DE69730524D1 - Polieren mittels schleifflüssigkeitsstrahl - Google Patents
Polieren mittels schleifflüssigkeitsstrahlInfo
- Publication number
- DE69730524D1 DE69730524D1 DE69730524T DE69730524T DE69730524D1 DE 69730524 D1 DE69730524 D1 DE 69730524D1 DE 69730524 T DE69730524 T DE 69730524T DE 69730524 T DE69730524 T DE 69730524T DE 69730524 D1 DE69730524 D1 DE 69730524D1
- Authority
- DE
- Germany
- Prior art keywords
- medium
- abrasive
- jet
- polishing
- chemical bonds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title abstract 3
- 239000007788 liquid Substances 0.000 title 1
- 238000000034 method Methods 0.000 abstract 2
- 230000009969 flowable effect Effects 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 238000004064 recycling Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C11/00—Selection of abrasive materials or additives for abrasive blasts
- B24C11/005—Selection of abrasive materials or additives for abrasive blasts of additives, e.g. anti-corrosive or disinfecting agents in solid, liquid or gaseous form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/06—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for producing matt surfaces, e.g. on plastic materials, on glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
- B24C1/083—Deburring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
- B24C1/086—Descaling; Removing coating films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C11/00—Selection of abrasive materials or additives for abrasive blasts
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Disintegrating Or Milling (AREA)
- Polarising Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US627226 | 1996-03-01 | ||
| US08/627,226 US5964644A (en) | 1996-03-01 | 1996-03-01 | Abrasive jet stream polishing |
| PCT/US1997/003316 WO1997031752A1 (en) | 1996-03-01 | 1997-02-26 | Abrasive jet stream polishing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69730524D1 true DE69730524D1 (de) | 2004-10-07 |
| DE69730524T2 DE69730524T2 (de) | 2005-09-15 |
Family
ID=24513763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69730524T Expired - Lifetime DE69730524T2 (de) | 1996-03-01 | 1997-02-26 | Polieren mittels schleifflüssigkeitsstrahl |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US5964644A (de) |
| EP (1) | EP0956180B1 (de) |
| AT (1) | ATE275023T1 (de) |
| AU (1) | AU724229B2 (de) |
| CA (1) | CA2283131C (de) |
| DE (1) | DE69730524T2 (de) |
| WO (1) | WO1997031752A1 (de) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2775919B1 (fr) * | 1998-03-13 | 2000-06-02 | Virsol | Procede de traitement "mecano-chimique" d'un materiau |
| US6273788B1 (en) * | 1999-07-23 | 2001-08-14 | General Electric Company | Sustained surface scrubbing |
| DE19953131A1 (de) * | 1999-11-04 | 2001-08-02 | Bosch Gmbh Robert | Verfahren und Vorrichtung zum Kantenverrunden |
| US6502442B2 (en) * | 2000-05-11 | 2003-01-07 | University Of Maryland Baltimore County | Method and apparatus for abrasive for abrasive fluid jet peening surface treatment |
| US6562090B1 (en) * | 2000-08-28 | 2003-05-13 | Hercules Incorporated | Fluid abrasive suspension for use in dentifrices |
| US6705925B1 (en) * | 2000-10-20 | 2004-03-16 | Lightwave Microsystems | Apparatus and method to dice integrated circuits from a wafer using a pressurized jet |
| US20030032370A1 (en) * | 2001-04-10 | 2003-02-13 | Balcar Gerald P. | Process for reclaiming mirror cullet and production of a powdered glass |
| EP1317995A1 (de) * | 2001-12-05 | 2003-06-11 | Siemens Aktiengesellschaft | Verfahren und Vorrichtung zur Glättung der Oberfläche einer Gasturbinenschaufel |
| WO2004004973A1 (de) * | 2002-07-03 | 2004-01-15 | Siemens Aktiengesellschaft | Verfahren zum hydro-erosiven verrunden einer kante eines bauteiles und verwendung hierzu |
| JP2004082240A (ja) * | 2002-08-26 | 2004-03-18 | Minebea Co Ltd | ステッピングモータのステータスタックおよびロータスタックの仕上げ加工方法 |
| US7799141B2 (en) * | 2003-06-27 | 2010-09-21 | Lam Research Corporation | Method and system for using a two-phases substrate cleaning compound |
| US7648584B2 (en) * | 2003-06-27 | 2010-01-19 | Lam Research Corporation | Method and apparatus for removing contamination from substrate |
| US20150040941A1 (en) * | 2003-12-23 | 2015-02-12 | Lam Research Corporation | Method and Apparatus for Cleaning A Semiconductor Substrate |
| WO2006007554A2 (en) * | 2004-07-01 | 2006-01-19 | Extrude Hone Corporation | Abrasive machining media containing thermoplastic polymer |
| EP1645363A1 (de) * | 2004-10-05 | 2006-04-12 | Siemens Aktiengesellschaft | Verfahren und Vorrichtung zum Glätten der Oberfläche eines Bauteils |
| DE102005006049A1 (de) * | 2005-02-10 | 2006-08-31 | Mannesmann Plastics Machinery Gmbh | Verfahren und Vorrichtung zum Polieren von kunststoffverarbeitenden Schnecken |
| WO2008127493A1 (en) * | 2007-01-29 | 2008-10-23 | Tosoh Smd, Inc. | Ultra smooth face sputter targets and methods of producing same |
| EP2132001B1 (de) | 2007-02-23 | 2014-10-01 | TGC Technologie- Beteiligungsgesellschaft mbH | Verfahren zum schleifen und polieren von holzwerkstoffen |
| JP2011020212A (ja) * | 2009-07-15 | 2011-02-03 | Sharp Corp | 基板の加工装置および基板の加工方法、並びに加工基板の製造方法 |
| DE102009043697A1 (de) | 2009-10-01 | 2011-04-07 | Alstom Technology Ltd. | Verfahren zum Bearbeiten von Werkstücken mittels eines unter hohem Druck aus einer Düse austretenden schleifmittelhaltigen Wasserstrahls, Wasserstrahlanlage zur Durchführung des Verfahrens sowie Anwendung des Verfahrens |
| AU2010314994B2 (en) | 2009-11-09 | 2016-10-06 | Spotlight Technology Partners Llc | Fragmented hydrogels |
| WO2011057131A1 (en) | 2009-11-09 | 2011-05-12 | Spotlight Technology Partners Llc | Polysaccharide based hydrogels |
| DE102009055679A1 (de) * | 2009-11-25 | 2011-05-26 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren zum Aufrauhen einer Bauteiloberfläche, insbesondere einer Lauffläche eines Zylinders eines Verbrennungsmotors |
| CN102101270B (zh) * | 2010-12-22 | 2013-01-30 | 超晶科技有限公司 | 一种水射流抛光工艺 |
| US20130104615A1 (en) * | 2011-04-20 | 2013-05-02 | Thomas J. Butler | Method and apparatus for peening with liquid propelled shot |
| US20130084190A1 (en) * | 2011-09-30 | 2013-04-04 | General Electric Company | Titanium aluminide articles with improved surface finish and methods for their manufacture |
| US20130130597A1 (en) * | 2011-11-21 | 2013-05-23 | James William Brown | Glass treatment apparatus and methods of treating glass |
| US9115417B2 (en) * | 2012-04-05 | 2015-08-25 | United Technologies Corporation | Liquid drop peening method and apparatus therefor |
| JP6022862B2 (ja) * | 2012-05-08 | 2016-11-09 | 株式会社不二製作所 | 硬質脆性基板の切り出し方法及び切り出し装置 |
| CA2844084A1 (en) * | 2013-03-01 | 2014-09-01 | Integrated Protective Coatings, Inc. | Apparatus and process for nickel plating and sealing |
| US9459407B2 (en) * | 2013-03-15 | 2016-10-04 | Ofs Fitel, Llc | Ring combiner |
| FR3035607B1 (fr) * | 2015-04-30 | 2017-04-28 | Saint-Gobain Centre De Rech Et D'Etudes Europeen | Procede de modification de l'aspect d'une surface |
| JP6350384B2 (ja) * | 2015-05-11 | 2018-07-04 | 信越半導体株式会社 | 研削用砥石 |
| WO2018064284A1 (en) | 2016-09-30 | 2018-04-05 | Novaflux, Inc. | Compositions for cleaning and decontamination |
| CN108555698B (zh) * | 2018-01-31 | 2020-02-21 | 湖南科技大学 | 一种高效超精密剪切增稠-化学协同抛光方法 |
| WO2019195403A1 (en) | 2018-04-03 | 2019-10-10 | Novaflux, Inc. | Cleaning composition with superabsorbent polymer |
| EP3632618B1 (de) * | 2018-10-04 | 2021-03-10 | Politecnico di Milano | Abrasive wasserstrahlschneidemaschine und -verfahren, sowie zusammensetzung mit pulverförmigen abrasiven partikeln |
| JP7452963B2 (ja) * | 2019-09-19 | 2024-03-19 | 株式会社フジミインコーポレーテッド | ウェットブラスト用スラリー |
| US12064495B2 (en) | 2019-10-03 | 2024-08-20 | Protegera, Inc. | Oral cavity cleaning composition, method, and apparatus |
| US11918677B2 (en) | 2019-10-03 | 2024-03-05 | Protegera, Inc. | Oral cavity cleaning composition method and apparatus |
| JP7162265B2 (ja) * | 2019-10-07 | 2022-10-28 | 株式会社サーフテクノロジー | 微小凹凸形成方法及び粉体接触部材 |
| TWI742924B (zh) * | 2020-11-13 | 2021-10-11 | 國立勤益科技大學 | 自動擠膏拋光刀把 |
| CN114734307B (zh) * | 2022-06-13 | 2022-09-02 | 中国航发上海商用航空发动机制造有限责任公司 | 具有转弯结构的微细内流道的表面光整方法 |
| US20240246197A1 (en) * | 2023-01-25 | 2024-07-25 | The Guyson Corporation Of U.S.A. | Surface roughness blast specimen for profilometer verification |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3262234A (en) * | 1963-10-04 | 1966-07-26 | Int Rectifier Corp | Method of forming a semiconductor rim by sandblasting |
| US4195450A (en) * | 1975-11-18 | 1980-04-01 | Josef Korb | Process for treating surfaces by means of a jet of liquid |
| KR930008692B1 (ko) * | 1986-02-20 | 1993-09-13 | 가와사끼 쥬고교 가부시기가이샤 | 어브레시브 워터 제트 절단방법 및 장치 |
| US4733503A (en) * | 1986-05-01 | 1988-03-29 | Airsonics License Partnership | Abrasive jet machining |
| US4827679A (en) * | 1987-11-24 | 1989-05-09 | Ltv Aerospace & Defense Company | Fluid jet cutting system with self orienting catcher |
| US4955164A (en) * | 1989-06-15 | 1990-09-11 | Flow Research, Inc | Method and apparatus for drilling small diameter holes in fragile material with high velocity liquid jet |
| US4937985A (en) * | 1989-09-25 | 1990-07-03 | Possis Corporation | Abrasive waterjet receiver |
| EP0445103A3 (en) * | 1990-02-27 | 1992-10-21 | Boehler Gesellschaft M.B.H. | Method and device for feeding particles to an abrasive cutting device |
| GB9020204D0 (en) * | 1990-09-15 | 1990-10-24 | Pain B R K | Surface treatment |
| JP2883230B2 (ja) * | 1991-08-22 | 1999-04-19 | 新日本製鐵株式会社 | 鋼片の研削方法 |
| JPH06132273A (ja) * | 1992-10-19 | 1994-05-13 | Mitsubishi Electric Corp | ウエハ洗浄装置 |
| US5441549A (en) * | 1993-04-19 | 1995-08-15 | Minnesota Mining And Manufacturing Company | Abrasive articles comprising a grinding aid dispersed in a polymeric blend binder |
| US5527204A (en) * | 1993-08-27 | 1996-06-18 | Rhoades; Lawrence J. | Abrasive jet stream cutting |
| KR0132274B1 (ko) * | 1994-05-16 | 1998-04-11 | 김광호 | 웨이퍼 연마 설비 |
-
1996
- 1996-03-01 US US08/627,226 patent/US5964644A/en not_active Expired - Fee Related
-
1997
- 1997-02-26 WO PCT/US1997/003316 patent/WO1997031752A1/en not_active Ceased
- 1997-02-26 EP EP97907991A patent/EP0956180B1/de not_active Expired - Lifetime
- 1997-02-26 DE DE69730524T patent/DE69730524T2/de not_active Expired - Lifetime
- 1997-02-26 AT AT97907991T patent/ATE275023T1/de not_active IP Right Cessation
- 1997-02-26 AU AU19848/97A patent/AU724229B2/en not_active Ceased
- 1997-02-26 CA CA002283131A patent/CA2283131C/en not_active Expired - Fee Related
-
1999
- 1999-10-18 US US09/419,598 patent/US6288154B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CA2283131A1 (en) | 1997-09-04 |
| US5964644A (en) | 1999-10-12 |
| AU1984897A (en) | 1997-09-16 |
| AU724229B2 (en) | 2000-09-14 |
| DE69730524T2 (de) | 2005-09-15 |
| WO1997031752A1 (en) | 1997-09-04 |
| EP0956180B1 (de) | 2004-09-01 |
| ATE275023T1 (de) | 2004-09-15 |
| EP0956180A4 (de) | 2003-01-15 |
| EP0956180A1 (de) | 1999-11-17 |
| US6288154B1 (en) | 2001-09-11 |
| CA2283131C (en) | 2005-04-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |