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DK3964888T3 - Bredbåndsstrålingsgenerator med hul kerne baseret på fotoniske krystalfibre - Google Patents

Bredbåndsstrålingsgenerator med hul kerne baseret på fotoniske krystalfibre Download PDF

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Publication number
DK3964888T3
DK3964888T3 DK21189551.1T DK21189551T DK3964888T3 DK 3964888 T3 DK3964888 T3 DK 3964888T3 DK 21189551 T DK21189551 T DK 21189551T DK 3964888 T3 DK3964888 T3 DK 3964888T3
Authority
DK
Denmark
Prior art keywords
photonic crystal
hollow core
radiation generator
core based
broadband radiation
Prior art date
Application number
DK21189551.1T
Other languages
English (en)
Inventor
John Colin Travers
Federico Belli
Malte Christian Brahms
Andreas Johannes Antonius Brouns
Ronald Franciscus Herman Hugers
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP20202720.7A external-priority patent/EP3988996A1/en
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Application granted granted Critical
Publication of DK3964888T3 publication Critical patent/DK3964888T3/da

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02295Microstructured optical fibre
    • G02B6/02314Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • G02B6/02319Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by core or core-cladding interface features
    • G02B6/02323Core having lower refractive index than cladding, e.g. photonic band gap guiding
    • G02B6/02328Hollow or gas filled core
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/3501Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G02F1/3507Arrangements comprising two or more nonlinear optical devices
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/3528Non-linear optics for producing a supercontinuum
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/365Non-linear optics in an optical waveguide structure
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605Workpiece metrology
    • G03F7/70616Monitoring the printed patterns
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605Workpiece metrology
    • G03F7/70616Monitoring the printed patterns
    • G03F7/70625Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06729Peculiar transverse fibre profile
    • H01S3/06741Photonic crystal fibre, i.e. the fibre having a photonic bandgap

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Inorganic Fibers (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DK21189551.1T 2020-09-03 2021-08-04 Bredbåndsstrålingsgenerator med hul kerne baseret på fotoniske krystalfibre DK3964888T3 (da)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP20194353 2020-09-03
EP20202720.7A EP3988996A1 (en) 2020-10-20 2020-10-20 Hollow-core photonic crystal fiber based broadband radiation generator
EP21169105 2021-04-19

Publications (1)

Publication Number Publication Date
DK3964888T3 true DK3964888T3 (da) 2024-07-29

Family

ID=77338672

Family Applications (1)

Application Number Title Priority Date Filing Date
DK21189551.1T DK3964888T3 (da) 2020-09-03 2021-08-04 Bredbåndsstrålingsgenerator med hul kerne baseret på fotoniske krystalfibre

Country Status (9)

Country Link
US (2) US11563298B2 (da)
EP (1) EP3964888B1 (da)
JP (1) JP2023540186A (da)
KR (1) KR20230061399A (da)
CN (1) CN116057462A (da)
DK (1) DK3964888T3 (da)
IL (1) IL300587A (da)
TW (1) TWI813007B (da)
WO (1) WO2022048847A1 (da)

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Also Published As

Publication number Publication date
KR20230061399A (ko) 2023-05-08
TW202215086A (zh) 2022-04-16
EP3964888A1 (en) 2022-03-09
CN116057462A (zh) 2023-05-02
US12237639B2 (en) 2025-02-25
US20220069537A1 (en) 2022-03-03
TWI813007B (zh) 2023-08-21
EP3964888B1 (en) 2024-05-15
US20230144419A1 (en) 2023-05-11
JP2023540186A (ja) 2023-09-22
WO2022048847A1 (en) 2022-03-10
US11563298B2 (en) 2023-01-24
IL300587A (en) 2023-04-01

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