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DK2181463T3 - Pixelstruktur med en absorber af paraply-typen med en eller flere udsparinger eller kanaler med en størrelse til at øge strålingsabsorption - Google Patents

Pixelstruktur med en absorber af paraply-typen med en eller flere udsparinger eller kanaler med en størrelse til at øge strålingsabsorption

Info

Publication number
DK2181463T3
DK2181463T3 DK08798475.3T DK08798475T DK2181463T3 DK 2181463 T3 DK2181463 T3 DK 2181463T3 DK 08798475 T DK08798475 T DK 08798475T DK 2181463 T3 DK2181463 T3 DK 2181463T3
Authority
DK
Denmark
Prior art keywords
umbrella
recesses
channels
size
pixel structure
Prior art date
Application number
DK08798475.3T
Other languages
English (en)
Inventor
George D Skidmore
Christopher G Howard
Original Assignee
Drs Rsta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Drs Rsta Inc filed Critical Drs Rsta Inc
Application granted granted Critical
Publication of DK2181463T3 publication Critical patent/DK2181463T3/da

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/191—Photoconductor image sensors
    • H10F39/193—Infrared image sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
DK08798475.3T 2007-08-22 2008-08-22 Pixelstruktur med en absorber af paraply-typen med en eller flere udsparinger eller kanaler med en størrelse til at øge strålingsabsorption DK2181463T3 (da)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US84356207A 2007-08-22 2007-08-22
US11/949,367 US7622717B2 (en) 2007-08-22 2007-12-03 Pixel structure having an umbrella type absorber with one or more recesses or channels sized to increase radiation absorption
PCT/US2008/073997 WO2009026505A1 (en) 2007-08-22 2008-08-22 A pixel structure having an umbrella type absorber with one or more recesses or channels sized to increase radiation absorption

Publications (1)

Publication Number Publication Date
DK2181463T3 true DK2181463T3 (da) 2013-11-18

Family

ID=40378677

Family Applications (1)

Application Number Title Priority Date Filing Date
DK08798475.3T DK2181463T3 (da) 2007-08-22 2008-08-22 Pixelstruktur med en absorber af paraply-typen med en eller flere udsparinger eller kanaler med en størrelse til at øge strålingsabsorption

Country Status (6)

Country Link
US (1) US7622717B2 (da)
EP (1) EP2181463B1 (da)
DK (1) DK2181463T3 (da)
PL (1) PL2181463T3 (da)
PT (1) PT2181463E (da)
WO (1) WO2009026505A1 (da)

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US8440972B2 (en) * 2009-08-25 2013-05-14 Raytheon Company Radiation detector with microstructured silicon
WO2013120652A1 (de) * 2012-02-16 2013-08-22 Heimann Sensor Gmbh Thermopile infrarot-sensorstruktur mit hohem füllgrad
KR101910573B1 (ko) * 2012-12-20 2018-10-22 삼성전자주식회사 광대역 광 흡수체를 포함하는 적외선 검출기
US9257587B2 (en) * 2012-12-21 2016-02-09 Robert Bosch Gmbh Suspension and absorber structure for bolometer
US9219185B2 (en) 2013-12-19 2015-12-22 Excelitas Technologies Singapore Pte. Ltd CMOS integrated method for the fabrication of thermopile pixel with umbrella absorber on semiconductor substrate
US9324760B2 (en) 2014-01-21 2016-04-26 Excelitas Technologies Singapore Pte. Ltd CMOS integrated method for fabrication of thermopile pixel on semiconductor substrate with buried insulation regions
FR3017456B1 (fr) * 2014-02-12 2017-06-23 Commissariat Energie Atomique Detecteur bolometrique a structure mim incluant un element thermometre
US9335218B2 (en) * 2014-06-23 2016-05-10 Raytheon Company Digital imaging bolometer and method of measuring photon radiation in a pixelated image
FR3087261B1 (fr) 2018-10-12 2021-11-12 Commissariat Energie Atomique Procede de fabrication d'un dispositif de detection d'un rayonnement electromagnetique a structure d'encapsulation amelioree
FR3087260B1 (fr) 2018-10-12 2020-09-25 Commissariat Energie Atomique Procede de fabrication d'un dispositif de detection d'un rayonnement electromagnetique comportant un element de detection suspendu
CN109596225A (zh) * 2018-12-20 2019-04-09 西安工业大学 一种具有高效能谐振腔的红外探测器及其制备方法
IL285330B1 (en) 2019-03-11 2025-09-01 Teledyne Flir Commerical Systems Inc Microbolometer systems and methods
FR3099248B1 (fr) 2019-07-26 2021-08-06 Commissariat Energie Atomique Bolomètre à absorbeur en parapluie, composant comprenant un tel bolomètre et procédé de fabrication d’un tel bolomètre
US12345575B2 (en) * 2021-05-11 2025-07-01 America as represented by the Secretary of the Army Phonon disruptors for increased thermal resistance without sacrificing electrical signal quality in thermal sensors
US12320707B2 (en) * 2021-05-11 2025-06-03 The United States Of America As Represented By The Secretary Of The Army Phonon disruptors for increased thermal resistance without sacrificing electrical signal quality in thermal sensors using alloy and intermetallic materials

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Also Published As

Publication number Publication date
EP2181463A1 (en) 2010-05-05
PT2181463E (pt) 2013-11-19
PL2181463T3 (pl) 2014-05-30
EP2181463B1 (en) 2013-08-14
EP2181463A4 (en) 2012-03-28
US20090140147A1 (en) 2009-06-04
WO2009026505A1 (en) 2009-02-26
US7622717B2 (en) 2009-11-24

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