DK3964888T3 - Bredbåndsstrålingsgenerator med hul kerne baseret på fotoniske krystalfibre - Google Patents
Bredbåndsstrålingsgenerator med hul kerne baseret på fotoniske krystalfibre Download PDFInfo
- Publication number
- DK3964888T3 DK3964888T3 DK21189551.1T DK21189551T DK3964888T3 DK 3964888 T3 DK3964888 T3 DK 3964888T3 DK 21189551 T DK21189551 T DK 21189551T DK 3964888 T3 DK3964888 T3 DK 3964888T3
- Authority
- DK
- Denmark
- Prior art keywords
- photonic crystal
- hollow core
- radiation generator
- core based
- broadband radiation
- Prior art date
Links
- 239000000835 fiber Substances 0.000 title 1
- 239000004038 photonic crystal Substances 0.000 title 1
- 230000005855 radiation Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02295—Microstructured optical fibre
- G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
- G02B6/02319—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by core or core-cladding interface features
- G02B6/02323—Core having lower refractive index than cladding, e.g. photonic band gap guiding
- G02B6/02328—Hollow or gas filled core
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3507—Arrangements comprising two or more nonlinear optical devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3528—Non-linear optics for producing a supercontinuum
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/365—Non-linear optics in an optical waveguide structure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06729—Peculiar transverse fibre profile
- H01S3/06741—Photonic crystal fibre, i.e. the fibre having a photonic bandgap
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Couplings Of Light Guides (AREA)
- Inorganic Fibers (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20194353 | 2020-09-03 | ||
| EP20202720.7A EP3988996A1 (en) | 2020-10-20 | 2020-10-20 | Hollow-core photonic crystal fiber based broadband radiation generator |
| EP21169105 | 2021-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3964888T3 true DK3964888T3 (da) | 2024-07-29 |
Family
ID=77338672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK21189551.1T DK3964888T3 (da) | 2020-09-03 | 2021-08-04 | Bredbåndsstrålingsgenerator med hul kerne baseret på fotoniske krystalfibre |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US11563298B2 (da) |
| EP (1) | EP3964888B1 (da) |
| JP (1) | JP2023540186A (da) |
| KR (1) | KR20230061399A (da) |
| CN (1) | CN116057462A (da) |
| DK (1) | DK3964888T3 (da) |
| IL (1) | IL300587A (da) |
| TW (1) | TWI813007B (da) |
| WO (1) | WO2022048847A1 (da) |
Families Citing this family (12)
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| US11446776B2 (en) * | 2020-08-27 | 2022-09-20 | Northrop Grumman Systems Corporation | Method for assembling a hollow core optical fiber array launcher |
| JP2023540186A (ja) * | 2020-09-03 | 2023-09-22 | エーエスエムエル ネザーランズ ビー.ブイ. | 中空コアフォトニック結晶ファイバベースの広帯域放射ジェネレータ |
| EP4493968A4 (en) * | 2022-03-15 | 2025-06-25 | Ram Photonics Industrial, LLC | METHODS AND SYSTEMS FOR ALIGNMENT AND POSITIONING OPTICAL FIBERS |
| US12379545B2 (en) | 2022-03-25 | 2025-08-05 | Ram Photonics Industrial, Llc | Method and system for aligning and positioning an optical fiber and microlens array |
| CN117148515A (zh) * | 2022-05-23 | 2023-12-01 | 苏州湃矽科技有限公司 | 耦合光路结构和光模块 |
| KR20250022767A (ko) * | 2022-06-07 | 2025-02-17 | 칼 짜이스 에스엠티 게엠베하 | Euv 조명 광과 함께 사용하기 위한 마스크 검사 시스템용의 조명 광학 유닛 |
| EP4597179A1 (en) * | 2022-09-30 | 2025-08-06 | Sumitomo Electric Industries, Ltd. | Antiresonance hollow-core fiber |
| EP4375744A1 (en) * | 2022-11-24 | 2024-05-29 | ASML Netherlands B.V. | Photonic integrated circuit for generating broadband radiation |
| EP4390531A1 (en) * | 2022-12-21 | 2024-06-26 | NKT Photonics A/S | A supercontinuum light source |
| CN116295098A (zh) * | 2023-02-16 | 2023-06-23 | 南开大学 | 一种利用无衍射光学晶格测量高深宽比沟槽微结构的光学系统 |
| US20250110280A1 (en) * | 2023-09-29 | 2025-04-03 | Microsoft Technology Licensing, Llc | High-power multiplexer and demultiplexer for hollow core fiber dense wavelength-division multiplexing (dwdm) applications |
| CN118971815B (zh) * | 2024-08-07 | 2025-03-25 | 苏州大学 | 基于纳米机械谐振器中的随机共振实现调制信号放大的装置及方法 |
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-
2021
- 2021-08-04 JP JP2023511978A patent/JP2023540186A/ja active Pending
- 2021-08-04 EP EP21189551.1A patent/EP3964888B1/en active Active
- 2021-08-04 CN CN202180053608.9A patent/CN116057462A/zh active Pending
- 2021-08-04 KR KR1020237007838A patent/KR20230061399A/ko active Pending
- 2021-08-04 WO PCT/EP2021/071731 patent/WO2022048847A1/en not_active Ceased
- 2021-08-04 IL IL300587A patent/IL300587A/en unknown
- 2021-08-04 DK DK21189551.1T patent/DK3964888T3/da active
- 2021-08-25 TW TW110131390A patent/TWI813007B/zh active
- 2021-08-30 US US17/460,430 patent/US11563298B2/en active Active
-
2022
- 2022-12-20 US US18/085,338 patent/US12237639B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20230061399A (ko) | 2023-05-08 |
| TW202215086A (zh) | 2022-04-16 |
| EP3964888A1 (en) | 2022-03-09 |
| CN116057462A (zh) | 2023-05-02 |
| US12237639B2 (en) | 2025-02-25 |
| US20220069537A1 (en) | 2022-03-03 |
| TWI813007B (zh) | 2023-08-21 |
| EP3964888B1 (en) | 2024-05-15 |
| US20230144419A1 (en) | 2023-05-11 |
| JP2023540186A (ja) | 2023-09-22 |
| WO2022048847A1 (en) | 2022-03-10 |
| US11563298B2 (en) | 2023-01-24 |
| IL300587A (en) | 2023-04-01 |
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