DE8810275U1 - Electrically heated jacket for one-way control valves in gas supply systems, especially in semiconductor technology - Google Patents
Electrically heated jacket for one-way control valves in gas supply systems, especially in semiconductor technologyInfo
- Publication number
- DE8810275U1 DE8810275U1 DE8810275U DE8810275U DE8810275U1 DE 8810275 U1 DE8810275 U1 DE 8810275U1 DE 8810275 U DE8810275 U DE 8810275U DE 8810275 U DE8810275 U DE 8810275U DE 8810275 U1 DE8810275 U1 DE 8810275U1
- Authority
- DE
- Germany
- Prior art keywords
- way control
- control valve
- shells
- gas supply
- electrically heatable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title description 3
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000005266 casting Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000010445 mica Substances 0.000 claims description 2
- 229910052618 mica group Inorganic materials 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 229910001362 Ta alloys Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 28
- 238000000034 method Methods 0.000 description 5
- 244000309464 bull Species 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- WRECIMRULFAWHA-UHFFFAOYSA-N trimethyl borate Chemical compound COB(OC)OC WRECIMRULFAWHA-UHFFFAOYSA-N 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical group N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/10—Arrangements for preventing freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2203/00—Vessel construction, in particular walls or details thereof
- F17C2203/03—Thermal insulations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0302—Heat exchange with the fluid by heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0302—Heat exchange with the fluid by heating
- F17C2227/0304—Heat exchange with the fluid by heating using an electric heater
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0367—Localisation of heat exchange
- F17C2227/0369—Localisation of heat exchange in or on a vessel
- F17C2227/0376—Localisation of heat exchange in or on a vessel in wall contact
- F17C2227/0383—Localisation of heat exchange in or on a vessel in wall contact outside the vessel
- F17C2227/0386—Localisation of heat exchange in or on a vessel in wall contact outside the vessel with a jacket
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Details Of Valves (AREA)
Description
•••it ti Ii a. '•••it ti Ii a. '
Elektrisch heizbare ummantelung für llnwegesteuerventile in Gasvereorgungssyetemen. insbesondere In der HalbleitertechnikElectrically heated casing for in-way control valves in gas supply systems, particularly in semiconductor technology
Die Neuerung betrifft eine elektrisch heizbare Ummantelung für ein Einwegesteuerventil in einem Gasversorgungssystem zur Erwärmung eines durchströmenden schwerflüchtigen Gases. The innovation concerns an electrically heatable casing for a one-way control valve in a gas supply system for heating a low-volatility gas flowing through it.
Um die Temperatur und den Druck schwerflüchtiger Gase in Gasversorgungssystemen konstant zu halten und Kcndensetionsprozesse an kälteren Stellen (Kältebrücken) von Gasversorgungssystemen auszuschließen, werden Gasversorgungssysteme beheizt. Es 1st z. B. allgemein bekannt, zur Beheizung von Gasrohren Heizbänder zu verwenden. In order to keep the temperature and pressure of low-volatility gases in gas supply systems constant and to prevent condensation processes at colder points (cold bridges) in gas supply systems, gas supply systems are heated. For example, it is well known that heating tapes are used to heat gas pipes.
In der Halbleitertechnik werden bei Trockenätzprozessen in Plasmaätzanlagen und Verfahren zur Abscheidung von Stoffen aus der Gasphase (Chemical Vapor Deposition) z.B. die schwerflüchtigenIn semiconductor technology, dry etching processes in plasma etching systems and processes for the deposition of substances from the gas phase (chemical vapor deposition), for example, are used to remove the low-volatility
Gase BCl3, SiCl41 SiH31 SiH2Cl2, WF5 und TMB (Trimethylborat) eingesetzt. Eine Kondensation dieser Gase in Versorgungssystemen führt zu schlechter Reproduzierbarkeit von Beschichtungs- oder 'Atzprozessen. Außerdem kann das Kondensat zu einer erhöhten Partikelbildung ins Gssvgrscrgungssystes» fuhren, so daß Reinigungs-Gases BCl 3 , SiCl 41 SiH 31 SiH 2 Cl 2 , WF 5 and TMB (trimethyl borate) are used. Condensation of these gases in supply systems leads to poor reproducibility of coating or etching processes. In addition, the condensate can lead to increased particle formation in the gas enlargement system, so that cleaning
und Wartungsarbeiten am Gasversorgungssystem öfter durchgeführt werden müssen. Beim Öffnen der Gasversorgungssysteme von Plasmaätzanlagen oder CVD-Anlagen besteht dabei die Gefahr, daß gesundheitsgefährdende oder explosive Stoffe austreten.and maintenance work on the gas supply system must be carried out more frequently. When opening the gas supply systems of plasma etching systems or CVD systems, there is a risk that hazardous or explosive substances could escape.
Eine weitere Maßnahme zur Vermeidung von Kondensationsprozess<,n in Gasveisorgungssystemen ist, die Gasvorratsbehälter zu kühlen, damit der Gasdruck in den Gäsvorratsbehaltern der Gasversorgungssysteme am geringsten ist. Eine Kühlung der Gasvorratsbehälter hat den Nachteil, daß dadurch die Strömungsgeschwindigkeit des Gases verringert wird.Another measure to prevent condensation processes in gas supply systems is to cool the gas storage containers so that the gas pressure in the gas storage containers of the gas supply systems is as low as possible. Cooling the gas storage containers has the disadvantage that it reduces the flow rate of the gas.
Aufgabe der Neuerung ist es, eine Heizvorrichtung für ein Ein-The aim of the innovation is to provide a heating device for a
•j O. fSX &ngr;··.1:· 8861506DE•j O. fSX &ngr;··. 1 :· 8861506DE
Il , , ' eic,Il , , ' eic,
wegesteuerventil in einem Gasversorgungssystem anzugeben, mit der ein das Einwegesteuerventil durchströmendes Gas regelbar und gleichmäßig beheizt werden kann.directional control valve in a gas supply system with which a gas flowing through the one-way control valve can be heated in a controllable and uniform manner.
Zur. Lösung dieser Aufgabe wird eine elektrisch heizbare Ummantelung der eingangs genannten Art vorgeschlagen, die gekennzeichnet ist durchTo solve this problem, an electrically heatable casing of the type mentioned above is proposed, which is characterized by
a) ein hohlzylinderförmiges Teil mit einem hohlzylinderförmigen Stutzen aus wärmeisolierendem Material, das aus zwei Halbschalen zusammengesetzt ist und in das das Einwegesteuerventil so eingelegt werden kann, daß der Gasanschluß des Einwegesteuerventils in dem hohlzylinderförmigen Stutzen angeordnet ist unda) a hollow-cylindrical part with a hollow-cylindrical nozzle made of heat-insulating material, which is composed of two half-shells and into which the one-way control valve can be inserted so that the gas connection of the one-way control valve is arranged in the hollow-cylindrical nozzle and
b) jeweils an den Innenwänden der Halbschalen angeordnete flache elektrische Heizelemente, deren elektrisch Anschlüsse durch Aussparungen der Halbschalen herausgeführt sind.b) flat electrical heating elements arranged on the inner walls of the half-shells, the electrical connections of which are led out through recesses in the half-shells.
Weitere Ausgestaltungen und Weiterbildungen der Neuerung gehen aus den Unteransprüchen sowie aus der nachfolgend anhand eines Ausführungsbeispiels mit zwei Figuren gegebenen Beschreibung hervor.Further embodiments and developments of the innovation emerge from the subclaims and from the description given below using an embodiment with two figures.
FIG 1 zeigt in schematischer Darstellung eine erfindungsgemäße * elektrisch heizbare Ummantelung, die zur Beheizung eines Einwege-Steuerventils für schwerflüchtige Gase eingesetzt werden kann.FIG 1 shows a schematic representation of an electrically heatable casing according to the invention * which can be used to heat a one-way control valve for low-volatility gases.
Das Einwegesteuerventil weist einen Ventilkörper 3 und einen Gasanschluß 8 für die Gaszuleitung 9 auf. Der Ventilkörper 3 hat ei- | ne zylinderähnliche äußere Form. Für die elektrisch heizbare Um- i mantelung sind daher in Anpassung an die süßere Forme des Einse- $ gesteuerventils ein hohlzylinderförmiges Teil 1 mit einem hohzy- linderförmigen Stutzen 2 vorgesehen, das aus zwei Halbschalen 11, z.B. durch Steckverbindungen, zusammengesetzt ist. Die Zeichnung zeigt die geöffnete Ummantelung, wobei jeweils nur eine Halbschäle 11 dargestellt ist. Jede Halbschale 11 weist ein an der Innenwand befestigtes elektrisches Heizelement 9 auf, das ebenfalls der äußeren Form des zu beheizenden Ventilkörpers 3 angepasstThe one-way control valve has a valve body 3 and a gas connection 8 for the gas supply line 9. The valve body 3 has a cylinder-like external shape. For the electrically heatable casing, a hollow-cylindrical part 1 with a hollow- cylindrical nozzle 2 is therefore provided in adaptation to the softer shape of the inlet control valve , which is composed of two half-shells 11, e.g. by means of plug connections. The drawing shows the opened casing, with only one half-shell 11 shown at a time . Each half-shell 11 has an electrical heating element 9 attached to the inner wall, which is also adapted to the external shape of the valve body 3 to be heated.
88 8 1 5 Q 6 DE88 8 1 5 Q 6 EN
1st. Die elektrischen Anschlüsse 4 der elektrischen Heizelemente 2 sind durch Aussparungen 5 in den Halbschalen 11 aus dem Schaleninneren herausgeführt und an ein strombegrenztes, spannungsgeregeltes Gleichspannungsnetzgerät, dessen Spannungseinspeisung1st. The electrical connections 4 of the electrical heating elements 2 are led out of the shell interior through recesses 5 in the half-shells 11 and connected to a current-limited, voltage-regulated direct current power supply, the voltage supply of which über ein 10-fach-Wendelpotentiometer erfolgt, (nicht in der Zeichnung dargestellt) angeschlossen. Für den Steuerluftanschluß 12 des Einwegesteuerventils ist eine weitere Aussparung 10 in der Ummantelung vorgesehen.via a 10-way spiral potentiometer (not shown in the drawing). A further recess 10 is provided in the casing for the control air connection 12 of the one-way control valve.
Die Halbschalen 11 sind aus einem wärmeisolierenden Zweikomonenten-Gießharz hergestellt, das schwer entflammbar und bis 130 * C hitzebeständig ist.The half shells 11 are made of a heat-insulating two-component casting resin that is flame-retardant and heat-resistant up to 130 * C.
Als elektrische Heizelemente 2 sind flache Heizbänder mit in elektrisch isolierendem Klarglimmer eingebetteten Heizwendeln aus einer Kantallegierung vorgesehen.Flat heating bands with heating coils made of a Kantal alloy embedded in electrically insulating clear mica are provided as electrical heating elements 2.
Die Betriebstemperatur des Einwegesteuerventils beträgt 30-40" C. Die Höhe des Temperaturwertes richtet sich nach der Entfernung vonThe operating temperature of the one-way control valve is 30-40" C. The temperature value depends on the distance from dem Gasvorratsbehälter, wobei die Temperatur mit zunehmender Entfernung größer sein soll. Die Heizelemente 2 haben eine maximale Leistungsaufnahme von 6 Watt bei Betrieb in Reihenschaltung. Die Betriebsspannung kann von 2 bis 12 Volt variiert werden. Ihr ohmscher Widerstand ist dabei ca. 24 Ohm.the gas storage tank, whereby the temperature should be higher with increasing distance. The heating elements 2 have a maximum power consumption of 6 watts when operated in series. The operating voltage can be varied from 2 to 12 volts. Their ohmic resistance is approximately 24 ohms.
FIG 2 zeigt zwei, z.B. durch Verschraubung oder Steckverbindungen zusammengesetzte, Halbschalen 11. Durch eine der Aussparungen sind gleichzeitig mit dem elektrischen Anschluß 4 eines Heizelements 9 die elektrischen Anschlüsse 7 eines PT 100-Widerstandsther-FIG 2 shows two half-shells 11, e.g. assembled by screwing or plugging. Through one of the recesses the electrical connections 7 of a PT 100 resistance thermometer are simultaneously connected to the electrical connection 4 of a heating element 9. mometers 6, das zwischen der Oberfläche des ummantelten Ventilkörpers 3 und einem Heizelement 9 angebracht ist, herausgeführt. Mit Hilfe des Widerstandsthermometers 6 kann die Betriebstemperatur über den elektrischen Anschluß 7 abgefragt und am Display des Netzgerätes (nicht in der Figur dargestellt) angezeigt werden.ometer 6, which is mounted between the surface of the jacketed valve body 3 and a heating element 9. With the help of the resistance thermometer 6, the operating temperature can be queried via the electrical connection 7 and shown on the display of the power supply unit (not shown in the figure).
2 FIG2 FIG
5 Schutzansprüche5 Protection claims
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE8810275U DE8810275U1 (en) | 1988-08-12 | 1988-08-12 | Electrically heated jacket for one-way control valves in gas supply systems, especially in semiconductor technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE8810275U DE8810275U1 (en) | 1988-08-12 | 1988-08-12 | Electrically heated jacket for one-way control valves in gas supply systems, especially in semiconductor technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE8810275U1 true DE8810275U1 (en) | 1988-10-06 |
Family
ID=6826872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8810275U Expired DE8810275U1 (en) | 1988-08-12 | 1988-08-12 | Electrically heated jacket for one-way control valves in gas supply systems, especially in semiconductor technology |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE8810275U1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005049252B4 (en) * | 2004-10-18 | 2007-12-27 | GM Global Technology Operations, Inc., Detroit | Heatable hydrogen pressure regulator |
| FR2928440A1 (en) * | 2008-03-06 | 2009-09-11 | Air Liquide | SYSTEM FOR ELECTRICALLY GAS HEATING |
-
1988
- 1988-08-12 DE DE8810275U patent/DE8810275U1/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005049252B4 (en) * | 2004-10-18 | 2007-12-27 | GM Global Technology Operations, Inc., Detroit | Heatable hydrogen pressure regulator |
| FR2928440A1 (en) * | 2008-03-06 | 2009-09-11 | Air Liquide | SYSTEM FOR ELECTRICALLY GAS HEATING |
| WO2009112726A1 (en) * | 2008-03-06 | 2009-09-17 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Gas electric heating system |
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