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DK3458913T3 - Selvmonteret mønstergenerering ved brug af mønstrede hydrofobiske overflader - Google Patents

Selvmonteret mønstergenerering ved brug af mønstrede hydrofobiske overflader Download PDF

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Publication number
DK3458913T3
DK3458913T3 DK17729244.8T DK17729244T DK3458913T3 DK 3458913 T3 DK3458913 T3 DK 3458913T3 DK 17729244 T DK17729244 T DK 17729244T DK 3458913 T3 DK3458913 T3 DK 3458913T3
Authority
DK
Denmark
Prior art keywords
self
pattern generation
hydrophobic surfaces
assembled pattern
patterned hydrophobic
Prior art date
Application number
DK17729244.8T
Other languages
English (en)
Inventor
Yir-Shyuan Wu
Yan-You Lin
Cyril Delattre
Fabien Abeille
Tarun Khurana
Arnaud Rival
Poorya Sabounchi
Dajun Yuan
M Shane Bowen
Bacigalupo Maria Candelaria Rogert
Original Assignee
Illumina Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illumina Inc filed Critical Illumina Inc
Application granted granted Critical
Publication of DK3458913T3 publication Critical patent/DK3458913T3/da

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/40Treatment after imagewise removal, e.g. baking
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12QMEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6806Preparing nucleic acids for analysis, e.g. for polymerase chain reaction [PCR] assay
    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12QMEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6869Methods for sequencing
    • C12Q1/6874Methods for sequencing involving nucleic acid arrays, e.g. sequencing by hybridisation
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/40Treatment after imagewise removal, e.g. baking
    • G03F7/405Treatment with inorganic or organometallic reagents after imagewise removal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Zoology (AREA)
  • Wood Science & Technology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Microbiology (AREA)
  • Immunology (AREA)
  • Biotechnology (AREA)
  • Biophysics (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Genetics & Genomics (AREA)
  • Molecular Biology (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Steroid Compounds (AREA)
  • Materials For Photolithography (AREA)
  • Financial Or Insurance-Related Operations Such As Payment And Settlement (AREA)
DK17729244.8T 2016-05-18 2017-05-17 Selvmonteret mønstergenerering ved brug af mønstrede hydrofobiske overflader DK3458913T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662338394P 2016-05-18 2016-05-18
PCT/US2017/033169 WO2017201198A1 (en) 2016-05-18 2017-05-17 Self assembled patterning using patterned hydrophobic surfaces

Publications (1)

Publication Number Publication Date
DK3458913T3 true DK3458913T3 (da) 2021-03-15

Family

ID=59034864

Family Applications (1)

Application Number Title Priority Date Filing Date
DK17729244.8T DK3458913T3 (da) 2016-05-18 2017-05-17 Selvmonteret mønstergenerering ved brug af mønstrede hydrofobiske overflader

Country Status (12)

Country Link
US (3) US10900076B2 (da)
EP (1) EP3458913B1 (da)
JP (1) JP6824290B2 (da)
KR (1) KR102171865B1 (da)
CN (1) CN109313396B (da)
AU (2) AU2017267653B2 (da)
CA (1) CA3021915A1 (da)
DK (1) DK3458913T3 (da)
ES (1) ES2861478T3 (da)
IL (1) IL262516B (da)
SG (1) SG11201809376WA (da)
WO (1) WO2017201198A1 (da)

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Publication number Publication date
KR102171865B1 (ko) 2020-10-29
AU2017267653B2 (en) 2021-05-13
AU2021212076A1 (en) 2021-08-26
AU2021212076B2 (en) 2022-09-01
US20210139979A1 (en) 2021-05-13
WO2017201198A1 (en) 2017-11-23
US11702695B2 (en) 2023-07-18
IL262516B (en) 2020-06-30
ES2861478T3 (es) 2021-10-06
KR20190009345A (ko) 2019-01-28
US10900076B2 (en) 2021-01-26
US20220275443A1 (en) 2022-09-01
EP3458913A1 (en) 2019-03-27
JP6824290B2 (ja) 2021-02-03
US11332788B2 (en) 2022-05-17
EP3458913B1 (en) 2020-12-23
US20190360041A1 (en) 2019-11-28
IL262516A (en) 2018-12-31
AU2017267653A1 (en) 2018-11-22
CA3021915A1 (en) 2017-11-23
CN109313396A (zh) 2019-02-05
SG11201809376WA (en) 2018-12-28
CN109313396B (zh) 2022-11-22
JP2019523640A (ja) 2019-08-29

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