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DE69912608D1 - Hochgenaues interferometer mit lichtleitern - Google Patents

Hochgenaues interferometer mit lichtleitern

Info

Publication number
DE69912608D1
DE69912608D1 DE69912608T DE69912608T DE69912608D1 DE 69912608 D1 DE69912608 D1 DE 69912608D1 DE 69912608 T DE69912608 T DE 69912608T DE 69912608 T DE69912608 T DE 69912608T DE 69912608 D1 DE69912608 D1 DE 69912608D1
Authority
DE
Germany
Prior art keywords
highly accurate
light guides
interferometer
light conductor
detection plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69912608T
Other languages
English (en)
Other versions
DE69912608T2 (de
Inventor
Gerardus Klaver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STICHTING TECH WETENSCHAPP
Stichting voor de Technische Wetenschappen STW
Original Assignee
STICHTING TECH WETENSCHAPP
Stichting voor de Technische Wetenschappen STW
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STICHTING TECH WETENSCHAPP, Stichting voor de Technische Wetenschappen STW filed Critical STICHTING TECH WETENSCHAPP
Publication of DE69912608D1 publication Critical patent/DE69912608D1/de
Application granted granted Critical
Publication of DE69912608T2 publication Critical patent/DE69912608T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components
    • G03F7/706—Aberration measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Spectrometry And Color Measurement (AREA)
DE69912608T 1998-06-10 1999-06-09 Hochgenaues interferometer mit lichtleitern Expired - Fee Related DE69912608T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL1009366A NL1009366C2 (nl) 1998-06-10 1998-06-10 Interferometer.
NL1009366 1998-06-10
PCT/NL1999/000357 WO1999064817A1 (en) 1998-06-10 1999-06-09 Interferometer

Publications (2)

Publication Number Publication Date
DE69912608D1 true DE69912608D1 (de) 2003-12-11
DE69912608T2 DE69912608T2 (de) 2004-09-23

Family

ID=19767290

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69912608T Expired - Fee Related DE69912608T2 (de) 1998-06-10 1999-06-09 Hochgenaues interferometer mit lichtleitern

Country Status (9)

Country Link
US (1) US6577400B1 (de)
EP (1) EP1090268B1 (de)
JP (1) JP2002517743A (de)
AT (1) ATE253722T1 (de)
AU (1) AU4293799A (de)
DE (1) DE69912608T2 (de)
ES (1) ES2205867T3 (de)
NL (1) NL1009366C2 (de)
WO (1) WO1999064817A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1009366C2 (nl) 1998-06-10 1999-12-13 Stichting Tech Wetenschapp Interferometer.
FR2813391B1 (fr) * 2000-08-22 2002-11-29 Essilor Int Procede et appareil de mesure en transmission de la structure geometrique d'un composant optique
US6738511B1 (en) * 2000-10-04 2004-05-18 Veeco Instruments, Inc. Reduced noise sensitivity method and apparatus for converting an interferogram phase map to a surface profile map
US20080137098A1 (en) * 2002-01-25 2008-06-12 Mater Michael J Method of multiple wavelength interferometry
GB0317630D0 (en) * 2003-07-28 2003-08-27 Qinetiq Ltd Optical transmitter and receiver apparatus
JP2005051245A (ja) 2003-07-30 2005-02-24 Asml Netherlands Bv リソグラフィ装置
JP4732832B2 (ja) * 2005-08-17 2011-07-27 株式会社日立製作所 変位計測方法及びその装置、ステージ装置並びにプローブ顕微鏡
US20070133008A1 (en) * 2005-12-12 2007-06-14 Coherix, Inc. Optical fiber delivered reference beam for interferometric imaging
US7675628B2 (en) * 2006-09-07 2010-03-09 4D Technology Corporation Synchronous frequency-shift mechanism in Fizeau interferometer
DE102017203010A1 (de) * 2017-02-24 2018-08-30 Carl Zeiss Meditec Ag Verfahren und Anordnung zur hochauflösenden Topographie der Kornea eines Auges
CN112424562B (zh) * 2018-05-18 2023-07-07 密歇根大学董事会 用于频率调制干涉仪的路径波动监测
US11333487B2 (en) 2019-10-28 2022-05-17 Kla Corporation Common path mode fiber tip diffraction interferometer for wavefront measurement

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2516232B1 (fr) * 1981-11-09 1986-02-21 Thomson Csf Interferometre de type michelson a miroir photorefractif
FR2541767B1 (fr) * 1983-02-25 1986-11-21 Thomson Csf Hydrophone a fibre optique
US4594003A (en) * 1983-07-20 1986-06-10 Zygo Corporation Interferometric wavefront measurement
US4818071A (en) * 1985-03-26 1989-04-04 Andrew Corporation Fiber optic doppler anemometer
US5570182A (en) * 1994-05-27 1996-10-29 Regents Of The University Of California Method for detection of dental caries and periodontal disease using optical imaging
US5548403A (en) * 1994-11-28 1996-08-20 The Regents Of The University Of California Phase shifting diffraction interferometer
DE19522262C2 (de) * 1995-06-20 1997-05-22 Zeiss Carl Jena Gmbh Heterodyn-Interferometer-Anordnung
US6015969A (en) * 1996-09-16 2000-01-18 The Regents Of The University Of California Multiple-wavelength spectroscopic quantitation of light-absorbing species in scattering media
JP3501605B2 (ja) * 1996-12-27 2004-03-02 キヤノン株式会社 干渉計及び形状測定装置
US6181429B1 (en) * 1997-12-22 2001-01-30 Pirelli Cavi E Sistemi S.P.A. Interferometer for measurements of optical properties in bulk samples
US6201608B1 (en) * 1998-03-13 2001-03-13 Optical Biopsy Technologies, Inc. Method and apparatus for measuring optical reflectivity and imaging through a scattering medium
NL1009366C2 (nl) 1998-06-10 1999-12-13 Stichting Tech Wetenschapp Interferometer.

Also Published As

Publication number Publication date
ATE253722T1 (de) 2003-11-15
NL1009366C2 (nl) 1999-12-13
ES2205867T3 (es) 2004-05-01
EP1090268B1 (de) 2003-11-05
JP2002517743A (ja) 2002-06-18
EP1090268A1 (de) 2001-04-11
US6577400B1 (en) 2003-06-10
DE69912608T2 (de) 2004-09-23
AU4293799A (en) 1999-12-30
WO1999064817A1 (en) 1999-12-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee