum Anschluß des Aufhängerohrs 10 an das Abpumpelement 6 wird beim Festziehen der Spannschrauben 31 infolge dessen, daß ringförmige Ansätze 32, 33 auf den einander zugekehrten Stirnflächen 29, 30 der Flansche 27 bzw. 28 und ein Dichtungsbund 25 zwischen den ringförmigen Ansätzen 32, 33 vorhanden sind, der aus weichem Metall, z.B. Aluminium hergestellt ist, eine vakuumdichte Verbindung des Kryomittelgefäßes 3 bzw. des Abpumpelementes 6, die aus Aluminium hergestellt sind, mit den aus nichtrostendem Stahl hergestellten Aufhängerohren 9, 10 sichergestellt.In the assemblies 12-a for connecting the suspension tube 9 to the cryogenic agent vessel 3 and 12-b for connecting the suspension tube 10 to the pumping element 6, when tightening the clamping screws 31, due to the fact that annular projections 32, 33 on the mutually facing end faces 29, 30 of the flanges 27 and 28 and a sealing collar 25 between the annular lugs 32, 33 are provided, made of soft metal, for example Aluminum is made, a vacuum-tight connection of the cryogen container 3 or the pumping element 6, which are made of aluminum, with the suspension tubes 9, 10 made of stainless steel.

Das Aufhängerohr 10 des Abpumpelementes 6 verläuft durch das Kryomittelgefäß 3 des Strahlungsschirms 3, 4, 5 im Inneren eines Zylinders 36, der in der Achse des Kryomittelgefaßes 3 angeordnet und im Deckel 7 und im Boden 8 des besagten Gefäßes befestigt ist. Das Aufhängerohr 10 ist mit einer Lagerbuchse 37 versehen, die auf ein Spiralfprofil der Sicken des Aufhängerohrs 10 aufgeschraubt ist und im Deckel 7 des Kryomittelgefäßes 3 ist ein ringförmiges Element 38 befestigt, das mit der Lagerbuchse 37 in Berührung kommt. Kontaktflächen der Lagerbuchse 37 und des Ringelementes 38 sind kegelig ausgeführt. Diese Ausführung der Kontakflächen der Lagerbuchse 37 und des Ringelementes 38 erleichtert den Ein- bzw. Ausbau des Abpumpelementes 6 bei einer Montage bzw. Demontage der Pumpe. Außerdem Wird dadurch ein besserer Wärmekontakt zwischen dem Aufhängerohr 10 und dem Kryomittelgefäß 3 zur Verminderung der Wärmezufuhr infolge Wärmeleitfähigkeit über den oberen Teil des Aufhängerohrs 10 vom Gehäuse 1 der Pumpe gewärleistet.The hanging tube 10 of the pumping element 6 runs through the cryogenic agent vessel 3 of the radiation shield 3, 4, 5 inside a cylinder 36 which is arranged in the axis of the cryogenic agent vessel 3 and is fastened in the lid 7 and in the bottom 8 of the said vessel. The suspension tube 10 is provided with a bearing bush 37 which is screwed onto a spiral profile of the beads of the suspension tube 10 and an annular element 38 is fastened in the cover 7 of the cryogenic agent vessel 3 and comes into contact with the bearing bush 37. Contact surfaces of the bearing bush 37 and the ring member 38 are tapered. This design of the contact surfaces of the bearing bush 37 and the ring element 38 facilitates the insertion or Removal of the pumping element 6 during assembly or disassembly of the pump. In addition, this ensures better thermal contact between the suspension tube 10 and the cryogen container 3 to reduce the heat input due to thermal conductivity via the upper part of the suspension tube 10 from the housing 1 of the pump.

Das Kryomittelgefäß 3 ist mit einem zusätzlichen Schirm 39 versehen, der zwischen dem Gehäuse 1 und dem Kryomittelgefäß 3 mit einem Spalt 10 gegenüber diesen angeordnet ist. Der Schirm 39 wird an dem Bund 35 des Schirms 34 (Fig.3) aufgehängt. Dieser Schirm vermindert die Wärmezufuhr durch Strahlung vom Gehäuse 1 der Pumpe zum Kryomittelgefäß 3, infolgedessen wird eine Verdampfung des Kryomittels (Flüssigstickstoff) vermindert und die Wirtschaftlichkeit der Pumpe gesteigert.The cryogenic agent vessel 3 is provided with an additional screen 39, which is arranged between the housing 1 and the cryogenic agent vessel 3 with a gap 10 opposite them. The screen 39 is suspended from the collar 35 of the screen 34 (FIG. 3). This screen reduces the supply of heat by radiation from the housing 1 of the pump to the cryogen container 3, as a result of which evaporation of the cryogen (liquid nitrogen) is reduced and the economy of the pump is increased.

Das Aufhängerohr 10 des Abpumpelementes 6 ist auf jener Seite, die dem Abpumpelement zugekehrt ist, mit einem koaxial angeordneten Schirm (Fig.4) versehen, der aus zwei Teilen, und zwar einem oberen Teil 41, der die Oberfläche des Aufhängerohrs 10 auf einer Hälfte seiner Länge umschließt, und einem unteren Teil 42, der die Baugruppe 12-b zum Anschluß des Aufhängerohrs 10 an das Abpumpelement 6 schützt, besteht. Der obere 41 und der untere 42 Schirmteil sind durch ein Gewinde 43 verbunden. Der Schirm weist einen Wärmekontakt mit dem Aufhängerohr 10 in der Nähe von dessen Baugruppe zum Anschluß an das Abpumpelement 3 richtig: Abpumpelement 6 auf. Der Kontakt wird mit Hilfe eines Bundes 44 erzielt, der am unteren Schirmteil 42 ausgeführt ist und mit der Sickenspirale des Aufhängerohrs 10 zum Eingriff kommt.The suspension tube 10 of the pumping element 6 is provided on the side facing the pumping element with a coaxially arranged screen (FIG. 4), which consists of two parts, namely an upper part 41, which covers the surface of the suspension tube 10 on one half encloses its length, and a lower part 42, which protects the assembly 12-b for connecting the suspension tube 10 to the pumping element 6. The upper 41 and the lower 42 screen part are connected by a thread 43. The shield has a thermal contact with the hanging tube 10 in the vicinity of its assembly for connection to the pumping element 3 correctly: pumping element 6. The contact is achieved with the aid of a collar 44, which is embodied on the lower shield part 42 and engages with the bead spiral of the hanging tube 10.

Ein Ende des Aufhängerohrs 10 ist mit dem Flansch 27 der Baugruppe 12-b zu seinem Anschluß an das Abpumpelement 6 unmittelbar verbunden (verschweißt) und weist daher eine Temperatur auf, die der Flüssigheliumtemperatur im Abpumpelement 6 (4,2K) nahe liegt. Dank des Wärmekontakts des Aufhängerohrs 10 mit dem unteren Schirmteil 42 wird längs des Schirms eine Temperatur aufrechterhalten, die der Flüssigheliumtemperatur nahe ist. Die Temperatur des Aufhängerohrs 10 ändert sich von seinem Ende, das an das Abpumpelement 6 anschließt, bis zur Mitte der Länge von 4,5 bis 50 K.One end of the suspension tube 10 is directly connected (welded) to the flange 27 of the assembly 12-b for its connection to the pumping element 6 and therefore has a temperature which is close to the liquid helium temperature in the pumping element 6 (4.2K). Thanks to the thermal contact of the hanging tube 10 with the lower screen part 42, a temperature is maintained along the screen that is close to the liquid helium temperature. The temperature of the hanging tube 10 changes from its end, which connects to the pumping element 6, to the middle of the length from 4.5 to 50 K.

Dieser Schirm vermindert die Wärmezufuhr durch Strahlung vom Gefäß 3 des Strahlungsschirms 3, 4, 5 in die Baugruppe 12-b des Aufhängerohrs 10 mit dem Abpumpelement 6 und dem unteren Teil des Aufhängerohrs 10. Folglich wird die Wärmezufuhr durch Wärmeleitung in das Abpumpelement 6 vom Aufhängerohr 10 und von der Baugruppe 12-b zum Anschluß an das Abpumpelement 6 vermindert, wodurch eine Verdampfung von Flüssigheliun herabgesetzt und deswegen die Wirtschaftlichkeit der Pumpe gesteigert werden.This screen reduces the supply of heat by radiation from the vessel 3 of the radiation screen 3, 4, 5 into the assembly 12-b of the suspension tube 10 with the pumping element 6 and the lower part of the suspension tube 10. Consequently, the heat supply by heat conduction into the pumping element 6 from the suspension tube 10 and reduced by the assembly 12-b for connection to the pumping element 6, thereby reducing the evaporation of liquid helium and therefore increasing the economy of the pump.

Die Pumpe ist mit Flanschen 45, 46, 47 zum Anschluß an eine Hilfspumpe zum Hochvakuumevakuieren z.B. eine Ionenzerstäuberpumpe, an eine Pumpe zum Vorevakuieren, z.B. eine Adsorptionspumpe, und an eine Arbeitskammer (nicht eingezeichnet, damit die Zeichungen übersichtlich bleiben) und mit einem Stopfenflansch 48 mit einem Boden 49 versehen, der zum Transport der Pumpe und deren Prüfung "auf sich selbst" dient.The pump is equipped with flanges 45, 46, 47 for connection to an auxiliary pump for high vacuum evacuation e.g. an ion atomizing pump, to a pump for pre-evacuation, e.g. an adsorption pump, and to a working chamber (not shown so that the drawings remain clear) and provided with a stopper flange 48 with a bottom 49 which serves to transport the pump and test it "on itself".

Im Boden 50 des Abpumpelementes 6 ist in dessen Achse eine Buchse 51 befestigt, in deren gegenüberliegenden Enden Blindbohrungen 52, 53 ausgeführt sind, und im Pfeilschirm 5 ist eine Bohrung 54 vorhanden, die mit den Bohrungen 52, 53 gleichachsig ist. Bei einem Transport der Pumpe wird in die Bohrung 52 eine Stange eingesetzt, die inner-halb des Aufhängehohrs 10 abgesenkt und am Stutzen 13 befestigt wird. In die Bohrung 53 setzt man eine Stange ein, die durch die Bohrung 54 im Pfeilschirm 5 geführt und im Boden 49 des Stopfenflansches 48 befestig wird (die Stangen sind nicht eingezeichnet, damit die Zeichnungen übersichtlich bleiben).In the bottom 50 of the pumping element 6, a bushing 51 is fastened in its axis, in the opposite ends of which blind holes 52, 53 are made, and in the arrow screen 5 there is a hole 54 which is coaxial with the holes 52, 53. When the pump is being transported, a rod is inserted into the bore 52, which rod is lowered within the suspension tube 10 and fastened to the socket 13. A rod is inserted into the bore 53, which is passed through the bore 54 in the arrow screen 5 and fastened in the bottom 49 of the plug flange 48 (the rods are not shown, so that the drawings remain clear).

Die Busche 51 mit den Bohrungen 52, 53 stellt eine starre Befestigung des Abpumpelementes 6 mittels Stangen sicher, wodurch bei einem Transport der Pumpe die Unversehrtheit der Elemente und der Baugruppen der Pumpe gewährleistet wird.The bush 51 with the bores 52, 53 ensures rigid attachment of the pumping element 6 by means of rods, as a result of which the integrity of the elements and the components of the pump is ensured when the pump is transported.

Das Gehäuse 1 der Pumpe ist aus Titan, der Strahlungsschirm (das Kryomittelgefäß 3, die wärmeleitende Zarge 4, der Pfeilschirm 5) und das Abpumpelement 6 aus Aluminium hergestellt. Dies gibt die Möglichkeit, das Gewicht und den Metallaufwand der Pumpe zu vermindern.The housing 1 of the pump is made of titanium, the radiation shield (the cryogen container 3, the heat-conducting frame 4, the arrow shield 5) and the pumping element 6 made of aluminum produced. This makes it possible to reduce the weight and the metal expenditure of the pump.

Die kryogene Kondensationspumpe funktioniert wie folgt.The cryogenic condensation pump works as follows.

Nachdem die Pumpe transportiert worden ist, entfernt man den Stopfenflansch 48, nimmt die untere Stange heraus und schraubt In die Bohrung 54 einen Kupfer- bzw. Aluminiumstopfen ein. Man stellt die Pumpe mit dem Flansch 47 auf einen Gegenflansch der Arbeitskammer auf und schließt sie vakuumdicht aneinander an. Man nimmt die obere Stange heraus. Dann entfernt man die Stopfen von den Flanschen 45 und 46 und schließt an den Flansch 45 die Ionenzerstäuberpumpe und an den Flansch 46 ein Ventil mit einer Metalldichtung an. Über dieses Ventil wird an die Pumpe ein System zum Vorevakuieren angeschlossen, das aus einer mechanischen Vorvakuumpumpe und einer Adsorptionspumpe besteht. Zuerst evakuiert man mit Hilfe der mechanischen Vorvakuumpumpe das zu evakuierende Volumen der erfindungsgemäßen Pumpe und die Arbeitskammer bis zu einem Druck von 100...40 Pa und danach mit Hilfe einer Adsorptionspumpe bis zu einem Druck von 1.10⁻²...1.10⁻⁴ Pa.After the pump has been transported, the plug flange 48 is removed, the lower rod is removed and a copper or aluminum plug is screwed into the bore 54. The pump with the flange 47 is placed on a counter flange of the working chamber and connected to one another in a vacuum-tight manner. You take out the top bar. The plugs are then removed from the flanges 45 and 46 and the ion atomizing pump is connected to the flange 45 and a valve with a metal seal is connected to the flange 46. Via this valve, a system for pre-evacuation is connected to the pump, which consists of a mechanical pre-vacuum pump and an adsorption pump. First, the mechanical fore-vacuum pump is used to evacuate the volume of the pump according to the invention and the working chamber to a pressure of 100 ... 40 Pa and then with the aid of an adsorption pump to a pressure of 1.10 1.1² ... 1.10⁻⁴ Pa .

Dann füllt man Flüssigstickstoff in das Kryomittelgefäß 3 über eines der Aufhängerohre 9 ein. Nachdem sich der Druck in der Pumpe um eine Größenordnung gesenkt hat, schaltet man die Ionenzerstäuberpumpe ein und der Druck in der Pumpe senkt sich noch um eine bzw. zwei Größenordnungen.Then liquid nitrogen is poured into the cryogen container 3 via one of the suspension tubes 9. After the pressure in the pump has decreased by an order of magnitude, the ion atomizing pump is switched on and the pressure in the pump is reduced by one or two orders of magnitude.

Danach ist es zweckmäßig, die Arbeitskammer vorläufig bis zu 200...250°C aufheizen zu lassen. Dabei hat man darauf zu achten, daß der Druck in der Kammer nicht über 1.10⁻⁴ Pa ansteigen darf. Nach einer derartigen vier- bis achtstündigen Aufheizung der Arbeitskammer senkt sich der Druck darin nach dem Abkühlen in der Regel bis zu 1.10⁻⁶ ... 1.10⁻⁷ Pa.Afterwards it is advisable to let the working chamber heat up to 200 ... 250 ° C for the time being. Care must be taken to ensure that the pressure in the chamber does not exceed 1.10⁻⁴ Pa. After heating the working chamber for four to eight hours in this way, the pressure in it usually drops after cooling down to 1.10⁻⁶ ... 1.10 Abk Pa.

Dann kühlt man, um Flüssighelium zu sparen, das Abpumpelement 6 mit einer kleinen Menge von Flüssigstickstoff (1 bis 2 Liter) bis zu einer Temperatur von 80...100 K ab, die über das Aufhängerohr 10 eingefüllt wird. Man kann dabei die Temperatur mit Hilfe eines Thermoelementes kontrollieren, das über das Aufhängerohr 10 auf den Boden des Abpumpelementes gesenkt wird.Then, in order to save liquid helium, the pumping element 6 is cooled with a small amount of liquid nitrogen (1 to 2 liters) to a temperature of 80 ... 100 K, which is filled in via the hanging tube 10. You can control the temperature with the help of a thermocouple, which is lowered via the hanging tube 10 to the bottom of the pumping element.

Nach diesem Arbeitsgang ist der Hohlraum des Abpumpelementes 6 mit Hilfe der mechanischen Vorvakuumpumpe bis zu einem Druck von 100...40 Pa zu evakuieren, mit gasförmigem Helium zu füllen und danach das Abpumpelement 6 mit Flüssighelium zu füllen. Dann wird der Druck in der Arbeitskammer in der Regel bis zu 1.10⁻⁷...1.10⁻⁹ Pa und darunter sinken. Danach schließt man den Stutzen 13 an ein System zum Sammeln des gasförmigen Heliums an. Mit Hilfe der auf diese Art und Weise vorbereiteten Pumpe wird die Arbeitskammer bis zum erforderlichen Druck evakuiert.After this operation, the cavity of the pumping element 6 is to be evacuated to a pressure of 100 to 40 Pa with the aid of the mechanical backing pump, filled with gaseous helium and then the pumping element 6 is filled with liquid helium. Then the pressure in the working chamber will generally drop to 1.10⁻⁷ ... 1.10⁻⁹ Pa and below. Then the connector 13 is connected to a system for collecting the gaseous helium. With the help of the pump prepared in this way, the working chamber is evacuated to the required pressure.

Am vorteilhalftesten kann die Erfindung in der Vakuumtechnik verwendet werden, die in der Elektronen- und Hochfrequenzindustrie und in andern Industriezweigen sowie in wissenschaftlichen Forschungen zu einem breiten Einsatz kommt, in denen es erforderlich ist, ein extra reines, vollkommen ölfreies Höchstvakuum in einem Bereich der Betriebsdrücke 1.10⁻⁴ ...1.10⁻¹⁰ Pa zu erzeugen.Most advantageously, the invention can be used in vacuum technology that is widely used in the electron and radio frequency industries and other industries, as well as in scientific research where it is necessary to have an extra pure, completely oil-free vacuum in a range of operating pressures 1.10⁻⁴ ... 1.10⁻¹⁰ Pa.

Claims (5)

1. Cryogenic condensation pump with a housing 1 inside which is located a radiation shield comprising a cryoagent vessel 3, a heat-conducting shell 4 and a chevron shield 5 which are interconnected, and a pump-out element 6 in the form of a vessel, the cryoagent vessel of the radiation shield and the pump-out element being provided with suspension pipes 9, 10, characterised in that each suspension pipe is provided at its opposite ends with assemblies for joining it to the housing and to the cryoagent vessel of the radiation shield or to the pump-out element, in which the assembly for joining the suspension pipe to the housing comprises a connecting piece 13 which is located in a hole of the housing flange and one end of which is hermetically secured at the suspension pipe, and at the other end of the connecting piece a collar 18 is provided with an annular projection 19 facing the housing flange on which an annular counter-projection is provided, a sealing metal insert 21 being installed between the said annular projections and an annular flange 22 being secured in the middle portion of the said connecting piece, in which annular flange are inserted stop bolts 23 which are in contact with the housing flange, and in that the assembly for joining the suspension pipe to the cryoagent vessel of the radiation shield or to the pump-out element comprises a connecting piece 24, with an end sealing collar, hermetically joined to a neck of the cryoagent vessel of the radiation shield or of the pump-out element, and two flanges 27, 28 joined together with their end surfaces facing each other, of which one is hermetically secured at one end of the suspension pipe and the other is located at the end of said connecting piece, in which the facing surfaces of the said flanges are provided with annular projections and the said end sealing collar of the connecting piece is located between the annular projections of said flanges, the suspension pipe 10 of the pump-out element being provided with a support bush 37, and an annular element 38, which comes into contact with the support bush, being secured in the cover 7 of the cryoagent vessel of the radiation shield, the pump housing, the radiation shield and the pump-out element being made of metals of low specific weight.
2. Pump according to Claim 1, characterised in that the contact surfaces of the support bush and of the annular element are of conical construction.
3. Pump according to Claims 1 and 2, characterised in that the end of the suspension pipe of the pump-out element adjacent to the pump-out element is provided with a coaxially located shield 41, 42 which has thermal contact with the suspension pipe in the vicinity of the assembly for joining it to the pump-out element.
4. Pump according to Claim 3, characterised in that the cryoagent vessel of the radiation shield is provided with an additional shield 39 which is located between the housing and the said vessel with a gap in relation to them.
5. Pump according to Claim 4, characterised in that a bush 51 with coaxial blind holes 52, 53 at its opposite ends is secured in the bottom of the pump-out element on its axis, and a hole 54, which is coaxial with the holes in the bush, is present in the chevron shield.
EP89901554A 1988-01-08 1988-12-07 Cryogenic condensation pump Expired - Lifetime EP0347473B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SU884360458A SU1698482A1 (en) 1988-01-08 1988-01-08 Cryogenic condensate extraction pump
SU436045 1988-01-08
PCT/SU1988/000254 WO1989006317A1 (en) 1988-01-08 1988-12-07 Cryogenic condensation pump

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EP0347473A1 EP0347473A1 (en) 1989-12-27
EP0347473A4 EP0347473A4 (en) 1990-01-08
EP0347473B1 true EP0347473B1 (en) 1992-02-19

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EP89901554A Expired - Lifetime EP0347473B1 (en) 1988-01-08 1988-12-07 Cryogenic condensation pump

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JP (1) JPH02502936A (en)
AU (2) AU618786B2 (en)
DE (1) DE3868509D1 (en)
PL (1) PL160317B1 (en)
SU (1) SU1698482A1 (en)
WO (1) WO1989006317A1 (en)

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SU1682628A1 (en) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Cryoabsorption pump
AT398849B (en) * 1992-09-08 1995-02-27 Sitte Hellmuth CHAMBER FOR FREEZING DRYING BY CRYOSORPTION
US5799493A (en) * 1996-09-05 1998-09-01 Helix Technology Corporation Corrosion resistant cryopump
JP5557786B2 (en) * 2011-04-05 2014-07-23 住友重機械工業株式会社 Lid structure for cryopump, cryopump, method for starting cryopump, and method for storing cryopump
US9187799B2 (en) * 2012-08-13 2015-11-17 William R. Jones 20 bar super quench vacuum furnace
CN108547753A (en) * 2018-03-22 2018-09-18 兰州真空设备有限责任公司 A kind of heavy caliber liquid nitrogen-GM type cryogenic pumps

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US3144200A (en) * 1962-10-17 1964-08-11 Clyde E Taylor Process and device for cryogenic adsorption pumping
US3304731A (en) * 1964-03-13 1967-02-21 Granville Phillips Company High vacuum cold trap
CH419428A (en) * 1964-04-17 1966-08-31 Balzers Patent Beteilig Ag Device for generating or maintaining a vacuum in a room
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
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US3625081A (en) * 1969-04-01 1971-12-07 Marcellus S Merrill Apparatus for detecting unbalance of vehicle wheels
US3625018A (en) * 1969-10-20 1971-12-07 Nasa Cryogenic feedthrough
FR2085400B2 (en) * 1970-04-17 1974-05-03 Air Liquide
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SU1017817A1 (en) * 1981-07-10 1983-05-15 Ленинградский Ордена Ленина Политехнический Институт Им.М.И.Калинина Cryogenic condensation pump
SU1232841A1 (en) * 1984-12-27 1986-05-23 Volodin Sergej N Suspension unit of cryopump cooled vessel

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EP0347473A4 (en) 1990-01-08
JPH02502936A (en) 1990-09-13
AU3034189A (en) 1989-08-01
PL160317B1 (en) 1993-02-26
EP0347473A1 (en) 1989-12-27
WO1989006317A1 (en) 1989-07-13
DE3868509D1 (en) 1992-03-26
SU1698482A1 (en) 1991-12-15
PL277118A1 (en) 1989-09-04
AU618786B2 (en) 1992-01-09
US4976111A (en) 1990-12-11

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