DK3531514T3 - Metode og enhed til at tilvejebringe superkontinuerlige lysimpulser - Google Patents
Metode og enhed til at tilvejebringe superkontinuerlige lysimpulser Download PDFInfo
- Publication number
- DK3531514T3 DK3531514T3 DK19161319.9T DK19161319T DK3531514T3 DK 3531514 T3 DK3531514 T3 DK 3531514T3 DK 19161319 T DK19161319 T DK 19161319T DK 3531514 T3 DK3531514 T3 DK 3531514T3
- Authority
- DK
- Denmark
- Prior art keywords
- light pulses
- continuous light
- providing super
- super
- providing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0007—Applications not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3528—Non-linear optics for producing a supercontinuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/08—Generation of pulses with special temporal shape or frequency spectrum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/30—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range using scattering effects, e.g. stimulated Brillouin or Raman effects
- H01S3/302—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range using scattering effects, e.g. stimulated Brillouin or Raman effects in an optical fibre
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19161319.9A EP3531514B1 (en) | 2014-05-09 | 2014-05-09 | Method and device for creating supercontinuum light pulses |
| EP14001649.4A EP2942847B1 (en) | 2014-05-09 | 2014-05-09 | Method and device for creating supercontinuum light pulses |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3531514T3 true DK3531514T3 (da) | 2020-09-21 |
Family
ID=50735812
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK19161319.9T DK3531514T3 (da) | 2014-05-09 | 2014-05-09 | Metode og enhed til at tilvejebringe superkontinuerlige lysimpulser |
| DK14001649.4T DK2942847T3 (da) | 2014-05-09 | 2014-05-09 | Metode og enhed til oprettelse af superkontinuum-lysimpulser |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK14001649.4T DK2942847T3 (da) | 2014-05-09 | 2014-05-09 | Metode og enhed til oprettelse af superkontinuum-lysimpulser |
Country Status (2)
| Country | Link |
|---|---|
| EP (2) | EP3531514B1 (da) |
| DK (2) | DK3531514T3 (da) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU169901U1 (ru) * | 2016-04-29 | 2017-04-05 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) | Многомодовый перестраиваемый генератор суперконтинуума |
| IL319087A (en) | 2017-01-09 | 2025-04-01 | Max Planck Gesellschaft | Broadband light source device and method for generating a broadband light pulse |
| CA3052631A1 (en) * | 2017-02-06 | 2018-08-09 | Amo Development, Llc | Dispersion control using chirped mirrors in femtosecond laser system for ophthalmic application |
| CN107086428B (zh) * | 2017-06-08 | 2023-06-09 | 中国电子科技集团公司第三十四研究所 | 一种高峰值功率的窄线宽光纤脉冲激光器及其使用方法 |
| EP3758168A1 (en) * | 2019-06-25 | 2020-12-30 | ASML Netherlands B.V. | Hollow-core photonic crystal fiber based optical component for broadband radiation generation |
| CN110277725B (zh) * | 2019-07-15 | 2024-02-02 | 中国人民解放军国防科技大学 | 一种光谱分布不随功率改变的超连续谱产生方法及装置 |
| EP3767375A1 (en) | 2019-07-19 | 2021-01-20 | ASML Netherlands B.V. | A light source and a method for use in metrology applications |
| CN114303093A (zh) * | 2019-08-29 | 2022-04-08 | Asml荷兰有限公司 | 用于光源的端部琢面保护和用于量测应用的方法 |
| EP3786700A1 (en) * | 2019-08-29 | 2021-03-03 | ASML Netherlands B.V. | End facet protection for a light source and a method for use in metrology applications |
| EP3812836A1 (en) * | 2019-10-21 | 2021-04-28 | ASML Netherlands B.V. | End facet protection for a light source and a method for use in metrology applications |
| US12493247B2 (en) | 2019-11-29 | 2025-12-09 | Asml Netherlands B.V. | Method and system for predicting process information with a parameterized model |
| CN114945865B (zh) * | 2020-01-15 | 2025-07-25 | Asml荷兰有限公司 | 用于改善对宽带辐射生成的控制的方法、组件、和设备 |
| CN112683876B (zh) * | 2020-12-04 | 2022-05-10 | 重庆大学 | 微量气体光纤光热受激拉曼光谱检测方法和系统 |
| CN113156735B (zh) * | 2020-12-15 | 2022-08-16 | 北京邮电大学 | 一种反脊型铝镓砷波导及其方法 |
| US20240004319A1 (en) * | 2020-12-23 | 2024-01-04 | Asml Netherlands B.V. | Methods and apparatus for providing a broadband light source |
| EP4030230A1 (en) * | 2021-01-18 | 2022-07-20 | ASML Netherlands B.V. | Methods and apparatus for providing a broadband light source |
| DE102021103204A1 (de) | 2021-02-11 | 2022-08-11 | Active Fiber Systems Gmbh | System zur Detektion von Pulsdauerschwankungen von Laserpulsen und Verfahren zur Erzeugung von Laserpulsen |
| DE102021207626A1 (de) | 2021-07-16 | 2023-01-19 | Amphos GmbH | Gepulste Laserlichtquelle und Verfahren zur Erzeugung eines gepulsten Ausgangslaserstrahls mit Laserpulsen mit vorgegebenen Eigenschaften |
| DE102022104992A1 (de) | 2022-03-03 | 2023-09-07 | Trumpf Lasertechnik Gmbh | Vorrichtung sowie Verfahren zur spektroskopischen Analyse eines Prozessmediums |
| CN114995072B (zh) * | 2022-06-30 | 2025-08-19 | 中国科学技术大学 | 一种高重复频率的极紫外辐射光源及euv光刻机光源 |
| TWI831352B (zh) | 2022-08-31 | 2024-02-01 | 財團法人工業技術研究院 | 雷射微加工裝置 |
-
2014
- 2014-05-09 DK DK19161319.9T patent/DK3531514T3/da active
- 2014-05-09 DK DK14001649.4T patent/DK2942847T3/da active
- 2014-05-09 EP EP19161319.9A patent/EP3531514B1/en active Active
- 2014-05-09 EP EP14001649.4A patent/EP2942847B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| DK2942847T3 (da) | 2019-08-12 |
| EP3531514A1 (en) | 2019-08-28 |
| EP2942847A1 (en) | 2015-11-11 |
| EP2942847B1 (en) | 2019-07-03 |
| EP3531514B1 (en) | 2020-07-08 |
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